Substrate loading machine adopting three-layer leveling structure

Abstract

The invention belongs to the technical field of semiconductor wafer processing and manufacturing, and particularly relates to a substrate loading machine adopting a three-layer leveling structure. The substrate loading machine comprises a substrate loading machine body and leveling structures, the leveling structures comprise the upper leveling structure, the middle leveling structure and the lower leveling structure, the upper leveling structure is used for fixing the upper portion of the substrate loading machine and adjusting the pitching angle of the substrate loading machine, and the middle leveling structure is used for leveling the substrate loading machine. The middle leveling structure is used for fixing the middle of the substrate loader and adjusting deflection and side inclination of the substrate loader; and the lower side leveling structure is used for supporting the lower part of the substrate loader and adjusting the mounting height position of the substrate loader. The position of the substrate loading machine is jointly mounted and adjusted through the upper, middle and lower three-stage structure, and the problem that the mounting strength of the substrate loading machine is insufficient is solved; deflection and side inclination of the substrate loader are adjusted by adjusting the structures on the two sides through the middle portion, mutual adjustment does not affect each other, the adjustment difficulty is lowered, and the adjustment range is widened.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor wafer processing and manufacturing, and in particular relates to a substrate loader adopting a three-layer leveling structure. Background Art

[0002] In the semiconductor field, substrates are used as carriers for carrying chips and packaging. Before being processed, they are placed in a sealed carrier box to ensure their cleanliness. The device used to open the carrier box so that the substrate can be taken out for processing is called a substrate loader.

[0003] During the substrate processing and production process, the substrate loader is installed on it as part of the loading port. In order to ensure that the loading box can be opened accurately and taken out and processed by subsequent equipment, the wafer loader needs to be accurately installed in the specified position. For this purpose, a corresponding installation adjustment mechanism needs to be formulated to ensure the accuracy of the substrate loader installation position.

[0004] The existing substrate loader installation adjustment mechanism sets all adjustment structures on the upper part of the machine platform of the substrate loader, which affects the installation strength of the whole machine, and the adjustment amount of the machine platform tilt is small and the adjustment is difficult. Summary of the invention

[0005] In view of the above problems, an object of the present invention is to provide a substrate loader adopting a three-layer leveling structure.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] The present invention provides a substrate loader adopting a three-layer leveling structure, comprising a substrate loader main body and a leveling structure, wherein the substrate loader main body is used to complete the opening of a substrate loading box, and the leveling structure is used to install and level the substrate loader main body, and the leveling structure comprises an upper leveling structure, a middle leveling structure and a lower leveling structure, wherein the upper leveling structure is used to fix the upper part of the substrate loader main body and adjust the pitch angle of the substrate loader main body, the middle leveling structure is used to fix the middle part of the substrate loader main body and adjust the deflection and roll of the substrate loader main body; and the lower leveling structure is used to support the lower part of the substrate loader main body and adjust the installation height position of the substrate loader main body.

[0008] The intermediate leveling structure includes a left adjustment module and a right adjustment module, wherein the left adjustment module is arranged on the left side of the substrate loader body, and the left adjustment module is used for deflection adjustment of the substrate loader body; the right adjustment module is arranged on the right side of the substrate loader body, and the right adjustment module is used for roll adjustment of the substrate loader body.

[0009] The left adjustment module includes a left connecting plate, a left fixing screw, a left mounting block and a left adjustment connecting piece, wherein the left connecting plate and the left mounting block are respectively mounted on the substrate loader body and the mounting device, a vertical waist hole is provided on the left connecting plate in the vertical direction, the left adjustment connecting piece passes through the vertical waist hole on the left connecting plate and is connected to the left mounting block, and the distance between the left connecting plate and the left mounting block is adjusted by the left adjustment connecting piece.

[0010] The left adjustment connecting piece includes a left fixing screw, a left adjusting bolt and a left fixing nut, wherein the left fixing screw passes through the vertical waist hole on the left connecting plate and is connected to one end of the left adjusting bolt, and the other end of the left adjusting bolt is threadedly connected to the left mounting block and is locked by the left fixing nut.

[0011] The right side adjustment module includes a right connecting plate, a right top block assembly, a right adjusting bolt, a right mounting block and a right fixing nut, wherein the right connecting plate and the right mounting block are respectively mounted on the substrate loader body and the mounting device, the two ends of the right top block assembly are respectively detachably connected to the right connecting plate and the right mounting block, the right adjusting bolt is radially threadedly connected to the right top block assembly, and the end of the right adjusting bolt abuts against the right connecting plate; after the right adjusting bolt is rotated to adjust the roll of the substrate loader body, the right adjusting bolt is locked by the right fixing nut.

[0012] The right top block assembly includes a right fixing screw, a right top block, a right pressure block and a right fastening screw, wherein the right fixing screw passes through the right connecting plate and is connected to one end of the right top block, the other end of the right top block and the right pressure block cooperate to clamp the right mounting block, and the right fastening screw is used for locking between the other end of the right top block and the right pressure block.

[0013] The upper leveling structure includes an upper connecting plate, an upper fixing screw, an upper adjusting bolt and an upper fixing nut, wherein the upper connecting plate is connected to the substrate loader body, and a vertical waist-shaped hole is provided on the upper connecting plate in the vertical direction, one end of the upper adjusting bolt is connected to the mounting device, the upper fixing screw passes through the vertical waist-shaped hole on the upper connecting plate, and the upper fixing screw is threadedly connected to the other end of the upper adjusting bolt, and the pitch adjustment of the substrate loader body is performed by rotating the upper fixing screw.

[0014] The lower side leveling structure includes a lower side main adjustment structure and two lower side auxiliary mounting structures, wherein the lower side main adjustment structure is arranged on the lower side of the mounting device, and the lower side main adjustment structure is used to adjust the height direction position of the substrate loader body; the two lower side auxiliary mounting structures are arranged on both sides of the bottom of the mounting device, and are both connected to the lower side of the substrate loader body.

[0015] The main adjustment structure on the lower side includes a lower connecting plate, a lower mounting block, a lower adjusting bolt, a lower adjusting block, a lower matching block and a lower fixing nut, wherein the lower connecting plate is installed at the bottom of the mounting device, the lower mounting block and the lower adjusting block are installed in the middle of the lower connecting plate, and the lower adjusting block is located above the lower mounting block, the lower adjusting bolt passes through the threaded hole on the lower mounting block and the end thereof abuts against the lower adjusting block, vertical waist holes are provided on both sides of the lower adjusting block in the vertical direction, the locking screw passes through the vertical waist holes and is connected to the mounting device, after the lower adjusting bolt is rotated to adjust the height position of the lower adjusting block, the lower adjusting bolt is locked by the lower fixing nut; the lower matching block is arranged in the middle position of the lower side of the substrate loader body, and the lower matching block falls on the lower adjusting block.

[0016] The lower auxiliary mounting structure comprises a lower connecting block, a slot block and a rotating column, wherein the lower connecting block is mounted on the lower connecting plate, the slot block is mounted on the substrate loader body, and the slot block is hinged to the lower connecting block through the rotating column.

[0017] The advantages and beneficial effects of the present invention are as follows: the present invention provides a substrate loader adopting a three-layer leveling structure, which solves the problem of insufficient installation strength of the substrate loader by jointly installing and adjusting the position of the substrate loader through the upper, middle and lower three-level structures; the machine platform inclination and deflection are adjusted on both sides of the middle leveling structure respectively, and the adjustments do not affect each other, thereby reducing the difficulty of adjustment; and the adjustment method is the depth of screwing the bolts, which solves the problem of small adjustment range. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a substrate loader adopting a three-layer leveling structure of the present invention;

[0019] Figure 2 is a schematic diagram of the intermediate leveling structure of the present invention;

[0020] Figure 3 It is a structural schematic diagram of the left adjustment module of the present invention;

[0021] Figure 4 It is a structural schematic diagram of the right side adjustment module of the present invention;

[0022] Figure 5 It is an axonometric view of the right adjustment module of the present invention;

[0023] Figure 6 is a schematic diagram of the upper leveling structure of the present invention;

[0024] Figure 7 is a schematic diagram of the lower leveling structure of the present invention;

[0025] Figure 8 It is a schematic diagram of the lower auxiliary installation structure of the present invention.

[0026] In the figure: 1-substrate loader body, 2-upper leveling structure, 21-upper connecting plate, 22-upper fixing screw, 23-upper adjusting bolt, 24-upper fixing nut, 3-middle leveling structure, 4-lower leveling structure, 5-installation equipment, 6-left adjustment module, 61-left connecting plate, 62-left fixing screw, 63-left adjusting bolt, 64-left mounting block, 65-left fixing nut, 7-right adjustment module, 71-right connecting plate, 72-right fixing screw, 73-right top block, 74-right adjusting bolt, 75-right pressure block, 76-right fastening screw, 77-right mounting block, 78-right fixing nut, 8-lower main adjustment structure, 81-lower connecting plate, 82-lower mounting block, 83-lower adjusting bolt, 84-lower adjusting block, 85-lower matching block, 86-lower fixing nut, 9-lower auxiliary mounting structure, 91-lower connecting block, 92-slot block, 93-rotating column. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0028] See also Figure 1 As shown, the present invention provides a substrate loader adopting a three-layer leveling structure, including a substrate loader body and a leveling structure, wherein the substrate loader body is used to complete the opening of the substrate loading box, and the leveling structure is used for the installation and leveling of the substrate loader body 1. The substrate loader installation and leveling mechanism includes an upper leveling structure 2, a middle leveling structure 3 and a lower leveling structure 4, wherein the upper leveling structure 2 is used to fix the upper part of the substrate loader body 1 and adjust the pitch angle of the substrate loader body 1, the middle leveling structure 3 is used to fix the middle part of the substrate loader body 1 and adjust the deflection and roll of the substrate loader body 1; the lower leveling structure 4 is used to support the lower part of the substrate loader body 1 and adjust the installation height position of the substrate loader body 1.

[0029] See also Figure 2 As shown, in an embodiment of the present invention, the middle leveling structure 3 includes a left adjustment module 6 and a right adjustment module 7, wherein the left adjustment module 6 is arranged on the left side of the middle part of the substrate loader body 1, and the left adjustment module 6 is used for the deflection adjustment of the substrate loader body 1; the right adjustment module 7 is arranged on the right side of the middle part of the substrate loader body 1, and the right adjustment module 7 is used for the roll adjustment of the substrate loader body 1, and when one side is adjusted, the other side assists in positioning.

[0030] See also Figure 3As shown, in an embodiment of the present invention, the left adjustment module 6 includes a left connecting plate 61, a left fixing screw 62, a left mounting block 64 and a left adjustment connector, wherein the left connecting plate 61 and the left mounting block 64 are respectively mounted on the substrate loader body 1 and the mounting device 5, and a vertical waist hole is provided on the left connecting plate 61 along the vertical direction. The left adjustment connector passes through the vertical waist hole on the left connecting plate 61 and is connected to the left mounting block 64, and the distance between the left connecting plate 61 and the left mounting block 64 is adjusted by the left adjustment connector.

[0031] In an embodiment of the present invention, the left adjustment connecting member includes a left fixing screw 62, a left adjusting bolt 63 and a left fixing nut 65, wherein the left fixing screw 62 passes through the vertical waist hole on the left connecting plate 61 and is connected to one end of the left adjusting bolt 63, and the other end of the left adjusting bolt 63 is threadedly connected to the left mounting block 64 and is locked by the left fixing nut 65.

[0032] See also Figure 4 , Figure 5 As shown, in the embodiment of the present invention, the right adjustment module 7 includes a right connecting plate 71, a right top block assembly, a right adjusting bolt 74, a right mounting block 77 and a right fixing nut 78, wherein the right connecting plate 71 and the right mounting block 77 are respectively mounted on the substrate loader body 1 and the mounting device 5, and the two ends of the right top block assembly are respectively detachably connected to the right connecting plate 71 and the right mounting block 77, the right adjusting bolt 74 is radially threadedly connected to the right top block assembly, and the end of the right adjusting bolt 74 abuts against the right connecting plate 71; after rotating the right adjusting bolt 74 to adjust the roll of the substrate loader body 1, the right adjusting bolt 74 is locked by the right fixing nut 78.

[0033] In an embodiment of the present invention, the right top block assembly includes a right fixing screw 72, a right top block 73, a right pressure block 75 and a right fastening screw 76, wherein the right fixing screw 72 passes through the right connecting plate 71 and is connected to one end of the right top block 73, the other end of the right top block 73 and the right pressure block 75 cooperate to clamp the right mounting block 77, and the right fastening screw 76 is used for locking between the other end of the right top block 73 and the right pressure block 75.

[0034] Furthermore, a semicircular groove is provided on the other end of the right top block 73 and the right pressing block 75 , and the two are combined and fixedly connected to the right mounting block 77 .

[0035] Specifically, when adjusting the deflection of the substrate loader body 1, the left adjustment module 6 is mainly used to screw the left adjustment bolt 63 to adjust the deflection angle of the substrate loader body 1; the right adjustment module 7 is used as a supplement, and the right pressure block 75 is used to clamp the right mounting block 77 to ensure that the gaps on both sides of the substrate loader body 1 are consistent, thereby completing the adjusted positioning.

[0036] In addition, when adjusting the roll of the substrate loader body 1, the right adjustment module 7 is mainly used to screw the right adjustment bolt 74 to adjust the single-side height of the substrate loader body 1; the left adjustment module 6 is used as a supplement to tighten the left fixing screw 62 to complete the adjusted positioning.

[0037] See also Figure 6 As shown, in the embodiment of the present invention, there is one upper leveling structure 2 on each of the left and right sides of the substrate loader body 1. The upper leveling structure 2 includes an upper connecting plate 21, an upper fixing screw 22, an upper adjusting bolt 23 and an upper fixing nut 24, wherein the upper connecting plate 21 is connected to the substrate loader body 1, and a vertical waist-shaped hole is provided on the upper connecting plate 21 in the vertical direction, one end of the upper adjusting bolt 23 is connected to the mounting device 5, and is locked by the upper fixing nut 24, the upper fixing screw 22 passes through the vertical waist-shaped hole on the upper connecting plate 21, and the upper fixing screw 22 is threadedly connected to the other end of the upper adjusting bolt 23, and the pitch adjustment of the substrate loader body 1 is performed by rotating the upper fixing screw 22.

[0038] See also Figure 7 As shown, in an embodiment of the present invention, the lower side leveling structure 4 includes a lower side main adjustment structure 8 and two lower side auxiliary mounting structures 9, wherein the lower side main adjustment structure 8 is arranged on the lower side of the mounting device 5, and the lower side main adjustment structure 8 is used to adjust the height direction position of the substrate loader body 1; the two lower side auxiliary mounting structures 9 are arranged on both sides of the bottom of the mounting device 5, and are both connected to the lower side of the substrate loader body 1.

[0039] In an embodiment of the present invention, the lower main adjustment structure 8 includes a lower connecting plate 81, a lower mounting block 82, a lower adjusting bolt 83, a lower adjusting block 84, a lower matching block 85 and a lower fixing nut 86, wherein the lower connecting plate 81 is installed at the bottom of the mounting device 5, the lower mounting block 82 and the lower adjusting block 84 are installed in the middle of the lower connecting plate 81, and the lower adjusting block 84 is located above the lower mounting block 82, the lower adjusting bolt 83 passes through the threaded hole on the lower mounting block 82 and the end thereof abuts against the lower adjusting block 84, vertical waist holes are provided on both sides of the lower adjusting block 84 in the vertical direction, the locking screws pass through the vertical waist holes and are connected to the mounting device 5, after the lower adjusting bolt 83 is rotated to adjust the height position of the lower adjusting block 84, the lower adjusting bolt 83 is locked by the lower fixing nut 86; the lower matching block 85 is arranged in the middle position of the lower side of the substrate loader body 1, and the lower matching block 85 falls on the lower adjusting block 84.

[0040] Furthermore, a groove is provided on the lower adjusting block 84 , and the lower matching block 85 is a disc-shaped structure and contacts and matches with the groove in the lower adjusting block 84 .

[0041] See also Figure 8As shown, in an embodiment of the present invention, the lower auxiliary mounting structure 9 includes a lower connecting block 91, a groove block 92 and a rotating column 93, wherein the lower connecting block 91 is mounted on the lower connecting plate 81, the groove block 92 is mounted on the substrate loader body 1, and the groove block 92 is connected to the lower connecting block 91 through the rotating column 93.

[0042] Furthermore, a U-shaped groove is provided on the groove block 92, and a rotating column 93 is provided on the lower connecting block 91. The two ends of the rotating column 93 are rotatably connected to the two ends of the groove block 92 respectively. The rotating column 93 can rotate in the U-shaped groove of the groove block 92, so that the entire substrate loader body 1 has a certain degree of freedom of pitch rotation, making it easy for the substrate loader body 1 to adjust the pitch angle.

[0043] The present invention provides a substrate loader installation and leveling mechanism, the working principle of which is:

[0044] The position adjustment sequence of the substrate loader body 1 is: height adjustment, deflection adjustment, roll adjustment, pitch adjustment and whole machine fixation.

[0045] When the position of the substrate loader body 1 is adjusted after being installed on the installation device 5, the height is adjusted first, and the lower adjustment bolt 83 in the lower main adjustment structure 8 is screwed to lift the lower adjustment block 84, the lower matching block 85 and the substrate loader body 1 connected to the lower matching block 85, thereby adjusting the height of the substrate loader body 1. After the height adjustment is completed, the lower fixing nut 86 is tightened.

[0046] Then adjust the deflection angle of the substrate loader body 1, loosen the fixing bolt 22 and the upper fixing nut 24 of the upper leveling structure 2, loosen the left fixing screw 62 and the left fixing nut 65 of the left adjustment module 6, and the right fixing screw 72 of the right adjustment module 7. Screw the left adjustment bolt 63 in the left adjustment module 6 to drive the left connecting plate 61 and the substrate loader body 1 to move forward and backward, and then adjust the horizontal deflection of the substrate loader body 1 by controlling the distance between the substrate loader body 1 and the installation device 5; at the same time, the right pressing block 75 and the right top block 73 in the right adjustment module 7 clamp the right installation block 77 to ensure that the distance between the substrate loader body 1 and the installation device 5 is consistent. After the deflection adjustment is completed, tighten the left fixing nut 65 and the right fixing screw 72.

[0047] When adjusting the roll of the substrate loader body 1, loosen the fixing bolt 22 and the upper fixing nut 24 of the upper leveling structure 2, loosen the left fixing screw 62 of the left adjustment module 6 and the right fixing screw 72 of the right adjustment module 7, screw the right adjusting bolt 74 in the right adjustment module 7, lift the right connecting plate 71 and the substrate loader body 1, and move the right side of the substrate loader body 1 in the height direction to adjust the roll of the substrate loader body 1; after the roll adjustment is completed, screw the left fixing screw 62 and the right fixing screw 72.

[0048] Finally, perform a secondary pitch adjustment of the whole machine and fix the substrate loader body 1, loosen the fixing bolt 22 and the upper fixing nut 24 of the upper leveling structure 2, screw the upper adjustment bolt 23, control the distance between the substrate loader body 1 and the mounting device 5, and adjust the pitch angle of the substrate loader body 1. After the pitch adjustment is completed, tighten the upper fixing screw 23 and the upper fixing nut 24 to complete the fixation of the substrate loader body 1.

[0049] The present invention provides a substrate loader installation leveling mechanism, which adjusts the installation substrate loader body 1 through the upper, middle and lower three-part structure, realizes multi-state adjustment of the height, pitch, yaw and roll of the substrate loader body 1, and ensures the installation strength of the whole machine. The two sides of the middle structure respectively adjust the roll and yaw of the whole machine by screwing bolts, with high adjustment accuracy, while the other side assists in positioning, and the two adjustments do not affect each other. The middle part of the lower leveling structure 4 limits the position of the substrate loader body 1 through a groove structure, and the two side parts cooperate with the lower connecting block through a U-shaped groove, so that the whole machine has a certain degree of freedom of pitch rotation. While the entire lower leveling structure 4 limits the position of the whole machine, it retains the degree of freedom of pitch.

[0050] The present invention realizes the all-round adjustment of the height, deflection, roll and pitch state of the substrate loader body 1, ensuring that the installation position of the substrate loader body 1 is accurate and the installation strength of the whole machine is high; the two sides of the middle leveling structure respectively adjust the deflection and roll of the whole machine, the structure is compact and occupies a small space; the adjustment structure is all through the method of screwing bolts, with high adjustment accuracy and large adjustment range; the adjustment of the adjustment structure between different positions is realized by a part of the structure, which is independent of each other and unaffected, reducing the difficulty of adjustment and the risk of wrong operation. The lower side leveling structure 4 only limits the installation position of the whole machine, and does not directly fix the whole machine, so that when the upper side and the middle structure are adjusted, the whole machine will not be deformed and dislocated by torsional force.

[0051] The above description is only an embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, expansion, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims

1. A substrate loader adopting a three-layer leveling structure, comprising a substrate loader body and a leveling structure, wherein the substrate loader body is used to complete the opening of the substrate loading box, and the leveling structure is used for the installation and leveling of the substrate loader body (1), characterized in that: The leveling structure comprises an upper leveling structure (2), a middle leveling structure (3) and a lower leveling structure (4), wherein the upper leveling structure (2) is used to fix the upper part of the substrate loader body (1) and adjust the pitch angle of the substrate loader body (1), the middle leveling structure (3) is used to fix the middle part of the substrate loader body (1) and adjust the deflection and roll of the substrate loader body (1); and the lower leveling structure (4) is used to support the lower part of the substrate loader body (1) and adjust the installation height position of the substrate loader body (1).

2. The substrate loader with a three-layer leveling structure according to claim 1, characterized in that: The intermediate leveling structure (3) comprises a left adjustment module (6) and a right adjustment module (7), wherein the left adjustment module (6) is arranged on the left side of the substrate loader body (1), and the left adjustment module (6) is used for adjusting the deflection of the substrate loader body (1); and the right adjustment module (7) is arranged on the right side of the substrate loader body (1), and the right adjustment module (7) is used for adjusting the roll of the substrate loader body (1).

3. The substrate loader with a three-layer leveling structure according to claim 2, characterized in that: The left adjustment module (6) comprises a left connecting plate (61), a left fixing screw (62), a left mounting block (64) and a left adjustment connecting piece, wherein the left connecting plate (61) and the left mounting block (64) are respectively mounted on the substrate loader body (1) and the mounting device (5), a vertical waist hole is provided on the left connecting plate (61) along the vertical direction, the left adjustment connecting piece passes through the vertical waist hole on the left connecting plate (61) and is connected to the left mounting block (64), and the distance between the left connecting plate (61) and the left mounting block (64) is adjusted by the left adjustment connecting piece.

4. The substrate loader with a three-layer leveling structure according to claim 3, characterized in that: The left adjustment connecting member comprises a left fixing screw (62), a left adjusting bolt (63) and a left fixing nut (65), wherein the left fixing screw (62) passes through the vertical waist hole on the left connecting plate (61) and is connected to one end of the left adjusting bolt (63), and the other end of the left adjusting bolt (63) is threadedly connected to the left mounting block (64) and is locked by the left fixing nut (65).

5. The substrate loader using a three-layer leveling structure according to claim 2, characterized in that: The right side adjustment module (7) comprises a right connecting plate (71), a right top block assembly, a right adjusting bolt (74), a right mounting block (77) and a right fixing nut (78), wherein the right connecting plate (71) and the right mounting block (77) are respectively mounted on the substrate loader body (1) and the mounting device (5), two ends of the right top block assembly are respectively detachably connected to the right connecting plate (71) and the right mounting block (77), the right adjusting bolt (74) is threadedly connected to the right top block assembly along a radial direction, and the end of the right adjusting bolt (74) abuts against the right connecting plate (71); after the right adjusting bolt (74) is rotated to adjust the roll of the substrate loader body (1), the right adjusting bolt (74) is locked by the right fixing nut (78).

6. The substrate loader using a three-layer leveling structure according to claim 5, characterized in that: The right top block assembly comprises a right fixing screw (72), a right top block (73), a right pressure block (75) and a right fastening screw (76), wherein the right fixing screw (72) passes through the right connecting plate (71) and is connected to one end of the right top block (73), the other end of the right top block (73) and the right pressure block (75) cooperate to clamp the right mounting block (77), and the right fastening screw (76) is used for locking the other end of the right top block (73) and the right pressure block (75).

7. The substrate loader using a three-layer leveling structure according to claim 1, characterized in that: The upper leveling structure (2) comprises an upper connecting plate (21), an upper fixing screw (22), an upper adjusting bolt (23) and an upper fixing nut (24), wherein the upper connecting plate (21) is connected to the substrate loader body (1), and a vertical waist-shaped hole is provided on the upper connecting plate (21) in the vertical direction, one end of the upper adjusting bolt (23) is connected to the mounting device (5), the upper fixing screw (22) passes through the vertical waist-shaped hole on the upper connecting plate (21), and the upper fixing screw (22) is threadedly connected to the other end of the upper adjusting bolt (23), and the pitch adjustment of the substrate loader body (1) is performed by rotating the upper fixing screw (22).

8. The substrate loader with a three-layer leveling structure according to claim 1, characterized in that: The lower side leveling structure (4) comprises a lower side main adjustment structure (8) and two lower side auxiliary mounting structures (9), wherein the lower side main adjustment structure (8) is arranged on the lower side of the mounting device (5), and the lower side main adjustment structure (8) is used to adjust the height direction position of the substrate loader body (1); the two lower side auxiliary mounting structures (9) are arranged on both sides of the bottom of the mounting device (5), and are both connected to the lower side of the substrate loader body (1).

9. The substrate loader using a three-layer leveling structure according to claim 8, characterized in that: The lower main adjustment structure (8) comprises a lower connecting plate (81), a lower mounting block (82), a lower adjusting bolt (83), a lower adjusting block (84), a lower matching block (85) and a lower fixing nut (86), wherein the lower connecting plate (81) is mounted on the bottom of the mounting device (5), the lower mounting block (82) and the lower adjusting block (84) are mounted in the middle of the lower connecting plate (81), and the lower adjusting block (84) is located above the lower mounting block (82), and the lower adjusting bolt (83) passes through the lower mounting block (82). ) and the end thereof abuts against the lower adjustment block (84); vertical waist holes are provided on both sides of the lower adjustment block (84) in the vertical direction; locking screws pass through the vertical waist holes and are connected to the mounting device (5); after the lower adjustment bolt (83) is rotated to adjust the height position of the lower adjustment block (84), the lower adjustment bolt (83) is locked by the lower fixing nut (86); a lower matching block (85) is arranged at the middle position of the lower side of the substrate loader body (1), and the lower matching block (85) falls on the lower adjustment block (84).

10. The substrate loader using a three-layer leveling structure according to claim 9, characterized in that: The lower auxiliary mounting structure (9) comprises a lower connecting block (91), a slot block (92) and a rotating column (93), wherein the lower connecting block (91) is mounted on the lower connecting plate (81), the slot block (92) is mounted on the substrate loader body (1), and the slot block (92) is hinged to the lower connecting block (91) via the rotating column (93).

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