Piezoelectric pump

Abstract

The present invention discloses a piezoelectric pump, comprising a vibrator, a first check valve, a diaphragm valve disc, a pump body, a first diaphragm, a second diaphragm and a second check valve. The first check valve, the first diaphragm, the second check valve, the vibrator, the second diaphragm and the diaphragm valve disc separate the inner cavity of the pump body into a connecting chamber, a first pump chamber, a second pump chamber and an inlet chamber. The first diaphragm is provided with a diaphragm through-hole, and the first check valve has a first check portion; the diaphragm valve disc is provided with a diaphragm through-hole, and the pump body is provided with a convex column; the vibrator is provided with a connecting hole, and the second check valve has a second check portion; in the process of the vibrator deforming and displacing in the direction close to the external filling channel, the first check portion opens the diaphragm through-hole, the second check portion closes the connecting hole and the convex column exits the diaphragm through-hole; in the process of the vibrator deforming and displacing in the direction close to the convex column, the first check portion closes the diaphragm through-hole, the second check portion opens the connecting hole and the convex column enters the diaphragm through-hole, so as to achieve the purpose of increasing the external discharge pressure and improving the discharge efficiency.

Description

Technical Field

[0001] The present invention relates to a pump used in microelectronics, medical treatment, health care and other industries, and in particular to a piezoelectric pump. Background Art

[0002] As we all know, hypertension has gradually risen to the top of the list of human disease hazards. How to conveniently and effectively measure and monitor hypertension, and thus effectively prevent and treat hypertension, has become an important issue in people's fight against hypertension.

[0003] At present, the measurement of blood pressure is inseparable from the use of a sphygmomanometer, which is a very common instrument for measuring blood pressure.

[0004] Blood pressure monitors rely on air pumps, which inflate the airbag to meet the blood pressure measurement requirements. Piezoelectric pumps offer significant performance advantages over traditional motor-operated air pumps, including low noise, small size, minimal airflow ripple, and stable flow.

[0005] However, for the existing piezoelectric pump, due to its unreasonable design, the vibrator generates a large backflow when sending the gas in the pump chamber into the external discharge channel, resulting in the piezoelectric pump having the defects of insufficient inflation pressure and low discharge efficiency.

[0006] Therefore, there is an urgent need for a piezoelectric pump to overcome one or more of the above-mentioned drawbacks. Summary of the Invention

[0007] An object of the present invention is to provide a piezoelectric pump that increases the discharge pressure and improves the discharge efficiency.

[0008] To achieve the above-mentioned purpose, the piezoelectric pump of the present invention comprises a vibrator, a first check valve, a diaphragm valve plate, a pump body, a first partition plate, a second partition plate and a second check valve. The pump body has an inner cavity, an external filling channel and an external inlet channel. The first check valve, the first diaphragm, the second check valve, the vibrator, the second diaphragm and the diaphragm valve disc are each placed horizontally in the inner cavity and stacked in sequence along the first direction, and the ends of the first check valve, the first diaphragm, the second check valve, the vibrator, the second diaphragm and the diaphragm valve disc separated in the horizontal direction are fixedly arranged to separate the inner cavity into a communicating chamber, a first pump chamber, a second pump chamber and an inlet chamber respectively; the communicating chamber is connected to the external filling channel, and the inlet chamber is connected to the external inlet channel, the first pump chamber is defined by the first diaphragm, the second check valve and the vibrator, and the second pump chamber is defined by the vibrator, the second diaphragm and the diaphragm valve disc; a diaphragm through hole connecting the first pump chamber and the communicating chamber is provided on the first diaphragm, and the first check valve has a through hole located in the communicating chamber and used for opening and closing The first check portion of the diaphragm through hole; the diaphragm through hole connecting the second pump chamber and the inlet chamber is provided on the diaphragm valve plate, and the pump body is provided with a boss for matching the gap with the diaphragm through hole; the vibrator is provided with a connecting hole connecting the first pump chamber and the second pump chamber, and the second check valve has a second check portion located in the first pump chamber and used to open and close the connecting hole; the vibrator causes the first check portion to open the diaphragm through hole, the second check portion to close the connecting hole and the boss to exit the diaphragm through hole during the process of deformation and displacement in the direction close to the external filling channel; the vibrator causes the first check portion to close the diaphragm through hole, the second check portion to open the connecting hole and the boss to enter the diaphragm through hole during the process of deformation and displacement in the direction close to the boss.

[0009] Compared with the prior art, the first pump chamber and the second pump chamber are connected in series with the help of a connecting hole; the first check portion is used to prevent the medium (such as gas or liquid) in the connecting chamber from flowing back to the first pump chamber; the second check portion is used to prevent the medium in the first pump chamber from flowing back to the second pump chamber; the cooperation between the boss of the pump body and the partition hole of the diaphragm valve plate is used to prevent the medium in the second pump chamber from flowing back to the inlet chamber; therefore, in their cooperation, the vibrator makes a deformation displacement toward the external filling channel so that the first check portion opens the partition hole, the second check portion closes the connecting hole and the boss exits the diaphragm hole, so that there is less backflow when the first pump chamber is discharged and the discharge efficiency is high; the vibrator makes a deformation displacement toward the boss so that the first check portion closes the partition hole, the second check portion opens the connecting hole and the boss enters the diaphragm hole, pressing the medium in the second pump chamber into the first pump chamber, thereby improving the medium intake efficiency of the first pump chamber and increasing the pressure of the first pump chamber; thereby achieving the purpose of increasing the external discharge pressure and improving the discharge efficiency.

[0010] Preferably, the vibrator includes a vibration plate and a piezoelectric ceramic piece mounted on the vibration plate, the communication hole is opened in the vibration plate and is located next to the outer side of the piezoelectric ceramic piece; the communication holes are multiple and separated from each other and arranged together around the piezoelectric ceramic piece.

[0011] Preferably, the vibration plate includes a flat portion located in the center, an external connection portion located on the outside, and a deformation portion connected between the external connection portion and the flat portion, and the piezoelectric ceramic piece is mounted on the flat portion.

[0012] Preferably, each of the connecting holes is opened in the deformation part and includes a first annular long hole, a second annular long hole and an intermediate annular long hole connecting the first annular long hole and the second annular long hole, and the first annular long hole and the second annular long hole are offset from each other in the direction from the flat part toward the external connection part; two adjacent connecting holes separate the deformation part from an elastic hanging edge for connecting the flat part and the external connection part.

[0013] Preferably, the communicating hole is opened in the external connection portion or the flat portion, and the deformable portion is a corrugated structure.

[0014] Preferably, the first partition is also provided with an outward convex structure protruding into the connecting chamber in a direction close to the external filling channel, and the outward convex structure is opposite to the external filling channel along the first direction; the first check portion closes or opens the partition through hole accordingly by engaging with or separating from the outward convex structure.

[0015] Preferably, the pump body is provided with a convex ring structure which protrudes in the connecting chamber toward the first partition and is arranged around the external filling channel. The convex ring structure is also offset from the external convex structure in the horizontal direction of the first partition. The convex ring structure can selectively engage or disengage with the first check portion.

[0016] Preferably, the pump body is further provided with an emptying hole connected to the communicating chamber, and the emptying hole is located next to the outer side of the convex ring structure; the first check portion closes or opens the communication between the emptying hole and the communicating chamber accordingly by engaging with or disengaging from the convex ring structure; the vibrator or the second check portion is provided with a leakage channel for communicating with the first pump chamber.

[0017] Preferably, the first check valve is a hollow structure, and a position of the first check valve away from an outer side thereof forms the first check portion.

[0018] Preferably, the second check valve is a hollow structure, and a position of the second check valve away from the outer side forms the second check portion, or the second check portion is suspended in the hollow of the second check valve.

[0019] Preferably, the second partition is a hollow structure.

[0020] Preferably, the external filling channel and the external inlet channel are each arranged to extend along the first direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 FIG1 is a plan view of a piezoelectric pump according to a first embodiment of the present invention viewed along a first direction.

[0022] Figure 2 yes Figure 1 Exploded perspective view of the piezoelectric pump shown.

[0023] Figure 3 It is along Figure 1 Internal view taken along line AA with the vibrator in its initial position.

[0024] Figure 4 is Figure 3 Based on this, a state diagram is shown when the vibrator is deformed and displaced to the first limit position in the direction close to the external filling channel.

[0025] Figure 5 is Figure 3 Based on this, a state diagram is shown when the vibrator is deformed and displaced toward the convex column to the second extreme position.

[0026] Figure 6 It is along Figure 1 Internal view taken along midline BB with the vibrator in its initial position.

[0027] Figure 7 FIG. 1 is a plan view of a piezoelectric pump according to a second embodiment of the present invention viewed along a first direction.

[0028] Figure 8 yes Figure 7 Exploded perspective view of the piezoelectric pump shown.

[0029] Figure 9 It is along Figure 7 Internal view taken along the midline DD with the vibrator in its initial position.

[0030] Figure 10 is Figure 9 Based on this, a state diagram is shown when the vibrator is deformed and displaced to the first limit position in the direction close to the external filling channel.

[0031] Figure 11 is Figure 9 Based on this, a state diagram is shown when the vibrator is deformed and displaced toward the convex column to the second extreme position.

[0032] Figure 12 It is along Figure 7Internal view taken along line EE with the vibrator in its initial position.

[0033] Figure 13 yes Figure 8 A perspective view of the vibrating plate in the piezoelectric pump shown.

[0034] Figure 14 Yes Figure 12 Internal image of the deformation. DETAILED DESCRIPTION

[0035] In order to explain the technical content and structural features of the present invention in detail, the following is a further description in conjunction with the embodiments and the accompanying drawings.

[0036] See also Figures 1 to 3 The piezoelectric pump 100 of the first embodiment includes a vibrator 10 , a first check valve 20 , a diaphragm valve plate 30 , a pump body 40 , a first diaphragm 50 , a second diaphragm 60 and a second check valve 70 .

[0037] Recombination Figures 4 to 6 The pump body 40 has an inner cavity 41, an outer filling channel 42 and an outer inlet channel 43 to meet the needs of external media (such as but not limited to gas or liquid) flowing into the pump body 40 along the outer inlet channel 43 and the medium in the pump body 40 flowing out of the pump body 40 along the outer filling channel 42 to pump the medium to the target object (such as but not limited to the air bag); optionally, as an example, the pump body 40 includes an upper half 40a and a lower half 40b, and the lower half 40b is fixed together with the upper half 40a, for example, by screws, or by gluing, or , fixed together by ultrasonic welding; to facilitate the assembly operation of the vibrator 10, the first check valve 20, the diaphragm valve disc 30, the pump body 40, the first partition plate 50, the second partition plate 60 and the second check valve 70 at the pump body 40; obviously, according to actual needs, the pump body 40 can also be a structure well known in the art, so it is not described here; in addition, the external filling channel 42 and the external inlet channel 43 are each stretched along a first direction (see the direction indicated by the arrow C) to facilitate the manufacturing and processing of the external filling channel 42 and the external inlet channel 43 on the pump body 40; obviously, according to actual needs, the external filling channel 42 and the external inlet channel 43 can also extend in other directions, so it is not Figures 3 to 6 Limits shown.

[0038] like Figures 3 to 6As shown, the first check valve 20, the first partition plate 50, the second check valve 70, the vibrator 10, the second partition plate 60 and the diaphragm valve disc 30 are each placed horizontally in the inner cavity 41, and the first check valve 20, the first partition plate 50, the second check valve 70, the vibrator 10, the second partition plate 60 and the diaphragm valve disc 30 are also stacked in sequence along the first direction, that is, in the first direction, the first partition plate 50 is stacked on the first check valve 20, the second check valve 70 is sleeved on the first partition plate 50, the vibrator 10 is stacked on the second check valve 70, the second partition plate 60 is stacked on the vibrator 10, and the diaphragm valve disc 30 is stacked on the second partition plate 60, thereby achieving the purpose of stacking the first check valve 20, the first partition plate 50, the second check valve 70, the vibrator 10, the second partition plate 60 and the diaphragm valve disc 30. The end 22 of the first check valve 20 separated in the horizontal direction, the end 52 of the first partition 50 separated in the horizontal direction, the end 72 of the second check valve 70 separated in the horizontal direction, the end of the vibrator 10 separated in the horizontal direction (i.e., the external connection part 122 described below), the end 61 of the second partition 60 separated in the horizontal direction, and the end 32 of the diaphragm valve plate 30 separated in the horizontal direction are fixedly arranged, so the end 22 of the first check valve 20, the end 52 of the first partition 50, the end 72 of the second check valve 70, the end of the vibrator 10, the end 61 of the second partition 60, and the end 32 of the diaphragm valve plate 30 are each fixed relative to the pump body 40. In addition, the first check valve 20, the first partition 50, the second check valve 70, the vibrator 10, the second partition 60 and the diaphragm valve disc 30 separate the inner cavity 41 into a communication chamber 411, a first pump chamber 412, a second pump chamber 413 and an inlet chamber 414 respectively. The inlet chamber 414 is connected to the external inlet channel 43, and the communication chamber 411 is connected to the external filling channel 42. The first pump chamber 412 is defined by the first partition 50, the second check valve 70 and the vibrator 10, and the second pump chamber 413 is defined by the vibrator 10, the second partition 60 and the diaphragm valve disc 30. The state is shown in FIG. Figures 3 to 6 Furthermore, the first check valve 20 has a first check portion 21 located in the communication chamber 411 and configured to open and close a diaphragm through hole 51 described below.

[0039] like Figures 2 to 6 As shown, the first partition plate 50 is provided with a partition plate through hole 51 communicating with the first pump chamber 412 and the communication chamber 411. Figure 2 As an example, the partition through hole 51 is a circular hole to facilitate the manufacturing and processing of the partition through hole 51. Obviously, according to actual needs, the partition through hole 51 can also be a rectangular hole, an elliptical hole or a regular polygonal hole, so it is not necessary to use Figure 2In addition, the number of the partition through holes 51 is four separated from each other, and all the partition through holes 51 are arranged around the convex structure 52 described below to increase the communication position between the communicating chamber 411 and the first pump chamber 412. Obviously, according to actual needs, the partition through holes 51 can also be other numbers, so it is not Figure 2 The figure shown is limited; when there are four partition through holes 51, the first check valve 20 at this time can be a hollow structure, and the first check valve 20 forms a first check portion 21 at a position away from its outer side 22 (that is, the end of the first check valve 20 separated in the horizontal direction). Such a design can simplify the number of the first check portions 21, thereby facilitating the manufacturing and processing of the first check valve 20.

[0040] like Figures 2 to 6 As shown, the diaphragm valve plate 30 is provided with a diaphragm through hole 31 communicating with the second pump chamber 413 and the inlet chamber 414, and the pump body 40 is provided with a protrusion 44 for gap fitting with the diaphragm through hole 31. Figure 2 As an example, the diaphragm through hole 31 is a circular hole, and correspondingly, the protrusion 44 is a cylindrical column to ensure that the size of the gap between the diaphragm through hole 31 and the protrusion 44 is consistent; Obviously, according to actual needs, the diaphragm through hole 31 can also be an elliptical hole, a rectangular hole or a regular polygonal hole, and correspondingly, the protrusion 44 can be an elliptical column, a rectangular column or a regular polygonal column, so it is not necessary to Figure 2 Limits shown.

[0041] like Figures 2 to 6 As shown, the vibrator 10 is provided with a connecting hole 11 connecting the first pump chamber 412 and the second pump chamber 413. Figure 2 As an example, the communicating hole 11 is a circular hole. Obviously, according to actual needs, the communicating hole 11 can also be an elliptical hole, a rectangular hole or a regular polygonal hole. Figure 2 In addition, the communicating holes 11 are arranged circumferentially spaced apart from each other. Obviously, according to actual needs, the number of communicating holes 11 can also be other, so it is not Figure 2 Limits shown.

[0042] like Figures 2 to 6 As shown, the second check valve 70 has a second check portion 71 located in the first pump chamber 412 and used to open and close the communication hole 11. Figure 2 As an example, the second check valve 70 may be a hollow structure, and the second check portion 71 is suspended in the hollow of the second check valve 70 to ensure that the second check portion 71 opens and closes the communicating hole 11 smoothly, reliably and sensitively. In addition, when there are multiple communicating holes 11, each communicating hole 11 may correspond to a second check portion 71. Figure 2As shown, it is obvious that, according to actual needs, the second check portion 71 can also be made into an annular structure. Such a design can reduce the number of the second check portions 71 and facilitate the manufacturing and processing of the second check valve 70.

[0043] Therefore, when the vibrator 10 deforms and moves toward the external filling channel 42, the first check portion 21 opens the partition through hole 51, the second check portion 71 closes the connecting hole 11, and the protrusion 44 exits the diaphragm through hole 31. Figure 4 As shown; since the first pump chamber 412 is compressed and the second pump chamber 413 is expanded, the medium in the first pump chamber 412 enters the communicating chamber 411 along the partition through hole 51, and then flows from the communicating chamber 411 into the outer filling channel 42; at the same time, the external medium flows into the chamber 414 along the outer inlet channel 43, and then flows into the second pump chamber 413 along the diaphragm through hole 31; wherein the flow direction of the medium is shown Figure 4 Indicated by the dotted arrow.

[0044] In the process of the vibrator 10 deforming and displacing in the direction close to the protrusion 44, the first check portion 21 closes the partition through hole 31, the second check portion 71 opens the connecting hole 11, and the protrusion 44 enters the diaphragm through hole 31. Figure 5 As shown; Since the first pump chamber 412 is expanded and the second pump chamber 413 is compressed, the medium in the second pump chamber 413 enters the first pump chamber 412 along the communicating hole 11, while also blocking the medium in the second pump chamber 413 from flowing back into the chamber 414; wherein the flow direction of the medium is shown Figure 5 More specifically, as follows:

[0045] Combine Figures 2 to 6 As an example, the first partition plate 50 is further provided with an outer convex structure 52 protruding into the communication chamber 411 in the direction close to the external filling channel 42. The outer convex structure 52 is opposite to the external filling channel 42 along the first direction; the first check portion 21 closes the partition plate through hole 51 by engaging with the outer convex structure 52. Figure 3 、 Figure 5 and Figure 6 The first check portion 21 opens the partition through hole 51 by separating from the convex structure 52, and the state is shown Figure 4 As shown, the non-return effect of the first non-return portion 21 is improved. Figures 2 to 6As an example, the pump body 40 is provided with a convex ring structure 45 which protrudes into the connecting chamber 411 in the direction close to the first partition plate 50 and is arranged around the external filling channel 42. The convex ring structure 45 is also offset from the external convex structure 52 in the horizontal direction of the first partition plate 50, and the convex ring structure 45 can selectively engage or disengage with the first check portion 21; in addition, the pump body 40 is also provided with an emptying hole 46 which is connected to the connecting chamber 411. The emptying hole 46 is located next to the outer side of the convex ring structure 45. The first check portion 21 closes or opens the connection between the emptying hole 46 and the connecting chamber 411 by engaging or disengaging with the convex ring structure 45; and the vibrator 10 (specifically the external connecting portion 122) is provided with a leakage channel 14 for communicating with the first pump chamber 412. Optionally, Figure 2 In the embodiment, the leakage channel 14 is a through hole, but is not limited thereto. Figure 6 In the embodiment, when the piezoelectric pump 100 of the first embodiment stops working, the leakage channel 14 releases the pressure in the first pump chamber 412, so that the pressure in the external filling channel 42 pressurized for the target object (such as but not limited to the capsule) is greater than the pressure in the first pump chamber 412, thereby causing the first check portion 21 to close the partition through hole 51 and the convex ring structure 45 to separate from the first check portion 21, so that the medium in the external filling channel 42 is discharged from the emptying hole 46 through the communicating chamber 411, wherein the flow direction of the medium is shown in FIG. Figure 6 Indicated by the dotted arrow.

[0046] like Figures 2 to 6 As shown, as an example, the second partition plate 60 is a hollow structure to better meet the requirement that the second pump chamber 413 is defined by the vibrator 10 , the second partition plate 60 and the diaphragm valve plate 30 .

[0047] like Figures 2 to 6 As shown, as an example, the vibrator 10 includes a vibration plate 12 and a piezoelectric ceramic piece 13 mounted on the vibration plate 12, and the communication hole 11 is opened in the vibration plate 12 and is located next to the outer side of the piezoelectric ceramic piece 13. Figure 2 As an example, when there are multiple communication holes 11 separated from each other, all the communication holes 11 are arranged around the piezoelectric ceramic piece 13. In addition, the vibration plate 12 includes a flat portion 121 located in the center, an external connection portion 122 located on the outside, and a deformation portion 123 connected between the external connection portion 122 and the flat portion 121. The piezoelectric ceramic piece 13 is assembled on the flat portion 121. More specifically, Figures 2 to 6 As an example, the connecting hole 11 is opened in the outer connecting portion 122, and the deformation portion 123 is a corrugated structure to effectively improve the softness, smoothness and sensitivity of the deformation displacement of the vibrator 10; Obviously, according to actual needs, the connecting hole 11 can also be opened in the flat portion 122, so it is not necessary to Figures 2 to 6 Limits shown.

[0048] See also Figures 7 to 13 The structures of the piezoelectric pump 100 of the second embodiment are substantially the same as those of the piezoelectric pump 100 of the first embodiment, with the following differences:

[0049] In the first and second embodiments of the piezoelectric pump 100', each connecting hole 11' is opened on the deformation part 123', and each connecting hole 11' includes a first annular long hole 111, a second annular long hole 112 and an intermediate annular long hole 113 connecting the first annular long hole 111 and the second annular long hole 112. The first annular long hole 111 and the second annular long hole 112 are offset from each other in the direction from the flat part 121 toward the external connection part 122; the two adjacent connecting holes 11' separate the deformation part 123' from an elastic cantilever 1231 for connecting the flat part 121 and the external connection part 122. This design more effectively improves the softness, smoothness and sensitivity of the deformation displacement of the vibrator 10.

[0050] In the piezoelectric pump 100 of the first embodiment, each communication hole 11 is opened on the external connection portion 122 and each communication hole 11 is circular; in addition, the deformation portion 123 is a corrugated structure.

[0051] Second, in the piezoelectric pump 100' of the second embodiment, since each connecting hole 11' includes a first annular long hole 111, a second annular long hole 112 and an intermediate annular long hole 113, correspondingly, the second check valve 70' forms a second check portion 71' at a position away from its outer side to simplify the structure of the second check valve 70'.

[0052] In the piezoelectric pump 100 of the first embodiment, since each communicating hole 11 is a circular hole, the second check portion 71 is correspondingly suspended in the hollow of the second check valve 70 , and the number of the second check portions 71 corresponds to the number of the communicating holes 11 .

[0053] Third, in the piezoelectric pump 100' of the second embodiment, the second check portion 71 is provided with a leakage channel 73. Optionally, Figure 8 In the embodiment, as an example, the leakage channel 73 is a notch, but the present invention is not limited thereto.

[0054] In the piezoelectric pump 100 of the first embodiment, the leakage channel 14 is defined by the vibrator 10 .

[0055] Apart from the above differences, the other two are the same, so I will not go into details here.

[0056] See also Figure 13 , it is right Figure 12 To transform. Figure 13 In the embodiment, the pump body 40 is not provided with an emptying hole 46; Figure 12 In the embodiment, the pump body 40 is provided with an exhaust hole 46 .

[0057] Apart from the above differences, the other two are the same, so I will not go into details here.

[0058] Compared with the prior art, the first pump chamber 412 and the second pump chamber 413 are connected in series with the help of the communicating hole 11 (11'); the medium (such as gas or liquid) in the communicating chamber 411 is prevented from flowing back to the first pump chamber 412 with the help of the first check portion 21; the medium in the first pump chamber 412 is prevented from flowing back to the second pump chamber 413 with the help of the second check portion 71 (71'); the medium in the second pump chamber 413 is prevented from flowing back to the inlet chamber 414 with the help of the cooperation between the protruding column 44 of the pump body 40 and the partition through hole 31 of the diaphragm valve plate 30; therefore, in their cooperation, the vibrator 10 makes the first check portion 21 open during the deformation displacement process toward the external filling channel 42 The partition through hole 51 and the second check portion 71 (71') close the communicating hole 11 (11') and the boss 44 exit the diaphragm through hole 51, so that there is less backflow when the first pump chamber 412 is discharged and the discharge efficiency is high; in the process of deformation displacement of the vibrator 10 toward the boss 44, the first check portion 21 closes the partition through hole 51, the second check portion 71 (71') opens the communicating hole 11 (11') and the boss 44 enters the diaphragm through hole 51, and the medium in the second pump chamber 413 is pressed into the first pump chamber 412, thereby improving the medium intake efficiency of the first pump chamber 412 and increasing the pressure of the first pump chamber 412; thereby achieving the purpose of increasing the discharge pressure and improving the discharge efficiency.

[0059] In addition, Figure 2 In the figure, the transverse direction includes the left-right direction and the front-back direction, that is, the transverse direction is a two-dimensional direction perpendicular to the first direction. In addition, although the drawings show that the pump body 40 is clamped to fix the end 22 of the first check valve 20, the end 52 of the first partition 50, the end 72 of the second check valve 70, the end of the vibrator 10, the end 61 of the second partition 60, and the end 32 of the diaphragm valve disc 30, it is clear that according to actual needs, the end 22 of the first check valve 20, the end 52 of the first partition 50, the end 72 of the second check valve 70, the end of the vibrator 10, the end 61 of the second partition 60, and the end 32 of the diaphragm valve disc 30 can also be fixed by gluing. However, this is well known in the art and will not be described in detail here.

[0060] It is worth noting that the aforementioned leakage channel 14 (73) is a micro-leakage channel, so that the amount of medium leaked from the first pump chamber 412 through the leakage channel 14 (73) during the operation of the piezoelectric pump 100 (100') is far less than the amount of medium pumped out of the first pump chamber 412, thereby ensuring that it does not affect the normal pumping operation of the piezoelectric pump 100 (100').

[0061] The above disclosure is only a preferred embodiment of the present invention and cannot be used to limit the scope of the present invention. Therefore, equivalent changes made according to the claims of the present invention are within the scope of the present invention.

Claims

1. A piezoelectric pump comprising a vibrator, a first check valve, a diaphragm valve plate, and a pump body with an inner cavity, an external filling channel, and an external inlet channel, characterized in that: The piezoelectric pump also includes a first diaphragm, a second diaphragm and a second check valve, the first check valve, the first diaphragm, the second check valve, the vibrator, the second diaphragm and the diaphragm valve disc are each placed horizontally in the inner cavity and stacked in sequence along the first direction, and the ends of the first check valve, the first diaphragm, the second check valve, the vibrator, the second diaphragm and the diaphragm valve disc separated in the horizontal direction are fixedly arranged to separate the inner cavity into a communicating chamber, a first pump chamber, a second pump chamber and an inlet chamber respectively, the communicating chamber is connected with the external filling channel, the inlet chamber is connected with the external inlet channel, the first pump chamber is defined by the first diaphragm, the second check valve and the vibrator, and the second pump chamber is defined by the vibrator, the second diaphragm and the diaphragm valve disc; a diaphragm through hole connecting the first pump chamber and the communicating chamber is opened on the first diaphragm, and the first check valve has a position The diaphragm valve plate is provided with a diaphragm through hole connecting the second pump chamber and the inlet chamber, and the pump body is provided with a protrusion for matching the clearance of the diaphragm through hole; the vibrator is provided with a connecting hole connecting the first pump chamber and the second pump chamber, and the second check valve has a second check portion located in the first pump chamber and used for opening and closing the connecting hole; the vibrator causes the first check portion to open the diaphragm through hole, the second check portion to close the connecting hole and the protrusion to exit the diaphragm through hole during the process of deformation and displacement in the direction close to the external filling channel; the vibrator causes the first check portion to close the diaphragm through hole, the second check portion to open the connecting hole and the protrusion to enter the diaphragm through hole during the process of deformation and displacement in the direction close to the protrusion.

2. The piezoelectric pump according to claim 1, wherein The vibrator includes a vibration plate and a piezoelectric ceramic piece mounted on the vibration plate. The communication hole is opened in the vibration plate and located next to the outer side of the piezoelectric ceramic piece. The communication holes are multiple and separated from each other and arranged to surround the piezoelectric ceramic piece.

3. The piezoelectric pump according to claim 2, wherein: The vibration plate includes a flat portion located in the center, an external connection portion located on the outside, and a deformation portion connected between the external connection portion and the flat portion. The piezoelectric ceramic piece is mounted on the flat portion.

4. The piezoelectric pump according to claim 3, wherein Each of the connecting holes is opened in the deformation part and includes a first annular long hole, a second annular long hole and an intermediate annular long hole connecting the first annular long hole and the second annular long hole, and the first annular long hole and the second annular long hole are offset from each other in the direction from the flat part toward the external connection part; two adjacent connecting holes separate the deformation part from an elastic hanging edge for connecting the flat part and the external connection part.

5. The piezoelectric pump according to claim 3, wherein The communicating hole is opened in the external connection portion or the flat portion, and the deformable portion is a corrugated structure.

6. The piezoelectric pump according to claim 1, wherein The first partition is also provided with an outward convex structure protruding into the communicating chamber in a direction close to the external filling channel, and the outward convex structure is opposite to the external filling channel along the first direction; the first check portion closes or opens the partition through hole accordingly by engaging with or separating from the outward convex structure.

7. The piezoelectric pump according to claim 6, wherein: The pump body is provided with a convex ring structure which protrudes into the communicating chamber in a direction close to the first partition and is arranged around the external filling channel. The convex ring structure is also offset from the external convex structure in the horizontal direction of the first partition. The convex ring structure can selectively engage with or disengage from the first check portion.

8. The piezoelectric pump according to claim 7, wherein: The pump body is also provided with an emptying hole connected to the communicating chamber, and the emptying hole is located next to the outer side of the convex ring structure; the first check portion closes or opens the communication between the emptying hole and the communicating chamber accordingly by engaging with or separating from the convex ring structure; the vibrator or the second check portion is provided with a leakage channel for communicating with the first pump chamber.

9. The piezoelectric pump according to claim 1, wherein The first check valve, the second check valve and the second partition are each a hollow structure; the first check valve forms the first check portion at a position away from the outer side thereof; the second check valve forms the second check portion at a position away from the outer side thereof, or the second check portion is suspended in the hollow part of the second check valve.

10. The piezoelectric pump according to claim 1, wherein The external filling channel and the external inlet channel are each extended along the first direction.

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