Supporting mechanism, semiconductor equipment and mounting method of ejector pin

Abstract

The invention provides a supporting mechanism, semiconductor equipment and an installation method of an ejector pin, and relates to the technical field of semiconductors. The supporting mechanism comprises a hammer body, and a first through hole and a first assembling hole communicated with the first through hole are formed in the hammer body. The ejector pin is arranged in the first through hole in a penetrating manner; and the positioning piece comprises an elastic part and a positioning part which are connected with each other, the elastic part is arranged in the first assembly hole, the positioning part abuts against the ejector pin under the elastic action of the elastic part, the ejector pin can be installed on the basis that the heating disc is not disassembled, and the convenience of installation of the ejector pin is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a support mechanism, a semiconductor device, and a method for installing a ejector pin. Background Art

[0002] In the semiconductor process, the ejector pins are used to support the wafer. The heating plate descends to allow the ejector pins to be pushed out onto the heating plate. After the wafer is placed on the ejector pins, the heating plate rises above the ejector pins to allow the wafer to fall onto the heating plate. The wafer undergoes a process reaction on the heating plate. After the reaction is completed, the heating plate descends to allow the wafer to fall onto the ejector pins again. The robot then takes out the wafer after the reaction.

[0003] Currently, when installing the ejector pin, the heating plate needs to be disassembled, and then the ejector pin and the weight structure at the bottom need to be installed and fixed. Since the heating plate is very heavy, the process of installing the ejector pin is very inconvenient. Summary of the invention

[0004] The purpose of the present application includes, for example, providing a supporting mechanism that can install the ejector pin without disassembling the heating plate, thereby improving the convenience of installing the ejector pin.

[0005] The purpose of the present application also includes providing a semiconductor device, which can install a ejector pin without disassembling the heating plate, thereby improving the convenience of installing the ejector pin.

[0006] The purpose of the present application also includes providing a method for installing an ejector pin, which can install the ejector pin without disassembling the heating plate, thereby improving the convenience of installing the ejector pin.

[0007] The embodiments of the present application can be implemented as follows:

[0008] In a first aspect, an embodiment of the present application provides a support mechanism, which includes:

[0009] A hammer body, wherein the hammer body is provided with a first through hole and a first assembly hole communicating with the first through hole;

[0010] An ejector pin, the ejector pin being inserted into the first through hole;

[0011] The positioning member includes an elastic portion and a positioning portion connected to each other, the elastic portion is arranged in the first assembly hole, and under the elastic action of the elastic portion, the positioning portion is held against the ejector pin.

[0012] Optionally, a positioning matching portion is provided on the ejector pin, and the positioning member includes an elastic portion and a positioning portion. Under the elastic action of the elastic portion, the positioning portion cooperates with the positioning matching portion to position the ejector pin.

[0013] Optionally, the positioning member further includes a positioning top screw, the positioning top screw is arranged in the first assembly hole, the positioning portion is a sphere, and the elastic portion is arranged between the positioning top screw and the sphere;

[0014] The positioning matching portion is a first annular groove. Under the elastic action of the elastic portion, the ball matches with the first groove to position the ejector pin.

[0015] Optionally, the positioning member also includes a positioning screw, the positioning portion is a positioning column, the positioning matching portion is a positioning hole, the elastic portion is arranged between the positioning screw and the positioning column, and the elastic portion is used to push the positioning column to move toward the ejector pin so that the positioning column cooperates with the positioning hole.

[0016] Optionally, the positioning portion is made of sapphire.

[0017] Optionally, a positioning fitting portion is provided on the ejector pin, the positioning member is an annular spring, a slot is provided on the hammer body, the annular spring is arranged in the slot, and the annular spring cooperates with the positioning fitting portion to position the ejector pin.

[0018] Optionally, the hammer body includes a hammer body and a spring seat, and the slot is formed between the hammer body and the spring seat;

[0019] The support mechanism further comprises a fastener, and the fastener passes through the hammer body and the spring seat at the same time;

[0020] Alternatively, a placement groove is provided at the bottom of the hammer body, and the spring seat is arranged in the placement groove and has an interference fit with the placement groove.

[0021] Optionally, a positioning fitting portion is provided on the ejector pin, a second assembly hole is provided on the hammer body, the second assembly hole is communicated with the first through hole, the positioning member includes a spring pressure block and a spring sheet connected to each other, the spring pressure block and the spring sheet are both provided in the second assembly hole, and the spring sheet can cooperate with the positioning fitting portion to position the ejector pin.

[0022] Optionally, there are multiple positioning members, and the multiple positioning members are arranged around the hammer body, and the multiple positioning members are used to position the ejector pins at the same time.

[0023] Optionally, a conical surface is provided on the top of the hammer body, and the conical surface is connected to the inner wall of the first through hole.

[0024] Optionally, when the positioning member positions the ejector pin, the bottom end of the ejector pin is located in the first through hole, and there is a gap between the bottom end of the ejector pin and the bottom end of the hammer body.

[0025] Optionally, the hammer body is provided with a raised portion along its circumference, and a counterweight hole is provided on the raised portion, and a counterweight piece is arranged in the counterweight hole.

[0026] Optionally, the support mechanism further includes a bearing seat, the hammer body is used to be supported on the bearing seat, a limiting portion is protruded from the surface of the bearing seat facing the hammer body, the limiting portion is arranged along the circumference of the bearing seat, and the limiting portion is used to abut the protrusion.

[0027] Optionally, the ejector pin is made of ceramic, quartz or sapphire.

[0028] In the second aspect, the present application also provides a semiconductor device, including a reaction chamber, a heating plate and the supporting mechanism, wherein the hammer, the ejector pin and the heating plate are all arranged in the reaction chamber, the ejector pin penetrates the heating plate and the first through hole in sequence, and under the elastic action of the elastic part, the positioning part is supported by the ejector pin.

[0029] In a third aspect, the present application further provides a method for installing a ejector pin, which is applied to the semiconductor device. The method for installing the ejector pin comprises: passing the ejector pin through the second through hole and then inserting the ejector pin into the first through hole. Under the elastic action of the elastic part, the positioning part is supported against the ejector pin to position the ejector pin.

[0030] The beneficial effects of the support mechanism, semiconductor device and ejector pin installation method provided by the embodiments of the present application include, for example: in order to be able to install the ejector pin without disassembling the heating plate and to improve the convenience of ejector pin installation, a support mechanism is designed, which includes a hammer body, an ejector pin and a positioning member, and a first through hole is provided on the hammer body; the ejector pin is used to pass through the heating plate and then be inserted into the first through hole; the positioning member is provided on the hammer body and is used to position the ejector pin. When the ejector pin needs to be installed, the ejector pin is directly passed through the heating plate and then inserted into the first through hole of the hammer body. At this time, the positioning member positions the ejector pin so that the ejector pin and the hammer body are relatively fixed, thereby realizing the installation of the ejector pin without disassembling the heating plate and improving the convenience of ejector pin installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 This is a cross-sectional view used to show the positional relationship between the heating plate, the ejector pin, and the hammer body in the embodiment of the present application;

[0033] Figure 2 A cross-sectional view of the first hammer body in the embodiment of the present application;

[0034] Figure 3 A cross-sectional view of a second hammer body in an embodiment of the present application;

[0035] Figure 4 This is a cross-sectional view used to show the positional relationship between the heating plate, the ejector pin, the hammer body, and the bearing seat in the embodiment of the present application;

[0036] Figure 5 A partial cross-sectional view of the support mechanism in the embodiment of the present application;

[0037] Figure 6 This is a cross-sectional view of a third hammer body in the embodiment of the present application;

[0038] Figure 7 This is a cross-sectional view of the fourth hammer body in the embodiment of the present application;

[0039] Figure 8 This is a cross-sectional view of the fifth hammer body in the embodiment of the present application;

[0040] Fig. 9 This is a partial structural cross-sectional view of the hammer body in the embodiment of the present application;

[0041] Fig.10 This is a cross-sectional view of the sixth hammer body in the embodiment of the present application.

[0042] Icons: 1- hammer body; 11- first through hole; 12- first assembly hole; 13- positioning end face; 14- conical surface; 15- raised portion; 151- counterweight hole; 16- slot; 161- inclined surface; 17- hammer body; 171- placement groove; 18- spring seat; 19- second assembly hole; 2- ejector pin; 21- first groove; 3- positioning piece; 31- positioning ejector screw; 311- receiving groove; 32- elastic portion; 33- sphere; 34- annular spring; 35- spring pressure block; 36- spring sheet; 4- heating plate; 41- second through hole; 5- bearing seat; 51- limiting portion; 6- gap; 7- fastener. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0044] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0045] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0046] In the description of the present application, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, it is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship in which the product of the invention is usually placed when used. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0047] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0048] It should be noted that, in the absence of conflict, the features in the embodiments of the present application may be combined with each other.

[0049] The inventor of the present application has found that, when installing the ejector pin, the heating plate needs to be disassembled, and then the ejector pin and the weight structure at the bottom need to be installed and fixed. Since the heating plate is very heavy, the process of installing the ejector pin is very inconvenient. The embodiment of the present application provides a support mechanism, which is at least used to solve this technical problem.

[0050] Please refer to Figure 1-Figure 5 The supporting mechanism provided in the embodiment of the present application includes a hammer body 1, an ejector pin 2 and a positioning member 3. The hammer body 1 is provided with a first through hole 11; the ejector pin 2 is used to pass through the heating plate 4 and then be arranged in the first through hole 11; the positioning member 3 is arranged on the hammer body 1 for positioning the ejector pin 2.

[0051] It should be noted that the heating plate 4 is located directly above the hammer body 1, and a second through hole 41 is also provided on the heating plate 4. The second through hole 41 on the heating plate 4 is vertically opposite to the first through hole 11 on the hammer body 1, and the ejector pin 2 is used to pass through the second through hole 41 of the heating plate 4 and then pass through the first through hole 11 of the hammer body 1.

[0052] When it is necessary to install the ejector pin 2, the ejector pin 2 is directly passed through the second through hole 41 of the heating plate 4 and then inserted into the first through hole 11 of the hammer body 1. At this time, the positioning member 3 positions the ejector pin 2 so that the ejector pin 2 and the hammer body 1 are relatively fixed, thereby realizing the installation of the ejector pin 2 without removing the heating plate 4. When it is necessary to remove the ejector pin 2, the ejector pin 2 can be directly pulled out. The installation and removal process of the ejector pin 2 is relatively convenient, which improves the convenience of operation.

[0053] In some embodiments, a positioning matching portion is provided on the ejector pin 2, the positioning member 3 includes an elastic portion 32 and a positioning portion, a first assembly hole 12 is opened on the hammer body 1, the first assembly hole 12 is communicated with the first through hole 11, the elastic portion 32 is arranged in the first assembly hole 12, the elastic portion 32 is connected to the positioning portion, and under the elastic action of the elastic portion 32, the positioning portion cooperates with the positioning matching portion to position the ejector pin 2.

[0054] It should be noted that the elastic portion 32 can push the positioning portion to move under the action of its own elasticity, so that the positioning portion cooperates with the positioning matching portion to position the ejector pin 2.

[0055] In an optional embodiment, the positioning member 3 also includes a positioning top screw 31, which is arranged in the first assembly hole 12, the positioning portion is a sphere 33, and the elastic portion 32 is arranged between the positioning top screw 31 and the sphere 33; the positioning matching portion is an annular first groove 21, and under the elastic action of the elastic portion 32, the sphere 33 cooperates with the first groove 21 to position the ejector pin 2; or, the positioning matching portion is a semicircular or arc-shaped second groove, and a plurality of second grooves are arranged along the circumference of the ejector pin 2, and under the elastic action of the elastic portion 32, the sphere 33 cooperates with any second groove to position the ejector pin 2.

[0056] It should be pointed out that the axial direction of the first assembly hole 12 is perpendicular to the axial direction of the first through hole 11, and a positioning end face 13 is provided in the first assembly hole 12, and the diameter of the positioning end face 13 is larger than the aperture of the first assembly hole 12; the positioning top screw 31 is provided in the first assembly hole 12, and one end of the positioning top screw 31 abuts against the positioning end face 13, and an accommodating groove 311 is provided at the end of the positioning top screw 31 abutting against the positioning end face 13, and the elastic part 32 is a spring, one end of the spring abuts against the inner wall of the accommodating groove 311, and the other end of the spring abuts against the ball 33, and the spring pushes the ball 33 toward the ejector pin 2 under its own elastic force, so that the ball 33 cooperates with the first groove 21 or any second groove.

[0057] When it is necessary to install the ejector pin 2, the ejector pin 2 is passed through the second through hole 41 of the heating plate 4 and then inserted into the first through hole 11 of the hammer body 1. When the first groove 21 on the ejector pin 2 and the first assembly hole 12 are at the same horizontal height, the spring pushes the ball 33 toward the ejector pin 2 under its own elastic force, so that the ball 33 is held in the first groove 21 or any second groove. At this time, the ejector pin 2 and the hammer body 1 are relatively fixed, and the installation of the ejector pin 2 is completed; and when it is necessary to remove the ejector pin 2, the ejector pin 2 is pulled out upward, the ball 33 is separated from the first groove 21 or any second groove, and the ball 33 moves a distance into the first assembly hole 12 until the ejector pin 2 is successively removed from the first through hole 11 of the hammer body 1 and the second through hole 41 of the heating plate 4.

[0058] Optionally, the spring is a high temperature resistant spring or a corrosion resistant spring with high reliability. Of course, the elastic part 32 can also be other elastic elastic bodies, as long as it can push the ball 33 toward the ejector pin 2 under its own elastic force.

[0059] In another optional embodiment, the positioning member 3 includes a positioning screw 31, the positioning portion is a positioning column, the positioning matching portion is a positioning hole, a spring is arranged between the positioning screw 31 and the positioning column, the axial direction of the positioning hole is consistent with the axial direction of the first assembly hole 12, and the spring is used to push the positioning column toward the ejector pin 2 so that the positioning column is passed through the positioning hole and matched with the positioning hole.

[0060] When the ejector pin 2 needs to be installed, the ejector pin 2 is passed through the second through hole 41 of the heating plate 4 and then inserted into the first through hole 11 of the hammer body 1. When the positioning hole on the ejector pin 2 and the first assembly hole 12 are at the same horizontal height, the spring pushes the positioning column toward the ejector pin 2 under its own elastic force, so that the positioning column is inserted into the positioning hole. At this time, the ejector pin 2 can also be relatively fixed to the hammer body 1.

[0061] See also Figure 6-Figure 9In some embodiments, the positioning member 3 is an annular spring 34 , a slot 16 is provided on the hammer body 1 , the annular spring 34 is disposed in the slot 16 , and the annular spring 34 cooperates with the positioning matching portion to position the ejector pin 2 .

[0062] The positioning matching portion is an annular first groove 21, and the annular spring 34 can be held in the first groove 21 under its own elasticity to position the ejector pin 2. Optionally, the annular spring 34 can be made of a high temperature resistant and corrosion resistant alloy material, such as Hastelloy, and the diameter of the annular spring 34 ranges from 0.05 to 0.35 mm.

[0063] Along the axial direction of the first through hole 11 , the inner wall of the slot 16 is provided with two inclined surfaces 161 opposite to each other, and the two inclined surfaces 161 are respectively in contact with the annular spring 34 to adapt to the shape of the annular spring 34 ; alternatively, the inner wall of the slot 16 is provided with an arc surface matching the shape of the annular spring 34 .

[0064] In an optional embodiment, the hammer body 1 includes a hammer body 17 and a spring seat 18, and the slot 16 is formed between the hammer body 17 and the spring seat 18; the support mechanism also includes a fastener 7, and the fastener 7 passes through the hammer body 17 and the spring seat 18 at the same time; or, a placement groove 171 is opened at the bottom of the hammer body 17, and the spring seat 18 is arranged in the placement groove 171 and has an interference fit with the placement groove 171.

[0065] When the fastener 7 is provided, the fastener 7 may be a set screw, which passes through the spring seat 18 and the hammer body 17 at the same time, so that the spring seat 18 and the hammer body 17 are connected. At this time, a slot 16 for placing the annular spring 34 is formed between the hammer body 17 and the spring seat 18, wherein when the spring seat 18 is directly connected to the bottom of the hammer body 17, the set screw extends along the axial direction of the first through hole 11, or, when a placement groove 171 is provided at the bottom of the hammer body 17 and the spring seat 18 is placed in the placement groove 171, the set screw extends in the horizontal direction.

[0066] When a placement groove 171 is formed at the bottom of the hammer body 17 and the spring seat 18 is interference fit with the placement groove 171 , the fastener 7 is not required to fix the spring seat 18 and the hammer body 17 .

[0067] See also Fig.10 In an optional embodiment, a second assembly hole 19 is provided on the hammer body 1, and the second assembly hole 19 is connected to the first through hole 11. The positioning member 3 includes a spring pressure block 35 and a spring sheet 36 connected to each other. The spring pressure block 35 and the spring sheet 36 are both arranged in the second assembly hole 19, and the spring sheet 36 can cooperate with the positioning matching portion to position the ejector pin 2.

[0068] The spring pressure block 35 can also be fixed by a set screw, that is, the set screw passes through the hammer body 17 and is connected to the spring pressure block 35, wherein the set screw extends along the axial direction of the first through hole 11 or extends in the horizontal direction, the positioning matching portion is an annular first groove 21, and the spring sheet 36 matches the first groove 21, or the positioning matching portion is a semicircular or arc-shaped second groove, the number of the second grooves is multiple, and the spring sheet 36 matches any second groove.

[0069] In an alternative embodiment, the positioning portion is made of sapphire.

[0070] It should be noted that the main component of sapphire is aluminum oxide, which is a high-hardness compound. The positioning part made of sapphire has strong hardness and good wear resistance. It is not easy to generate particulate matter when the positioning part contacts the ejector pin 2, which can reduce the pollution of the reaction chamber in the semiconductor equipment.

[0071] In other embodiments, the positioning portion may also be made of other materials, as long as particles are not easily generated when the positioning portion contacts the ejector pin 2 .

[0072] In an optional embodiment, there are multiple positioning members 3 , and the multiple positioning members 3 are arranged around the hammer body 1 . The multiple positioning members 3 are used to position the ejector pin 2 at the same time.

[0073] It should be noted that the hammer body 1 is provided with a plurality of first assembly holes 12 or second assembly holes 19 along its circumference, and a positioning member 3 is disposed in each of the first assembly holes 12 or the second assembly holes 19 .

[0074] Exemplarily, the number of positioning members 3 is three, the hammer body 1 is provided with three first assembly holes 12 or three second assembly holes 19 along its circumference, the angle between the axes of two adjacent first assembly holes 12 or two adjacent second assembly holes 19 is 120°, and the three positioning members 3 are arranged in the three first assembly holes 12 or the three second assembly holes 19 in a one-to-one correspondence.

[0075] When the ejector pin 2 is inserted into the first through hole 11, the elastic parts 32 in the three first assembly holes 12 push the corresponding positioning parts toward the ejector pin 2 under their own elastic force, so that the three positioning parts abut against the first groove 21 or any second groove at the same time, or the spring leaves 36 in the three second assembly holes 19 abut against the first groove 21 or any second groove at the same time under their own elastic force. Since the three positioning parts or the three spring leaves 36 are evenly distributed along the circumference of the ejector pin 2, the ejector pin 2 can be in a relatively stable state.

[0076] In other embodiments, the number of the positioning members 3 may be more than four, as long as the plurality of positioning members 3 are evenly distributed along the circumference of the ejector pin 2 .

[0077] In an optional embodiment, a conical surface 14 is provided on the top of the hammer body 1 , and the conical surface 14 is connected to the inner wall of the first through hole 11 .

[0078] It should be noted that, in the direction in which the ejector pin 2 is inserted into the hammer body 1 , the opening diameter of the tapered surface 14 gradually decreases until it becomes equal to the diameter of the first through hole 11 .

[0079] By providing the conical surface 14 on the top of the hammer body 1 , the conical surface 14 can guide the ejector pin 2 to be inserted into the first through hole 11 , thereby preventing the ejector pin 2 from being damaged due to position deviation.

[0080] In an optional embodiment, when the positioning member 3 positions the ejector pin 2 , the bottom end of the ejector pin 2 is located in the first through hole 11 , and a gap 6 is provided between the bottom end of the ejector pin 2 and the bottom end of the hammer body 1 .

[0081] When the positioning member 3 positions the ejector pin 2, the bottom end of the ejector pin 2 is located in the first through hole 11, and a gap 6 is provided between the bottom end of the ejector pin 2 and the bottom end of the hammer body 1. At this time, the bottom end of the ejector pin 2 is not likely to collide with the components at the bottom of the hammer body 1, causing the ejector pin 2 to break, thereby protecting the ejector pin 2 to a certain extent.

[0082] In other embodiments, when the positioning member 3 positions the ejector pin 2 , the bottom end of the ejector pin 2 is located outside the first through hole 11 and contacts with a component at the bottom of the hammer body 1 , as long as no significant damage is caused to the ejector pin 2 .

[0083] Please continue reading Figure 2-Figure 4 In an optional embodiment, the hammer body 1 is provided with a protrusion 15 along its circumference, and a counterweight hole 151 is opened on the protrusion 15, and a counterweight member (not shown) is arranged in the counterweight hole 151.

[0084] The raised portion 15 is arranged in a circle along the circumference of the hammer body 1, and the raised portion 15 is located in the middle of the hammer body 1, or the top of the raised portion 15 is flush with the top of the hammer body 1; the opening direction of the counterweight hole 151 is consistent with the opening direction of the first through hole 11, and the number of the counterweight holes 151 can be set as needed, and each counterweight hole 151 is used to set a counterweight.

[0085] When the weight of the hammer body 1 needs to be increased, a counterweight piece can be arranged in any counterweight hole 151 to increase the weight of the hammer body 1. The number of counterweight pieces to be arranged is selected according to actual needs, as long as the weight of the hammer body 1 meets the requirements.

[0086] Exemplarily, the counterweight hole 151 is a threaded hole, the number of the threaded holes is multiple, and the counterweight is a bolt. When the weight of the hammer body 1 needs to be increased, a bolt is set in any threaded hole so that the weight of the hammer body 1 meets the requirement.

[0087] In other embodiments, a plurality of counterweight grooves are provided on the raised portion 15, each of which is used to set a counterweight block. When the weight of the hammer body 1 needs to be increased, a counterweight block can be set in any counterweight groove so that the weight of the hammer body 1 meets the requirement.

[0088] In an optional embodiment, the supporting mechanism also includes a bearing seat 5, and the hammer body 1 is used to be supported on the bearing seat 5. A limiting portion 51 is protruded from the surface of the bearing seat 5 facing the hammer body 1. The limiting portion 51 is arranged along the circumference of the bearing seat 5, and the limiting portion 51 is used to abut the protrusion 15.

[0089] It should be pointed out that the limiting portion 51 is annular and is arranged along the circumferential edge of the bearing seat 5. When the hammer body 1 is supported on the bearing seat 5, the top end of the limiting portion 51 is higher than the bottom end of the hammer body 1, and the protrusion 15 is close to the limiting portion 51. When installing or disassembling the hammer body 1, if the hammer body 1 falls over, the limiting portion 51 can abut against the protrusion 15, thereby preventing the hammer body 1 from falling over.

[0090] When the positioning member 3 positions the ejector pin 2, the bottom end of the ejector pin 2 is located in the first through hole 11, and a gap 6 is provided between the bottom end of the ejector pin 2 and the bottom end of the hammer body 1. At this time, the bottom end of the ejector pin 2 is not easy to collide with the bearing seat 5 to cause the ejector pin 2 to break, and the ejector pin 2 is protected to a certain extent.

[0091] In other embodiments, the limiting portion 51 is a limiting rod, and a plurality of limiting rods are protruding from the surface of the bearing seat 5 facing the hammer body 1 . The plurality of limiting rods are arranged at intervals along the circumference of the bearing seat 5 and are all used to abut against the protrusion 15 .

[0092] When the hammer body 1 is supported on the supporting seat 5, the top end of the limiting rod is higher than the bottom end of the hammer body 1, and the protrusion 15 is close to the limiting rod. When the hammer body 1 is installed or removed, if the hammer body 1 falls over, the limiting rod can be supported by the protrusion 15, thereby preventing the hammer body 1 from falling over.

[0093] Alternatively, the limiting portion 51 is an arc-shaped sheet, and a plurality of arc-shaped sheets are protruding from the surface of the bearing seat 5 facing the hammer body 1 . The plurality of arc-shaped sheets are arranged at intervals along the circumference of the bearing seat 5 and are all used to abut against the protrusion 15 .

[0094] When the hammer body 1 is supported on the supporting seat 5, the top end of the arc-shaped sheet is higher than the bottom end of the hammer body 1, and the raised portion 15 is close to the arc-shaped sheet. When the hammer body 1 is installed or removed, if the hammer body 1 falls over, the arc-shaped sheet can be supported by the raised portion 15, thereby preventing the hammer body 1 from falling over.

[0095] Optionally, the ejector pin 2 is made of ceramic, quartz or sapphire.

[0096] It should be noted that the positioning part is made of sapphire, and the ejector pin 2 is made of ceramic, quartz or sapphire. When the positioning part contacts the ejector pin 2, it is not easy to generate particles, thereby reducing the pollution to the reaction chamber in the semiconductor device.

[0097] In other embodiments, the ejector pin 2 may also be made of other metal or non-metal materials, which is not limited thereto.

[0098] The embodiment of the present application also provides a semiconductor device, including a heating plate 4, a reaction chamber and the above-mentioned support mechanism, wherein the heating plate 4, the hammer body 1, the ejector pin 2 and the support seat 5 are all arranged in the reaction chamber, the support seat 5 is used to support the hammer body 1, the heating plate 4 is located above the hammer body 1, the ejector pin 2 passes through the second through hole 41 of the heating plate 4 and then passes through the first through hole 11 of the hammer body 1, when the positioning member 3 positions the ejector pin 2, the ejector pin 2 and the hammer body 1 are relatively fixed, thereby realizing the installation of the ejector pin 2 without disassembling the heating plate 4; and when the ejector pin 2 needs to be disassembled, the ejector pin 2 is pulled out upwards, and the ejector pin 2 can be sequentially removed from the first through hole 11 of the hammer body 1 and the second through hole 41 of the heating plate 4. The technical effects of the semiconductor device and the above-mentioned support mechanism are roughly the same, and will not be repeated here.

[0099] An embodiment of the present application further provides a method for installing a ejector pin, which is applied to the above-mentioned semiconductor device. The method for installing the ejector pin includes: passing the ejector pin 2 through the second through hole 41 and then inserting it into the first through hole 11. Under the elastic action of the elastic portion 32, the positioning portion abuts against the ejector pin 2 to position the ejector pin 2.

[0100] By means of the ejector pin installation method, the ejector pin 2 is passed through the second through hole 41 of the heating plate 4 and then inserted into the first through hole 11 of the hammer body 1. The positioning member 3 positions the ejector pin 2 so that the ejector pin 2 and the hammer body 1 are relatively fixed, thereby realizing the installation of the ejector pin 2 without disassembling the heating plate 4.

[0101] The technical effects of the support mechanism, semiconductor device and ejector pin installation method provided by the embodiments of the present application at least include: when the ejector pin 2 passes through the second through hole 41 of the heating plate 4 and then passes through the first through hole 11 of the hammer body 1, the positioning member 3 will position the ejector pin 2 so that the ejector pin 2 and the hammer body 1 are relatively fixed, thereby realizing the installation of the ejector pin 2 without disassembling the heating plate 4. When the ejector pin 2 needs to be disassembled, the ejector pin 2 can be directly pulled out, and the disassembly and assembly process of the ejector pin 2 is relatively convenient; the positioning portion made of sapphire and the ejector pin are It is not easy to generate particles when the needle 2 contacts, which reduces the pollution to the reaction chamber; the conical surface 14 on the top of the hammer body 1 can guide the ejector pin 2 to be inserted into the first through hole 11, and prevent the position deviation of the ejector pin 2 from causing damage to the ejector pin 2; when it is necessary to increase the weight of the hammer body 1, a counterweight piece can be arranged in any counterweight hole 151 to increase the weight of the hammer body 1; when installing or disassembling the hammer body 1, if the hammer body 1 topples over, the limiting portion 51 on the bearing seat 5 can abut against the protrusion 15 on the hammer body 1, thereby preventing the hammer body 1 from toppling over.

[0102] In summary, the embodiments of the present application provide a support mechanism, a semiconductor device, and a method for installing a ejector pin. When the ejector pin 2 needs to be installed, the ejector pin 2 is directly passed through the second through hole 41 of the heating plate 4 and then inserted into the first through hole 11 of the hammer body 1. At this time, the positioning member 3 can position the ejector pin 2 so that the ejector pin 2 and the hammer body 1 are relatively fixed, thereby realizing the installation of the ejector pin 2 without removing the heating plate 4. When the ejector pin 2 needs to be removed, the ejector pin 2 can be pulled out in the direction away from the supporting seat 5. The installation and removal process of the ejector pin 2 is relatively convenient, which improves the convenience of operation.

[0103] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A support mechanism, characterized in that: include: A hammer body (1), wherein the hammer body (1) is provided with a first through hole (11) and a first assembly hole (12) connected to the first through hole (11); An ejector pin (2), the ejector pin (2) being inserted into the first through hole (11); A positioning member (3), the positioning member (3) comprising an elastic portion (32) and a positioning portion connected to each other, the elastic portion (32) being arranged in the first assembly hole (12), and under the elastic action of the elastic portion (32), the positioning portion is held against the ejector pin (2).

2. The support mechanism according to claim 1, characterized in that: The ejector pin (2) is provided with a positioning matching portion, and under the elastic action of the elastic portion (32), the positioning portion matches with the positioning matching portion to position the ejector pin (2).

3. The support mechanism according to claim 2, characterized in that: The positioning member (3) further comprises a positioning top screw (31), wherein the positioning top screw (31) is arranged in the first assembly hole (12), the positioning portion is a sphere (33), and the elastic portion (32) is arranged between the positioning top screw (31) and the sphere (33); The positioning matching portion is a first annular groove (21), and under the elastic action of the elastic portion (32), the ball (33) matches with the first groove (21) to position the ejector pin (2).

4. The support mechanism according to claim 2, characterized in that: The positioning member (3) further comprises a positioning screw (31), the positioning portion is a positioning column, the positioning matching portion is a positioning hole, the elastic portion (32) is arranged between the positioning screw (31) and the positioning column, and the elastic portion (32) is used to push the positioning column to move toward the ejector pin (2) so that the positioning column matches the positioning hole.

5. The support mechanism according to claim 1, characterized in that: The positioning part is made of sapphire.

6. The support mechanism according to claim 1, characterized in that: The ejector pin (2) is provided with a positioning matching portion, the positioning member (3) is an annular spring (34), a slot (16) is provided on the hammer body (1), the annular spring (34) is arranged in the slot (16), and the annular spring (34) cooperates with the positioning matching portion to position the ejector pin (2).

7. The support mechanism according to claim 6, characterized in that: The hammer (1) comprises a hammer body (17) and a spring seat (18), and the clamping groove (16) is formed between the hammer body (17) and the spring seat (18); The supporting mechanism further comprises a fastener (7), wherein the fastener (7) passes through the hammer body (17) and the spring seat (18) at the same time; Alternatively, a placement groove (171) is provided at the bottom of the hammer body (17), and the spring seat (18) is arranged in the placement groove (171) and is interference-fitted with the placement groove (171).

8. The support mechanism according to claim 1, characterized in that: The ejector pin (2) is provided with a positioning matching portion, the hammer body (1) is provided with a second assembly hole (19), the second assembly hole (19) is communicated with the first through hole (11), the positioning member (3) comprises a spring pressure block (35) and a spring sheet (36) connected to each other, the spring pressure block (35) and the spring sheet (36) are both arranged in the second assembly hole (19), and the spring sheet (36) can cooperate with the positioning matching portion to position the ejector pin (2).

9. The support mechanism according to claim 1, characterized in that: There are a plurality of positioning members (3), and the plurality of positioning members (3) are arranged around the hammer body (1). The plurality of positioning members (3) are used to simultaneously position the ejector pin (2).

10. The support mechanism according to claim 1, characterized in that: A conical surface (14) is provided on the top of the hammer body (1), and the conical surface (14) is connected to the inner wall of the first through hole (11).

11. The support mechanism according to claim 1, characterized in that: When the positioning member (3) positions the ejector pin (2), the bottom end of the ejector pin (2) is located in the first through hole (11), and a gap (6) is provided between the bottom end of the ejector pin (2) and the bottom end of the hammer body (1).

12. The support mechanism according to claim 1, characterized in that: The hammer body (1) is provided with a protrusion (15) along its circumference, and a counterweight hole (151) is provided on the protrusion (15), and a counterweight piece is arranged in the counterweight hole (151).

13. The support mechanism according to claim 12, characterized in that: The support mechanism further comprises a bearing seat (5), the hammer body (1) being used to be carried on the bearing seat (5), a limiting portion (51) being protrudingly provided on the surface of the bearing seat (5) facing the hammer body (1), the limiting portion (51) being arranged along the circumference of the bearing seat (5), and the limiting portion (51) being used to abut against the protruding portion (15).

14. The support mechanism according to any one of claims 1 to 13, characterized in that: The ejector pin (2) is made of ceramic, quartz or sapphire.

15. A semiconductor device, characterized in that: The invention comprises a reaction chamber, a heating plate (4) and a support mechanism according to any one of claims 1 to 14, wherein the hammer body (1), the ejector pin (2) and the heating plate (4) are all arranged in the reaction chamber, a second through hole (41) is provided on the heating plate (4), the ejector pin (2) passes through the second through hole (41) and the first through hole (11) in sequence, and under the elastic action of the elastic part (32), the positioning part is held against the ejector pin (2).

16. A method for installing an ejector pin, characterized in that: Applied to the semiconductor device according to claim 15, the method for installing the ejector pin comprises: The ejector pin (2) is passed through the second through hole (41) and then inserted into the first through hole (11). Under the elastic action of the elastic part (32), the positioning part abuts against the ejector pin (2) to position the ejector pin (2).

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