Universal joint mounting tool and mounting method

Abstract

This invention provides a universal joint installation fixture and method, including a support base and a positioning cover. The support base supports the lower middle part of a carrier and has a positioning ring platform that engages with the lower annular cavity. The middle part of the support base has a lower positioning hole for positioning the lower end of the universal joint. The positioning cover has an upper positioning hole for the upper end of the universal joint to pass through and position it, and a mating ring platform that engages with the upper annular groove. The universal joint installation fixture provided by this invention utilizes the engagement of the positioning ring platform on the support base with the lower annular cavity of the carrier to ensure the coaxiality of the support base and the carrier. Then, the lower positioning hole of the support base positions the lower end of the universal joint. Finally, the upper positioning hole of the positioning cover positions the upper end of the universal joint. After ensuring the coaxiality of the universal joint and the carrier, a connecting piece is used to fix a ring pressure plate to the carrier and the universal joint, ensuring the installation accuracy between the carrier and the universal joint and guaranteeing the polishing quality of the wafer during the polishing process.

Description

Technical Field

[0001] This invention belongs to the field of universal joint installation technology, and more specifically, relates to a universal joint installation fixture and installation method. Background Technology

[0002] As the diameter of semiconductor wafers increases, chemical mechanical polishing (CMP) places higher demands on the flatness, uniformity, and consistency of the wafer surface. To meet these requirements, CMP technology has continuously advanced and developed, including by adopting more advanced polishing head designs, more sophisticated pressure control systems, and more efficient polishing materials.

[0003] The universal joint, a crucial component of the polishing head, primarily functions to stabilize the wafer, apply pressure, and drive rotation. The installation precision of the polishing head directly impacts the polishing removal efficiency and quality of the wafer; therefore, ensuring the precision of the polishing head assembly is paramount. Currently, during polishing head assembly, shims are often placed between the outer peripheral wall of the universal joint and the inner peripheral wall of the carrier to adjust the universal joint's axis. However, precisely controlling the universal joint's centering is difficult, thus affecting the wafer surface removal rate. Summary of the Invention

[0004] The purpose of this invention is to provide a universal joint mounting fixture and mounting method, which can improve the installation accuracy and efficiency of the universal joint, thereby ensuring the assembly effect of the polishing head and facilitating the guarantee of the polishing removal efficiency and removal quality of the wafer.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a universal joint installation fixture is provided for positioning the universal joint onto a carrier. A ring pressure plate is provided above the universal joint and the carrier. The ring pressure plate is connected to the carrier through a connector. The bottom of the carrier has a lower ring cavity with an opening facing downwards, a central cavity with an opening facing upwards, and an upper ring groove located on the outer periphery of the central cavity. The universal joint installation fixture includes a support seat and a positioning cover. The support seat is used to support the lower middle part of the carrier. The support seat has a positioning ring platform that engages with the lower ring cavity. The middle part of the support seat has a lower positioning hole for positioning the lower end of the universal joint. The positioning cover has an upper positioning hole for the upper end of the universal joint to pass through and position the universal joint, and a mating ring platform that engages with the upper ring groove.

[0006] In one possible implementation, the support has an upward-opening weight-reducing cavity that extends circumferentially, and the positioning ring is located on the outer periphery of the weight-reducing cavity.

[0007] In one possible implementation, the bottom wall of the weight reduction cavity is provided with several through holes, which are arranged at intervals along the circumference of the weight reduction cavity, and the positioning ring platform is located on the outer periphery of the weight reduction cavity and is set close to the outer ring of the support.

[0008] In one possible implementation, a downwardly protruding middle ring platform is provided below the positioning cover. The middle ring platform is located on the outer periphery of the upper positioning hole and is used to engage with the inner periphery of the ring pressure plate.

[0009] In some embodiments, a downwardly protruding outer ring platform is provided below the positioning cover, and a receiving cavity for accommodating the positioning ring platform is formed between the outer ring platform and the middle ring platform.

[0010] In one possible implementation, the top wall of the positioning cover is provided with an operating hole located on the outer periphery of the upper positioning hole, the operating hole being used to install the connector onto the ring pressure plate.

[0011] In some embodiments, there are several operating holes, which are spaced apart circumferentially along the positioning cover.

[0012] In some embodiments, the operating holes are fan-shaped holes, and there are four operating holes, with the fan-shaped angle of each operating hole being a right angle.

[0013] Compared with the prior art, the solution shown in this application embodiment utilizes the positioning ring platform on the support seat and the lower ring cavity of the carrier to ensure the coaxiality of the support seat and the carrier. Then, the lower positioning hole of the support seat is used to position the lower end of the universal joint. Finally, the upper positioning hole of the positioning cover is used to position the upper end of the universal joint. After ensuring the coaxiality of the universal joint and the carrier, the ring pressure plate is fixed on the carrier and the universal joint with the help of the connector. This ensures the installation accuracy between the carrier and the universal joint, the polishing quality of the wafer edge position during the polishing process, and the processing quality of the wafer.

[0014] The present invention also provides a method for installing a universal joint onto a carrier using a universal joint installation fixture, comprising the following steps:

[0015] S100: Install the carrier onto the support seat so that the positioning ring platform and the lower ring cavity are engaged and matched;

[0016] S200: Install the universal joint onto the carrier, so that the lower end of the universal joint is positioned and engaged with the lower positioning hole;

[0017] S300: Install the ring pressure plate above the universal joint and the carrier, install the positioning cover on the universal joint, so that the universal joint is positioned and engaged with the upper positioning hole, support the upper end of the universal joint, connect the ring pressure plate and the carrier using the connector, remove the support seat and positioning cover, and complete the installation of the universal joint and the carrier.

[0018] In one possible implementation,

[0019] Step S300 also includes installing the ring pressure plate above the universal joint and the carrier, so that the middle ring platform of the positioning cover is engaged with the inner circumference of the ring pressure plate.

[0020] The above-described universal joint installation method allows for convenient and quick centering of the universal joint relative to the carrier, ensuring coaxiality between the two. This method reduces installation difficulty, saves time, improves the installation accuracy of the universal joint, helps extend the service life of the polishing head, and ensures the polishing quality of the wafer. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is an exploded structural diagram of the universal joint installation fixture provided in an embodiment of the present invention;

[0023] Figure 2 This is an embodiment of the present invention. Figure 1 A structural diagram of the universal joint installation fixture in use;

[0024] Figure 3 This is an embodiment of the present invention. Figure 2 A magnified schematic diagram of the local structure;

[0025] Figure 4 An exploded structural diagram of the universal joint, carrier, and ring pressure plate provided for an embodiment of the present invention;

[0026] Figure 5 This is an exploded structural diagram of the universal joint, carrier, elastic pad, and ring pressure plate provided in an embodiment of the present invention.

[0027] The following are the labeling elements in the figure:

[0028] 1. Support seat; 11. Positioning ring platform; 12. Lower positioning hole; 13. Weight reduction cavity; 14. Through hole; 2. Positioning cover; 21. Upper positioning hole; 22. Mating ring platform; 23. Middle ring platform; 24. Operating hole; 25. Outer ring platform; 3. Universal joint; 4. Carrier; 41. Lower ring cavity; 42. Central cavity; 43. Upper ring groove; 5. Ring pressure plate; 51. Connector; 52. Elastic pad. Detailed Implementation

[0029] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0030] It should be noted that when an element is referred to as being "set on" another element, it can be directly on or indirectly on the other element. It should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the invention, "a number" means two or more, unless otherwise explicitly specified.

[0031] Please refer to the following: Figures 1 to 3 The universal joint installation fixture provided by the present invention will now be described. The universal joint installation fixture is used to position the universal joint 3 onto the carrier 4. A ring pressure plate 5 is provided above the universal joint 3 and the carrier 4. The ring pressure plate 5 is connected to the carrier 4 through a connector 51. The carrier 4 has a lower ring cavity 41 with an opening facing downward at the bottom, a central cavity 42 with an opening facing upward at the top, and an upper ring groove 43 located on the outer periphery of the central cavity 42. The universal joint installation fixture includes a support seat 1 and a positioning cover 2. The support seat 1 is used to support the lower middle part of the carrier 4. The support seat 1 has a positioning ring platform 11 that engages with the lower ring cavity 41. The middle part of the support seat 1 has a lower positioning hole 12 for positioning the lower end of the universal joint 3. The positioning cover 2 has an upper positioning hole 21 for the upper end of the universal joint 3 to pass through and position the universal joint 3, and a mating ring platform 22 that engages with the upper ring groove 43.

[0032] Compared with the prior art, the universal joint installation fixture provided in this embodiment utilizes the positioning ring platform 11 on the support seat 1 to engage with the lower ring cavity 41 of the carrier 4, ensuring the coaxiality of the support seat 1 and the carrier 4. Then, the lower positioning hole 12 of the support seat 1 is used to position the lower end of the universal joint 3. Finally, the upper positioning hole 21 of the positioning cover 2 is used to position the upper end of the universal joint 3. After ensuring the coaxiality of the universal joint 3 and the carrier 4, the ring pressure plate 5 is fixed on the carrier 4 and the universal joint 3 by means of the connector 51, ensuring the installation accuracy between the carrier 4 and the universal joint 3, ensuring the polishing quality of the wafer edge position during the polishing process, and ensuring the processing quality of the wafer.

[0033] Please refer to the following if further explanation is needed. Figure 4When installing the universal joint 3 onto the carrier 4, it is necessary to ensure the coaxiality between the two. Because there is a gap between the outer peripheral wall of the universal joint 3 and the inner peripheral wall of the cavity in the carrier 4 used to install the universal joint 3, the coaxiality between the universal joint 3 and the carrier 4 is difficult to effectively limit. Even after locking their relative positions using the ring pressure plate 5 and the connector 51, the coaxiality requirement is not met, resulting in significant friction between the universal joint 3 and the flange. This severely affects the service life of components such as the sealing ring and also impacts the polishing quality of the wafer.

[0034] In this embodiment, the coaxiality of the carrier 4 and the support 1 is ensured by the snap-fit ​​engagement of the positioning ring platform 11 and the lower ring cavity 41. The coaxiality is transferred to the universal joint 3 by the snap-fit ​​engagement of the lower positioning hole 12 and the lower end of the universal joint 3, ensuring that the lower end of the universal joint 3 and the carrier 4 meet the coaxiality requirements. Then, by installing the positioning cover 2, the upper end of the universal joint 3 is coarsely positioned using the upper positioning hole 21, ensuring that the upper end of the universal joint 3 and the carrier 4 meet the initial coaxiality requirements. The ring pressure plate 5 is then installed above the universal joint 3 and the carrier 4, and the engagement between the upper positioning hole 21 and the upper end of the universal joint 3 ensures the coaxiality of the universal joint 3 and the carrier 4. Finally, the support 1, carrier 4, universal joint 3, and positioning cover 2 all meet the coaxiality requirements. Finally, the relative positions of the ring pressure plate 5, carrier 4, and universal joint 3 are locked using the connector 51. Afterwards, the positioning cover 2 and the support 1 are removed, completing the coaxial installation of the carrier 4 and the universal joint 3.

[0035] Specifically, the positioning ring platform 11 is positioned close to the inner ring of the lower ring cavity 41. The positioning ring platform 11 extends into the lower ring cavity 41, and the inner peripheral wall of the positioning ring platform 11 contacts the inner peripheral wall of the lower ring cavity 41, so that the positioning ring platform 11 and the lower ring cavity 41 form a snap-fit ​​engagement, so that the two have good coaxiality.

[0036] The above method achieves effective transfer of coaxiality among multiple components. By using the carrier 4 to engage with the positioning cover 2 and the support 1 respectively, the non-contact positioning cover 2 and the support 1 meet the coaxiality requirements. Then, the upper and lower ends of the universal joint 3 are coaxially positioned by using the upper positioning hole 21 and the lower positioning hole 12 respectively. Finally, the support 1, carrier 4, universal joint 3 and positioning cover 2 all meet the coaxiality requirements, ensuring the centered installation of the universal joint 3, improving the installation accuracy of the polishing head, and thus ensuring the polishing quality of the subsequent wafer.

[0037] In one possible implementation, please refer to Figures 1 to 3The support 1 has an upward-opening weight-reducing cavity 13 that extends circumferentially, with a positioning ring platform 11 located on its outer periphery. The weight-reducing cavity 13 on the support 1 effectively reduces the weight of the component and material consumption, thereby lowering construction costs. The upward-opening weight-reducing cavity 13 and the positioning ring platform 11 located on its outer periphery allow for effective engagement with the lower ring cavity 41 of the carrier 4, ensuring the coaxiality of the carrier 4 and the support 1. The inner and outer sidewalls of the weight-reducing cavity 13 effectively support the underside of the carrier 4, leaving gaps between the bottom surfaces of the support 1 and other bottom surfaces of the carrier 4, ensuring that the positioning ring platform 11 can effectively engage with the lower ring cavity 41 and meet the coaxiality requirements.

[0038] In one possible implementation, please refer to Figures 1 to 3 The bottom wall of the weight-reducing cavity 13 is provided with several through holes 14, which are arranged at intervals along the circumference of the weight-reducing cavity 13. The positioning ring platform 11 is located on the outer periphery of the weight-reducing cavity 13 and is set close to the outer ring of the support 1. The through holes 14 further reduce the structural weight and manufacturing cost of the support 1. The multiple through holes 14, arranged at intervals along the circumference of the support 1, achieve uniform weight reduction at different positions around the circumference of the support 1, avoid affecting the support effect on the carrier 4 and the components above, and ensure good structural positioning performance.

[0039] More importantly, after positioning and connecting the carrier 4 and the universal joint 3, tools can be easily inserted into the through hole 14 to push the bottom wall of the carrier 4, thereby allowing the support seat 1 to detach smoothly from under the carrier 4, which facilitates the disassembly of the subsequent structure, helps to reduce the difficulty of operation and improve the efficiency of operation.

[0040] In one possible implementation, please refer to Figures 1 to 3 Below the positioning cover 2, there is also a downwardly protruding middle ring platform 23. The middle ring platform 23 is located on the outer periphery of the upper positioning hole 21 and is used to engage with the inner periphery of the ring pressure plate 5.

[0041] In this embodiment, by setting a middle ring platform 23 below the positioning seat, the middle ring platform 23 can be used to further position the ring pressure plate 5 coaxially, ensuring the accuracy of the installation position of the ring pressure plate 5, facilitating effective correspondence with the carrier 4 in the future, and thus improving the connection efficiency of the connector 51.

[0042] Specifically, the ring pressure plate 5 is provided with multiple through holes distributed circumferentially for the connecting piece 51 to pass through, and the carrier 4 is provided with multiple threaded holes corresponding to the through holes. The connecting piece 51 can be a screw, stud or other component, so as to reliably connect the ring pressure plate 5 to the carrier 4.

[0043] For further details, please see Figure 2 , Figure 3 and Figure 5An elastic pad 52 is also provided between the ring pressure plate 5 and the universal joint 3. When the ring pressure plate 5 is connected to the carrier 4 using the connector 51, the elastic pad 52 is subjected to downward compression, which can effectively press against the top of the universal joint 3. This helps to increase the friction between the universal joint 3 and the carrier 4, effectively limiting the relative position between the universal joint 3 and the carrier 4, and preventing the universal joint 3 from shifting and affecting the coaxiality requirement between it and the carrier 4.

[0044] In some embodiments, please refer to Figures 1 to 3 The positioning cover 2 has a downward protruding outer ring platform 25 below it, and a receiving cavity for accommodating the positioning ring platform 11 is formed between the outer ring platform 25 and the middle ring platform 23.

[0045] In this embodiment, when the tooling is not in use, a receiving cavity is formed in the space between the outer ring platform 25 and the middle ring platform 23 for easy storage. The positioning ring platform 11 of the support seat 1 can be easily inserted into the receiving cavity, so that the outer peripheral wall of the positioning ring platform 11 contacts the inner peripheral wall of the receiving cavity to form a snap-fit, so that the positioning cover 2 and the support seat 1 are combined into a whole, which facilitates the storage of the tooling and avoids damage to the components.

[0046] When it is necessary to use tooling to position the carrier 4 and the universal joint 3, the outer ring platform 25 can be conveniently extended into the central cavity 42 of the carrier 4. At this time, there is a gap between the outer peripheral wall of the outer ring platform 25 and the inner peripheral wall of the central cavity 42, which can avoid positional interference between the carrier 4 and the positioning cover 2.

[0047] In one possible implementation, please refer to Figures 1 to 3 The top wall of the positioning cover 2 is provided with an operating hole 24 located on the outer periphery of the upper positioning hole 21. The operating hole 24 is used to install the connector 51 onto the ring pressure plate 5.

[0048] In this embodiment, the operating hole 24 on the positioning cover 2 can effectively reduce the overall structural weight of the positioning cover 2, while reducing material consumption to lower processing costs. More importantly, the operating hole 24 facilitates the installation of the connector 51. After the ring pressure plate 5 and the positioning cover 2 are both installed above the carrier 4, the relative positions of the carrier 4, the ring pressure plate 5, and the universal joint 3 can be fully limited. At this time, the connector 51 can be installed, and the operating hole 24 provides sufficient installation space for the connector 51.

[0049] In some embodiments, please refer to Figures 1 to 3 The system has several operating holes 24, which are spaced apart around the circumference of the positioning cover 2. These multiple operating holes 24 facilitate the installation of connectors 51 at different positions around the ring pressure plate 5.

[0050] Specifically, the number of connectors 51 can be four, six, or eight, etc., to ensure the reliability of the connection between the ring pressure plate 5 and the carrier 4. The operating holes 24 are fan-shaped holes, and there are four operating holes 24. The fan angle of each operating hole 24 is a right angle. The above hole design not only has a good weight reduction effect, but also provides a large operating space, which facilitates the installation of connectors 51 in different positions.

[0051] Based on the same inventive concept, this application also provides a method for installing a universal joint onto a carrier using a universal joint installation fixture, comprising the following steps:

[0052] S100: Install the carrier 4 onto the support 1 so that the positioning ring platform 11 and the lower ring cavity 41 are engaged.

[0053] S200: Install the universal joint 3 onto the carrier 4 so that the lower end of the universal joint 3 is positioned and engaged with the lower positioning hole 12;

[0054] S300: Install the ring pressure plate 5 above the universal joint 3 and the carrier 4, install the positioning cover 2 on the universal joint 3, so that the universal joint 3 is positioned and engaged with the upper positioning hole 21, support the upper end of the universal joint 3, so that the middle ring platform 23 of the positioning cover 2 is engaged with the inner circumference of the ring pressure plate 5, use the connector 51 to connect the ring pressure plate 5 and the carrier 4, remove the support seat 1 and the positioning cover 2, and complete the installation of the universal joint 3 and the carrier 4.

[0055] In the above operation, based on the coaxiality of the carrier 4 and the support 1 ensured by the snap-fit ​​between the positioning ring platform 11 and the lower ring cavity 41, the coaxiality is transferred to the universal joint 3 by the snap-fit ​​between the lower positioning hole 12 and the lower end of the universal joint 3, so that the lower end of the universal joint 3 and the carrier 4 meet the coaxiality requirements. Then, by installing the positioning cover 2, the upper end of the universal joint 3 is coarsely positioned by the upper positioning hole 21, so that the upper end of the universal joint 3 and the carrier 4 meet the initial coaxiality requirements. The coaxiality requirements of the ring pressure plate 5 and the positioning cover 2 are ensured by the snap-fit ​​between the outer ring platform 25 and the central cavity 42. At the same time, the coaxiality requirements of the universal joint 3 and the carrier 4 are ensured by the cooperation between the upper positioning hole 21 and the upper end of the universal joint 3. Finally, the support 1, the carrier 4, the universal joint 3 and the positioning cover 2 all meet the coaxiality requirements.

[0056] Finally, the relative positions of the ring pressure plate 5, the carrier 4, and the universal joint 3 are locked using the connector 51. Then, the positioning cover 2 and the support 1 are removed to complete the coaxial installation of the carrier 4 and the universal joint 3. This method effectively transfers coaxiality among multiple components, ensuring the coaxiality requirements of each part of the universal joint 3 with the carrier 4, guaranteeing the centered installation of the universal joint 3, improving the installation accuracy of the polishing head, and thus ensuring the polishing quality of the subsequent wafers.

[0057] The above-described universal joint installation method allows for convenient and quick centering of the universal joint 3 relative to the carrier 4, ensuring coaxiality between the two. This method reduces installation difficulty, saves time, improves the installation accuracy of the universal joint 3, helps extend the service life of the polishing head, and ensures the polishing quality of the wafer.

[0058] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A universal joint installation fixture for positioning a universal joint (3) onto a carrier (4), wherein a ring pressure plate (5) is provided above the universal joint (3) and the carrier (4), the ring pressure plate (5) is connected to the carrier (4) via a connector (51), the carrier (4) has a lower annular cavity (41) opening downwards at the bottom, a central cavity (42) opening upwards at the top, and an upper annular groove (43) located on the outer periphery of the central cavity (42), characterized in that, The universal joint installation fixture includes a support base (1) and a positioning cover (2). The support base (1) is used to support the lower part of the carrier (4). The support base (1) is provided with a positioning ring platform (11) that engages with the lower annular cavity (41). The support base (1) is provided with a lower positioning hole (12) in the middle for positioning the lower end of the universal joint (3). The positioning cover (2) is provided with an upper positioning hole (21) through which the upper end of the universal joint (3) passes to position the universal joint (3) and a mating ring platform (22) that engages with the upper annular groove (43).

2. The universal joint installation fixture as described in claim 1, characterized in that, The support (1) is provided with a weight-reducing cavity (13) opening upwards, the weight-reducing cavity (13) extends circumferentially, and the positioning ring platform (11) is located on the outer periphery of the weight-reducing cavity (13).

3. The universal joint installation fixture as described in claim 2, characterized in that, The bottom wall of the weight reduction cavity (13) is provided with a plurality of through holes (14), which are arranged at intervals along the circumference of the weight reduction cavity (13). The positioning ring platform (11) is located on the outer periphery of the weight reduction cavity (13) and is set close to the outer ring of the support (1).

4. The universal joint installation fixture as described in claim 1, characterized in that, Below the positioning cover (2), there is also a downwardly protruding middle ring platform (23), which is located on the outer periphery of the upper positioning hole (21) and is used to engage with the inner periphery of the ring pressure plate (5).

5. The universal joint installation fixture as described in claim 4, characterized in that, The positioning cover (2) has a downwardly protruding outer ring platform (25) below it, and a receiving cavity for accommodating the positioning ring platform (11) is formed between the outer ring platform (25) and the middle ring platform (23).

6. The universal joint installation fixture as described in any one of claims 1-5, characterized in that, The top wall of the positioning cover (2) is provided with an operation hole (24) located on the outer periphery of the upper positioning hole (21). The operation hole (24) is used to install the connector (51) onto the ring pressure plate (5).

7. The universal joint installation fixture as described in claim 6, characterized in that, The operation holes (24) are provided in a plurality of manner, and the plurality of operation holes (24) are arranged at intervals along the circumference of the positioning cover (2).

8. The universal joint installation fixture as described in claim 7, characterized in that, The operation hole (24) is a fan-shaped hole, and there are four operation holes (24), with the fan-shaped angle of each operation hole (24) being a right angle.

9. A method for installing a universal joint onto a carrier using the universal joint installation fixture according to any one of claims 1-8, characterized in that, Includes the following steps: S100: Install the carrier (4) onto the support (1) so that the positioning ring platform (11) engages with the lower ring cavity (41); S200: Install the universal joint (3) onto the carrier (4) so ​​that the lower end of the universal joint (3) is positioned and engaged with the lower positioning hole (12); S300: Install the ring pressure plate (5) above the universal joint (3) and the carrier (4), install the positioning cover (2) on the universal joint (3) so that the universal joint (3) is positioned and engaged with the upper positioning hole (21), support the upper end of the universal joint (3), connect the ring pressure plate (5) and the carrier (4) using the connector (51), remove the support seat (1) and the positioning cover (2) to complete the installation of the universal joint (3) and the carrier (4).

10. The universal joint installation method as described in claim 9, characterized in that, Step S300 also includes installing the ring pressure plate (5) above the universal joint (3) and the carrier (4), so that the middle ring platform (23) of the positioning cover (2) is engaged with the inner circumference of the ring pressure plate (5).

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