Hybrid energy storage pulse power supply circuit

Abstract

The invention relates to the technical field of semiconductors, in particular to a hybrid energy storage pulse power supply circuit which comprises an energy storage capacitor, a boosting capacitor, an energy storage inductor, a transformer switch and a transformer. Wherein the energy storage capacitor, the energy storage inductor and the boost capacitor are connected in series to form a voltage multiplication loop; the boosting capacitor, the transformer switch and the primary coil of the transformer are connected in series to form a pulse forming loop; the conduction time of the transformer switch is longer than the discharge time of the boost capacitor. By adopting the scheme, the problem that the highest repetition frequency of the pulse power supply cannot be further improved due to the fact that the single pulse period time of the existing pulse power supply is too long and cannot be further shortened can be solved.

Description

Technical Field

[0001] The present disclosure relates to the technical field of power supply, and in particular to a hybrid energy storage pulse power supply circuit. Background Art

[0002] All-solid-state pulse power circuits have been widely used in scientific research and industrial power circuits for excimer lasers due to their high efficiency and stability. For all-solid-state pulse power circuits, the traditional energy storage method is based on capacitive energy storage (CES), and in each CLC circuit, the energy stored in the capacitor is transferred to the next capacitor step by step. However, in the all-solid-state pulse power circuit, the energy transfer time of the voltage multiplication circuit occupies most of the time of a single pulse cycle of the power supply, making the single pulse cycle time too long to be further shortened, which makes it impossible to further increase the maximum repetition frequency of the pulse power supply. Summary of the invention

[0003] The present invention provides a hybrid energy storage pulse power supply circuit, the main purpose of which is to solve the problem that the single pulse cycle time of the existing pulse power supply is too long and cannot be further shortened, thereby resulting in the inability to further increase the maximum repetition frequency of the pulse power supply.

[0004] According to one aspect of the present disclosure, a hybrid energy storage pulse power supply circuit is provided, comprising: an energy storage capacitor, a boost capacitor, an energy storage inductor, a transformer switch and a transformer; wherein:

[0005] The energy storage capacitor, the energy storage inductor, and the boost capacitor are connected in series to form a voltage multiplication circuit;

[0006] The boost capacitor, the transformer switch, and the primary coil of the transformer are connected in series to form a pulse forming loop;

[0007] The conduction time of the transformer switch is greater than the discharge time of the boost capacitor.

[0008] Optionally, in one embodiment of the present disclosure, the hybrid energy storage pulse power supply circuit further includes a boost diode; wherein,

[0009] The energy storage capacitor, the energy storage inductor, the boost capacitor and the boost diode are connected in series to form the voltage multiplication circuit.

[0010] Optionally, in one embodiment of the present disclosure, the hybrid energy storage pulse power supply circuit further includes a magnetic compression module and a discharge module; wherein,

[0011] The secondary coil of the transformer is connected to the input end of the magnetic compression module to form a magnetic compression loop;

[0012] The output end of the magnetic compression module is connected to the discharge module.

[0013] Optionally, in one embodiment of the present disclosure, any single pulse cycle of the hybrid energy storage pulse power supply circuit in repetitive frequency operation is composed of the conduction time of the transformer switch and the charging time of the boost capacitor.

[0014] Optionally, in one embodiment of the present disclosure, in the voltage enhancement mode, any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetitive frequency operation includes the following three stages:

[0015] The first stage: the transformer switch is in the on state, the boost capacitor forms a loop through the transformer, and the boost capacitor is discharged from the power storage state to the empty state;

[0016] The second stage: the boost capacitor is short-circuited by the primary leakage inductance, the energy storage capacitor, the energy storage inductor and the primary leakage inductance form a first charging loop, and the energy storage capacitor charges the energy storage inductor through the first charging loop until the transformer switch is switched from the on state to the off state;

[0017] The third stage: the transformer switch remains in the closed state, the energy storage capacitor, the energy storage inductor and the boost capacitor form a second charging circuit, and the energy storage capacitor and the energy storage inductor charge the boost capacitor through the second charging circuit until the boost capacitor is in the energy storage state.

[0018] Optionally, in one embodiment of the present disclosure, the operating mode of the hybrid energy storage pulse power supply circuit includes a voltage enhancement mode; wherein,

[0019] In the voltage enhancement mode, in any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetitive frequency operation, after the boost capacitor is charged to the peak voltage, it enters the next pulse cycle, wherein the peak voltage is greater than the voltage threshold, and the voltage threshold is the highest voltage value to which the boost capacitor is charged when the conduction time of the transformer switch is equal to the discharge time of the boost capacitor.

[0020] Optionally, in one embodiment of the present disclosure, the operating mode of the hybrid energy storage pulse power supply circuit includes a repetition frequency enhancement mode; wherein,

[0021] In the repetition frequency enhancement mode, in any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetition frequency operation, after the boost capacitor is charged to the voltage threshold, it enters the next pulse cycle, wherein the charging time of the boost capacitor is less than the charging time threshold, the voltage threshold is the highest voltage value to which the boost capacitor is charged when the on-time of the transformer switch is equal to the discharge time of the boost capacitor, and the charging time threshold is the time required for the boost capacitor to be charged to the voltage threshold when the on-time of the transformer switch is equal to the discharge time of the boost capacitor.

[0022] Optionally, in one embodiment of the present disclosure, the voltage threshold is not greater than 2 kV, and the peak voltage is greater than 2 kV.

[0023] In summary, the hybrid energy storage pulse power supply circuit provided by the embodiment of the present disclosure removes the boost switch tube in the existing voltage multiplication circuit and extends the conduction time of the transformer switch from the discharge time of the boost capacitor to a time greater than the discharge time of the boost capacitor, so that after the boost capacitor is discharged, the small inductance circuit formed by the primary leakage inductance of the transformer can be used to provide a charging path for the energy storage inductor, thereby realizing the conversion of the voltage multiplication circuit circuit from CES to hybrid energy storage (hybrid energy storage, HES). When outputting voltage pulses of the same amplitude and width, the maximum repetition frequency of the pulse power supply and pulse discharge can be further improved by reasonably adjusting the conduction time of the transformer switch, and ultimately the average power of the excimer laser can be improved.

[0024] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0026] Figure 1 A schematic diagram of the structure of a fully solid-state pulse power supply circuit provided by the prior art;

[0027] Figure 2 A schematic diagram of the working conditions of each sub-circuit in a fully solid-state pulse power supply circuit provided by the prior art;

[0028] Figure 3 A circuit schematic diagram and simulation result diagram of using a traditional CES and a specific HES for a CLC loop respectively provided by an embodiment of the present disclosure;

[0029] Figure 4A charging voltage waveform diagram of a boost capacitor when a CLC circuit uses a hybrid energy storage HES with different energy storage inductor initial currents provided by an embodiment of the present disclosure;

[0030] Figure 5 A schematic diagram of the principle of a hybrid energy storage pulse power supply circuit provided by an embodiment of the present disclosure;

[0031] Figure 6 A schematic diagram of test results of a HES-based all-solid-state pulse power supply provided in an embodiment of the present disclosure;

[0032] Figure 7 A statistical result diagram of key parameters under different conduction times provided by an embodiment of the present disclosure;

[0033] Figure 8 A schematic diagram of a voltage enhancement mode operation provided by an embodiment of the present disclosure;

[0034] Fig. 9 A result simulation prediction diagram of a voltage enhancement mode provided by an embodiment of the present disclosure;

[0035] Fig.10 A schematic diagram of a repetition frequency enhancement mode provided by an embodiment of the present disclosure;

[0036] Fig.11 This is a diagram of experimental and simulation results of a repetition rate enhancement mode provided in an embodiment of the present disclosure. DETAILED DESCRIPTION

[0037] Some embodiments of the present disclosure will be described in detail here, and examples thereof are shown in the accompanying drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. Various changes, modifications and equivalents of the structures described herein will become apparent after understanding the present disclosure. For example, the connection relationships of the structures described herein are merely examples and are not limited to those connection relationships set forth herein, but can be changed as becomes apparent after understanding the present disclosure, except for connections that must be made with specific connection relationships. In addition, for clarity and brevity, descriptions of features known in the art may be omitted.

[0038] The embodiments described in some embodiments of the present disclosure below do not represent all embodiments consistent with the present disclosure. Instead, they are merely examples of structures consistent with some aspects of the present disclosure as detailed in the appended claims.

[0039] Excimer lasers (such as Argon fluoride ArF and Krypton fluoride KrF lasers) are gas discharge pumped lasers that can generate laser pulses in the deep ultraviolet band. Due to the high average power characteristics of excimer lasers in the deep ultraviolet (DUV) band, they have been widely used in semiconductor lithography, micro-nano material processing and ophthalmic surgery. The pulse power supply used to excite the excimer laser usually needs to continuously and repeatedly output a power density of 1MW / cm 3 The above voltage pulses with a pulse rise time of less than 100ns and a repetition frequency of up to kHz level. In addition, the circuit topology is also required to have high reliability and operating life. Since the excimer laser is a discharge-pumped pulse laser, the repetition frequency of the output laser pulse is exactly the same as the frequency of the voltage pulse excitation generated by the pulse power supply. When the pulse power supply runs at the highest continuous repetition frequency, the excimer laser can output at the highest average power. Therefore, the output power of the excimer laser light source is largely determined by the highest repetition frequency of the excitation pulse power supply. As the demand for lithography light source power in semiconductor processes grows, increasing the maximum repetition frequency of pulse power supplies has become a key technical challenge.

[0040] As the name implies, the all-solid-state pulse power supply circuit is a pulse circuit that uses all solid-state switches (semiconductor switches and magnetic switches). Due to the advantages of solid-state switches such as long life and high repetition rate adaptability, it has been widely used in scientific research and commercial excimer lasers. Figure 1 A schematic diagram of the structure of a fully solid-state pulse power supply circuit provided by the prior art; Figure 1 As shown, this type of power supply circuit is usually mainly composed of three key sub-circuits: voltage multiplication, pulse formation, and magnetic compression, and outputs voltage pulses to the discharge load through compact transmission.

[0041] exist Figure 1 In the circuit topology shown, the repetition frequency f of the power supply is max The complete time period t from a single pulse from DC voltage input to fast pulse output tot Determine, where the repetition frequency f max With t tot is a reciprocal relationship, and t tot =t d +t ch +t dis , t d is the dead time of the semiconductor switch (IGBT is used as an example below to replace the semiconductor switch), t ch is the charging time of boost capacitor C1, t dis is the discharge time of boost capacitor C1.

[0042] When running at the highest repetition rate, Figure 1The operating conditions of each sub-circuit in the circuit shown can be described as follows: Figure 2 The schematic diagram is shown. Figure 2 As shown, in a single pulse cycle, the energy storage capacitor C0 is first charged to the set value U by the DC power supply. dc When controlling the boost switch IGBT VM The PWM waveform rises to a high level, boosting the switch tube IGBT VM is placed in the on state, at which time the energy storage capacitor C0 charges the boost capacitor C1, and the duration of this process is defined as t ch , t ch Usually lasts 200 to 400us. ch At the end, the boost capacitor C1 reaches 2U dc The voltage of the energy storage capacitor C0 is U C0 Basically keep in U dc remains unchanged (the capacitance of the energy storage capacitor C0 >> the capacitance of the boost capacitor C1). Next, the IGBT dead time t d Then, the control transformer switch IGBT PT The PWM waveform rises to a high level, and the transformer switch tube IGBT PT is placed in the on state, and the boost capacitor C1 begins to discharge. The discharge process of the boost capacitor C1 can be divided into two sub-processes, with a total time of t dis , t dis Usually less than 10us. Then the magnetic compression process is started, and the energy is discharged step by step in the three stages. In this process, first, the boost capacitor C1 forms a loop with the primary coil of the transformer, and the energy is transferred to the secondary side of the transformer through the magnetic circuit. m1 Get-2NU dc (N is the transformer ratio). After the transformer completes the voltage step-up, the circuit undergoes a magnetic pulse compression process step by step, that is, the maximum voltage of the voltage pulse is maintained at -2NU dc , the voltage pulse is compressed only in time width on each level of capacitor, and the compression ratio is about 2 to 5. Finally, the peaking capacitor C p A high voltage pulse with a width of less than 100ns is obtained to generate gas discharge and laser output.

[0043] It should be noted that Figure 1 The sub-circuits in the power circuit shown in the figure show time independence during operation, and energy is transferred from left to right in each circuit in turn, and the energy transfer time is significantly reduced. In the voltage multiplier module, the energy transfer time t ch Usually it is 200~400us, and the time t required for the pulse boost process of the boost capacitor C1 to discharge is d Less than 10us. Obviously, t totIn the time structure, the charging time of the boost capacitor C1 is t ch Account for the majority.

[0044] Let's discuss the energy storage type of pulse power supplies. A widely used energy storage type is capacitive energy storage (CES), which also includes the above-mentioned all-solid-state pulse power supply circuit. It means that in the CLC loop, only the capacitor on the left side is used as an energy storage element and initially has a charging voltage. When the inductor becomes the only energy storage element in the CLC loop, such a circuit is called inductive energy storage (IES). In particular, when both capacitors and inductors are used as energy storage elements, the circuit is called a HES circuit. The hybrid energy storage (HES) method has received some attention because it can accelerate the CLC energy transfer time and increase the output voltage amplitude.

[0045] In the related art, HES can also be used to excite the excimer laser. However, compared with the traditional CES circuit, the newly added charging branch will change the original power supply topology and require the use of more IGBTs, which may reduce the reliability of the power supply and increase the control complexity.

[0046] In summary, without changing the existing all-solid-state pulse power supply circuit topology, we can explore ways to effectively shorten the single pulse period t tot (Especially the transfer time t of the voltage multiplication circuit ch ) method is particularly important.

[0047] The present disclosure is described in detail below with reference to specific embodiments.

[0048] It should be noted that Figure 1 and Figure 2 It can be seen that the energy transfer time t of the voltage multiplication circuit is ch Occupies t tot Most of the max In order to achieve the transformation of the voltage multiplication loop from CES to HES without changing the circuit topology and adding additional semiconductor switches, one method is to extend the on-time of the IGBT switch in the voltage multiplication loop and use the primary coil of the transformer to charge the energy storage inductor L0.

[0049] In order to compare the energy transfer characteristics of the voltage multiplier circuit under the CES and HES methods, the voltage waveforms (including the voltage waveform on the boost capacitor C1) output by the voltage multiplier circuit under the two energy storage types of CES and HES can be compared through circuit simulation. Figure 3A circuit schematic diagram and simulation result diagram of a CLC circuit using a traditional CES and a specific HES respectively, provided by an embodiment of the present disclosure; Figure 3 As shown in (a), the simulation parameters of the CLC circuit are C0 = 110 μF, C1 = 1 μF, L0 = 10 μH, and the initial conditions are U0 = 1 kV and I0 = 0 A (CES) or 20 A (HES) for comparison; Figure 3 (b) shows the voltage U of the boost capacitor C1. C1 and the loop current I, which are reduced to their initial values ​​U0 and I0, respectively. It can be observed that when the traditional CES method (I0 = 0A) is used, U C1 The peak value of 2U0 is reached at t = 300 μs, while under the HES method (I0 = 20 A), U C1 The peak value of 3.2U0 is reached at t = 200μs. The results show that when I0 = 20A, U C1 Voltage rise rate dU C1 / dt is faster than the result without I0, especially when the boost capacitor C1 starts to charge. This is because according to the principle of capacitors, dU C1 / dt is determined by the current I flowing through it. These results confirm that the HES resonant CLC circuit provides a higher voltage multiplication ratio βU and a shorter energy transfer time t in a single pulse cycle compared to the conventional CES method. ch .

[0050] Secondly, the above results can be explained by deriving the CLC circuit equation based on HES. Figure 3 In the circuit shown in (a), the differential equation of the CLC circuit based on the loop current I is:

[0051]

[0052] Among them, the sine term represents the energy from the energy storage inductor L0, and the cosine term represents the energy from the energy storage capacitor C0.

[0053] For the CES circuit, the initial condition is U C0 =U0 and I0 = 0, indicating that only the cosine term exists. In contrast, in the HES circuit, the initial condition is U C0 =U0 and I0≠0, output voltage U C1 Including cosine and sine terms, resulting in a higher voltage multiplication ratio β U and shorter charging cycles t ch , where the voltage multiplication ratio β U It can exceed 2 (the theoretical upper limit of the voltage multiplication circuit based on CES). This means that under the same input conditions, the power supply circuit based on HES can output a higher voltage pulse amplitude.

[0054] In addition, a shorter charging cycle t ch It is expected to increase the maximum repetition frequency f max . Figure 4 A charging voltage waveform diagram of a boost capacitor when a CLC circuit uses a hybrid energy storage HES with different energy storage inductor initial currents provided by an embodiment of the present disclosure; Figure 4 As shown, in order to further determine the charging characteristics of the boost capacitor C1 under different initial currents I0, equation (1) is used to calculate U when I0 = 0A, 5A, 10A and 15A. C1 The waveform of C1 is obtained by adding the dashed line of the same color (sine term Usin) to the solid orange line (fixed cosine term Ucos). The result clearly shows that as I0 increases, U max Continuous rise, the rise time of the voltage pulse t ch Always in advance. The black dashed line shows the voltage peak point (U max , t ch ) shows a trend of moving to the upper left as I0 increases. It can be observed that as I0 increases, U max The rising trend of t becomes larger, and the peak time gradually saturates at 190μs. This result shows that with the increase of I0, the ch The reduction effect of U max It can be inferred that in the HES-based voltage multiplication circuit, the relatively small I0 can effectively shorten t ch , while a larger I0 can effectively increase U max .

[0055] In summary, in order to achieve Figure 1 The conversion of the voltage multiplication loop circuit from CES to HES in the conventional power supply circuit shown in can provide a charging path for the energy storage inductor L0 during or after the discharge of the boost capacitor C1. For example, without changing the circuit topology, a small inductance loop formed by the primary leakage inductance of the transformer can be used to charge the energy storage inductor L0 in the original power supply circuit.

[0056] For example, Figure 5 A schematic diagram of a hybrid energy storage pulse power supply circuit provided by an embodiment of the present disclosure; Figure 5 As shown, the HES circuit includes: an energy storage capacitor C0, a boost capacitor C1, an energy storage inductor L0, a transformer switch and a transformer; wherein,

[0057] The energy storage capacitor C0, the energy storage inductor L0, and the boost capacitor C1 are connected in series to form a voltage multiplication circuit;

[0058] The boost capacitor C1, the transformer switch, and the primary coil of the transformer are connected in series to form a pulse forming loop;

[0059] The on-time of the transformer switch is greater than the discharge time of the boost capacitor C1.

[0060] In the following embodiments, the transformer may be a pulse transformer (PT), for example.

[0061] In the following embodiments, the transformer switch may be a semiconductor switch, for example, an IGBT. PT .

[0062] In the following embodiment, the on-time of the transformer switch t on＝ t dis+ t extd , where t extd After the boost capacitor C1 is discharged, the transformer switch remains in the on state for a certain period of time, that is, the extended period of time. dis is basically fixed and is only determined by the parameters of the components in the circuit. Therefore, extending the on-time t of the transformer switch on This is equivalent to extending t extd .

[0063] Take a scenario as an example, the transformer switch is IGBT PT By extending the input to the IGBT PT The duration of the high level of the gate PWM wave is used to extend the on-time t of the transformer switch. on .

[0064] It should be noted that by removing Figure 1 IGBT boost switch in medium voltage multiplication circuit VM The on-time of the transformer switch is determined by the discharge time t of the boost capacitor C1. dis Extend to a time greater than the discharge time t of the boost capacitor C1 dis , so that after the boost capacitor C1 is discharged, the small inductance loop formed by the primary leakage inductance of the transformer can be used to provide a charging path for the energy storage inductor L0, thereby achieving Figure 1 The conversion of the CES to HES voltage multiplication loop circuit in the conventional power supply circuit shown in FIG.

[0065] Optionally, in one embodiment of the present disclosure, Figure 5 As shown, the hybrid energy storage pulse power supply circuit also includes a boost diode D1; wherein,

[0066] The energy storage capacitor C0, the energy storage inductor L0, the boost capacitor C1 and the diode D1 are connected in series to form a voltage multiplication loop.

[0067] It should be noted that the boost diode D1 is used to prevent energy backflow (sometimes called a reverse current diode). If the boost diode D1 is not set after the energy of the boost capacitor C1 reaches the peak value, the energy in the boost capacitor C1 will return to the energy storage capacitor C0. If the boost diode D1 is set and the subsequent transformer switch is turned off, the energy can always be on the boost capacitor C1, which is manifested as the voltage of the boost capacitor C1 being stable at the peak voltage.

[0068] Optionally, in one embodiment of the present disclosure, the hybrid energy storage pulse power supply circuit further includes a magnetic compression module and a discharge module; wherein,

[0069] The secondary coil of the transformer is connected to the input end of the magnetic compression module to form a magnetic compression loop;

[0070] The output end of the magnetic compression module is connected to the discharge module.

[0071] It should be noted that the magnetic compression module and the discharge module of the hybrid energy storage pulse power supply circuit provided in the embodiment of the present disclosure can be used with Figure 1 The structures of the related modules of the all-solid-state pulse power supply circuit shown are the same and will not be repeated here.

[0072] Optionally, in one embodiment of the present disclosure, any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetitive frequency operation is changed from the original t tot =t d +t ch +t dis Transformed to t tot =t dis +t extd +t ch. , because the boost switch IGBT is removed VM , using only one transformer switch tube IGBT PT There is no need to set the dead time, the on-time t of the transformer switch on and the charging time t of boost capacitor C1 ch Among them, the on-time of the transformer switch is t on Added extension time t extd , its conduction time t on＝ t dis+ t extd .

[0073] According to some embodiments, Figure 5 As shown, the hybrid energy storage pulse power supply circuit is in any single pulse period t in the repetitive frequency operation. totIt can be divided into the following three stages:

[0074] The first stage P1-t dis :The transformer switch is in the on state, and the boost capacitor C1 transfers energy to the primary secondary capacitor C through the transformer magnetic circuit. m1 The boost capacitor C1 is discharged from the charged state to the empty state, and the discharge duration is t dis ;

[0075] In the repetitive frequency operation, the boost capacitor C1 is fully charged and in the storage state at the end of the previous pulse, P1-t dis After the end, almost all the energy in the boost capacitor C1 is consumed, and the capacitor is in an empty state.

[0076] Among them, the transformer switch is IGBT PT When the input to the IGBT can be controlled PT The PWM waveform is at a high level to make the IGBT PT Conductivity.

[0077] The second stage P2-t extd :By extending the on-time t of the transformer switch on＝ t dis to on＝ t dis+ t extd , the boost capacitor C1 is leakage Short circuit (the primary leakage inductance L leakage Usually less than 10μH, U C1 Fixed at 0V), energy storage capacitor C0, energy storage inductor L0 and primary leakage inductance L leakage The first charging circuit is formed. extd During this period, the energy storage capacitor C0 charges the energy storage inductor L0 through the first charging loop, and the inductor current I corresponding to the energy storage inductor L0 continues to increase until the transformer switch is switched from the on state to the off state, and the voltage on the energy storage capacitor C0 gradually decreases.

[0078] Among them, to P2-t extd At the end, the inductor current I reaches the maximum value I0, U C0 Slightly reduced to voltage U0, I0 and U0 directly determine the time required for charging the boost capacitor C1 in the next process and the peak voltage U max . I0 and U0 can be expressed as:

[0079]

[0080] U0=U dc cosωt extd (3)

[0081] Where ω is the resonant angular frequency of the loop.

[0082] The third stage P3-t ch :The transformer switch is in the off state, the energy storage capacitor C0, the energy storage inductor L0 and the boost capacitor C1 form a second charging circuit, and the energy storage capacitor C0 and the energy storage inductor L0 charge the boost capacitor C1 through the second charging circuit until the boost capacitor is in the power storage state, and the duration is t ch .

[0083] Among them, the transformer switch is IGBT PT When the input to the IGBT can be controlled PT The PWM waveform is at a low level to enable the IGBT PT closure.

[0084] The energy storage capacitor C0 and the energy storage inductor L0 transfer the capacitive and inductive energy to the boost capacitor C1 to charge the boost capacitor C1.

[0085] Among them, the charging voltage U of the boost capacitor C1 C1 The expression of can be given by equation (1).

[0086] Among them, P3-t ch The duration of the phase (t ch ) by U C1 Reaching peak voltage U max The charging time t can be determined by taking the derivative of equation (1). ch and peak voltage U max .

[0087] Optionally, in one embodiment of the present disclosure, in order to verify Figure 5 The hybrid energy storage pulse power supply circuit shown in the figure improves the feasibility of the maximum repetition frequency and the maximum output voltage. A HES-based all-solid-state pulse power supply is constructed with the core component parameters shown in Table (1).

[0088] Table (1)

[0089]

[0090] In some embodiments, Figure 6 Schematic diagram of test results of a HES-based all-solid-state pulse power supply provided by an embodiment of the present disclosure; Figure 6 As shown, the focus is on IGBT PT The on time t on The impact on the energy transfer characteristics of the voltage multiplication circuit (especially the changes in the various parts of the total time of a single pulse, the maximum output voltage, etc.). Figure 7The statistical result diagram of key parameters under different conduction time provided by the embodiment of the present disclosure shows that by extending the IGBT PT The on time t on , realizing the transition from CES circuit to HES circuit, which can continuously increase the initial current I0 of the energy storage inductor in the second stage, and at the same time increase the output voltage U max And shorten the duration of the third stage P3, that is, t ch However, t ch The decreasing trend will gradually saturate, and because t tot The newly introduced t extd linearly increases, so that the total time t in the test results tot Showing an upward trend.

[0091] Due to experimental conditions, the research variable range is limited. Through simulation, not only can the experimental results be verified, but also the research scope can be expanded. In some embodiments, a circuit equation based on the HES circuit is derived, wherein the initial voltage and initial current obtained by the newly added second stage P2 can be derived by equation (2) and equation (3), and the charging voltage of the third stage P3 (boost capacitor C1) can be calculated by equation (1).

[0092] Optionally, in one embodiment of the present disclosure, by conducting experimental tests and simulation comparisons on an all-solid-state pulse power supply based on HES constructed with the core component parameters shown in Table (1), the hybrid energy storage pulse power supply circuit provided in the embodiment of the present disclosure is proved to be able to provide two optional enhancement modes: voltage enhancement mode (VE mode) and frequency enhancement mode (FE mode).

[0093] According to some embodiments, Figure 8 A schematic diagram of a voltage enhancement mode provided by an embodiment of the present disclosure; Figure 8 As shown, for the voltage enhancement mode, in any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetitive frequency operation, the voltage when the boost capacitor C1 is charged to the storage state is the peak voltage U max , that is U C1 =U max When the PWM wave is low, the IGBT is turned off. PT , and then enters the next pulse cycle (boost capacitor C1 is charged and then discharged).

[0094] In some embodiments, the peak voltage U max Greater than the voltage threshold U' max , voltage threshold U' maxThe maximum voltage to which the boost capacitor C1 can be charged in the traditional CES circuit, that is, the maximum voltage value to which the boost capacitor C1 can be charged when the on-time of the transformer switch is equal to the discharge time of the boost capacitor C1. max The limit value can be 2kV, that is, the voltage threshold is not greater than 2kV (slightly less than 2kV), and the peak voltage is greater than 2kV. Voltage threshold U' max For example, it may be 1.966 kV.

[0095] In some embodiments, Fig. 9 This is a result simulation prediction diagram of a voltage enhancement mode provided by an embodiment of the present disclosure. It shows the research independent variable t extd The process t is extended to 1200μs tot and U max Changes. Fig. 9 As shown in the figure, in the voltage enhancement mode, the HES circuit can continuously enhance the amplitude of the voltage pulse by extending the IGBT turn-on time. extd When extended to 1200μs, U max As high as 10.5kV. In contrast, the traditional CES circuit can only output a high voltage of about 2kV. However, the prediction results also show that t tot shows a continuous increasing trend, which means that the maximum repetition frequency f in the voltage enhancement mode max There is a downward trend (f max =1 / t tot ). Since the parameters of the pulse transformer and magnetic compression module remain unchanged, the increase ratio of the output voltage amplitude of the all-solid-state pulse power supply circuit is equal to the increase ratio of the output voltage amplitude of the voltage multiplication circuit. Therefore, the voltage enhancement mode is only applicable to the operation at a lower repetition frequency (lower than f max ) but want to output a higher voltage amplitude.

[0096] According to some embodiments, Fig.10 A schematic diagram of a repetition frequency enhancement mode provided by an embodiment of the present disclosure; Fig.10 As shown in the figure, for the repetitive frequency enhancement mode, in any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetitive frequency operation, after the boost capacitor C1 is charged to the voltage threshold, the IGBT is turned off through the low level of the PWM wave. PT , and then enter the next pulse cycle.

[0097] In some embodiments, the charging time of the boost capacitor C1 is less than the charging time threshold, which is the charging time of the boost capacitor C1 in the original traditional CES circuit, that is, when the on time of the transformer switch is equal to the discharge time of the boost capacitor C1, the boost capacitor C1 is charged to the voltage threshold U' maxThe time required.

[0098] In some embodiments, Fig.11 The figure is a diagram of the experimental and simulation results of a repetition frequency enhancement mode provided by the embodiment of the present disclosure; wherein, Fig.11 (a) shows the case where I0 = 0A to 20A and the IGBT is set PT The voltage threshold for shutdown is U C1 =1.966kV time and maximum repetition frequency f max The experimental results, Fig.10 (b) shows that when I0 = 0A to 40A and the voltage threshold for IGBT shutdown is set to U C1 =1.98kV time and maximum repetition frequency f max Theoretical results. Fig.10 As shown, with t on The increase of tot Generally speaking, it decreases first and then increases (f max First increase and then decrease). Repeated experimental results show that when I0=9.6A, f max It can be increased from 3.4kHz of the traditional CES circuit to a maximum of 3.54kHz in the hybrid energy storage pulse power supply circuit provided by the embodiment of the present disclosure, showing an increase of 4.1%. In contrast, the theoretical calculation shows that when I0=10A, f max It can be increased from 3.12kHz (conventional CES circuit conditions) to 3.71kHz, an increase of 18.9%. The simulation results are higher than the experimental results in terms of the highest repetition frequency f max The increase is better. This is caused by the negative voltage phenomenon at the end of the discharge of the boost capacitor C1. It can be adjusted by setting the capacitor matching (C1 = N 2 C m1 ) to eliminate the negative voltage phenomenon at the end of the discharge of the boost capacitor C1. This power mode is expected to increase the average power of the excimer laser by increasing the maximum repetition frequency of the power supply (laser) while keeping other conditions unchanged.

[0099] According to some embodiments, for any voltage multiplication circuit (energy storage capacitor C0, boost capacitor C1, energy storage inductor L0) of the user, the circuit equation based on the HES circuit derived above can be used to determine the value of I0 in the repetition rate enhancement mode to obtain the highest repetition rate f max The maximum value of .

[0100] In some embodiments, due to t tot =t dis +t extd +t ch. t in dis unchanged, so t extd +tch. Simplified to the function T of I0 m (I0) = t extd +t ch. , then for T m Find the extreme value and let T m '=0(T m 'For T m The derivative of the extreme point can be obtained by 0m , at this time t tot Minimum and maximum repetition frequency f max Maximum, thus obtaining the optimal value of the voltage multiplication circuit in the repetition rate enhancement mode.

[0101] For example, let the initial and simplified conditions be U dc ≈U0=2000V, C0>>C1, L0>>L leakage , T m '=0, we can get the following simplified formula:

[0102]

[0103] Among them, C0, C1, and L0 can be considered as constants. After obtaining these parameters input by the user, I can be solved. 0m Approximate value, in this I 0m The maximum repetition frequency f can be obtained under the value max and the smallest t tot .

[0104] Among them, the solved I 0m Substituting into formula (2) we can get the minimum t tot , then, let formula (1) = 2000 to solve the corresponding t ch , so that the maximum highest repetition frequency f can be calculated max .

[0105] In summary, the hybrid energy storage pulse power supply circuit provided in the embodiment of the present disclosure can adjust the operating parameters of the hybrid energy storage pulse power supply circuit by extending and adjusting the conduction time of the transformer switch. When outputting voltage pulses of the same amplitude and width, the maximum repetition frequency of the pulse power supply and pulse discharge can be further improved by reasonably adjusting the conduction time of the transformer switch, and ultimately the average power of the excimer laser can be improved; when pursuing a higher amplitude voltage pulse output, increasing the conduction time of the transformer switch can effectively increase the amplitude of the voltage pulse, but the maximum repetition frequency of the power supply will decrease.

[0106] In addition, the word "exemplary" is used herein to indicate serving as an example, instance, or diagram. Any aspect or design described as "exemplary" in this article is not necessarily understood to be advantageous compared to other aspects or designs. On the contrary, the use of the word exemplary is intended to present concepts in a specific way. As used herein, the term "or" is intended to represent an inclusive "or" rather than an exclusive "or". That is, unless otherwise specified or clear from the context, "X applies A or B" is intended to represent any one of the natural inclusive arrangements. That is, if X applies A; X applies B; or X applies both A and B, "X applies A or B" is satisfied under any of the aforementioned examples. In addition, unless otherwise specified or clearly pointed to a singular form from the context, the articles "one" and "an" as used in this application and the appended claims are generally understood to mean "one or more".

[0107] Likewise, although the present disclosure has been shown and described with respect to one or more implementations, equivalent variations and modifications will occur to those skilled in the art after reading and understanding the specification and drawings. The present disclosure includes all such modifications and variations and is limited only by the scope of the claims. In particular, with respect to the various functions performed by the components (e.g., elements, resources, etc.) described above, unless otherwise noted, the terms used to describe such components are intended to correspond to any component (functionally equivalent) that performs the specific functions of the described components, even if the structure is not equivalent to the disclosed structure. In addition, although the specific features of the present disclosure may have been disclosed with respect to only one of several implementations, such features may be combined with one or more other features of other implementations as may be desired and conducive to any given or specific application. In addition, with respect to "including", "having", "having", "having", or variations thereof used in the specific embodiments or claims, such terms are intended to be inclusive in a manner similar to the term "comprising".

[0108] Those skilled in the art will readily appreciate other embodiments of the present disclosure after considering the specification and practicing the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present disclosure that follow the general principles of the present disclosure and include common knowledge or customary techniques in the art that are not disclosed in the present disclosure. The description and examples are intended to be exemplary only, and the true scope and spirit of the present disclosure are indicated by the following claims.

[0109] It should be understood that the present disclosure is not limited to the exact structures that have been described above and shown in the drawings, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A hybrid energy storage pulse power supply circuit, characterized in that: include: Energy storage capacitors, boost capacitors, energy storage inductors, transformer switches and transformers; wherein, The energy storage capacitor, the energy storage inductor, and the boost capacitor are connected in series to form a voltage multiplication circuit; The boost capacitor, the transformer switch, and the primary coil of the transformer are connected in series to form a pulse forming loop; The conduction time of the transformer switch is greater than the discharge time of the boost capacitor.

2. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that: The hybrid energy storage pulse power supply circuit also includes a boost diode; wherein, The energy storage capacitor, the energy storage inductor, the boost capacitor and the boost diode are connected in series to form the voltage multiplication circuit.

3. The hybrid energy storage pulse power supply circuit according to claim 2, characterized in that: The hybrid energy storage pulse power supply circuit also includes a magnetic compression module and a discharge module; wherein, The secondary coil of the transformer is connected to the input end of the magnetic compression module to form a magnetic compression loop; The output end of the magnetic compression module is connected to the discharge module.

4. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that: Any single pulse cycle of the hybrid energy storage pulse power supply circuit in repetitive frequency operation is composed of the conduction time of the transformer switch and the charging time of the boost capacitor.

5. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that: Any single pulse cycle of the hybrid energy storage pulse power supply circuit in repetitive frequency operation includes the following three stages: The first stage: the transformer switch is in the on state, the boost capacitor forms a loop through the transformer, and the boost capacitor is discharged from the power storage state to the empty state; The second stage: the boost capacitor is short-circuited by the primary leakage inductance, the energy storage capacitor, the energy storage inductor and the primary leakage inductance form a first charging loop, and the energy storage capacitor charges the energy storage inductor through the first charging loop until the transformer switch is switched from the on state to the off state; The third stage: the transformer switch remains in the closed state, the energy storage capacitor, the energy storage inductor and the boost capacitor form a second charging circuit, and the energy storage capacitor and the energy storage inductor charge the boost capacitor through the second charging circuit until the boost capacitor is in the energy storage state.

6. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that: The working mode of the hybrid energy storage pulse power supply circuit includes a voltage enhancement mode; wherein, In the voltage enhancement mode, in any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetitive frequency operation, after the boost capacitor is charged to the peak voltage, it enters the next pulse cycle, wherein the peak voltage is greater than the voltage threshold, and the voltage threshold is the highest voltage value to which the boost capacitor is charged when the conduction time of the transformer switch is equal to the discharge time of the boost capacitor.

7. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that: The working mode of the hybrid energy storage pulse power supply circuit includes a repetition frequency enhancement mode; wherein, In the repetition frequency enhancement mode, in any single pulse cycle of the hybrid energy storage pulse power supply circuit in the repetition frequency operation, after the boost capacitor is charged to the voltage threshold, it enters the next pulse cycle, wherein the charging time of the boost capacitor is less than the charging time threshold, the voltage threshold is the highest voltage value to which the boost capacitor is charged when the on-time of the transformer switch is equal to the discharge time of the boost capacitor, and the charging time threshold is the time required for the boost capacitor to be charged to the voltage threshold when the on-time of the transformer switch is equal to the discharge time of the boost capacitor.

8. The hybrid energy storage pulse power supply circuit according to claim 6, characterized in that: The voltage threshold is no greater than 2 kV, and the peak voltage is greater than 2 kV.

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