Mechanical arm for transferring light emitting elements and method for manufacturing a display panel
By designing a robotic arm picking unit with adjustable limiting structure and adjacent distance, the problem that existing robotic arms cannot adapt to the transfer of light-emitting elements of different sizes and spacings has been solved, realizing efficient batch transfer and yield improvement of Micro LED display panels.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- TIANMA ADVANCED DISPLAY TECH INST (XIAMEN) CO LTD
- Filing Date
- 2024-12-26
- Publication Date
- 2026-04-17
AI Technical Summary
Existing robotic arms can only transfer micro-light-emitting elements with fixed transfer parameters, making it difficult to adapt to the transfer needs of micro-light-emitting elements of different sizes and spacings.
A robotic arm was designed, in which the picking units in the picking unit group have adjustable limiting structures and adjustable adjacent distances, which can adapt to the transfer of light-emitting elements of different sizes and spacings. The light-emitting elements are adsorbed and fixed by the limiting structure, and batch transfer is carried out simultaneously by multiple picking units.
It enables flexible transfer of light-emitting elements of different sizes and spacings, improving transfer efficiency and product yield, and is suitable for mass production of Micro LED display panels.
Smart Images

Figure CN119742258B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of light-emitting element transfer technology, and in particular to a robotic arm for transferring light-emitting elements and a method for preparing a display panel. Background Technology
[0002] Micro-light-emitting element (LED) display technology miniaturizes and matrixes traditional display devices, and uses integrated circuit technology to fabricate driving circuits to achieve addressing control and individual driving of each pixel. Display panels using micro-light-emitting elements outperform traditional display panels in various indicators such as brightness, lifespan, contrast ratio, response time, energy consumption, viewing angle, and resolution. They also have advantages such as self-illumination, simple structure, small size, and energy saving, making them one of the main development directions in the field of display devices today.
[0003] Currently, the fabrication process of display panels using micro-light-emitting elements requires multiple transfer operations of these elements using robotic arms. Existing robotic arms can only transfer micro-light-emitting elements with fixed transfer parameters, making it inconvenient to transfer micro-light-emitting elements with different transfer parameters. Summary of the Invention
[0004] In view of the above problems, this application provides a robotic arm for transferring light-emitting elements and a method for manufacturing a display panel. When the robotic arm is used to transfer light-emitting elements, it can transfer light-emitting elements with different transfer parameters. The specific solution is as follows:
[0005] The first aspect of this application provides a robotic arm for transferring light-emitting elements, comprising:
[0006] Mechanical body;
[0007] At least one pickup unit group installed on the mechanical body, the pickup unit group including a plurality of pickup units arranged sequentially along a first direction, the pickup unit having a limiting structure for adsorbing and fixing the light-emitting element;
[0008] Among them, the size of the limiting structure in the pickup unit can be adjusted, and / or the distance between adjacent pickup units in the same pickup unit group can be adjusted.
[0009] As described above, in the robotic arm provided in this application, the pickup units of the pickup unit group can adsorb and transfer light-emitting elements through a limiting structure. Therefore, the robotic arm can control one pickup unit to adsorb and transfer a light-emitting element, realizing the transfer of a single light-emitting element. It can also use multiple pickup units to simultaneously adsorb and transfer multiple light-emitting elements, realizing the batch transfer of multiple light-emitting elements. If the size of the limiting structure in the pickup unit is adjustable, it can be adjusted to allow the limiting structure to adsorb and fix light-emitting elements of different sizes, thereby enabling the robotic arm to transfer light-emitting elements of different sizes. If the distance between adjacent pickup units in the same pickup unit group is adjustable, the robotic arm can be used for the batch transfer of light-emitting elements with different spacings.
[0010] A second aspect of this application provides a method for manufacturing a display panel, comprising:
[0011] Provide array substrate;
[0012] The aforementioned robotic arm simultaneously transfers multiple light-emitting elements to the array substrate through multiple pickup units in the pickup unit group, and then welds and fixes the light-emitting elements to the array substrate.
[0013] As described above, in the fabrication method provided in this application, the robotic arm transfers the light-emitting elements onto the array substrate. The robotic arm can adjust the size of the limiting structure according to the size of the light-emitting elements in the display panel, so that the limiting structure can adapt to the size of the light-emitting elements in the display panel, enabling the individual or batch transfer of light-emitting elements of a given size from the display panel to the array substrate. The robotic arm can also adjust the distance between the picking units according to the distance between the light-emitting elements in the display panel, so that the distance between the picking units adapts to the distance between the light-emitting elements in the display panel, enabling the individual or batch transfer of light-emitting elements with a given spacing from the display panel to the array substrate. Attached Figure Description
[0014] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0015] The structures, proportions, sizes, etc., shown in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this application. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and purposes that this application can produce, should still fall within the scope of the technical content disclosed in this application.
[0016] Figure 1 This is a schematic diagram of the structure of a robotic arm provided in an embodiment of this application;
[0017] Figure 2 A schematic diagram illustrating the distribution of each pickup unit in the same pickup unit group provided in an embodiment of this application;
[0018] Figure 3 This is a schematic diagram of another robotic arm provided in an embodiment of this application;
[0019] Figure 4 This is a schematic diagram of the structure of another robotic arm provided in the embodiments of this application;
[0020] Figure 5 This is a schematic diagram of the structure of another robotic arm provided in the embodiments of this application;
[0021] Figure 6 A top view of a picking unit provided in an embodiment of this application;
[0022] Figure 7 for Figure 6 A cross-sectional view of the picking unit shown;
[0023] Figure 8 This is a schematic diagram of the structure of another robotic arm provided in the embodiments of this application;
[0024] Figure 9 for Figure 8 A top view of the picking unit in the robotic arm shown;
[0025] Figure 10 for Figure 8 A cross-sectional view of the picking unit in the robotic arm shown;
[0026] Figure 11 This is a schematic diagram of the light-emitting element transfer principle provided in an embodiment of this application;
[0027] Figure 12 This is a schematic diagram of another light-emitting element transfer principle provided in an embodiment of this application;
[0028] Figure 13 A cross-sectional view of a picking unit provided in an embodiment of this application;
[0029] Figure 14 A schematic flowchart illustrating a method for manufacturing a display panel according to an embodiment of this application;
[0030] Figure 15 This is a schematic diagram illustrating the working principle of a robotic arm for batch transfer of light-emitting elements to prepare a display panel, based on an embodiment of this application.
[0031] Figure label:
[0032] 11-Mechanical body; 111-Support component; 112-Rotary telescopic shaft; 12-Pickup unit group; 121-Pickup unit; 13-Limiting structure; 14-Interdigitating fingers; 15-Mounting part; 16-First adjusting component; 180-Pickup body; 181-First protrusion; 182-Second protrusion; 19-Second adjusting component; 20-Light-emitting element; 201-Electrode; 21-Temporary bonding block; 22-Debonding module. Detailed Implementation
[0033] The embodiments of this application will now be clearly and completely described with reference to the accompanying drawings. Those skilled in the art will recognize that, with technological advancements and the emergence of new scenarios, the technical solutions provided in the embodiments of this application are equally applicable to similar technical problems.
[0034] As described in the background section, conventional robotic arms can only transfer light-emitting elements with fixed transfer parameters. These parameters include the size of the micro-light-emitting element and the distance between adjacent micro-light-emitting elements during batch transfer. Therefore, conventional robotic arms can only transfer micro-light-emitting elements of a single size. When transferring multiple micro-light-emitting elements in batches simultaneously, conventional robotic arms can only transfer micro-light-emitting elements with a fixed spacing.
[0035] To address the aforementioned problems, embodiments of this application provide a robotic arm for transferring light-emitting elements, comprising:
[0036] Mechanical body;
[0037] At least one pickup unit group installed on the mechanical body, the pickup unit group including a plurality of pickup units arranged sequentially along a first direction, the pickup unit having a limiting structure for adsorbing and fixing the light-emitting element;
[0038] Among them, the size of the limiting structure in the pickup unit can be adjusted, and / or the distance between adjacent pickup units in the same pickup unit group can be adjusted.
[0039] In the robotic arm provided in this application embodiment, the picking unit of the picking unit group can adsorb and transfer the light-emitting element through the limiting structure. Therefore, the robotic arm can control one picking unit to adsorb and transfer the light-emitting element to realize the transfer of a single light-emitting element. It can also use multiple picking units to simultaneously adsorb and transfer multiple light-emitting elements to realize the batch transfer of multiple light-emitting elements.
[0040] Furthermore, the dimensions of the limiting structure within the pickup unit can be adjusted, and / or the distance between adjacent pickup units within the same pickup unit group can be adjusted. If the dimensions of the limiting structure within the pickup unit are adjustable, the limiting structure can be adjusted to adsorb and fix light-emitting elements of different sizes, thereby enabling the transfer of light-emitting elements of different sizes by a robotic arm. If the distance between adjacent pickup units within the same pickup unit group is adjustable, the robotic arm can be used for batch transfer of light-emitting elements with different spacings.
[0041] In this embodiment, the micro light-emitting element can be a Micro LED or a Mini LED. It should be noted that, in this embodiment, the light-emitting element is not limited to a micro light-emitting element; it can also be a conventional large-size LED.
[0042] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0043] refer to Figure 1 , Figure 1 This is a schematic diagram of a robotic arm provided in an embodiment of this application. The robotic arm shown can be used to transfer light-emitting elements, which can be micro LEDs (such as Micro LEDs or Mini LEDs) or conventional large-size LEDs.
[0044] like Figure 1 As shown, the robotic arm includes:
[0045] Mechanical body 11;
[0046] At least one pickup unit group 12 is installed on the mechanical body. The pickup unit group 12 includes a plurality of pickup units 121 arranged sequentially along the first direction X. The pickup unit 121 has a limiting structure 13 for adsorbing and fixing the light-emitting element.
[0047] Among them, the size a of the limiting structure 13 in the pickup unit 121 can be adjusted, and / or the distance b between adjacent pickup units 121 in the same pickup unit group 12 can be adjusted.
[0048] In this embodiment of the application, the pickup unit 121 of the pickup unit group 12 can adsorb and transfer the light-emitting element through the limiting structure 13. Therefore, the robotic arm can control one pickup unit 121 to adsorb and transfer the light-emitting element to realize the transfer of a single light-emitting element. It can also simultaneously adsorb and transfer multiple light-emitting elements through multiple pickup units 121 to realize the batch transfer of multiple light-emitting elements.
[0049] If the size a of the limiting structure 13 in the pickup unit 121 can be adjusted, the limiting structure 13 can adsorb and fix light-emitting elements of different sizes by adjusting the size a of the limiting structure 13 in the pickup unit 121, so that the robotic arm can transfer light-emitting elements of different sizes.
[0050] If the distance b between adjacent pickup units 121 in the same pickup unit group 12 is adjustable, the robotic arm can be used for batch transfer of light-emitting elements with different spacings by adjusting the distance b between adjacent pickup units 121.
[0051] refer to Figure 2 , Figure 2 This is a schematic diagram illustrating the distribution of each pickup unit in the same pickup unit group provided in the embodiments of this application. Based on the above implementation methods, combined with... Figure 1 and Figure 2 As shown, the mechanical body 11 includes a support member 111, which extends along a first direction X; N interdigitated fingers 14 are provided on the same side surface of the support member 111, which extend along a second direction Y, perpendicular to the first direction X; along the first direction X, the N interdigitated fingers 14 are sequentially numbered from the 1st to the Nth interdigitated finger, where N is a positive integer greater than 1, such as... Figure 2 From bottom to top, the interdigitated fingers are numbered 1, 2, ..., N; the pickup unit group 12 has N pickup units 121, which are numbered sequentially from the 1st pickup unit to the Nth pickup unit along the first direction X, as shown below. Figure 2 From bottom to top, the units are numbered 1, 2, ..., N; the i-th unit is located at the i-th interdigitated finger, where i is a positive integer not greater than N.
[0052] exist Figure 1 and Figure 2 In the illustrated configuration, the support member 111 extends along the first direction X. On the same side of the support member 111, a first to an Nth interdigitated finger are sequentially arranged along the first direction X. Each pickup unit 121 in the same pickup unit group 12 is correspondingly arranged on the first to Nth interdigitated finger, facilitating the assembly of the pickup unit 121 on the support member 111. Batch transfer of light-emitting elements can be achieved using a robotic arm with an interdigitated finger structure.
[0053] exist Figure 1In the illustrated configuration, along the first direction X, the position of each fork 14 on the support 111 can be set to remain fixed. At this time, the distance b between adjacent pickup units 121 is fixed, meaning b cannot be adjusted.
[0054] refer to Figure 3 , Figure 3 This is a schematic diagram of another robotic arm provided in an embodiment of this application. Based on the above-described implementation, Figure 3 In the illustrated configuration, the support member 111 includes N mounting portions 15 arranged sequentially in the first direction X. Adjacent mounting portions 15 are connected by a first adjusting member 16, which is used to adjust the distance between adjacent mounting portions 15. Along the first direction X, the N mounting portions 15 are sequentially arranged from the first mounting portion to the Nth mounting portion, and the i-th picking unit is located on the i-th mounting portion.
[0055] exist Figure 3 In the illustrated configuration, N pickup units 121 from the same pickup unit group 12 can be mounted one-to-one on the mounting portion 15. The distance between two adjacent pickup units 121 in the same pickup unit group 12 can be adjusted (i.e., adjusted by b) via the first adjusting member 16 between adjacent mounting portions 15. In this configuration, the distance b can be adjusted via the first adjusting member 16, allowing b to be adjusted according to requirements, so that the robotic arm is not limited to batch transfer of light-emitting elements distributed at a single distance.
[0056] Optionally, the first adjusting element 16 can be a distance adjuster. The distance adjuster can adjust the distance between two adjacent mounting parts 15, thereby adjusting the distance between two adjacent pickup units 121 installed on the two mounting parts 15, thus realizing the adjustment of b.
[0057] In this embodiment of the application, if a pickup unit group 12 has N pickup units 121, and the robotic arm is used to transfer multiple light-emitting elements in batches at the same time, then at most N light-emitting elements arranged in a straight line can be transferred at the same time through a pickup unit group 12.
[0058] When it is necessary to transfer n light-emitting elements arranged in a straight line with a first spacing in batches, n is a positive integer not greater than N. b can be adjusted to be equal to the first spacing. For example, the n light-emitting elements can be transferred in batches simultaneously through n consecutive pickup units 121 in the same pickup unit group 12. As mentioned above, b can be adjusted to be equal to the first spacing through the first adjustment member 16.
[0059] When it is necessary to transfer n light-emitting elements arranged in a straight line with a second spacing in batches, the second spacing is not equal to the first spacing. b can be adjusted to be equal to the second spacing. For example, the n light-emitting elements can be transferred in batches simultaneously through n consecutive pickup units 121 in the same pickup unit group 12. As mentioned above, b can be adjusted to be equal to the second spacing through the first adjusting member 16.
[0060] In one approach, each of the first adjusting members 16 is adjusted synchronously to ensure that the distance between adjacent picking units 121 in the same picking unit group 12 is the same. In this case, when the robotic arm performs batch transfer of n light-emitting elements arranged in a straight line, the n light-emitting elements need to be arranged at equal intervals.
[0061] In another approach, each of the first adjustment components 16 can be adjusted and controlled independently. In this case, the distance between any two adjacent pickup units 121 in the same pickup unit group 12 can be adjusted independently. When the robotic arm performs batch transfer of n light-emitting elements arranged in a straight line, the n light-emitting elements can be arranged with non-equidistant spacing.
[0062] refer to Figure 4 , Figure 4 This is a schematic diagram of another robotic arm provided in the embodiments of this application. Based on the above embodiments, Figure 4 In the illustrated configuration, the forked finger 14 can rotate about the support member 111. In this configuration, the number and spacing of pickup units 121 within the same pickup unit group 12 can be adjusted by rotating the forked finger about the support member 111.
[0063] like Figure 4 For example, if there are three interdigitated fingers 14 arranged consecutively in the first direction X, each of the three interdigitated fingers 14 can be assigned a pickup unit 121. The distance between two adjacent pickup units 121 is c, which is equivalent to having three pickup units 121 with a spacing of c in a pickup unit group 12. At this time, b=c. When the middle interdigitated finger 14 is rotated outside the straight line of the other interdigitated fingers 14, it is equivalent to changing the number of pickup units 121 in the pickup unit group 12 to two, and the distance between adjacent pickup units 121 becomes 2c+d, where d is the width of the interdigitated finger 14 in the first direction X. At this time, b=2c+d.
[0064] exist Figure 4 In the illustrated method, the number of interdigitated fingers 14 can be set according to requirements, thereby setting the maximum number of pickup units 121 in the same pickup unit group 12, and is not limited to this. Figure 4 In the three shown, the number of interdigitated fingers 14 can be any number.
[0065] In this embodiment of the application, the robotic arm may include a first adjusting member 16; or, the robotic arm may include interdigitated fingers 14 that are rotatable about the support member 111; or, the robotic arm includes the first adjusting member 16 and interdigitated fingers 14 that are rotatable about the support member 111, so that b in the robotic arm is adjustable.
[0066] refer to Figure 5 , Figure 5 This is a schematic diagram of another robotic arm provided in the embodiments of this application. Based on the above embodiments, Figure 5 In the illustrated configuration, multiple pickup unit groups 12 are sequentially mounted on the mechanical body 11 along the second direction Y; wherein the i-th pickup unit in each pickup unit group 12 is located on the i-th interdigitated finger. In this configuration, the multiple pickup units 121 enable the robotic arm to simultaneously pick up two rows of light-emitting elements, thereby improving batch transfer efficiency.
[0067] exist Figure 5 The illustration shows an example with two pickup unit groups 12 mounted on the mechanical body 11. Depending on the application, any number of pickup unit groups 12 can be sequentially mounted on the mechanical body 11. The number of pickup unit groups 12 can be greater than two, and is not limited to this. Figure 5 The two shown.
[0068] exist Figure 5 The illustrated method uses an example of a mechanical body 11 having eight interdigitated fingers 14, which corresponds to each pickup unit group 12 having eight pickup units 121. Depending on the usage requirements, any number of interdigitated fingers 14 can be sequentially set on the mechanical body 11; the number of interdigitated fingers 14 is not limited to eight and can be any number.
[0069] Optionally, for the robotic arm provided in any embodiment of this application, the limiting structure 13 in the same picking unit group 12 has a fixed size; the limiting structure 13 in at least two picking unit groups 12 has different sizes. In this method, the fixed size of the limiting structure 13 in the picking unit group 12 can be used to transfer light-emitting elements of a suitable size. Since the size 'a' of the limiting structure 13 in at least two picking unit groups 12 is different, the robotic arm has at least two picking unit groups 12 with corresponding different values of 'a', which allows the robotic arm to be used to transfer light-emitting elements of at least two different sizes.
[0070] In one embodiment, when multiple pickup unit groups 12 are sequentially installed on the mechanical body 11, the value of 'a' in each pickup unit group 12 can be fixed, and the value of 'a' in at least two pickup unit groups 12 can be different. In this case, the robotic arm can be used to transfer light-emitting elements of different sizes without the need for a mechanical structure to adjust 'a'.
[0071] For the robotic arm provided in any embodiment of this application, when multiple pickup unit groups 12 are sequentially installed on the mechanical body 11, the size 'a' of the limiting structure 13 in at least one pickup unit group 12 can be adjusted to facilitate the transfer of light-emitting elements of different sizes. In this method, for a pickup unit group 12 with adjustable 'a', different sizes of light-emitting elements can be transferred by adjusting 'a'. Other pickup unit groups 12 can all have a fixed 'a'. If there are at least two pickup unit groups 12 with fixed 'a', the 'a' of each pickup unit group 12 can be set to be different from each other, or the 'a' of each pickup unit group 12 can be the same.
[0072] In the embodiments of this application, for the robotic arm provided in any embodiment of this application, the support member 111 is connected to a rotary telescopic shaft 112. The rotary telescopic shaft 112 can adjust the movement of the support member 111 in the second direction Y, and can also adjust the rotation of the support member 111 along an axis parallel to the second direction Y. Based on the rotary telescopic shaft 112, the robotic arm can move in the XY plane and rotate based on the axis parallel to the second direction Y. The spatial position of the support member 111 can be adjusted as needed to adjust the spatial position of the picking unit group 12, facilitating the transfer of the light-emitting element by the robotic arm.
[0073] refer to Figure 6 and Figure 7 , Figure 6 This is a top view of a picking unit provided in an embodiment of this application. Figure 7 for Figure 6 The cross-sectional view of the pickup unit shown shows that, based on the above embodiment, the pickup unit 121 includes: a pickup body 180; a first protrusion 181 and a second protrusion 182 located on the same side surface of the pickup body 180; wherein the first protrusion 181 and the second protrusion 182 are opposite to each other in the second direction Y, and there is a gap between them, which is the size a of the limiting structure 13, so as to form a limiting structure 13 for adsorbing and fixing the light-emitting element; the second direction Y is perpendicular to the first direction X.
[0074] exist Figure 6 and Figure 7 In the illustrated configuration, two protrusions are provided on the same side surface of the pickup body 180, and a limiting structure 13 for accommodating the light-emitting element is formed based on the distance between the two protrusions. By adjusting the distance between the first protrusion 181 and the second protrusion 182 in the second direction Y, the value of a can be adjusted so that the limiting structure 13 can be used for the transfer of light-emitting elements of different sizes.
[0075] refer to Figures 8-10 , Figure 8 This is a schematic diagram of another robotic arm provided in an embodiment of this application. Figure 9 for Figure 8 The top view of the picking unit in the robotic arm shown. Figure 10 for Figure 8 The cross-sectional view of the picking unit in the robotic arm shown is based on the above-described implementation method. Figures 8-10 In the illustrated configuration, the first protrusion 181 is fixed to the pickup body 180, and the second protrusion 182 is connected to a second adjusting member 19. The second adjusting member 19 is used to adjust the distance between the second protrusion 182 and the first protrusion 181. In this configuration, the second protrusion 182 is moved on the pickup body 180 by the second adjusting member 19 to adjust the distance between the second protrusion 182 and the first protrusion 181. This allows adjustment of 'a', enabling the pickup unit 121 to be adapted to the adsorption and fixation of light-emitting elements of different sizes, and can be used to transfer light-emitting elements of different sizes.
[0076] Optionally, the second adjustment member 19 can be a distance adjuster, which can adjust the movement of the second protrusion 182 on the pickup body 180 to adjust the distance of the second protrusion 182 relative to the first protrusion 181, thereby achieving adjustment of a.
[0077] In this embodiment of the application, the robotic arm may be provided with a first adjusting member 16 so that the robotic arm can adjust b, or the robotic arm may be provided with a second adjusting member 19 so that the robotic arm can adjust a, or the robotic arm may be provided with both the first adjusting member 16 and the second adjusting member 19 so that the robotic arm can adjust a and adjust b.
[0078] When the robotic arm provided in the embodiments of this application transfers the light-emitting element, the transfer principle can be as follows: Figure 11 Or Figure 12 As shown.
[0079] refer to Figure 11 , Figure 11 This is a schematic diagram of the light-emitting element transfer principle provided in the embodiments of this application, in conjunction with the above-described embodiments and accompanying drawings. Figure 11 As shown, the size a of the limiting structure 13 can be adapted to the size of the light-emitting element 20 so that the light-emitting element can be adsorbed and fixed by the limiting structure 13. In this method, during the transfer process, the size a of the limiting structure 13 and the size of the light-emitting element 20 in the second direction Y are equal or approximately equal, so that the opposite side walls of the light-emitting element 20 in the second direction Y can be directly clamped and fixed to facilitate the transfer of the light-emitting element 20.
[0080] The light-emitting element 20 has two electrodes 201 on one side surface, and the other side surface of the light-emitting element 20 faces the limiting structure 13.
[0081] refer to Figure 12 , Figure 12 This is another schematic diagram of the light-emitting element transfer principle provided in the embodiments of this application, in conjunction with the above-described embodiments and accompanying drawings. Figure 11 As shown, the top of the light-emitting element 20 has a temporary bonding block 21; wherein, the size a of the limiting structure 13 is adapted to the size of the temporary bonding block 21, so that the temporary bonding block 21 is adsorbed and fixed by the limiting structure 13. In this way, during the transfer process, the size a of the limiting structure 13 is equal to or approximately equal to the size of the temporary bonding block 21 on the surface of the light-emitting element 20 in the second direction Y, so that the transfer of the light-emitting element 20 can be achieved by clamping and fixing the temporary bonding block 21.
[0082] exist Figure 12 In the illustrated method, since there is no need for mechanical clamping of the light-emitting element 20, damage to the light-emitting element 20 during the transfer process can be prevented, thereby avoiding affecting the performance of the light-emitting element 20 and improving product yield. The temporary bonding block 21 is fixed on the surface of the light-emitting element 20 facing away from the electrode 201.
[0083] refer to Figure 13 , Figure 13 This is a cross-sectional view of a picking unit provided in an embodiment of this application. Based on the above-described implementation method, Figure 13 In the illustrated configuration, the picking unit 121 further includes a debonding module 22, which is used to separate the temporary bonding block 21 and the light-emitting element 20 after the light-emitting element 20 has been transferred. In this configuration, the robotic arm can not only transfer the light-emitting element 20, but also separate the temporary bonding block 21 and the light-emitting element 20 through the debonding module 22 after the transfer of the light-emitting element 20 is completed.
[0084] Optionally, the debonding module 22 can be a laser or a heater.
[0085] When the temporary bonding block 21 is bonded and fixed to the light-emitting element 20 by the photosensitive material, the debonding module 22 can be a laser. The laser can emit light of the required wavelength to make the photosensitive material lose its adhesiveness, so as to achieve the purpose of separating the temporary bonding block 21 and the light-emitting element 20.
[0086] When the temporary bonding block 21 is bonded and fixed to the light-emitting element 20 by the thermosensitive material, the debonding module 22 can be a heater. The heater can be used to heat the temporary bonding block 21 so that the thermosensitive material loses its adhesiveness, thereby achieving the purpose of separating the temporary bonding block 21 and the light-emitting element 20.
[0087] Debonding module 22 can be as follows Figure 13The module is fixed to the side surface of the pickup body 180 opposite to the protrusion. Alternatively, the debonding module 22 can be integrated inside the pickup body 180 to reduce the device size and increase integration.
[0088] Based on the above embodiments, another embodiment of this application provides a method for manufacturing a display panel, which can be as follows: Figure 14 As shown.
[0089] refer to Figure 14 , Figure 14 This is a schematic flowchart illustrating a display panel fabrication method provided in an embodiment of this application. The fabrication method includes:
[0090] Step S11: Provide an array substrate;
[0091] Step S12: Based on the robotic arm provided in any of the above embodiments, multiple light-emitting elements are simultaneously transferred to the array substrate by multiple picking units in the picking unit group, and the light-emitting elements are welded and fixed to the array substrate.
[0092] Based on the foregoing description, the robotic arm can adjust a, so that the picking unit can transfer light-emitting elements of different sizes, and / or, the robotic arm can b, so that adjacent picking units can transfer light-emitting elements with different spacing.
[0093] In this embodiment, the display panel includes at least two light-emitting elements with different luminous colors. For a display panel using micro-LEDs as display pixels, the display panel includes at least a red pixel R, a green pixel G, and a blue pixel B. Due to their different luminous efficiencies, at least two of the red pixel R, green pixel G, and blue pixel B have different sizes. For the same display panel, pixels of different sizes require limiting structures with different 'a' values for transfer. The red pixel R, green pixel G, and blue pixel B are all micro-LEDs.
[0094] When the display panel includes at least two light-emitting elements of different colors, in one embodiment, the size of the limiting structure is adjustable to facilitate the transfer of light-emitting elements of different sizes. In another embodiment, the size of the limiting structure is fixed, and the sizes of the limiting structures in at least two pickup unit groups are different to facilitate the transfer of light-emitting elements of different sizes.
[0095] Taking Micro LED display panels as an example, Micro LED display panels consist of multiple micrometer-sized LEDs individually packaged to form a single display pixel. They possess unparalleled advantages in luminous efficiency, power consumption, contrast ratio, response speed, and lifespan, making them a key choice for next-generation mainstream displays. Currently, the mass production of Micro LED display panels still faces many technological bottlenecks that need to be overcome, such as Micro LED fabrication, mass transfer (MT), testing, and repair. Mass transfer, in particular, is the process of transferring a large number of Micro LEDs from a source substrate to a target substrate, impacting the progress of mass production of Micro LED display panels. Therefore, how to quickly and accurately transfer a large number of Micro LEDs to the target location has become a pressing issue for mass transfer technology.
[0096] Based on the robotic arm provided in this application embodiment, not only can batch transfer of Micro LEDs be realized, but also Micro LEDs of different sizes and different spacings in the display panel can be transferred using the same robotic arm without changing transfer parts, thus improving the transfer efficiency of Micro LEDs.
[0097] refer to Figure 15 , Figure 15 This is a schematic diagram illustrating the working principle of a robotic arm for batch transfer of light-emitting elements to fabricate a display panel based on an embodiment of this application. The fabrication process of the display panel mainly includes... Figure 15 The six process steps shown are as follows:
[0098] Step 1: Preparation of the Micro LED chip substrate. Prepare a chip substrate with multiple Micro LEDs.
[0099] Step 2: Mass transfer and pickup of Micro LEDs. A robotic arm can be used to transfer Micro LEDs from the chip substrate to a carrier plate in batches, ensuring that the electrodes of the Micro LEDs all face the carrier plate.
[0100] Step 3: Mass transfer of Micro LEDs to the array substrate (BP). A robotic arm can be used to transfer Micro LEDs in batches from the carrier plate to the array substrate. Before this transfer, since the electrodes of the Micro LEDs all face the carrier plate, this transfer ensures that the electrodes of the Micro LEDs all face the array substrate, facilitating soldering and fixing to the circuitry on the array substrate.
[0101] Step 4: Mass release and bonding of Micro LEDs. Based on step 3, after the Micro LEDs are transferred in large quantities to the array substrate using a robotic arm, the Micro LEDs are released onto the array substrate in batches, and the Micro LEDs and the circuitry on the array substrate are soldered and fixed.
[0102] Step 5: Repeat steps 2 through 4.
[0103] Step 6: The mass transfer of Micro LEDs is complete, and all pixels of the display panel on the array substrate have been transferred.
[0104] As can be seen from the above description, the robotic arm provided in the embodiments of this application can realize the batch transfer of light-emitting elements of different sizes and different spacings, so as to improve the transfer efficiency and improve the product yield.
[0105] The various embodiments in this application are described in a progressive, parallel, or combined manner. Each embodiment focuses on its differences from other embodiments, and similar or identical parts between embodiments can be referred to interchangeably. The embodiments provided in this application can be combined with each other without contradiction.
[0106] It should be noted that, in the description of this application, the accompanying drawings and embodiments are illustrative rather than restrictive. The same reference numerals throughout the embodiments identify the same structures. Additionally, for ease of understanding and description, the thicknesses of some layers, films, panels, regions, etc., may be exaggerated in the drawings. It is also understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, the element may be directly on the other element or there may be intermediate elements. Furthermore, "on" means positioning an element on or below another element, but does not inherently mean positioning it above another element according to the direction of gravity.
[0107] The terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the middle.
[0108] It should also be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or apparatus comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or apparatus that includes the aforementioned element.
[0109] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A robotic arm for transferring light-emitting elements, characterized in that, The robotic arm includes: Mechanical body; At least one pickup unit group is installed on the mechanical body, the pickup unit group includes a plurality of pickup units arranged sequentially along a first direction, and the pickup unit has a limiting structure for adsorbing and fixing the light-emitting element; The size of the limiting structure in the pickup unit can be adjusted, and the distance between adjacent pickup units in the same pickup unit group can be adjusted. The top of the light-emitting element has a temporary bonding block; wherein the size of the limiting structure is adapted to the size of the temporary bonding block, so as to adsorb and fix the temporary bonding block by the limiting structure; the picking unit further includes a debonding module for separating the temporary bonding block and the light-emitting element after the light-emitting element is transferred. The mechanical body includes a support member that extends along a first direction; the support member has N interdigitated fingers on the same side surface that extend along a second direction that is perpendicular to the first direction; along the first direction, the N interdigitated fingers are sequentially numbered from the 1st interdigitated finger to the Nth interdigitated finger, where N is a positive integer greater than 1. The picking unit group has N picking units, and along the first direction, the N picking units are sequentially the 1st picking unit to the Nth picking unit; the i-th picking unit is located at the i-th interdigitated finger, where i is a positive integer not greater than N; The interdigitated fingers are capable of rotating about the support member as an axis.
2. The robotic arm according to claim 1, characterized in that, The support member includes N mounting parts arranged sequentially along the first direction. Adjacent mounting parts are connected by a first adjusting member, which is used to adjust the distance between adjacent mounting parts. Along the first direction, the N mounting parts are sequentially numbered from the first mounting part to the Nth mounting part, and the i-th picking unit is located on the i-th mounting part.
3. The robotic arm according to claim 1, characterized in that, Along the second direction, a plurality of the pickup unit groups are sequentially installed on the mechanical body; In each of the aforementioned pickup unit groups, the i-th pickup unit is located on the i-th interdigitated finger.
4. The robotic arm according to claim 3, characterized in that, Within the same pickup unit group, the limiting structure has a fixed size; the limiting structure has different sizes in at least two pickup unit groups.
5. The robotic arm according to claim 3, characterized in that, The size of the limiting structure in at least one of the pickup unit groups is adjustable.
6. The robotic arm according to claim 1, characterized in that, The support member is connected to a rotary telescopic shaft, which can adjust the movement of the support member in the second direction and also adjust the rotation of the support member along an axis parallel to the second direction.
7. The robotic arm according to claim 1, characterized in that, The pickup unit includes: a pickup body; a first protrusion and a second protrusion located on the same side surface of the pickup body; The first protrusion and the second protrusion are opposite each other in a second direction and have a gap between them to form a limiting structure for adsorbing and fixing the light-emitting element; the second direction is perpendicular to the first direction.
8. The robotic arm according to claim 7, characterized in that, The first protrusion is fixed to the pickup body, and the second protrusion is connected to a second adjusting member, which is used to adjust the distance between the second protrusion and the first protrusion.
9. The robotic arm according to claim 1, characterized in that, The debonding module is a laser or a heater.
10. A method for manufacturing a display panel, characterized in that, include: Provide array substrate; Based on the robotic arm as described in any one of claims 1-9, multiple light-emitting elements are simultaneously transferred to the array substrate by multiple picking units in the picking unit group, and the light-emitting elements are welded and fixed to the array substrate.
11. The preparation method according to claim 10, characterized in that, The display panel includes at least two light-emitting elements with different emitting colors; The size of the limiting structure can be adjusted to transfer light-emitting elements of different sizes. Alternatively, the size of the limiting structure is fixed, and the size of the limiting structure in at least two of the pickup unit groups is different, so as to transfer the light-emitting elements of different sizes respectively.
Citation Information
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