A furnace loading device and method for suppressing sintering deformation of rotating ceramic target

Abstract

The invention relates to the technical field of sintering preparation of rotating ceramic targets, and in particular to a furnace loading device and method for inhibiting sintering deformation of rotating ceramic targets. A furnace loading gasket is designed to be prepared in an integrated manner, a circular through hole is provided through the center of the furnace loading gasket, a circular airway is formed in the circular through hole, a strip groove is provided on the bottom end surface of the furnace loading gasket, a strip airway is formed in the strip groove, a circular sand groove is provided on the top end surface of the furnace loading gasket, alumina fine sand is laid in the sand groove and is scraped flat, a rotating ceramic target green body is placed upright on the sand groove, four strip airway inlets at the bottom of the furnace loading gasket converge into a middle circular airway, air is evenly inlet in all directions, there is no groove on the target contact surface, deformation, collapse and cracking of the target bottom can be effectively prevented; there is no gasket displacement causing uneven shrinkage in all directions and severe deformation; the sanding area and thickness of the alumina fine sand can be well controlled, which is beneficial to the uniformity of shrinkage of the target in all directions.

Description

Technical Field

[0001] The invention relates to the technical field of sintering preparation of rotary ceramic target materials, and in particular to a furnace loading device and method for suppressing sintering deformation of rotary ceramic target materials. Background Art

[0002] Existing rotating ceramic targets, such as rotating ITO targets, indium-free targets, IZO targets, IGZO targets, AZO targets, etc., all need to be prepared after the target green body is sintered at high temperature to form a ceramic target finished product. Among them, the loading process of placing the target green body into the sintering furnace is very important. The current mainstream loading method is to place 4 separate square alumina gaskets in a field shape, with the gap between the gaskets as an airway, and then sprinkle alumina sand on the alumina gaskets, and then stand the rotating target green body vertically on the alumina gaskets. However, the defects of this method are as follows:

[0003] 1. The gap size of alumina gaskets varies when they are placed manually, causing deformation, collapse and cracking at the bottom of the target material, affecting the product yield;

[0004] 2. The size of the rotating target green body shrinks during sintering, and the shrinkage force in each direction is different. A single gasket is easy to shift, which causes the target green body to be severely deformed during sintering, forming an ellipse and unusable. The shift of the gasket may also cause partial airway blockage, resulting in insufficient oxygen in some areas of the target green body, resulting in uneven density and other defects.

[0005] 3. In actual operation, the alumina sand spreading area and thickness are not easy to control, and the sand thickness and area directly affect the friction resistance and contact atmosphere at the bottom of the target green body, which in turn causes uneven shrinkage of the target green body and low density at the bottom of the target green body;

[0006] Therefore, further optimization and improvement are still needed. Summary of the invention

[0007] In view of this, the purpose of the present invention is to provide a furnace loading device and method for suppressing the deformation of a rotating ceramic target during sintering, so as to solve the problem that the existing rotating ceramic target is easily deformed and has uneven density when being loaded and sintered.

[0008] Based on the above purpose, the present invention provides a furnace loading device for suppressing the sintering deformation of a rotating ceramic target, including a furnace loading gasket. When loading and sintering, a hollow cylindrical rotating ceramic target green body is placed upright on the furnace loading gasket:

[0009] The furnace loading gasket is made in one piece, a circular through hole is provided at the center of the furnace loading gasket, a circular airway is formed inside the circular through hole, a strip groove is provided on the bottom end surface of the furnace loading gasket, the length direction of the strip groove is parallel to the radial direction of the circular through hole, a plurality of strip grooves are arranged along the outer circumference of the circular through hole, one end of the strip groove passes through the furnace loading gasket, and the other end communicates with the circular airway, and a strip airway is formed inside the strip groove;

[0010] A circular sand groove is provided on the top surface of the furnace loading gasket at the outer circle of the circular through hole. The sand groove is coaxial with the circular through hole. Alumina fine sand flush with the top surface of the furnace loading gasket is laid in the sand groove to support the bottom end surface of the rotating ceramic target green body.

[0011] Preferably, the furnace charging gasket is designed in the shape of a flat rectangular block.

[0012] Preferably, four strip-shaped grooves are evenly distributed along the outer circumference of the circular through hole, and the length direction of each strip-shaped groove is perpendicular to the four sides of the furnace loading gasket.

[0013] Preferably, a plurality of concave holes are arranged in the sand trough near the outer circle thereof. When the alumina fine sand is laid in the sand trough, the alumina fine sand is scraped flat from the inside to the outside so that the excess alumina fine sand leaks into the concave holes.

[0014] Preferably, an auxiliary guide column is also included. The auxiliary guide column is designed to be a cylindrical shape with a variable diameter. The outer diameter of the top end of the auxiliary guide column is adapted to the inner diameter of the rotating ceramic target green body, and the outer diameter of the bottom end of the auxiliary guide column is adapted to the inner diameter of the circular air channel. The outer side of the bottom end of the auxiliary guide column is movably connected with a limit pin adapted to the strip air channel. The bottom end of the auxiliary guide column is inserted into the circular air channel, and when each limit pin is correspondingly inserted into each strip air channel, the rotating ceramic target green body is vertically sleeved on the outside of the auxiliary guide column to assist the coaxial placement of the rotating ceramic target green body on the sand trough.

[0015] Preferably, a handle is movably connected to the top of the auxiliary guide column, and the bottom end of the handle is movably inserted into the auxiliary guide column. A vertical groove is provided at the bottom of the auxiliary guide column, and a counterweight is provided in the vertical groove. A pull rope is connected to the top of the counterweight, and the pull rope passes through the auxiliary guide column upward and is connected to the handle. A push block is provided at the bottom end of the vertical groove, and one end of the limit pin passes through the vertical groove and is connected to the bottom end of the push block. When the bottom end of the auxiliary guide column is placed in the circular airway, the counterweight pushes the push block downward, and drives the limit pin to extend outward through the push block.

[0016] Preferably, the counterweight is designed to be spherical, the top end surface of the push block is designed to be an inclined end surface, and an elastic member is connected between the relative push blocks. When the handle is pulled upward, the pull rope pulls the counterweight upward to make the elastic member elastically contract, driving the limit pin to retract inward into the vertical groove.

[0017] The present invention also provides a furnace loading method for suppressing sintering deformation of a rotating ceramic target, comprising the following steps:

[0018] S1, select a setter plate and place it in the sintering furnace, and adjust it to be horizontal;

[0019] S2, sprinkle a thin layer of alumina fine sand on the setter, then place the furnace gasket on the setter and adjust it to be horizontal;

[0020] S3, spread a layer of alumina fine sand on the sand trough of the furnace gasket and scrape it flat;

[0021] S4, gently place the rotating ceramic target green body on the sand slot and adjust it to be horizontal;

[0022] S5, starting the sintering furnace to debinder and sinter the rotating ceramic target green body.

[0023] Preferably, a plurality of concave holes are arranged in the sand trough near the outer circle thereof. When the alumina fine sand is laid in the sand trough, the alumina fine sand is scraped flat from the inside to the outside so that the excess alumina fine sand leaks into the concave holes.

[0024] Preferably, an auxiliary guide column is provided, the outer diameter of the top end of the auxiliary guide column is matched with the inner diameter of the rotating ceramic target green body, the outer diameter of the bottom end of the auxiliary guide column is matched with the inner diameter of the circular airway, and the outer side of the bottom end of the auxiliary guide column is movably connected with a limit pin matched with the strip airway. When the bottom end of the auxiliary guide column is inserted into the circular airway and each limit pin is correspondingly inserted into each strip airway, the rotating ceramic target green body is vertically sleeved on the outside of the auxiliary guide column to assist the coaxial placement of the rotating ceramic target green body on the sand trough. After placement, when the auxiliary guide column is lifted upward, the limit pin is automatically retracted into the auxiliary guide column.

[0025] The beneficial effects of the present invention are as follows: a furnace charging gasket is prepared in an integrated manner by designing, a circular through hole is provided at the center of the furnace charging gasket, a circular airway is formed inside the circular through hole, a strip groove is provided on the bottom end surface of the furnace charging gasket, a strip airway is formed inside the strip groove, a circular sand groove is provided on the top end surface of the furnace charging gasket at the outer circle of the circular through hole, alumina fine sand flush with the top end surface of the furnace charging gasket is laid in the sand groove, when charging and sintering, the hollow cylindrical rotating ceramic target green body is placed upright on the furnace charging gasket, specifically, placed in the sand groove On the laid alumina fine sand, the four air inlets at the bottom of the furnace loading gasket converge into the middle circular air duct, and the air intake in all directions is uniform, which can provide sufficient oxygen to the inner wall of the rotating ceramic target green body. There are no grooves on the contact surface of the target material, which can effectively prevent the deformation, collapse and cracking of the bottom of the target material. The furnace loading gasket is an integral structure, and there is no gasket shifting causing uneven shrinkage in all directions, severe deformation, and forming an ellipse. Placing the alumina fine sand in the sand trough and then scraping it flat can well control the sanding area and thickness of the alumina fine sand, which is beneficial to the uniformity of shrinkage of the target material in all directions. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a schematic diagram of a three-dimensional structure in which a rotating ceramic target green body is placed on an alumina gasket in the prior art;

[0028] Figure 2 It is a front view structural schematic diagram of a rotating ceramic target green body placed on an alumina gasket in the prior art;

[0029] Figure 3 It is a schematic diagram of the structure of an alumina gasket in the prior art;

[0030] Figure 4 It is a structural schematic diagram of the top surface of the furnace loading gasket of the present invention;

[0031] Figure 5 It is a structural schematic diagram of the bottom end surface of the furnace loading gasket of the present invention;

[0032] Figure 6 It is a schematic diagram of the three-dimensional structure of the rotating ceramic target green body of the present invention placed on the furnace loading gasket;

[0033] Figure 7 It is a cross-sectional structural schematic diagram of a rotating ceramic target green body of the present invention placed on a furnace loading gasket;

[0034] Figure 8 It is a front view structural schematic diagram of the rotating ceramic target green body of the present invention being placed on a furnace loading gasket;

[0035] Fig. 9 is a schematic structural diagram of a concave hole of the present invention;

[0036] Fig.10 It is a schematic diagram of the internal structure of the auxiliary guide column when the handle is lifted upward in the present invention;

[0037] Fig.11 It is a schematic diagram of the internal structure of the auxiliary guide column when the handle is lowered in the present invention.

[0038] The markings in the figure are:

[0039] 100. Rotating ceramic target green body; 200. Alumina gasket; 1. Furnace loading gasket; 2. Circular through hole; 3. Strip groove; 4. Sand groove; 41. Hole; 5. Auxiliary guide column; 51. Vertical groove; 52. Push block; 53. Elastic part; 6. Limiting pin; 7. Handle; 8. Counterweight; 9. Pull rope. DETAILED DESCRIPTION

[0040] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0041] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0042] like Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8As shown, a furnace loading device for suppressing the sintering deformation of a rotating ceramic target comprises a furnace loading gasket 1. When loading and sintering, a hollow cylindrical rotating ceramic target green body 100 is placed upright on the furnace loading gasket 1. The furnace loading gasket 1 is prepared in an integrated manner. A circular through hole 2 is provided at the center of the furnace loading gasket 1. A circular air channel is formed inside the circular through hole 2. A strip groove 3 is provided on the bottom end surface of the furnace loading gasket 1. The length direction of the strip groove 3 is parallel to the radial direction of the circular through hole 2. A plurality of strip grooves 3 are arranged along the outer circumference of the circular through hole 2. One end of the strip groove 3 passes through the furnace loading gasket 1, and the other end communicates with the circular airway. A strip airway is formed inside the strip groove 3. A circular sand groove 4 is provided on the top surface of the furnace loading gasket 1 at the outer circle of the circular through hole 2. The sand groove 4 is coaxial with the circular through hole 2. Alumina fine sand flush with the top surface of the furnace loading gasket 1 is laid in the sand groove 4 to support the bottom end surface of the rotating ceramic target green body 100.

[0043] The present invention is based on existing rotating ceramic targets such as rotating ITO targets, indium-free targets, IZO targets, IGZO targets, AZO targets, etc., when the target green body is prepared and sintered at high temperature in a sintering furnace, such as Figure 1 , Figure 2 , Figure 3 As shown, four individual square alumina gaskets 200 are usually placed in a field shape, with the gaps between the gaskets used as airways. Alumina sand is then sprinkled on the alumina gaskets 200, and the rotating ceramic target green body 100 is then placed vertically on the alumina gaskets 200. However, there are differences in the size of the gaps between the alumina gaskets 200 during actual manual placement, which causes deformation, collapse and cracking at the bottom of the target material, affecting the product yield. The rotating ceramic target green body 100 shrinks in size during sintering, and the shrinkage forces in all directions are different. Individual gaskets are easily displaced, which causes the target green body to be severely deformed during sintering, forming an ellipse and being unusable. Gasket displacement may also cause blockage of some airways, resulting in insufficient oxygen in some areas of the target green body, resulting in uneven density and other defects. In actual operation, the area and thickness of alumina sand are difficult to control, and the thickness and area of ​​the sand directly affect the friction resistance and contact atmosphere at the bottom of the target green body, resulting in uneven shrinkage of the target green body and low density at the bottom of the target green body.

[0044] In this regard, the present invention is designed to be an integrated furnace gasket 1, such as Figure 4 , Figure 5As shown, a circular through hole 2 is provided at the center of the furnace gasket 1, and a circular airway is formed inside the circular through hole 2. A strip groove 3 is provided on the bottom end surface of the furnace gasket 1, and the length direction of the strip groove 3 is parallel to the radial direction of the circular through hole 2. A plurality of strip grooves 3 are arranged along the outer circumference of the circular through hole 2. One end of the strip groove 3 passes through the furnace gasket 1, and the other end communicates with the circular airway. A strip airway is formed inside the strip groove 3. Specifically, the furnace gasket 1 adopts the existing The alumina gasket 200 is made of the same material. The furnace gasket 1 is designed in the shape of a flat rectangular block. Four strip grooves 3 are evenly arranged along the outer circumference of the circular through hole 2, and the length direction of each strip groove 3 is perpendicular to the four sides of the furnace gasket 1. A circular sand groove 4 is provided on the top surface of the furnace gasket 1 at the outer circle of the circular through hole 2. The sand groove 4 is designed to be coaxial with the circular through hole 2. Alumina fine sand flush with the top surface of the furnace gasket 1 is laid in the sand groove 4. When the furnace is loaded and sintered, Figure 6 , Figure 7 , Figure 8 As shown, a hollow cylindrical rotating ceramic target blank 100 is placed upright on a furnace loading gasket 1, specifically, on alumina fine sand laid in a sand trough 4, and the four air duct inlets at the bottom of the furnace loading gasket 1 converge into a central circular air duct, so that air intake in all directions is uniform, thereby providing sufficient oxygen to the inner wall of the rotating ceramic target blank 100, and there is no groove on the contact surface of the target material, thereby effectively preventing deformation, collapse and cracking of the bottom of the target material; the furnace loading gasket 1 is an integral structure, and there is no situation in which the gasket is shifted and shrinkage in all directions is uneven, deformation is severe, and an ellipse is formed; the alumina fine sand is placed in the sand trough 4 and then scraped flat, so that the sanding area and thickness of the alumina fine sand can be well controlled, which is beneficial to the uniformity of shrinkage of the target material in all directions.

[0045] As another embodiment of the present invention, optionally, Fig. 9 As shown, a plurality of recessed holes 41 are arranged in the sand trough 4 near its outer circle. When alumina fine sand is laid in the sand trough 4, a tool such as a scraper is used to scrape the alumina fine sand from the inside to the outside, so that excess alumina fine sand leaks into the recessed holes 41, thereby preventing excess alumina fine sand from leaking into the circular through hole 2 and the outside of the furnace gasket 1. When the hollow cylindrical rotating ceramic target green body 100 is placed upright on the furnace gasket 1, the recessed holes 41 are located at the periphery of the rotating ceramic target green body 100, so that even if the recessed holes 41 are not completely filled, it will not affect the sintering of the rotating ceramic target green body 100. After sintering, the excess alumina fine sand in the recessed holes 41 can be poured out.

[0046] As another embodiment of the present invention, optionally, Fig.10 , Fig.11As shown, it also includes an auxiliary guide column 5, which is designed to be a cylindrical shape with a variable diameter. The top outer diameter of the auxiliary guide column 5 is adapted to the inner diameter of the rotating ceramic target green body 100, and the bottom outer diameter of the auxiliary guide column 5 is adapted to the inner diameter of the circular airway. The outer side of the bottom end of the auxiliary guide column 5 is movably connected with a limit pin 6 adapted to the strip airway. When in use, the bottom end of the auxiliary guide column 5 is inserted into the circular airway, and each limit pin 6 is correspondingly inserted into each strip airway for stable clamping. The rotating ceramic target green body 100 is vertically sleeved on the outside of the auxiliary guide column 5 to assist the rotating ceramic target green body 100 in being coaxially placed on the sand groove 4, so as to avoid the rotating ceramic target green body 100 failing to be concentrically aligned with the circular through hole 2 when placed manually, so that the circular airway is eccentrically ventilated toward the rotating ceramic target green body 100, thereby affecting the sintering quality.

[0047] Among them, Fig.10 , Fig.11 As shown, a handle 7 is movably connected to the top of the auxiliary guide column 5 for carrying the auxiliary guide column 5, and the bottom end of the handle 7 is movably plugged into the auxiliary guide column 5. A vertical groove 51 is provided at the bottom of the auxiliary guide column 5, and a counterweight 8 is provided in the vertical groove 51. A pull rope 9 is connected to the top of the counterweight 8, and the pull rope 9 passes through the auxiliary guide column 5 upward and is connected to the handle 7. A push block 52 is provided at the bottom end of the vertical groove 51, and one end of the limit latch 6 passes through the vertical groove 51 and is connected to the bottom end of the push block 52. Specifically, the counterweight 8 can be designed to be spherical, and the top end surface of the push block 52 is designed to be an inclined end surface. An elastic member 53 is connected between the opposing push blocks 52, and the elastic member 53 can adopt an existing conventional spring or other elastic component, so that when the bottom end of the auxiliary guide column 5 is placed in the circular airway, as shown in FIG. Fig.11 As shown, the counterweight 8 is naturally pushed downward by the push block 52 under the action of its own weight until the push block 52 drives the limit pin 6 to extend outward for insertion into each strip air channel. After the rotating ceramic target green body 100 is positioned and placed, the rotating ceramic target green body 100 or the furnace gasket 1 can be lightly pressed to keep it still, and then the handle 7 is manually pulled upward to drive the counterweight 8 to move upward along the vertical groove 51 until the counterweight 8 moves away from the push block 52. The push block 52 moves inward under the contraction of the elastic member 53 until the limit pin 6 is completely moved into the auxiliary guide column 5 and reset. Fig.10 As shown, at this time, the counterweight 8 abuts against the top of the vertical slot 51, and the entire auxiliary guide column 5 is lifted out through the handle 7.

[0048] The present invention also provides a furnace loading method for suppressing sintering deformation of a rotating ceramic target, comprising the following steps:

[0049] S1, select a setter plate and place it in the sintering furnace, and adjust it to be horizontal;

[0050] S2, sprinkle a thin layer of alumina fine sand on the setter, then place the furnace gasket 1 on the setter and adjust it to be horizontal;

[0051] S3, spreading a layer of alumina fine sand on the sand groove 4 of the furnace gasket 1 and scraping it flat;

[0052] S4, gently place the rotating ceramic target green body 100 on the sand tank 4 and adjust it to be horizontal;

[0053] S5, starting the sintering furnace to debinder and sinter the rotating ceramic target green body 100.

[0054] Specifically, the rotating ceramic target green body 100 is made of an indium tin oxide (ITO) target material.

[0055] 1. Raw material selection: Indium oxide powder purity is ≥4N, specific surface area is 8-12m 2 / g; the purity of tin oxide powder is ≥4N, and the specific surface area is 10-15m 2 / g,

[0056] 2.2. Slurry preparation: A. The mass ratio of indium oxide and tin oxide in the indium tin oxide (ITO) target is 90-99:1-10% respectively. B. Weigh indium oxide and tin oxide powder separately according to the above ratio; C. Put the tin oxide powder into sand mill a and grind to obtain precursor slurry a. Ultrapure water is used as the solvent, and Φ0.3mm zirconium oxide beads are used as the grinding medium. The speed of sand mill a is 400-800 rpm, and the grinding time is 2-4 hours. D. After the indium oxide powder is put into sand mill b and grind for 30 minutes, the above-mentioned precursor slurry a is put into sand mill b and grind for 2-4 hours to obtain precursor slurry b. Ultrapure water is used as the solvent, and Φ0.5mm zirconium oxide beads are used as the grinding medium. The speed of sand mill b is 400-800 rpm. E. Add the binder and plasticizer into the precursor slurry b, and continue grinding for 30 minutes to obtain ITO slurry.

[0057] 3. Granulation: The above ITO slurry is introduced into a spray dryer for spray granulation to obtain ITO granules. The speed of the centrifugal atomizer is 8000-10000 rpm, the inlet air temperature is 240-260°C, and the outlet air temperature is 100-120°C.

[0058] 4. Molding: Put the above ITO pellets into a rubber mold, and then put the mold into a cold isostatic press to press and mold to obtain a rotating ITO green body. The cold isostatic press pressure is 300-600Mpa, and the holding time is 1-10 minutes.

[0059] 5. Sintering: The above-mentioned rotating ITO green body is placed in a normal pressure atmosphere sintering furnace for degreasing and sintering to obtain a rotating ITO target.

[0060] The sintering furnace material and placement method are as above, a method for loading the furnace to suppress the sintering deformation of the rotating ceramic target; the degreasing sintering parameters are as follows:

[0061] A. After 8 hours, the room temperature is raised to 400°C and compressed air is introduced.

[0062] B.2 hours, keep warm at 400℃, and pass compressed air.

[0063] C. After 4 hours, heat to 800℃ and pass compressed air.

[0064] D. After 10-15 hours, heat to 1400-1600℃ and pass oxygen.

[0065] E.10-20 hours, keep warm, supply oxygen.

[0066] F. Cool naturally to room temperature.

[0067] As another embodiment of the present invention, optionally, Fig. 9 As shown, a plurality of concave holes 41 are arranged in the sand trough 4 near its outer circle. When alumina fine sand is laid in the sand trough 4, the alumina fine sand is scraped from the inside to the outside so that excess alumina fine sand leaks into the concave holes 41, thereby preventing excess alumina fine sand from leaking into the circular through hole 2 and outside the furnace gasket 1.

[0068] As another embodiment of the present invention, optionally, Fig.10 , Fig.11 As shown, by setting an auxiliary guide column 5, the top outer diameter of the auxiliary guide column 5 is adapted to the inner diameter of the rotating ceramic target green body 100, the bottom outer diameter of the auxiliary guide column 5 is adapted to the inner diameter of the circular airway, and the outer side of the bottom end of the auxiliary guide column 5 is movably connected with a limit pin 6 adapted to the strip airway. When the bottom end of the auxiliary guide column 5 is inserted into the circular airway, and each limit pin 6 is correspondingly inserted into each strip airway, the rotating ceramic target green body 100 is vertically sleeved on the outside of the auxiliary guide column 5 to assist the rotating ceramic target green body 100 to be coaxially placed on the sand groove 4. After placement, when the auxiliary guide column 5 is lifted upward, the limit pin 6 automatically retracts into the auxiliary guide column 5, thereby achieving a convenient operation and use effect.

[0069] Those skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in detail for the sake of simplicity.

Claims

1. A furnace loading device for suppressing the sintering deformation of a rotating ceramic target, comprising a furnace loading gasket (1). During the furnace loading and sintering, a hollow cylindrical rotating ceramic target green body (100) is placed upright on the furnace loading gasket (1), characterized in that: The furnace loading gasket (1) is made in an integrated manner, a circular through hole (2) is provided through the center of the furnace loading gasket (1), a circular air passage is formed inside the circular through hole (2), a strip groove (3) is provided on the bottom end surface of the furnace loading gasket (1), the length direction of the strip groove (3) is parallel to the radial direction of the circular through hole (2), a plurality of strip grooves (3) are arranged along the outer circumference of the circular through hole (2), one end of the strip groove (3) passes through the furnace loading gasket (1), and the other end communicates with the circular air passage, and a strip air passage is formed inside the strip groove (3); A circular sand groove (4) is provided on the top surface of the furnace loading gasket (1) at the outer circle of the circular through hole (2); the sand groove (4) and the circular through hole (2) are designed to be coaxial; the sand groove (4) is paved with alumina fine sand flush with the top surface of the furnace loading gasket (1) and is used to support the bottom end surface of the rotating ceramic target green body (100).

2. A furnace loading device for suppressing sintering deformation of a rotating ceramic target according to claim 1, characterized in that: The furnace loading gasket (1) is designed in the shape of a flat rectangular block.

3. A furnace loading device for suppressing sintering deformation of a rotating ceramic target according to claim 2, characterized in that: Four strip-shaped grooves (3) are evenly arranged along the outer circumference of the circular through hole (2), and the length direction of each strip-shaped groove (3) is respectively perpendicular to the four sides of the furnace loading gasket (1).

4. A furnace loading device for suppressing sintering deformation of a rotating ceramic target according to claim 1, characterized in that: A plurality of recessed holes (41) are arranged in the sand trough (4) near its outer circle. When the aluminum oxide fine sand is laid in the sand trough (4), the aluminum oxide fine sand is scraped from the inside to the outside so that the excess aluminum oxide fine sand leaks into the recessed holes (41).

5. The furnace loading device for suppressing sintering deformation of a rotating ceramic target according to claim 1, characterized in that: The auxiliary guide column (5) is also included. The auxiliary guide column (5) is designed to be a cylindrical shape with a variable diameter. The outer diameter of the top end of the auxiliary guide column (5) is matched with the inner diameter of the rotating ceramic target green body (100). The outer diameter of the bottom end of the auxiliary guide column (5) is matched with the inner diameter of the circular airway. The outer side of the bottom end of the auxiliary guide column (5) is movably connected with a limit pin (6) matched with the strip airway. The bottom end of the auxiliary guide column (5) is inserted into the circular airway. When each limit pin (6) is correspondingly inserted into each strip airway, the rotating ceramic target green body (100) is vertically sleeved on the outside of the auxiliary guide column (5), so as to assist the rotating ceramic target green body (100) to be coaxially placed on the sand groove (4).

6. A furnace loading device for suppressing sintering deformation of a rotating ceramic target according to claim 5, characterized in that: A handle (7) is movably connected to the top of the auxiliary guide column (5), and the bottom of the handle (7) is movably plugged into the auxiliary guide column (5). A vertical groove (51) is provided at the bottom of the auxiliary guide column (5), and a counterweight (8) is provided in the vertical groove (51). A pull rope (9) is connected to the top of the counterweight (8), and the pull rope (9) passes through the auxiliary guide column (5) upward and is connected to the handle (7). A push block (52) is provided at the bottom end of the vertical groove (51). One end of the limit pin (6) passes through the vertical groove (51) and is connected to the bottom end of the push block (52). When the bottom end of the auxiliary guide column (5) is placed in the circular airway, the counterweight (8) pushes the push block (52) downward, and drives the limit pin (6) to extend outward through the push block (52).

7. A furnace loading device for suppressing sintering deformation of a rotating ceramic target according to claim 6, characterized in that: The counterweight (8) is designed to be spherical, the top end surface of the push block (52) is designed to be an inclined end surface, and an elastic member (53) is connected between the opposing push blocks (52). When the handle (7) is pulled upward, the pull rope (9) pulls the counterweight (8) upward to elastically contract the elastic member (53), thereby driving the limit latch (6) to retract inward into the vertical slot (51).

8. A method for charging a rotating ceramic target to suppress sintering deformation, the method using the charging device for charging a rotating ceramic target to suppress sintering deformation as claimed in any one of claims 1 to 7, characterized in that: The following steps are involved: S1, select a setter plate and place it in the sintering furnace, and adjust it to be horizontal; S2, sprinkle a thin layer of alumina fine sand on the setter plate, then place the furnace loading gasket (1) on the setter plate and adjust it to be horizontal; S3, spreading a layer of alumina fine sand on the sand groove (4) of the furnace charging gasket (1), and scraping it flat; S4, gently placing the rotating ceramic target green body (100) on the sand trough (4) and adjusting it to be horizontal; S5, starting the sintering furnace to debinder and sinter the rotating ceramic target green body (100).

9. A furnace loading method for suppressing sintering deformation of a rotating ceramic target according to claim 8, characterized in that: A plurality of recessed holes (41) are arranged in the sand trough (4) near its outer circle. When the aluminum oxide fine sand is laid in the sand trough (4), the aluminum oxide fine sand is scraped from the inside to the outside so that the excess aluminum oxide fine sand leaks into the recessed holes (41).

10. A furnace loading method for suppressing sintering deformation of a rotating ceramic target according to claim 8, characterized in that: An auxiliary guide column (5) is provided, wherein the outer diameter of the top end of the auxiliary guide column (5) is matched with the inner diameter of the rotating ceramic target green body (100), the outer diameter of the bottom end of the auxiliary guide column (5) is matched with the inner diameter of the circular airway, and the outer side of the bottom end of the auxiliary guide column (5) is movably connected with a limit pin (6) matched with the strip airway. When the bottom end of the auxiliary guide column (5) is inserted into the circular airway and each limit pin (6) is correspondingly inserted into each strip airway, the rotating ceramic target green body (100) is vertically sleeved on the outside of the auxiliary guide column (5), so as to assist the rotating ceramic target green body (100) to be coaxially placed on the sand groove (4). After the placement is completed and the auxiliary guide column (5) is lifted upward, the limit pin (6) is automatically retracted into the auxiliary guide column (5).

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