Multifunctional metering test platform

Abstract

The invention relates to a multifunctional metering test platform, and belongs to the field of metering test device design, and the platform comprises a vacuum magnetic screen structure which comprises a vacuum container, a vacuum valve, a heat insulation firmware, a magnetic screen outer chamber, and a magnetic screen inner chamber; the dust removal module is fixedly arranged in the vacuum magnetic screen structure and is used for carrying out air shower dust removal treatment on devices on the sample table by utilizing an air duct; the refrigeration temperature control module is fixedly mounted on the vacuum container so as to control the temperature of the sample table; and the console is fixedly mounted on the outer side of the vacuum magnetic screen structure and is used for uniformly controlling the states of all the samples. According to the invention, corresponding treatment functions of cooling, temperature control, electromagnetic shielding, dust removal and the like can be realized according to working requirements of different samples.

Description

Technical Field

[0001] The invention relates to the field of measurement and testing device design, and in particular to a multifunctional measurement and testing platform. Background Art

[0002] In engineering applications, such as some electrical systems, the core components of the system have extremely high requirements for the working environment. Taking the quantum voltage calibration system as an example, its core chip needs to be in a constant low temperature and zero magnetic field environment to normally output quantum voltage signals.

[0003] In addition, in the detection system, such as in the detection of special devices, it is necessary to maintain a constant temperature of the environment while maintaining the vacuum and dust-free environment. For example, in the field of quantum voltage measurement, the test platform requires a low-temperature zero-magnetic environment, while in the field of optical measurement, its test platform needs to focus on dust-free issues. In response to different measurement needs, the current approach is to customize the test platform according to the needs. The customized platform is highly targeted, but the function is relatively single. The existing technology has not yet developed a measurement test platform with multiple functions. On the one hand, in the measurement test experiment where multiple benchmarks cooperate with each other, it is necessary to configure the carrier device corresponding to the benchmark, which increases the experimental cost. On the other hand, the measurement platforms customized for different needs cannot be used interchangeably. Faced with the problem of mixed measurement tests requiring multiple benchmarks, the required test platform construction is relatively complicated.

[0004] In view of the above problems, there is no solution that can solve the above problems well in the existing technology. Summary of the invention

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A multifunctional measurement and testing platform, characterized by comprising:

[0007] A vacuum magnetic shield structure, comprising a vacuum container, a vacuum valve, a heat-insulating fixture, a magnetic shield outer chamber, and a magnetic shield inner chamber, wherein the vacuum valve is fixedly mounted on the outer surface of the vacuum container, the heat-insulating fixture is fixedly mounted inside the vacuum container, the magnetic shield outer chamber is fixedly mounted inside the vacuum container, and the magnetic shield inner chamber is sleeved inside the magnetic shield outer chamber;

[0008] A dust removal module, which is placed in the vacuum container and embedded in the air duct formed between the magnetic shield outer chamber and the magnetic shield inner chamber;

[0009] A refrigeration temperature control module, which is fixedly mounted on the vacuum container and extends through the vacuum container to be fixedly connected to the magnetic shield inner chamber;

[0010] A control console is fixedly mounted on the outside of the vacuum container; an operator controls the dust removal module and the refrigeration temperature control module through the control console, and monitors the vacuum degree, temperature and magnetic field inside the vacuum magnetic shield structure through the control console.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] In order to overcome the problem that there is no metrology and testing platform with multiple functions in the prior art, the multifunctional metrology and testing platform provided by the present invention constructs a dust-free and vacuum environment around the sample platform, and on this basis, performs artificial cooling, temperature control, and magnetic shielding treatment on the platform. It can achieve the corresponding processing functions of cooling, temperature control, electromagnetic shielding, and dust removal according to the working requirements of different types of samples. Specifically:

[0013] (1) Combining vacuum with magnetic shield structure to solve the interference of air pressure and stray magnetic field on the sample chamber from a structural perspective;

[0014] (2) Introduce the air shower structure into the measurement test platform and add the function of dust removal for the samples;

[0015] (3) The multifunctional measurement and testing platform of the present invention includes constant temperature, vacuum, zero magnetism and dust-free functions, and can meet a wider range of measurement and testing needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structural cross-section of a multifunctional measurement and testing platform of the present invention, wherein 100 is a vacuum magnetic shield structure, 130 is a control console, 110 is a dust removal module, and 120 is a refrigeration temperature control module;

[0017] Figure 2 It is a schematic diagram of the cross-section of the vacuum magnetic shield structure, wherein 101 is a vacuum container, 102 is a vacuum valve, 103 is an insulation fixture, 104 is a magnetic shield outer chamber, and 105 is a magnetic shield inner chamber;

[0018] Figure 3 It is a schematic diagram of the cross-section of the dust removal module 110, wherein 104 is a magnetic shield outer chamber, 105 is a magnetic shield inner chamber, 111 is a fan, 112 is a nozzle, 113 is a high-efficiency filter, 114 is a primary filter, 115 is an air duct, and 116 is a connector;

[0019] Figure 4 It is a schematic cross-sectional view of the structure of the refrigeration temperature control module 120, wherein 101 is a vacuum container, 121 is a sample table, and 122 is a refrigerator;

[0020] Figure 5 for Figure 4A partial enlarged schematic diagram, wherein 121 is a sample stage, 122 is a refrigerator, 123 is a temperature meter, and 124 is a heater. DETAILED DESCRIPTION

[0021] In order to enable the reader to better understand the design purpose of the present method, the following specific embodiments are provided so that the reader can vividly understand the structure, structural composition, working principle and technical effect involved in the present method. However, it should be noted that the following embodiments are not limitations on the technical solution of the present method. While analyzing and understanding the various embodiments, those skilled in the art can combine existing knowledge to make a series of deformations and equivalent substitutions to the technical solution provided by the present method, and the new technical solution obtained by the deformation and equivalent substitution is also included in the present method. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0022] like Figure 1 As shown, a multifunctional metrology test platform is used to construct the working environment of electrical devices. The dust removal module 110 is fixedly installed in the vacuum magnetic shield structure 100, and the refrigeration temperature control module 120 penetrates the vacuum magnetic shield structure 100. A control console 130 is fixedly installed outside the vacuum magnetic shield structure 100. The operator can control the dust removal module 110 and the refrigeration temperature control module 120 through the control console 130, and can monitor the vacuum degree, temperature and magnetic field inside the vacuum magnetic shield structure 100 through the control console 130. This application combines vacuum with magnetic shield structure to solve the interference of air pressure and stray magnetic field on the test platform from a structural perspective.

[0023] like Figure 2 As shown, the vacuum magnetic shield structure 100 includes: a vacuum container 101, a vacuum valve 102, an insulating fixture 103, a magnetic shield outer chamber 104 and a magnetic shield inner chamber 105. The vacuum valve 102 is fixedly mounted on the vacuum container 101, and is used to evacuate the interior of the vacuum container 101. The magnetic shield outer chamber 104 is installed in the vacuum container 101, and to prevent heat leakage, the two are fixedly connected by the insulating fixture 103. The insulating fixture 103 has the appearance of a hollow skeleton, and is padded under the magnetic shield outer chamber 104 to isolate the magnetic shield outer chamber 104 from the vacuum container 101. The magnetic shield inner chamber 105 is mounted in the magnetic shield outer chamber 104, forming a double-layer magnetic shield structure to reduce the influence of the earth's magnetic field and the stray magnetic field of the surrounding environment.

[0024] like Figure 3As shown, the dust removal module 110 includes a fan 111, a nozzle 112, a high-efficiency filter 113, a primary filter 114, and a connector 116. The fan 111 is fixedly connected to the connector 116, and both are fixedly installed between the magnetic shield outer chamber 104 and the magnetic shield inner chamber 105. The nozzle 112 is fixedly installed on the side wall of the magnetic shield inner chamber 105. The high-efficiency filter 113 is placed in the air duct 115, and is located on the same side as the nozzle 112 and is fixedly installed at the lower end of the side wall of the magnetic shield inner chamber 105. The primary filter 114 is placed in the air duct 115 and is mounted on the outside of the nozzle 112.

[0025] Among them, the blowing port of the fan 111 is arranged corresponding to the air duct 115, the nozzle 112 of the fan 111 corresponds to the air duct 115, and the nozzle 112 is fixedly installed at the upper end of the magnetic shield inner chamber 105. After the fan 111 is started, the airflow passes through the air duct 115 to penetrate the nozzle 112 installed at the upper end of the magnetic shield inner chamber, and forms a loop through the mesh at the lower end of the magnetic shield inner chamber 105, that is, the reflux hole. A high-efficiency filter 113 is arranged outside the mesh at the lower end of the magnetic shield inner chamber 105, and a primary filter 114 is arranged on the periphery of one side of the nozzle 112 placed in the air duct 115. The dust inside the magnetic shield inner chamber 105 is removed by double-layer filtration. The air shower structure is introduced into the test platform, and the function of removing dust from the device is added.

[0026] like Figure 4-5 As shown, the refrigeration temperature control module 120 includes: a sample stage 121, a refrigerator 122, a thermometer 123, and a heater 124. The refrigerator 122 is fixedly mounted on the vacuum container 101 and penetrates into the vacuum container 101. The sample stage 121 is directly fixedly mounted on the cold end of the refrigerator 122. A groove is provided at the bottom of the sample stage 121 for placing the thermometer 123 and the heater 124. Through the monitoring of the control console 130, the temperature of the sample stage 121 is closed-loop controlled to ensure that the devices stored on the sample stage 121 are in the optimal working temperature zone.

[0027] In summary, the present invention relates to a multifunctional metrology test platform, including: a vacuum magnetic shield structure 110, the vacuum magnetic shield structure 100 includes a vacuum container 101, a vacuum valve 102, an insulation fixture 103, a magnetic shield outer chamber 104, and a magnetic shield inner chamber 105; a dust removal module 110, the dust removal module 110 is fixedly installed inside the vacuum magnetic shield structure 100, and the air duct 115 in the device structure is used to perform air shower dust removal on the device installed on the sample stage; a refrigeration temperature control module 120, the refrigeration temperature control module 120 is fixedly installed on the vacuum container 101 to control the temperature of the sample stage; a control console 130, the control console 130 is fixedly installed on the outside of the vacuum magnetic shield structure 100, and the device tests of all samples are uniformly controlled. The present invention can realize the functions of corresponding processing such as cooling, temperature control, electromagnetic shielding, and dust removal for the working requirements of different types of samples.

Claims

1. A multifunctional measurement and testing platform, characterized in that: include: A vacuum magnetic shield structure (100), the vacuum magnetic shield structure (100) comprising a vacuum container (101), a vacuum valve (102), a heat-insulating fixture (103), a magnetic shield outer chamber (104), and a magnetic shield inner chamber (105), the vacuum valve (102) being fixedly mounted on the outer surface of the vacuum container (101), the heat-insulating fixture (103) being fixedly mounted inside the vacuum container (101), the magnetic shield outer chamber (104) being fixedly mounted inside the vacuum container (101), and the magnetic shield inner chamber (105) being sleeved inside the magnetic shield outer chamber (104); A dust removal module (110), the dust removal module (110) being placed in the vacuum container (101) and embedded in an air duct (115) formed between the magnetic shield outer chamber (104) and the magnetic shield inner chamber (105); a refrigeration temperature control module (120), the refrigeration temperature control module (120) being fixedly mounted on the vacuum container (101) and extending through the vacuum container (101) to be fixedly connected to the magnetic shield inner chamber (105); A control console (130), the control console (130) being fixedly mounted on the outside of the vacuum container (101); an operator controls the dust removal module (110) and the refrigeration temperature control module (120) via the control console (130), and monitors the vacuum degree, temperature and magnetic field inside the vacuum magnetic shield structure (100) via the control console (130).

2. A multifunctional measurement and testing platform according to claim 1, characterized in that: The dust removal module (110) comprises a fan (111), a nozzle (112), a high-efficiency filter (113), a primary filter (114), and a connecting piece (116); the fan (111) and the connecting piece (116) are fixedly connected and are fixedly mounted between the magnetic shield outer chamber (104) and the magnetic shield inner chamber (105); the nozzle (112) is fixedly mounted on the side wall of the magnetic shield inner chamber (105); the high-efficiency filter (113) is disposed in the air duct (115), is located on the same side as the nozzle (112), and is fixedly mounted at the lower end of the side wall of the magnetic shield inner chamber (105); and the primary filter (114) is disposed in the air duct (115) and is sleeved on the outside of the nozzle (112).

3. A multifunctional measurement and testing platform according to claim 1, characterized in that: The refrigeration temperature control module (120) comprises a sample stage (121), a refrigerator (122), a temperature detector (123), and a heater (124); the sample stage (121) is fixedly mounted in the magnetic shield inner chamber (105); the refrigerator (122) is fixedly mounted on the vacuum container (101) and extends through and into the vacuum container (101) and is fixedly connected to the sample stage (121); and the temperature detector (123) and the heater (124) are fixedly mounted on the bottom of the sample stage (121).

4. A multifunctional measurement and testing platform according to claim 1, characterized in that: To prevent heat leakage, the magnetic shield outer chamber 104 and the vacuum container 101 are fixedly connected by a heat insulating fastener 103 .

5. The multifunctional measurement and testing platform according to claim 1, characterized in that: The heat-insulating fixture (103) has an appearance of a hollow frame and is cushioned under the magnetic shield outer chamber (104) to isolate the magnetic shield outer chamber (104) from the vacuum container (101).

6. The multifunctional measurement and testing platform according to claim 1, characterized in that: The air duct (115) is a gap between the side walls of the magnetic shield outer chamber (104) and the magnetic shield inner chamber (105).

7. A multifunctional measurement and testing platform according to claim 2, characterized in that: The air outlet of the fan (111) is arranged corresponding to the air duct (115).

8. The multifunctional measurement and testing platform according to claim 2, characterized in that: The lower ends of the two opposing side walls of the magnetic shield inner chamber (105) are provided with a reflux hole, where the high efficiency filter (113) is fixedly mounted, and the upper ends of the two opposing side walls are provided with an air inlet hole, where the nozzle (112) is fixedly mounted.

9. A multifunctional measurement and testing platform according to claim 8, characterized in that: The high efficiency filter (113) is placed outside the reflux hole.

10. The multifunctional measurement and testing platform according to claim 3, characterized in that: The bottom of the sample stage (121) is provided with a groove, and the temperature measuring device (123) and the heater (124) are both fixedly mounted in the groove.

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