Method and device for controlling fork area in semiconductor handling system

Abstract

The present application relates to a method and device for controlling a fork area of ​​a semiconductor handling system. The method includes: receiving a right of way application for a target fork area to be passed sent by each semiconductor handling equipment, the right of way application carrying a semiconductor handling equipment identification corresponding to each semiconductor handling equipment; obtaining each target planning path corresponding to each semiconductor handling equipment identification; based on each target planning path, reviewing the corresponding right of way application; if the review result of the right of way application is passed, generating a right of way approval result corresponding to the right of way application; feeding back each right of way approval result to the corresponding semiconductor handling equipment, the right of way approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target fork area. The use of this method can improve the overall handling efficiency.

Description

Technical Field

[0001] The present application relates to the field of semiconductor handling technology, and in particular to a method and device for controlling a fork area in a semiconductor handling system. Background Art

[0002] In semiconductor factories, AMHS (Automatic Material Handling System) is an automatic material handling system used to transport semiconductor materials such as wafer boxes and SMIF PODs. It plays an important role in improving production efficiency, reducing costs and ensuring product quality. The most important components of the AMHS system include the track system, the semiconductor handling equipment system, the scheduling system that can cluster the semiconductor handling equipment, and the road control system for semiconductor handling equipment when crossing the fork. All systems work together to ensure that dozens or even hundreds of semiconductor handling equipment can operate safely, orderly and efficiently in the same track system to ensure the completion of production tasks.

[0003] In traditional technology, the track has several branch control areas, and the tracks in the branch control areas will intersect. Semiconductor handling equipment can merge or diverge at the intersection. In order to prevent the semiconductor handling equipment from colliding or rear-ending here, the semiconductor handling equipment needs to follow certain travel rules and waiting logic here.

[0004] However, current semiconductor handling equipment needs to follow relatively complex travel rules and waiting logic in the fork control area, thereby reducing the overall handling efficiency of the semiconductor handling equipment. Summary of the invention

[0005] Based on this, it is necessary to provide a branch area control method, device, computer equipment, computer readable storage medium and computer program product for a semiconductor handling system that can improve the overall handling efficiency in response to the above technical problems.

[0006] In a first aspect, the present application provides a method for controlling a fork area in a semiconductor handling system, wherein the semiconductor handling system includes a fork control system and semiconductor handling equipment. The method is applied to the fork control system, and the method includes:

[0007] Receiving a right-of-way application for a target fork area to be passed through, sent by each semiconductor handling equipment, wherein the right-of-way application carries a semiconductor handling equipment identification corresponding to each semiconductor handling equipment;

[0008] Acquire each target planning path corresponding to each semiconductor handling equipment identifier;

[0009] Based on each of the target planning paths, review the corresponding right-of-way application;

[0010] If the review result of the road right application is passed, generating a road right approval result corresponding to the road right application;

[0011] The right-of-way approval results are fed back to the corresponding semiconductor handling equipment, and the right-of-way approval results are used to indicate whether the semiconductor handling equipment has the authority to pass through the corresponding target branch area.

[0012] In one embodiment, the reviewing of the corresponding right-of-way application based on each of the target planning paths includes:

[0013] Matching the branch area information corresponding to the track system with the target planned path to obtain each branch area passed by each semiconductor handling equipment and the time of passing each branch area;

[0014] Based on the semiconductor handling equipment identification, each branch road area passed by each semiconductor handling equipment and the time of passing each branch road area are compared with the right of way application;

[0015] When each branch area passed by the semiconductor handling equipment is the same as the target branch area corresponding to the right of way application, and the time when the semiconductor handling equipment passes through each branch area is the same as the time when it passes through the target branch area corresponding to the right of way application, the review result of the right of way application is determined to be passed.

[0016] In one embodiment, generating a road right approval result corresponding to the road right application includes:

[0017] Obtain target semiconductor handling equipment identifiers of target semiconductor handling equipment corresponding to each fork entrance of the target fork area and the task priority of the target semiconductor handling equipment; and perform first priority sorting on each target semiconductor handling equipment identifier based on the task priority of each target semiconductor handling equipment;

[0018] A road right approval result is obtained based on the first priority sorting result of each of the target semiconductor handling equipment identifiers.

[0019] In one embodiment, after performing a first priority sorting on the semiconductor handling equipment identifiers based on the task priority of each semiconductor handling equipment, the method further includes:

[0020] When the task priorities of the target semiconductor handling equipment in the target fork area are all the same, obtaining a first distance between each target semiconductor handling equipment to be passed through each fork entrance of the target fork area and the corresponding fork entrance and a driving route type of each target semiconductor handling equipment;

[0021] Correcting the first distance based on the driving route type of each of the target semiconductor handling equipment to obtain a second distance;

[0022] Based on the second distance, the target semiconductor handling equipment identifiers having the same task priority are sorted by a first distance;

[0023] The road right approval result is obtained based on the first priority sorting result of each target semiconductor handling equipment identifier, including:

[0024] A right of way approval result is obtained based on the first distance sorting result of each of the target semiconductor handling equipment identifiers.

[0025] In one embodiment, generating a road right approval result corresponding to the road right application includes:

[0026] Obtaining a target semiconductor handling equipment identifier of a target semiconductor handling equipment corresponding to each fork entrance of the target fork area;

[0027] Detecting whether the target semiconductor handling equipment at each fork entrance of the target fork area belongs to a semiconductor handling equipment group;

[0028] In a case where the target semiconductor handling equipment at the fork entrance of the target fork area belongs to a semiconductor handling equipment group, obtaining the task priority of the semiconductor handling equipment group;

[0029] When the target semiconductor handling equipment at the fork entrance of the target fork area does not belong to a semiconductor handling equipment group, obtaining the task priority of the target semiconductor handling equipment;

[0030] Based on the acquired task priorities of the target semiconductor handling equipment and the task priorities of the semiconductor handling equipment group, performing a second priority sorting on the target semiconductor handling equipment identifiers and the semiconductor handling equipment group;

[0031] Based on the target semiconductor handling equipment identification and the second priority sorting result of the semiconductor handling equipment group, the road right approval results corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group are obtained; wherein, each semiconductor handling equipment belonging to the same semiconductor handling equipment group passes through the target branch area as a whole.

[0032] In one embodiment, after performing a second priority sorting on the target semiconductor handling equipment identifier and the semiconductor handling equipment group based on the acquired task priority of each target semiconductor handling equipment and the task priority of the semiconductor handling equipment group, the method further includes:

[0033] When the task priority of the target semiconductor handling equipment in the target fork area and the task priority of the semiconductor handling equipment group are the same, obtaining a third distance between each semiconductor handling equipment group to pass through the target fork area and the corresponding fork entrance, and obtaining a first distance between the semiconductor handling equipment to pass through the target fork area and the corresponding fork entrance;

[0034] Correcting the third distance of the semiconductor handling equipment group to obtain a fourth distance, and correcting the first distance of the target semiconductor handling equipment to obtain a second distance;

[0035] Based on the fourth distance and the second distance, each of the semiconductor handling equipment identifiers and the semiconductor handling equipment group is sorted by the second distance to obtain the sorting result;

[0036] The obtaining of the road right approval result corresponding to each of the target semiconductor handling equipment and the semiconductor handling equipment group based on the target semiconductor handling equipment identifier and the second priority sorting result of the semiconductor handling equipment group includes:

[0037] Based on the target semiconductor handling equipment identifier and the second distance sorting result of the semiconductor handling equipment group, the road right approval result corresponding to each of the target semiconductor handling equipment and the semiconductor handling equipment group is obtained.

[0038] In one embodiment, before obtaining the task priority of the semiconductor handling equipment group, the method further includes:

[0039] Detect whether the semiconductor handling equipment corresponding to each of the road right applications satisfies the vehicle following mode, in which each of the semiconductor handling equipment satisfies the following conditions: each of the semiconductor handling equipment applies for the road right of the same target fork area, each of the semiconductor handling equipment enters the target fork area from the same fork entrance, the interval between each of the semiconductor handling equipment is not greater than the distance threshold, the driving route type of each of the semiconductor handling equipment is straight, and each of the semiconductor handling equipment is an adjacent semiconductor handling equipment;

[0040] In the case where there are semiconductor handling equipment that satisfy the following mode, each semiconductor handling equipment that satisfies the following mode is regarded as a semiconductor handling equipment group, and the highest task priority of each semiconductor handling equipment in the semiconductor handling equipment group is regarded as the task priority of the semiconductor handling equipment group, and the distance between the semiconductor handling equipment closest to the branch entrance in the semiconductor handling equipment group and the branch entrance is regarded as the distance between the semiconductor handling equipment group and the branch entrance.

[0041] In one embodiment, the first priority sorting of the target semiconductor handling equipment identifiers based on the task priority of each target semiconductor handling equipment includes:

[0042] In the case where the task priority of the first semiconductor handling equipment located at the first fork entrance is higher than the task priority of the target semiconductor handling equipment at the first fork entrance, and the task priority of the first semiconductor handling equipment is higher than the task priority of the target semiconductor handling equipment at the second fork entrance of the target fork area, and the task priority of the target semiconductor handling equipment at the second fork entrance is higher than the task priority of the target semiconductor handling equipment at the first fork entrance, the task priority of the second semiconductor handling equipment is replaced with the task priority of the first semiconductor handling equipment; wherein the distance between the semiconductor handling equipment corresponding to the first semiconductor handling equipment identifier and the first fork entrance is greater than the distance between the semiconductor handling equipment corresponding to the target semiconductor handling equipment identifier and the first fork entrance, and the distance between the semiconductor handling equipment corresponding to the second semiconductor handling equipment identifier and the first fork entrance;

[0043] The first priority order is performed on each of the semiconductor handling equipment identifiers after the task priority is replaced.

[0044] In one embodiment, the method further comprises:

[0045] Determine the fork exit and fork entrance passed by each of the target semiconductor handling equipment;

[0046] In the case that the fork road exits and fork road entrances passed by the target semiconductor handling equipment do not overlap, generating a road right approval result regarding a successful road right application for the target fork road area;

[0047] In the case where the branch exits and branch entrances passed by the target semiconductor handling equipment overlap, the step of obtaining the target semiconductor handling equipment identifications of the target semiconductor handling equipment corresponding to the branch entrances of the target branch area is continued.

[0048] In one embodiment, the method further comprises:

[0049] The road right occupancy information is periodically uploaded to the scheduling system, and the road right occupancy information is used to perform target path planning for each semiconductor handling equipment in the scheduling system. The road right occupancy information includes normal road right occupancy information and abnormal road right occupancy information when the branch area is abnormally occupied.

[0050] In a second aspect, the present application further provides a method for controlling a fork area in a semiconductor handling system, wherein the semiconductor handling system includes a scheduling system, a fork control system, and semiconductor handling equipment. The method is applied to the scheduling system, and the method includes:

[0051] Receive task information issued by the business system, road right occupancy information sent by the fork road control system, and semiconductor handling equipment position and speed information sent by each semiconductor handling equipment;

[0052] Based on the task information, the road right occupancy information, and the position and speed information of each semiconductor handling equipment, path planning is performed to obtain a target planned path for each semiconductor handling equipment;

[0053] The target planned path is sent to the branch road control system and each of the semiconductor handling equipment respectively; the target planned path is used to instruct each of the semiconductor handling equipment to generate a road right application based on the target planned path, and send the road right application to the branch road control system, and the target planned path is also used to instruct the branch road control system to review the corresponding road right application based on each of the target planned paths; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each of the road right approval results is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch road area.

[0054] In one embodiment, the path planning based on the task information, the road right occupancy information, and the position and speed information of each semiconductor handling equipment to obtain a target planned path for each semiconductor handling equipment includes:

[0055] Based on the task information and the road right occupancy information, generating an initial planning path corresponding to each semiconductor handling equipment;

[0056] Based on the initial planned path, the position and speed information of each semiconductor handling equipment, a target planned path for each semiconductor handling equipment is obtained, and the target planned path includes the position of a semiconductor handling equipment at each moment.

[0057] In a third aspect, the present application further provides a fork area control device for a semiconductor handling system, wherein the semiconductor handling system includes a fork control system and a semiconductor handling device, and the device is applied to the fork control system, and the device includes:

[0058] A first receiving module is used to receive a right-of-way application for a target fork area to be passed through, sent by each semiconductor handling equipment, wherein the right-of-way application carries an identification of the semiconductor handling equipment;

[0059] A review module, used for obtaining each target planning path corresponding to each semiconductor handling equipment identifier; and reviewing the corresponding right of way application based on each target planning path;

[0060] A road right approval module, used for generating a road right approval result corresponding to the road right application when the review result of the road right application is passed;

[0061] The first sending module is used to feed back each of the road right approval results to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass through the corresponding target branch area.

[0062] In a fourth aspect, the present application further provides a fork area control device for a semiconductor handling system, wherein the semiconductor handling system includes a scheduling system, a fork control system, and a semiconductor handling device, and the device is applied to the scheduling system, and the device includes:

[0063] The second receiving module is used to receive the task information sent by the business system, the road right occupancy information sent by the fork road control system, and the semiconductor handling equipment position and speed information sent by each semiconductor handling equipment;

[0064] A path planning module, configured to perform path planning based on the task information, the road right occupancy information, and the position and speed information of each semiconductor handling device to obtain a target planned path for each semiconductor handling device;

[0065] The second sending module is used to send the target planned path to the branch road control system and each of the semiconductor handling equipment respectively; the target planned path is used to instruct each of the semiconductor handling equipment to generate a road right application based on the target planned path, and send the road right application to the branch road control system, and the target planned path is also used to instruct the branch road control system to review the corresponding road right application based on each of the target planned paths; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each of the road right approval results is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch road area.

[0066] In a fifth aspect, the present application further provides a computer device, comprising a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the method in any one of the above-mentioned embodiments when executing the computer program.

[0067] In a sixth aspect, the present application also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the method in any one of the above-mentioned embodiments.

[0068] In a seventh aspect, the present application also provides a computer program product, including a computer program, which implements the steps of the method in any one of the above-mentioned embodiments when executed by a processor.

[0069] The above-mentioned branch area control method, device, computer equipment, computer-readable storage medium and computer program product for a semiconductor handling system, after receiving the road right application for the target branch area to be passed sent by each semiconductor handling equipment, obtains each target planned path corresponding to the identifier of each semiconductor handling equipment; based on each target planned path, the corresponding road right application is reviewed; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each road right approval result is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch area. In this way, by first reviewing the road right application through the target planned path, and then performing road right control after the review is passed, on the one hand, it is ensured that the semiconductor handling equipment can operate according to the planned target planned path, and on the other hand, road right control in the branch area can ensure that the semiconductor handling equipment has no time and space conflicts in any section of the road, thereby improving the overall handling efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0070] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the drawings required for use in the embodiments of the present application or related technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0071] Figure 1 A diagram of an application environment of a method for controlling a fork area of ​​a semiconductor handling system in one embodiment;

[0072] Figure 2 A schematic flow chart of a method for controlling a fork area of ​​a semiconductor handling system in one embodiment;

[0073] Figure 3 A two-in and two-out branch area in one embodiment;

[0074] Figure 4 It is a flow chart of a method for controlling a fork area of ​​a semiconductor handling system in another embodiment;

[0075] Figure 5 A schematic flow chart of a method for controlling a fork area in a semiconductor handling system in yet another embodiment;

[0076] Figure 6 is a structural block diagram of a fork area control device for a semiconductor handling system in one embodiment;

[0077] Figure 7 It is a structural block diagram of a fork area control device for a semiconductor handling system in another embodiment;

[0078] Figure 8 FIG. 4 is a diagram showing the internal structure of a computer device in one embodiment. DETAILED DESCRIPTION

[0079] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0080] The fork area control method for a semiconductor handling system provided in the embodiment of the present application can be applied to Figure 1 In the application environment shown. AMHS mainly includes a track installed on the ceiling in a suspended manner, semiconductor handling equipment traveling on the track, and production machines, storage devices and other equipment arranged under or on the side of the track. The semiconductor handling equipment stops when it travels along the track to the target position, and can grab materials from the production machines, storage devices and other equipment, or place materials on the equipment. The track has interconnected straight track sections, curved track sections, and cross track sections (also called forks). The semiconductor handling equipment goes straight on the straight track section, changes the direction of travel on the curved track section, and merges or diverges in the fork area where the cross track section is located.

[0081] Among them, in AMHS, the business system communicates with the scheduling system (MSTC), and the scheduling system (MSTC) also communicates with each semiconductor handling equipment (OHT, Overhead Hoist Transfer) and the fork control system (TCU, Traffic Control Unit). The business system will send the task to the scheduling system, and each semiconductor handling equipment will periodically report its own position and speed information, and each fork control system will periodically report the road right occupancy information, so that the scheduling system can plan the path based on the task, the position and speed information of each semiconductor handling equipment, and the road right occupancy information, and obtain the target planning path of each semiconductor handling equipment. The scheduling system sends each target planning path to the corresponding semiconductor handling equipment to schedule the semiconductor handling equipment, that is, the semiconductor handling equipment will run in the track system according to the instructions of the scheduling system, grab the wafer box from the task starting point and place it at the task end point. Each semiconductor handling equipment is relatively independent based on the track to perform the corresponding task. After grabbing the wafer box, it will travel in the track system according to the path planned by the scheduling system.

[0082] A large number of semiconductor handling equipment are usually running on the track of AMHS. Therefore, during the driving process of semiconductor handling equipment, there may be a situation where two or more semiconductor handling equipment pass through the same intersection (fork area) in the track. Although the semiconductor handling equipment itself can be sensed by sensors to ensure that there is no collision when the semiconductor handling equipment meets, it is impossible to decide which semiconductor handling equipment passes first when arriving at the same fork area. The fork control system (TCU, Traffic Control Unit) in this application is used to control the right of way in the fork area. In AMHS, each semiconductor handling equipment also communicates with the fork control system. For example, the semiconductor handling equipment communicates with the fork control system via WIFI. In this way, the fork control system controls the access rights of each semiconductor handling equipment by judging the road conditions in the fork area, ensuring the efficient, stable and safe operation of the entire AMHS. It should be noted that the fork control system can include at least one, and each fork control system can be in charge of at least one fork area. In other embodiments, only one fork control system is included, and the one fork control system is used to control all fork areas. The present application does not provide a detailed description of the branch road control system. Each branch road control system mentioned below may refer to only a single branch road control system, or may refer to multiple branch road control systems, or may refer to all branch road control systems. No specific limitation is made here.

[0083] The fork control system in this application introduces fork control logic to ensure that semiconductor handling equipment has no time and space conflicts at any intersection, thereby improving the overall handling efficiency. Specifically, after receiving the road right application for the target fork area to be passed sent by each semiconductor handling equipment, the fork control system obtains each target planning path corresponding to the identifier of each semiconductor handling equipment; based on each target planning path, the corresponding road right application is reviewed; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each road right approval result is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target fork area. In this way, by first reviewing the road right application based on the target planning path, and then performing road right control after the review is passed, on the one hand, it is ensured that the semiconductor handling equipment can operate according to the planned target planning path, and on the other hand, road right control in the fork area can ensure that the semiconductor handling equipment has no time and space conflicts in any section of the road, thereby improving the overall handling efficiency.

[0084] Another point that needs to be explained is that in one of the optional embodiments, the semiconductor handling equipment involved in the present application can be an aerial transport vehicle (also known as a crane).

[0085] In an exemplary embodiment, Figure 2 As shown, a method for controlling a fork area in a semiconductor handling system is provided, and the method is applied to Figure 1 The fork road control system in the example is used to illustrate, including the following steps S202 to S208. Among them:

[0086] S202: receiving a right-of-way application for a target fork area to be passed through, sent by each semiconductor transport device, wherein the right-of-way application carries a semiconductor transport device identification corresponding to each semiconductor transport device.

[0087] The right-of-way application is an application for the right of way to the target fork area. Specifically, when the semiconductor handling equipment is about to pass through the target fork area, the semiconductor handling equipment sends a right-of-way application to the fork control system. The right-of-way application carries the semiconductor handling equipment identification and the target fork area identification of the target fork area to be passed, wherein the semiconductor handling equipment identification is used to uniquely characterize the semiconductor handling equipment applying for the right of way, and the target fork area identification is used to uniquely characterize the target fork area for which the semiconductor handling equipment applies for the right of way.

[0088] Optionally, the semiconductor handling equipment can determine the target turnout areas on the route to be passed within a preset time period based on the target planning path, and then apply for the access rights of the determined target turnout areas at one time. Optionally, the preset time period can be 2 seconds. In other embodiments, the preset time period can be other durations, which are not specifically limited here. In some optional embodiments, when the number of target turnout areas on the route to be passed within a preset time period based on the target planning path is greater than the number threshold, the target turnout areas with a close distance are obtained according to the distance between the target turnout area and the position of the semiconductor handling equipment. For example, each semiconductor handling equipment will apply for the access rights of the turnout areas that can be reached within 2 seconds on the route. Assuming that the number threshold is 6, it is stipulated that the communication rights of up to 6 turnout areas can be applied for at one time (such as more than 7 turnout areas can be passed within 2 seconds, then the communication rights of up to 6 turnout areas can be applied for, such as the communication rights of up to 4 turnout areas can be reached within 2 seconds, and the communication rights of 4 turnout areas can be applied for, and no specific restrictions are made on the number threshold here). The branch track control system will sort the semiconductor handling equipment that applies for right of way according to the scheme involved in this application, and release them in sequence to ensure that the operation of the semiconductor handling equipment on the track is free of time and space conflicts.

[0089] One point that needs to be explained is that the semiconductor handling equipment can periodically send road rights applications. In one of the optional embodiments, if the semiconductor handling equipment has applied for the access rights of the corresponding fork area, and the fork control system has also given an approval result, and the approval result is successful, then there is no need to apply for the access rights corresponding to the fork area next time, and only the access rights of the fork area with a failed approval result need to be applied for, so as to reduce the processing pressure of the fork control system. In other embodiments, each time the semiconductor handling equipment applies for the access rights of each target fork area on the route to be passed within a preset time period, until the semiconductor handling equipment enters the corresponding target fork area, then stop sending the road rights application for the target fork area. In addition, since the target planning path of the semiconductor handling equipment also changes in real time, after the scheduling system updates the target planning path of the semiconductor handling equipment, the semiconductor handling equipment can also re-determine the target fork area that needs to apply for access rights within the preset time period to send a road rights application to the fork control system. The timing and form of the semiconductor handling equipment sending the right of way application are not specifically limited here, and those skilled in the art can set the timing and form of the semiconductor handling equipment sending the right of way application as needed.

[0090] S204: Acquire each target planning path corresponding to each semiconductor handling equipment identifier.

[0091] S206: Based on the planned paths for each target, the corresponding right-of-way application is reviewed.

[0092] The target planning path of each semiconductor handling equipment is sent from the scheduling system to the fork road control system. The scheduling system can generate the target planning path and send the generated target planning path to the fork road control system. Therefore, the fork road control system can review the corresponding right of way application based on the target planning path of each semiconductor handling equipment.

[0093] The review process is to detect whether the target branch area applied for by the semiconductor handling equipment matches the target planned path of each semiconductor handling equipment issued by the scheduling system.

[0094] Specifically, the branch road control system can determine the corresponding target planned path based on the semiconductor handling equipment identification carried by the right-of-way application, and then determine whether the right-of-way application matches the target planned path; when the target branch road area corresponding to the right-of-way application is located in the target planned path, and the time of passing through the target branch road area matches the time of passing through the target branch road area in the target planned path, the review result of the right-of-way application is determined to be passed, otherwise the review result of the right-of-way application is determined to be failed.

[0095] In one of the optional embodiments, when the review result of the road right application is failure to pass the review, an alarm message can be output to stop the operation of the semiconductor handling equipment to facilitate maintenance.

[0096] S208: When the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated.

[0097] The right of way approval result is obtained by controlling the right of way application when the right of way application is reviewed and passed. The right of way application can be controlled by the control logic in the branch road control system.

[0098] Among them, the purpose of the control logic is to ensure that only one semiconductor handling equipment passes through the same branch area at the same time, that is, to ensure that each semiconductor handling equipment has no time and space conflicts in any target branch area.

[0099] In some optional embodiments, the control logic includes control logic based on task priority, control logic based on the distance between the semiconductor handling equipment and the target fork area, control logic based on the vehicle following mode, and control logic based on interference judgment. The control logic based on task priority includes that semiconductor handling equipment with high task priority has priority to pass through the target fork area; the control logic based on the distance between the semiconductor handling equipment and the target fork area includes that semiconductor handling equipment with a small distance between the semiconductor handling equipment and the target fork area has priority to pass through the target fork area; the control logic based on the vehicle following mode includes that semiconductor handling equipment in the same semiconductor handling equipment group passes through the target fork area as a whole; the control logic based on interference judgment includes that when the semiconductor handling equipment passing through the target fork area does not interfere with each other, the road right approval result corresponding to each semiconductor handling equipment is passed, and the judgment of whether the semiconductor handling equipment interferes is based on whether the fork entrance and fork exit of the semiconductor handling equipment passing through the target fork area coincide.

[0100] The branch road control system generates a right of way approval result based on the control logic, the semiconductor handling equipment identification and the identification of each target branch road area. That is, the branch road control system judges the semiconductor handling equipment identification and the identification of each target branch road area carried in the right of way application based on the control logic, so as to obtain the right of way approval result while ensuring that each semiconductor handling equipment has no time and space conflicts in any target branch road area.

[0101] Optionally, the right of way approval result may include success and failure. Success means that the semiconductor handling equipment corresponding to the right of way application is allowed to pass through the target branch area within the application time; failure means that the semiconductor handling equipment corresponding to the right of way application is not allowed to pass through the target branch area within the application time.

[0102] Specifically, after receiving the task issued by the business system, the dispatching system completes the path planning and issues the target planned path to the corresponding semiconductor handling equipment. Before the semiconductor handling equipment is about to pass through the branch area, it applies for the right of way to the branch control system that controls the branch area. The branch control system reviews the right of way application and, after the review is passed, approves the right of way according to the control logic. Specifically, based on the control logic, the target planned path of each semiconductor handling equipment, the semiconductor handling equipment identification and the identification of each target branch area are used to determine whether there is a time and space conflict for each semiconductor handling equipment in the target branch area. If there is no time and space conflict, a successful right of way approval result is generated. Otherwise, a failed right of way approval result is generated and the right of way approval result is issued to the semiconductor handling equipment. The semiconductor handling equipment operates on the track according to the right of way approval result.

[0103] S210: Feedback each right-of-way approval result to each corresponding semiconductor handling equipment. The right-of-way approval result is used to indicate whether the semiconductor handling equipment has the authority to pass through the corresponding target branch area.

[0104] After generating the right-of-way approval result, the dispatching system sends the right-of-way approval result to the corresponding semiconductor handling equipment, so that the semiconductor handling equipment can operate on the track based on the right-of-way approval result.

[0105] The above-mentioned branch area control method for the semiconductor handling system receives the road right application for the target branch area to be passed sent by each semiconductor handling equipment, and obtains each target planned path corresponding to the identification of each semiconductor handling equipment; based on each target planned path, the corresponding road right application is reviewed; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each road right approval result is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch area. In this way, by first reviewing the road right application based on the target planned path, and then performing road right control after the review is passed, on the one hand, it is ensured that the semiconductor handling equipment can operate according to the planned target planned path, and on the other hand, road right control in the branch area can ensure that the semiconductor handling equipment has no time and space conflicts in any section of the road, thereby improving the overall handling efficiency.

[0106] In one of the optional embodiments, based on each of the target planned paths, the corresponding right-of-way application is reviewed, including: matching the branch area information corresponding to the rail system with the target planned path to obtain each branch area passed by each semiconductor handling equipment and the time of passing through each branch area; based on the semiconductor handling equipment identification, comparing each branch area passed by each semiconductor handling equipment and the time of passing through each branch area with the right-of-way application; when each branch area passed by the semiconductor handling equipment is the same as the target branch area corresponding to the right-of-way application, and the time when the semiconductor handling equipment passes through each branch area is the same as the time when the semiconductor handling equipment passes through the target branch area corresponding to the right-of-way application, the review result of the right-of-way application is determined to be passed.

[0107] In some embodiments, the fork control system obtains the time (i.e., the planned passing time) for the semiconductor handling equipment to pass through each fork area based on the target planned path of each semiconductor handling equipment, and estimates the planned application time of the corresponding semiconductor handling equipment based on the aforementioned planned passing time and parameters such as the planned driving speed or speed limit. Alternatively, in some embodiments, the planned application time of each semiconductor handling equipment corresponding to each fork area may be preset. The aforementioned planned application time may be a time node or a time interval. If the planned application time is a planned application time interval, the specific interval length is not limited and can be set adaptively as needed.

[0108] Based on the semiconductor handling equipment identification, when comparing each branch area passed by each semiconductor handling equipment and the time of passing through each branch area with the road right application, it is determined whether the sending time of the current road right application of the corresponding semiconductor handling equipment belongs to the planned application time: if it does, it corresponds to the situation that the semiconductor handling equipment normally travels according to the target planned path and sends the road right application within the predetermined time range, that is, the review is passed, and the branch road control system continues to execute subsequent steps; if it does not, it corresponds to the situation that the semiconductor handling equipment does not travel according to the target planned path and sends the road right application within the predetermined time range, that is, the review fails.

[0109] The fork area information is the information of each fork area on the track stored in the fork control system, including the fork area identification and the location of the fork area. By matching the fork area information with each target planning path, each fork area passed by each semiconductor handling equipment can be determined.

[0110] Specifically, the position of the fork area in the track system is matched with each target planning path, and the fork area passed by each target planning path can be determined. The target planning path includes the position of the semiconductor handling equipment at each time. Therefore, after determining the fork area passed by each target planning path, since the target planning path includes the position of the semiconductor handling equipment at each time, the time when the semiconductor handling equipment passes through each fork area can be obtained.

[0111] Subsequently, the right of way approval result can be generated based on the branch areas passed by the semiconductor handling equipment, the time when the semiconductor handling equipment passes through each branch area, the semiconductor handling equipment identification of the semiconductor handling equipment applying for the right of way, and the identification of each target branch area.

[0112] Specifically, firstly, the semiconductor handling equipment identification is matched with the semiconductor handling equipment identification corresponding to the target planning path to determine the target planning path, and each fork area corresponding to the determined target planning path is obtained, and the target fork area identification corresponding to the semiconductor handling equipment identification is matched with each fork area corresponding to the target planning path. If the matching fails, that is, the target fork area corresponding to the semiconductor handling equipment reviewed by the fork control system is not on the target planning path sent to the fork control system by the scheduling system, an alarm is issued to prompt manual inspection. If the target fork area corresponding to the semiconductor handling equipment reviewed by the fork control system is on the target planning path sent to the fork control system by the scheduling system, then a time judgment can be made, that is, when it is detected that the time when the semiconductor handling equipment passes through each of the fork areas is the same as the time when the semiconductor handling equipment passes through the target fork area corresponding to the road right application, the review result of the road right application is determined to be passed.

[0113] In one of the optional embodiments, a right of way approval result corresponding to the right of way application is generated, including: obtaining the target semiconductor handling equipment identification of the target semiconductor handling equipment corresponding to each branch entrance of the target branch area and the task priority of the target semiconductor handling equipment; based on the task priority of each target semiconductor handling equipment, performing a first priority sorting on each target semiconductor handling equipment identification; and obtaining the right of way approval result based on the first priority sorting result of each target semiconductor handling equipment identification.

[0114] The turnout area is pre-set based on the track conditions, combined with Figure 3 As shown, Figure 3 It is a two-in-two-out branch area in one embodiment. In other embodiments, the branch area also includes a one-in-two-out branch area, etc. The branch area is not specifically limited here.

[0115] Combination Figure 3 As shown in the figure, Entrance A and Entrance C are the fork entrances, and Entrance B and Entrance D are the fork exits. Figure 3 When the fork area is shown, it needs to be controlled by the fork control system. Figure 3 The OHT1 shown in the figure enters the fork area from the A fork entrance and can travel in two directions. Figure 3 The up, down, left, and right directions on the paper are used as references, which are: going straight, that is, going straight to the right and then exiting the current fork area through the B fork exit; turning (also called turning, reversing, or turning), that is, turning upward and then exiting the current fork area through the D fork exit, so that different semiconductor handling equipment can be diverted at the entrance of the A fork. For example, Figure 3 The OHT4 shown in the figure enters the fork area from the C fork entrance and can travel in two directions. Figure 3The up, down, left, and right directions on the paper are used as references, which are: going straight, that is, going straight to the left and then exiting the current fork area through the D fork exit; turning, that is, turning down and then exiting the current fork area through the B fork exit, so that different semiconductor handling equipment can be diverted at the C fork entrance. In addition, the semiconductor handling equipment entering from the A fork entrance and the C fork entrance can both go to the D fork exit, or both go to the B fork exit. Therefore, the semiconductor handling equipment entering from different fork entrances can merge at the B fork exit or the D fork exit.

[0116] Therefore, before the semiconductor handling equipment passes through the target fork area, it needs to send a right of way application to the fork control system. After receiving the right of way application of the semiconductor handling equipment, the fork control system can determine the semiconductor handling equipment applying for the same target fork area based on the right of way application of the semiconductor handling equipment. Furthermore, the fork control system can obtain the target semiconductor handling equipment identification of the target semiconductor handling equipment at each fork entrance to pass through the same target fork area.

[0117] Subsequently, the first priority is assigned to each target semiconductor handling equipment identification based on the management and control logic, and the right of way approval result is obtained based on the sorting result.

[0118] Optionally, the target semiconductor handling equipment may be the first semiconductor handling equipment at each fork entrance in the same target fork area, that is, only the task priorities corresponding to the first semiconductor handling equipment at each fork entrance need to be compared. In other embodiments, the target semiconductor handling equipment may be each semiconductor handling equipment at each fork entrance in the same target fork area, so that the task priorities corresponding to each semiconductor handling equipment at each fork entrance are compared, so that semiconductor handling equipment with a high task priority can pass through the target fork area first.

[0119] The control logic includes: the semiconductor handling equipment with the highest task priority passes first. Therefore, the task priorities of the target semiconductor handling equipment can be sorted by the first priority, and then each target semiconductor handling equipment can be released in turn based on the sorting results. Figure 3 For example, if the task priority of the rightmost target semiconductor handling equipment OHT1 at the A branch entrance is the highest, then all target semiconductor handling equipment at the C branch entrance should wait until the target semiconductor handling equipment with the highest priority at the A branch entrance passes before they can pass.

[0120] In one of the optional embodiments, after performing a first priority sorting on each semiconductor handling equipment identifier based on the acquired task priority of the semiconductor handling equipment, it further includes: when the task priorities of the target semiconductor handling equipment in the target fork area are the same, obtaining the first distance between each target semiconductor handling equipment to be passed through each fork entrance of the target fork area and the corresponding fork entrance and the driving route type of each target semiconductor handling equipment; correcting the first distance based on the driving route type of each target semiconductor handling equipment to obtain a second distance; and performing a first distance sorting on each target semiconductor handling equipment identifier with the same task priority based on the second distance. Obtaining a road right approval result based on the first priority sorting result of each target semiconductor handling equipment identifier includes: obtaining a road right approval result based on the first distance sorting result of each target semiconductor handling equipment identifier.

[0121] The control logic also includes controlling the distance between the target semiconductor handling equipment and the fork entrance based on the same task priority. Specifically, when the task priorities of the target semiconductor handling equipment to be passed through each fork entrance are the same, the first distance between the target semiconductor handling equipment to be passed through each fork entrance and the fork entrance is calculated. Figure 3 , obtain the distances between the target semiconductor handling equipment at the A branch entrance and the C branch entrance and the corresponding branch entrances, and perform a first distance sorting so that the equipment with the smaller distance passes first.

[0122] In addition, in order to ensure accuracy, based on the sending time of the right-of-way application, the fork road control system obtains the distance between the target semiconductor handling equipment and the corresponding fork road entrance after a preset time period, and the preset time period can be 0.5 seconds. In other embodiments, the preset time period can be other values, which are not specifically limited here. Exemplarily, the target semiconductor handling equipment sends a right-of-way application to the fork road control system at time Ti, and the target semiconductor handling equipment is located at the current position at time Ti. After a period of time, the right-of-way application is received by the fork road control system. The fork road control system estimates the travel of the target semiconductor handling equipment after a preset time period based on the motion parameters of the target semiconductor handling equipment (such as speed or acceleration, etc.), and then obtains the distance from the corresponding fork road entrance after the preset time period.

[0123] The driving route types include straight and turning. Since the target fork area includes straight and curved roads, the fork control system can determine the driving route type based on the target planned path of the target semiconductor handling equipment and the straight and curved roads in the target fork area. For example, when the target planned path of the target semiconductor handling equipment coincides with the straight road in the target fork area, the driving route type is straight. When the target planned path of the target semiconductor handling equipment coincides with the curved road in the target fork area, the driving route type is turning.

[0124] In the present application, the first distance is corrected based on the driving route type to ensure that straight driving is given priority when the distance difference between the first distances corresponding to different driving route types is within a certain difference range.

[0125] Among them, the correction of the first distance is mainly to compensate for the straight-line movement, so that the straight-line target semiconductor handling equipment can pass through the target fork area relatively preferentially. For example, the first distance D01 corresponding to the straight-line target semiconductor handling equipment is the same as the first distance D11 corresponding to the turning target semiconductor handling equipment, or the first distance D01 is slightly larger than the first distance D11, then the straight-line target semiconductor handling equipment obtains the approval result of allowing passage through, and the turning target semiconductor handling equipment obtains the approval result of allowing passage through after the straight-line target semiconductor handling equipment; if the first distance D01 is larger than the first distance D11, so that the straight-line target semiconductor handling equipment still needs to obtain the approval result of allowing passage through after the turning target semiconductor handling equipment after the correction, it means that the straight-line target semiconductor handling equipment is too far from the target fork area, and the straight-line target semiconductor handling equipment does not have to pass preferentially; it is also easy to understand that if the first distance D01 is smaller than the first distance D11, then without correction or after correction, it is obtained that the straight-line target semiconductor handling equipment obtains the approval result of allowing passage through, and the turning target semiconductor handling equipment obtains the approval result of allowing passage through after the straight-line target semiconductor handling equipment.

[0126] In one of the optional embodiments, the first distance is corrected based on the driving route type to obtain the second distance, including: determining the corresponding corrected distance based on the driving route type, and the corrected distance when the driving route type is the first straight type is greater than the corrected distance when the driving route type is a turn; and obtaining the second distance based on the difference between the first distance and the corrected distance.

[0127] In one of the optional embodiments, the first distance is corrected based on the driving route type to obtain the second distance, including: determining the corresponding corrected distance based on the driving route type, and the corrected distance when the driving route type is the second straight type is equal to the corrected distance when the driving route type is a turn; and obtaining the second distance based on the difference between the first distance and the corrected distance.

[0128] Specifically, in the present application, the first distance is corrected based on the driving route type to obtain the second distance. The corresponding corrected distance can be determined based on the driving route type, and then the corresponding first distance is corrected by the corrected distance to obtain the second distance, for example, the second distance is obtained based on the difference between the first distance and the corrected distance. The driving route type of straight driving includes two types: the second straight driving type is that the target semiconductor handling equipment is straight driving only in the next target fork area, and directly enters the curve after passing the next target fork area or turns in the next target fork area. The remaining straight driving types are the first straight driving types, that is, the target semiconductor handling equipment is straight driving in at least two consecutive target fork areas, and is also straight driving between two consecutive target fork areas.

[0129] In the case where the target fork area position corresponding to the straight road is the entrance position of the straight road, and the target fork area position corresponding to the curve is the entrance position of the curve, the present application mainly compensates for the straight road of the first straight road type, and the correction distance of the straight road of the first straight road type is greater than the correction distance of the driving route type of turning, so that the distance between the target semiconductor handling equipment of the straight road and the target fork area is closer than the distance between the target semiconductor handling equipment of the turning road and the target fork area, so that the target semiconductor handling equipment of the straight road is preferentially allocated with the access right of the target fork area. In order to reduce processing, only the first distance of the target semiconductor handling equipment of the driving route type of straight road can be corrected, and the specific correction method is that when the driving route type is determined to be straight road, the distance between the target semiconductor handling equipment of the driving route type of straight road and the target fork area is reduced. In this embodiment, when the driving route type is determined to be straight road, the first distance is reduced to obtain the second distance. When the driving route type is determined to be turning, the first distance is kept unchanged.

[0130] For ease of understanding, combined Figure 3 As shown, assuming that the speed of OHT1 at the entrance of fork A is V a , the current position of OHT1 is S a , the distance to the entrance is Δa; the speed of OHT4 at the entrance of C fork is V c , the current position of OHT4 is S c , the distance to the entrance is Δc; the entrance position of the A fork in the fork area is S Ta , the entrance position of the C fork in the fork area is S Tc .

[0131] for Figure 3For all the merging curves in the figure, there will be a target semiconductor handling equipment going straight and a target semiconductor handling equipment turning. Suppose the target semiconductor handling equipment OHT1 at the entrance of the A fork goes straight, and the target semiconductor handling equipment OHT4 at the entrance of the C fork turns. The points corresponding to the entrances of the A fork and the C fork in the figure are the entrance positions. In this case, the following formula is used for calculation:

[0132] Δa=S Ta –(S a +T*V a )–M a

[0133] Δc=S Tc –(S c +T*V c )–M c

[0134] In the formula, S Ti –S i represents the distance from the current position of a target semiconductor handling equipment to the entrance of a fork; T is the preset time length mentioned above, T*V i is the estimated travel distance of the target semiconductor handling equipment within the time length T, S Ti –(S i +T*V i ) represents the distance from the position of the target semiconductor handling equipment to a fork entrance after T time relative to the current time of sending the right-of-way application, which can be defined as the first distance; M i Assign values ​​to corresponding distances; wherein, when calculating corresponding to Δa, the i in the subscript symbol corresponds to a, and when calculating corresponding to Δc, the i in the subscript symbol corresponds to c; Δa corresponds to the second distance of a target semiconductor handling equipment, and Δc corresponds to the second distance of another target semiconductor handling equipment.

[0135] When comparing Δa and Δc, the semiconductor handling equipment corresponding to the smaller value passes through preferentially.

[0136] Δa corresponds to the second distance of the semiconductor handling equipment moving straight, M a is the distance of the semiconductor handling equipment going straight; Δc corresponds to the second distance of the semiconductor handling equipment turning, M c Assign a value to the distance of semiconductor handling equipment that turns. a With M c The value of satisfies M a Greater than M c .

[0137] In some optional embodiments, M a Greater than 0, M c Less than or equal to 0. In some embodiments, Ma Equal to 0, M c Less than 0.

[0138] The aforementioned T*V a 、T*V c is an optional calculation item. Therefore, the two items are calculated in the above embodiment. It is easy to understand that the two items are not calculated in other embodiments according to needs. Ta –S a and S Tc –S c These correspond to the first distance of the semiconductor transport equipment that moves straight and the first distance of the semiconductor transport equipment that turns, respectively.

[0139] In some embodiments, wherein M a is 0, M c is a distance assignment less than 0. By means of this assignment, the first distance of the semiconductor handling equipment that turns is relatively increased to obtain the corresponding second distance, which plays the effect of giving priority to straight travel. Optionally, the distance assignment M c It can be -0.9 meters, and the value of T can be 0.5 seconds. It should be noted that 0.5 seconds and -0.9 meters are configurable parameters, which will be configured in the background according to different maps and different scenes to achieve the relatively optimal effect during debugging.

[0140] See also Figure 3 If the first semiconductor handling equipment OHT1 at the entrance of branch road A passes first, then the second semiconductor handling equipment OHT at the entrance of branch road A will be compared with the first semiconductor handling equipment OHT at the entrance of branch road C that has not yet reached the turning position of the entrance of branch road C according to the above principle. The one with a smaller value will pass first, and so on, to achieve the control of the semiconductor handling equipment passing through the branch area.

[0141] In one of the optional embodiments, a road right approval result corresponding to the road right application is generated, including: obtaining a target semiconductor handling equipment identification of the target semiconductor handling equipment corresponding to each fork entrance of the target fork area; detecting whether the target semiconductor handling equipment at each fork entrance of the target fork area belongs to a semiconductor handling equipment group; in the case where the target semiconductor handling equipment at the fork entrance of the target fork area belongs to a semiconductor handling equipment group, obtaining the task priority of the semiconductor handling equipment group; in the case where the target semiconductor handling equipment at the fork entrance of the target fork area does not belong to a semiconductor handling equipment group, obtaining the task priority of the target semiconductor handling equipment; based on the obtained task priorities of each target semiconductor handling equipment and the task priorities of the semiconductor handling equipment group, performing a second priority sorting on the target semiconductor handling equipment identification and the semiconductor handling equipment group; based on the target semiconductor handling equipment identification and the second priority sorting result of the semiconductor handling equipment group, obtaining the road right approval result corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group; wherein, each semiconductor handling equipment belonging to the same semiconductor handling equipment group passes through the target fork area as a whole.

[0142] The present embodiment introduces the concept of semiconductor handling equipment group, that is, before the priority determination, the semiconductor handling equipment group determination may be performed first.

[0143] In some embodiments, when several semiconductor handling equipment at each fork entrance of a fork area do not constitute a semiconductor handling equipment group, between semiconductor handling equipment at different fork entrances: the sorting of semiconductor handling equipment identifications of each semiconductor handling equipment based on task priority can be called first priority sorting; if the result of the first priority sorting is that the task priorities are the same and the order of passage cannot be determined according to the priority, the sorting of semiconductor handling equipment identifications of each semiconductor handling equipment based on the second distance of each semiconductor handling equipment can be called first distance sorting. In some embodiments, when several semiconductor handling equipment at a fork entrance of a fork area constitute a semiconductor handling equipment group, between semiconductor handling equipment at different fork entrances: the sorting of semiconductor handling equipment identifications and semiconductor handling equipment groups based on task priority can be called second priority sorting; if the result of the second priority sorting is that the task priorities are the same and the order of passage cannot be determined according to the priority, the sorting of semiconductor handling equipment identifications and semiconductor handling equipment groups based on the second distance of each semiconductor handling equipment and the fourth distance of the semiconductor handling equipment group can be called second distance sorting.

[0144] In one of the optional embodiments, before obtaining the task priority of the semiconductor handling equipment group, it also includes: detecting whether the semiconductor handling equipment corresponding to each right of way application satisfies the following mode, and each semiconductor handling equipment in the following mode satisfies the following conditions: each semiconductor handling equipment has applied for the right of way of the same target fork area, and each semiconductor handling equipment enters the target fork area from the same fork entrance, the interval between each semiconductor handling equipment is not greater than the distance threshold, the driving route type of each semiconductor handling equipment is straight, and each semiconductor handling equipment is adjacent to each other; in the case that there are semiconductor handling equipment that satisfies the following mode, each semiconductor handling equipment that satisfies the following mode is regarded as a semiconductor handling equipment group, and the highest task priority of each semiconductor handling equipment in the semiconductor handling equipment group is regarded as the task priority of the semiconductor handling equipment group, and the distance between the semiconductor handling equipment closest to the fork entrance in the semiconductor handling equipment group and the fork entrance is regarded as the distance between the semiconductor handling equipment group and the fork entrance.

[0145] Among them, in this application, there will be a situation where multiple semiconductor handling equipment queue up to pass through the same target fork area. Under the principle of optimal overall efficiency, the fork control system will automatically determine whether the multiple semiconductor handling equipment is in the following vehicle mode. If it is determined to be in the following vehicle mode, the frontmost semiconductor handling equipment and all the semiconductor handling equipment determined to be following the vehicle will be determined as a whole. Only when all the semiconductor handling equipment as a whole passes through the target fork area, the target fork area will open the passing authority for other semiconductor handling equipment that want to pass through. Figure 3 As shown, the first semiconductor transport equipment OHT1, the second semiconductor transport equipment OHT2 and the third semiconductor transport equipment OHT3 are in the following vehicle mode, then these three semiconductor transport equipment form a semiconductor transport equipment group, the highest task priority of each semiconductor transport equipment in the semiconductor transport equipment group is used as the task priority of the semiconductor transport equipment group, and the distance between the semiconductor transport equipment closest to the branch entrance in the semiconductor transport equipment group and the branch entrance is used as the distance between the semiconductor transport equipment group and the branch entrance, so as to facilitate the control of the semiconductor transport equipment group according to the above-mentioned control logic.

[0146] The judgment of the following mode needs to meet the following conditions at the same time: each semiconductor handling equipment has applied for the right of way of the same target fork area, each semiconductor handling equipment enters the target fork area from a fork entrance, the interval between each semiconductor handling equipment is not greater than the distance threshold, the driving route type of each semiconductor handling equipment is straight, and each semiconductor handling equipment is an adjacent semiconductor handling equipment; each semiconductor handling equipment that meets the following mode passes through the target fork area as a whole. The distance threshold here can be 2 meters, and in other embodiments, the distance threshold can also be other values. For example, the distance threshold can be set as a configurable item. In the project, the optimal value will be found according to the debugging results, and each project is slightly different. In addition, the adjacent semiconductor handling equipment here only means that there is no other semiconductor handling equipment between the two semiconductor handling equipment, but does not mean that the two semiconductor handling equipment must be close to each other, and in order to ensure the normal passage of the semiconductor handling equipment, a safe distance is generally maintained between each semiconductor handling equipment.

[0147] In addition, it should be noted that after each semiconductor transport equipment in the semiconductor transport equipment group passes through the target fork area, the task priority of each semiconductor transport equipment in the semiconductor transport equipment group is restored to the initial task priority to facilitate subsequent processing.

[0148] After the semiconductor handling equipment group is judged, since the semiconductor handling equipment group is regarded as a whole, the task priority of the semiconductor handling equipment group is used in the subsequent task priority judgment process.

[0149] Specifically, it is detected whether the target semiconductor handling equipment at each branch entrance belongs to a semiconductor handling equipment group. If the target semiconductor handling equipment at a branch entrance belongs to a semiconductor handling equipment group, the task priority of the semiconductor handling equipment group is obtained; if the target semiconductor handling equipment at a branch entrance does not belong to a semiconductor handling equipment group, the task priority of the target semiconductor handling equipment is obtained until all branch entrances of the target branch area are traversed.

[0150] Subsequently, based on the acquired task priorities corresponding to the respective target semiconductor handling equipment and semiconductor handling equipment groups in the same target fork area, the target semiconductor handling equipment identifiers and the semiconductor handling equipment groups are sorted to obtain a sorting result.

[0151] One point that needs to be explained is that if the task priority of the semiconductor handling equipment group at a certain branch entrance is the highest, the branch control system will allow other semiconductor handling equipment to pass through the target branch area only after all the semiconductor handling equipment of the semiconductor handling equipment group have passed through the target branch area.

[0152] If the task priority of the target semiconductor handling equipment at a certain fork entrance is the highest, the target semiconductor handling equipment will first pass through the target fork area and then continue to determine the task priority.

[0153] If the task priorities of the semiconductor transport equipment groups at the entrances of each branch road and the task priorities of the target semiconductor transport equipment are the same, the distance is determined.

[0154] Specifically, in one of the optional embodiments, after the target semiconductor handling equipment identifier and the semiconductor handling equipment group are sorted based on the task priority of each target semiconductor handling equipment and the task priority of the semiconductor handling equipment group, it also includes: when the task priority of the target semiconductor handling equipment in the target fork area and the task priority of the semiconductor handling equipment group are the same, obtain the third distance between each semiconductor handling equipment group to be passed through the target fork area and the corresponding fork entrance, and obtain the first distance between the semiconductor handling equipment to be passed through the target fork area and the corresponding fork entrance; correct the third distance of the semiconductor handling equipment group to obtain the fourth distance, and correct the first distance of the target semiconductor handling equipment to obtain the second distance; the fourth distance and the second distance sort each semiconductor handling equipment identifier and the semiconductor handling equipment group by the second distance. Based on the second priority sorting result of the target semiconductor handling equipment identifier and the semiconductor handling equipment group, the road right approval result corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group is obtained, including: based on the second distance sorting result of the target semiconductor handling equipment identifier and the semiconductor handling equipment group, the road right approval result corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group is obtained.

[0155] The third distance here can refer to the first distance above, and the fourth distance can refer to the calculation of the second distance above, which will not be repeated here. It is only necessary to explain that the semiconductor handling equipment group is involved here, and the distance between the semiconductor handling equipment group and the fork entrance is the distance between the semiconductor handling equipment closest to the fork entrance and the fork entrance. The subsequent distance compensation and distance comparison can refer to the above definition.

[0156] In one of the optional embodiments, the target semiconductor handling equipment identifiers are sorted based on the acquired task priorities of the target semiconductor handling equipment, including: when the task priority of the first semiconductor handling equipment located at the first fork entrance is higher than the task priority of the target semiconductor handling equipment at the first fork entrance, and the task priority of the first semiconductor handling equipment is higher than the task priority of the target semiconductor handling equipment at the second fork entrance of the target fork area, and the task priority of the target semiconductor handling equipment at the second fork entrance is higher than the task priority of the target semiconductor handling equipment at the first fork entrance, the task priority of the second semiconductor handling equipment is replaced with the task priority of the first semiconductor handling equipment; wherein the distance between the semiconductor handling equipment corresponding to the first semiconductor handling equipment identifier and the first fork entrance is greater than the distance between the semiconductor handling equipment corresponding to the target semiconductor handling equipment identifier and the first fork entrance, and the distance between the semiconductor handling equipment corresponding to the second semiconductor handling equipment identifier and the first fork entrance; and the semiconductor handling equipment identifiers after replacing the task priorities are sorted.

[0157] The target semiconductor handling equipment in the present application is a subset of the second semiconductor handling equipment, and it should be noted that the second semiconductor handling equipment includes at least one semiconductor handling equipment.

[0158] Combination Figure 3 As shown, the first branch entrance is branch entrance A, and the second branch entrance is branch entrance C, wherein the first semiconductor handling equipment OHT1 at the first branch entrance is the target semiconductor handling equipment of the first branch entrance, the second semiconductor handling equipment OHT2 is the first semiconductor handling equipment, and the first semiconductor handling equipment OHT4 at the second branch entrance is the target semiconductor handling equipment of the second branch entrance.

[0159] Among them, if the above-mentioned semiconductor handling equipment meets the following conditions: the task priority of the first semiconductor handling equipment OHT1 at the first fork entrance and the task priority of the first semiconductor handling equipment OHT4 at the second fork entrance are lower than the task priority of the second semiconductor handling equipment OHT2, and the task priority of the first semiconductor handling equipment OHT1 at the first fork entrance is greater than the task priority of the first semiconductor handling equipment OHT4 at the second fork entrance, then the fork control system will assign the task priority of the second semiconductor handling equipment OHT2 to the first semiconductor handling equipment OHT1, that is, the first semiconductor handling equipment OHT1 and the second semiconductor handling equipment OHT2 are the same, to ensure that the second semiconductor handling equipment OHT2 can pass through the target fork area first.

[0160] In other embodiments, the semiconductor handling equipment corresponding to each fork entrance can be traversed in turn, and then the task priority corresponding to each semiconductor handling equipment can be obtained. If the priority of the semiconductor handling equipment close to the fork entrance is lower than the priority of the semiconductor handling equipment far from the fork entrance, the priority of the semiconductor handling equipment far from the fork entrance is assigned to the semiconductor handling equipment close to the fork entrance. Figure 3 As shown, assuming that the task priority of the first semiconductor handling equipment OHT1 is lower than the task priority of the third semiconductor handling equipment OHT3, and the task priority of the third semiconductor handling equipment OHT3 is lower than the task priority of the second semiconductor handling equipment OHT2, then only the task priority of the second semiconductor handling equipment OHT2 needs to be assigned to the first semiconductor handling equipment OHT1. Assuming that the task priority of the first semiconductor handling equipment OHT1 is lower than the task priority of the third semiconductor handling equipment OHT3, and the task priority of the third semiconductor handling equipment OHT3 is higher than the task priority of the second semiconductor handling equipment OHT2, then the task priority of the third semiconductor handling equipment OHT3 needs to be assigned to the first semiconductor handling equipment OHT1 and the second semiconductor handling equipment OHT2. In this embodiment, the second semiconductor handling equipment includes the first semiconductor handling equipment OHT1 and the second semiconductor handling equipment OHT2.

[0161] In the above embodiment, as long as the semiconductor handling equipment with a high task priority applies to the fork control system for access to the target fork area, all road rights applications of semiconductor handling equipment with a low task priority will be controlled by the target fork area to ensure that the semiconductor handling equipment with a high task priority passes first.

[0162] In one of the optional embodiments, the method also includes: determining the branch road exits and branch road entrances passed by each target semiconductor handling equipment; when the branch road exits and branch road entrances passed by each target semiconductor handling equipment do not overlap, generating a right of way approval result regarding the successful right of way application for the target branch road area; when the branch road exits and branch road entrances passed by each target semiconductor handling equipment overlap, continuing to execute the step of obtaining the target semiconductor handling equipment identification of the target semiconductor handling equipment corresponding to each branch road entrance of the target branch road area.

[0163] Among them, the different types of fork areas may have different impacts on traffic. Figure 3 As shown in the figure, if the target semiconductor handling equipment located at the fork entrance A and the fork entrance C are both going straight or turning at the same time, there will be no mutual interference. At this time, there is no need to control according to the above method, and the right of way approval result of the successful right of way application for the target fork area is directly generated. Otherwise, control is performed according to the above method.

[0164] The judgment of whether the target semiconductor handling equipment interferes can be based on the branch entrances and branch exits passed by each target semiconductor handling equipment. If the corresponding paths of each target semiconductor handling equipment include branch exits corresponding to the target branch area, it is considered that there is interference between the target semiconductor handling equipment, and control is performed according to the above method. If there is no interference between the target semiconductor handling equipment, a right of way approval result of successful application for the right of way of the target branch area is directly generated.

[0165] In one of the optional embodiments, the method also includes: periodically uploading right-of-way occupancy information to the scheduling system, the right-of-way occupancy information is used to perform target path planning for each semiconductor handling equipment in the scheduling system, the right-of-way occupancy information includes normal right-of-way occupancy information and abnormal right-of-way occupancy information when the branch area is abnormally occupied.

[0166] Among them, the fork control system periodically uploads the road right occupation information to the dispatching system, so that the dispatching system can perform path planning based on the road right occupation information. Optionally, the fork control system can upload normal road right occupation information according to the periodicity, for example, the fork area is occupied by semiconductor handling equipment or the fork area is not occupied by semiconductor handling equipment. In the case where the fork area is abnormally occupied by semiconductor handling equipment, the fork control system can also upload abnormal road right occupation information of the abnormal occupation of the fork area. Similarly, the abnormal road right occupation information is also periodically uploaded to the dispatching system until the abnormality is resolved, and the fork control system uploads normal road right occupation information. Among them, the abnormal resolution method can include manual or automatic methods, such as manually sending a removal instruction to the semiconductor handling equipment occupying the fork area to release the fork area. In the case where the abnormality is that the semiconductor handling equipment is disconnected from the network, after the semiconductor handling equipment network is normal, the fork control system can automatically identify and determine that the fork area is no longer occupied by semiconductor handling equipment, so that it can automatically switch to the mode of uploading normal road right occupation information.

[0167] In an exemplary embodiment, Figure 4 As shown, a method for controlling a fork area in a semiconductor handling system is provided, and the method is applied to Figure 1 The scheduling system in is taken as an example to illustrate, including the following steps S402 to S406. Among them:

[0168] S402: Receive task information sent by the business system, road right occupancy information sent by the fork road management and control system, and semiconductor handling equipment position and speed information sent by each semiconductor handling equipment.

[0169] Among them, for the convenience of understanding, combined Figure 5As shown, the scheduling system can receive the task information sent by the business system, the road right occupancy information sent by the branch road management and control system, and the position and speed information uploaded by each semiconductor handling equipment.

[0170] S404: Based on the task information, road right occupancy information, and the position and speed information of each semiconductor handling equipment, path planning is performed to obtain a target planned path for each semiconductor handling equipment.

[0171] The scheduling system will perform path planning based on task information, road right occupancy information, and the location and speed information of each semiconductor handling equipment to obtain each target planning path, where the target planning path takes into account the order in which the semiconductor handling equipment passes through each fork area. In addition, if an abnormality is encountered, the scheduling system will recalculate the target planning path based on the real-time feedback of road right occupancy information and the location and speed information of each semiconductor handling equipment to achieve the effect of global dynamic scheduling.

[0172] For example, when the dispatching system receives abnormal road right occupancy information uploaded from the target fork area or abnormal information uploaded from semiconductor handling equipment, the dispatching system is triggered to re-plan the path.

[0173] S406: Send the target planned path to the branch road control system and each semiconductor handling equipment respectively; the target planned path is used to instruct each semiconductor handling equipment to generate a road right application based on the target planned path, and send the road right application to the branch road control system, and the target planned path is also used to instruct the branch road control system to review the corresponding road right application based on each target planned path; when the review result of the road right application is passed, generate a road right approval result corresponding to the road right application; feed back each road right approval result to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch road area.

[0174] The scheduling system will send each target planning path obtained by planning to the corresponding semiconductor handling equipment, so that the semiconductor handling equipment can run on the rail system based on the target planning path. In addition, the scheduling system will also send each target planning path obtained by planning to the branch road control system, so that the branch road control system can review the road right application of the semiconductor handling equipment. The specific processing of the road right application of the semiconductor handling equipment by the branch road control system can be referred to the above definition, which will not be repeated here.

[0175] Among them combined Figure 5As shown, the semiconductor handling equipment applies for the right of way from the fork control system that controls the intersection in advance before passing through the fork area. The fork control system approves the right of way according to its own control logic, and sends the approval result to the semiconductor handling equipment. The semiconductor handling equipment operates according to the right of way approval result. At the same time, the semiconductor handling equipment will feedback its own position status, speed status and acceleration status to the fork control system and the dispatching system. The fork control system will also feedback the road conditions to the dispatching system. The dispatching system will have three inputs when doing path planning, namely the task, the intersection conditions fed back by the fork control system, and the current speed and position of the semiconductor handling equipment.

[0176] In one of the optional embodiments, path planning is performed based on task information, road right occupancy information, and position and speed information of each semiconductor handling equipment to obtain a target planned path for each semiconductor handling equipment, including: generating an initial planned path corresponding to each semiconductor handling equipment based on the task information and road right occupancy information; obtaining a target planned path for each semiconductor handling equipment based on the initial planned path, and the position and speed information of each semiconductor handling equipment, the target planned path including the position of a semiconductor handling equipment at each moment.

[0177] The global path planning of the scheduling system can be expressed by the following formula, where one column is the variable of a semiconductor handling equipment, and multiple columns are the variables of multiple semiconductor handling equipment:

[0178]

[0179] In order to enable the semiconductor handling equipment to pass through the fork area smoothly and achieve global optimization, the following constraints must be met: the semiconductor handling equipment can complete the task, that is, the path reaches the end point; the semiconductor handling equipment has no time and space conflicts in the fork area, that is, assuming that the semiconductor handling equipment OHT1 is at (t n , point1), the other semiconductor handling equipment OHT will not n Arrive at point 1 at the moment; the maximum speed limit and the maximum number limit in each path line in the path lines. To achieve the shortest time for all semiconductor handling equipment OHT to reach the task end point, its objective function can be abstracted as:

[0180] In order to solve the problem that the objective function may not have an optimal solution and the calculation is complex, the dispatching system first performs initial path planning in the algorithm, and then makes a turnout area decision based on the initial path planning. The decision variables are as follows:

[0181]

[0182] That is, the scheduling system first plans the optimal route based on the task, and then calculates based on the position, speed and acceleration feedback from the semiconductor handling equipment OHT, and finally plans that the semiconductor handling equipment OHT must arrive at a specific location within a specific time.

[0183] The above calculation is divided into two steps:

[0184] The first step is to calculate the path based on all variables of the semiconductor handling equipment OHT without calculating acceleration, speed and position, and only calculate the path to obtain the initial planning path.

[0185] The second step is to calculate the speed, acceleration and position of the semiconductor handling equipment based on the calculated initial planning path, and finally output the optimal motion model of the semiconductor handling equipment to obtain the target planning path, which is the position of the semiconductor handling equipment at any time.

[0186] If the calculated target planning path indicates that only one semiconductor transport equipment passes through the same location at the same time, the semiconductor transport equipment will pass through each target branch area in turn.

[0187] If the calculated target planning path indicates that multiple semiconductor handling equipment pass through the same location at the same time, multiple vehicles will apply for permission to the same intersection at the same time, and it will be necessary to use the control logic of the target fork area itself for control.

[0188] In the above embodiment, even if the scheduling system cannot achieve the optimal solution, it is ensured that the semiconductor handling equipment can still pass through the branch efficiently.

[0189] For ease of understanding, continue to combine Figure 5 As shown, the scheduling system can receive the task information sent by the business system, the right of way occupancy information sent by the branch road control system, and the position and speed information uploaded by each semiconductor handling equipment. The scheduling system will perform path planning based on the task information, right of way occupancy information, and the position and speed information of each semiconductor handling equipment to obtain each target planned path, wherein the target planned path takes into account the order in which the semiconductor handling equipment passes through each branch road area. The scheduling system will send each target planned path obtained by planning to the corresponding semiconductor handling equipment, so that the semiconductor handling equipment can operate on the rail system based on the target planned path.

[0190] Before passing through the fork area, the semiconductor handling equipment applies for the right of way from the fork control system that controls the intersection in advance. The fork control system approves the right of way according to its own control logic and sends the approval result to the semiconductor handling equipment. The semiconductor handling equipment operates according to the right of way approval result. At the same time, the semiconductor handling equipment will feedback its own position status, speed status and acceleration status to the fork control system and dispatching system. The fork control system will also feedback the road conditions to the dispatching system.

[0191] In the above embodiment, it can be ensured that even if the scheduling system cannot achieve the optimal solution, the semiconductor handling equipment can still pass through the branch efficiently.

[0192] It should be understood that, although the steps in the flowcharts involved in the above embodiments are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps is not strictly limited in order, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above embodiments may include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.

[0193] Based on the same inventive concept, the embodiment of the present application also provides a fork area control device for a semiconductor handling system for implementing the fork area control method for a semiconductor handling system involved above. The implementation scheme for solving the problem provided by the device is similar to the implementation scheme recorded in the above method, so the specific limitations in one or more embodiments of the fork area control device for a semiconductor handling system provided below can refer to the limitations of the fork area control method for a semiconductor handling system above, and will not be repeated here.

[0194] In an exemplary embodiment, Figure 6 As shown, a fork area control device for a semiconductor handling system is provided, and the semiconductor handling system includes a fork control system and a semiconductor handling device, including:

[0195] The first receiving module 601 is used to receive a right-of-way application for a target fork area to be passed through, sent by each semiconductor handling equipment, wherein the right-of-way application carries a semiconductor handling equipment identification corresponding to each semiconductor handling equipment;

[0196] A review module 602 is used to obtain each target planning path corresponding to each semiconductor handling equipment identifier; based on each target planning path, review the corresponding right of way application;

[0197] The road right approval module 603 is used to generate a road right approval result corresponding to the road right application when the review result of the road right application is passed;

[0198] The first sending module 604 is used to feed back each of the road right approval results to each of the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass through the corresponding target branch area.

[0199] In one of the optional embodiments, the above-mentioned review module 602 is specifically used to match the branch area information corresponding to the rail system with the target planned path to obtain the branch areas passed by each semiconductor handling equipment and the time of passing through each branch area; based on the semiconductor handling equipment identification, the branch areas passed by each semiconductor handling equipment and the time of passing through each branch area are compared with the right-of-way application; when the branch areas passed by the semiconductor handling equipment are the same as the target branch areas corresponding to the right-of-way application, and the time of the semiconductor handling equipment passing through each branch area is the same as the time of passing through the target branch area corresponding to the right-of-way application, the review result of the right-of-way application is determined to be passed.

[0200] In one of the optional embodiments, the above-mentioned right of way approval module 603 is specifically used to obtain the target semiconductor handling equipment identification and the task priority of the target semiconductor handling equipment corresponding to each of the branch entrances of the target branch area; based on the obtained task priority of each target semiconductor handling equipment, perform a first priority sorting on each of the target semiconductor handling equipment identifications; and obtain a right of way approval result based on the first priority sorting result of each of the target semiconductor handling equipment identifications.

[0201] In one of the optional embodiments, the above-mentioned right of way approval module 603 is specifically used to obtain the first distance between each target semiconductor handling equipment to be passed through each fork entrance of the target fork area and the corresponding fork entrance and the driving route type of each target semiconductor handling equipment when the task priorities of the target semiconductor handling equipment in the target fork area are the same; the first distance is corrected based on the driving route type of each target semiconductor handling equipment to obtain the second distance; based on the second distance, the first distance of each target semiconductor handling equipment identifier with the same task priority is sorted. Obtaining the right of way approval result based on the first priority sorting result of each target semiconductor handling equipment identifier includes: obtaining the right of way approval result based on the first distance sorting result of each target semiconductor handling equipment identifier.

[0202] In one of the optional embodiments, the above-mentioned right of way approval module 603 is specifically used to obtain the target semiconductor handling equipment identification of the target semiconductor handling equipment corresponding to each of the fork entrances of the target fork area; detect whether the target semiconductor handling equipment at each fork entrance of the target fork area belongs to a semiconductor handling equipment group; when the target semiconductor handling equipment at the fork entrance of the target fork area belongs to a semiconductor handling equipment group, obtain the task priority of the semiconductor handling equipment group; when the target semiconductor handling equipment at the fork entrance of the target fork area does not belong to a semiconductor handling equipment group, obtain the task priority of the target semiconductor handling equipment; based on the acquired task priorities of each target semiconductor handling equipment and the task priority of the semiconductor handling equipment group, perform second priority sorting on the target semiconductor handling equipment identification and the semiconductor handling equipment group; based on the target semiconductor handling equipment identification and the second priority sorting result of the semiconductor handling equipment group, obtain the right of way approval result corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group; wherein, each semiconductor handling equipment belonging to the same semiconductor handling equipment group passes through the target fork area as a whole.

[0203] In one of the optional embodiments, the above-mentioned right of way approval module 603 is specifically used to obtain the third distance between each semiconductor handling equipment group to be passed through the target fork area and the corresponding fork entrance, and obtain the first distance between the semiconductor handling equipment to be passed through the target fork area and the corresponding fork entrance when the task priority of the target semiconductor handling equipment in the target fork area and the task priority of the semiconductor handling equipment group are the same; correct the third distance of the semiconductor handling equipment group to obtain the fourth distance, and correct the first distance of the target semiconductor handling equipment to obtain the second distance; and sort the second distance of each semiconductor handling equipment identifier and the semiconductor handling equipment group based on the fourth distance and the second distance. Based on the second priority sorting result of the target semiconductor handling equipment identifier and the semiconductor handling equipment group, the right of way approval result corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group is obtained, including: based on the target semiconductor handling equipment identifier and the second distance sorting result of the semiconductor handling equipment group, the right of way approval result corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group is obtained.

[0204] In one of the optional embodiments, the above-mentioned right of way approval module 603 is specifically used to detect whether the semiconductor handling equipment corresponding to each of the right of way applications satisfies the following mode, and each of the semiconductor handling equipment in the following mode satisfies the following conditions: each of the semiconductor handling equipment has applied for the right of way of the same target fork area, and each of the semiconductor handling equipment enters the target fork area from the same fork entrance, the interval between each of the semiconductor handling equipment is not greater than the distance threshold, the driving route type of each of the semiconductor handling equipment is straight, and each of the semiconductor handling equipment is adjacent to the semiconductor handling equipment; in the case that there are semiconductor handling equipment that satisfies the following mode, each of the semiconductor handling equipment that satisfies the following mode is regarded as a semiconductor handling equipment group, and the highest task priority of each semiconductor handling equipment in the semiconductor handling equipment group is regarded as the task priority of the semiconductor handling equipment group, and the distance between the semiconductor handling equipment closest to the fork entrance in the semiconductor handling equipment group and the fork entrance is regarded as the distance between the semiconductor handling equipment group and the fork entrance.

[0205] In one of the optional embodiments, the above-mentioned right of way approval module 603 is specifically used to replace the task priority of the second semiconductor handling equipment with the task priority of the first semiconductor handling equipment when the task priority of the first semiconductor handling equipment located at the first branch entrance is higher than the task priority of the target semiconductor handling equipment at the first branch entrance, and the task priority of the first semiconductor handling equipment is higher than the task priority of the target semiconductor handling equipment at the second branch entrance of the target branch area, and the task priority of the target semiconductor handling equipment at the second branch entrance is higher than the task priority of the target semiconductor handling equipment at the first branch entrance; wherein the distance between the semiconductor handling equipment corresponding to the first semiconductor handling equipment identifier and the first branch entrance is greater than the distance between the semiconductor handling equipment corresponding to the target semiconductor handling equipment identifier and the first branch entrance, and the distance between the semiconductor handling equipment corresponding to the second semiconductor handling equipment identifier and the first branch entrance; and sort the semiconductor handling equipment identifiers after replacing the task priorities.

[0206] In one of the optional embodiments, the above-mentioned right of way approval module 603 is specifically used to determine the branch road exits and branch road entrances passed by each of the target semiconductor handling equipment; when the branch road exits and branch road entrances passed by each of the target semiconductor handling equipment do not overlap, generate a right of way approval result regarding the successful application for the right of way of the target branch road area; when the branch road exits and branch road entrances passed by each of the target semiconductor handling equipment overlap, continue to execute the step of obtaining the target semiconductor handling equipment identification of the target semiconductor handling equipment corresponding to each of the branch road entrances of the target branch road area.

[0207] In one of the optional embodiments, it also includes: an uploading module, used to periodically upload road right occupancy information to the scheduling system, the road right occupancy information is used to perform target path planning for each semiconductor handling equipment in the scheduling system, the road right occupancy information includes normal road right occupancy information and abnormal road right occupancy information when the branch area is abnormally occupied.

[0208] In an exemplary embodiment, Figure 7 As shown, another fork area control device for a semiconductor handling system is provided, the semiconductor handling system includes a scheduling system, a fork control system and a semiconductor handling equipment, including:

[0209] The second receiving module 701 is used to receive the task information sent by the business system, the road right occupancy information sent by the fork road management and control system, and the semiconductor handling equipment position and speed information sent by each semiconductor handling equipment;

[0210] A path planning module 702 is used to perform path planning based on the task information, the road right occupancy information, and the position and speed information of each semiconductor handling equipment to obtain a target planned path for each semiconductor handling equipment;

[0211] The second sending module 703 is used to send the target planned path to the branch road control system and each of the semiconductor handling equipment respectively; the target planned path is used to instruct each of the semiconductor handling equipment to generate a road right application based on the target planned path, and send the road right application to the branch road control system, and the target planned path is also used to instruct the branch road control system to review the corresponding road right application based on each of the target planned paths; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each of the road right approval results is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch road area.

[0212] In one of the optional embodiments, the path planning module 702 is specifically used to generate an initial planned path corresponding to each semiconductor handling equipment based on the task information and the road right occupancy information; based on the initial planned path, the position and speed information of each semiconductor handling equipment, a target planned path for each semiconductor handling equipment is obtained, and the target planned path includes the position of a semiconductor handling equipment at each time.

[0213] Each module in the above-mentioned fork area control device for semiconductor handling system can be implemented in whole or in part by software, hardware and their combination. Each of the above-mentioned modules can be embedded in or independent of the processor in the computer device in the form of hardware, or can be stored in the memory of the computer device in the form of software, so that the processor can call and execute the operations corresponding to each of the above modules.

[0214] In an exemplary embodiment, a computer device is provided. The computer device may be a terminal, and its internal structure diagram may be as shown in FIG. Figure 8As shown. The computer device includes a processor, a memory, an input / output interface, a communication interface, a display unit and an input device. Among them, the processor, the memory and the input / output interface are connected through a system bus, and the communication interface, the display unit and the input device are connected to the system bus through the input / output interface. Among them, the processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The input / output interface of the computer device is used to exchange information between the processor and the external device. The communication interface of the computer device is used to communicate with an external terminal in a wired or wireless manner, and the wireless manner can be implemented through WIFI, a mobile cellular network, near field communication (Near Field Communication, NFC) or other technologies. When the computer program is executed by the processor, a method for controlling the fork area of ​​a semiconductor handling system is implemented. The display unit of the computer device is used to form a visually visible picture, which can be a display screen, a projection device or a virtual reality imaging device. The display screen can be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer device can be a touch layer covering the display screen, or a button, trackball or touchpad set on the computer device shell, or an external keyboard, touchpad or mouse.

[0215] Those skilled in the art will understand that Figure 8 The structure shown in the figure is only a block diagram of a part of the structure related to the solution of the present application, and does not constitute a limitation on the computer device to which the solution of the present application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0216] In one embodiment, a computer device is further provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above method embodiments when executing the computer program.

[0217] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0218] In one embodiment, a computer program product is provided, including a computer program, which implements the steps in the above method embodiments when executed by a processor.

[0219] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The database involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. Non-relational databases may include distributed databases based on blockchains, etc., but are not limited to this. The processor involved in each embodiment provided in this application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, an artificial intelligence (AI) processor, etc., but are not limited to this.

[0220] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0221] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A method for controlling a fork area in a semiconductor handling system, wherein the semiconductor handling system comprises a fork control system and semiconductor handling equipment, wherein: The method is applied to a turnout road management and control system, and the method comprises: Receiving a right-of-way application for a target fork area to be passed through, sent by each semiconductor handling equipment, wherein the right-of-way application carries a semiconductor handling equipment identification corresponding to each semiconductor handling equipment; Acquire each target planning path corresponding to each semiconductor handling equipment identifier; Based on each of the target planning paths, review the corresponding right-of-way application; If the review result of the road right application is passed, generating a road right approval result corresponding to the road right application; The right-of-way approval results are fed back to the corresponding semiconductor handling equipment, and the right-of-way approval results are used to indicate whether the semiconductor handling equipment has the authority to pass through the corresponding target branch area.

2. The method according to claim 1, characterized in that The reviewing of the corresponding right-of-way application based on each target planning path includes: Matching the branch area information corresponding to the track system with the target planned path to obtain each branch area passed by each semiconductor handling equipment and the time of passing each branch area; Based on the semiconductor handling equipment identification, each branch road area passed by each semiconductor handling equipment and the time of passing each branch road area are compared with the right of way application; When each branch area passed by the semiconductor handling equipment is the same as the target branch area corresponding to the right of way application, and the time when the semiconductor handling equipment passes through each branch area is the same as the time when it passes through the target branch area corresponding to the right of way application, the review result of the right of way application is determined to be passed.

3. The method according to claim 1, characterized in that: The generating of a road right approval result corresponding to the road right application includes: Obtaining a target semiconductor handling equipment identifier of a target semiconductor handling equipment corresponding to each fork entrance of the target fork area and a task priority of the target semiconductor handling equipment; Based on the task priority of each target semiconductor handling equipment, sorting each of the target semiconductor handling equipment identifiers by a first priority; A road right approval result is obtained based on the first priority sorting result of each of the target semiconductor handling equipment identifiers.

4. The method according to claim 3, characterized in that After performing a first priority sorting on the semiconductor handling equipment identifiers based on the task priority of each semiconductor handling equipment, the method further includes: When the task priorities of the target semiconductor handling equipment in the target fork area are all the same, obtaining a first distance between each target semiconductor handling equipment to be passed through each fork entrance of the target fork area and the corresponding fork entrance and a driving route type of each target semiconductor handling equipment; Correcting the first distance based on the driving route type of each of the target semiconductor handling equipment to obtain a second distance; Based on the second distance, the target semiconductor handling equipment identifiers having the same task priority are sorted by a first distance; The obtaining of the road right approval result based on the first priority sorting result of each target semiconductor handling equipment identifier includes: obtaining the road right approval result based on the first distance sorting result of each target semiconductor handling equipment identifier.

5. The method according to claim 1, characterized in that The generating of a road right approval result corresponding to the road right application includes: Obtaining a target semiconductor handling equipment identifier of a target semiconductor handling equipment corresponding to each fork entrance of the target fork area; Detecting whether the target semiconductor handling equipment at each fork entrance of the target fork area belongs to a semiconductor handling equipment group; In a case where the target semiconductor handling equipment at the fork entrance of the target fork area belongs to a semiconductor handling equipment group, obtaining the task priority of the semiconductor handling equipment group; When the target semiconductor handling equipment at the fork entrance of the target fork area does not belong to a semiconductor handling equipment group, obtaining the task priority of the target semiconductor handling equipment; Based on the acquired task priorities of the target semiconductor handling equipment and the task priorities of the semiconductor handling equipment group, performing a second priority sorting on the target semiconductor handling equipment identifiers and the semiconductor handling equipment group; Based on the target semiconductor handling equipment identification and the second priority sorting result of the semiconductor handling equipment group, the road right approval results corresponding to each target semiconductor handling equipment and the semiconductor handling equipment group are obtained; wherein, each semiconductor handling equipment belonging to the same semiconductor handling equipment group passes through the target branch area as a whole.

6. The method according to claim 5, characterized in that After performing a second priority sorting on the target semiconductor handling equipment identifiers and the semiconductor handling equipment group based on the acquired task priorities of the target semiconductor handling equipment and the task priorities of the semiconductor handling equipment group, the method further includes: When the task priority of the target semiconductor handling equipment in the target fork area and the task priority of the semiconductor handling equipment group are the same, obtaining a third distance between each semiconductor handling equipment group to pass through the target fork area and the corresponding fork entrance, and obtaining a first distance between the semiconductor handling equipment to pass through the target fork area and the corresponding fork entrance; Correcting the third distance of the semiconductor handling equipment group to obtain a fourth distance, and correcting the first distance of the target semiconductor handling equipment to obtain a second distance; Performing a second distance sorting on each of the semiconductor handling equipment identifiers and the semiconductor handling equipment groups based on the fourth distance and the second distance; The obtaining of the road right approval result corresponding to each of the target semiconductor handling equipment and the semiconductor handling equipment group based on the target semiconductor handling equipment identifier and the second priority sorting result of the semiconductor handling equipment group includes: Based on the target semiconductor handling equipment identifier and the second distance sorting result of the semiconductor handling equipment group, the road right approval result corresponding to each of the target semiconductor handling equipment and the semiconductor handling equipment group is obtained.

7. The method according to claim 6, characterized in that Before obtaining the task priority of the semiconductor handling equipment group, the method further includes: Detect whether the semiconductor handling equipment corresponding to each of the road right applications satisfies the vehicle following mode, in which each of the semiconductor handling equipment satisfies the following conditions: each of the semiconductor handling equipment applies for the road right of the same target fork area, each of the semiconductor handling equipment enters the target fork area from the same fork entrance, the interval between each of the semiconductor handling equipment is not greater than the distance threshold, the driving route type of each of the semiconductor handling equipment is straight, and each of the semiconductor handling equipment is an adjacent semiconductor handling equipment; In the case where there are semiconductor handling equipment that satisfy the following mode, each semiconductor handling equipment that satisfies the following mode is regarded as a semiconductor handling equipment group, and the highest task priority of each semiconductor handling equipment in the semiconductor handling equipment group is regarded as the task priority of the semiconductor handling equipment group, and the distance between the semiconductor handling equipment closest to the branch entrance in the semiconductor handling equipment group and the branch entrance is regarded as the distance between the semiconductor handling equipment group and the branch entrance.

8. The method according to claim 3 or 4, characterized in that: The first priority sorting of the target semiconductor handling equipment identifiers based on the task priority of each target semiconductor handling equipment includes: In the case where the task priority of the first semiconductor handling equipment located at the first fork entrance is higher than the task priority of the target semiconductor handling equipment at the first fork entrance, and the task priority of the first semiconductor handling equipment is higher than the task priority of the target semiconductor handling equipment at the second fork entrance of the target fork area, and the task priority of the target semiconductor handling equipment at the second fork entrance is higher than the task priority of the target semiconductor handling equipment at the first fork entrance, the task priority of the second semiconductor handling equipment is replaced with the task priority of the first semiconductor handling equipment; wherein the distance between the semiconductor handling equipment corresponding to the first semiconductor handling equipment identifier and the first fork entrance is greater than the distance between the semiconductor handling equipment corresponding to the target semiconductor handling equipment identifier and the first fork entrance, and the distance between the semiconductor handling equipment corresponding to the second semiconductor handling equipment identifier and the first fork entrance; The first priority order is performed on each of the semiconductor handling equipment identifiers after the task priority is replaced.

9. The method according to any one of claims 3 to 7, characterized in that: The method further comprises: Determine the fork exit and fork entrance passed by each of the target semiconductor handling equipment; In the case that the fork road exits and fork road entrances passed by the target semiconductor handling equipment do not overlap, generating a road right approval result regarding a successful road right application for the target fork road area; In the case where the branch exits and branch entrances passed by the target semiconductor handling equipment overlap, the step of obtaining the target semiconductor handling equipment identifications of the target semiconductor handling equipment corresponding to the branch entrances of the target branch area is continued.

10. The method according to claim 1, characterized in that The method further comprises: The road right occupancy information is periodically uploaded to the scheduling system, and the road right occupancy information is used to perform target path planning for each semiconductor handling equipment in the scheduling system. The road right occupancy information includes normal road right occupancy information and abnormal road right occupancy information when the branch area is abnormally occupied.

11. A method for controlling a fork area in a semiconductor handling system, wherein the semiconductor handling system comprises a dispatching system, a fork control system and semiconductor handling equipment, wherein: The method is applied to a scheduling system, and the method comprises: Receive task information issued by the business system, road right occupancy information sent by the fork road control system, and semiconductor handling equipment position and speed information sent by each semiconductor handling equipment; Based on the task information, the road right occupancy information, and the position and speed information of each semiconductor handling equipment, path planning is performed to obtain a target planned path for each semiconductor handling equipment; The target planned path is sent to the branch road control system and each of the semiconductor handling equipment respectively; the target planned path is used to instruct each of the semiconductor handling equipment to generate a road right application based on the target planned path, and send the road right application to the branch road control system, and the target planned path is also used to instruct the branch road control system to review the corresponding road right application based on each of the target planned paths; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each of the road right approval results is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch road area.

12. The method according to claim 11, characterized in that The path planning based on the task information, the road right occupation information and the position and speed information of each semiconductor handling equipment is performed to obtain a target planning path for each semiconductor handling equipment, including: Based on the task information and the road right occupancy information, generating an initial planning path corresponding to each semiconductor handling equipment; Based on the initial planned path, the position and speed information of each semiconductor handling equipment, a target planned path for each semiconductor handling equipment is obtained, and the target planned path includes the position of a semiconductor handling equipment at each moment.

13. A fork area control device for a semiconductor handling system, the semiconductor handling system comprising a fork control system and a semiconductor handling device, characterized in that: The device is applied to a turnout road management and control system, and comprises: A first receiving module is used to receive a right-of-way application sent by each semiconductor handling equipment for a target fork area to be passed, wherein the right-of-way application carries a semiconductor handling equipment identification corresponding to each semiconductor handling equipment; A review module, used for obtaining each target planning path corresponding to each semiconductor handling equipment identifier; and reviewing the corresponding right of way application based on each target planning path; A road right approval module, used for generating a road right approval result corresponding to the road right application when the review result of the road right application is passed; The first sending module is used to feed back each of the road right approval results to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass through the corresponding target branch area.

14. A fork area control device for a semiconductor handling system, the semiconductor handling system comprising a dispatching system, a fork control system and semiconductor handling equipment, characterized in that: The device is applied to a dispatching system, and comprises: The second receiving module is used to receive the task information sent by the business system, the road right occupancy information sent by the fork road control system, and the semiconductor handling equipment position and speed information sent by each semiconductor handling equipment; A path planning module, configured to perform path planning based on the task information, the road right occupancy information, and the position and speed information of each semiconductor handling device to obtain a target planned path for each semiconductor handling device; The second sending module is used to send the target planned path to the branch road control system and each of the semiconductor handling equipment respectively; the target planned path is used to instruct each of the semiconductor handling equipment to generate a road right application based on the target planned path, and send the road right application to the branch road control system, and the target planned path is also used to instruct the branch road control system to review the corresponding road right application based on each of the target planned paths; when the review result of the road right application is passed, a road right approval result corresponding to the road right application is generated; each of the road right approval results is fed back to the corresponding semiconductor handling equipment, and the road right approval result is used to indicate whether the semiconductor handling equipment has the authority to pass the corresponding target branch road area.

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