An ebsd in-situ observation device

Abstract

The present application relates to material performance testing device, specifically to a kind of EBSD in-situ observation device, including base and two sliding assemblies slidingly connected in the sliding slot of the base;Single sliding assembly includes ball screw and the sliding block matched with the thread on the outer wall of the ball screw, the ball screw can rotate around its axis, drive the sliding block in the sliding slot of the base to do cyclic reciprocating motion;The surface of the sliding block deviating from the base side is provided with the clamping groove matched with the end of sample.It is simple in structure, can keep the loading state in the experiment process, in-situ observation sample microstructure changes in the process of compression experiment.

Description

Technical Field

[0001] The invention relates to a material property testing device, in particular to an EBSD in-situ observation device. Background Art

[0002] Electron backscattered diffraction (EBSD) is an important characterization method in metal material research. Its test results contain rich crystallographic and structural information and are widely used in the study of metal deformation behavior. Uniaxial tension is the most basic and important mechanical property test experiment for metal components. Quasi-in-situ stretching of materials is an important step in realizing the "structure-strain-performance-characterization" relationship. However, the components of in-situ equipment are complex, expensive, and not conducive to operation. Most conventional quasi-in-situ tensile tests separate stretching and characterization, that is, the specimen is first loaded to a certain strain and then unloaded before characterization. This actually changes the stress state of the material during real-time observation. At the same time, it is extremely inconvenient to re-determine the corresponding area, making it difficult to meet the needs of flexible experiments and precise observations. Summary of the Invention

[0003] The purpose of the present invention is to provide an EBSD in-situ observation device with a simple structure, which can maintain the loading state during the experiment and observe the microstructure changes of the sample in situ during the compression experiment.

[0004] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0005] An EBSD in-situ observation device includes a base and two sliding assemblies slidably connected to a slide groove of the base; a single sliding assembly includes a ball screw and a slider correspondingly connected to a thread on the outer wall of the ball screw, the ball screw can rotate around its axis, driving the slider to perform a cyclic reciprocating motion in the slide groove of the base; the side surface of the slider facing away from the base is provided with a clamping groove corresponding to the end of the sample.

[0006] Furthermore, two ends of the base in the length direction are connected to fixed seats, the first end of the ball screw is clamped and fixed on the fixed seats, and the second end of the ball screw is opposite to the second end of the ball screw of another sliding component.

[0007] Furthermore, the fixed seat includes a base plate and several side plates vertically connected to the base plate, and the base plate and the side plates together form a mounting cavity for the end portion of the base in the length direction to extend into; the base plate is provided with a first through hole adapted to the first end of the ball screw, and the side plate is provided with a second through hole for a set screw to pass through; the ball screw includes a head and a rod, with the position of the head serving as the first end of the ball screw and the free end of the rod serving as the second end of the ball screw, a thread corresponding to the slider is provided on the outer wall of the rod, the outer diameter of the head is larger than the outer diameter of the rod, and the axial movement of the ball screw head is limited by screwing the set screw into the mounting cavity of the fixed seat.

[0008] Furthermore, the first end of the ball screw is provided with a groove adapted to the rotating tool.

[0009] Furthermore, it also includes a positioning member arranged between the two sliding components, and a radial positioning hole corresponding to the ball screw is provided in the middle of the positioning member.

[0010] Furthermore, the outer wall of the positioning member is fitted with a sliding clearance between the inner wall of the sliding groove of the base.

[0011] Furthermore, the base is connected to a pin body that matches the hole position on the sample chamber of the electron microscope.

[0012] The present invention has the following unexpected beneficial effects:

[0013] 1. The present invention sets two sliding assemblies in the slide groove of the base, and a single sliding assembly includes a ball screw and a slider corresponding to the thread on the outer wall of the ball screw. When the ball screw rotates, it can drive the slider to make a circular reciprocating motion along the slide groove of the base, so that the two sliders are close to or away from each other. During specific use, the two ends of the sample are placed in the clamping groove of the slider and fixed, and then the ball screw of the single sliding assembly or the two sliding assemblies is driven to rotate to perform tensile loading on the sample. After the loading is completed, the EBSD in-situ observation device is clamped and fixed in the sample chamber of the electron microscope while maintaining the loading state, and the sample is analyzed. The EBSD in-situ observation device has a simple structure and a small size, and is suitable for experiments in the narrow sample chamber of a scanning electron microscope.

[0014] 2. Because the present invention employs two sliding assemblies within the chute of the base, conventional bolt-type unidirectional loading devices often experience significant reaction forces between the threaded nut and the nut as tensile strain increases, balancing the tensile force on the specimen and leading to potential locking. However, the present invention utilizes a bidirectional loading design, enabling loading to proceed using the other sliding assembly after one sliding assembly has locked. This avoids the difficulty of loading the specimen after locking and facilitates specimen removal after the experiment is complete.

[0015] 3. Among the parts used in the EBSD in-situ observation device of the present invention, the only consumable part is the ball screw, which is easy to replenish and has a low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the structure of the EBSD in-situ observation device of the present invention is shown;

[0017] Figure 2 FIG2 shows a front view of the EBSD in-situ observation device according to the present invention;

[0018] Figure 3 A side view of the EBSD in-situ observation device of the present invention is shown.

[0019] In the figure, 1 is a base, 11 is a slide groove, 2 is a ball screw, 3 is a slider, 31 is a clamping groove, 4 is a fixed seat, 41 is a bottom plate, 42 is a side plate, 43 is a first through hole, 5 is a positioning member, 6 is a pin body, and 7 is a set screw. DETAILED DESCRIPTION

[0020] The following describes the embodiments of the present invention with reference to the accompanying drawings and preferred embodiments. Those skilled in the art will readily appreciate the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the various details in this specification may be modified or altered based on different viewpoints and applications without departing from the spirit of the present invention. It should be understood that the preferred embodiments are intended only to illustrate the present invention and are not intended to limit the scope of protection of the present invention.

[0021] In one embodiment, an EBSD in-situ observation device is provided. Figures 1 to 3 As shown, the device includes a base 1 and two sliding assemblies slidably connected to the slide groove 11 of the base 1. Each sliding assembly includes a ball screw 2 and a slider 3 that corresponds to the thread on the outer wall of the ball screw 2. The ball screw 2 can rotate about its axis, driving the slider 3 to perform reciprocating motion in the slide groove 11 of the base 1. The side of the slider 3 facing away from the base 1 is provided with a clamping groove 31 that corresponds to the end of the specimen.

[0022] The base 1 is the supporting structure of the entire device, providing a stable foundation for the precise movement and adjustment of other components. The base 1 is designed with a slide 11, which is used to guide and limit the movement trajectory of the sliding assembly, ensuring that the sliding assembly can cyclically reciprocate along a predetermined path.

[0023] The sliding assembly is a key component in the device for achieving sample movement. Each sliding assembly includes two parts: a ball screw 2 and a slider 3. The ball screw 2 is a precision transmission element that can convert rotational motion into linear motion. A thread is designed on the outer wall of the ball screw 2, and the thread corresponds to the thread inside the slider 3. When the ball screw 2 rotates, it can drive the slider 3 to move linearly along the trajectory of the thread. The slider 3 is the part of the sliding assembly that cooperates with the ball screw 2. The interior is designed with a thread corresponding to the thread of the ball screw 2, so that the slider 3 can perform a cyclic reciprocating motion along the slide 11 under the drive of the ball screw 2. A clamping groove 31 is also provided on the side surface of the slider 3 facing away from the base 1, which is used to clamp the end of the sample, so that when the two sliding assemblies are away from each other, the sample can be tensile loaded.

[0024] The structural design of the EBSD in-situ observation device described in the present invention is ingenious. A slide groove 11 is provided in the base 1, and a sliding assembly is constructed by using the cooperation of the ball screw 2 and the slider 3. When the ball screw 2 rotates, based on the principle of threaded transmission, it can accurately drive the slider 3 to perform a cyclic reciprocating motion in the slide groove 11, and the clamping groove 31 on the slider 3 provides a reliable connection part for fixing the sample. In actual use, this transmission and connection method can effectively apply a tensile loading force to the sample, and after the loading is completed, it can be transferred to the electron microscope sample chamber with the loaded state, which facilitates the subsequent use of EBSD technology to perform in-situ observation and analysis of the microstructure of the sample under stress, etc., and helps to conduct a more in-depth study of the relevant characteristic changes of the sample during the stress process.

[0025] In a preferred embodiment, see Figure 1 and Figure 2 As shown, the two ends of the base 1 in the length direction are connected to the fixed seat 4, the first end of the ball screw 2 is clamped and fixed on the fixed seat 4, and the second end of the ball screw 2 is opposite to the second end of the ball screw 2 of another sliding component.

[0026] By connecting the fixing base 4 at the two ends in the length direction of the base 1, a stable clamping and fixing position is provided for the ball screw 2. On the one hand, the installation position of the ball screw 2 on the base 1 can be accurately determined, and its unnecessary displacement in the axial direction and other directions can be limited, so that the ball screw 2 can maintain a stable working state when rotating around the axis, thereby ensuring the accuracy and stability of the reciprocating motion of the slider 3 in the slide groove 11 of the base 1. On the other hand, making the second ends of the ball screws 2 of the two sliding components relative to each other helps to make the overall structural layout more regular and symmetrical. From a mechanical point of view, when the specimen is subsequently subjected to tensile loading operations, the force distribution can be made more uniform and reasonable, avoiding adverse effects such as additional eccentric force due to structural asymmetry, ensuring that the tensile loading process can apply force to the specimen evenly as expected, and improving the reliability of the test data.

[0027] The presence of the fixing seat 4 is equivalent to providing a clear standard assembly position for the ball screw 2. When assembling the entire EBSD in-situ observation device, the operator can complete the installation of the ball screw more conveniently and accurately based on the structural characteristics of the fixing seat 4 and the matching relationship with the ball screw 2, thereby improving the assembly efficiency and assembly quality and reducing the possibility of problems in the subsequent operation of the device due to assembly errors.

[0028] If the ball screw 2 fails after long-term use or needs maintenance operations such as debugging or replacement, the setting of the fixing seat 4 makes it relatively easy to disassemble and reinstall it. The maintenance personnel can quickly locate and remove the ball screw 2 from the fixing seat 4 for corresponding processing. After the processing is completed, it can also be accurately reinstalled according to the position of the fixing seat 4, ensuring that the entire device can quickly return to normal working condition and reduce the maintenance difficulty and cost of the device.

[0029] This preferred embodiment improves the overall performance of the device. The stable ball screw mounting structure helps improve the slider's motion accuracy, allowing for more precise control and measurement of parameters such as displacement and force during the tensile loading process after clamping and fixation. This allows data such as changes in the sample's microstructure obtained through EBSD analysis to more accurately correspond to the applied tensile force and other conditions. Furthermore, the uniform and reasonable force distribution also helps extend the device's service life, reducing problems such as localized excessive wear of the structure caused by uneven force, ensuring stable and reliable operation of the device over multiple tests and providing high-quality in-situ observation conditions for scientific research and other related work.

[0030] In a preferred embodiment, see Figures 1 to 3 As shown, the fixed seat 4 includes a base plate 41 and several side plates 42 perpendicularly connected to the base plate 41. The base plate 41 and the side plates 42 together form a mounting cavity into which the longitudinal end of the base 1 extends. The base plate 41 is provided with a first through-hole 43 adapted to fit the first end of the ball screw 2, and the side plates 42 are provided with a second through-hole for the set screw 7 to pass through. The ball screw 2 includes a head and a rod, with the head serving as the first end of the ball screw 2 and the free end of the rod serving as the second end. The outer wall of the rod is provided with threads corresponding to the slider 3. The outer diameter of the head is larger than that of the rod. The set screw 7 is screwed into the mounting cavity of the fixed seat 4 to restrict the axial movement of the head of the ball screw 2.

[0031] The fixing base 4 is composed of a bottom plate 41 and a plurality of vertically connected side plates 42, which together form a mounting cavity to accommodate the longitudinal end of the base 1. This arrangement allows the fixing base 4 and the base 1 to be tightly and stably combined. On the one hand, the multiple side plates 42 increase the overall structural strength of the fixing base 1, enabling it to better withstand the forces generated during the operation of the ball screw 2 and the tensile loading of the specimen, thereby ensuring the stability of the entire device structure. On the other hand, the form of the mounting cavity facilitates the accurate embedding of the end of the base 1, achieving positioning installation, and helping to improve the assembly accuracy of the entire device during assembly.

[0032] The first through hole 43 provided on the base plate 41 is adapted to fit the head of the ball screw 2, providing an accurate mounting point for the first end of the ball screw 2 and ensuring the accurate initial axial position of the ball screw 2. The second through hole on the side plate 43 is used to pass a set screw 7. Since the outer diameter of the head of the ball screw 2 is larger than the outer diameter of the rod, screwing in the set screw 7 effectively limits the axial movement of the head of the ball screw 2. This coordination cleverly utilizes a simple mechanical structure to reliably secure the axial position of the ball screw 2, ensuring that the ball screw 2 does not experience axial movement when rotating about its own axis. This allows the slider 3 connected thereto to smoothly and precisely reciprocate in the groove 11 of the base 1 as expected, laying the foundation for stable tensile loading of the specimen.

[0033] The outer wall of the rod of the ball screw 2 is provided with a thread corresponding to the slider 3. This threaded connection method not only ensures reliable power transmission between the slider 3 and the ball screw 2, so that the rotational motion of the ball screw 2 can be accurately converted into the linear reciprocating motion of the slider 3, but also facilitates the adjustment of the position of the slider 3 according to actual needs and subsequent possible disassembly and maintenance operations. It is easy to operate and the connection is firm.

[0034] The strict restriction of the axial movement of the ball screw 2 by the fixed base 4 and the precise threaded connection between the ball screw 2 and the slider 3 greatly improve the accuracy of the slider 3's movement within the groove 11 of the base 1. When the specimen is subjected to tensile loading, the slider 3 can move precisely according to the set stroke and speed, allowing parameters such as the tensile force and loading rate to be more accurately controlled. This ensures that data such as the microstructural changes of the specimen at different loading stages obtained through in-situ EBSD observation is more accurate and reliable, helping researchers conduct more in-depth and detailed material property analysis.

[0035] The structure of the fixed base 4 and its secure fit with the ball screw 2 enhance the stability of the entire device during operation. Whether in a single test or during long-term, multiple-use, the device effectively resists adverse effects such as vibration and deflection caused by factors such as specimen stress and the rotation of the ball screw 2. This reduces the possibility of experimental errors and structural damage caused by device instability, extends the device's service life, reduces maintenance costs during use, and ensures that the device can continuously and stably provide reliable specimen loading conditions for in-situ EBSD observations.

[0036] During the assembly process, first insert the end of the base 1 into the installation cavity of the fixing seat 4 to achieve the preliminary positioning of the base 1 and the fixing seat 4, then pass the head of the ball screw 2 through the first through hole 43 of the bottom plate 41, and use the set screw 7 to pass through the second through hole of the side plate 43 to fix the ball screw 2. The operation process is clear and simple, and the positioning and connection methods between the various components are clear, which facilitates the assembly workers to complete the assembly work of the device quickly and accurately, thereby improving the assembly efficiency.

[0037] After the device has been running for a period of time, if the ball screw 2 needs to be maintained, replaced, or its connection with the fixed base 4 needs to be inspected and adjusted, the ball screw 2 can be easily removed from the fixed base 4 by simply unscrewing the set screw 7, and the relevant components can be repaired or replaced. As for the fixed base 4 itself, due to its relatively simple structure and clear connection relationship with the base 1 and other components, it is also easy to inspect and repair. This reduces the difficulty of subsequent maintenance of the device as a whole and is conducive to the long-term normal use of the device.

[0038] In a preferred embodiment, see Figure 3 As shown, the first end of the ball screw 2 is provided with a groove adapted to the rotating tool, which facilitates the operator to apply external force to drive the ball screw 2 to rotate. Under normal circumstances, it may be difficult to rotate the ball screw 2 directly by hand and it is difficult to accurately control the parameters such as the angle and speed of rotation. However, due to the provision of the groove, a suitable rotating tool, such as an Allen wrench, a screwdriver (depending on the shape of the groove), etc., can be selected and inserted into it. With the help of the lever principle of the tool, the appropriate torque can be easily applied to the ball screw, so that the operator can drive the ball screw 2 to rotate around its axis more labor-saving and efficiently, thereby driving the slider 3 to reciprocate in the slide groove 11 of the base 1, thereby realizing the tensile loading operation of the sample.

[0039] Using a suitable rotating tool in conjunction with the groove allows for more precise control of the rotation angle and speed of ball screw 2 compared to manual rotation. In some test scenarios with strict requirements for specimen tensile loading, such as requiring specimens to be stretched at a specific loading rate and within a precise travel range, the rotating tool can accurately control the amount of rotation of ball screw 2 each time, ensuring that the distance and speed of the slider movement meet the preset test parameter requirements, improving the accuracy of the entire specimen loading process and ensuring that the data obtained from subsequent in-situ EBSD observations accurately reflects the true characteristics of the specimen under the corresponding loading state.

[0040] Because the ball screw 2 can be rotated more conveniently and effortlessly with the help of a rotating tool, the preliminary preparation work of specimen tensile loading can be completed quickly. Operators no longer need to spend too much time and energy driving the ball screw 2 to rotate, and can devote more energy to subsequent steps such as device clamping, electron microscope debugging, and paying attention to specimen analysis results. This speeds up the pace of testing and improves test efficiency overall. This efficiency advantage is particularly evident in test tasks that require repeated sample loading and observation.

[0041] Precise operation is achieved thanks to the coordination between the rotating tool and the groove. This means that when performing multiple tests on different specimens or the same specimen, as long as the same operating specifications, the same rotating tool, and the same rotation parameters are followed, the rotation of the ball screw 2 can be basically consistent each time, and the tensile loading state of the slider 3 on the specimen can also be highly repeatable. This makes the results of different tests obtained through in-situ EBSD observation more comparable, facilitating more rigorous comparative analysis and in-depth research on the microstructural changes of the specimen under specific loading conditions.

[0042] In practical applications, different types of rotation tools can be flexibly selected based on different test requirements and site conditions. For example, for ball screw rotation requiring high torque, a wrench-like tool of appropriate size and long lever arm can be inserted into the groove to provide sufficient rotational force. In scenarios where extremely high precision is required and precise control of the rotation angle is necessary, tools such as specialized screwdrivers with scales can be used to precisely adjust the rotation angle of ball screw 2. This flexibility enables the device to better adapt to diverse scientific research and experimental requirements, expanding its scope of application.

[0043] In a preferred embodiment, see Figure 1 and Figure 2 As shown, the device further includes a positioning member 5 arranged between the two sliding components, and a radial positioning hole corresponding to the ball screw 2 is provided in the middle of the positioning member 5.

[0044] The core function of the positioning member 5, located between the two sliding assemblies, is to precisely radially position the ball screw 2. The central radial positioning hole mates with the ball screw 2, limiting its radial displacement and ensuring that the ball screw 2 maintains an accurate and stable radial position as it rotates about its axis and drives the slider 3 in reciprocating motion.

[0045] The positioning member 5 works in conjunction with the previously mentioned fixed seat 4 and other structures. The fixed seat 4 mainly fixes and positions the ball screw 2 from one end, while the positioning member 5 provides support and radial constraints between the two sliding components, so that the ball screw 2 can be effectively limited in the entire length direction, making its operation more stable and reliable. When the two sliding components work simultaneously to perform tensile loading on the sample, its advantages are particularly reflected. It can ensure that the two ball screws 2 remain consistent in radial and motion coordination, avoid the situation where the sample is unevenly stressed due to the position deviation of a single ball screw 2, and ensure that the sample can be evenly subjected to tensile force, meeting the test requirements for loading accuracy.

[0046] Furthermore, the outer wall of the positioning member 5 is fitted with a sliding clearance between the inner wall of the slide groove 11 of the base 1. This fitting method is designed with comprehensive consideration of the positioning function of the positioning member 5 and its flexibility requirements during the operation of the device. On the one hand, the existence of the gap enables the positioning member 5 to move relatively smoothly in the slide groove 11, without generating excessive friction due to interference fit, thereby improving the assembly convenience of the positioning member. On the other hand, although there is a gap, it can still maintain a relative position relationship with the inner wall of the slide groove 11 within a reasonable design range, ensuring that there will be no excessive shaking, detachment from the slide groove, and other situations that affect the performance of its positioning function.

[0047] In a preferred embodiment, see Figures 1 to 3 As shown, the base 11 is fixedly connected to a pin 6 that matches the hole in the electron microscope's sample chamber, enabling precise positioning of the EBSD in-situ observation device on the electron microscope's specimen stage. When the device is clamped and fixed to the electron microscope's sample chamber, the pin 6 accurately inserts into the corresponding hole, similar to a mortise and tenon joint. This mechanical fit strictly defines the device's position within the sample chamber from a physical perspective, preventing random movement and offset of the device in the horizontal direction (including front-to-back and left-to-right dimensions) and, to a certain extent, in the vertical direction. This ensures that the device remains in the same, accurate position each time it is installed in the electron microscope's sample chamber.

[0048] This precise positioning is crucial for subsequent in-situ EBSD observations. Only when the device is accurately and fixedly positioned within the electron microscope can the microscope's observation angle, observation area, and other parameters remain relatively stable and consistent across each specimen observation. For example, if the operator needs to compare and observe a specific microstructural area on a specimen multiple times, or analyze samples from different batches at the same location, the proper alignment of the pin and hole ensures comparability of the data obtained from each observation, minimizing observation errors caused by differences in the device's installation position. This provides a reliable foundation for accurately analyzing microstructural changes in specimens under varying conditions.

[0049] By aligning pin 6 with the aperture in the electron microscope's sample chamber, the electron microscope can more accurately focus on the target area of ​​the specimen during in-situ EBSD observations, avoiding the need for frequent adjustments to microscope parameters and re-searching the observation area due to inaccurate device positioning. This results in clearer and more accurate images of the specimen's microstructure, and more reliable acquisition of corresponding crystallographic information (such as grain orientation and grain boundary characteristics). This facilitates in-depth study of the material's microscopic properties and how they change under stress and other conditions, ultimately improving the quality of overall scientific research and analysis.

[0050] In practice, each time the EBSD in-situ observation device is installed on the electron microscope specimen chamber, the operator no longer needs to spend a lot of time manually calibrating the device's position. Instead, they simply align the pin 6 with the corresponding hole and install it. This simple and quick operation significantly saves time in clamping and fixing the device. Moreover, due to the accurate positioning, subsequent electron microscope debugging and other related operations can be carried out more smoothly, reducing the tedious steps of repeated debugging and confirmation due to uncertain device position. This overall efficiency improvement is particularly significant when a large number of specimens need to be observed and analyzed.

[0051] The EBSD in-situ observation device can be easily used on electron microscopes of different models or specifications, as long as the holes in the sample chamber are compatible with the pins 6 on the device base, eliminating the need for complex modifications or redesign of the mounting structure for each electron microscope. This versatility and compatibility enable the device to be used in a wider range of scientific research scenarios, expanding its scope of application and facilitating the use of the device for in-situ EBSD observations by different research teams based on their own electron microscope equipment.

[0052] The above embodiments are only preferred embodiments for fully illustrating the present invention, and the protection scope of the present invention is not limited thereto. Any equivalent substitution or modification made by those skilled in the art based on the present invention is within the protection scope of the present invention.

Claims

1. An EBSD in-situ observation device, characterized by: It comprises a base (1) and two sliding assemblies slidably connected to a slide groove (11) of the base (1); A single sliding assembly comprises a ball screw (2) and a slider (3) correspondingly connected to a thread on an outer wall of the ball screw (2); the ball screw (2) is capable of rotating about its axis, driving the slider (3) to perform a cyclic reciprocating motion in a slide groove (11) of the base (1); The surface of the slider (3) facing away from the base (1) is provided with a clamping groove (31) corresponding to the end of the sample; Two ends of the base (1) in the length direction are connected to a fixed seat (4), a first end of the ball screw (2) is clamped and fixed on the fixed seat (4), and a second end of the ball screw (2) is positioned opposite to the second end of the ball screw (2) of another sliding assembly; The fixing seat (4) comprises a bottom plate (41) and a plurality of side plates (42) vertically connected to the bottom plate (41), wherein the bottom plate (41) and the side plates (42) together form a mounting cavity into which the end portion of the base (1) in the longitudinal direction extends; The bottom plate (41) is provided with a first through hole (43) adapted to the first end of the ball screw (2), and the side plate (42) is provided with a second through hole for the set screw (7) to pass through; The ball screw (2) includes a head and a rod, the head serves as the first end of the ball screw (2), and the free end of the rod serves as the second end of the ball screw (2). The outer wall of the rod is provided with a thread corresponding to the slider (3). The outer diameter of the head is larger than the outer diameter of the rod. By screwing a set screw (7) into the mounting cavity of the fixed seat (4), the axial movement of the head of the ball screw (2) is limited. The base (1) is connected to a pin (6) that matches a hole on a sample chamber of an electron microscope.

2. The EBSD in-situ observation device according to claim 1, characterized in that: The first end of the ball screw (2) is provided with a groove adapted to the rotating tool.

3. The EBSD in-situ observation device according to claim 1, characterized in that: It also includes a positioning member (5) arranged between the two sliding assemblies, wherein a radial positioning hole corresponding to the ball screw (2) is provided in the middle of the positioning member (5).

4. The EBSD in-situ observation device according to claim 3, characterized in that: The outer wall of the positioning member (5) and the inner wall of the sliding groove (11) of the base (1) are fitted with a sliding clearance.

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