Hybrid energy storage pulse power supply circuit

Abstract

The present disclosure relates to the technical field of semiconductor, and particularly relates to a hybrid energy storage pulse power supply circuit, comprising: an energy storage capacitor, a booster capacitor, an energy storage inductor, a transformer switch and a transformer; wherein the energy storage capacitor, the energy storage inductor and the booster capacitor are connected in series to form a voltage multiplication loop; the booster capacitor, the transformer switch and a primary coil of the transformer are connected in series to form a pulse forming loop; and the on time of the transformer switch is greater than the discharge time of the booster capacitor. The present disclosure adopting the above scheme can solve the problem that the single pulse cycle time of the existing pulse power supply is too long and cannot be further shortened, so that the highest repetition frequency of the pulse power supply cannot be further improved.

Description

Technical Field

[0001] This disclosure relates to the field of power supply technology, and in particular to a hybrid energy storage pulse power supply circuit. Background Technology

[0002] Due to their high efficiency and stability, all-solid-state pulsed power supply circuits have been widely used in scientific research and industrial power supply circuits for excimer lasers. Traditionally, energy storage in all-solid-state pulsed power supply circuits relies on capacitor energy storage (CES), with energy being transferred stage by stage in each CLC circuit to the next. However, in all-solid-state pulsed power supply circuits, the energy transfer time of the voltage multiplication circuit occupies most of the single pulse cycle, resulting in a long single pulse cycle that cannot be further shortened, thus limiting the maximum repetition frequency of the pulsed power supply. Summary of the Invention

[0003] This disclosure provides a hybrid energy storage pulse power supply circuit, the main purpose of which is to solve the problem that the single pulse cycle time of existing pulse power supplies is too long and cannot be further shortened, thus preventing the highest repetition frequency of the pulse power supply from being further increased.

[0004] According to one aspect of this disclosure, a hybrid energy storage pulse power supply circuit is provided, comprising: an energy storage capacitor, a boosting capacitor, an energy storage inductor, a transformer switch, and a transformer; wherein,

[0005] The energy storage capacitor, the energy storage inductor, and the boosting capacitor are connected in series to form a voltage multiplication circuit;

[0006] The boosting capacitor, the transformer switch, and the primary coil of the transformer are connected in series to form a pulse forming circuit;

[0007] The conduction time of the transformer switch is greater than the discharge time of the boost capacitor.

[0008] Optionally, in one embodiment of this disclosure, the hybrid energy storage pulse power supply circuit further includes a boosting diode; wherein,

[0009] The energy storage capacitor, the energy storage inductor, the boosting capacitor, and the boosting diode are connected in series to form the voltage multiplication circuit.

[0010] Optionally, in one embodiment of this disclosure, the hybrid energy storage pulse power supply circuit further includes a magnetic compression module and a discharge module; wherein,

[0011] The secondary coil of the transformer is connected to the input terminal of the magnetic compression module to form a magnetic compression circuit.

[0012] The output terminal of the magnetic compression module is connected to the discharge module.

[0013] Optionally, in one embodiment of this disclosure, any single pulse cycle of the hybrid energy storage pulse power supply circuit during repetitive frequency operation is composed of the conduction time of the transformer switch and the charging time of the boost capacitor.

[0014] Optionally, in one embodiment of this disclosure, in the voltage enhancement mode, any single pulse cycle of the hybrid energy storage pulse power supply circuit during repetitive frequency operation includes the following three stages:

[0015] The first stage: the transformer switch is in the conducting state, the booster capacitor forms a circuit through the transformer, and the booster capacitor discharges from the stored state to the empty state;

[0016] The second stage: The boosting capacitor is short-circuited by the primary leakage inductance. The energy storage capacitor, the energy storage inductor, and the primary leakage inductance form a first charging circuit. The energy storage capacitor charges the energy storage inductor through the first charging circuit until the transformer switch changes from the on state to the off state.

[0017] The third stage: The transformer switch remains in the closed state, and the energy storage capacitor, the energy storage inductor, and the boosting capacitor form a second charging circuit. The energy storage capacitor and the energy storage inductor charge the boosting capacitor through the second charging circuit until the boosting capacitor is in the energy storage state.

[0018] Optionally, in one embodiment of this disclosure, the operating mode of the hybrid energy storage pulse power supply circuit includes a voltage enhancement mode; wherein,

[0019] In the voltage enhancement mode, during any single pulse cycle of the repetitive frequency operation of the hybrid energy storage pulse power supply circuit, after the boosting capacitor is charged to the peak voltage, it enters the next pulse cycle. The peak voltage is greater than a voltage threshold, which is the highest voltage value to which the boosting capacitor is charged when the conduction time of the transformer switch is equal to the discharge time of the boosting capacitor.

[0020] Optionally, in one embodiment of this disclosure, the operating mode of the hybrid energy storage pulse power supply circuit includes a repetition rate enhancement mode; wherein,

[0021] In the repetition rate enhancement mode, during any single pulse cycle of the hybrid energy storage pulse power supply circuit operating at the repetition frequency, after the boosting capacitor is charged to a voltage threshold, it enters the next pulse cycle. The charging time of the boosting capacitor is less than the charging time threshold. The voltage threshold is the highest voltage value to which the boosting capacitor is charged when the conduction time of the transformer switch is equal to the discharge time of the boosting capacitor. The charging time threshold is the time required for the boosting capacitor to be charged to the voltage threshold when the conduction time of the transformer switch is equal to the discharge time of the boosting capacitor.

[0022] Optionally, in one embodiment of this disclosure, the voltage threshold is not greater than 2kV, and the peak voltage is greater than 2kV.

[0023] In summary, the hybrid energy storage pulse power supply circuit provided in this embodiment removes the booster switch in the existing voltage multiplier circuit and extends the conduction time of the transformer switch from the discharge time of the booster capacitor to a time greater than the discharge time of the booster capacitor. This allows the small inductance circuit formed by the primary leakage inductance of the transformer to provide a charging path for the energy storage inductor after the booster capacitor discharges. This enables the conversion from CES to a voltage multiplier circuit for hybrid energy storage (HES). When outputting voltage pulses of the same amplitude and width, the highest repetition frequency of the pulse power supply and pulse discharge can be further increased by reasonably adjusting the conduction time of the transformer switch, ultimately improving the average power of the excimer laser.

[0024] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0025] The accompanying drawings, which are incorporated in and form a part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure.

[0026] Figure 1 A schematic diagram of an all-solid-state pulse power supply circuit provided by the prior art;

[0027] Figure 2 The schematic diagram of the operating conditions of each sub-circuit in an all-solid-state pulse power supply circuit provided by the prior art;

[0028] Figure 3 The present disclosure provides a circuit diagram and simulation results diagram for a CLC loop using conventional CES and a specific HES, respectively, as an embodiment of the present disclosure.

[0029] Figure 4A waveform diagram of the charging voltage of the boosting capacitor under different initial currents of the energy storage inductor in a CLC circuit using a hybrid energy storage HES according to an embodiment of this disclosure;

[0030] Figure 5 A schematic diagram of a hybrid energy storage pulse power supply circuit provided in an embodiment of this disclosure;

[0031] Figure 6 A schematic diagram of the test results of an all-solid-state pulse power supply based on HES provided in an embodiment of this disclosure;

[0032] Figure 7 The above is a statistical result graph of key parameters under different conduction times provided in the embodiments of this disclosure;

[0033] Figure 8 This is a schematic diagram illustrating the operation of a voltage enhancement mode provided in an embodiment of the present disclosure;

[0034] Figure 9 This is a simulation prediction diagram of the results of a voltage enhancement mode provided in an embodiment of the present disclosure;

[0035] Figure 10 This is a schematic diagram illustrating the operation of a frequency repetition enhancement mode provided in an embodiment of this disclosure;

[0036] Figure 11 The figures show experimental and simulation results of a frequency repetition enhancement mode provided in an embodiment of this disclosure. Detailed Implementation

[0037] Some embodiments of this disclosure will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. Various changes, modifications, and equivalents of the structures described herein will become apparent upon understanding this disclosure. For example, the connection relationships of the structures described herein are merely illustrative and are not limited to those set forth herein, but may be changed as will become apparent upon understanding this disclosure, except for connections that must be made in specific ways. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0038] The embodiments described in the following examples of this disclosure do not represent all embodiments consistent with this disclosure. Rather, they are merely examples of structures consistent with some aspects of this disclosure as detailed in the appended claims.

[0039] Excimer lasers (such as argon fluoride (ArF) and krypton fluoride (KrF) lasers) are gas discharge-pumped lasers capable of generating laser pulses in the deep ultraviolet (DUV) band. Due to their high average power in the DUV region, excimer lasers are widely used in semiconductor lithography, micro / nanomaterial fabrication, and ophthalmic surgery. The pulsed power supply used to excite excimer lasers typically requires a continuous repetitive output power density of up to 1 MW / cm². 3 The above voltage pulses have rise times of less than 100 ns and repetition frequencies as high as kHz. Furthermore, the circuit topology requires high reliability and longevity. Since excimer lasers are discharge-pumped pulsed lasers, the repetition frequency of the output laser pulse is exactly the same as the frequency of the voltage pulse excitation generated by the pulsed power supply. When the pulsed power supply operates at its highest continuous repetition frequency, the excimer laser can output at its highest average power. Therefore, the output power of the excimer laser source is largely determined by the highest repetition frequency of the excitation pulsed power supply. With the increasing demand for power in lithography light sources in semiconductor processes, improving the highest repetition frequency of the pulsed power supply has become a key technical challenge.

[0040] As the name suggests, all-solid-state pulse power supply circuits are pulse circuits that use all solid-state switches (semiconductor switches and magnetic switches). Due to the advantages of solid-state switches, such as long lifespan and high repetition rate adaptability, they have been widely used in scientific research and commercial excimer lasers. Figure 1 A schematic diagram of an all-solid-state pulse power supply circuit provided by the prior art; such as Figure 1 As shown, this type of power supply circuit typically consists of three key sub-circuits: voltage multiplication, pulse generation, and magnetic compression. It outputs voltage pulses to the discharge load through compact transmission.

[0041] exist Figure 1 In the circuit topology shown, the repetition frequency f of the power supply max The complete time period t from a single pulse input to a fast pulse output from a DC voltage input. tot The decision is made based on the repetition frequency f. max With t tot The relationship is reciprocal, and t tot =t d +t ch +t dis , t d This refers to the dead time of a semiconductor switch (using IGBT as an example below to represent a semiconductor switch), t ch It is the charging time of the boost capacitor C1, t dis It is the discharge time of the boost capacitor C1.

[0042] When running at the highest repetition frequency Figure 1The operating conditions of each sub-circuit in the circuit shown can be described as follows: Figure 2 The schematic diagram shown is used to represent this. For example... Figure 2 As shown, in a single pulse cycle, the energy storage capacitor C0 is first charged to the set value U by the DC power supply. dc When controlling the boost switching transistor IGBT VM The PWM waveform rises to a high level, boosting the IGBT switching transistor. VM When the capacitor is in the ON state, the energy storage capacitor C0 charges the boost capacitor C1. The duration of this process is defined as t. ch , t ch It typically lasts 200–400 μs. ch At the end, the boost capacitor C1 reaches 2U. dc The voltage of the energy storage capacitor C0, and the voltage U. C0 Basically maintained at U dc The capacitance remains unchanged (the capacitance of energy storage capacitor C0 >> the capacitance of boost capacitor C1). Next, the IGBT's dead time t is experienced. d Subsequently, the control transformer switching transistor IGBT... PT The PWM waveform rises to a high level, and the transformer switching transistor IGBT... PT When the capacitor is placed in the conducting state, the boost capacitor C1 begins to discharge. The discharge process of the boost capacitor C1 can be divided into two sub-processes, with a total time of t. dis , t dis Typically less than 10µs. Then, the magnetic compression process is initiated, with energy discharging stage by stage during the three stages. In this process, firstly, the boosting capacitor C1 forms a circuit with the primary winding of the transformer, transferring energy to the secondary winding of the transformer through the magnetic circuit. The primary secondary capacitor C... m1 Obtain -2NU dc The voltage (N is the transformer turns ratio). After the transformer completes the voltage boost, the circuit undergoes a magnetic pulse compression process stage by stage, that is, maintaining the maximum voltage pulse voltage at -2NU. dc The voltage pulse is compressed only in time across each capacitor, with a compression ratio of approximately 2–5. Finally, the peaking capacitor C… p High-voltage pulses with a width of less than 100 ns are obtained to generate gas discharge and laser output.

[0043] It should be noted that, Figure 1 The sub-loops in the power supply circuit shown exhibit time independence during operation, with energy transferred sequentially from left to right within each loop, and the energy transfer time is significantly reduced. In the voltage multiplier module, the energy transfer time t during the charging of the boost capacitor C1... ch The time is typically 200–400 μs, while the time t required for the pulse boosting process of the boosting capacitor C1 discharging is... d Less than 10us. Clearly, t totIn the time configuration, the charging time t of the boost capacitor C1 ch They account for the majority.

[0044] Next, let's discuss the energy storage types of pulse power supplies. A widely used type is capacitive energy storage (CES), which includes the all-solid-state pulse power supply circuit mentioned above. This refers to a CLC circuit where only the capacitor on the left side initially possesses a charging voltage as the energy storage element. When an inductor is the only energy storage element in the CLC circuit, such a circuit is called inductive energy storage (IES). Specifically, when both capacitors and inductors are used as energy storage elements, the circuit is called a hybrid energy storage (HES) circuit. Hybrid energy storage (HES) methods have attracted some attention because they can accelerate the energy transfer time of the CLC and increase the output voltage amplitude.

[0045] In related technologies, HES can also be used to excite excimer lasers. However, compared with traditional CES circuits, the addition of a charging branch changes the original power supply topology and requires the use of more IGBTs, which may reduce the reliability of the power supply and increase control complexity.

[0046] In summary, without altering the existing all-solid-state pulse power supply circuit topology, this study explores effective methods to shorten the single-pulse period t. tot (especially the transition time t of the voltage multiplication circuit) ch The method of ) is particularly important.

[0047] The present disclosure will now be described in detail with reference to specific embodiments.

[0048] It should be noted that, by Figure 1 and Figure 2 It can be seen that the energy transfer time t of the voltage multiplication circuit ch Occupied t tot Most of the time, it limited f max The increase in voltage multiplication circuit. In order to achieve the transformation from CES to HES without changing the circuit topology and without adding additional semiconductor switches, one method is to extend the turn-on time of the IGBT switch in the voltage multiplication circuit and use the primary winding of the transformer to charge the energy storage inductor L0.

[0049] To compare the energy transfer characteristics of the voltage multiplication circuit with the boosting capacitor C1 under CES and HES methods, circuit simulation can be used to compare the output voltage waveforms (including the voltage waveform across the boosting capacitor C1) of the voltage multiplication circuit under both energy storage types. Figure 3This disclosure provides a circuit diagram and simulation results for a CLC loop using both conventional CES and a specific HES, as shown in one embodiment. Figure 3 As shown in (a), the simulation parameters of the CLC circuit are C0 = 110μF, C1 = 1μF, L0 = 10μH, and the initial conditions are U0 = 1kV and I0 = 0A (CES) or 20A (HES) for comparison. Figure 3 (b) shows the voltage U of the boost capacitor C1. C1 The waveforms of the loop current I are reduced using initial values ​​U0 and I0, respectively. It can be observed that when using the traditional CES method (I0 = 0A), U... C1 The peak value of 2U0 is reached at t = 300 μs, while under the HES method (I0 = 20 A), U C1 The peak value of U0 is 3.2 at t = 200 μs. The results indicate that when I0 = 20 A, U... C1 voltage rise rate dU C1 / dt is faster than the result without I0, especially when the boost capacitor C1 starts charging. This is because, according to the principle of capacitors, dU C1 / dt is determined by the current I flowing through it. These results confirm that, compared with the conventional CES method, the HES resonant CLC circuit provides a higher voltage multiplication ratio βU and a shorter energy transfer time t within a single pulse cycle. ch .

[0050] Secondly, the above results can be explained by deriving the CLC circuit equations based on HES. For Figure 3 The differential equation of the CLC circuit shown in (a) is:

[0051]

[0052] The sine term represents the energy from the energy storage inductor L0, and the cosine term represents the energy from the energy storage capacitor C0.

[0053] For CES circuits, the initial condition is U C0 =U0 and I0 = 0 indicates that only cosine terms exist. In contrast, in the HES circuit, the initial condition is U C0 =U0 and I0≠0, output voltage U C1 Including cosine and sine terms, resulting in a higher voltage multiplication ratio β. U and shorter charging cycles t ch Among them, the voltage multiplication ratio β U It can exceed 2 (the theoretical upper limit of the voltage multiplication circuit based on CES). This means that under the same input conditions, the power supply circuit based on HES can output a higher voltage pulse amplitude.

[0054] In addition, shorter charging cycles t ch It is expected to increase the maximum repetition frequency f max . Figure 4 This disclosure provides a waveform diagram of the charging voltage of the boosting capacitor under different initial currents of the energy storage inductor in a CLC circuit using a hybrid energy storage (HES) according to an embodiment of the present disclosure; as shown. Figure 4 As shown, in order to further determine the charging characteristics of the boost capacitor C1 under different initial currents I0, Equation (1) was used to calculate U when I0 = 0A, 5A, 10A and 15A. C1 The waveform, where the solid line U C1 This was obtained by adding a dashed line of the same color (the sine term Usin) to the solid orange line (the fixed cosine term Ucos). The results clearly show that as I0 increases, U... max The rise time t of the voltage pulse continues to increase. ch Always in advance. The black dashed line shows the voltage peak point (U). max , t ch The changes in U show a tendency to shift upwards and to the left as I0 increases. It can be observed that as I0 increases, U... max The upward trend of I0 becomes larger, while the peak time gradually saturates at 190 μs. This result indicates that as I0 increases, the effect on t... ch The reduction effect gradually saturates, while for U max The effect of increasing I0 becomes stronger. It can be inferred that in a HES-based voltage multiplication circuit, a relatively small I0 can effectively shorten t. ch A larger I0 can effectively increase U max .

[0055] In summary, in order to achieve the goal of... Figure 1 The conversion of the CES to HES voltage multiplication loop circuit in the conventional power supply circuit shown can provide a charging path for the energy storage inductor L0 during or after the discharge of the boost capacitor C1. For example, without changing the circuit topology, the small inductance loop formed by the primary leakage inductance of the transformer can be used to charge the energy storage inductor L0 in the original power supply circuit.

[0056] For example, Figure 5 This is a schematic diagram of a hybrid energy storage pulse power supply circuit provided in an embodiment of this disclosure; as shown below. Figure 5 As shown, the HES circuit includes: an energy storage capacitor C0, a boost capacitor C1, an energy storage inductor L0, a transformer switch, and a transformer; wherein,

[0057] The energy storage capacitor C0, the energy storage inductor L0, and the boosting capacitor C1 are connected in series to form a voltage multiplication circuit.

[0058] The boosting capacitor C1, the transformer switch, and the primary coil of the transformer are connected in series to form a pulse forming circuit;

[0059] The conduction time of the transformer switch is greater than the discharge time of the boost capacitor C1.

[0060] In one embodiment, the transformer may be, for example, a pulse transformer (PT).

[0061] In one embodiment, the transformer switch may be a semiconductor switch, such as an IGBT. PT .

[0062] In the following embodiment, the conduction time t of the transformer switch on＝ t dis+ t extd , where t extd The extended time is the time the transformer switch remains in the conducting state after the boosting capacitor C1 has discharged. This is due to the extended discharge time t of the boosting capacitor C1. dis The basic time is fixed, determined only by the parameters of the components in the circuit. Therefore, extending the conduction time t of the transformer switch... on It is equivalent to only extending t extd .

[0063] For example, in one scenario, the transformer switch is an IGBT. PT At that time, the input to the IGBT can be extended. PT The duration of the high level of the PWM wave at the gate is increased to extend the on-time t of the transformer switch. on .

[0064] It should be noted that by removing Figure 1 IGBT (Incremental Voltage Multiplier) switch in a medium voltage multiplier circuit VM The conduction time of the transformer switch is changed to the discharge time t of the boost capacitor C1. dis Extend the discharge time t to be greater than that of the boost capacitor C1 dis This allows the small inductance loop formed by the primary leakage inductance of the transformer to provide a charging path for the energy storage inductor L0 after the boost capacitor C1 discharges, thus enabling the charging of the energy storage inductor L0 from the primary leakage inductance of the transformer. Figure 1 The conversion of the CES to HES voltage multiplication loop circuit in the conventional power supply circuit shown is illustrated.

[0065] Alternatively, in one embodiment of this disclosure, such as Figure 5 As shown, the hybrid energy storage pulse power supply circuit also includes a boost diode D1; wherein,

[0066] The energy storage capacitor C0, energy storage inductor L0, boosting capacitor C1, and diode D1 are connected in series to form a voltage multiplication circuit.

[0067] It should be noted that the boost diode D1 is used to prevent energy backflow (sometimes called a reverse diode). If the boost diode D1 is not set after the energy of the boost capacitor C1 reaches its peak value, the energy in the boost capacitor C1 will return to the energy storage capacitor C0. If the boost diode D1 is set and the transformer switch is turned off, the energy can always be on the boost capacitor C1, which means that the voltage of the boost capacitor C1 is stable at the peak voltage.

[0068] Optionally, in one embodiment of this disclosure, the hybrid energy storage pulse power supply circuit further includes a magnetic compression module and a discharge module; wherein,

[0069] The secondary coil of the transformer is connected to the input terminal of the magnetic compression module to form a magnetic compression circuit;

[0070] The output terminal of the magnetic compression module is connected to the discharge module.

[0071] It should be noted that the magnetic compression module and discharge module of the hybrid energy storage pulse power supply circuit provided in this embodiment can, for example, be integrated with... Figure 1 The related modules of the all-solid-state pulse power supply circuit shown have the same structure, so they will not be described again here.

[0072] Optionally, in one embodiment of this disclosure, the hybrid energy storage pulse power supply circuit, during repetitive frequency operation, has any single pulse period changed from the original t... tot =t d +t ch +t dis Transform into t tot =t dis +t extd +t ch. Because the booster switch IGBT was removed VM Only one transformer switching transistor IGBT is used. PT No dead time needs to be set; it is determined by the conduction time t of the transformer switch. on The charging time t of the boost capacitor C1 ch Composition. Among them, the conduction time t of the transformer switch. on The newly added extended time t extd Its conduction time t on＝ t dis+ t extd .

[0073] According to some embodiments, such as Figure 5 As shown, the hybrid energy storage pulse power supply circuit operates at a repetitive frequency during any single pulse period t. totIt can be divided into the following three stages:

[0074] The first stage P1-t dis When the transformer switch is in the ON state, the boost capacitor C1 transfers energy to the primary secondary capacitor C through the transformer's magnetic circuit. m1 The boosting capacitor C1 discharges from its stored state to a depleted state over a duration of t. dis ;

[0075] During repetitive frequency operation, the boosting capacitor C1 is fully charged and in a stored state at the end of the previous pulse, P1-t dis After the process is completed, almost all the energy in the boost capacitor C1 is depleted, leaving it in a depleted state.

[0076] Among them, the transformer switch is an IGBT. PT At that time, the input to the IGBT can be controlled. PT The PWM waveform is at a high level to enable the IGBT PT Conduction.

[0077] The second stage P2-t extd By extending the conduction time t of the transformer switch on＝ t dis To t on＝ t dis+ t extd The boost capacitor C1 is affected by the primary leakage inductance L. leakage Short circuit (the original leakage inductance L) leakage Typically less than 10 μH, U C1 Fixed at 0V), energy storage capacitor C0, energy storage inductor L0, and primary leakage inductance L leakage Forming the first charging circuit, at t extd During this period, the energy storage capacitor C0 charges the energy storage inductor L0 through the first charging circuit. The inductor current I corresponding to the energy storage inductor L0 continues to increase until the transformer switch changes from the on state to the off state, while the voltage on the energy storage capacitor C0 gradually decreases.

[0078] Among them, to P2-t extd At the end, the inductor current I reaches its maximum value I0, U C0 Slightly lowering to voltage U0, I0 and U0 directly determine the charging time required for the boost capacitor C1 and the peak voltage U in the next process. max I0 and U0 can be represented as:

[0079]

[0080] U0=U dc cosωt extd (3)

[0081] Where ω is the resonant angular frequency of the circuit.

[0082] The third stage P3-t ch With the transformer switch in the off state, the energy storage capacitor C0, energy storage inductor L0, and boosting capacitor C1 form a second charging circuit. The energy storage capacitor C0 and energy storage inductor L0 charge the boosting capacitor C1 through the second charging circuit until the boosting capacitor is in a stored state. The duration is t. ch .

[0083] Among them, the transformer switch is an IGBT. PT At that time, the input to the IGBT can be controlled. PT The PWM waveform is at a low level to make the IGBT PT closure.

[0084] Among them, the energy storage capacitor C0 and the energy storage inductor L0 transfer capacitive and inductive energy to the boost capacitor C1 to charge the boost capacitor C1.

[0085] Among them, the charging voltage U of the boost capacitor C1 C1 The expression for can be given by equation (1).

[0086] Among them, P3-t ch Duration of the phase (t) ch ) by U C1 Reaching peak voltage U max The charging time is determined by taking the derivative of equation (1). ch and peak voltage U max .

[0087] Optionally, in one embodiment of this disclosure, in order to verify Figure 5 The feasibility of improving the maximum repetition frequency and maximum output voltage of the hybrid energy storage pulse power supply circuit shown is demonstrated by constructing an all-solid-state pulse power supply based on HES with the core component parameters shown in Table (1).

[0088] Table (1)

[0089]

[0090] In some embodiments, Figure 6 This is a schematic diagram illustrating the test results of an all-solid-state pulse power supply based on HES, provided in an embodiment of this disclosure; as shown. Figure 6 As shown, the focus is on IGBTs. PT On-time t on The impact on the energy transfer characteristics of the voltage multiplication circuit (especially the changes in various parts of the total time of a single pulse, the maximum output voltage, etc.). Figure 7The statistical results of key parameters under different conduction times provided in the embodiments of this disclosure are shown in the figure. The results show that by extending the IGBT... PT On-time t on This enables the transition from CES to HES circuits, allowing for a continuous increase in the initial current I0 of the energy storage inductor during the second stage, while simultaneously improving the output voltage U. max And shorten the duration of the third stage P3, i.e., t ch However, t ch The decreasing trend will gradually saturate, and because of t tot The newly introduced t extd The linear increase makes the total time t in the test results... tot It shows an upward trend.

[0091] Due to limitations in experimental conditions, the range of research variables is limited. Simulation can not only verify experimental results but also expand the scope of research. In some embodiments, the circuit equations based on the HES circuit are derived, wherein the initial voltage and initial current of the newly added second stage P2 can be derived through equations (2) and (3), and the charging voltage of the third stage P3 (boost capacitor C1) can be calculated using equation (1).

[0092] Optionally, in one embodiment of this disclosure, by conducting experimental tests and simulation comparisons on the HES-based all-solid-state pulse power supply constructed with the core component parameters shown in Table (1), the hybrid energy storage pulse power supply circuit provided in this embodiment of the disclosure has been shown to provide two optional enhancement modes: voltage enhancement mode (VE mode) and frequency enhancement mode (FE mode).

[0093] According to some embodiments, Figure 8 This is a schematic diagram illustrating the operation of a voltage enhancement mode provided in an embodiment of this disclosure; as shown below. Figure 8 As shown, for voltage enhancement mode, in any single pulse cycle during repetitive frequency operation of the hybrid energy storage pulse power supply circuit, the voltage at which the boost capacitor C1 is charged to the energy storage state is the peak voltage U. max , that is U C1 =U max At that time, the IGBT is turned off by a low level of the PWM wave. PT Then the next pulse cycle begins (the boost capacitor C1 is charged and then discharged).

[0094] In some embodiments, the peak voltage U max Greater than voltage threshold U' max Voltage threshold U' maxThis refers to the highest voltage that the boost capacitor C1 can be charged to in the traditional CES circuit. In other words, it's the highest voltage value that the boost capacitor C1 can be charged to when the transformer switch's on-time equals the discharge time of the boost capacitor C1. This voltage threshold U'... max The limit can be 2kV, meaning the voltage threshold is no greater than 2kV (slightly less than 2kV), and the peak voltage is greater than 2kV. Voltage threshold U' max For example, it could be 1.966kV.

[0095] In some embodiments, Figure 9 This is a simulation prediction graph showing the results of a voltage enhancement mode provided in an embodiment of this disclosure. It illustrates the study of the independent variable t. extd During the process of being extended to 1200 μs, t tot and U max Changes. For example... Figure 9 As shown, in voltage enhancement mode, the HES circuit can continuously enhance the amplitude of the voltage pulse by extending the IGBT turn-on time. When t extd When extended to 1200 μs, U max Up to 10.5kV. In contrast, traditional CES circuits can only output high voltages of around 2kV. However, the prediction results also show that... tot It shows a continuously increasing trend, which means that the highest repetition frequency f in voltage enhancement mode is... max Showing a downward trend (f max =1 / t tot Since the parameters of the pulse transformer and magnetic compression module remain completely unchanged, the voltage amplitude boosting rate of the all-solid-state pulse power supply circuit is equivalent to the voltage amplitude boosting rate of the voltage multiplication circuit. Therefore, the voltage boosting mode is only suitable for operation at lower repetition frequencies (below f). max Applications that require higher voltage amplitude output.

[0096] According to some embodiments, Figure 10 This is a schematic diagram illustrating the operation of a repetition rate enhancement mode provided in an embodiment of this disclosure; as shown below. Figure 10 As shown, for the repetition rate enhancement mode, in any single pulse cycle during repetition frequency operation, the boost capacitor C1 is charged to the voltage threshold, and then the IGBT is turned off by a low-level PWM wave. PT Then, the next pulse cycle begins.

[0097] In some embodiments, the charging time of the boost capacitor C1 is less than a charging time threshold. The charging time threshold is the charging time of the boost capacitor C1 in the original conventional CES circuit, that is, when the conduction time of the transformer switch is equal to the discharge time of the boost capacitor C1, the boost capacitor C1 is charged to the voltage threshold U'. maxThe time required.

[0098] In some embodiments, Figure 11 The figures provided here are experimental and simulation results of a frequency repetition enhancement mode according to an embodiment of this disclosure; wherein, Figure 11 (a) shows the I0 = 0A to 20A and the IGBT is set. PT The voltage threshold for shutdown is U C1 =1.966kV time and highest repetition frequency f max The experimental results Figure 10 Figure (b) shows the voltage threshold for I0 = 0A to 40A and the IGBT turn-off voltage is set to U. C1 =1.98kV time and highest repetition frequency f max Theoretical results. For example... Figure 10 As shown, with t on The increase of t tot Overall, it first decreases and then increases (f) max (Increase first, then decrease). Repeated experiments show that when I0 = 9.6A, f max The pulse current can be increased from 3.4 kHz in a conventional CES circuit to a maximum of 3.54 kHz in the hybrid energy storage pulse power supply circuit provided in this disclosure embodiment, showing an increase of 4.1%. In comparison, theoretical calculations at I0 = 10 A show that f... max The frequency can be increased from 3.12kHz (under traditional CES circuit conditions) to 3.71kHz, an increase of 18.9%. The simulation results show a higher highest repetition frequency fp compared to experimental results. max The improved voltage increase is due to the negative voltage phenomenon at the end of the discharge of the boost capacitor C1. This can be addressed by setting capacitor matching (C1 = N). 2 C m1 This is to eliminate the negative voltage phenomenon at the end of the discharge of the boost capacitor C1. This power mode is expected to increase the average power of the excimer laser by increasing the maximum repetition frequency of the power supply (laser) while keeping other conditions constant.

[0099] According to some embodiments, for any voltage multiplication circuit (energy storage capacitor C0, boosting capacitor C1, energy storage inductor L0), the value of I0 in the repetition rate enhancement mode can be determined by the circuit equations derived above based on the HES circuit to obtain the highest repetition rate f. max The maximum value.

[0100] In some embodiments, due to t tot =t dis +t extd +t ch. t in dis Since it remains unchanged, t can be... extd +tch. The function T simplified to I0 m (I0)=t extd +t ch. Then for T m Find the extreme value and let T m '=0(T m 'For T m The derivative of the extreme point (I) can be used to find the x-coordinate of the extreme point. 0m At this time t tot Minimum and highest repetition frequency f max The maximum value is obtained, thus yielding the optimal value of the voltage multiplication circuit in the repetition rate enhancement mode.

[0101] For example, let the initial conditions and simplification conditions be U. dc ≈U0=2000V, C0>>C1, L0>>L leakage T m The simplified formula can be obtained by setting '=0:

[0102]

[0103] Here, C0, C1, and L0 can be considered constants. After obtaining these parameters input by the user, I can be solved. 0m Approximate value, in this I 0m The maximum repetition frequency f can be obtained at the value of . max And the smallest t tot .

[0104] Among them, the solution I 0m Substituting into formula (2) yields the minimum t. tot Then, by setting formula (1) = 2000, the corresponding t can be solved. ch This allows us to calculate the maximum highest repetition frequency f. max .

[0105] In summary, the hybrid energy storage pulse power supply circuit provided in this embodiment can adjust its operating parameters by extending and adjusting the on-time of the transformer switch. When outputting voltage pulses of the same amplitude and width, adjusting the on-time of the transformer switch can further increase the maximum repetition frequency of the pulse power supply and pulse discharge, and ultimately increase the average power of the excimer laser. When pursuing higher amplitude voltage pulse output, increasing the on-time of the transformer switch can effectively increase the amplitude of the voltage pulse, but the maximum repetition frequency of the power supply will decrease.

[0106] Furthermore, the term “exemplary” is used herein to mean serving as an example, instance, or illustration. Any aspect or design described herein as “exemplary” is not necessarily to be construed as advantageous compared to other aspects or designs. Rather, the use of the term “exemplary” is intended to present the concept in a concrete manner. As used herein, the term “or” is intended to mean an inclusive “or” rather than an exclusive “or.” That is, unless otherwise specified or clear from the context, “X applies A or B” is intended to mean any of the natural inclusive arrangements. That is, “X applies A or B” satisfies any of the foregoing instances if X applies A; X applies B; or both X applies A and B. Additionally, unless otherwise specified or clear from the context to refer to the singular form, the articles “a” and “an” as used in this application and the appended claims are generally understood to mean “one or more.”

[0107] Similarly, although this disclosure has been shown and described with respect to one or more implementations, equivalent variations and modifications will occur to those skilled in the art upon reading and understanding the specification and drawings. This disclosure includes all such modifications and variations and is limited only by the scope of the claims. In particular, with respect to the various functions performed by the components described above (e.g., elements, resources, etc.), unless otherwise indicated, the terminology used to describe such components is intended to correspond to any component (functionally equivalent) that performs the specific function of the described component, even if structurally not equivalent to the disclosed structure. Furthermore, although specific features of this disclosure may have been disclosed with respect to only one of several implementations, such features may be combined with one or more other features of other implementations, as may be desired and advantageous to any given or particular application. Moreover, with regard to the terms “comprising,” “owning,” “having,” “having,” or variations thereof as used in the detailed description or claims, such terms are intended to be inclusive in a manner similar to the term “including.”

[0108] Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the following claims.

[0109] It should be understood that this disclosure is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this disclosure is limited only by the appended claims.

Claims

1. A hybrid energy storage pulse power supply circuit, characterized in that, include: Energy storage capacitors, boosting capacitors, energy storage inductors, transformer switches, and transformers; among them, The energy storage capacitor, the energy storage inductor, and the boosting capacitor are connected in series to form a voltage multiplication circuit; The boosting capacitor, the transformer switch, and the primary coil of the transformer are connected in series to form a pulse forming circuit; The conduction time of the transformer switch is greater than the discharge time of the boost capacitor; The hybrid energy storage pulse power supply circuit includes the following three stages in any single pulse cycle during repetitive frequency operation: The first stage: the transformer switch is in the conducting state, the booster capacitor forms a circuit through the transformer, and the booster capacitor discharges from the stored state to the empty state; The second stage: The boosting capacitor is short-circuited by the primary leakage inductance. The energy storage capacitor, the energy storage inductor, and the primary leakage inductance form a first charging circuit. The energy storage capacitor charges the energy storage inductor through the first charging circuit until the transformer switch changes from the on state to the off state. The third stage: The transformer switch remains in the closed state, and the energy storage capacitor, the energy storage inductor, and the boosting capacitor form a second charging circuit. The energy storage capacitor and the energy storage inductor charge the boosting capacitor through the second charging circuit until the boosting capacitor is in the energy storage state.

2. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that, The hybrid energy storage pulse power supply circuit also includes a boosting diode; wherein... The energy storage capacitor, the energy storage inductor, the boosting capacitor, and the boosting diode are connected in series to form the voltage multiplication circuit.

3. The hybrid energy storage pulse power supply circuit according to claim 2, characterized in that, The hybrid energy storage pulse power supply circuit also includes a magnetic compression module and a discharge module; wherein... The secondary coil of the transformer is connected to the input terminal of the magnetic compression module to form a magnetic compression circuit. The output terminal of the magnetic compression module is connected to the discharge module.

4. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that, Any single pulse cycle of the hybrid energy storage pulse power supply circuit during repetitive frequency operation is composed of the conduction time of the transformer switch and the charging time of the boost capacitor.

5. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that, The hybrid energy storage pulse power supply circuit operates in a voltage enhancement mode; wherein... In the voltage enhancement mode, during any single pulse cycle of the repetitive frequency operation of the hybrid energy storage pulse power supply circuit, after the boosting capacitor is charged to the peak voltage, it enters the next pulse cycle. The peak voltage is greater than a voltage threshold, which is the highest voltage value to which the boosting capacitor is charged when the conduction time of the transformer switch is equal to the discharge time of the boosting capacitor.

6. The hybrid energy storage pulse power supply circuit according to claim 1, characterized in that, The operating modes of the hybrid energy storage pulse power supply circuit include a repetition rate enhancement mode; wherein... In the repetition rate enhancement mode, during any single pulse cycle of the hybrid energy storage pulse power supply circuit operating at the repetition frequency, after the boosting capacitor is charged to a voltage threshold, it enters the next pulse cycle. The charging time of the boosting capacitor is less than the charging time threshold. The voltage threshold is the highest voltage value to which the boosting capacitor is charged when the conduction time of the transformer switch is equal to the discharge time of the boosting capacitor. The charging time threshold is the time required for the boosting capacitor to be charged to the voltage threshold when the conduction time of the transformer switch is equal to the discharge time of the boosting capacitor.

7. The hybrid energy storage pulse power supply circuit according to claim 5, characterized in that, The voltage threshold is no greater than 2kV, and the peak voltage is greater than 2kV.

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