Multi-element terahertz information detection method and device

Abstract

The invention discloses a multi-element terahertz information detection method and device. Two groups of spatial intensity distribution information are obtained by utilizing a terahertz detector which is a preset distance away from a terahertz light source, wherein one group is spatial intensity distribution of directly collected terahertz light to be detected, and the other group is spatial intensity distribution of the terahertz light after being regulated and controlled by a microstructure array with different phase regulation and control characteristics. And through a pre-trained neural network, reconstructing according to the two groups of spatial intensity distribution information to obtain phase information, spectral information and polarization information of the terahertz light to be detected. According to the invention, through phase regulation and control of the microstructure array and information reconstruction of the neural network, simultaneous detection of multi-dimensional information is realized, and complex optical system design is avoided; the double neural networks are adopted to reconstruct different physical mechanisms, so that the detection precision is improved; a millisecond-level rapid detection capability is possessed and practical application demands are satisfied; the system is simple in structure and easy to implement, and has good expansibility.

Description

Technical Field

[0001] The present disclosure relates to the field of spectral detection, and in particular to a multi-element terahertz information detection method and device. Background Art

[0002] In the context of today's rapid technological development, research in the terahertz band has become the forefront of wireless communications, material detection, biomedicine, security inspection and other fields. Terahertz waves refer to electromagnetic waves with a frequency between 0.1-10THz, which is between microwaves and infrared rays. Due to its unique ability to penetrate non-conductive materials, low radiation and high sensitivity to the fingerprint characteristics of chemical substances, it shows great application potential.

[0003] At present, terahertz waves have made important progress in applied research. However, there are still many challenges and limitations in the detection and analysis technology of terahertz waves. These challenges include low efficiency in data acquisition and processing, and insufficient acquisition of multivariate information such as space, phase, spectrum and polarization in complex scenes, which greatly restricts the development of terahertz technology in practical applications.

[0004] With the deepening of terahertz detection technology research, the demand for terahertz detection devices that can achieve high-performance and multi-information detection is increasing. Therefore, how to achieve efficient detection of multi-information such as terahertz wave phase, spectrum, polarization, etc. has become a technical problem that needs to be solved urgently. Summary of the invention

[0005] The present disclosure proposes a multi-element terahertz information detection scheme. By setting a microstructure array with different phase control characteristics in the terahertz detection optical path and combining it with deep learning prediction, it is possible to simultaneously obtain multi-dimensional information such as the phase, spectrum and polarization of the terahertz light to be measured, thereby achieving fast and efficient multi-element information detection.

[0006] According to one embodiment of the present disclosure, a multi-element terahertz information detection method is proposed, comprising the following:

[0007] Providing the terahertz light to be measured through a terahertz light source;

[0008] Using a terahertz detector that is a predetermined distance away from the terahertz light source to collect first spatial intensity distribution information of the terahertz light to be measured;

[0009] The control device is arranged between the terahertz light source and the terahertz detector, wherein the control device comprises a plurality of microstructure arrays, wherein different microstructure arrays are designed to have different phase control characteristics, and the terahertz detector is used to collect second spatial intensity distribution information of the terahertz light to be measured after phase control;

[0010] The phase information, spectrum information and polarization information of the terahertz light to be measured are reconstructed according to the first spatial intensity distribution information and the second spatial intensity distribution information by using a pre-trained neural network.

[0011] In some possible implementations, the plurality of microstructure arrays completely cover the irradiation area of ​​the control device by the terahertz light to be measured.

[0012] In some possible implementations, the control device includes MXM microstructure arrays, and the terahertz detector has corresponding MXM detection areas, and the detection areas correspond one-to-one to the microstructure arrays.

[0013] In some possible implementations, the method further includes controlling the position of the regulating device by a switching device, the switching device including a first gear and a second gear, wherein:

[0014] When the switching device is set to the first gear position, the regulating device is controlled to cut out the optical path of the terahertz light to be measured;

[0015] When the switching device is set to the second gear, the regulating device is controlled to cut into the optical path of the terahertz light to be measured between the terahertz light source and the terahertz detector, so that the regulating device performs phase regulation on the terahertz light to be measured.

[0016] In some possible implementations, a pre-trained neural network is used to reconstruct the phase information, spectrum information, and polarization information of the terahertz light to be measured based on the first spatial intensity distribution information and the second spatial intensity distribution information, including:

[0017] Reconstructing the phase information of the terahertz light to be measured according to the first spatial intensity distribution information using a pre-trained phase reconstruction network;

[0018] The spectrum information and polarization information of the terahertz light to be measured are reconstructed according to the second spatial intensity distribution information using a pre-trained spectrum polarization reconstruction network.

[0019] In some possible implementations, the training process of the phase reconstruction network includes:

[0020] Obtain a training set containing multiple samples;

[0021] Using a terahertz time-domain spectroscopy system to measure initial phase distribution information of terahertz light provided by each sample, and using the terahertz detector to obtain spatial intensity distribution information at a predetermined distance from the sample;

[0022] The phase reconstruction network is trained based on the measured initial phase distribution information corresponding to each sample and the spatial intensity distribution information at a predetermined distance from the sample.

[0023] In some possible implementations, the training process of the spectral polarization reconstruction network includes:

[0024] Obtain a training set containing multiple samples, and the polarization information P of each sample in the X direction is known xn and the polarization information P in the Y direction yn , n is the sample number;

[0025] The transmission spectrum f of each sample was measured using a terahertz time-domain spectroscopy system. n The sample is illuminated by a broadband terahertz light source with a spectrum of S0. n =S0*f n Get the spectrum S of the terahertz light provided by the sample n ;

[0026] The control device is arranged between the sample and the terahertz detector, and the terahertz detector is used to obtain the spatial intensity distribution information of the terahertz light after phase control. mn , where m is the number of the microstructure array and n is the sample number;

[0027] Based on the acquired spatial intensity distribution information I mn and the corresponding sample polarization information P xn , P yn and spectrum S n , train the spectral polarization reconstruction network.

[0028] In some possible implementations, the substrate of each of the microstructure arrays is made of a material with high terahertz transmittance, and the array disposed on the substrate is a metal structure.

[0029] According to one embodiment of the present disclosure, a multi-element terahertz information detection device is proposed, including a terahertz detector, a control device, a switching device and a data processing module, wherein:

[0030] The terahertz detector is arranged at a predetermined distance from a terahertz light source, and the terahertz light source is used to provide terahertz light to be measured;

[0031] The control device comprises a plurality of microstructure arrays, and different microstructure arrays are designed to have different phase control characteristics;

[0032] The switching device comprises a first gear and a second gear. When the switching device is set to the first gear, the regulating device is controlled to cut out the optical path of the terahertz light to be measured. When the switching device is set to the second gear, the regulating device is controlled to cut into the optical path of the terahertz light to be measured between the terahertz light source and the terahertz detector, so as to perform phase regulation on the terahertz light to be measured.

[0033] The data processing module is used to use a pre-trained neural network to reconstruct the phase information, spectrum information and polarization information of the terahertz light to be measured based on the spatial intensity distribution information respectively collected by the terahertz detector when the control device cuts into and out of the light path.

[0034] In some possible implementations, the plurality of microstructure arrays completely cover the irradiation area of ​​the control device by the terahertz light to be measured.

[0035] In some possible implementations, the control device includes M×M microstructure arrays, and the terahertz detector has corresponding M×M detection areas, and the detection areas correspond one-to-one to the microstructure arrays.

[0036] In some possible implementations, the data processing module includes:

[0037] A phase reconstruction network, used to reconstruct the phase information of the terahertz light to be measured according to the spatial intensity distribution information collected by the terahertz detector when the control device cuts out the light path;

[0038] The spectral polarization reconstruction network is used to reconstruct the spectral information and polarization information of the terahertz light to be measured according to the spatial intensity distribution information collected by the terahertz detector when the control device cuts into the optical path.

[0039] In some possible implementations, the substrate of the microstructure array is made of a material with high terahertz transmittance, and the array on the substrate is a metal structure.

[0040] The multivariate terahertz information detection technology proposed in this scheme can make full use of the spatial intensity distribution information obtained by the terahertz detector, and realize the effective reconstruction of the multi-dimensional information of the terahertz light to be measured through a pre-trained neural network. Among them, the phase reconstruction network can be used to obtain phase information from the spatial intensity distribution information, which makes up for the deficiency of the traditional method that it is difficult to measure phase and intensity at the same time; and through the spectrum polarization reconstruction network, combined with the regulation of the terahertz light by the microstructure array, the spectrum and polarization information can be parsed from the spatial intensity distribution. This information reconstruction method based on neural networks avoids the complex optical system design and significantly simplifies the measurement device. At the same time, due to the fast calculation characteristics of neural networks, this scheme can achieve millisecond-level rapid detection, meeting the requirements for detection efficiency in practical applications. In addition, this scheme adopts an open architecture design, which supports the introduction of new microstructure designs and more advanced deep learning models in the future, and has good scalability. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the specification and, together with the description, serve to explain the principles of the specification.

[0042] Figure 1 A flowchart of a terahertz spectroscopy information detection method according to an embodiment of the present disclosure is shown.

[0043] Figure 2 Several microstructure arrays according to an exemplary embodiment of the present disclosure and their corresponding polarization transmission spectra in the X direction and the Y direction are shown.

[0044] Figure 3 An exemplary schematic diagram of a multi-element terahertz information detection device according to an exemplary embodiment of the present disclosure is shown.

[0045] Figure 4 A schematic diagram of the workflow of multi-element terahertz information detection according to an exemplary embodiment of the present disclosure is shown. DETAILED DESCRIPTION

[0046] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are merely examples of devices and methods consistent with some aspects of the present disclosure as detailed in the appended claims.

[0047] Figure 1 The flowchart of the multi-element terahertz information detection method according to an embodiment of the present disclosure is shown. As shown in the figure, the method includes steps 1 to 4.

[0048] Step 1: Provide terahertz light to be measured through a terahertz light source.

[0049] Here, the terahertz light source refers to the source of the terahertz light that needs to be detected for multivariate information. For example, in material detection applications, the terahertz light source can be the sample to be tested.

[0050] Step 2: using a terahertz detector that is a predetermined distance away from the terahertz light source to collect first spatial intensity distribution information of the terahertz light to be measured.

[0051] For example, the terahertz detector may include a planar array detector, which may be regarded as an image sensor, and the detection range may include multiple detection areas, such as 6×6 detection areas. The terahertz detector may obtain intensity information of each detection area on the planar array, that is, first spatial intensity distribution information.

[0052] Step 3: Set a control device between the terahertz light source and the terahertz detector, the control device includes multiple microstructure arrays, different microstructure arrays are designed to have different phase control characteristics, and use the terahertz detector to collect the second spatial intensity distribution information of the terahertz light to be measured after phase control.

[0053] In some embodiments, the plurality of microstructure arrays completely cover the irradiation area of ​​the control device by the terahertz light to be measured.

[0054] According to this implementation, it can be ensured that all spatial information of the terahertz light to be measured can be regulated and detected, thereby avoiding information loss.

[0055] In some embodiments, the control device includes MXM microstructure arrays, and the terahertz detector has corresponding MXM detection areas, and the detection areas correspond one-to-one to the microstructure arrays.

[0056] According to this embodiment, the M×M microstructure arrays of the control device correspond one-to-one to the M×M detection areas of the detector, and each microstructure array corresponds to a detection area, which can accurately record the control effect of the array on the terahertz light. The design according to this embodiment ensures that the spatial intensity distribution information after control can fully reflect all the information of the terahertz light after phase control, and provides a reliable data basis for the subsequent reconstruction of the spectrum, polarization and other information of the terahertz light to be measured. In one example, M=6.

[0057] In some embodiments, the substrate of each of the microstructure arrays is made of a material with high terahertz transmittance, and the array disposed on the substrate is a metal structure.

[0058] When the electric field direction of the incident terahertz light is parallel to the long axis of the metal array, strong coupling will occur, while when it is perpendicular to the long axis, the coupling is weak. By designing the direction arrangement of multiple arrays on the substrate, different responses to the x and y polarization components can be achieved, thereby obtaining specific polarization transmission characteristics and achieving phase regulation. The use of a substrate with high terahertz transmittance allows the terahertz light to be effectively transmitted through the material to ensure signal strength. For example, a high-resistance silicon substrate can be used. The microstructure array can be prepared by micro-nano processing technology.

[0059] Figure 2 FIG. 4 shows several microstructure arrays and their corresponding X-direction and Y-direction polarization transmission spectra according to an exemplary embodiment of the present disclosure. Figure 2 As shown, 25 metal arrays are arranged on each microstructure array, and each metal array is set to a specific direction.

[0060] In some embodiments, the position of the regulating device can be controlled by a switching device, the switching device includes a first gear and a second gear, wherein:

[0061] When the switching device is set to the first gear position, the regulating device is controlled to cut out the optical path of the terahertz light to be measured;

[0062] When the switching device is set to the second gear, the regulating device is controlled to cut into the optical path of the terahertz light to be measured between the terahertz light source and the terahertz detector, so that the regulating device performs phase regulation on the terahertz light to be measured.

[0063] According to this embodiment, the system structure is simplified, and two measurement modes can be flexibly realized. The first gear position causes the control device to cut out the optical path, thereby obtaining the first spatial intensity distribution information of the uncontrolled terahertz light to be measured transmitted to the terahertz detector; the second gear position cuts into the control device to perform phase control on the terahertz light, thereby obtaining the second spatial intensity distribution information of the phase-controlled terahertz light to be measured transmitted to the terahertz detector.

[0064] Step 4: using a pre-trained neural network, reconstruct the phase information, spectrum information and polarization information of the terahertz light to be measured according to the first spatial intensity distribution information and the second spatial intensity distribution information.

[0065] In some embodiments, a pre-trained phase reconstruction network is used to reconstruct the phase information of the terahertz light to be measured according to the first spatial intensity distribution information;

[0066] The spectrum information and polarization information of the terahertz light to be measured are reconstructed according to the second spatial intensity distribution information using a pre-trained spectrum polarization reconstruction network.

[0067] In some embodiments, the training process of the phase reconstruction network includes:

[0068] Obtain a training set containing multiple samples;

[0069] Using a terahertz time-domain spectroscopy system to measure initial phase distribution information of terahertz light provided by each sample, and using the terahertz detector to obtain spatial intensity distribution information at a predetermined distance from the sample;

[0070] The phase reconstruction network is trained based on the measured initial phase distribution information corresponding to each sample and the spatial intensity distribution information at a predetermined distance from the sample.

[0071] In some embodiments, the training process of the spectral polarization reconstruction network includes:

[0072] Obtain a training set containing multiple samples, and the polarization information P of each sample in the X direction is known xn and the polarization information P in the Y direction yn , n is the sample number;

[0073] The transmission spectrum f of each sample was measured using a terahertz time-domain spectroscopy system. n The sample is illuminated by a broadband terahertz light source with a spectrum of S0. n =S0*f n Get the spectrum S of the terahertz light provided by the sample n ;

[0074] The control device is arranged between the sample and the terahertz detector, and the terahertz detector is used to obtain the spatial intensity distribution information of the terahertz light after phase control. mn , where m is the number of the microstructure array and n is the sample number;

[0075] Based on the acquired spatial intensity distribution information I mn and the corresponding sample polarization information P xn , P yn and spectrum S n , train the spectral polarization reconstruction network.

[0076] According to the above implementation, two independently trained neural networks are used to achieve reconstruction of different information. The phase reconstruction network reconstructs the initial phase through the spatial intensity distribution of terahertz light, and its training data set contains the spatial intensity distribution information of multiple samples at a predetermined distance and the corresponding initial phase distribution information. The spectrum polarization reconstruction network reconstructs the spectrum and polarization information using the regulated spatial intensity distribution, and its training data includes the known polarization information P xn and P yn The transmission spectrum of the sample is measured n And calculate the spectrum S n , and then combine with the control device to obtain the spatial intensity distribution information I mn .

[0077] Phase reconstruction is based on the propagation characteristics of terahertz waves, while spectral polarization reconstruction is based on the regulation effect of the microstructure array. This dual neural network design is conducive to more accurate information detection and efficient reconstruction of multidimensional information. After the two neural networks are trained, they can be directly used for multivariate terahertz information reconstruction in actual measurements to achieve millisecond-level rapid detection.

[0078] Figure 3An exemplary schematic diagram of a multi-element terahertz information detection device according to an exemplary embodiment of the present disclosure is shown. As shown in the figure, the device includes a control device (3), a switching device (4), a terahertz detector (5) and a data processing module (6). The figure also shows a terahertz light to be measured (2) and a terahertz light source (1) for providing the terahertz light to be measured (2).

[0079] The terahertz light source (1) refers to the terahertz light source concerned in the present disclosure, which may refer to a light source that emits light itself, or may refer to a sample to be tested through which the terahertz light passes. The terahertz light source (1) is used to provide the terahertz light (2) to be tested.

[0080] The terahertz light to be measured (2) refers to the terahertz light emitted from the terahertz light source (1), and is the detection target of the present invention.

[0081] The control device (3) is placed behind the terahertz light source (1) in the optical path, and performs phase control on the passing terahertz light. Figure 3 The control device (3) includes 6×6 microstructure arrays, numbered m (m=1, 2, 3, ..., 36). The substrate of the array can be made of a material with high transmittance in the terahertz band, such as high-resistance silicon, etc., on which a plurality of metal arrays with specific directions are arranged. Figure 2 The figure shows a schematic diagram of some artificial microstructure arrays. The microstructure array can be prepared by micro-nano processing technology. After design, different microstructure arrays have different control effects on the x and y polarization directions of terahertz light. In this embodiment, the control device (3) is composed of 6×6=36 different artificial microstructure arrays.

[0082] The switching device (4) is connected to the control device (3). The switching device (4) has two different gears, a first gear and a second gear, and the control device (3) can be switched into or out of the optical path of the terahertz light (2) to be measured between the terahertz light source (1) and the terahertz detector (5) according to different information acquisition needs. When it is necessary to obtain the phase information of the terahertz light (2), the switching device (4) can be switched to the first gear, that is, the neutral gear, so that the terahertz light directly irradiates the rear terahertz detector (5); when it is necessary to obtain the spectrum and polarization information of the terahertz light, the switching device (4) can be switched to the second gear, and the control device (3) can be switched into the optical path for control.

[0083] The terahertz detector (5) is at a distance d from the terahertz light source (1) and is used to detect spatial intensity distribution information of the terahertz light. Figure 3 The terahertz detector (5) shown is an array detector, whose detection surface can be divided into 6×6=36 regions in space, and each region can independently output a light intensity signal, denoted as I m(m=1, 2, 3…36). The detection areas on the terahertz detector (5) correspond one to one with the artificial microstructure array of the control device (3). When the control device (3) is cut out of the optical path, the area array detector of the terahertz detector (5) can be regarded as an image sensor, which can obtain the intensity information of each area in the space; when the control device (3) is cut into the optical path, each detection area only receives the signal after the terahertz light passes through the corresponding artificial microstructure array.

[0084] The data processing module (6) is connected to the terahertz detector (5), reads the light intensity information output by the terahertz detector (5), and reconstructs the multivariate terahertz spectrum information through a pre-trained machine learning algorithm.

[0085] Figure 4 A schematic diagram of the workflow of multi-element terahertz information detection according to an exemplary embodiment of the present disclosure is shown, which mainly includes three parts.

[0086] The first part is to measure the spatial and intensity information of terahertz light.

[0087] The control device can be cut out of the optical path. At this time, the light intensity signal received by each detection area of ​​the terahertz detector is the intensity distribution information of the terahertz light to be measured in space. Figure 3 Taking the example shown as an example, there are 6×6 detection areas, and 36 light intensity values ​​can be obtained. According to the present disclosure, the total light intensity I of the terahertz light can also be calculated, which is the sum of the 36 light intensity values.

[0088] The second part is the phase reconstruction process.

[0089] A training set required for training the phase reconstruction network can be obtained first. The training set can be used to prepare terahertz metasurface devices based on artificial microstructures using micro-nano processing technology, so that these devices have different diffraction effects on terahertz waves and have typical spectral transmission characteristics. In this embodiment, the training set contains 1000 samples, numbered n (n=1, 2, 3...1000).

[0090] Then, a test optical path is built, and a broadband terahertz light source is used. The terahertz light emitted by the broadband terahertz light source passes through the sample to obtain the terahertz light of the research target. At this time, the control device is cut out of the optical path, and the terahertz time-domain spectroscopy system is used to test the spatial intensity distribution information A (x, y, z = d) and initial phase distribution information Φ (x, y, z = 0) of the terahertz light after passing through the samples. A (x, y, z = d) is the input of the phase reconstruction network, and the phase distribution information Φ is the output of the phase reconstruction network.

[0091] Then, a phase reconstruction algorithm is designed, that is, the spatial intensity distribution information A of 1000 samples and the initial phase distribution information Φ are used to train the phase reconstruction network and determine the network parameters.

[0092] On the basis of the completion of the phase reconstruction network training, the first spatial intensity distribution information A'(x, y, z=d) of the terahertz light to be measured is obtained, that is, the spatial intensity distribution information of the terahertz light to be measured collected by the terahertz detector when the control device cuts out the light path, and is input into the trained phase reconstruction network to predict the phase information Φ'(x, y, z=0) of the terahertz light to be measured.

[0093] Part III, spectral and polarization reconstruction process.

[0094] The transmission spectra of 1000 samples were tested using the terahertz time-domain spectroscopy system. n , n is the sample number. The polarization information P of the sample in the X direction xn and the polarization information P in the Y direction yn The polarization information P of the sample can be designed by using devices such as polarizers. xn and P yn , the polarization information P of each sample can also be measured in advance by the instrument xn and P yn .

[0095] Then build a test optical path and use a broadband terahertz light source, whose emission spectrum is S0. k =S0*f n The terahertz spectrum of the light source after passing through each sample is calculated to be S k =S0*f n .

[0096] The control device is inserted into the optical path between the sample and the terahertz detector. The terahertz light after passing through each sample is irradiated onto the control device and is completely covered by the multiple artificial microstructure array patterns on the control device. The terahertz light regulated by each artificial microstructure array enters the corresponding detection area of ​​the terahertz detector, and its light intensity information is recorded as I mn , where n represents the sample number, m is the number of the microstructure array, m = 1, 2, ..., 36, and m can also be considered as the number of the detection area of ​​the terahertz detector. mn That is the input of the spectral polarization reconstruction network, and the corresponding P xn , P yn and S n This is the output of the network.

[0097] Then, a spectrum and polarization reconstruction algorithm is designed, which uses the spatial intensity distribution information of all samples in the training set I mn and P xn , P yn , S n Train the spectral polarization reconstruction network and determine the network parameters.

[0098] On the basis of completing the spectral polarization reconstruction network training, the control device is placed between the terahertz light source and the terahertz detector, and the second spatial intensity distribution information I' of the terahertz light to be measured is collected through the terahertz detector. m , and input it into the trained spectrum polarization reconstruction network, the spectrum and polarization information of the terahertz light to be measured can be predicted.

[0099] Through the above examples, the spatial intensity distribution information, total light intensity, phase information, spectrum information and polarization information of the terahertz light to be measured can be obtained.

[0100] For other details and beneficial effects of this embodiment, please refer to the above related introduction, which will not be repeated here.

[0101] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the data processing device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0102] The above is a description of a specific embodiment of the specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0103] Although this specification includes many specific implementation details, these should not be interpreted as limiting the scope of any invention or the scope of protection claimed, but are mainly used to describe the features of the specific embodiments of specific inventions. Certain features described in multiple embodiments in this specification may also be implemented in combination in a single embodiment. On the other hand, the various features described in a single embodiment may also be implemented separately in multiple embodiments or in any suitable sub-combination. In addition, although features may work in certain combinations as described above and even initially claim protection, one or more features from the claimed combination may be removed from the combination in some cases, and the claimed combination may point to a sub-combination or a variation of a sub-combination.

[0104] Similarly, although operations are depicted in a particular order in the accompanying drawings, this should not be understood as requiring that these operations be performed in the particular order shown or performed sequentially, or requiring that all illustrated operations be performed to achieve the desired results. In some cases, multitasking and parallel processing may be advantageous. In addition, the separation of various system modules and components in the above-described embodiments should not be understood as requiring such separation in all embodiments, and it should be understood that the described program components and systems can generally be integrated together in a single software product, or packaged into multiple software products.

[0105] Thus, specific embodiments of the subject matter have been described. Other embodiments are within the scope of the appended claims. In some cases, the actions recited in the claims can be performed in a different order and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the particular order or sequential order shown to achieve the desired results. In some implementations, multitasking and parallel processing may be advantageous.

[0106] The above description is merely a preferred embodiment of one or more embodiments of the present specification and is not intended to limit one or more embodiments of the present specification. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of one or more embodiments of the present specification shall be included in the scope of protection of one or more embodiments of the present specification.

Claims

1. A multi-element terahertz information detection method, characterized in that: include: Providing the terahertz light to be measured through a terahertz light source; Using a terahertz detector that is a predetermined distance away from the terahertz light source to collect first spatial intensity distribution information of the terahertz light to be measured; The control device is arranged between the terahertz light source and the terahertz detector, wherein the control device comprises a plurality of microstructure arrays, wherein different microstructure arrays are designed to have different phase control characteristics, and the terahertz detector is used to collect second spatial intensity distribution information of the terahertz light to be measured after phase control; The phase information, spectrum information and polarization information of the terahertz light to be measured are reconstructed according to the first spatial intensity distribution information and the second spatial intensity distribution information by using a pre-trained neural network.

2. The multi-element terahertz information detection method according to claim 1, characterized in that: The plurality of microstructure arrays completely cover the irradiation area of ​​the terahertz light to be measured on the regulating device.

3. The multi-element terahertz information detection method according to claim 1, characterized in that: The control device includes MXM microstructure arrays, and the terahertz detector has corresponding MXM detection areas, and the detection areas correspond to the microstructure arrays one by one.

4. The multi-element terahertz information detection method according to claim 1, characterized in that: The method further comprises controlling the position of the control device by a switching device, the switching device comprising a first gear and a second gear, wherein: When the switching device is set to the first gear position, the regulating device is controlled to cut out the optical path of the terahertz light to be measured; When the switching device is set to the second gear, the regulating device is controlled to cut into the optical path of the terahertz light to be measured between the terahertz light source and the terahertz detector, so that the regulating device performs phase regulation on the terahertz light to be measured.

5. The multi-element terahertz information detection method according to claim 1, characterized in that: The phase information, spectrum information and polarization information of the terahertz light to be measured are reconstructed according to the first spatial intensity distribution information and the second spatial intensity distribution information by using a pre-trained neural network, including Reconstructing the phase information of the terahertz light to be measured according to the first spatial intensity distribution information using a pre-trained phase reconstruction network; The spectrum information and polarization information of the terahertz light to be measured are reconstructed according to the second spatial intensity distribution information using a pre-trained spectrum polarization reconstruction network.

6. The multi-element terahertz information detection method according to claim 5, characterized in that: The training process of the phase reconstruction network includes: Obtain a training set containing multiple samples; Using a terahertz time-domain spectroscopy system to measure initial phase distribution information of terahertz light provided by each sample, and using the terahertz detector to obtain spatial intensity distribution information at a predetermined distance from the sample; The phase reconstruction network is trained based on the measured initial phase distribution information corresponding to each sample and the spatial intensity distribution information at a predetermined distance from the sample.

7. The multi-element terahertz information detection method according to claim 5, characterized in that: The training process of the spectral polarization reconstruction network includes: Obtain a training set containing multiple samples, and the polarization information P of each sample in the X direction is known xn and the polarization information P in the Y direction yn , n is the sample number; The transmission spectrum f of each sample was measured using a terahertz time-domain spectroscopy system. n The sample is illuminated by a broadband terahertz light source with a spectrum of S0. n =S0*f n Get the spectrum S of the terahertz light provided by the sample n ; The control device is arranged between the sample and the terahertz detector, and the terahertz detector is used to obtain the spatial intensity distribution information of the terahertz light after phase control. mn , where m is the number of the microstructure array and n is the sample number; Based on the acquired spatial intensity distribution information I mn and the corresponding sample polarization information P xn , P yn and spectrum S n , train the spectral polarization reconstruction network.

8. The multi-element terahertz information detection method according to claim 1, characterized in that: The substrate of each microstructure array is made of a material with high terahertz light transmittance, and the array arranged on the substrate is a metal structure.

9. A multi-element terahertz information detection device, characterized in that: It includes a terahertz detector, a control device, a switching device and a data processing module, wherein: The terahertz detector is arranged at a predetermined distance from a terahertz light source, and the terahertz light source is used to provide terahertz light to be measured; The control device comprises a plurality of microstructure arrays, and different microstructure arrays are designed to have different phase control characteristics; The switching device comprises a first gear and a second gear. When the switching device is set to the first gear, the regulating device is controlled to cut out the optical path of the terahertz light to be measured. When the switching device is set to the second gear, the regulating device is controlled to cut into the optical path of the terahertz light to be measured between the terahertz light source and the terahertz detector, so as to perform phase regulation on the terahertz light to be measured. The data processing module is used to use a pre-trained neural network to reconstruct the phase information, spectrum information and polarization information of the terahertz light to be measured based on the spatial intensity distribution information respectively collected by the terahertz detector when the control device cuts into and out of the light path.

10. The multi-element terahertz information detection device according to claim 9, characterized in that: The plurality of microstructure arrays completely cover the irradiation area of ​​the terahertz light to be measured on the regulating device.

11. The multi-element terahertz information detection device according to claim 9, characterized in that: The control device includes M×M microstructure arrays, and the terahertz detector has corresponding M×M detection areas, and the detection areas correspond to the microstructure arrays one by one.

12. The multi-element terahertz information detection device according to claim 9, characterized in that: The data processing module comprises: A phase reconstruction network, used to reconstruct the phase information of the terahertz light to be measured according to the spatial intensity distribution information collected by the terahertz detector when the control device cuts out the light path; The spectral polarization reconstruction network is used to reconstruct the spectral information and polarization information of the terahertz light to be measured according to the spatial intensity distribution information collected by the terahertz detector when the control device cuts into the optical path.

13. The multi-element terahertz information detection device according to claim 9, characterized in that: The substrate of the microstructure array is made of a material with high terahertz light transmittance, and the array on the substrate is a metal structure.

Images