Manual lifting device for wafer cassette transport vehicle

Abstract

The invention relates to the technical field of semiconductor processing, in particular to a manual lifting device for a wafer cassette transport cart, which comprises a vertical plate, and an eccentric shaft is manually and rotatably mounted in the middle of the upper part of the vertical plate; the eccentric shaft is of an eccentric structure, and the lifting column is installed on the vertical plate in a linear lifting mode. A roller bracket is arranged on one side above the lifting column, and an adjusting bracket is arranged on the other side; a limiting bracket is arranged above one side, close to the eccentric shaft, of the adjusting bracket; a rotating bracket is arranged below the limiting bracket; spring supporting columns are arranged on the rotating support and the adjusting support respectively, and extension springs are connected to the spring supporting columns; and under the action of the extension spring, the surface of the cam follower is always attached to the eccentric shaft. The manual lifting device for the wafer cassette transport vehicle is simple in structure, torque is amplified through the rotating disc and the eccentric shaft, the rotating action is converted into the lifting action, the lifting action process is mild, and jolting is not prone to being generated.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing, and in particular to a manual lifting device for a wafer box transport vehicle. Background Art

[0002] In the field of semiconductor processing, the production process of wafers is complex and delicate, and requires multiple processing between different workstations. In order to ensure the safety and stability of wafers during transportation, wafers are usually placed in wafer boxes and transported by wafer box transporters. As a key equipment for wafer box transportation, the performance and stability of wafer box transporters directly affect the production efficiency and quality of wafers.

[0003] During the transfer of the wafer box, the wafer box transporter needs to dock with the wafer loader to remove the wafer box from the loader and transfer it. During this process, the wafer box transporter needs to act at the front and rear stations respectively to complete the wafer box pick-up and placement operations. In order to achieve this function, the wafer box transporter needs to have two upper and lower limit positions. When it is necessary to take the wafer box, the wafer box transporter needs to switch from the lower limit position to the upper limit position in order to remove the wafer box from the wafer loader; and when the wafer box transporter takes out the wafer box for transfer, it needs to switch from the upper limit position to the lower limit position for subsequent transfer operations.

[0004] However, in the existing wafer box transporter design, there are often some problems in the conversion of the upper and lower limit positions. On the one hand, the conversion action may be too violent, causing the wafer box to be hit or bumped, thereby affecting the quality and stability of the wafer; on the other hand, the complexity of the conversion action may also increase the manufacturing cost and maintenance difficulty of the wafer box transporter.

[0005] Therefore, in order to solve the above problems, the present invention proposes a manual lifting device for a wafer box transport vehicle. Summary of the invention

[0006] In order to solve the above problems, the present invention provides a manual lifting device for a wafer box transport vehicle. The manual lifting device for a wafer box transport vehicle has a simple structure, and amplifies the torque through a turntable and an eccentric shaft to convert the rotational action into a lifting action. The lifting and lowering action processes are gentle and not prone to bumps.

[0007] The technical solution of the present invention is as follows: A manual lifting device for a wafer box transport vehicle comprises a vertical plate, an eccentric shaft is manually rotatably installed in the middle position above the vertical plate; the eccentric shaft is an eccentric structure, one side is a plane, and the other side is a curved surface with a groove, and the lifting column can be linearly lifted and lowered and installed on the vertical plate; the lifting column is a long rectangular structure, and the top is an L-shaped bend; a roller bracket is arranged on one side above the lifting column, and an adjustment bracket is arranged on the other side; the connecting part between the roller bracket and the lifting column is a long hole, and a groove is processed at the installation position of the roller bracket on one side of the lifting column to limit the roller bracket, and the roller and the roller bracket are connected together by equal height screws and self-locking nuts; the adjustment bracket is a square frame structure, and the side connected to the lifting column is a long hole; a limit bracket is arranged above the side of the adjustment bracket close to the eccentric shaft, and a groove is added on one side of the limit bracket A circular groove is provided in the groove, and a rubber pressure block is arranged in the groove, wherein the front end of the rubber pressure block is made of rubber material and the rear end is a metal external thread structure; a rotating bracket is arranged at a position below the limit bracket, a through hole is processed at a corresponding position of the adjustment bracket, a self-lubricating bearing is arranged in the through hole, a threaded hole is processed at the rear end of the rotating bracket, and the rotating bracket is connected by passing the self-lubricating bearing through three equal height screws; spring pillars are respectively arranged on the rotating bracket and the adjustment bracket, and are connected to the spring pillars by using a tension spring; under the action of the tension spring, the surface of the cam follower always fits the eccentric shaft; a buffer pressure block is arranged at the bottom of the adjustment bracket, wherein the top of the buffer pressure block is an external thread structure and the bottom is a conical structure; a bottom plate is arranged at the bottom of the vertical plate, and a buffer is arranged on the bottom plate, and the position of the buffer corresponds to the position of the buffer pressure block arranged at the bottom of the adjustment bracket.

[0008] A circular hole is processed in the middle position above the vertical plate, a seat bearing is arranged in the circular hole, a rotating shaft is arranged in the seat bearing, the front end of the rotating shaft is connected to the eccentric shaft, and the rear end of the rotating shaft is fixedly connected to a turntable.

[0009] The middle position of the turntable is a thin plate, the outer circle of the thin plate is a round tube, and an arc-shaped handle is arranged on the round tube.

[0010] The bottom of the eccentric shaft is connected to the rotating shaft through three screws.

[0011] A linear guide rail is arranged in front of the vertical plate, a slider of the linear guide rail is fixedly connected to the vertical plate, and a guide rail of the linear guide rail is fixedly connected to the lower part of the lifting column.

[0012] The rollers are made of nylon.

[0013] An equal height screw 1 is arranged on the adjustment bracket below the rotating bracket to limit the rotation angle of the rotating bracket.

[0014] The beneficial effects of the present invention are: 1. The present invention discloses a manual lifting device for a wafer box transport vehicle. The manual lifting device for the wafer box transport vehicle can convert the manual rotation action into the linear lifting action of the lifting column through the design of the eccentric shaft and the turntable; it not only realizes the smooth conversion of the wafer box transport vehicle between the upper and lower limit positions, but also ensures the gentleness of the lifting action, effectively avoiding the collision and bumping of the wafer box during the transportation process, thereby ensuring the stability of the wafer box and the wafers inside.

[0015] 2. The present invention discloses a manual lifting device for a wafer box transport vehicle. The manual lifting device for a wafer box transport vehicle has a relatively simple structure and is mainly composed of components such as a vertical plate, an eccentric shaft, a lifting column, a roller bracket, and an adjustment bracket. The connection method between these components is clear, and automatic adjustment and buffering functions are achieved through structures such as spring struts and tension springs, making the operation process simpler and more reliable.

[0016] 3. The present invention discloses a manual lifting device for a wafer box transport vehicle. The manual lifting device for a wafer box transport vehicle can realize fast and smooth lifting and lowering of the wafer box, thereby significantly improving the efficiency of wafer transportation. At the same time, it has a compact structure and occupies little space, and is also convenient for deployment and use in limited spaces such as wafer processing workshops.

[0017] 4. The present invention discloses a manual lifting device for a wafer box transport vehicle. The manual lifting device for a wafer box transport vehicle can adapt to wafer boxes of different sizes and weights by adjusting the positions and parameters of components such as an eccentric shaft and a roller bracket. In addition, its manual operation method also enables the device to still work normally in an environment where the power supply is unstable or cannot be connected to a power source.

[0018] 5. The present invention discloses a manual lifting device for a wafer box transport vehicle. Compared with an automatic lifting device, the manual lifting device for a wafer box transport vehicle has lower manufacturing cost and use cost. At the same time, due to its relatively simple structure, maintenance and repair are more convenient and quick. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only for the purpose of illustrating the preferred embodiment and are not to be considered as limiting the present invention.

[0020] In the attached picture: Figure 1 A schematic diagram of a three-dimensional exploded structure of a manual lifting device for a wafer box transport vehicle according to an embodiment of the present invention Figure 1 ; Figure 2A schematic diagram of a three-dimensional exploded structure of a manual lifting device for a wafer box transport vehicle according to an embodiment of the present invention Figure 2 ; Figure 3 It is a structural schematic diagram of a manual lifting device for a wafer box transport vehicle in an ascending position according to an embodiment of the present invention; Figure 4 It is a structural schematic diagram of a manual lifting device for a wafer box transport vehicle in a descending position according to an embodiment of the present invention; Figure 5 It is a schematic diagram of the three-dimensional structure of a deflection axis of a manual lifting device for a wafer box transport vehicle according to an embodiment of the present invention; The components represented by the reference numerals in the figure are: The present invention includes: 1. a vertical plate; 2. a bearing with a seat; 3. a rotating shaft; 4. a turntable; 5. an end cover; 6. an upper cover plate; 7. a lifting column; 8. an adjustment bracket; 9. a limit support; 10. a rubber pressure block; 11. a first contour screw; 12. a spring support; 13. an eccentric shaft; 14. a linear guide; 15. a self-locking nut; 16. a roller; 17. a roller bracket; 18. a second contour screw; 19. a cam follower; 20. a rotating bracket; 21. a self-lubricating bearing; 22. a third contour screw; 23. a tension spring; 24. a buffer pressure block; 25. a buffer; 26. a bottom plate. DETAILED DESCRIPTION

[0021] like Figure 1 and Figure 2 As shown, the manual lifting device for the wafer box transport vehicle includes a vertical plate 1, a circular hole is processed in the middle position above the vertical plate 1, a seat bearing 2 is arranged in the circular hole, a rotating shaft 3 is arranged in the circular hole, the front end of the rotating shaft 3 is connected to the eccentric shaft 13, and the rear end is arranged with a turntable 4 and an end cover 5; the middle position of the turntable 4 is a thin plate, the outer ring is a round tube, and the handle position is an arc shape to increase the length of the holding position.

[0022] like Figure 5 As shown, the eccentric shaft 13 is an eccentric structure, one side of which is a plane and the other side is a curved surface with a groove, and the bottom is connected to the rotating shaft 3 by three screws.

[0023] A linear guide rail 14 is arranged in front of the vertical plate 1, the slider of the linear guide rail 14 is connected to the vertical plate 1, and the guide rail is connected to the bottom of the lifting column 7; the lifting column 7 is a long rectangular structure with an L-shaped bend at the top, and a positioning pin hole and a threaded hole are arranged on the front plane.

[0024] A roller bracket 17 is arranged on one side above the lifting column, and an adjustment bracket 8 is arranged on the other side.

[0025] The connecting part between the roller bracket 17 and the lifting column 7 is a long hole. A groove is processed at the installation position of the roller bracket 17 on one side of the lifting column 7 to limit the deviation of the roller bracket 17. The roller 16 is connected to the roller bracket through the equal height screw 18 and the self-locking nut 15. The roller 16 is made of nylon.

[0026] The adjustment bracket 8 is a square frame structure, and the side connected to the lifting column 7 is a long hole; a limit bracket 9 is arranged above the side of the adjustment bracket 8 close to the eccentric shaft 13, and a circular groove is processed on one side of the limit bracket 9, and a rubber pressure block 10 is arranged in the groove. The front end of the rubber pressure block 10 is made of rubber material, and the tail is a metal external thread structure.

[0027] A rotating bracket 20 is arranged below the limiting bracket 9, a through hole is processed at the corresponding position of the adjusting bracket 8, a self-lubricating bearing 22 is arranged in the through hole, a threaded hole is processed at the tail of the rotating bracket 20, and the rotating bracket 20 is connected by passing the self-lubricating bearing 22 through the equal height screw 22; spring pillars 12 are arranged on the rotating bracket 20 and the adjusting bracket 8 respectively, and are connected to the spring pillars 12 by using a tension spring 23; under the action of the tension spring 23, the surface of the cam follower 19 always fits the eccentric shaft 13; a equal height screw 11 is arranged on the adjusting bracket 8 below the rotating bracket 20 to limit the rotation angle of the rotating bracket 20; a buffer pressure block 24 is arranged at the bottom of the adjusting bracket 8, and the top of the buffer pressure block 24 is an external thread structure and the bottom is a conical structure; a bottom plate 26 is arranged at the bottom of the vertical plate, and a buffer 25 is arranged on the bottom plate 26, and the position of the buffer 25 corresponds to the position of the buffer pressure block 24 arranged at the bottom of the adjusting bracket 8.

[0028] like Figure 3 and Figure 4 As shown, when the turntable 4 rotates counterclockwise, the top of the eccentric shaft 13 contacts the cam follower 19 installed at the front end of the rotating bracket 20, and the top of the rotating bracket 20 contacts the rubber pressure block 10, which gradually deforms. When the deformation reaches the maximum, the adjustment frame 8 and the lifting column 7 are pushed to move upward along the linear guide 14; when the turntable rotates counterclockwise, the curved surface side of the eccentric shaft contacts the cam follower installed at the front end of the rotating bracket, and the top of the rotating bracket contacts the rubber pressure block, which gradually deforms. When the deformation reaches the maximum, the adjustment frame and the lifting column are pushed to move upward along the linear guide; when the turntable rotates clockwise, the flat side of the eccentric shaft presses down the roller set on the roller bracket, so that the lifting column moves downward along the linear guide, and the buffer pressure block set at the bottom of the adjustment frame presses down the piston rod above the buffer to provide supporting force, so that the lifting column slowly descends.

[0029] The manual lifting device for the wafer box transport vehicle has a simple structure, and converts the rotation action into the lifting action by amplifying the torque through the turntable and the eccentric shaft. The lifting and lowering action processes are gentle and are not prone to bumps.

Claims

1. A manual lifting device for a wafer box transport vehicle, characterized in that: The invention comprises a vertical plate (1), wherein an eccentric shaft (13) is manually rotatably installed in the middle position above the vertical plate (1); the eccentric shaft (13) is an eccentric structure, one side of which is a flat surface, and the other side of which is a curved surface with a groove; a lifting column (7) is installed on the vertical plate (1) in a linear manner; the lifting column (7) is a long rectangular structure, and the top is L-shaped; a roller bracket (17) is arranged on one side above the lifting column (7), and an adjustment bracket (8) is arranged on the other side; the connecting portion between the roller bracket (17) and the lifting column (7) is a long hole, and the roller bracket (17) is provided with a plurality of holes at the bottom of the lifting column (7); the roller bracket (17) is provided with a plurality of holes at the bottom of the lifting column (7); the roller bracket (17) is provided with a plurality of holes at the bottom of the lifting column (7); the roller bracket (17) is provided with a plurality of holes at the bottom of the lifting column (7); the roller bracket (17) is provided with a plurality of holes at the bottom of the lifting column (7); the roller bracket (17) is provided with a plurality of holes at the bottom of the lifting column (7); the roller bracket (17) is provided with a plurality of holes at the top ... A groove is machined at the installation position of the roller bracket (17) on one side of the lifting column (7) to limit the roller bracket (17), and the roller (16) and the roller bracket (17) are connected together through equal height screws (18) and self-locking nuts (15); the adjustment bracket (8) is a square frame structure, and the side connected to the lifting column (7) is a long hole; a limit bracket (9) is arranged above the side of the adjustment bracket (8) close to the eccentric shaft (13), and a circular groove is machined on one side of the limit bracket (9), and a rubber pressure block (10) is arranged in the groove. ), the front end of the rubber pressure block (10) is made of rubber material and the rear end is a metal external thread structure; a rotating bracket (20) is arranged at a position below the limit bracket (9), a through hole is processed at a corresponding position of the adjustment bracket (8), a self-lubricating bearing (22) is arranged in the through hole, a threaded hole is processed at the rear end of the rotating bracket (20), and the rotating bracket (20) is connected by passing the self-lubricating bearing (22) through the equal height screw three (22); spring pillars (12) are respectively arranged on the rotating bracket (20) and the adjustment bracket (8), using a tension spring (23) is connected to the spring support (12); under the action of the tension spring (23), the surface of the cam follower (19) always fits the eccentric shaft (13); a buffer block (24) is arranged at the bottom of the adjustment bracket (8), the top of the buffer block (24) is an external thread structure, and the bottom is a conical structure; a bottom plate (26) is arranged at the bottom of the vertical plate (1), and a buffer (25) is arranged on the bottom plate (26), and the position of the buffer (25) corresponds to the position of the buffer block (24) arranged at the bottom of the adjustment bracket (8).

2. A manual lifting device for a wafer box transport vehicle according to claim 1, characterized in that: A circular hole is machined in the middle of the upper part of the vertical plate (1), a seat bearing (2) is arranged in the circular hole, a rotating shaft (3) is arranged in the seat bearing (2), the front end of the rotating shaft (3) is connected to the eccentric shaft (13), and the rear end of the rotating shaft (3) is fixedly connected to a rotating disk (4).

3. A manual lifting device for a wafer box transport vehicle according to claim 2, characterized in that: The middle position of the rotating disk (4) is a thin plate, the outer ring of the thin plate is a round tube, and an arc-shaped handle is arranged on the round tube.

4. A manual lifting device for a wafer box transport vehicle according to claim 2, characterized in that: The bottom of the eccentric shaft (13) is connected to the rotating shaft (3) via three screws.

5. The manual lifting device for a wafer box transport vehicle according to claim 1, characterized in that: A linear guide rail (14) is arranged in front of the vertical plate (1), a slider of the linear guide rail (14) is fixedly connected to the vertical plate (1), and a guide rail of the linear guide rail (14) is fixedly connected to the bottom of the lifting column (7).

6. The manual lifting device for a wafer box transport vehicle according to claim 1, characterized in that: The roller (16) is made of nylon.

7. The manual lifting device for a wafer box transport vehicle according to claim 1, characterized in that: An equal height screw 1 (11) is provided on the adjustment bracket (8) at a position below the rotating bracket (20) to limit the rotation angle of the rotating bracket (20).

Images