Laser encoder test device

Abstract

The present application discloses a laser ruler test device, including a test mechanism platform and a mounting seat, wherein the test mechanism platform is used to mount a plurality of reflectors, and the reflectors are used to reflect the laser of the laser ruler to the receiving part of the laser ruler; a plurality of mounting seats are arranged at intervals on the outer peripheral side of the test mechanism platform, each mounting seat has a reflector arranged corresponding to itself, and each mounting seat includes a window fixing part and a laser ruler fixing part, the window is used to enhance the intensity of the laser emitted by the laser ruler, and the window fixing part is located on the line connecting the corresponding reflector and the laser ruler fixing part; the window fixing part of the first part mounting seat is separately arranged with the laser ruler fixing part, and is used to measure the laser ruler of the first type of specification; the window fixing part of the second part mounting seat is integrated with the laser ruler fixing part, and is used to measure the laser ruler of the second type of specification. The laser ruler test device of the present application can perform synchronous tests on laser rulers of different models, thereby improving the test efficiency of the laser ruler.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor detection technology, and in particular, relates to a laser ruler testing device. Background Art

[0002] With the rapid development of semiconductor technology, the requirements for wafer inspection accuracy have also increased. When inspecting wafers, high-precision distance measuring equipment such as laser rulers are usually used to ensure the inspection accuracy of wafers.

[0003] Different types of laser rulers are required for corresponding detection according to different detection environments, and the laser ruler needs to be tested with a special test device before detection to complete the accuracy test of the laser ruler and determine whether the laser ruler meets the detection requirements. However, the structures of different types of laser rulers are quite different, and it is necessary to match the laser ruler that meets the wafer detection requirements according to different environments. However, the current laser ruler test device can only detect a single model or type of laser ruler, or when testing different types of laser rulers, the structure of the test device needs to be adjusted, and different types of laser rulers need to be repeatedly disassembled and installed for detection, resulting in low test efficiency. Summary of the invention

[0004] The present application provides a laser ruler testing device, which can synchronously test laser rulers of different models, thereby improving the testing efficiency of the laser ruler.

[0005] The present application provides a laser ruler testing device, which includes: a testing mechanism carrier for mounting a plurality of reflectors, the reflectors being used to reflect the laser of the laser ruler to a receiving part of the laser ruler; a plurality of mounting seats, the plurality of mounting seats being spaced apart on the outer peripheral side of the testing mechanism carrier, each mounting seat having a reflector arranged corresponding to itself, each mounting seat comprising a window fixing portion for mounting a window and a laser ruler fixing portion for mounting the laser ruler, the window being used to enhance the intensity of the laser emitted by the laser ruler, the window fixing portion being located on a line connecting the corresponding reflector and the laser ruler fixing portion; wherein the window fixing portion of the first part of the mounting seat is separately arranged from the laser ruler fixing portion, and is used to measure a laser ruler of a first type of specification; the window fixing portion of the second part of the mounting seat is integrated with the laser ruler fixing portion, and is used to measure a laser ruler of a second type of specification.

[0006] In the laser ruler testing device as above, the first part of the mounting seat includes a laser ruler fixing bracket and a window fixing bracket, the window fixing bracket is arranged between the laser ruler fixing bracket and the corresponding reflector, the laser ruler fixing part is arranged on the top of the laser ruler fixing bracket, and the window fixing part is arranged on the window fixing bracket, and the height of the top of the laser ruler fixing bracket is lower than the setting height of the window fixing part on the window fixing bracket.

[0007] In the laser ruler testing device as above, the second part of the mounting seat includes an integrated fixing bracket, the window fixing portion and the laser ruler fixing portion are respectively arranged on different side walls of the integrated fixing bracket, and the window fixing portion is arranged on the side wall of the integrated fixing bracket close to its corresponding reflector, so that the window is arranged between the reflector and the laser ruler.

[0008] In the laser ruler testing device as above, a plurality of mounting seats are distributed on both sides of the testing mechanism platform in the first direction, and a plurality of mounting seats on each side are arranged at intervals along the second direction; two reflectors spaced apart along the first direction are provided on the testing mechanism platform, and both reflectors extend along the second direction, and an extension length of each reflector is greater than or equal to an arrangement length of the plurality of mounting seats on the corresponding side.

[0009] In the laser ruler testing device as above, the testing mechanism platform is also provided with a receiver for receiving the laser of the standard laser ruler. The receiver is mounted on the testing mechanism platform, and the height of the receiving end of the receiver is higher than the height of the reflector.

[0010] In the laser ruler testing device as above, the window fixing portion is a hole-shaped structure penetrating the mounting seat, the hole-shaped structure extends in the direction from its corresponding laser ruler fixing portion to its corresponding reflector, and the window is fixed in the hole-shaped structure.

[0011] As in the laser ruler testing device above, the second part of the mounting seat also has a reference mirror assembly, the reference mirror assembly includes a reference mirror and a reference mirror mounting plate, the reference mirror is connected to the side of the mounting seat close to the reflector through the reference mirror mounting plate, and the reference mirror assembly covers a portion of the opening of the window fixing portion.

[0012] As shown in the above laser ruler testing device, the window includes a window body, a window mounting portion and a sealing ring. The window body is sealed and installed in the window mounting portion through two sealing rings of annular structure. The two sealing rings are respectively connected to the two sides of the window body, and the window mounting portion is installed on the window fixing portion.

[0013] As above, the laser ruler testing device further comprises a mounting substrate and a plurality of connecting plates, wherein the plurality of connecting plates are detachably connected to the edge of the mounting substrate, the testing mechanism carrier is detachably mounted on the mounting substrate, and the mounting seat is detachably mounted on the connecting plates.

[0014] The laser ruler testing device as above, wherein the laser ruler testing device also includes an adjusting gasket, which is detachably installed between the connecting plate and the mounting seat and is used to adjust the height of the mounting seat so that the height of the mounting seat is adapted to its corresponding laser ruler.

[0015] The laser ruler test device of the present application includes a test mechanism carrier and a mounting seat, wherein a plurality of mounting seats are arranged at intervals on the outer peripheral side of the test mechanism carrier, and each mounting seat has a window fixing portion for installing a window and a laser ruler fixing portion for installing a laser ruler, and a plurality of reflectors are installed on the test mechanism carrier, each mounting seat has a reflector corresponding to itself, and the window fixing portion of each mounting seat is located on a line connecting the reflector corresponding to itself and the laser ruler fixing portion. When testing the laser ruler, the plurality of laser rulers can be respectively installed on the laser ruler fixing portions of the plurality of mounting seats, and the laser emitted by the laser ruler can sequentially pass through the window and the reflector on the same straight line, and be reflected by the reflector back to the receiving portion of the laser ruler itself, thereby obtaining the measurement value of each laser ruler, and the measurement accuracy analysis can be performed based on the measurement value.

[0016] Among the multiple mounting seats, the window fixing part and the laser ruler fixing part of the first part of the mounting seat are separately arranged for measuring the laser ruler of the first type of specifications, and the window fixing part and the laser ruler fixing part of the second part of the mounting seat are integrated for measuring the laser ruler of the second type of specifications. The sizes and installation methods of the two types of laser rulers are different. Through the different mounting seats of this laser ruler testing device, laser rulers of different models and specifications can be installed and tested at the same time, and the accuracy can be compared to select the laser ruler with higher measurement accuracy, avoiding repeated disassembly and installation of separate tests, thereby improving the testing efficiency of the laser ruler. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0018] Figure 1 A top view of a laser ruler testing device according to an embodiment of the present application;

[0019] Figure 2 This is an axonometric diagram of a laser ruler testing device according to an embodiment of the present application;

[0020] Figure 3 A side view of a laser ruler testing device according to an embodiment of the present application;

[0021] Figure 4 An exploded view of the window and reference mirror assembly of the laser encoder testing device according to an embodiment of the present application.

[0022] Description of Figure Numbers:

[0023] 11. Test mechanism carrier; 12. Mounting seat; 121. Window fixing part; 131. Laser ruler fixing bracket; 132. Window fixing bracket; 14. Integrated fixing bracket; 15. Mounting base plate; 16. Connecting plate; 17. Adjusting gasket;

[0024] 21. Window; 211. Window body; 212. Window mounting portion; 213. Sealing ring; 214. Window through hole; 22. Reflector; 221. Pressing plate; 23. Receiver; 231. Receiving end; 24. Reference mirror assembly; 241. Reference mirror; 242. Reference mirror mounting plate;

[0025] 100, laser ruler; 110, standard laser ruler;

[0026] X, first direction; Y, second direction. DETAILED DESCRIPTION

[0027] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0028] like Figures 1 to 4 As shown, the embodiment of the present application provides a laser ruler test device, which includes a test mechanism carrier 11 and a mounting seat 12. The test mechanism carrier 11 is used to install a plurality of reflectors 22, and the reflectors 22 are used to reflect the laser of the laser ruler 100 to the receiving part of the laser ruler 100. The plurality of mounting seats 12 are arranged at intervals on the outer peripheral side of the test mechanism carrier 11. Each mounting seat 12 has a reflector 22 arranged corresponding to itself. Each mounting seat 12 includes a window fixing portion 121 for installing a window 21 and a laser ruler fixing portion for installing the laser ruler 100. The window 21 is used to enhance the intensity of the laser emitted by the laser ruler 100. The window fixing portion 121 is located on the line connecting the corresponding reflector 22 and the laser ruler fixing portion. The window fixing portion 121 of the first part of the mounting seat 12 is separately arranged with the laser ruler fixing portion, and is used to measure the laser ruler 100 of the first type of specifications. The window fixing portion 121 of the second part of the mounting seat 12 is integrated with the laser ruler fixing portion, and is used to measure the laser ruler 100 of the second type of specifications.

[0029] In specific implementation, the laser ruler test device of the present application includes a test mechanism carrier 11 and a mounting seat 12. A plurality of mounting seats 12 are arranged at intervals on the outer peripheral side of the test mechanism carrier 11, and each mounting seat 12 has a window fixing portion 121 for installing a window 21 and a laser ruler fixing portion for installing a laser ruler 100. A plurality of reflectors 22 are installed on the test mechanism carrier 11. Each mounting seat 12 has a reflector 22 corresponding to itself, and the window fixing portion 121 of each mounting seat 12 is located on a line connecting the corresponding reflector 22 and the laser ruler fixing portion. When testing the laser ruler 100, the plurality of laser rulers 100 can be respectively installed on the laser ruler fixing portions of the plurality of mounting seats 12. The laser emitted by the laser ruler 100 can sequentially pass through the window 21 and the reflector 22 in the same straight line, and be reflected by the reflector 22 back to the receiving portion of the laser ruler 100 itself, thereby obtaining the measurement value of each laser ruler 100, and the measurement accuracy analysis can be performed based on the measurement value.

[0030] Among the multiple mounting seats 12, the window fixing portion 121 of the first part of the mounting seat 12 is separately arranged with the laser ruler fixing portion, and is used to measure the laser ruler 100 of the first type of specifications. The window fixing portion 121 of the second part of the mounting seat 12 is integrated with the laser ruler fixing portion, and is used to measure the laser ruler 100 of the second type of specifications. The sizes and installation methods of the two types of laser rulers 100 are different. Through the different mounting seats 12 of this laser ruler testing device, laser rulers 100 of different models and specifications can be installed and tested at the same time, and accuracy comparison can be performed to select the laser ruler 100 with higher measurement accuracy, avoiding repeated disassembly and installation of individual tests, thereby improving the testing efficiency of the laser ruler 100.

[0031] Among them, the laser ruler 100 of the first type of specification is a light laser ruler with optical fiber transmission, and its overall size is small, and it can be installed horizontally on the laser ruler fixing part as a whole. This installation posture facilitates the laser ruler 100 of the first type of specification to emit laser toward the window fixing part 121 separately provided with the laser ruler fixing part, and pass through the window 21 on the window fixing part 121; the laser ruler 100 of the second type of specification is also a light laser ruler with optical fiber transmission, but its overall size is large, and it can be installed vertically on the laser ruler fixing part integrated with the window fixing part 121. This installation posture facilitates the emitting part on the side of the laser ruler 100 to emit laser toward the window 21 and pass through the window 21. Therefore, the first part mounting seat 12 set separately facilitates the small laser ruler of the first type of specification to be installed horizontally, and the second part mounting seat 12 set integrally facilitates the large laser ruler of the second type of specification to be installed vertically and suspended. In an embodiment of the present application, the test mechanism carrier 11 is further provided with a receiver 23 for receiving the laser of the standard laser ruler 110. The receiver 23 is mounted on the test mechanism carrier 11, and the height of the receiving end 231 of the receiver 23 is higher than the height of the reflector 22, so that the receiving end 231 will not be blocked by the reflector 22, and the laser emitted by the standard laser ruler 110 can be injected into the receiving end 231, thereby realizing the test of the standard laser ruler 110.

[0032] The laser ruler test device of the embodiment of the present application can detect laser rulers 100 of different specifications in different application environments. In one application environment, the receiver 23 on the test mechanism carrier 11 can receive the laser emitted by the standard laser ruler 110 and implement the test to obtain the measurement accuracy of the standard laser ruler 110 in this application environment, and then test the laser rulers 100 of different specifications installed on different mounting seats 12. After obtaining the measurement accuracy of the laser rulers 100 of different specifications, they are compared and analyzed with the measurement accuracy of the standard laser ruler 110, so that the laser ruler 100 with the measurement accuracy closest to the standard laser ruler 110 can be selected, thereby improving the test accuracy of the laser ruler test device.

[0033] like Figures 1 to 3 As shown, a laser ruler testing device according to an embodiment of the present application, wherein a plurality of mounting seats 12 are distributed on both sides of a testing mechanism platform 11 in a first direction X, and a plurality of mounting seats 12 on each side are arranged at intervals along a second direction Y; two reflectors 22 spaced apart along the first direction X are provided on the testing mechanism platform 11, and both reflectors 22 extend along the second direction Y, and an extension length of each reflector 22 is greater than or equal to an arrangement length of the plurality of mounting seats 12 on the corresponding side thereof.

[0034] In specific implementation, two reflectors 22 are arranged on the test mechanism platform 11 at intervals along the first direction X, and can correspond to the multiple mounting seats 12 arranged at intervals along the second direction Y on both sides of the test mechanism platform 11 in the first direction X, and the extension length of each reflector 22 along the second direction Y is greater than or equal to the arrangement length of the multiple mounting seats 12 on the corresponding side, so that the multiple mounting seats 12 on each side can have a corresponding partial reflector 22 to reflect the laser, so that each laser ruler 100 can be accurately tested. Among them, the arrangement length of the mounting seats 12 on both sides can be adjusted, and the reflectors 22 on both sides can also be selected with different lengths to adapt to the arrangement length of the mounting seats 12 on both sides, ensuring that the laser ruler 100 on each mounting seat 12 can be set accordingly. Figure 1 In the figure, reflectors 22 of different lengths are illustrated, and in practical applications, reflectors 22 of the same length may also be selected.

[0035] Furthermore, providing two longer reflectors 22 can reduce the number of installation steps compared to providing a shorter reflector for each laser ruler 100. In addition, multiple reflectors need to be installed at corresponding installation positions, which makes the installation difficult. The longer reflector 22 only needs to ensure its installation direction, which reduces the overall installation difficulty of the laser ruler testing device.

[0036] Specifically, the strip-shaped reflector 22 is fixed to the test mechanism carrier 11 via a pressure plate 221. The pressure plate 221 and the test mechanism carrier 11 are connected via bolts. The two pressure plates 221 are respectively connected to the two ends of the reflector 22, so that the reflector 22 is stably installed on the test mechanism carrier 11.

[0037] It should be noted that if Figure 1 As shown, in Figure 1 The test mechanism carrier 11 in the embodiment has two groups of reflectors 22 arranged at intervals along the first direction X, each group of reflectors 22 has two reflectors 22, and the two reflectors 22 in each group are fixed in different ways. The outer reflectors 22 are fixed to the test mechanism carrier 11 by a pressing plate 221, and the inner reflectors 22 are fixed to the test mechanism carrier 11 by bonding. Figure 1 The two reflectors 22 in the figure are only examples of different fixing methods. In the actual application of the laser ruler test device of the embodiment of the present application, the reflectors 22 are not necessarily fixed in the same way. Figure 1 The two reflectors 22 are stacked, and the test mechanism carrier 11 only has two reflectors 22 spaced apart along the first direction X. Each reflector 22 can be fixed to the test mechanism carrier 11 by any different fixing method.

[0038] On the test mechanism carrier 11 , the height of the receiving end 231 of the receiver 23 is higher than the height of the reflector 22 , which can avoid the reflector 22 from blocking the receiving end 231 , so that the receiving end 231 can stably receive the laser emitted by the standard laser ruler 110 , thereby achieving accurate testing of the standard laser ruler 110 .

[0039] Optionally, a plurality of mounting seats 12 are distributed on both sides of the test mechanism carrier 11 in the second direction Y, and the plurality of mounting seats 12 on each side are arranged at intervals along the first direction X. The test mechanism carrier 11 is provided with two reflectors 22 spaced apart along the second direction Y, and both reflectors 22 extend along the first direction X, and the extension length of each reflector 22 is greater than or equal to the arrangement length of the plurality of mounting seats 12 on the corresponding side. It should be noted that the distribution direction and extension direction of the mounting seats 12 and the reflectors 22 include but are not limited to the first direction X and the second direction Y, and may also be a direction inclined to the first direction X and the second direction Y.

[0040] Optionally, the test mechanism carrier 11 may be a circular carrier, on which a ring-shaped reflector 22 is provided, and each mounting seat 12 is arranged at intervals along the circumference of the test mechanism carrier 11 on the outer peripheral side of the test mechanism carrier 11, so that each can be arranged opposite to the reflector 22, and the reflector 22 can reflect the laser emitted by the laser ruler 100 of each mounting seat 12, so as to realize the test of the laser ruler 100. The structure and installation method of the reflector 22 can also reduce the overall installation difficulty of the laser ruler test device.

[0041] like Figures 1 to 3 As shown, a laser ruler testing device according to an embodiment of the present application, wherein a portion of the mounting seat 12 includes a laser ruler fixing bracket 131 and a window fixing bracket 132, the window fixing bracket 132 is arranged between the laser ruler fixing bracket 131 and the corresponding reflector 22, the laser ruler fixing portion is arranged at the top of the laser ruler fixing bracket 131, and the window fixing portion 121 is arranged at the window fixing bracket 132, and the height of the top of the laser ruler fixing bracket 131 is lower than the setting height of the window fixing portion 121 at the window fixing bracket 132.

[0042] In specific implementation, the laser ruler fixing bracket 131 and the window fixing bracket 132 are arranged at intervals, the laser ruler fixing part is arranged at the top of the laser ruler fixing bracket 131, and the window fixing part 121 is arranged at the window fixing bracket 132, and the laser ruler fixing part and the window fixing part 121 are arranged separately. When the laser ruler 100 is installed on the laser ruler fixing bracket 131 through the laser ruler installation part at the top, it can be at the same height as the window fixing part 121 of the window fixing bracket 132, and the laser emitted by it can pass through the window 21 fixed by the window fixing part 121 to reach the reflector 22, and the laser reflected back by the reflector 22 can return to the receiving part of the laser ruler 100, so as to obtain the measurement value of each laser ruler 100, and the measurement accuracy analysis can be performed through the measurement value.

[0043] When the mounting base 12 in which the laser ruler fixing bracket 131 and the window fixing bracket 132 are separately arranged is used, the laser ruler 100 of the first category specification can be measured. The laser ruler 100 of the first category specification is a lightweight laser ruler with optical fiber transmission. Its overall size is relatively small and can be installed horizontally as a whole on the laser ruler fixing part of the laser ruler fixing bracket 131. This installation posture makes it easy for the laser ruler 100 of the first category specification to emit laser toward the window 21 and pass through the window 21.

[0044] The laser ruler fixing portion may be a threaded hole structure or a clamping structure, and the laser ruler 100 can be detachably connected to the laser ruler fixing bracket 131 through the laser ruler fixing portion.

[0045] like Figures 1 to 3 As shown, the laser ruler testing device of the embodiment of the present application, wherein the other part of the mounting seat 12 includes an integrated fixing bracket 14, the window fixing portion 121 and the laser ruler fixing portion are respectively arranged on different side walls of the integrated fixing bracket 14, and the window fixing portion 121 is arranged on the side wall of the integrated fixing bracket 14 close to its corresponding reflector 22, so that the window 21 is arranged between the reflector 22 and the laser ruler 100.

[0046] In a specific implementation, the window fixing portion 121 of the integrated fixing bracket 14 and the laser ruler fixing portion are respectively arranged on different side walls, and the window fixing portion 121 is arranged on the side wall of the integrated fixing bracket 14 close to its corresponding reflector 22, so that when the laser ruler 100 is fixed to the laser ruler fixing portion, the laser emitted by it can pass through the window 21 and reach the reflector 22 for reflection, and the laser reflected back by the reflector 22 can return to the receiving part of the laser ruler 100, so as to obtain the measurement value of each laser ruler 100, and the measurement accuracy analysis can be performed through this measurement value.

[0047] When the mounting base 12 with an integral structure and an integrated fixing bracket 14 is used, the laser ruler 100 of the second category specification can be measured. The laser ruler 100 of the second category specification is also a lightweight laser ruler with optical fiber transmission, but its overall size is larger and can be vertically installed on the laser ruler fixing part of the side wall of the integrated fixing bracket 14. Similarly, this installation posture makes it easy for the emitting part on the side of the laser ruler 100 to emit laser toward the window 21 and pass through the window 21.

[0048] Specifically, the window fixing portion 121 and the laser ruler fixing portion are respectively arranged on two side walls on opposite sides of the integrated fixing bracket 14, which not only enables the laser ruler 100 fixed to the laser ruler fixing portion to be in the same straight line with the window 21 and the reflector 22 fixed by the window fixing portion 121, but also enables a certain distance between the laser ruler 100 and the window 21, so that the laser of the laser ruler 100 has enough space to be emitted to the window 21 and pass through the window 21.

[0049] In the laser ruler testing device of the embodiment of the present application, the window fixing portion 121 is a hole-shaped structure penetrating the mounting seat 12 , the hole-shaped structure extends from the direction from its corresponding laser ruler fixing portion to its corresponding reflector 22 , and the window 21 is fixed in the hole-shaped structure.

[0050] The window fixing portion 121 of the hole-shaped structure facilitates the installation and fixing of the window 21 , and there is no need to provide a protruding fixing structure on the mounting seat 12 to fix the window 21 , thereby reducing the overall volume of the laser ruler testing device.

[0051] Furthermore, the window fixing portion 121 of the hole-like structure extends in the direction from its corresponding laser ruler fixing portion to its corresponding reflector 22. The laser emitted by the laser ruler 100 fixed by the laser ruler fixing portion can pass through the window fixing portion 121 of the hole-like structure in a straight line and reach the position of the reflector 22, thereby avoiding the window fixing portion 121 from blocking the laser. Therefore, the window fixing portion 121 not only has the effect of fixing the window 21, but also avoids the laser path, thereby ensuring the test effect of the laser ruler testing device on the laser ruler 100.

[0052] In a part of the mounting base 12 of the present application, when the mounting base 12 is composed of a laser ruler fixing bracket 131 and a window fixing bracket 132 which are separately arranged, the window fixing portion 121 of the hole-like structure penetrates the laser ruler fixing bracket 131 along the direction from the laser ruler fixing bracket 131 to the reflector 22, so that the laser emitted by the laser ruler 100 fixed to the laser ruler fixing bracket 131 can reach the reflector 22 through the window fixing portion 121 and the window 21 in the window fixing portion 121.

[0053] In another part of the mounting base 12 of the present application, the mounting base 12 is an integrated fixing bracket 14 of an integral structure, and the window fixing portion 121 of a hole-like structure passes through the integrated fixing bracket 14, and the openings at both ends are opened on the side walls of the two opposite sides of the integrated fixing bracket 14, so that the laser emitted by the laser ruler 100 fixed to the laser ruler fixing bracket 131 can pass through the window fixing portion 121 and the window 21 in the window fixing portion 121, pass through the integrated fixing bracket 14, and finally reach the reflector 22.

[0054] like Figure 4 As shown, the laser ruler testing device of the embodiment of the present application, wherein the mounting base 12 further has a reference mirror assembly 24, the reference mirror assembly 24 includes a reference mirror 241 and a reference mirror mounting plate 242, the reference mirror 241 is connected to the side of the mounting base 12 close to the reflector 22 through the reference mirror mounting plate 242, and the reference mirror assembly 24 covers a partial opening of the window fixing portion 121.

[0055] In a specific implementation, the reference mirror assembly 24 is installed on the integrated fixing bracket 14 of the overall structure, and the reference mirror 241 is connected to the side of the integrated fixing bracket 14 close to the reflector 22 through the reference mirror mounting plate 242. Since the window 21 is fixed in the window fixing portion 121 of the hole-shaped structure, the reference mirror 241 can be arranged between the window 21 and the reflector 22, and the reference mirror assembly 24 covers a part of the opening of the window fixing portion 121, so that after the laser emitted by the laser ruler 100 passes through the window 21, a part of the laser can be irradiated on the reference mirror 241 as a reference light, and the other part of the laser can be irradiated on the reflector 22. Since the strokes of the two parts of the laser are different, there is a difference between the two parts. By analyzing this difference, the measurement accuracy of the laser ruler 100 installed on the mounting base 12 can be analyzed.

[0056] In another type of split mounting base 12 , the reference mirror assembly 24 is not provided, and the laser ruler 100 mounted on the mounting base 12 can directly obtain the measurement accuracy by analyzing the laser reflected by the reflector 22 .

[0057] like Figure 4 As shown, a laser ruler testing device according to an embodiment of the present application, wherein the window 21 includes a window body 211, a window mounting portion 212 and a sealing ring 213. The window body 211 is sealed and mounted in the window mounting portion 212 via two sealing rings 213 of annular structure. The two sealing rings 213 are respectively connected to two sides of the window body 211, and the window mounting portion 212 is mounted on the window fixing portion 121.

[0058] In specific implementation, the window body 211 is sealed and installed in the window mounting portion 212 through the sealing rings 213 on both sides thereof, thereby avoiding the appearance of a gap between the window body 211 and the window mounting portion 212, thereby affecting the consistency of the laser passing through, and further improving the test accuracy of the laser ruler 100. The window body 211 and the two sealing rings 213 are both installed in the window fixing portion 121 through the window mounting portion 212, and are fixed on the mounting seat 12. The window mounting portion 212 is detachably installed on the window mounting portion 212 by means of screw connection or clamping.

[0059] Specifically, Figure 2 As shown, the center of the window mounting portion 212 has a window through hole 214 , the sealing ring 213 is avoided in the window through hole 214 , and the window body 211 completely covers the window through hole 214 , so that the laser of the laser ruler 100 can pass through the window body 211 .

[0060] like Figures 1 to 3 As shown, the laser ruler testing device of the embodiment of the present application further includes a mounting substrate 15 and a plurality of connecting plates 16, wherein the plurality of connecting plates 16 are detachably connected to the edge of the mounting substrate 15, the testing mechanism carrier 11 is detachably mounted on the mounting substrate 15, and the mounting seat 12 is detachably mounted on the connecting plate 16.

[0061] In specific implementation, when the installation position of the mounting seat 12 needs to be adjusted, the mounting seat 12 can be disassembled from the connecting plate 16 and installed on other connecting plates 16 to adjust the installation position, or the connecting plate 16 can be disassembled from the mounting substrate 15 and installed on other fixed positions on the mounting substrate 15, so as to flexibly adjust the installation position of the mounting seat 12. In addition, when the test mechanism carrier 11 and the mounting seat 12 need to be inspected or repaired, they can also be disassembled from the mounting substrate 15 and the connecting plate 16 respectively, so as to facilitate separate inspection or repair. Therefore, the detachable connection of the various parts of the laser ruler test device enhances the adjustment flexibility of the overall device and facilitates the later replacement and repair of parts of the device.

[0062] like Figures 1 to 3 As shown, the laser ruler testing device of an embodiment of the present application, wherein the laser ruler testing device also includes an adjusting gasket 17, which is detachably installed between the connecting plate 16 and the mounting seat 12, and is used to adjust the height of the mounting seat 12 so that the height of the mounting seat 12 is adapted to its corresponding laser ruler 100.

[0063] In specific implementation, the setting of the adjustment gasket 17 can increase the overall height of the mounting seat 12 on the connecting plate 16, so that the laser ruler 100 installed thereon has sufficient installation space, and avoids the laser ruler 100 from interfering with other parts such as the connecting plate 16 after installation, which affects the installation of the laser ruler 100. When adjusting the height of the mounting seat 12, adjustment gaskets 17 of different thicknesses can be selected and installed between the connecting plate 16 and the mounting seat 12, so that the mounting seat 12 can reach the required height, or multiple adjustment gaskets 17 can be stacked to achieve the same height adjustment of the mounting seat 12.

[0064] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0065] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. A laser ruler testing device, characterized in that: include: A test mechanism carrier (11) is used to install a plurality of reflectors (22), wherein the reflectors (22) are used to reflect laser light from a laser ruler (100) to a receiving portion of the laser ruler (100); A plurality of mounting seats (12), wherein the plurality of mounting seats (12) are arranged at intervals on the outer peripheral side of the test mechanism carrier (11), each mounting seat (12) has the reflector (22) arranged corresponding to itself, each mounting seat (12) comprises a window fixing portion (121) for installing the window (21) and a laser ruler fixing portion for installing the laser ruler (100), the window (21) is used to enhance the intensity of the laser emitted by the laser ruler (100), and the window fixing portion (121) is located on a line connecting the corresponding reflector (22) and the laser ruler fixing portion; The window fixing portion (121) of the first part of the mounting seat (12) and the laser ruler fixing portion are separately arranged for measuring the laser ruler (100) of the first type of specifications; and the window fixing portion (121) of the second part of the mounting seat (12) and the laser ruler fixing portion are integrated for measuring the laser ruler (100) of the second type of specifications.

2. The laser ruler testing device according to claim 1, characterized in that: The first part of the mounting seat (12) comprises a laser ruler fixing bracket (131) and a window fixing bracket (132), wherein the window fixing bracket (132) is arranged between the laser ruler fixing bracket (131) and the corresponding reflector (22), the laser ruler fixing portion is arranged at the top of the laser ruler fixing bracket (131), and the window fixing portion (121) is arranged at the window fixing bracket (132), and the height of the top of the laser ruler fixing bracket (131) is lower than the setting height of the window fixing portion (121) on the window fixing bracket (132).

3. The laser ruler testing device according to claim 1, characterized in that: The second part of the mounting seat (12) comprises an integrated fixing bracket (14), the window fixing portion (121) and the laser ruler fixing portion are respectively arranged on different side walls of the integrated fixing bracket (14), and the window fixing portion (121) is arranged on the side wall of the integrated fixing bracket (14) close to the corresponding reflector (22), so that the window (21) is arranged between the reflector (22) and the laser ruler (100).

4. The laser ruler testing device according to claim 1, characterized in that: The plurality of mounting seats (12) are distributed on both sides of the test mechanism carrier (11) in a first direction (X), and the plurality of mounting seats (12) on each side are arranged at intervals along a second direction (Y); the test mechanism carrier (11) is provided with two reflectors (22) spaced apart along the first direction (X), the two reflectors (22) both extend along the second direction (Y), and the extension length of each reflector (22) is greater than or equal to the arrangement length of the plurality of mounting seats (12) on the corresponding side.

5. The laser ruler testing device according to claim 1, characterized in that: The test mechanism carrier (11) is also provided with a receiver (23) for receiving laser light from a standard laser ruler (110); the receiver (23) is mounted on the test mechanism carrier (11), and the height of a receiving end (231) of the receiver (23) is higher than the height of the reflector (22).

6. The laser ruler testing device according to claim 1, characterized in that: The window fixing portion (121) is a hole-shaped structure penetrating the mounting seat (12), the hole-shaped structure extending in a direction from the corresponding laser ruler fixing portion to the corresponding reflector (22), and the window (21) is fixed in the hole-shaped structure.

7. The laser ruler testing device according to claim 6, characterized in that: The second part of the mounting seat (12) further comprises a reference mirror assembly (24), wherein the reference mirror assembly (24) comprises a reference mirror (241) and a reference mirror mounting plate (242), wherein the reference mirror (241) is connected to a side surface of the mounting seat (12) close to the reflector (22) via the reference mirror mounting plate (242), and the reference mirror assembly (24) covers a portion of an opening of the window fixing portion (121).

8. The laser ruler testing device according to claim 1, characterized in that: The window (21) comprises a window body (211), a window mounting portion (212) and a sealing ring (213); the window body (211) is sealed and mounted in the window mounting portion (212) via two sealing rings (213) of annular structures; the two sealing rings (213) are respectively connected to two sides of the window body (211); and the window mounting portion (212) is mounted on the window fixing portion (121).

9. The laser ruler testing device according to claim 1, characterized in that: The laser ruler testing device further comprises a mounting substrate (15) and a plurality of connecting plates (16), wherein the plurality of connecting plates (16) are detachably connected to the edge of the mounting substrate (15), the testing mechanism carrier (11) is detachably mounted on the mounting substrate (15), and the mounting seat (12) is detachably mounted on the connecting plates (16).

10. The laser ruler testing device according to claim 9, characterized in that: The laser ruler testing device further comprises an adjusting gasket (17), which is detachably mounted between the connecting plate (16) and the mounting seat (12) and is used to adjust the height of the mounting seat (12) so that the height of the mounting seat (12) is adapted to the corresponding laser ruler (100).

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