Apparatus and method for non-immersive wet chemical treatment of planar substrates and device for holding substrates

Abstract

An apparatus for holding a planar substrate (1) in an apparatus for non-immersive wet chemical treatment of the substrate (1) comprises a support structure (34). The support structure (34) comprises at least one part (36a, 36b) for engaging a support in order to suspend the support structure (34) in the apparatus. The device comprises: at least one clamping device supported by the support structure (34) for holding the substrate (1) in a plane; and at least a first upper diversion part (37) arranged on one side of the plane and having an inward facing surface (44) facing inward with respect to the plane and an outward facing surface facing outward. The outer facing surface comprises: an upper outer facing surface section (46) wettable by a flow of liquid directed onto the upper outer facing surface section (46); and a lower outer facing surface section (47) extending from a transition between at least a central portion of the upper outer facing surface section (46) and the lower outer facing surface section (47) to a lower edge (49). The strips (45) of the inner facing surface extend longitudinally along the lower edge (49) and transversely upward to the lower edge (49). At least a central longitudinal section of the strip (45) is movable into engagement with a major surface of the substrate (1) over the entire length of the section.

Description

Technical Field

[0001] The present invention relates to a device for holding a planar substrate in an apparatus for non-immersion wet chemical processing of said substrate, said device comprising:

[0002] Support structure,

[0003] wherein the support structure comprises at least one feature for engaging a support member so as to suspend the support structure in the apparatus;

[0004] at least one clamping device supported by the support structure for holding the substrate in a plane; and

[0005] at least a first upper flow guide part arranged on one side of said plane and having an inner facing surface facing inwards and an outer facing surface facing outwards relative to said plane,

[0006] wherein the outwardly facing surface comprises:

[0007] an upper outwardly facing surface section which is wettable by a flow of liquid directed onto said upper outwardly facing surface section, and

[0008] a lower outwardly facing surface segment extending from a transition between at least a central portion of the upper outwardly facing surface segment and the lower outwardly facing surface segment to a lower edge, and

[0009] wherein the inner facing strip extends longitudinally along the lower edge and laterally upward to the lower edge.

[0010] The invention also relates to an apparatus for non-immersion wet-chemical processing of planar substrates, said apparatus comprising at least one such device.

[0011] The invention also relates to a method for non-immersion wet chemical processing of planar substrates. Background Art

[0012] US2021 / 054521 A1 discloses a substrate support frame including a first holding member and a second holding member. The first holding member and the second holding member are formed of a metal such as titanium, for example, and their surfaces are coated with an insulating coating. The substrate is held by the substrate support frame by clamping between the first holding member and the second holding member. The first holding member includes a frame-shaped first body part in which a first opening is formed, three first connecting parts and a first arm part. The first arm part is arranged above the first body part, and the first arm part and the first body part are bridged by three first connecting parts. The second holding member includes a frame-shaped second body part in which a second opening is formed, three second connecting parts and a second arm part. The second holding member also has a second arm part arranged above the second body part, and the second arm part and the second body part are bridged by three second connecting parts. The first body part includes a frame-shaped first body, a substrate contact and a frame-shaped inner seal. The substrate contact and the inner seal are arranged on the surface of the first body facing the second holding member. This facing surface is a first holding surface for holding the substrate. The second body part includes a frame-shaped second body, a substrate contact, a frame-shaped inner seal, and a frame-shaped outer seal. The substrate contact, the inner seal, and the outer seal are arranged on the surface of the second body facing the first holding member. This facing surface is a second holding surface for holding the substrate. When the first holding member and the second holding member clamp the substrate, the inner seal and the substrate contact contact the substrate. In addition, the outer seal contacts the first body. Therefore, the substrate contact is surrounded by the inner seal, the outer seal, the first body, and the second body.

[0013] US2013 / 0161197 A1 discloses a cathode suspension device, which includes: a horizontal support and a suspension support, which are slidably supported to a current track; a conductive base, which is coupled to a feeding unit above the horizontal support; a guide rail, which is arranged below the suspension support; and a plurality of clamps, which are mounted on a variable slide disposed on the guide rail and fixing the substrate. The conductive contact of the clamp is immersed in a plating solution to implement cathode conduction of the substrate.

[0014] US10,513,779B2 discloses a surface treatment system. The substrate is clamped by the clamp of the suspension device and held at the upper end. In one embodiment, a tube as a treatment solution release section is arranged on both sides of the substrate held by the suspension device. Each tube has a hole so that the treatment solution can be discharged obliquely upward. The discharged treatment solution flows downward along the surface of the substrate and reaches the bottom, and is circulated by the pump and discharged from the tube again. In an alternative embodiment, the treatment solution is discharged obliquely downward from the slope. The treatment solution pumped by the pump is stored in a reservoir. When the liquid level is higher than the edge of the slope, the treatment solution overflows onto the slope. The treatment solution that has overflowed onto the slope contacts the treatment solution receiving part of the suspension device and flows downward onto the substrate. The treatment solution receiving part extends across the entire width of the suspension device and is arranged across the tip of the clamp. Each treatment solution receiving part has a flat plate forming its proximal portion and a protruding section that is raised in a semicircular shape to form its distal portion in one embodiment. A clamping protrusion for clamping and grabbing the substrate is arranged along the inner lower end of each protruding section. The sticking prevention protrusion is provided to prevent the substrate from bending at the portion without the clamping protrusion. Preferably, the processing solution flows from the processing solution receiving part onto the substrate at an angle close to right angles to the surface. Alternatively, the flat plate may be formed to be thick (preferably 20 mm to 40 mm) with a rounded outer edge (preferably R=10 mm or more).

[0015] A problem with the known device is that the liquid flowing onto the substrate tends to form eddies there, which affect the uniformity of the surface treatment at this location. Summary of the invention

[0016] It is an object of the invention to provide a device, an apparatus and a method of the type mentioned above in the opening paragraph which allow a relatively uniform surface treatment at least up to approximately the upper edge of the exposed area of ​​the main surface of the substrate.

[0017] According to a first aspect, the object is achieved by a device according to the invention, characterized in that at least a central longitudinal section of the strip is movable into engagement with a main surface of a substrate over the entire length of said section.

[0018] The device is suitable for holding a planar substrate in an apparatus for non-immersion wet chemical treatment during treatment. In this type of treatment, the substrate is not immersed in a bath of treatment liquid, but is held in the apparatus and wetted by means of a liquid directed, in this case, onto an upper guide part. From there, the liquid flows downward onto the exposed areas of the main surface of the substrate to effect the treatment. The liquid then drips onto the bottom of a basin or tank included in the apparatus.

[0019] The planar substrate may be flexible, such that the substrate is only planar when held by the clamping device.

[0020] The device comprises a support structure comprising at least one part for engaging a support so as to suspend the support structure in the apparatus. Thus, the configuration and orientation of the at least one part for engaging the support determines in which direction the device is oriented upwards in use and thus determines which outwardly facing surface segment is the upper outwardly facing surface segment and which outwardly facing surface segment is the lower outwardly facing surface segment. Similarly, the position, orientation and configuration of the at least one clamping device determines the position and orientation of the plane, which can thus be determined even in the absence of a substrate.

[0021] The device comprises at least a first upper flow guiding part, which is arranged on one side of a plane and has an inner facing surface facing inwards relative to the plane and an outer facing surface facing outwards. That is, the first upper flow guiding part does not intersect the plane, but has an inner facing surface facing in the direction of the plane and an outer facing surface not facing in the direction of the plane, or even not inclined. In this context, the direction facing the inner facing surface has at least a component perpendicular to the plane. In principle, the outer facing surface may include a section facing in a direction completely parallel to the plane.

[0022] The inwardly facing surface and the outwardly facing surface need not be completely flat. The outwardly facing surface is generally unobstructed and can be wetted by a liquid flow directed onto the upper outwardly facing surface segment. The lower outwardly facing surface segment is adjacent to the upper outwardly facing surface segment or at least the central segment thereof and extends to the lower edge of the outwardly facing surface segment. This will also be the lower edge of the first upper flow-guiding part. The lower edge can be a straight edge or a curve. The embodiment with a straight edge is relatively easy to implement. A strip facing the inwardly facing surface can be defined, and in use, at least its central segment (seen in the longitudinal direction along the length of the edge) can be moved to engage with the main surface of any planar substrate positioned in a plane defined by at least one clamping device. Therefore, there is no gap between the lower edge and the main surface. The engagement between at least the central segment of the strip and the main surface of the substrate will be substantially uninterrupted within the length of the central segment. Any liquid flowing downward over the upper and lower outwardly facing surface segments will experience a smooth transition to the exposed area of ​​the main surface of the planar substrate, and in use, the flow continues as a balanced film flow on and above the exposed area. The presence of relatively few or no eddy currents ensures uniform processing of the exposed area of ​​the major surface of the substrate up to or nearly up to the contact line with the lower edge.

[0023] The central longitudinal section of the strip is the section in the middle where either the outward or inward facing surface can be seen. Where the lower edge is rounded at the corners at the longitudinal ends, it may not engage the flat major surface of the planar substrate. In many embodiments, the strip will be movable into engagement with the major surface of the planar substrate over the entire length of the strip.

[0024] Depending on whether both major surfaces of the substrate are to be processed, there may be a second upper flow guide part on the opposite side of the plane. In general, there may be at most one upper flow guide part for either side. In most cases, the lower edge will extend above the maximum dimension of the exposed area of ​​the major surface of any substrate held in the plane by the clamping device. In most cases, this dimension will be determined by the support structure, which will generally frame the area of ​​the plane in which the substrate can be held.

[0025] The strips facing the inner surface need not be flat on a microscopic level, particularly if made of a material having a substantially different hardness than the substrate surface.

[0026] The strip may have an increased surface roughness compared to other portions of the inner facing surface.

[0027] In an embodiment of the device, the at least one clamping device comprises at least one upper clamping device and the arms of the upper clamping device are arranged to engage the main surface of the substrate at a level equal to or above the strip.

[0028] The effect is that the arms do not interfere with the flow of liquid from the first upper flow guide part onto and over the major surface of the substrate.

[0029] In an example of this embodiment, the arms of the upper clamping device are arranged to engage the major surface between the plane and the strip.

[0030] Thus, a clamping joint is present between the upper flow guide part and the main surface of the substrate. This can be close to the upper edge of the planar substrate in use, so that most of the main surface of the substrate is exposed and can be processed.

[0031] In the example of any embodiment in which the at least one clamping device comprises at least one upper clamping device and the arms of the upper clamping device are arranged to engage the main surface of the substrate at a level equal to or above the strip, the first upper guide part forms the arms of the upper clamping device.

[0032] Thus, no separate clamping device is required and the device can be relatively compact and have relatively few parts.The other arm of the upper clamping device can be a part comprised in or fixed to the supporting structure of the device.

[0033] An embodiment of the device further comprises a second one of the upper flow guiding parts being arranged on an opposite side of the plane to the first upper flow guiding part.

[0034] This embodiment is suitable for relatively uniform treatment of both major surfaces of a planar substrate. The second upper flow guide part may include the features of any or all of the embodiments of the first upper flow guide part. In many such cases, if the shape and size are not the same, the second upper flow guide part will be at least a mirror image (relative to the plane) of the first upper flow guide part.

[0035] In an example of any embodiment of the device in which the device further comprises a second one of the upper flow guiding parts arranged on an opposite side of the plane to the first upper flow guiding part, the first and second upper flow guiding parts are arranged to clamp the planar substrate between them.

[0036] Thus, no further upper clamping means are required. This makes the device relatively compact and saves on parts. One or more resilient elements may be provided to urge the first and second flow-guiding parts, more particularly the strips of the inner facing surfaces thereof, towards each other. Since at least the central longitudinal section of the strip is movable into engagement with the major surface of the planar substrate over the entire length of the section, there is a relatively long contact area extending over substantially the width of the substrate. This helps prevent damage to the substrate surface. Furthermore, in case the substrate is held under tension, the tension is relatively evenly distributed over the width of the substrate.

[0037] In an embodiment of the device, at least a first of the upper flow guiding parts is pivotably attached to the supporting structure by means of a pivot axis extending parallel to the plane.

[0038] Thus, it is relatively easy to move the strip or its central section into engagement with the major surface of the planar substrate, regardless of the exact thickness of the planar substrate. One or more biasing means may be provided between the support structure and the one or more pivoting upper flow guiding parts to bias the strip towards the plane. If the lower edge is straight, the lower edge will be at least approximately parallel to the pivot axis. The pivotable attachment may be by way of a pivot axis protruding from one of the support structure and the upper flow guiding part, the pivot axis being inserted through a corresponding aperture in the other of the support structure and the upper flow guiding part.

[0039] In an embodiment, at least a first of the upper flow guiding parts is at least partially made of a plate-shaped segment defining at least an inner facing surface and an outer facing surface.

[0040] This makes the upper flow guide part relatively easy to manufacture by cutting segments from a plate-shaped material and joining these together (e.g., by welding or bonding). The portion of the upper flow guide part used to attach the upper flow guide part to the support structure does not need to be made of plate-shaped segments. At least the part defining the inner and outer facing surfaces will typically be made of one or more plate-shaped segments.

[0041] In an embodiment of the device, the outwardly facing surface section is folded inwardly towards the plane at a transition from the upper outwardly facing surface section to the lower outwardly facing surface section.

[0042] In particular, in combination with features of the previous embodiments, this embodiment is relatively easy to manufacture. The transition may follow a straight line, e.g., a straight line parallel to the lower edge, to flow evenly across the width of the outwardly facing surface (the surface may be viewed in the direction of the plane). Embodiments allow one or both of the upper and lower outwardly facing surface sections to be flat while facing a different direction than the other of the upper and lower outwardly facing surface sections.

[0043] In an embodiment of the device, at least one of the upper outwardly facing surface section and the lower outwardly facing surface section is flat over at least a majority of its surface area.

[0044] This provides unimpeded flow across the relevant surface sections.

[0045] In an embodiment, at least the upper outwardly facing surface section is laterally bounded by surfaces facing each other and extending at an angle (eg laterally) to the plane.

[0046] The upper outwardly facing surface section is the surface section on which the process liquid flow impinges in use. Surfaces facing each other and extending at an angle to the plane define the limits of the upper outwardly facing surface section so that liquid cannot flow out of the upper outwardly facing surface section at its lateral edges, but is forced to flow onto the lower outwardly facing surface section.

[0047] In an embodiment of the device, the lower edge extends between lateral edges of the lower outwardly facing surface section, said lateral edges meeting the lower edge at respective corners of the lower outwardly facing surface section.

[0048] Thus, the lower outwardly facing surface section is substantially lip-shaped. The lateral edge may abut or be located adjacent to components of the support structure so that the lower outwardly facing surface section extends partially between these components. The lateral edge may be straight over most of its extent, and the lower edge may also be straight.

[0049] In an example of an embodiment in which the lower edge extends between the lateral edges of the lower outward surface segment, the lateral edges intersect with the lower edge at the corresponding corners of the lower outward surface segment, and the outward-facing surface further includes a lateral lower outward surface segment separated from the lower outward surface segment and adjacent to the upper outward surface segment, and the lateral lower outward surface segment and the upper outward surface segment extend at an angle less than 180° between each other.

[0050] Whereas the lower outwardly facing surface section slopes inwardly in the direction of the plane towards the lower edge, the lateral lower outwardly facing surface section therefore slopes outwardly towards its lower edge. This helps carry the process liquid away from the part of the support structure which laterally frames the substrate in use. Furthermore, in the case where the surface section is defined by a plate-shaped segment, the lateral lower outwardly facing surface section increases the rigidity of the upper flow-conducting part.

[0051] In an embodiment of the device, the at least one clamping device comprises at least one lower clamping device arranged to engage the substrate at a lower edge of the substrate.

[0052] This allows the device to be used to hold a relatively flexible substrate in a well-defined position in a plane. The substrate is less likely to wobble or warp.

[0053] An embodiment of the device further comprises at least a first lower guide part arranged on a respective side of the plane and having an inner-facing surface facing inwardly relative to the plane and an outer-facing surface facing outwardly, wherein the outer-facing surface comprises at least an upper outer-facing surface segment extending to an upper edge of the outer-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inner-facing surface extends longitudinally along the upper edge and laterally upwardly to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage with the main surface of the substrate over the entire length of the segment.

[0054] The lower flow guiding part guides the film flow reaching the bottom edge of the exposed area of ​​the major surface of the substrate away from the device. This can help shield the support structure and / or the lower clamping device from the processing liquid. If there is only one (first) upper flow guiding part and only one (first) lower flow guiding part, then they will be located on the same side (relative to the normal of the plane) of the plane in which the substrate is arranged to remain. That is, their respective inwardly facing surfaces will face the plane in a parallel direction.

[0055] In an example of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inward-facing surface facing inwardly and an outward-facing surface facing outwardly relative to the plane, wherein the outward-facing surface includes at least an upper outward-facing surface segment extending to an upper edge of the outward-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inward-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage the major surface of the substrate over the entire length of the segment, the upper edge extending between the lateral edges of the upper outward-facing surface segment, the lateral edges intersecting the upper edge at respective corners of the upper outward-facing surface segment.

[0056] This embodiment is easy to manufacture with a straight upper edge and thus a straight strip.A continuous line of contact with the flat main surface of a planar substrate can be achieved relatively easily.

[0057] In an example of this embodiment, the lateral edges extend from respective corners to respective second corners of the upper outwardly facing surface segment, and the upper outwardly facing surface segment widens at the second corners to increase the extent of the upper outwardly facing surface segment in a direction parallel to the upper edges.

[0058] In this embodiment, the portion of the lower guide part defining the upper outwardly facing surface section may be folded in between the cross members of the support structure framing the region in which the substrate is arranged to remain flat.

[0059] In an instance of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inner-facing surface facing inwardly and an outer-facing surface facing outwardly relative to the plane, wherein the outer-facing surface includes at least an upper outer-facing surface segment extending to an upper edge of the outer-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inner-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage the main surface of the substrate over the entire length of the segment, and at least segments of the upper outer-facing surface segment are laterally delimited by surfaces facing each other and extending at an angle (e.g., laterally) to the plane.

[0060] These surfaces, facing each other and extending at an angle (eg, transversely) to the plane, direct the liquid from the major surface of the substrate downwardly to the lower guide feature without spreading outwardly. Thus, the flow across the treated major surface is also relatively uniform at the bottom edge of its exposed area.

[0061] In an instance of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inward-facing surface facing inwardly relative to the plane and an outward-facing surface facing outwardly, wherein the outward-facing surface includes at least an upper outward-facing surface segment extending to an upper edge of the outward-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inward-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage with the main surface of the substrate over the entire length of the segment, the outward-facing surface of the lower guide part includes a lower outward-facing surface segment adjacent to the upper outward-facing surface segment, and the upper outward-facing surface segment and the lower outward-facing surface segment extend at an angle greater than 180° with respect to each other.

[0062] The lower outwardly facing surface section may be at a relatively small or negligible angle to the vertical in use, while the upper outwardly facing surface section is inclined. The lower outwardly facing surface section may shield the lower part of the support structure or clamping device. In any case, the effect is that the balanced film flow does not unload at the lower end of the upper outwardly facing surface section.

[0063] In an example of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inner-facing surface facing inwardly and an outer-facing surface facing outwardly relative to the plane, wherein the outer-facing surface includes at least an upper outer-facing surface segment extending to an upper edge of the outer-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inner-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage with the main surface of the substrate over the entire length of the segment, and at least the upper outer-facing surface segment is flat.

[0064] This provides smooth, even, unobstructed flow across the upper outwardly facing surface section.

[0065] In an example of any embodiment in which at least one clamping device includes at least one lower clamping device arranged to engage the substrate at the lower edge of the substrate and the device further includes at least a first lower guide part arranged on a respective side of a plane and having an inner-facing surface facing inwardly relative to the plane and an outer-facing surface facing outwardly, wherein the outer-facing surface includes at least an upper outer-facing surface segment extending to an upper edge of the outer-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inner-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage the major surface of the substrate over the entire length of the segment, and the arms of the lower clamping device are arranged to engage the major surface of the substrate at a level equal to or lower than the level of the strip of the first lower guide part.

[0066] Thus, the lower clamping device arm does not interrupt the flow across the major surface of the substrate at the lower end of the exposed area of ​​the major surface.

[0067] In an example of this embodiment, the arms of the lower clamping device are arranged to engage the main surface between the plane and the strip of the first lower flow guiding part.

[0068] Therefore, the lower clamping device and the first lower flow guiding element can be arranged at the same level or even overlap.

[0069] In an example of any embodiment in which at least one clamping device includes at least one lower clamping device arranged to engage the substrate at the lower edge of the substrate and the device further includes at least a first lower guide part arranged on a respective side of a plane and having an inner-facing surface facing inwardly relative to the plane and an outer-facing surface facing outwardly, wherein the outer-facing surface includes at least an upper outer-facing surface segment extending to an upper edge of the outer-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inner-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, wherein at least a central longitudinal segment of the strip is movable to engage the major surface of the substrate over the entire length of the segment, and wherein the arms of the lower clamping device are arranged to engage the major surface of the substrate at a level equal to or lower than the level of the strip of the first lower guide part, the first lower guide part forming the arms of the lower clamping device.

[0070] Thus, there is no need to provide a separate clamping device. Furthermore, the strip can engage the substrate to clamp the substrate. Since at least the central longitudinal section of the strip can be moved into engagement with the main surface of the substrate over the entire length of said section, there is a relatively extended contact area between the clamping device and the substrate. In case the substrate is held in tension, this tension is evenly distributed. In any case, there is no acute stress on the isolated blocks of the substrate surface.

[0071] In an instance of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inward-facing surface facing inwardly relative to the plane and an outward-facing surface facing outwardly, wherein the outward-facing surface includes at least an upper outward-facing surface segment extending to an upper edge of the outward-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inward-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage with the main surface of the substrate over the entire length of the segment, the device further includes a second one of the lower guide parts arranged on a side of the plane opposite to the first lower guide part.

[0072] In this embodiment, both main surfaces of the substrate can be processed simultaneously. The second lower flow guiding part may comprise any of the features of any of the embodiments of the first lower flow guiding part. The second lower flow guiding part may be at least a mirror image of the first lower flow guiding part (with respect to the plane), for example, identical in shape and size.

[0073] In an example of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inner-facing surface facing inwardly relative to the plane and an outer-facing surface facing outwardly, wherein the outer-facing surface includes at least an upper outer-facing surface segment extending to an upper edge of the outer-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inner-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, wherein at least a central longitudinal segment of the strip is movable to engage with a major surface of the substrate over the entire length of the segment, and wherein the device further includes a second of the lower guide parts arranged on a side of the plane opposite to the first lower guide part, the first and second lower guide parts being arranged to clamp the substrate between them.

[0074] Therefore, no separate clamping device is required. The device is very suitable for holding substrates of different thicknesses.

[0075] In an instance of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inward-facing surface facing inwardly relative to the plane and an outward-facing surface facing outwardly, wherein the outward-facing surface includes at least an upper outward-facing surface segment extending to an upper edge of the outward-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inward-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage the main surface of the substrate over the entire length of the segment, and at least a first of the lower guide parts is pivotally attached to the support structure using a pivot extending parallel to the plane.

[0076] This makes it relatively easy to move the strip facing the inner surface into engagement with the surface of the substrate. One or more biasing means may be provided between the support structure and the one or more pivoting lower guide parts to bias the strip facing the inner surface towards the plane. If the upper edge is straight, then the upper edge will be at least approximately parallel to the pivot axis. The pivotable attachment may be by way of a pivot axis protruding from one of the support structure and the lower guide part, the pivot axis being inserted through a corresponding aperture in the other of the support structure and the lower guide part.

[0077] In an example of any embodiment in which the device further includes at least a first lower guide part arranged on a respective side of the plane and having an inner-facing surface facing inwardly and an outer-facing surface facing outwardly relative to the plane, wherein the outer-facing surface includes at least an upper outer-facing surface segment extending to an upper edge of the outer-facing surface and inclined inwardly toward the plane in the direction of the upper edge, wherein a strip of the inner-facing surface extends longitudinally along the upper edge and laterally upward to the upper edge, and wherein at least a central longitudinal segment of the strip is movable to engage with the main surface of the substrate over the entire length of the segment, at least the first of the lower guide parts includes a plate-shaped segment defining at least the inner-facing surface and the outer-facing surface.

[0078] This makes the lower flow guide part relatively easy to manufacture by cutting segments from a plate-shaped material and joining these together (e.g., by welding or bonding). The portion of the lower flow guide part used to attach the lower flow guide part to the support structure need not be made from plate-shaped segments. However, at least the part defining the inner and outer facing surfaces will typically be made from one or more plate-shaped segments.

[0079] According to another aspect, an apparatus for non-immersion wet chemical processing of planar substrates according to the present invention comprises at least one device according to the present invention, at least one processing station and at least one support for suspending the device in the processing station, wherein the processing station includes a system for directing a corresponding liquid flow onto an upper outward surface segment of a corresponding one of at least one upper flow-guiding part.

[0080] The device according to the invention can be configured to hold a substrate and to transport it through the apparatus by means of a transport system, in particular in the case where the apparatus comprises a plurality of processing stations. Since the liquid flow is directed onto the upper outwardly facing surface section of a respective one of the at least one upper flow-guiding part in the or each station, a balanced laminar flow is established before the liquid reaches the exposed main surface of the substrate to be processed.

[0081] In an embodiment, the system for directing respective liquid flows onto an upper outwardly facing surface segment of a respective one of the at least one upper flow directing part is configured to direct the downwardly directed liquid flows onto the upper outwardly facing surface segment.

[0082] In an embodiment of the apparatus, the system for directing a respective liquid flow onto an upper outwardly facing surface section of a respective one of the at least one upper flow guiding part is configured to direct the downwardly directed liquid flow onto the upper outwardly facing surface section.

[0083] The flow may be directed downward along the trajectory of the flow to the point where the flow impinges on the upper outer-facing surface section, but directed upward or horizontally further upstream. By impinging at an acute angle, the flow will become less turbulent.

[0084] In an embodiment of the apparatus, the system for directing respective liquid flows onto an upper outwardly facing surface section of a respective one of the at least one upper flow guiding part comprises:

[0085] at least one overflow device,

[0086] wherein each overflow device comprises a container for holding a liquid,

[0087] wherein the container is provided with at least one drainage passage through a side wall of the container, each drainage passage defining a respective inflow aperture leading to the interior of the container,

[0088] the flood device is provided with at least one aperture in an exterior of the flood device for delivering liquid traveling through at least one of the discharge passages as a stream; and

[0089] a liquid supply system for supplying liquid to the interior of the container of each overflow device,

[0090] The system is configured to maintain the level of the free surface of liquid in the container of each overflow device at a level between the at least one discharge passage inflow aperture and the highest level of the container interior.

[0091] The overflow device comprises a container for holding a liquid. In use, the liquid is present in an interior, which is usually delimited by at least a bottom wall and a side wall. Thus, a level can be determined, i.e. relative to the bottom wall. The container can be covered or closed at the top. The interior of the container can be ventilated. The container is provided with at least one discharge passage through the side wall of the container. For example, the discharge passage can be a simple aperture or defined by a duct extending through the side wall. The or each discharge passage defines a respective inflow aperture leading to the interior of the container, through which liquid can flow from the interior of the container in use into the discharge passage.

[0092] The flooding device is provided with at least one orifice in the exterior of the device. This orifice may be defined by a discharge passage, wherein the discharge passage terminates at the opposite end of the inflow aperture. In other embodiments, the discharge passage communicates with the orifice only, for example, via an intermediate flow conducting part. The flow is a free-flowing flow. That is, from the point where the flow leaves the orifice, the flow is unguided.

[0093] The overflow device is provided with at least one delivery port which opens into the interior of the container and is in liquid communication with at least one connection device for connecting the device to a supply conduit for supplying liquid to the device. The connection device may be a fitting, for example, or may be connected to a hose or tube end connected to the fitting. The liquid will typically be pumped into the overflow device by a pump external to the overflow device.

[0094] The system is configured to maintain the level of the free surface of the liquid in the container of each flooding device at a level between the inflow aperture of at least one discharge passage and the highest level of the container interior. Therefore, the pressure of the liquid flowing through the one or more discharge passages and then the orifice is the hydrostatic pressure. There is no back pressure, as when using a boom. The pressure of the supply liquid is irrelevant. The liquid flow is gravity driven. According to Torricelli's law, the flow is ejected from the orifice as a jet with a substantially constant velocity determined only by the level of the liquid in the container interior (neglecting viscosity and streamline contraction). The direction in which the opening is pointed is irrelevant, as is the density of the liquid.

[0095] The flow is ejected from the orifice as a jet taking a parabolic path. Thus, on the downward trajectory, the flow will hit the upper outwardly facing surface section of the substrate holding device. This reduces the amount of turbulence in the flow running along the surface of the substrate. Furthermore, since the velocity and direction are constant, the size of the upper outwardly facing surface section, as well as the distance between the surface section and the orifice, can be optimized to ensure that a balanced film flow over the substrate is always established.

[0096] In an example of this embodiment, at least one of the at least one overflow device is provided with at least one overflow port opening into the interior of the container at a level between the at least one discharge passage inflow aperture and the highest level of the container interior for conducting liquid out of the container.

[0097] The overflow device comprises at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the container interior. This overflow port or these overflow ports are configured to conduct the liquid out of the container, more particularly out of the container interior. By supplying the liquid at a sufficient rate, the level of the liquid in the container is maintained and determined by the level of the overflow port or at least the overflow port at the lowest level. Since this level is below the highest level of the container interior, there is a free surface of the liquid in the container interior.

[0098] Since the level of the free liquid surface in the interior of the container is determined by the overflow port position, there is no need to control the level by means of sensors and controllers configured to control the supply of liquid. This makes the device relatively robust, useful in applications where relatively aggressive liquids are being processed. In addition, the supply pump can be operated at essentially a single operating point, rather than intermittent operation.

[0099] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the interior of the container for conducting liquid out of the container, the number of discharge passages in at least one of the at least one overflow devices is more than one.

[0100] The effect is that the sidewall section through which the discharge passage extends remains relatively solid compared to providing one discharge passage with a large extent and / or cross-sectional area. The respective inflow apertures may be arranged in rows, for example, rows at a substantially constant level. The inflow apertures and / or the discharge passage may have corresponding shapes and sizes. In a particular example, the container interior has a polygonal shape (e.g., a quadrilateral, as viewed from the top), and the inflow apertures are arranged in rows extending over a large portion of the dimension of one side. The spacing between the apertures (in the direction in which the row extends) may be smaller than the corresponding dimension of the inflow aperture (i.e., the dimension in the same direction). All of this helps to reduce the effect of streamline contraction, so that the velocity of the liquid ejection is more accurately determined by the liquid level in the container alone.

[0101] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between the at least one discharge passage inflow aperture and the highest level of the interior of the container for conducting liquid out of the container, the orifice of at least one of the at least one overflow devices is formed by a slit.

[0102] Thus, the liquid stream will be sheet-like or film-like. The liquid may strike the substrate holding device and flow down along the major surface of the substrate in a relatively uniform film over the width of the planar substrate. The film will have a substantially uniform thickness and velocity across the width of the substrate. In addition, the slit has a relatively small height so that the velocity is approximately constant over the height of the orifice. The orifice is formed where the slit protrudes from the outer surface of the device.

[0103] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the container interior for conducting liquid out of the container, the discharge passage is more than one in number in at least one of the at least one overflow devices and the orifice of at least one of these at least one overflow devices is formed by a slit, the discharge passage defines a respective outflow aperture at the end of the discharge passage opposite to the respective inflow aperture, and the overflow device comprises a channel extending parallel to the slit and in liquid communication with the slit, the outflow aperture leading to the channel.

[0104] The channels aid in flow equalization so that the liquid flow has a relatively uniform velocity across the width of the slot.

[0105] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the container interior for conducting liquid out of the container, and the orifice of at least one of the at least one overflow devices is formed by a slit, the discharge passage defines a corresponding outflow aperture at the end of the discharge passage opposite to the corresponding inflow aperture, the overflow device includes at least a first shielding part that is different from the container and mounted to the outside of the container in front of the outflow aperture, and a slit is defined between the first shielding part and a second shielding part mounted to the outside of the container and one of the protruding parts of the container.

[0106] The goal is to provide a flow as a relatively thin liquid sheet or film. Therefore, the slit should have a relatively small height. For uniformity, the height should be relatively well defined within the entire width of the slit. This can be achieved by defining a slit between a first shielding part mounted to the outside of the container and a second shielding part or an integral protruding part of the container. The height can be set by means of a gauge with a size corresponding to the desired height of the slit. The first shielding part is placed against the gauge and then fixed to the container. The gauge is then removed to open the slit. This requires a good quality surface on the first shielding part and the corresponding part (the second shielding part or the protruding part), but it may be easier to achieve than when machining the slit in a solid part. It is also easier to provide a relatively sharp edge to the orifice to ensure that the liquid flow flows along a parabolic trajectory.

[0107] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the container interior for conducting liquid out of the container, and the orifice of at least one of the at least one overflow devices is formed by a slit, the discharge passage defines a corresponding outflow aperture at the end of the discharge passage opposite to the corresponding inflow aperture, the overflow device includes at least a first shielding part that is different from the container and mounted to the outside of the container in front of the outflow aperture, a slit is defined between the first shielding part and a second shielding part mounted to the outside of the container and one of the protruding parts of the container, and the overflow device includes a channel extending parallel to the slit and in liquid communication with the slit, the outflow aperture leading to the channel, the channel being formed between the outside of the container and at least the first shielding part.

[0108] This allows for relatively easy manufacturing, since the channel can be defined by, for example, grooves in the container exterior and / or chamfers on the first and / or second shielding parts. In other words, the channel sidewalls can be machined in the exposed outer surfaces of the component parts of the device and then closed by assembling the component parts.

[0109] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between the at least one discharge passage inflow aperture and the highest level of the interior of the container for conducting liquid out of the container, and the orifice of at least one of the at least one overflow devices is formed by a slit, the slit has a height, a width and a depth, as seen from the outside of the device, and the width decreases with increasing depth in the direction of the container from the orifice.

[0110] Thus, to an observer moving through the slit in the direction of the container, the slit appears to have a decreasing lateral dimension, i.e. a decreasing width. The effect is to produce a sheet or film-like liquid stream that emerges as a jet from an orifice that does not contract laterally. This increases the uniformity of the flow of the liquid stream.

[0111] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between the at least one discharge passage inflow aperture and the highest level of the container, the at least one overflow port comprises at least one overflow port extending through the side wall of the container.

[0112] The bottom of the processing station of the device will generally include a basin or sump in which the processing liquid that has flowed downward across the major surface of the substrate is collected. Liquid discharged from the overflow port extending through the side wall of the container will drip into the basin. A recirculation system can be used to supply the collected liquid back to the device. For many applications, it is useful to aerate the processing liquid. The type of recirculation just described is applicable to this. In addition, when the overflow port extends through the side wall of the container, relatively more and / or relatively large overflow ports can be provided.

[0113] In examples of the previous embodiments, at least one (eg, all) of the at least one overflow port extending through the sidewall of the container is disposed on a side of the container opposite the at least one drain passage.

[0114] This ensures that the overflow liquid remains well separated from the liquid flow to be used for wetting the substrate.

[0115] In an example of any embodiment in which at least one of the at least one overflow devices has at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the container, and the at least one overflow port includes at least one overflow port extending through the side wall of the container, the overflow device including at least one overflow port extending through the side wall of the container further includes at least one guide on the outside of the container, wherein the guide has an inclined surface section below the external orifice of at least one of the at least one overflow ports extending through the side wall of the container, the inclined surface section extending to the outer surface where the external orifice is defined and angled so that the lower end of the inclined surface section is away from the outer surface where the external orifice is defined.

[0116] This ensures that the overflow liquid is conducted away from the overflow device and also away from the substrate. The overflow liquid can be directed onto the side walls of the processing station of the apparatus for non-immersion wet chemical processing of substrates. This allows the overflow device to be arranged at a relatively high position in the processing station without the overflow liquid splashing or causing spray when hitting the liquid collected at the bottom of the processing station.

[0117] In the example of the previous embodiment, the inclined surface section transforms into a finger-like surface section at the lower end, for example a finger-like surface section which is angled to the inclined surface section.

[0118] There are gaps between adjacent fingers through which liquid can flow. Thus, the fingers break up the flow of liquid. This allows for a higher aeration of the overflow process liquid before collection and recirculation.

[0119] In an example of any embodiment in which at least one of the at least one overflow devices has at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the container, the at least one overflow port includes at least one overflow port extending through the side wall of the container, and the overflow device further includes at least one guide member on the outside of the container, wherein the guide member has an inclined surface section below the external orifice of at least one of the at least one overflow ports extending through the side wall of the container, the inclined surface section extending to the outer surface wherein the external orifice is defined and angled so that the lower end of the inclined surface section is away from the outer surface wherein the external orifice is defined, and at least a section of the inclined surface section proximate to the outer surface wherein the external orifice is laterally delimited by a portion of a defining facing upright surface section.

[0120] This further helps direct overflow liquid so that splashing is minimized.

[0121] In an example of any embodiment in which at least one of the at least one overflow devices has at least one overflow port leading to the interior of the container at a level between the at least one discharge passage inflow aperture and the highest level of the container, the at least one overflow port includes at least one overflow port extending through the side wall of the container, the overflow device further includes at least one guide on the outside of the container, wherein the guide has an inclined surface section below the external orifice of at least one of the at least one overflow ports extending through the side wall of the container, the inclined surface section extending to the outer surface where the external orifice is defined and angled so that the lower end of the inclined surface section is away from the outer surface where the external orifice is defined, and the guide is a part that is different from the container and mounted to the outside of the container.

[0122] This simplifies production. The flow guide can in particular comprise plate-shaped sections which are joined together, for example adhesively or by welding or soldering.

[0123] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between at least one discharge passage inflow aperture and the highest level of the container, the at least one overflow port of at least one of the overflow devices includes at least one overflow port defined in a conduit extending through at least a portion of the interior of the container, for example, at least one overflow port leading to the interior in a direction away from the bottom of the interior of the container.

[0124] The conduit allows collection of overflow liquid for rapid recirculation and without contamination. In addition, relatively more and / or relatively elongated overflow ports may be provided along the length of the conduit without substantially weakening the container. Furthermore, the overflow ports in the conduit may face upward.

[0125] In an example of any embodiment in which at least one of the at least one overflow devices is provided with at least one overflow port leading to the interior of the container at a level between the at least one discharge passage inflow aperture and the highest level of the container, the at least one overflow port of at least one of the overflow devices includes at least one overflow port in liquid communication with a connection device for connecting to a pipe, wherein the pipe is used to transport liquid overflowing into the at least one overflow port away from the overflow device.

[0126] This allows a relatively high rate of recirculation and removal of liquid from the device. Coupled with the high supply rate, the level of the free surface of the liquid in the interior of the container is therefore relatively undisturbed. The connecting device may be a fitting or simply a tube or hose end that can be coupled to a fitting or connector.

[0127] In an example of any embodiment of the apparatus, wherein the system for directing respective liquid flows onto an upper outwardly facing surface section of a respective one of at least one upper flow guiding part comprises:

[0128] at least one overflow device,

[0129] wherein each overflow device comprises a container for holding a liquid,

[0130] wherein the container is provided with at least one drainage passage through a side wall of the container, each drainage passage defining a respective inflow aperture leading to the interior of the container,

[0131] the flood device is provided with at least one aperture in an exterior of the flood device for delivering liquid traveling through at least one of the discharge passages as a stream; and

[0132] a liquid supply system for supplying liquid to the interior of the container of each overflow device,

[0133] wherein the system is configured to maintain the level of the free surface of the liquid in the container of each overflow device at a level between the at least one discharge passage inflow aperture and the highest level of the container interior,

[0134] The at least one delivery port of at least one of the flooding devices includes (eg, consists of) at least one delivery port formed in a conduit extending through at least a portion of the interior of the container.

[0135] Thus, liquid can enter the interior of the container within a one-dimensional range, for example, of the interior of the container. This is useful for ensuring a uniform level of liquid in the interior of the container. In addition, only one conduit needs to be run through the sidewall to supply liquid at a relatively high rate and lower pressure.

[0136] In an example of any embodiment of the apparatus, wherein the system for directing respective liquid flows onto an upper outwardly facing surface section of a respective one of at least one upper flow guiding part comprises:

[0137] at least one overflow device,

[0138] wherein each overflow device comprises a container for holding a liquid,

[0139] wherein the container is provided with at least one drainage passage through a side wall of the container, each drainage passage defining a respective inflow aperture leading to the interior of the container,

[0140] the flood device is provided with at least one aperture in an exterior of the flood device for delivering liquid traveling through at least one of the discharge passages as a stream; and

[0141] a liquid supply system for supplying liquid to the interior of the container of each overflow device,

[0142] wherein the system is configured to maintain the level of the free surface of the liquid in the container of each overflow device at a level between the at least one discharge passage inflow aperture and the highest level of the container interior,

[0143] The container of at least one of the flooding devices comprises a single body defining at least walls delimiting the interior of the container at least at the bottom and on all sides.

[0144] The single body may be a unitary body made in one piece. The body may be molded and / or machined. The body may be made of metal, polymer material or composite material. Joints formed by joining are largely avoided, so that the risk of accidental leakage is minimized. The wall does not need to completely delimit the interior of the container. There may be apertures that are closed, for example, by stops or covers that are separate from the body. In another embodiment, the wall delimiting the interior of the container is completely included in the body.

[0145] In an example of this embodiment, the body leaves the interior of the container at least partially open at the top.

[0146] This makes manufacturing easier. In addition, the interior of the container does not need to be hermetically sealed.

[0147] In an example of any embodiment in which the body leaves the interior of the container at least partially open at the top, the body partially delimits the interior of the container at the top, and at least one (e.g., multiple) apertures are defined in the portion of the body that partially delimits the interior of the container at the top.

[0148] Thus, the portion of the top wall in which the aperture is defined acts as a reinforcing strut to make the container more rigid and thus dimensionally stable.

[0149] In an example of any embodiment in which the container of at least one of the overflow devices comprises a single body defining at least walls that delimit the interior of the container at least at the bottom and on all sides, at least one of the overflow devices whose container comprises a single body comprises at least one cover mounted to the body and closing the interior of the container at the top.

[0150] The cover helps prevent contamination of the liquid in the interior of the container.

[0151] In an example of any embodiment of the apparatus, wherein the system for directing respective liquid flows onto an upper outwardly facing surface section of a respective one of at least one upper flow guiding part comprises:

[0152] at least one overflow device,

[0153] wherein each overflow device comprises a container for holding a liquid,

[0154] wherein the container is provided with at least one drainage passage through a side wall of the container, each drainage passage defining a respective inflow aperture leading to the interior of the container,

[0155] the flood device is provided with at least one aperture in an exterior of the flood device for delivering liquid traveling through at least one of the discharge passages as a stream; and

[0156] a liquid supply system for supplying liquid to the interior of the container of each overflow device,

[0157] wherein the system is configured to maintain the level of the free surface of the liquid in the container of each overflow device at a level between the at least one discharge passage inflow aperture and the highest level of the container interior,

[0158] At least the interior of the container of at least one of the flooding devices has an elongated shape when viewed from above, and

[0159] At least one (eg, all) of the discharge passages extend through the sidewall on the longer side of the interior of the container.

[0160] This is useful for relatively uniform wetting of relatively wide substrates.For example, the elongated shape may be a polygon (eg, a quadrilateral).

[0161] In an example of any embodiment of the apparatus, wherein the system for directing respective liquid flows onto an upper outwardly facing surface section of a respective one of at least one upper flow guiding part comprises:

[0162] at least one overflow device,

[0163] wherein each overflow device comprises a container for holding a liquid,

[0164] wherein the container is provided with at least one drainage passage through a side wall of the container, each drainage passage defining a respective inflow aperture leading to the interior of the container,

[0165] the flood device is provided with at least one aperture in an exterior of the flood device for delivering liquid traveling through at least one of the discharge passages as a stream; and

[0166] a liquid supply system for supplying liquid to the interior of the container of each overflow device,

[0167] wherein the system is configured to maintain the level of the free surface of the liquid in the container of each overflow device at a level between the at least one discharge passage inflow aperture and the highest level of the container interior,

[0168] At least one of the at least one overflow port of at least one of the flooding devices is elongated in shape, having a width greater than a height, as seen in the flow direction.

[0169] This allows a relatively large flow rate of overflow liquid.The lower edge will typically be at a level corresponding to the desired level of the free surface of the liquid in the container interior.

[0170] In an example of any embodiment of the apparatus, wherein the system for directing respective liquid flows onto an upper outwardly facing surface section of a respective one of at least one upper flow guiding part comprises:

[0171] at least one overflow device,

[0172] wherein each overflow device comprises a container for holding a liquid,

[0173] wherein the container is provided with at least one drainage passage through a side wall of the container, each drainage passage defining a respective inflow aperture leading to the interior of the container,

[0174] the flood device is provided with at least one aperture in an exterior of the flood device for delivering liquid traveling through at least one of the discharge passages as a stream; and

[0175] a liquid supply system for supplying liquid to the interior of the container of each overflow device,

[0176] wherein the system is configured to maintain the level of the free surface of the liquid in the container of each overflow device at a level between the at least one discharge passage inflow aperture and the highest level of the container interior,

[0177] At least one inflow aperture of at least one of the flooding devices is positioned at the bottom of the interior of the container.

[0178] Thus, the inflow aperture may have a lower edge or the lowest point of said edge at the level of the bottom of the interior of the container. This allows the device to be emptied for maintenance etc. In use, a hold-up volume of process liquid is substantially avoided. Furthermore, the risk of bubbles appearing in the process liquid flowing through the discharge passage remains relatively low, since the gas rises to the top.

[0179] According to another aspect, a method for non-immersion wet chemical processing of a planar substrate according to the present invention comprises:

[0180] mounting the substrate to the device according to the invention, and

[0181] The respective liquid flow is directed onto an upper outwardly facing surface section of a respective one of the at least one upper flow guiding part.

[0182] The method results in a relatively uniform and balanced film flow down the exposed area of ​​the major surface of the substrate.

[0183] In an embodiment, the downwardly directed liquid flow is directed onto an upper outwardly facing surface segment.

[0184] Therefore, there is no or little upward flow of liquid above the upper outward surface section. Therefore, there is also less or no eddy current.

[0185] The liquid flow may be directed onto an upper outwardly facing surface section of the upper flow guide part at a sufficient distance from the lower edge to establish a laminar flow at the lower edge.

[0186] The method may be performed in the device according to the invention. Similarly, the apparatus and device of the invention are suitable for performing the method. BRIEF DESCRIPTION OF THE DRAWINGS

[0187] The present invention will be explained in further detail with reference to the accompanying drawings, in which:

[0188] Figure 1 is a cross-sectional view of parts of a processing station of an apparatus for non-immersion wet chemical processing of planar substrates;

[0189] Figure 2 yes Figure 1 A perspective view of one of the two overflow devices present in the parts of the station shown in FIG.

[0190] Figure 3 yes Figure 2 A second perspective view of the overflow device;

[0191] Figure 4 yes Figure 2 and 3 A top plan view of the overflow device with the cover removed;

[0192] Figure 5 It is along Figure 4 A cross-sectional view of the overflow device along line AA;

[0193] Figure 6 yes Figures 2 to 5 A side plan view of the overflow device;

[0194] Figure 7 It is along Figure 6 A cross-sectional view of the overflow device along line BB;

[0195] Figure 8 is Figures 2 to 7 A perspective view of a body forming a container in an overflow device;

[0196] Fig. 9 yes Figures 2 to 8 A perspective view of an upper shielding part of the overflow device;

[0197] Fig.10 yes Fig. 9 A front plan view of the upper shielded part;

[0198] Fig.11 yes Fig. 9 and 10 A cross-sectional view of an upper shielded part;

[0199] Fig.12 yes Figures 2 to 11 A perspective view of a lower shielding part of the overflow device;

[0200] Fig.13 yes Fig.12 A front plan view of the lower shielded part;

[0201] Fig.14 yes Fig.12 and 13 A cross-sectional view of the lower shielded part;

[0202] Fig.15 is used for Figure 1 A perspective view of a substrate holding device in an apparatus of FIG.

[0203] Fig.16 yes Fig.15 A front plan view of a substrate holding device;

[0204] Fig.17 It is along Fig.16 A cross-sectional view of line AA in FIG.

[0205] Fig.18 is included in Figures 15 to 17 A perspective view of a first upper guide part in a substrate holding device;

[0206] Fig.19 yes Fig.18 A cross-sectional view of a first upper guide part;

[0207] Fig. 20 yes Fig.18 and 19 A detailed cross-sectional view of a part of a first upper guide part;

[0208] Fig.21 is included in Figures 15 to 17 A perspective view of a second upper guide part in a substrate holding device;

[0209] Fig. 22 yes Fig.21 A front plan view of a second upper guide part;

[0210] Fig.23 yes Fig.21 and 22 a cross-sectional view of a second upper flow guide part;

[0211] Fig.24 yes Figures 21 to 23 a detailed cross-sectional view of a part of a second upper guide part;

[0212] Fig.25 If installed on Figures 15 to 24 The substrate holding device of Figures 18 to 24 A cross-sectional view of the first and second upper flow guide parts;

[0213] Fig.26 is included in Figures 15 to 24 A perspective view of one of two lower guide parts of the same shape in a substrate holding device;

[0214] Fig. 27 yes Fig.26 A cross-sectional view of a lower guide part;

[0215] Fig.28 yes Fig.26 and 27 Detailed cross-sectional views of parts of the lower guide member; and

[0216] Fig.29 If installed on Figures 15 to 24 The substrate holding device of Figures 26 to 28 A side plan view of the two lower guide parts shown in FIG. DETAILED DESCRIPTION

[0217] Hereinafter, a method for using a planar substrate 1 ( Figures 15 to 17). Instead of immersion in a bath of treatment liquid, the substrate 1 is wetted on at least one side by a treatment liquid flowing across the major surface of the substrate 1 in the form of an opposing thin film. This reduces the amount of treatment liquid required, thereby providing environmental and economic benefits. Treatment may include rinsing, desmearing, etching, swelling, reduction or plating, including (for example) electroless plating. In practice, the apparatus may include a plurality of treatment stations, each of which is configured in a manner to be described in more detail, but in which the treatment liquid is different between at least two stations.

[0218] Although the substrate 1 is referred to as being planar, the substrate may be flexible, eg a foil.The device is particularly suitable for substrates such as printed circuit boards, semiconductor dies or integrated circuit substrates.

[0219] In the illustrated embodiment, the apparatus is arranged to treat the two main surfaces of a substrate 1 by wetting the two main surfaces with a treatment liquid, which flows down along the surface as a balanced thin film flow over substantially the entire width of the relevant main surface. To this end, the substrate 1 is held in a substrate holding device 2 described in more detail below. The treatment liquid is directed onto the substrate holding device 2 from either side in the form of a respective liquid stream. The stream is laminar and follows a parabolic trajectory that intersects the surface of the substrate holding device at an acute angle. A laminar flow is established before the liquid flows onto the main surfaces of the substrate 1.

[0220] Since two main surfaces of the substrate 1 are processed, the device comprises two overflow devices 3a, 3b for delivering liquid flows ( Figure 1 ). The overflow devices 3a, 3b are identical, so that only one overflow device is described and shown in detail.

[0221] The overflow device 3 comprises a body 4 forming a container 5 for holding a liquid ( Figures 2 to 8 ). In the illustrated embodiment, the body 4 is manufactured in one piece, but surface treatments including coating and anodizing are possible. The body 4 can be molded or machined and made of metal or polymer materials including polymer composites. The body 4 defines a container interior for holding liquids, which is bounded by a bottom wall and side walls. From the top, the side walls are quadrilaterals, where the side walls define the boundaries of the container interior. Otherwise, from the top, both the container interior and the body 4 have an elongated shape.

[0222] In the illustrated embodiment, the body 4 has four elongated apertures 6a to 6d ( Figure 4 and 8). The top wall delimits the container interior at the top. Thus, the body 4 leaves the container interior partially open at the top. A cover 7 is mounted to the body 4 to cover the apertures 6a to 6d. In the illustrated embodiment, the cover 7 is fixed to the body 4 by screws. Other types of fasteners or other types of attachments are conceivable, for example, a reversible snap connection.

[0223] The row of discharge passages through the side wall of the container defined by the body 4 defines a corresponding row of inflow apertures leading to the interior of the container 5. At the other end, the discharge passage defines a row of outflow apertures in the outer surface 8 of the body 4. The outflow apertures are set backward relative to the flat main part of the outer surface 8 arranged in the elongated recess 9 extending in the row direction. The discharge passage, the inflow aperture and the outflow aperture have an elongated cross-section (transverse to the flow direction). Its width is greater than its height. In the illustrated embodiment, the discharge passage, the inflow aperture and the outflow aperture have an elongated cross-section with a width greater than the width of the wall section separating adjacent discharge passages. In the illustrated embodiment, the cross section is constant and the discharge passage is straight. The elongated recess has a length equal to at least 90% of the corresponding size of the interior of the container. Each of these characteristics contributes to the establishment of a relatively uniform flow through the wall of the body 4 forming the container 5.

[0224] The illustrated overflow device 3 comprises an upper shielding part 10 ( Figures 9 to 11 ) and lower shielding part 11( Figures 10 to 14 ). The upper shielding part 10 and the lower shielding part 11 are mounted against the outer surface 8 of the body 4 respectively. The upper shielding part 10 and the lower shielding part 11 are mounted in front of the outflow aperture of the discharge passage. The mounting can be by means of screws or other fasteners.

[0225] The upper shielding part 10, the lower shielding part 11 and the elongated recess 9 together define an equalizing passage 12 ( Figure 5 ). This equalizing channel 12 is extended and closed at the longitudinal ends.

[0226] In the illustrated embodiment, the upper shielding part 10 has a flat lower surface 13, but with a recess along the edge proximate to the body 4, said recess partially defining the equalizing channel 12. The opposite edges of the lower surface 13 are relatively sharp.

[0227] The lower shielding part 11 has an upper surface in which a flat central section 14 is set back relative to the adjacent flat lateral end sections 15a, 15b. The flat central section 14 and the lower surface 13 of the upper shielding part 10 define between them a slit 16 ( Figure 5 ), and in use, a sheet-like liquid stream is discharged from the orifice 17.

[0228] Seen from the outside, the slit 16 has a height, a width and a depth. The height may have a value in the range of 0.5 to 1.5 mm, for example in the range of 0.6 to 1.3 mm. The depth may have a value of at least 10 mm, for example at least 25 mm. This helps to ensure that the liquid stream ejected from the orifice 17 is generally directed horizontally when leaving the orifice 17. The maximum value is not so important, but may be at most 50 mm. The width decreases from the orifice 17 in the direction of the body 4 forming the container. The lateral edges 18a, 18b ( Fig.12 ) extends at an angle (e.g., an angle in the range of 20 to 40°) to the straight leading edge 19. This helps prevent the sheet of liquid stream ejected from the orifice 17 from collapsing laterally. The leading edge 19 is relatively sharp to ensure that a well-defined liquid jet is ejected from the orifice 17.

[0229] The height of the slit 16 can be relatively accurately set by placing a gauge between the upper and lower shielding parts 10, 11 when they are mounted to the body 4. After the upper and lower shielding parts 10, 11 are fixed in place, the gauge is removed to open the slit 16.

[0230] When in use, a pump (not shown) is used to pass through the accessory 21 ( Figure 3 , 4 , 7) a supply tube (not shown) connected to a supply conduit 20 supplies liquid to the overflow device 3. The supply conduit 20 runs through the sidewalls at the longitudinal ends of the body 4 into the container interior and extends to the opposite longitudinal end over substantially the entire range of the container interior. The supply conduit 20 is closed at the ends. One or more delivery ports are provided along the length of the section of the supply conduit 20 extending through the container interior. In the illustrated embodiment, these ports include relatively more small holes through the bottom side of the section of the supply conduit 20 extending through the container interior. The inflow aperture of the discharge passage is at a lower level, making it less likely that bubbles will enter the discharge passage.

[0231] The overflow device 3 is provided with a plurality of overflow ports leading to the interior of the container at a level between the level of the inflow aperture of the discharge passage and the highest level of the interior of the container. The highest level of the interior of the container is the highest level that the free surface of the liquid can reach in the absence of overflow ports. This is usually determined by the upper edge of the inner surface of the side wall delimiting the interior of the container.

[0232] The overflow port includes a plurality of side wall overflow ports 22a to 22d ( Figure 2 ). The side wall overflow ports 22a to 22d are provided on the side opposite to the discharge passage of the body 4 forming the container 5, and are at a higher level.

[0233] In the illustrated embodiment, the number of sidewall overflow ports 22a-22d is more than one and is arranged in a row at a common level. Viewed in the flow direction, the sidewall overflow ports 22a-22d have an elongated cross-section with a width greater than their height. The lateral extent of the section of the sidewall separating adjacent sidewall overflow ports 22a-22d is less than the width of any of the sidewall overflow ports 22a-22d. Providing a series of multiple overflow ports produces a stronger sidewall for a given wall thickness than providing one very wide slit-shaped overflow port.

[0234] The overflow device 3 further comprises a guide 23 mounted against the outer surface 24 of the body 4 forming the container 5. In the illustrated embodiment, the side wall overflow ports 22a to 22d extend through both the side wall of the body 4 and the plate-shaped section of the guide 23. The outer orifices of the side wall overflow ports 22a to 22d are formed in the plate-shaped section of the guide 23. In other embodiments, the guide 23 may be positioned completely below the level of the side wall overflow ports 22.

[0235] In a surface section 25 ( Figure 5 ) in which an external orifice is defined. This parallel guide surface section 25 transforms into an inclined guide surface section 26. The inclined guide surface section 26 is angled so that the lower end is away from the parallel guide surface section 25 in which the external orifice of the sidewall overflow ports 22a to 22d is defined.

[0236] The inclined flow guiding surface section 26 transforms into a finger surface section 27 at the lower end of the inclined flow guiding surface section 26. The finger surface section 27 is curved so that the distal ends of the fingers point downward. The fingers are arranged in rows and spaced apart to allow liquid flow to break up and thereby increase aeration.

[0237] The winglets 28a, 28b define upright surface sections 29a, 29b facing each other and laterally delimiting at least the upper sections of the parallel guide surface sections 25 and the inclined guide surface sections 26. These upright surface sections 29a, 29b guide the liquid to flow over the inclined guide surface sections 26. The inclined guide surface sections 26 convey the overflowing treatment liquid away from the overflow device 3 to a position that is close enough to the side wall of the treatment station of the treatment equipment in which the overflow device 3 is included to allow the liquid to flow downwardly along the side wall.

[0238] The overflow port of the overflow device 3 further comprises an elongated overflow port 30 in an overflow conduit 31 extending through the interior of the body 4 forming the container 5. In the illustrated embodiment, the overflow conduit 31 extends through the interior from one end to the other end in the longitudinal direction. The elongated overflow port 30 is slightly shorter.

[0239] In the illustrated embodiment, the elongated overflow port 30 leads to the interior in a direction away from the bottom of the interior of the body 4 forming the container 5. An overflow conduit 31 extends through the side wall of the body 4 forming the container 5 to an overflow conduit fitting 32. This overflow conduit fitting 32 is connected to a return pipe 33 for returning the treated liquid to a pump (not shown) or a reservoir from which the pump is arranged to pump the treated liquid. One or more filters or sediment reservoirs may be interposed between the return pipe 33 and the pump.

[0240] In alternative embodiments, there may be more than one overflow port in the overflow conduit 31 instead of a single elongated overflow port 30. Instead of the return tube 33, a hose may be used.

[0241] The liquid stream ejected through the slit 16 defined between the upper and lower shielding parts 10, 11 will flow in the form of a curved sheet, the curve (i.e., the flow trajectory) being essentially parabolic in shape. The liquid stream will be ejected in an essentially horizontal direction. The velocity is determined only by the hydrostatic pressure. In use, the pump is arranged to supply liquid at a volume flow rate higher than that which can leave the overflow device 3 through the discharge passage at a flow rate dictated by the hydrostatic pressure. This ensures that there is always an overflow of the treatment liquid. The level of the free surface of the liquid in the interior of the body 4 forming the container 5 is thereby relatively accurately determined and kept constant, even if there are variations in the rate at which the liquid is supplied by the pump. Therefore, the discharge velocity through the orifice 17 defined by the slit 16 formed between the upper and lower shielding parts 10, 11 is constant. The angle at which the liquid stream strikes the substrate holding device 2 is likewise constant.

[0242] Seen perpendicularly to the main surface of the substrate 1, the substrate holding device 2 comprises a support structure 34 in the form of a frame surrounding the substrate 1 on all sides ( Figures 15 to 17 ).

[0243] In the illustrated embodiment, the support structure 34 includes transversely projecting arms 35a, 35b for engaging a support member (not shown) so as to suspend the support structure 34 in a processing station of a processing apparatus. In the illustrated embodiment, claws 36a, 36b that are open in a downward direction are formed at the distal ends of the transversely projecting arms 35a, 35b. These claws 36a, 36b can engage the horizontally extending legs (not shown) of the respective support member. An example of such a support member is disclosed in WO 2020 / 260389 A1.

[0244] In an alternative embodiment, the support structure 34 may include hooks or similar means for suspending the support structure 34 from an overhead conveyor, which in turn includes parts forming a support for suspending the support structure 34 in a station of a processing device.

[0245] In the illustrated embodiment, the substrate holding device 2 comprises first and second upper flow guide parts 37, 38 and first and second lower flow guide parts 39a, 39b. The first and second lower flow guide parts 39a, 39b are identical so that only one of them will be described.

[0246] In use, a substrate 1 is held in a plane by the substrate holding device 2. The substrate 1 occupies a region of the plane framed by the support structure 34. Upper flow guide parts 37, 38 are supported by the support structure 34 and positioned on opposite sides of the plane, as are lower flow guide parts 39a, 39b.

[0247] The first and second upper guide parts 37, 38 form respective arms of upper clamping means for clamping the substrate 1 near its upper edge. The lower guide parts 39a, 39b form respective arms of lower clamping means for clamping the substrate 1 near its lower edge.

[0248] To this end, the first upper flow guide part 37 is supported by means of protruding upper pivot nipples 40a, 40b ( Fig.18 ) is pivotally attached to the support structure 34. The upper pivot subs 40a, 40b are received in holes (not shown in detail) in the support structure 34. The upper biasing means 41a, 41b ( Fig.25 ) pushes the first upper flow guide part 37 toward the second upper flow guide part 38 and applies a clamping force. In the illustrated embodiment, the upper biasing means 41a, 41b are coil springs. In alternative embodiments, they may include other types of elastic components, gas springs or magnets.

[0249] Each lower guide part 39 has a protruding lower pivot short section 42a, 42b ( Fig.26 ) for pivotally attaching to a support structure 34.

[0250] The protruding lower pivot stub 42,b defines a pivot axis parallel to the plane in which the substrate 1 is held. The lower pivot stub 42,b is received in a hole (not shown in detail) in the support structure 34. The lower biasing means 43a, 43b ( Fig.29 ) pushes the lower flow guide parts 39a, 39b towards each other and applies a clamping force. In the illustrated embodiment, the lower biasing means 43a, 43b are again coil springs. In alternative embodiments, they may include other types of elastic components, gas springs or magnets.

[0251] In use, the first upper flow guide part 37 has an inner facing surface 44 facing inwards and an outer facing surface facing outwards relative to a plane in which the substrate 1 is arranged to be held. The inner facing surface 44 comprises a strip 45 for engaging a major surface of the substrate 1 without interruption over the entire longitudinal extent of the strip 45. When the strip 45 contacts the (flat) major surface, the remainder of the inner facing surface 44 is spaced from said surface.

[0252] The strip 45 is provided with grooves or similar surface structures for better bonding. In other words, the surface roughness of the strip 45 is higher than the surface roughness of the other parts of the inner surface 44.

[0253] The outwardly facing surface comprises an upper outwardly facing surface section 46 onto which one of the overflow devices 3a, 3b is arranged to direct the flow of the treatment liquid. The upper outwardly facing surface section 46 is flat. In use, the upper outwardly facing surface section 46 is oriented substantially parallel to the plane in which the substrate 1 is arranged to remain. This means that the upper outwardly facing surface section 46 is oriented substantially vertically in use. The distance between the overflow device 3 and the first upper flow guide part 37 is such that the liquid flow hits the upper outwardly facing surface section 46 from above at an acute angle.

[0254] The first lower outwardly facing surface section 47 extends from the fold 48 forming the transition between the central portion of the upper outwardly facing surface section 46 and the lower edge 49. The first lower outwardly facing surface section 47 is flat. The first lower outwardly facing surface section 47 faces downwardly, i.e., the lower edge 49 is closer to the plane in which the substrate 1 is held than the fold 48.

[0255] In the illustrated embodiment, the lower edge 49 is straight.

[0256] The lower edge 49 extends between the lateral edges of the first lower outwardly facing surface segment 47 , which meet the lower edge 49 at respective corners 50 a , 50 b of the first lower outwardly facing surface segment 47 .

[0257] The outward-facing surface of the first upper flow guide part 37 further includes lateral lower outward-facing surface sections 51a, 51b ( 51b ) separated from the first lower outward-facing surface section 47 and adjacent to the upper outward-facing surface section 46. Fig.17 , 19 , 20). The transition is at the fold 48, but the transverse lower outwardly facing surface segments 51a, 51b face upwardly. Therefore, each transverse lower outwardly facing surface segment 51a, 51b is at an angle α (less than 180°) relative to the upper outwardly facing surface segment 46. Fig. 20 The laterally lower outwardly facing surface sections 51a, 51b stiffen the first upper flow guiding part 37 and direct the liquid away from the support structure 34.

[0258] The upper outwardly facing surface section 46 is composed of facing surfaces 52a, 52b (eg, transversely) that face each other and extend at an angle (eg, transversely) to the plane in which the substrate is arranged to be retained. Fig.19 , 20 The facing surfaces 52a, 52b direct the liquid onto the lower outwardly facing surface section 47.

[0259] In use, the second upper flow guide part 38 ( Figures 21 to 25 ) has an inwardly facing surface 53 facing inwardly relative to a plane in which the substrate 1 is arranged to be held and an outwardly facing surface facing outwardly. The inwardly facing surface 53 comprises a strip 54 for engaging a major surface of the substrate 1 without interruption over the entire longitudinal extent of the strip 54. When the strip 54 contacts the (flat) major surface, the remainder of the inwardly facing surface 53 is spaced from said surface.

[0260] The strip 54 is provided with grooves or similar surface structures for better bonding. In other words, the surface roughness of the strip 54 is higher than the surface roughness of the other parts facing the inner surface 53.

[0261] The outwardly facing surface comprises an upper outwardly facing surface section 55 onto which one of the overflow devices 3a, 3b is arranged to direct the flow of the treatment liquid. The upper outwardly facing surface section 55 is flat. In use, the upper outwardly facing surface section 55 is oriented substantially parallel to the plane in which the substrate 1 is arranged to be held. Thus, the upper outwardly facing surface section 55 is oriented substantially vertically. The distance between the overflow device 3 and the second upper flow guide part 38 is such that the liquid flow hits the upper outwardly facing surface section 55 from above at an acute angle.

[0262] The second lower outwardly facing surface section 56 extends from the fold 57 forming the transition between the central portion of the upper outwardly facing surface section 55 and the lower edge 58. The second lower outwardly facing surface section 56 is flat. The second lower outwardly facing surface section 56 faces downwardly, i.e., the lower edge 58 is closer to the plane in which the substrate 1 is held than the fold 57.

[0263] In the illustrated embodiment, lower edge 58 is straight.

[0264] The lower edge 58 extends between the lateral edges of the first lower outwardly facing surface segment 56 , which meet the lower edge 58 at respective corners 59 a , 59 b of the first lower outwardly facing surface segment 56 .

[0265] The outwardly facing surface of the first upper flow guide part 38 further includes lateral lower outwardly facing surface segments 60a, 60b separated from the centrally located second lower outwardly facing surface segment 56 and adjacent to the upper outwardly facing surface segment 55. The transition is at the fold 57, but the lateral lower outwardly facing surface segments 60a, 60b face upward. Therefore, each lateral lower outwardly facing surface segment 60a is at an angle β ( Fig.24 ) extends. This angle β will typically be greater than 90°. The laterally lower outwardly facing surface sections 60a, 60b stiffen the second upper flow guide part 38 and direct the liquid away from the support structure 34.

[0266] The upper outwardly facing surface section 55 is composed of facing surfaces 61a, 61b ( Fig. 22 The facing surfaces 61a, 61b direct the liquid onto the lower outwardly facing surface sections 56, 60a, 60b.

[0267] In use, each lower guide part 39 ( Figures 26 to 29 ) has an inwardly facing surface 62 facing inwardly relative to a plane in which the substrate 1 is arranged to be held and an outwardly facing surface facing outwardly. The inwardly facing surface 62 comprises an elongated strip 63 for engaging a major surface of the substrate 1 without interruption over the entire longitudinal extent of the strip 63. When the strip 63 contacts the (flat) major surface, the remainder of the inwardly facing surface 62 is spaced from said surface of the substrate 1.

[0268] The strip 63 is provided with grooves or similar surface structures for better bonding. In other words, the surface roughness of the strip 63 is higher than the surface roughness of the other parts of the inner surface 62.

[0269] The outwardly facing surface comprises an inclined upper outwardly facing surface section 64 which extends to an upper edge 65 and which slopes inwardly towards a plane in which the substrate 1 is arranged to remain in the direction of the upper edge 65 .

[0270] In the illustrated embodiment, the angled upper outwardly facing surface section 64 is flat.

[0271] The strip 63 extends longitudinally along the upper edge 65 and transversely upward to the upper edge 65 .

[0272] The upper edge 65 extends between the lateral edges of the first inclined upper outwardly facing surface segment 64 , which meet the upper edge 65 at respective first corners 66 a , 66 b of the inclined upper outwardly facing surface segment 64 .

[0273] The lateral edges extend from the first corners 66a, 66b to the respective second corners 67a, 67b ( Fig.26), wherein the inclined upper outward surface section 64 is widened to increase the width of the inclined upper outward surface section 64.

[0274] The wider portion of the inclined upper outwardly facing surface section 64 is laterally bounded by facing surfaces 68 (only one of which is visible in the drawings) that face each other and extend at an angle (e.g., laterally) to the plane in which the substrate 1 is arranged to remain. The plate-shaped segments 69a, 69b defining the facing surfaces 68 are interconnected to the plate-shaped segments defining the inclined upper outwardly facing surface section 64 by respective webs 70a, 70b extending at an angle thereto.

[0275] The lower outwardly facing surface segment 71 extends from the fold 72 forming the transition between the inclined upper outwardly facing surface segment 64 and the lower outwardly facing surface segment 71. The lower outwardly facing surface segment 71 is flat. In use, the lower outwardly facing surface segment 71 is oriented substantially parallel to the plane in which the substrate 1 is arranged to be held. In any case, the inclined upper outwardly facing surface segment 64 and the lower outwardly facing surface segment 71 extend at an angle greater than 90° relative to each other. The lower outwardly facing surface segment 71 primarily performs a shielding function for keeping liquid away from the support structure.

[0276] In use, the process liquid is directed onto the upper outwardly facing surface section 46, 55 of one of the first and second upper flow guide parts 37, 38 and flows from there as a balanced film flow through the lower outwardly facing surface section 47, 56 onto the main surface of the substrate 1. The film flow then continues to flow onto the inclined upper outwardly facing surface section 64 of the lower flow guide part 39 before falling from the substrate holding device 2. The liquid is then collected for recycling, optionally after filtering or another type of treatment. Substantially the entire exposed area of ​​the main surface of the substrate 1 is wetted in a relatively uniform manner.

[0277] The invention is not limited to the embodiments described above, which may vary within the scope of the appended claims. For example, in an alternative embodiment, the second upper flow guide part 38 may be pivoted relative to the support structure 34 in the same manner as the first upper flow guide part 37 .

[0278] Component Symbol List

[0279] 1: Substrate

[0280] 2: Substrate holding device

[0281] 3: Overflow device

[0282] 4: Ontology

[0283] 5: Container

[0284] 6a to d: Top wall pores

[0285] 7: Cover

[0286] 8: Front outer surface

[0287] 9: Long concave part

[0288] 10: Upper shielding parts

[0289] 11: Lower shielding parts

[0290] 12: Balanced channel

[0291] 13: The lower surface of the upper shielding part

[0292] 14: The central section of the upper surface of the lower shielding part

[0293] 15a, b: Section of the upper surface of the lower shielding part at the transverse end

[0294] 16: Slit

[0295] 17: Orifice

[0296] 18a, b: lateral edges of the central section of the upper surface of the lower shielding part

[0297] 19: Front edge of the central section of the upper surface of the lower shielding part

[0298] 20: Supply pipeline

[0299] 21:Supply accessories

[0300] 22a to d: Overflow ports in side walls

[0301] 23: Flow guide

[0302] 24: Rear outer surface

[0303] 25: Parallel flow guide surface section

[0304] 26: Inclined flow guide surface section

[0305] 27: Finger-like surface segment

[0306] 28a,b: Winglet

[0307] 29a,b: Upright surface section

[0308] 30: Long overflow port

[0309] 31: Overflow pipe

[0310] 32: Overflow pipe accessories

[0311] 33: Reflux pipe

[0312] 34: Support structure

[0313] 35a,b: Arm

[0314] 36a,b: Claw

[0315] 37: First upper guide part

[0316] 38: Second upper guide part

[0317] 39a,b: Lower guide parts

[0318] 40a,b: Pivot sub

[0319] 41a,b: Upper biasing device

[0320] 42a,b: Pivot nipple of lower guide part

[0321] 43a,b: Lower bias device

[0322] 44: Inwardly facing surface of the first upper guide part

[0323] 45: Strip on the inner surface of the first upper guide part

[0324] 46: The upper outward surface section of the first upper flow guide part

[0325] 47: The lower outward surface section of the first upper flow guide part

[0326] 48: Corrugations in the outwardly facing surface section of the first upper flow guide part

[0327] 49: Lower edge of the first upper guide part

[0328] 50a, b: Corners of the lower outward surface section of the first upper flow guide component

[0329] 51a, b: Transverse lower outward surface section of the first upper flow guide component

[0330] 52a, b: facing surface of the first upper flow guide part

[0331] 53: Inward facing surface of the second upper guide part

[0332] 54: Strip on the inner surface of the second upper guide part

[0333] 55: The upper outward surface section of the second upper flow guide part

[0334] 56: The lower outward surface section of the second upper flow guide part

[0335] 57: Corrugations in the outwardly facing surface of the second upper flow guide part

[0336] 58: Lower edge of the second upper guide part

[0337] 59a, b: Corner of the lower outward surface section of the second upper flow guide part

[0338] 60a, b: Transverse lower outward surface section of the second upper flow guide component

[0339] 61a, b: facing surface of the second upper flow guide part

[0340] 62: Inward facing surface of lower guide part

[0341] 63: Strip facing the inner surface of the lower guide part

[0342] 64: inclined upper outward surface section

[0343] 65: Upper edge of lower guide part

[0344] 66a,b: first corner

[0345] 67a,b:Second corner

[0346] 68: Facing surface of lower guide part

[0347] 69a, b: Plate-shaped fragment of the lower guide part

[0348] 70a,b: web

[0349] 71: The lower outward surface section of the lower guide part

[0350] 72: Corrugations in the outwardly facing surface section of the lower guide part.

Claims

1. An apparatus for holding a planar substrate (1) in an apparatus for non-immersion wet chemical processing of said substrate (1), said apparatus comprising: Support structure (34), wherein the support structure (34) includes at least one part (36a, 36b) for engaging a support member so as to suspend the support structure (34) in the device; at least one clamping device, which is supported by the support structure (34) and is used to hold the substrate (1) in a plane; and at least a first upper flow guide part (37) arranged on one side of the plane and having an inner facing surface (44) facing inwardly relative to the plane and an outer facing surface facing outwardly, wherein the outwardly facing surface comprises: an upper outwardly facing surface section (46) which is wettable by a flow of liquid directed onto said upper outwardly facing surface section (46), and a lower outwardly facing surface segment (47) extending from a transition between at least a central portion of the upper outwardly facing surface segment (46) and the lower outwardly facing surface segment (47) to a lower edge (49), and wherein the inner facing strip (45) extends longitudinally along the lower edge (49) and transversely upward to the lower edge (49), characterized in that At least a central longitudinal section of the strip (45) is movable into engagement with a major surface of the substrate (1) over the entire length of the section.

2. The device according to claim 1, wherein the at least one clamping device comprises at least one upper clamping device, and The arms of the upper clamping device are arranged to engage the major surface of the substrate (1) at a level equal to or higher than the level of the strip (45).

3. The device according to claim 2, wherein the arms of the upper clamping device are arranged to engage the major surface between the plane and the strip (45).

4. The device according to claim 2 or 3, The first upper guide part forms the arm of the upper clamping device.

5. The device according to any one of the preceding claims, Further included is a second one of the upper flow guide parts (37, 38) arranged on the side of the plane opposite to the first upper flow guide part (37).

6. The device according to claim 5, The first and second upper guide parts (37, 38) are arranged to clamp the substrate (1) therebetween.

7. The device according to any one of the preceding claims, At least the first of the upper flow guide parts (37, 38) is pivotably attached to the support structure (34) by means of a pivot axis extending parallel to the plane.

8. The device according to any one of the preceding claims, Wherein at least the upper outwardly facing surface section (46) is laterally delimited by surfaces (52a, 52b) facing each other and extending at an angle, e.g. laterally, to the plane.

9. The device according to any one of the preceding claims, The lower edge (49) extends between lateral edges of the lower outwardly facing surface segment (47), the lateral edges meeting the lower edge (49) at respective corners (50a, 50b) of the lower outwardly facing surface segment (47).

10. The device according to claim 9, wherein the outwardly facing surface further comprises a lateral lower outwardly facing surface segment (60a, 60b) separated from the lower outwardly facing surface segment (47) and adjacent to the upper outwardly facing surface segment (46), and The lateral lower outwardly facing surface sections (60a, 60b) and the upper outwardly facing surface section (46) extend at an angle of less than 180° to each other.

11. The device according to any one of the preceding claims, wherein the at least one clamping device comprises at least one lower clamping device, It is arranged to engage the substrate (1) at its lower edge.

12. An apparatus for non-immersion wet-chemical treatment of planar substrates (1), comprising at least one device (2) according to any of the preceding claims, at least one treatment station and at least one support for suspending at least the device in the treatment station, The processing station comprises a system for directing a respective liquid flow onto the upper outwardly facing surface section of a respective one of the at least one upper flow guiding part (37, 38).

13. The device according to claim 12, wherein the system for directing a respective liquid flow onto the upper outwardly facing surface section of a respective one of the at least one upper flow guiding part (37, 38) is configured to direct a downwardly directed liquid flow onto the upper outwardly facing surface section.

14. A method for non-immersion wet chemical processing of a planar substrate (1), comprising: The substrate (1) is mounted to a device (2) according to any one of claims 1 to 11, and a respective liquid flow is directed onto the upper outwardly facing surface section (46, 55) of a respective one of the at least one upper flow guiding part (37, 38).

15. The method according to claim 14, The liquid flow is directed onto the upper outwardly facing surface section (46, 55) of the upper flow guide part at a sufficient distance from the lower edge (49, 58) to establish a laminar flow at the lower edge (49, 58).

Images