Device and method for detecting tiny angle change of device in integrated optical path

Abstract

The invention relates to a device and a method for detecting tiny angle change of a device in an integrated optical path. The detection device comprises a detection optical system, a reference surface and a surface to be detected, the reference surface is a first reflecting surface which is arranged on a to-be-measured integrated optical path and has a set angle; the to-be-measured surface is a second reflecting surface mounted at the top of each to-be-measured optical device of the to-be-measured integrated optical path; after the detection optical system emits laser to the first reflecting surface and the second reflecting surfaces, the relative position of the laser returned after being reflected by the first reflecting surface and each second reflecting surface is detected, and the angle change of the to-be-detected optical device corresponding to the second reflecting surface is judged based on the relative position; the problem of diagnosis and positioning of optical axis deviation in a traditional integrated optical path is solved.

Description

Technical Field

[0001] The present invention relates to the field of precision lasers, and in particular to a device and method for detecting minute angle changes of devices in an integrated optical path. Background Art

[0002] In many fields, it is necessary to build complex and precise optical path systems, such as optical interferometers and spectrometers. In order to reduce the volume of the optical path and enhance the stability and robustness of the optical path, the optical components can be fixed on a unified optical substrate by bonding, welding, and bonding. We call this a quasi-monolithic precision integrated optical path. This precision integrated optical path is of great significance to the miniaturization and engineering of complex and precise laser systems.

[0003] For example, in the measurement of gravity, rotation, gravity gradient, etc., people can use cold atoms as operating materials to achieve measurement accuracy that exceeds traditional methods. However, its large and complex precision laser system restricts the widespread application of atomic interferometry in outdoor environments. At present, there are generally two solutions. One is to use fiber optic optical paths instead of free-space optical paths. This solution has high environmental adaptability, but it relies on fiber optic devices and frequency doubling technology in the communication band, and the conversion efficiency is generally not high. The other solution is to miniaturize and integrate the free-space optical path. This solution has high conversion efficiency, more wavelength selection, and is easier to miniaturize. Many research units have proposed many miniaturized precision integrated free-space optical path solutions, among which the precision integrated optical path based on optical bonding has high assembly accuracy and efficiency, and its application in the aerospace field has proved its reliability.

[0004] In a precision integrated free-space optical path, when the environment or internal stress changes, the posture of some optical components in the optical path may change slightly, resulting in a slight deviation of the optical axis, which may further lead to problems such as reduced coupling efficiency or reduced output power. There is currently a lack of effective means to diagnose the cause of such a slight optical axis deviation, and it is difficult to identify which component's posture change caused the optical axis deviation. Summary of the invention

[0005] The present invention aims at the technical problems existing in the prior art and provides a device and method for detecting small angle changes of devices in an integrated optical circuit, so as to solve the problem of diagnosing and positioning the optical axis deviation in the traditional integrated optical circuit.

[0006] According to a first aspect of the present invention, there is provided a device for detecting small angle changes of a device in an integrated optical path, comprising: a detection optical system, a reference surface and a surface to be measured; The reference plane is a first reflection plane with a set angle installed on the integrated optical path to be measured; The surface to be tested is a second reflective surface installed on the top of each optical device to be tested in the integrated optical circuit to be tested; After the detection optical system emits laser light to the first reflection surface and the second reflection surface, the relative position of the laser light returned after being reflected by the first reflection surface and each second reflection surface is detected, and the angle change of the optical device to be measured corresponding to the second reflection surface is determined based on the relative position.

[0007] Based on the above technical solution, the present invention can also make the following improvements.

[0008] Optionally, the detection optical system includes: an autocollimator, a beam splitter and a reflector; The light beam emitted by the autocollimator is divided into two beams after passing through the beam splitter, one beam is output to the first reflection surface after being reflected by the reflector, and the other beam is input to the second reflection surface; The autocollimator collects the relative positions of the returned light spots after being reflected by the first reflecting surface and the second reflecting surface, and determines the angle change of the optical device to be measured corresponding to the second reflecting surface based on the relative positions.

[0009] Optionally, the detection optical system comprises: a first autocollimator and a second autocollimator arranged in parallel; The first autocollimator emits laser light to the first reflective surface, and adjusts the angle of the integrated optical circuit to be measured so that the first reflective surface is perpendicular to the optical axis of the first autocollimator; The second autocollimator emits laser to the second reflective surface and receives a returned light spot, and determines the angle change of the optical device to be measured corresponding to the second reflective surface based on the distance between the light spot and the center of the graticule of the second autocollimator.

[0010] Optionally, the detection optical system includes: a laser light source, a spectroscope, a reflector and a CCD; The light beam emitted by the laser light source is split into two beams after passing through the beam splitter, one beam is reflected by the reflector and then output to the first reflective surface, and the other beam is input to the second reflective surface; The CCD collects the relative positions of the returning light spots after being reflected by the first reflecting surface and the second reflecting surface, and determines the angle change of the optical device to be measured corresponding to the second reflecting surface based on the relative positions.

[0011] Optionally, the detection optical system includes: a first laser light source, a second laser light source, a beam splitter prism and a CCD; The optical axes of the first laser light source and the second laser light source are parallel; The light beams emitted by the first laser light source and the second laser light source enter the first reflecting surface and the second reflecting surface respectively after passing through the transmission surface of the beam splitter prism, and the light beams reflected by the first reflecting surface and the second reflecting surface are reflected by the reflecting surface of the beam splitter prism and enter the CCD; The angle change of the optical device to be measured corresponding to the second reflection surface is determined based on the relative position of the two light spots collected by the CCD.

[0012] Optionally, the detection optical system includes: a first laser light source, a second laser light source, a first 1 / 2 wave plate, a second 1 / 2 wave plate, a third 1 / 2 wave plate, a first beam splitter, a second beam splitter, a third beam splitter, a 1 / 4 wave plate, a polarization beam splitter prism, a four-point detector and a photodiode; The first laser light source and the second laser light source are single-frequency light sources with a frequency difference of a set value; The light beam emitted by the first laser light source passes through the first 1 / 2 wave plate and is then divided into a reference beam and a measurement beam by the first beam splitter. The reference beam and the measurement beam are reflected by the reflection surface of the third beam splitter, emitted through the reflection surface of the polarization beam splitter prism, and then respectively incident on the first reflection surface and the second reflection surface after passing through the 1 / 4 wave plate. The light beam emitted by the second laser light source passes through the second 1 / 2 wave plate and is then divided into a reference beam and a measurement beam by the second beam splitter. The reference beam and the measurement beam pass through the third 1 / 2 wave plate, are emitted through the reflection surface of the polarization beam splitter prism, and then pass through the 1 / 4 wave plate and are respectively emitted into the first reflection surface and the second reflection surface; The reference beam and the measuring beam reflected by the first reflecting surface and the second reflecting surface pass through the transmission surface of the polarization beam splitter prism, and then pass through the beam splitting surface of the third beam splitter to enter the reflection and enter the four-division detector and the photodiode respectively. The four-division detector and the photodiode respectively detect the interference signals of the reference beam and the measuring beam to obtain the absolute tilt angles of the first reflecting surface and the second reflecting surface.

[0013] Optionally, the detection optical system further includes: a double optical wedge; the laser light returning after being reflected by the first reflection surface and each second reflection surface first passes through the double optical wedge to reduce the angle.

[0014] Optionally, all optical devices on the integrated optical path to be tested, the reference plane and the detection plane are mounted on an optical path substrate; the optical path substrate is made of metal or glass.

[0015] Optionally, the reference plane is a reference reflector or an optical flat crystal mounted on the optical path substrate, or the reference plane is formed by polishing and coating on the optical path substrate.

[0016] According to a second aspect of the present invention, there is provided a system for detecting small angle changes of devices in an integrated optical circuit, comprising: installing a first reflecting surface as a reference surface at a set angle on the integrated optical circuit to be tested; The second reflective surface installed on the top of each optical device to be tested in the integrated optical circuit to be tested serves as the second reflective surface to be tested; After emitting laser light to the first reflecting surface and the second reflecting surface, the relative position of the laser light returned after being reflected by the first reflecting surface and each second reflecting surface is detected, and the angle change of the optical device to be measured corresponding to the second reflecting surface is determined based on the relative position.

[0017] The present invention provides a device and method for detecting minute angle changes of devices in an integrated optical path. By comparing the angle between the detection surface of the optical element and the reference surface, the specific optical device that causes the optical axis deviation can be effectively identified for minute angle detection. The method has high precision and reliability, solves the problem of diagnosing and positioning the optical axis deviation in traditional integrated optical paths, and provides a feasible solution for further promoting the miniaturization of optical elements and their application in outdoor environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure of a device for detecting small angle changes of a device in an integrated optical circuit provided by the present invention; Figure 2 A schematic diagram of the structure of a first embodiment of a device for detecting minute angle changes of a device in an integrated optical circuit provided by the present invention; Figure 3 A schematic diagram of the structure of a second embodiment of a device for detecting minute angle changes of a device in an integrated optical circuit provided by the present invention; Figure 4 A schematic diagram of the structure of a third embodiment of a device for detecting minute angle changes of a device in an integrated optical circuit provided by the present invention; Figure 5 A schematic structural diagram of a fourth embodiment of a device for detecting minute angle changes of a device in an integrated optical circuit provided by the present invention; Figure 6 This is a schematic structural diagram of a fifth embodiment of a device for detecting minute angle changes of devices in an integrated optical circuit provided by the present invention. DETAILED DESCRIPTION

[0019] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0020] In some precision monolithic integrated optical paths, optical devices are usually fixed to the optical path substrate by means of bonding, chemical bonding, laser welding, etc. As the environment and stress change, the angle of the device may undergo some irreversible slight changes, causing the optical axis to deviate. However, since the angle change of the device may be very small, only at the micro-arc level, it is impossible to determine which specific devices are affected.

[0021] With the development of high-precision measurement technologies such as optical interferometers and atomic interferometers, the importance of integrated optical path systems has become increasingly prominent. However, when it comes to engineering applications, the optical axis of the integrated optical path may undergo irreversible slight deviations as the environment and stress change. The present invention provides a detection device for slight angle changes of devices in an integrated optical path. Figure 1 A schematic diagram of the structure of a device for detecting small angle changes of a device in an integrated optical circuit provided by the present invention is shown in FIG. Figure 1 As shown, the detection device comprises: a detection optical system, a reference surface and a surface to be detected; The reference plane is a first reflection plane with a set angle installed on the integrated optical path to be measured; In a specific implementation, the angle of the reference plane may be coincident with or parallel to the installation plane of the optical element.

[0022] The surface to be tested is a second reflective surface installed on the top of each optical device to be tested in the integrated optical circuit to be tested; After the detection optical system emits laser light to the first reflection surface and the second reflection surface, the relative position of the laser light returned after being reflected by the first reflection surface and each second reflection surface is detected, and the angle change of the optical device to be measured corresponding to the second reflection surface is determined based on the relative position.

[0023] In a specific implementation, the detection optical system may be an instrument for precisely measuring angles, such as an autocollimator, an internal focusing telescope, etc., or may be a specially designed optical system for angle detection.

[0024] The laser light source is a fiber collimator or a laser, which is used to provide the laser light source required by the integrated optical path module. The optical elements in the detection optical system include a reflector, a lens or a detector, and a circuit board. The reflector can be a right-angle prism outer reflector, a right-angle prism inner reflector, etc.

[0025] The couplers in the detection optical system include fiber couplers with precise optical axis alignment requirements, laser modulators, frequency doubling crystals and laser amplifiers.

[0026] In a possible embodiment, all devices on the integrated optical circuit to be tested, the reference plane and the detection plane are mounted on an optical circuit substrate; the optical circuit substrate is made of metal or glass.

[0027] In a specific implementation, each optical device is fixed on a unified optical path substrate mainly by means of adhesion, bonding, welding, etc., and the number of optical devices that affect the optical axis is greater than 2, and the installation surface of the affected optical devices to be tested is inspected.

[0028] In a possible embodiment, the reference surface is a reference reflector or an optical flat crystal mounted on the optical path substrate, or the reference surface is formed by polishing and coating on the optical path substrate.

[0029] In a possible embodiment, the detection optical system further includes: a double optical wedge; the laser light returning after being reflected by the first reflection surface and each second reflection surface first passes through the double optical wedge to reduce the angle.

[0030] When the angle between the surface to be measured and the reference surface differs greatly and exceeds the detection range of the detection optical system, a double optical wedge can be used to fine-tune the light beam returned from the surface to be measured so that the angle of the two beams of light is reduced by a fixed value. Since the purpose of this patent is to detect the angle change of the optical device, the optical wedge has little effect on the detection accuracy, but can significantly improve its detection angle range.

[0031] By detecting and recording the angle of the detection surface of each optical element relative to the reference plane, the relative angles of the detection surfaces of the optical elements and the reference plane are detected again one by one when the optical axis deviates, and the two detection results are compared to determine the optical device that causes the optical axis deviation.

[0032] The present invention provides a device for detecting minute angle changes of components in an integrated optical circuit, which solves the problem of diagnosing and positioning the optical axis deviation in a traditional integrated optical circuit.

[0033] In a specific implementation, a single autocollimator and an auxiliary optical system can be used to measure the relative angle between the component to be measured and the detection reference plane; two autocollimators can also be used to detect the relative angle between the component to be measured and the detection reference plane. First, the cross image returned by one of the autocollimators relative to the detection reference plane is made to coincide with the center, and then the two autocollimators simultaneously detect an optical flat crystal, so that the cross images of the optical flat crystal relative to the two autocollimators coincide with the center. At this time, the optical axes of the two autocollimators are parallel, and the other autocollimator detects the component to be measured. The distance between the cross image returned by the other autocollimator and the center can reflect the relative angle between the component to be measured and the detection reference plane.

[0034] Example 1 Embodiment 1 provided by the present invention is Embodiment 1 of a detection device for small angle changes of a device in an integrated optical circuit provided by the present invention, such as Figure 2 A schematic diagram of the structure of a first embodiment of a device for detecting small angle changes of a device in an integrated optical circuit provided by the present invention, combined with Figure 2It can be seen that the first embodiment of the detection device includes: an autocollimator, a beam splitter BS and a reflector; The light beam emitted by the autocollimator is divided into two beams after passing through the beam splitter, one beam is output to the first reflection surface after being reflected by the reflector, and the other beam is input to the second reflection surface; The autocollimator collects the relative positions of the returned light spots after being reflected by the first reflecting surface and the second reflecting surface, and determines the angle change of the optical device to be measured corresponding to the second reflecting surface based on the relative positions.

[0035] In the specific implementation, the light beam emitted by the autocollimator is divided into two beams by BS. One beam passes through a reflector and hits the reference plane, so that the beam returns along the original path. The returned beam coincides with the center of the autocollimator graticule. The other beam hits the surface to be tested. The distance between the returned beam and the center of the graticule is proportional to the angle between the two planes. The distance is recorded and repeated with the same experimental settings at the next test. If the angle between the two planes changes, it can be inferred from the relative position of the light spot of the autocollimator.

[0036] Example 2 Embodiment 2 provided by the present invention is a second embodiment of a detection device for small angle changes of a device in an integrated optical circuit provided by the present invention, such as Figure 3 This is a structural diagram of a second embodiment of a device for detecting small angle changes of a device in an integrated optical circuit provided by the present invention, combined with Figure 3 It can be seen that the second embodiment of the detection device includes: a first autocollimator and a second autocollimator arranged in parallel; The first autocollimator emits laser light to the first reflective surface, and adjusts the angle of the integrated optical circuit to be measured so that the first reflective surface is perpendicular to the optical axis of the first autocollimator; The second autocollimator emits laser to the second reflective surface and receives a returned light spot, and determines the angle change of the optical device to be measured corresponding to the second reflective surface based on the distance between the light spot and the center of the graticule of the second autocollimator.

[0037] In a specific implementation, the light beams of the two autocollimators are first made perpendicular to the same reference plane (which can be an optical flat crystal), and then the reference plane and the surface to be measured are measured using the two autocollimators respectively. The angle of the optical path is adjusted so that the reference plane is perpendicular to the optical axis of autocollimator 1. At this time, the second autocollimator is used to detect the angle of the surface to be measured. Since the optical axes of the two autocollimators have been adjusted to be parallel, the angle between the light spot returned by the surface to be measured and the center of the graticule can be used to infer the angle between the light spot and the reference plane.

[0038] Example 3 Embodiment 3 provided by the present invention is a third embodiment of a detection device for small angle changes of a device in an integrated optical circuit provided by the present invention, such as Figure 4 This is a schematic diagram of the structure of a third embodiment of a device for detecting small angle changes of a device in an integrated optical circuit provided by the present invention, combined with Figure 4 It can be seen that the third embodiment of the detection device includes: a laser light source, a beam splitter BS, a reflector and a CCD (Charge-coupled Device).

[0039] The light beam emitted by the laser light source is split into two beams after passing through the beam splitter, one beam is reflected by the reflector and then output to the first reflective surface, and the other beam is input to the second reflective surface; The CCD collects the relative positions of the returning light spots after being reflected by the first reflecting surface and the second reflecting surface, and determines the angle change of the optical device to be measured corresponding to the second reflecting surface based on the relative positions.

[0040] In a specific implementation, the laser light source can adopt an ultra-stable helium-neon laser. The two beams of light emitted by the laser light source hit the reference plane and the surface to be measured respectively. The reflected light beams are received on the CCD. The spot distance on the CCD is proportional to the plane angle, so the angle change can be inferred.

[0041] Example 4 Embodiment 4 provided by the present invention is a fourth embodiment of a detection device for small angle changes of a device in an integrated optical circuit provided by the present invention, such as Figure 5 This is a schematic diagram of the structure of a fourth embodiment of a device for detecting small angle changes of a device in an integrated optical circuit provided by the present invention, combined with Figure 5 It can be seen that the fourth embodiment of the detection device includes: a first laser light source, a second laser light source, a beam splitter prism and a CCD; The optical axes of the first laser light source and the second laser light source are parallel; The light beams emitted by the first laser light source and the second laser light source enter the first reflecting surface and the second reflecting surface respectively after passing through the transmission surface of the beam splitter prism, and the light beams reflected by the first reflecting surface and the second reflecting surface are reflected by the reflecting surface of the beam splitter prism and enter the CCD; The angle change of the optical device to be measured corresponding to the second reflection surface is determined based on the relative position of the two light spots collected by the CCD.

[0042] In a specific implementation, the laser light source can be an ultra-stable helium-neon laser. The optical axes of the two lasers are adjusted to be parallel. The two laser beams are incident on the reference plane and the surface to be measured respectively. The reflected light is received and observed by CCD. The relative angle between the two planes can be calculated based on the position change of the light spot on the CCD.

[0043] Example 5 Embodiment 5 provided by the present invention is a fifth embodiment of a detection device for small angle changes of a device in an integrated optical path provided by the present invention. The differential wavefront sensing (DWS) technology can be used to measure the absolute angle between the surface to be measured and the reference surface. Figure 6 This is a structural diagram of a fifth embodiment of a device for detecting small angle changes of a device in an integrated optical circuit provided by the present invention, combined with Figure 6 It can be seen that embodiment five of the detection device includes: a first laser light source, a second laser light source, a first 1 / 2 wave plate, a second 1 / 2 wave plate, a third 1 / 2 wave plate, a first beam splitter, a second beam splitter, a third beam splitter, a 1 / 4 wave plate, a polarization beam splitter prism, a four-point detector and a photodiode.

[0044] The first laser light source and the second laser light source are single-frequency light sources with a frequency difference of a set value; The light beam emitted by the first laser light source passes through the first 1 / 2 wave plate and is then divided into a reference beam and a measurement beam by the first beam splitter. The reference beam and the measurement beam are reflected by the reflection surface of the third beam splitter, emitted through the reflection surface of the polarization beam splitter prism, and then respectively incident on the first reflection surface and the second reflection surface after passing through the 1 / 4 wave plate. The light beam emitted by the second laser light source passes through the second 1 / 2 wave plate and is then divided into a reference beam and a measurement beam by the second beam splitter. The reference beam and the measurement beam pass through the third 1 / 2 wave plate, are emitted through the reflection surface of the polarization beam splitter prism, and then pass through the 1 / 4 wave plate and are respectively emitted into the first reflection surface and the second reflection surface; The reference beam and the measuring beam reflected by the first reflecting surface and the second reflecting surface pass through the transmission surface of the polarization beam splitter prism, and then pass through the beam splitting surface of the third beam splitter to enter the reflection and enter the four-division detector and the photodiode respectively. The four-division detector and the photodiode respectively detect the interference signals of the reference beam and the measuring beam to obtain the absolute tilt angles of the first reflecting surface and the second reflecting surface.

[0045] In the specific implementation, the influence of the test bench installation position error is minimized. Two parallel input beams pass through a 50:50 beam splitter, one beam is reflected on the mirror in the middle of the test bench, and the other beam is reflected on the mirror on the left or right side. After the two reflected beams pass through the beam splitter again, the distance difference Δ between the two reflection points can be measured. Based on this distance difference and the optical path length, the absolute tilt angle α between the two mirrors can be calculated. This setup has a measurement range of more than 10 milliradians and a measurement uncertainty of less than 30 microradians.

[0046] The first laser light source and the second laser light source can be single-frequency light sources with a frequency difference of 100MHz. The beam splitter (BS) and the polarization beam splitter (PBS) are used to split the laser beam into a reference beam and a measurement beam. The wave plate is used to adjust the polarization state of the beam. The photodiode (PD) and the quad detector (QPD) are used to detect the interference signal of the reference beam and the measurement beam. This optical path design can achieve high-precision measurement of the displacement and tilt angle of the mirror on the test bench. The interference signal of the reference beam and the measurement beam can provide information on the relative displacement of the mirror, while the differential signal of the quad detector can reflect the change in the tilt angle of the mirror. The interferometer system can measure sub-nanometer displacement and sub-nanoradian tilt angle. This method has high measurement accuracy, but the measurement range is small. A double wedge can be added to the optical path to be measured to make the beams reflected by the two planes close to parallel. Since the purpose of this patent is to measure the angle change, the fixed wedge does not affect the measurement accuracy.

[0047] Example 6 Embodiment 6 provided by the present invention is an embodiment of a method for detecting small angle changes of a device in an integrated optical circuit provided by the present invention. The embodiment of the detection method includes: A first reflecting surface as a reference surface with a set angle is installed on the integrated optical path to be tested; The second reflective surface installed on the top of each optical device to be tested in the integrated optical circuit to be tested serves as the second reflective surface to be tested; After emitting laser light to the first reflecting surface and the second reflecting surface, the relative position of the laser light returned after being reflected by the first reflecting surface and each second reflecting surface is detected, and the angle change of the optical device to be measured corresponding to the second reflecting surface is determined based on the relative position.

[0048] After the optical path is installed and adjusted, the relative angles between the optical components and the reference surface are detected and recorded one by one in the order of the optical path. When the optical axis error may occur in the optical path and the specific error position needs to be confirmed, the detection device is used again to detect the relative angles between the components and the reference in turn. By comparing the results of the two measurements, it is possible to analyze the components that may have angle changes, thereby further analyzing the reasons for the angle changes and improving the optical path design and installation process.

[0049] It can be understood that the method for detecting tiny angle changes of devices in an integrated optical circuit provided by the present invention corresponds to the device for detecting tiny angle changes of devices in an integrated optical circuit provided by the aforementioned embodiments, and the relevant technical features of the method for detecting tiny angle changes of devices in an integrated optical circuit can refer to the relevant technical features of the device for detecting tiny angle changes of devices in an integrated optical circuit, which will not be repeated here.

[0050] An embodiment of the present invention provides a device and method for detecting small angle changes of devices in an integrated optical circuit. By comparing the angle between the detection surface of the optical element and the reference surface, the specific optical device that causes the optical axis deviation can be effectively identified for small angle detection. It has high precision and reliability, solves the problem of diagnosing and positioning the optical axis deviation in traditional integrated optical circuits, and provides a feasible solution for further promoting the miniaturization of optical elements and their application in outdoor environments.

[0051] It should be noted that in the above embodiments, the description of each embodiment has its own emphasis, and for parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0052] It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as methods, systems, or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Furthermore, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0053] The present invention is described with reference to flowcharts and / or block diagrams of methods, devices (systems), and computer program products according to embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded computer, or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0054] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0055] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0056] Although the preferred embodiments of the present invention have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0057] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A device for detecting small angle changes of devices in an integrated optical path, characterized in that: The detection device comprises: a detection optical system, a reference surface and a surface to be detected; The reference plane is a first reflection plane with a set angle installed on the integrated optical path to be measured; The surface to be tested is a second reflective surface installed on the top of each optical device to be tested in the integrated optical circuit to be tested; After the detection optical system emits laser light to the first reflection surface and the second reflection surface, the relative position of the laser light returned after being reflected by the first reflection surface and each second reflection surface is detected, and the angle change of the optical device to be measured corresponding to the second reflection surface is determined based on the relative position.

2. The detection device according to claim 1, characterized in that: The detection optical system comprises: an autocollimator, a beam splitter and a reflector; The light beam emitted by the autocollimator is divided into two beams after passing through the beam splitter, one beam is output to the first reflection surface after being reflected by the reflector, and the other beam is input to the second reflection surface; The autocollimator collects the relative positions of the returned light spots after being reflected by the first reflecting surface and the second reflecting surface, and determines the angle change of the optical device to be measured corresponding to the second reflecting surface based on the relative positions.

3. The detection device according to claim 1, characterized in that: The detection optical system comprises: a first autocollimator and a second autocollimator arranged in parallel; The first autocollimator emits laser light to the first reflective surface, and adjusts the angle of the integrated optical circuit to be measured so that the first reflective surface is perpendicular to the optical axis of the first autocollimator; The second autocollimator emits laser to the second reflective surface and receives a returned light spot, and determines the angle change of the optical device to be measured corresponding to the second reflective surface based on the distance between the light spot and the center of the graticule of the second autocollimator.

4. The detection device according to claim 1, characterized in that: The detection optical system includes: a laser light source, a spectroscope, a reflector and a CCD; The light beam emitted by the laser light source is split into two beams after passing through the beam splitter, one beam is reflected by the reflector and then output to the first reflective surface, and the other beam is input to the second reflective surface; The CCD collects the relative positions of the returning light spots after being reflected by the first reflecting surface and the second reflecting surface, and determines the angle change of the optical device to be measured corresponding to the second reflecting surface based on the relative positions.

5. The detection device according to claim 1, characterized in that: The detection optical system comprises: a first laser light source, a second laser light source, a beam splitter prism and a CCD; The optical axes of the first laser light source and the second laser light source are parallel; The light beams emitted by the first laser light source and the second laser light source enter the first reflecting surface and the second reflecting surface respectively after passing through the transmission surface of the beam splitter prism, and the light beams reflected by the first reflecting surface and the second reflecting surface are reflected by the reflecting surface of the beam splitter prism and enter the CCD; The angle change of the optical device to be measured corresponding to the second reflection surface is determined based on the relative position of the two light spots collected by the CCD.

6. The detection device according to claim 1, characterized in that: The detection optical system comprises: a first laser light source, a second laser light source, a first 1 / 2 wave plate, a second 1 / 2 wave plate, a third 1 / 2 wave plate, a first beam splitter, a second beam splitter, a third beam splitter, a 1 / 4 wave plate, a polarization beam splitter prism, a four-division detector and a photodiode; The first laser light source and the second laser light source are single-frequency light sources with a frequency difference of a set value; The light beam emitted by the first laser light source passes through the first 1 / 2 wave plate and is then divided into a reference beam and a measurement beam by the first beam splitter. The reference beam and the measurement beam are reflected by the reflection surface of the third beam splitter, emitted through the reflection surface of the polarization beam splitter prism, and then respectively incident on the first reflection surface and the second reflection surface after passing through the 1 / 4 wave plate. The light beam emitted by the second laser light source passes through the second 1 / 2 wave plate and is then divided into a reference beam and a measurement beam by the second beam splitter. The reference beam and the measurement beam pass through the third 1 / 2 wave plate, are emitted through the reflection surface of the polarization beam splitter prism, and then pass through the 1 / 4 wave plate and are respectively emitted into the first reflection surface and the second reflection surface; The reference beam and the measuring beam reflected by the first reflecting surface and the second reflecting surface pass through the transmission surface of the polarization beam splitter prism, and then pass through the beam splitting surface of the third beam splitter to enter the reflected beam and enter the four-division detector and the photodiode respectively. The four-division detector and the photodiode respectively detect the interference signals of the reference beam and the measuring beam to obtain the absolute tilt angles of the first reflecting surface and the second reflecting surface.

7. The detection device according to claim 1, characterized in that: The detection optical system further comprises: a double optical wedge; the laser light returning after being reflected by the first reflection surface and each second reflection surface first passes through the double optical wedge to reduce the angle.

8. The detection device according to claim 1, characterized in that: All optical devices on the integrated optical path to be tested, the reference surface and the detection surface are installed on an optical path substrate; the optical path substrate is made of metal or glass.

9. The detection device according to claim 8, characterized in that: The reference surface is a reference reflector or an optical flat crystal mounted on the optical path substrate, or the reference surface is formed by polishing and coating on the optical path substrate; The reference plane coincides with or is parallel to the mounting plane of the optical device to be measured.

10. A method for detecting small angle changes of a device in an integrated optical circuit, characterized in that: The detection method comprises: A first reflecting surface as a reference surface with a set angle is installed on the integrated optical path to be tested; The second reflective surface installed on the top of each optical device to be tested in the integrated optical circuit to be tested serves as the second reflective surface to be tested; After emitting laser light to the first reflecting surface and the second reflecting surface, the relative position of the laser light returned after being reflected by the first reflecting surface and each second reflecting surface is detected, and the angle change of the optical device to be measured corresponding to the second reflecting surface is determined based on the relative position.

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