Film coating device and method for inner wall of long and thin pipe with medium-small caliber and deep inner hole

Abstract

The invention discloses a film coating device and method for the inner wall of a long and thin pipe with a medium-small caliber and a deep inner hole, and belongs to the technical field of film coating. The coating equipment consists of a control unit and a coating unit. The control unit comprises a vacuum chamber and a gas inlet system, the vacuum chamber is used for installing and placing the pipe and providing a vacuum environment, and the gas inlet system is used for injecting working gas into the vacuum chamber. The coating unit is composed of a target material, a magnetic coil and a driving mechanism, and the target material is installed on the central axis in the pipe. The magnetic coil provides a uniform magnetic field environment for the coating device, the output end of the driving mechanism is mechanically connected with the target material and the magnetic coil, and synchronous transmission control between the target material and the magnetic coil is ensured. The method is particularly suitable for fast and efficient film coating of the inner wall of the long and thin pipe with the caliber of 40 mm or below and the deep inner hole, and the film layer quality is good. The magnetic core in the target material is externally arranged, so that the diameter of the target material is reduced, disassembly and assembly are simplified, the manufacturing difficulty and cost are reduced, and the economic benefit is improved.

Description

Technical Field

[0001] The invention belongs to the field of film coating technology, and in particular relates to a film coating device and method for the inner wall of a slender tube with a deep inner hole of a small or medium diameter. Background Art

[0002] Small and medium-sized caliber, deep-bore, and slender pipes have been widely used in key fields such as petrochemicals, gas transportation, and weapons and equipment due to their unique advantages. However, in practical applications, the inner wall of the pipe is often faced with the challenges of harsh environments such as corrosion, oxidation, wear, erosion, and ablation. Therefore, depositing or plating a protective film on the inner wall of the pipe has become a widely recognized and efficient surface treatment method, which effectively improves the surface properties of the inner wall of the pipe. This protective film can provide the inner wall of the pipe with multiple protective properties such as anti-oxidation, corrosion resistance, wear resistance, and ablation resistance, which is of great significance for extending the service life of key components such as high-pressure petrochemical small and medium-caliber pipelines, highly corrosive toxic and harmful gas transportation pipelines, and artillery barrels.

[0003] In the prior art, when the magnetron sputtering technology is used to coat the inner wall of the pipe, the permanent magnet is placed inside the target material, which makes the target material occupy a larger space inside the pipe. For small and medium-caliber pipes, this layout reduces the target-substrate distance between the target material and the inner wall of the pipe, shortens the acceleration path of the particles, resulting in insufficient deposition energy, which in turn affects the quality of the coating layer and makes it difficult to meet the performance requirements of the inner wall of the pipe under harsh working conditions. In addition, this design increases the difficulty of loading and unloading small and medium-caliber pipes and targets, and due to the limitation of the space inside the pipe, the cooling pipeline system of the target material is difficult to arrange effectively, resulting in difficulty in heat dissipation of the internal permanent magnet, thereby causing high temperature and demagnetization of the magnet, further affecting the long-term stability and reliability of the coating equipment.

[0004] In the current technology, when magnetron sputtering technology is used for coating, a target material of the same length as the tube is usually used. However, for small and medium-caliber, deep-bore, and slender tubes, the design of the target material is relatively complex and the processing is extremely difficult, which not only makes it difficult to ensure the accuracy and purity of the target material, but also significantly increases the cost. In addition, the difficulties faced by the ultra-long target material during transportation and installation further increase the cost and complexity of the entire process. Summary of the invention

[0005] In view of the above defects or improvement needs of the prior art, the present invention provides a coating device and method for the inner wall of a slender tube with a deep inner hole of small and medium diameters. The core innovation of this technical solution is to separate the target material from the magnetic field generator, and use the controllable loading of the external magnetic field to achieve controllable and adjustable deposition sputtering process. Through this innovative device and coating method, the problems existing in the prior art, such as too small target-substrate distance, short particle acceleration distance, insufficient deposition energy, etc., can be effectively solved. At the same time, it can also deal with the loading and unloading problems of slender tubes with deep inner holes and the heat dissipation problem of permanent magnets inside the target material. This technical improvement not only improves the efficiency and quality of coating, but also provides a more economical and reliable solution for the application of coating inside slender tubes with deep inner holes of small and medium diameters.

[0006] To achieve the above-mentioned object, in a first aspect, the present invention provides a coating device for the inner wall of a slender tube with a small or medium diameter and a deep inner hole, the coating device comprising a control unit and a coating unit; The control unit comprises a vacuum chamber and an air intake module, wherein the vacuum chamber is used to install and place small and medium-caliber deep inner hole slender tubes and provide the required vacuum environment, and the air intake module is used to inject the required working gas into the vacuum chamber; The coating unit comprises a target material, a magnetic coil and a driving module, wherein the target material is installed on the central axis inside a small or medium-sized caliber deep inner hole slender tube; The magnetic coil is arranged on the wall of the vacuum chamber to provide a uniform magnetic field environment for the coating device; The magnetic coil is slidably sleeved on the vacuum chamber wall and is coaxially arranged with the target material. The output end of the driving module is respectively connected to the target material and the magnetic coil in a transmission manner to drive the target material and the magnetic coil to move synchronously along the axial direction of the tube. The inner diameter of the tube is <110 mm.

[0007] Optionally, the driving module includes a driving member and a support frame, the output end of the driving member is transmission-connected to the support frame, the support frame has a first support rod and a plurality of second support rods, the first support rod is located between the plurality of second support rods, the first support rod is fixedly connected to the target material, and the plurality of second support rods are fixedly connected to the magnetic coil.

[0008] Optionally, the driving member is a linear motion module or a cylinder.

[0009] Optionally, the length of the tube is less than 7000 mm.

[0010] Optionally, a cooling channel is provided in the target material, one end of the cooling channel is used to communicate with a water inlet pipe, and the other end of the cooling channel is used to communicate with a water outlet pipe.

[0011] Optionally, both ends of the cooling channel are arranged toward the driving module, and the cooling channel is a U-shaped structure.

[0012] Optionally, a plurality of slide rails extending along the axial direction of the tube are provided on the wall of the vacuum chamber, and the magnetic coil is slidably matched with the plurality of slide rails.

[0013] Optionally, the coating unit also includes a first motor and a second motor, the output end of the driving module is respectively connected to the first motor and the second motor, the output shaft of the first motor is connected to the target material, the output shaft of the second motor is connected to the magnetic coil, and the output shaft of the first motor and the output shaft of the second motor are both arranged along the axial direction of the tube, and rotate in opposite directions.

[0014] Optionally, the coating device also includes a heating coil, which is coaxially sleeved on the outer wall of the tube, and the output end of the driving module is drivingly connected to the heating coil to drive the target material and the heating coil to move synchronously along the axial direction of the tube.

[0015] In a second aspect, the present invention provides a coating method for the inner wall of a small- to medium-caliber deep inner hole slender tube, the coating method is based on the coating device described in the first aspect, and the coating method comprises: placing the tube in the vacuum chamber; Inject gas into the vacuum chamber through the air inlet module, provide power, connect the negative pole of the bias power supply to the tube, connect the negative pole of the sputtering power supply to the target, and the vacuum chamber is the positive pole and connected to the ground; The target material and the magnetic coil are driven by the driving module to move back and forth synchronously along the axial direction of the tube, and the ionized working gas bombards the target material and is deposited on the inner wall of the tube for coating.

[0016] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0017] In general, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects: The coating device provided by the embodiment of the present invention is specially designed for the inner wall of a thin and long tube with a deep inner hole of small and medium diameter. Its core innovation lies in separating the target material from the magnetic field generator and using the controllable loading of the external magnetic field to achieve controllable and adjustable deposition sputtering process. The following are some benefits of this technical solution: 1. Improve coating quality: The present invention designs the magnetic core in the target material to be external, which not only helps to reduce the target material diameter, but also effectively solves the problems of too close target-substrate distance, short particle acceleration path, insufficient deposition energy, etc. in the prior art. These improvements significantly improve the coating efficiency and quality, thereby meeting the performance requirements of the inner wall of the pipeline under harsh working conditions.

[0018] 2. Simplify the loading and unloading process: In response to the challenges of loading and unloading slender tubes with deep inner holes, the present invention simplifies the loading and unloading process through innovative design, making the loading and unloading of the target material more convenient and reducing the difficulty of operation.

[0019] 3. Optimize target heat dissipation: Increase the space of the target material's cooling pipeline system, effectively avoiding the high temperature problem caused by insufficient heat dissipation of the permanent magnet, thereby preventing the demagnetization of the magnet and enhancing the durability of the equipment.

[0020] 4. Improve economic benefits: This technical improvement not only reduces manufacturing costs, but also improves production efficiency, providing an economical and reliable solution for the coating application of small and medium-caliber deep-bore slender tubes.

[0021] In summary, the present invention enhances the stability and reliability of the coating equipment through these technical improvements, ensures the continuous and stable operation of the coating process, and brings significant technological progress to related industrial applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of a coating device for the inner wall of a slender tube with a deep inner hole of a small or medium diameter provided by an embodiment of the present invention; Figure 2 It is a flow chart of a coating method for the inner wall of a slender tube with a deep inner hole of a small or medium diameter provided by an embodiment of the present invention.

[0023] In all the drawings, the same reference numerals represent the same technical features, specifically: 1. Vacuum chamber; 11. Air inlet; 12. Guide rod; 2. Target material; 21. Cooling channel; 3. Magnetic coil; 4. Driving member; 5. Support frame; 51. First support rod; 52. Second support rod; 6. Heating coil; 100. Tube. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0026] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature. Example

[0029] Figure 1 Schematic diagram of a coating device for the inner wall of a slender tube with a deep inner hole of a small or medium diameter provided by an embodiment of the present invention. Figure 1 As shown, the coating device includes a control unit and a coating unit.

[0030] The control unit includes a vacuum chamber 1 for installing and placing small and medium-sized diameter deep inner bore slender tubes 100 and an air intake module (not shown). The vacuum chamber 1 is used to install and place small and medium-sized diameter deep inner bore slender tubes and provide the required vacuum environment, and the air intake module is used to inject the required working gas into the vacuum chamber.

[0031] The coating assembly includes a target material 2, a magnetic coil 3 and a driving module. The target material 2 is used to be installed in the tube 100 and is located on the central axis of the tube 100. The magnetic coil 3 can be slidably mounted on the wall of the vacuum chamber 1 (to provide a uniform magnetic field environment for the coating device) and is coaxially arranged with the target material 2. The output end of the driving module is respectively connected to the target material 2 and the magnetic coil 3 to drive the target material 2 and the magnetic coil 3 to move synchronously along the axial direction of the tube 100.

[0032] For a coating device for the inner wall of a small or medium-sized caliber, deep inner hole and slender tube provided in an embodiment of the present invention, when coating the inner wall of a small or medium-sized caliber, deep inner hole and slender tube 100, the vacuum chamber 1 provides a vacuum environment, and the air intake module can inject the required working gas into the vacuum chamber 1, so that the working gas is subsequently ionized under the action of the magnetic coil 3 and bombards the target material 2.

[0033] Furthermore, since the target material 2 is used to be installed in the tube 100 and is located on the central axis of the tube 100, the magnetic coil 3 can be slidably sleeved on the wall of the vacuum chamber 1 and is coaxially arranged with the target material 2, and the output end of the driving module is respectively connected to the target material 2 and the magnetic coil 3 (the magnetic coil 3 provides a magnetic field). On the one hand, the target material 2 can be set in the tube 100, and the magnetic coil 3 can be set on the wall of the vacuum chamber 1, without the need to place a permanent magnet inside the target material 2, so that the two can be set separately, which not only facilitates the installation of the target material 2 and the magnetic coil 3 separately, but also reduces the volume of the target material 2, thereby facilitating the installation of the target material 2 in the small and medium-caliber tube 100; at the same time, the target-substrate distance between the target material 2 and the tube 100 is increased, the acceleration distance of the particles is increased, and the coating quality is improved. On the other hand, driven by the driving module, the target material 2 and the magnetic coil 3 move synchronously. While ensuring that they are relatively still and uniformly coated along the axial direction of the tube 100, there is no need to set an overly long target material 2 and the magnetic coil 3, which greatly reduces the axial length of the target material 2 and the magnetic coil 3, reduces the manufacturing difficulty of the target material 2 and the magnetic coil 3, and thus reduces the cost.

[0034] That is to say, the coating device for the inner wall of a small and medium-caliber deep-bore slender tube provided by an embodiment of the present invention can not only effectively reduce the manufacturing difficulty of the target material 2 and the magnetic coil 3 and reduce the cost, but also facilitate the installation of the target material 2 in the small and medium-caliber tube 100, increase the acceleration distance of the particles, and improve the coating quality.

[0035] In addition, the coating device is suitable for small and medium diameter and deep inner hole slender tubes 100, specifically, the length of the tube 100 is less than 7000mm, the inner diameter of the tube 100 is less than 100mm, and it is particularly suitable for 40mm and below diameter deep inner hole slender tubes. The formed film layer can be a metal, ceramic coating or multi-phase composite coating, and the film layer can also be a composite multi-layer or gradient structure, which is not limited by the present invention.

[0036] For example, the target material 2 may have a diameter of less than 30 mm and a length of less than 2000 mm. The inner diameter of the vacuum chamber 1 is 50-500 mm and the length is less than 10000 mm, which is not only convenient for installing and placing the tube 100, but also can provide a vacuum environment. The diameter of the magnetic coil 3 may be 50-550 mm and the length may be less than 2000 mm.

[0037] For example, the working gas injected by the air intake module may be argon, nitrogen, methane, etc. The vacuum chamber 1 has a plurality of air intake ports 11 arranged at intervals, and each air intake port 11 is connected to the air intake module.

[0038] It is easy to understand that in other embodiments of the present invention, the coating device may also include two coating units, which are arranged at both ends of the tube 100 respectively, that is, coating is performed synchronously from both ends of the tube 100 to the middle of the tube 100, thereby improving the coating efficiency.

[0039] In one implementation of the present invention, the driving module includes a driving member 4 and a support frame 5, the output end of the driving member 4 is transmission-connected to the support frame 5, the support frame 5 has a first support rod 51 and multiple second support rods 52, the first support rod 51 is located between the multiple second support rods 52, the first support rod 51 is fixedly connected to the target material 2, and the multiple second support rods 52 are fixedly connected to the magnetic coil 3.

[0040] In the above embodiment, the driving member 4 can drive the support frame 5 to move in the horizontal direction, and the support frame 5 can synchronously drive the first support rod 51 and the plurality of second support rods 52 to move in the horizontal direction, thereby respectively driving the target material 2 and the plurality of magnetic coils 3 to move synchronously in the horizontal direction. The plurality of second support rods 52 play a role in supporting and connecting the magnetic coils 3.

[0041] Exemplarily, a sealing ring is installed in the vacuum chamber 1, and the first support rod 51 is installed in the sealing ring and penetrates the vacuum chamber 1. The driving member 4 and the support frame 5 are located outside the vacuum chamber 1.

[0042] In addition, the driving member 4 may be a linear motion module or a cylinder, which is not limited in the present invention.

[0043] In order to ensure the reliability of the target 2 when it moves, a guide rod 12 is slidably inserted on the vacuum chamber 1 , the target 2 is coaxially connected to the guide rod 12 , and the target 2 is located between the guide rod 12 and the driving member 4 .

[0044] In another implementation of the present invention, the driving module may also include two driving units, that is, the output end of one driving unit is transmission connected to the magnetic coil 3, and the output end of the other driving unit is transmission connected to the target material 2, and the two driving units are synchronously controlled by an electronic control program, thereby realizing synchronous drive movement of the magnetic coil 3 and the target material 2.

[0045] Continue to see Figure 1 A cooling channel 21 is provided in the target material 2, one end of the cooling channel 21 is used to communicate with the water inlet pipe, and the other end of the cooling channel 21 is used to communicate with the water outlet pipe. The cooling channel 21 can realize water inlet and outlet. During the coating process, the excess heat of the target material 2 during the coating process is taken away by the flow and heat absorption of water, so as to cool and dissipate heat for the coating device.

[0046] Furthermore, both ends of the cooling channel 21 are arranged toward the driving module, and the cooling channel 21 may be a U-shaped structure. The U-shaped structure of the cooling channel 21 may increase the heat dissipation efficiency.

[0047] In this embodiment, a plurality of slide rails extending along the axial direction of the tube 100 are arranged on the wall of the vacuum chamber 1, and the magnetic coil 3 is slidably matched with the plurality of slide rails. The slide rails guide the sliding of the magnetic coil 3.

[0048] Exemplarily, the magnetic coil 3 is fixed on a slider, and the slider is slidably matched with the slide rail.

[0049] In one implementation of the present invention, the coating unit also includes a first motor and a second motor (not shown in the figure), the output end of the driving module is respectively connected to the first motor and the second motor, the output shaft of the first motor is connected to the target material 2, the output shaft of the second motor is connected to the magnetic coil 3, and the output shaft of the first motor and the output shaft of the second motor are both arranged along the axial direction of the tube, and rotate in opposite directions.

[0050] It is easy to understand that while the driving module drives the first motor, the second motor, the target material 2 and the magnetic coil 3 to move horizontally for coating, the first motor simultaneously drives the target material 2 to rotate clockwise, while the second motor drives the magnetic coil 3 to rotate counterclockwise, so that the target material 2 rotates in different directions, thereby improving the density and uniformity of the coating.

[0051] In this embodiment, the coating device also includes a heating coil 6, which is coaxially sleeved on the outer wall of the tube 100, and the output end of the driving module is transmission-connected to the heating coil 6 to drive the target material 2 and the heating coil 6 to move synchronously along the axial direction of the tube 100. The heating coil 6 can make the tube 100 reach the temperature required for coating.

[0052] Figure 2 Flow chart of a coating method for the inner wall of a slender tube with a deep inner hole of a small or medium diameter provided by an embodiment of the present invention, such as Figure 2 As shown, the coating method is based on the above-mentioned coating device, and the coating method includes: S1. Place the tube 100 in the vacuum chamber 1.

[0053] S2. Inject gas into the vacuum chamber through the air intake module and provide power, connect the negative pole of the bias power supply to the tube 100, connect the negative pole of the sputtering power supply to the target material 2, and the vacuum chamber is the positive pole and connected to the ground.

[0054] S3, the target material 2 and the magnetic coil 3 are driven by the driving module to move back and forth synchronously along the axial direction of the tube 100, and the ionized working gas bombards the target material 2 to coat the inner wall of the tube 100.

[0055] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A coating device for the inner wall of a small to medium diameter deep inner hole slender tube, characterized in that: The coating device comprises a control unit and a coating unit; The control unit comprises a vacuum chamber (1) and an air intake module, the vacuum chamber (1) being used to install and place a small or medium caliber deep inner hole slender tube and provide a required vacuum environment, and the air intake module being used to inject required working gas into the vacuum chamber; The coating unit comprises a target material (2), a magnetic coil (3) and a driving module, wherein the target material (2) is installed on the central axis inside a small or medium caliber deep inner hole slender tube (100); The magnetic coil (3) is arranged on the wall of the vacuum chamber (1) to provide a uniform magnetic field environment for the coating device; The magnetic coil (3) is slidably sleeved on the wall of the vacuum chamber and is coaxially arranged with the target material (2); the output end of the driving module is respectively connected to the target material (2) and the magnetic coil (3) in a transmission manner so as to drive the target material (2) and the magnetic coil (3) to move synchronously along the axial direction of the tube (100); The inner diameter of the tube (100) is less than 110 mm.

2. The coating device for the inner wall of a small to medium diameter deep inner hole slender tube according to claim 1, characterized in that: The driving module comprises a driving member (4) and a support frame (5); an output end of the driving member (4) is drivingly connected to the support frame (5); the support frame (5) has a first support rod (51) and a plurality of second support rods (52); the first support rod (51) is located between the plurality of second support rods (52); the first support rod (51) is fixedly connected to the target material (2); and the plurality of second support rods (52) are fixedly connected to the magnetic coil (3).

3. The coating device for the inner wall of a small to medium diameter deep inner hole slender tube according to claim 2, characterized in that: The driving member (4) is a linear motion module or a cylinder.

4. The coating device for the inner wall of a small to medium diameter deep inner hole slender tube according to claim 1, characterized in that: The length of the tube (100) is less than 7000 mm.

5. The coating device for the inner wall of a small to medium diameter deep inner hole slender tube according to claim 1, characterized in that: A cooling channel (21) is provided in the target material (2), one end of the cooling channel (21) is used to communicate with a water inlet pipe, and the other end of the cooling channel (21) is used to communicate with a water outlet pipe.

6. The coating device for the inner wall of a small to medium diameter deep inner hole slender tube according to claim 5, characterized in that: Both ends of the cooling channel (21) are arranged towards the driving module, and the cooling channel (21) is a U-shaped structure.

7. A coating device for the inner wall of a small to medium diameter deep inner hole slender tube according to any one of claims 1 to 6, characterized in that: A plurality of slide rails extending along the axial direction of the tube (100) are provided on the wall of the vacuum chamber (1), and the magnetic coil (3) is in sliding cooperation with the plurality of slide rails.

8. A coating device for the inner wall of a slender tube with a deep inner hole of small or medium diameter according to any one of claims 1 to 6, characterized in that: The coating unit further comprises a first motor and a second motor, the output end of the driving module being transmission-connected to the first motor and the second motor respectively, the output shaft of the first motor being transmission-connected to the target material (2), the output shaft of the second motor being transmission-connected to the magnetic coil (3), and the output shaft of the first motor and the output shaft of the second motor being arranged along the axial direction of the tube (100) and having opposite rotation directions.

9. A coating device for the inner wall of a small to medium diameter deep inner hole slender tube according to any one of claims 1 to 6, characterized in that: The coating device further comprises a heating coil (6), the heating coil (6) being coaxially sleeved on the wall of the tube (100), and the output end of the driving module being drivingly connected to the heating coil (6) so as to drive the target material (2) and the heating coil (6) to move synchronously along the axial direction of the tube (100).

10. A coating method for the inner wall of a small to medium diameter deep inner hole slender tube, characterized in that: The coating method is based on the coating device according to any one of claims 1 to 9, and the coating method comprises: placing the tube (100) in the vacuum chamber (1); Injecting gas into the vacuum chamber through the air inlet module and providing power, connecting the negative electrode of the bias power supply to the tube (100), connecting the negative electrode of the sputtering power supply to the target (2), and the vacuum chamber is the positive electrode and connected to the ground; The target material (2) and the magnetic coil (3) are driven by the driving module to move back and forth synchronously along the axial direction of the tube (100), and the ionized working gas bombards the target material (2) and is deposited on the inner wall of the tube (100) to perform coating.

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