Mixing block, clamp and clamp device including the same, and method of manufacturing mixing

Abstract

A clamp includes a first end plate, a threaded member, a second end plate, and a compression member. The first end plate has a first end plate recess. A threaded member is secured in the first end plate and extends in a direction opposite the first end plate recess. The second end plate has a second end plate recess facing the first end plate recess and is slidably received on the threaded member. A compression member is disposed on an opposite side of the second end plate from the first end plate and threadingly seated on the male threaded section of the threaded member to reverse flow the purge fluid through the mixing block compressively secured between the first end plate and the second end plate. A jig apparatus, a method of manufacturing the hybrid block, the hybrid block, and a semiconductor processing system including the hybrid block are also described.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of U.S. Provisional Patent Application Serial No. 63 / 542,912, filed on October 7, 2023, entitled “MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS INCLUDING MIXING BLOCKS, AND METHODS OF MAKING MIXING BLOCKS FOR FLUID SYSTEMS,” the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] The present invention relates generally to fluid systems and, more particularly, to fluid systems that employ mixing blocks for internally mixing fluids in the fluid system. Background Art

[0004] Mixers are commonly used in fluid systems to internally mix fluids, such as material precursors and reactants in semiconductor processing systems. In such mixers, mixing can be achieved by introducing a fluid into an internal channel defined within the mixer, causing the fluid to flow to the mixing channel, and thereby causing the internally mixed fluid to flow to an outlet, so that the fluids are internally mixed with each other before flowing out of the mixer outlet. Such mixers can be formed using subtractive manufacturing techniques, such as by drilling and reaming. Such mixers can also be formed using additive techniques, such as casting or laser sintering techniques, such as powder bed fusion. Once the channels within the mixer are formed, the mixer typically undergoes a post-manufacturing cleaning process, such as removing debris and shavings associated with subtractive techniques and flash or residual powder associated with additive techniques. The mixer may also undergo a post-manufacturing cleaning process, such as removing accumulated material associated with the fluid passing through the mixer during use in a fluid system.

[0005] In some mixers, access to internal passages such as inlet passages and / or mixing passages may be limited due to the inability to visually inspect the internal surfaces within the mixer that define the passages. For example, the inlet passage may be accessible only through the inlet of the inlet passage and the outlet of the mixing passage, and the internal surfaces of the inlet passage may not be visible to assess whether debris and shavings remaining in the inlet passage have been completely removed during the post-manufacturing cleaning process. For similar reasons, after the mixer is employed in a fluid system, the accumulation of residual adherent material on the internal surfaces of the inlet passage may not be visible, thereby affecting the effectiveness of cleaning the mixer. Therefore, a new and newly cleaned mixer may pose a risk of contamination to the fluid system in which the mixer is employed.

[0006] Various countermeasures exist to limit the risk of fluid system contamination resulting from the installation of a newly manufactured or cleaned mixer in a fluid system. For example, the mixer may be flushed after cleaning to dislodge and remove debris and shavings that may remain within the mixer after manufacturing. The internal passages of the mixer may be visually inspected after cleaning, such as by inserting a borescope into the internal passages of the mixer. And after installation, the mixer may be qualified within the fluid system in which the mixer is employed to assess whether the mixer is a source of contamination to the system. While generally adequate for its intended purpose, debris and shavings and residual material accumulation may impede removal using flushing techniques. Visual inspection of the mixer may increase the cost of mixer manufacturing and cleaning due to the complexity and specialized training associated with visual inspection devices such as borescopes. And post-installation qualification testing of newly built or newly cleaned mixers limits the usability of the fluid system in which the mixer is employed and increases the cost of ownership of the fluid system.

[0007] Such methods and systems are generally considered suitable for their intended purposes. However, there is still a need in the art for improved methods of manufacturing mixers, fixtures and fixture devices for manufacturing mixers, and fluid systems and semiconductor processing systems including mixers. The present disclosure provides a solution to this need. Summary of the invention

[0008] A clamp is provided. The clamp includes a first end plate, a threaded member, a second end plate, and a compression member. The first end plate has a first end plate recess. The threaded member is fixed in the first end plate and extends in a direction opposite to the first end plate recess. The second end plate has a second end plate recess facing the first end plate recess and is slidably accommodated on the threaded member. The compression member is arranged on a side of the second end plate opposite to the first end plate and is threadedly mounted on a male thread section of the threaded member to allow a purge fluid to flow in reverse through a mixing block that is compression-fixed between the first end plate and the second end plate.

[0009] In addition to or as an alternative to one or more of the features described above, further examples of the clamp may include the first end plate being formed of a polymeric material. The second end plate may also be formed of a polymeric material.

[0010] In addition to or as an alternative to one or more of the features described above, further examples of the clamp may include the threaded member being formed of a polymeric material. The compression member may be formed of a metallic material.

[0011] In addition to one or more of the above features, or as an alternative, a further example of a clamp may include a first sealing member and a second sealing member. The first sealing member may be disposed in the first end plate recess. The second sealing member may be disposed in the second end plate recess. The first sealing member may couple the first end plate fluid to the second sealing member, and the second sealing member may couple the second end plate fluid to the first sealing member.

[0012] In addition to or in lieu of one or more of the features described above, further examples of the clamp may include a first sealing member loosely fitting in a first end plate recess defined by the first end plate, and a second sealing member loosely fitting in a second end plate recess defined by the second end plate.

[0013] In addition to or in lieu of one or more of the features described above, further examples of the clamp may include a first sealing member captured within a first end plate recess surface of a first end plate, and a second sealing member captured within a second end plate recess surface of a second end plate.

[0014] In addition to or in lieu of one or more of the features described above, further examples of the fixture may include a purge fluid fitting and a first purge fluid source. The purge fluid fitting may be disposed in the first end plate and fluidly coupled to the second end plate recess through the first end plate. The first purge fluid source may include a first purge fluid, such as a gaseous purge fluid or a liquid purge fluid at standard atmospheric conditions, and may be coupled to the purge fluid fitting and fluidly coupled to the second end plate recess through it.

[0015] In addition to or as an alternative to one or more of the features described above, further examples of the clamp may include that the first purge fluid is a gaseous purge fluid.

[0016] In addition to or in lieu of one or more of the features described above, further examples of the clamp may include the first purge fluid including oil-free air or clean dry air.

[0017] In addition to or as an alternative to one or more of the above features, a further example of the clamp may include a plug. The plug may be disposed in the second end plate. The plug may isolate the second end plate recess from the external environment fluid outside the clamp.

[0018] In addition to or in lieu of one or more of the features described above, further examples of the fixture may include a purge fluid fitting and a second purge fluid source. The purge fluid fitting may be disposed in the second end plate and fluidly coupled to the first end plate recess through the second end plate. The second purge fluid source may include a second purge fluid, such as a gaseous or liquid purge fluid at standard atmospheric conditions, and may be coupled to the purge fluid fitting and fluidly coupled to the first end plate recess through it.

[0019] In addition to or as an alternative to one or more of the features described above, further examples of the clamp may include that the second purge fluid is a liquid purge fluid.

[0020] In addition to or in lieu of one or more of the features described above, further examples of the fixture may include that the second purge fluid may include ultrapure water or deionized water.

[0021] A clamp device is provided. The clamp device includes a clamp as described above, a mixing block, an embolism and a purge fluid fitting. The mixing block includes a mixing block body and is compressively fixed between a first end plate and a second end plate of the clamp. The mixing block body has a first end face, which has a dead-end port accommodated in a first recess of the first end plate; a second end face, which has an outlet port longitudinally opposite to the first end face, the outlet port is accommodated in a second recess of the second end plate, and the outlet port is fluidly connected to the dead-end port defined by the first end face through a mixing channel extending through the mixing block body; a first side face, which has a first inlet port separating the second end face from the first end face, the first inlet port is fluidly connected to the mixing channel at a confluence; and a second side face, which has a second inlet port separating the second end face from the first end face, the second inlet port is fluidly connected to the mixing channel at a confluence. The purge fluid fitting is arranged in one of the first end plate and the second end plate to convey the purge fluid to the mixing channel. The embolism is arranged in the other of the first end plate and the second end plate to force the purge fluid to pass through the first inlet port and the second inlet port of the mixing block body.

[0022] In addition to or in lieu of one or more of the features described above, further examples of the clamp device may include a first purge fluid source and a first sealing member. The first purge fluid source may include a gaseous purge fluid coupled to a purge fluid fitting. The first sealing member may be disposed within the first recess and fluidly couple the first purge fluid source to a dead-end port of the mixing block body. The first inlet port and the second inlet port may fluidly couple the first purge fluid source to an external environment defining the mixing block body through the dead-end port.

[0023] In addition to or in lieu of one or more of the features described above, further examples of the clamp device may include a second purge fluid source and a second sealing member. The second purge fluid source may include a liquid purge fluid coupled to a purge fluid fitting. The second sealing member may be disposed within the second recess and fluidly couple the second purge fluid source to an outlet port of the mixing block body. The first inlet port and the second inlet port may fluidly couple the second purge fluid source to an external environment defining the mixing block body through a dead-end port.

[0024] In addition to or instead of one or more of the features described above, further examples of the clamping device may include that the purge fluid fitting may be disposed in the first end plate, the first end surface of the mixing block body may be received in a first end plate recess of the first end plate, and the first end plate recess may separate the purge fluid fitting from the first end surface of the mixing block body.

[0025] In addition to or instead of one or more of the features described above, further examples of the clamping device may include that the purge fluid fitting may be disposed in the second end plate, the second end surface of the mixing block body may be received in a second end plate recess of the second end plate, and the second end plate recess may separate the purge fluid fitting from the second end surface of the mixing block body.

[0026] In addition to or in lieu of one or more of the features described above, further examples of the clamp device may include the mixing block being formed of a mixing block material having a hardness, and the first end plate being formed of a first end plate material having a hardness less than the hardness of the mixing block material. The second end plate may be formed of a second end plate material having a hardness less than the hardness of the mixing block material. The threaded member may be formed of a threaded member material having a hardness less than (or substantially equal to) the hardness of the mixing block material.

[0027] A method for manufacturing a mixing block is provided. The method includes, at a mixing block as described above, compressively fixing a mixing block body in a fixture between a first end plate having a first end plate recess and a second end plate having a second recess by fixing a threaded member in a first end plate so that the threaded member extends in a direction opposite to a first end plate recess, slidably accommodating the threaded member in the second end plate so that the second end plate recess faces the first end plate recess, and arranging a compression member on a side of the second end plate opposite to the first end plate, and threadably placing the compression member on the threaded member. A purge fluid fitting is placed in one of the first end plate and the second end plate, a plug is placed in the other of the first end plate and the second end plate, and a purge fluid is introduced into a mixing channel through the purge fluid fitting and one of the first recess and the second recess. It is contemplated that the plug member accumulates a portion of the purge fluid within one of the first end plate recess and the second end plate recess, and that the purge fluid is caused to flow in the reverse direction through the mixing block body by transferring the purge fluid from the mixing channel to the first inlet port and the second inlet port from a confluence defined along the mixing channel, the confluence being coupled to the first inlet port through the first source channel and to the second inlet port through the second source channel, and the purge fluid flows out from the first inlet port and the second inlet port into the environment defining the mixing block body.

[0028] In addition to or in lieu of one or more of the features described above, further examples of the method may include the purge fluid being a gaseous purge fluid, one of the first end plate and the second end plate being a first end plate of the fixture, and the method further comprising removing the plug from the second end plate and removing the purge fluid fitting from the first end plate; securing the plug in the first end plate and securing the purge fluid fitting in the second end plate; introducing a liquid purge fluid into the mixing channel through the purge fluid fitting and the second end plate recess, the plug member accumulating a portion of the liquid purge fluid in the first end plate recess; causing the liquid purge fluid to flow in reverse through the mixing block body by transferring the liquid purge fluid from the mixing channel to the first inlet port and the second inlet port from a confluence defined along the mixing channel; and flowing the liquid purge fluid out of the first inlet port and the second inlet port into an environment defining the mixing block body.

[0029] A mixing block is provided and the mixing block is manufactured using the above method for manufacturing a mixing block.

[0030] A semiconductor processing system is provided. The semiconductor processing system includes: a first processing fluid source and a second processing fluid source; a mixing block manufactured using the above method for manufacturing a mixing block, the first processing fluid source connected to a first inlet port of a mixing block body, and the second processing fluid source connected to a second inlet port of the mixing block body; a chamber device, the chamber device is connected to an outlet port of the mixing block body and passes through the outlet port to the first processing fluid source and the second processing fluid source; and a substrate support and a distribution plate arranged in the chamber device. The distribution plate connects the substrate support fluid to the mixing block body to deposit a material layer onto a substrate or remove material from the substrate using a first processing fluid from the first processing fluid source and a second processing fluid from the second processing fluid source mixed inside the mixing block body.

[0031] In addition to or as an alternative to one or more of the features described above, further examples of semiconductor processing systems can include one or more of the first processing fluid source and the second processing fluid source including a material layer precursor for depositing a material layer using an atomic layer deposition technique.

[0032] In addition to or instead of one or more of the features described above, further examples of semiconductor processing systems can include one or more of the first processing fluid source and the second processing fluid source including a material layer precursor for depositing the material layer using a chemical vapor deposition technique.

[0033] In addition to or instead of one or more of the features described above, further examples of semiconductor processing systems may include one or more of the first processing fluid source and the second processing fluid source including an etchant or etchant precursor for removing material from a substrate using a dry etching technique.

[0034] The present invention summary is provided to introduce some concepts in a simplified form. These concepts are further described in detail in the detailed description of the examples of the following disclosure. The present invention summary is not intended to identify the key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] These and other features, aspects and advantages of the present invention disclosed herein are described below with reference to the accompanying drawings of certain embodiments, which are intended to illustrate rather than to limit the present invention.

[0036] Figure 1 is a schematic diagram of a fluid system including a mixing block and an associated fixture according to the present invention, showing the mixing block being installed in the fluid system after being purged in a fixture device including the fixture;

[0037] Figure 2 According to the example of the present disclosure Figure 1 A cross-sectional side view of a mixing block showing the mixing block fluidly coupling a fluid source to a chamber arrangement in a semiconductor processing system;

[0038] Figure 3 According to the example of the present disclosure Figure 1 A perspective view of a fixture assembly showing a mixing block compressively disposed within the fixture for purging with a purge fluid;

[0039] Figure 4 According to the example of the present disclosure Figure 1 a cross-sectional view of a fixture assembly showing reverse flow of purge fluid through the mixing block relative to normal flow of fluid through the mixing block;

[0040] Figure 5 According to the example of the present disclosure Figure 1 An exploded view of the clamp assembly showing the first end plate and the second end plate exploded away from the mixing block;

[0041] Figures 6 to 11 According to the example of the present disclosure Figure 1 Planar and cross-sectional side views of first and second end plates of a fixture showing recesses defined in the end plates and sealing members disposed in the recesses according to examples of the present disclosure;

[0042] Fig.12 is an example according to the present disclosure including Figure 1 A side view of a threaded member in a fixture of FIG. 1 showing a male threaded segment having male threads defined between a tip and a head of the threaded member;

[0043] Fig.13 is an example according to the present disclosure including Figure 1a cross-sectional side view of a compression member in a fixture of , showing female threads corresponding to male threads of a threaded member defined within the compression member;

[0044] Fig.14 is an example according to the present invention includes Figure 1 side view of a plug in a fixture of , showing a male threaded section having male threads corresponding to female threads defined in a plug / purge fluid fitting hole defined in an end plate of the fixture to accumulate purge fluid within the fixture device;

[0045] Fig.15 is an example according to the present invention included in Figure 1 a side view of a purge fluid fitting in a fixture of , showing a male threaded section having male threads corresponding to female threads defined in a plug / purge fluid fitting hole defined in an end plate of the fixture for introducing purge fluid into the fixture device;

[0046] Fig.16 and Fig.17 is a block diagram of a method of manufacturing a mixing block according to an illustrative and non-limiting example, showing the operation of the method; and

[0047] Fig.18 Based on the example Fig.16 and Fig.17 A block diagram of a method of operation illustrating operations for reversing the direction of introduction of a purge fluid into a mixing block while maintaining reverse flow of the purge fluid through the mixing block.

[0048] It should be understood that the elements in the drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the relative sizes of some elements in the drawings may be exaggerated relative to other elements to help improve the understanding of the illustrated embodiments of the present disclosure. DETAILED DESCRIPTION

[0049] Reference will now be made to the drawings, wherein like reference numerals represent similar structural features or aspects of the subject disclosure. For purposes of explanation and illustration, and not limitation, Figure 1 A partial view of an example of a clamp for a mixing block according to the present invention is shown in FIG. 1 and is generally indicated by the reference numeral 300. Figure 2-18 Other examples of fixtures according to the present invention, fixture devices including fixtures and mixing blocks, and methods of manufacturing mixing blocks or aspects thereof are provided in the disclosure, as will be described. The fixtures and fixture devices of the present disclosure can be used in methods of manufacturing and cleaning mixing blocks for internally mixing fluids in fluid systems, such as mixing blocks for supplying precursors to reactor semiconductor processing systems for depositing material layers onto substrates using atomic layer deposition (ALD) or chemical vapor deposition (CVD) techniques, but the disclosure is generally not limited to any particular type of precursor supply system or semiconductor processing system.

[0050] refer to Figure 1 , a fluid system 10 is shown that includes a mixing block 100 and a clamp device 200 including a clamp 300. The fluid system 10 includes a fluid source 12, the mixing block 100, and a fluid destination 14. The fluid source 12 is connected to the mixing block 100 and is configured to provide a first fluid 2 flow and a second fluid 4 flow to the mixing block 100. The mixing block 100 is connected to the fluid destination 14, configured to internally mix the first fluid 2 and the second fluid 4, and is also configured to provide a mixed fluid 6 flow including the first fluid 2 and the second fluid 4 to the fluid destination 14. In this regard, it is contemplated that the mixing block 100 includes two or more inlet ports that are fluidly coupled to an outlet port via a source channel and a mixing or supply channel; for example, the first inlet port 102 ( Figure 2 shown) and a second inlet port 104 ( Figure 2 ), they pass through the mixing passage 108 ( Figure 2 ) and the first source channel 110 ( Figure 2 ) and the second source channel 112 ( Figure 2 ) is fluidly coupled to outlet port 106 ( Figure 2 to provide the internally mixed fluid 6 to the fluid destination 14.

[0051] The fixture device 200 is configured to purge the mixing block 100, and in this regard includes a fixture 300, a first purge fluid source 202, a second purge fluid source 204, a first purge fluid conduit 206, and a second purge fluid conduit 208. The fixture 300 is configured to support the mixing block 100 during purging using the first purge fluid 210 and the second purge fluid 212, such as in a reverse flow arrangement, wherein the purge fluid is supplied from the first inlet port 102 ( Figure 2 ) and one or more second inlet ports 104 ( Figure 2 ) flows out to define a mixing block body 114 ( Figure 2 It is contemplated that the fixture 300 is further configured to introduce a purge fluid into the first end face 118 ( Figure 2 shown) and the second end surface 120 ( Figure 2 ) to achieve reverse flow, so that the purge fluid flows in reverse through the first source channel 110 ( Figure 2 ) and one or more second source channels 112 ( Figure 2). Advantageously, this enables the use of a pressure of a gaseous purge fluid (e.g., a gaseous purge fluid at standard atmospheric conditions) to remove foreign matter (e.g., debris, shavings, and / or abrasive particles) that may reside within the first source channel 110 and / or one or more second source channels 112 after manufacturing and / or cleaning using the gaseous purge fluid, and enables evaluation of the removal efficacy using a liquid purge fluid (e.g., a purge fluid that is liquid at standard atmospheric conditions). It also enables evaluation of the relative resistance to fluid flow of the surface condition (e.g., surface texture) of one of the first source channel 110 and one or more second source channels 112 relative to another of the first source channel 110 and one or more second source channels 112 using the liquid purge fluid, such as in a source channel having an internal texture that is configured to extend the useful life of the mixing block 100 between refurbishment and / or replacement events.

[0052] The first purge fluid source 202 is configured to flow a first purge fluid 210 to the mixing block 100, and in this regard may include the first purge fluid 210, and is connected to the fixture 300 through a first purge fluid conduit 206. The second purge fluid source 204 can be similar to the first purge fluid source 202, and is additionally configured to flow a second purge fluid 212 to the mixing block 100. In this regard, it is contemplated that the second purge fluid source 204 may include the second purge fluid 212 and be connected to the fixture 300 through a second purge fluid conduit 208. In some examples, the first purge fluid 210 may include a gas (e.g., consisting of or consisting essentially of it). Examples of suitable gases include nitrogen (N2), high purity nitrogen (HPN), and clean dry air (CDA). According to some examples, the second purge fluid 212 may include water, deionized water, an etchant, or a cleaning agent (e.g., consisting of or consisting essentially of it). In view of the present disclosure, those skilled in the art will understand that other purge fluids may be employed and that these purge fluids are still within the scope of the present disclosure.

[0053] refer to Figure 2, shows a fluid system 10 (e.g., a semiconductor processing system) according to an example of the present disclosure. In the illustrated example, the fluid source 12 includes a first treatment fluid source 18 and a second treatment fluid source 20. The first treatment fluid source 18 is configured to provide a flow of a first treatment fluid 22 to a fluid destination 14, and in this regard is coupled to a first inlet port 102 of a mixing block 100 (e.g., a reactor manifold) via a first source conduit 24. The second treatment fluid source 20 is similar to the first treatment fluid source 18, and is additionally configured to provide a flow of a second treatment fluid 26 to the fluid destination 14, and is coupled to one or more second inlet ports 104 of the mixing block 100 via a second source conduit 28. The mixing block 100 is in turn configured to internally mix the first treatment fluid 22 with the second treatment fluid 26, and to provide a flow of the internally mixed treatment fluid 30 to the fluid destination 14.

[0054] In the illustrated example, the fluid destination 14 includes a chamber arrangement 32. The chamber arrangement 32 includes a chamber body 34, a distribution plate 36, a substrate support 38, and an exhaust source 40. The chamber body 34 is connected to the outlet port 106 of the mixing block 100 to receive a flow of the internally mixed process fluid 30 from the mixing block 100. The distribution plate 36 is fixed within the chamber body 34 and divides the interior 42 of the chamber body 34 into a distribution plenum 44 and a processing volume 46. The substrate support 38 is disposed within the interior 42 of the chamber body 34 and is configured to support the substrate 3 during deposition of the material layer 5 onto the substrate 3 using the internally mixed process fluid 30 received from the mixing block 100. The exhaust source 40 is connected to the chamber body 34 and is fluidly coupled to the processing volume 46 to remove residual process fluid and / or reaction products 48 from the interior 42 of the chamber body 34, and the exhaust source 40 transmits the residual process fluid and / or reaction products 48 to the external environment 8 of the fluid system 10, for example, through an abatement device, such as a scrubber.

[0055] In some examples, either (or both) of the first process fluid 22 and the second process fluid 26 may include a precursor or reactant for a material layer deposition process, such as a material layer deposition technique that uses CVD or ALD techniques to deposit a material layer 5 onto a substrate 3 supported on a substrate support 38. According to some examples, either (or both) of the first process fluid 22 and the second process fluid 26 may include an etchant or catalyst for an etching process, such as for removing material from the substrate 3 using a dry etching technique. Although the chamber arrangement 32 is shown and described herein as having a downflow architecture, it should be understood and appreciated that chamber arrangements having other architectures may also benefit from the present disclosure, such as, as a non-limiting example, a chamber arrangement having a crossflow architecture.

[0056] The mixing block 100 is configured to internally mix the first treatment fluid 22 and the second treatment fluid 26 received at the first inlet port 102 and the second inlet port 104, respectively, and to discharge the internally mixed treatment fluid 30 from the outlet port 106 of the mixing block 100. In this regard, it is contemplated that the mixing block 100 includes a mixing block body 114 formed of a mixing block material 116 and extending longitudinally between a first end face 118 and a second end face 120. The mixing block body 114 may also have a first side 122 and one or more second side faces 124. The first side 122 and the one or more second side faces 124 may be between the first end face 118 and the second end face 120 of the mixing block body 114. It is also contemplated that the mixing block body 114 further defines a plurality of flow channels 126 laterally located between the first side 122 and the one or more second side faces 124 (and / or between the first end face 118 and the second end face 120) for internally mixing the fluids received at the first inlet port 102 and the one or more second inlet ports 104 for discharge through the outlet port 106. In this regard, it is contemplated that the mixing block body 114 defines the mixing channel 108, the first source channel 110, and one or more second source channels 112 extending through a mixing block material 116 forming the mixing block body 114. In some examples, the mixing block material 116 includes (or consists of or consists essentially of) a metallic material. Examples of suitable metallic materials include stainless steel materials, such as 316 stainless steel and Hastelloy, or aluminum alloys, such as 6061 aluminum. According to some examples, the mixing block body material 116 may include (or consists of or consists essentially of) a polymeric material, such as ultra-high molecular weight polyethylene (UHMW), which may limit the cost of the fluid system 10 by simplifying the manufacture of the mixing block body 114.

[0057] The mixing channel 108 extends between the first end face 118 and the second end face 120 and defines a junction 128 along its length. It is contemplated that the first source channel 110 and the one or more second source channels 112 join the mixing channel 108 at the junction 128, for example, at the first source channel outlet 130 and the one or more second source channel outlets 132. It is also contemplated that the mixing channel 108 fluidly couples the junction 128 to the outlet port 106, thereby fluidly coupling the first source channel 110 and the one or more second source channels to the outlet port 106 via the first source channel outlet 130 and the one or more second source channel outlets 132. It is contemplated that the outlet port 106 is defined by the first end face 118 of the mixing block body 114, which in turn may be substantially parallel to the second end face 120. In some examples, the second end face 120 of the mixing block body 114 may further define a dead end port 134. In such examples, the dead end port 134 may be coupled to the junction 128 through the mixing channel 108, which fluidly couples the first end face 118 of the mixing block body 114 to the second end face 120 via the dead end port 134 and the outlet port 106, which may simplify the manufacture of the mixing block body 114 by enabling the use of a subtractive manufacturing process, such as drilling, to manufacture the mixing block body 114. In certain examples, an end cap body 136 may be fluidly disposed on the first end face 118 of the mixing block body 114. The end cap body 136 may define a dead end channel section 138 therein, which is fluidly coupled to the mixing channel 108 through the dead end port 134, the dead end channel section 138 extending the mixing channel 108 beyond the first end face 118 to promote mixing of fluids within the mixing channel 108.

[0058] The first source passage 110 extends between the first inlet port 102 and the junction 128 and fluidly couples the first inlet port 102 to the junction 128 and therethrough to the outlet port 106 via the mixing passage 108. It is contemplated that the first inlet port 102 is defined by a first side 122 of the mixing block body 114, and the profile of the first side 122 may be substantially planar to facilitate fluid sealing of the first source conduit 24 on the mixing block body 114. In this regard, the first side 122 may be substantially orthogonal relative to either (or both) of the first end face 118 and the second end face 120. In another aspect, the first source channel 110 may have an inlet section 140 and an outlet section 142, the inlet section 140 extending between the first inlet port 102 of the first source channel 110 and the outlet section 142 and being substantially orthogonal relative to one or more of the first side 122 and / or the mixing channel 108, the outlet section 142 of the first source channel 110 coupling the inlet section 140 of the first source channel 110 to the junction and being inclined relative to one or more of the first side 122 and the mixing channel 108. It is contemplated that one or more second source channels 112 are similar to the first source channels 110, additionally fluidly coupling one or more second inlet ports 104 to the junction 128, and one or more second sides 124 defining one or more second inlet ports 104 and being substantially parallel to the first side 122 and offset from the first side 122 about a compression axis 144 defined by the mixing channel 108, which may simplify the manufacture of the mixing block body 114. In the example shown, the one or more second sides 124 are offset by approximately 180 degrees relative to the first side 122 about the compression axis 144. In view of this disclosure, one skilled in the art will appreciate that in other examples, one or more second sides 124 may be offset from the first side 122 by less than 180 degrees or more than 180 degrees and still be within the scope of the present disclosure.

[0059] When the mixing block 100 is installed to Figure 2In the fluid system 10 shown, mixing is achieved by introducing the first treatment fluid 22 into the first inlet port 102 and introducing the one or more second treatment fluids 26 into the one or more second inlet ports 104. It is contemplated that the first source channel 110 delivers the first treatment fluid 22 from the first inlet port 102 to the junction 128, and the one or more second inlet ports 104 deliver the one or more second treatment fluids 26 from the one or more second inlet ports 104 to the junction 128. It is also contemplated that the mixing channel 108 internally mixes the first treatment fluid 22 and the one or more second treatment fluids 26 received at the junction 128, and the mixing channel 108 in turn delivers the internally mixed treatment fluid 30 and the one or more second fluids 4 to the fluid destination 14 (e.g., chamber device 32) via the outlet port 106. In the example shown, the junction 128 is close to (e.g., relatively close to) the first end face 118 of the mixing block body 114 and is away from the second end face 120. In view of this disclosure, those skilled in the art will appreciate that this can simplify the manufacture of the mixing block body 114, for example by enabling the use of a subtractive manufacturing process such as drilling to form the inlet section 140, and avoiding porosity and surface roughness challenges that may exist in other techniques, such as additive manufacturing techniques, such as powder bed fusion. In view of this disclosure, those skilled in the art will also appreciate that such subtractive techniques may require flushing the mixing block body 114 to remove debris and debris from the plurality of flow channels 126 defined within the mixing block body 114, such as at the junction of the inlet section 140 and the outlet section 142. To facilitate such purging (or flushing), a fixture 300, a fixture apparatus 200, and a method 400 (such as the mixing block 100) of manufacturing a mixing block (such as the mixing block 100) are provided. Fig.16 shown).

[0060] Reference Figure 3 and Figure 4 , a clamp device 200 is shown. The clamp device 200 generally includes a mixing block 100 and a clamp 300. In the illustrated example, the clamp device 200 also includes a first flow control device 214, a second flow control device 216, and a slot 218. Although shown and described herein as having certain elements and a particular arrangement, it should be understood and appreciated that the clamp device 200 may include additional elements and / or exclude certain elements shown and described herein, and / or have a different arrangement than shown and described herein, and still be within the scope of the present disclosure.

[0061] The fixture 300 is configured to support the mixing block 100 during purging, and in this regard is configured to fluidly couple a purge source (e.g., the first purge fluid source 202 and / or the second purge fluid source 204) to the mixing block 100. In some examples, the fixture 300 can support the mixing block 100 during reverse flow of a purge fluid (e.g., one or more of the first purge fluid 210 received from the first purge fluid source 202 and the second purge fluid 212 received from the second purge fluid source 204) through the mixing block 100. In this regard, the fixture 300 can support the mixing block 100 such that the outlet port 106 is located above the first inlet port 102 and the one or more second inlet ports 104 relative to gravity. According to some examples, the fixture 300 can support the mixing block 100 in different orientations, such as in a general flow direction, with the outlet port 106 in its position when mounted 16 ( Figure 1 shown) to the fluid system 10 ( Figure 1 104, i.e., such that the outlet port 106 is lower relative to gravity than the first inlet port 102 and the one or more second inlet ports 104. Advantageously, supporting the mixing block 100 in an orientation for reverse flow promotes uniform distribution of the liquid purge fluid (e.g., one or more of the first purge fluid 210 and the second purge fluid 212) between the first source channel 110 and the one or more second source channels 112. In view of this disclosure, one skilled in the art will also appreciate that supporting the mixing block 100 in a reverse flow orientation, wherein the purge fluid exits the mixing block body 114 from the first inlet port 102 and the one or more second inlet ports 104, can also provide a visual indication of whether one of the first source channel 110 and the one or more second source channels 112 is constricted relative to another of the first source channel 110 and the one or more second source channels 112, due to comparative arcs of the liquid purge streams flowing out of the mixing block body 114 and / or comparative distances of the liquid purge fluid streams flowing out of the mixing block body 114.

[0062] The first purge fluid source 202 is configured to provide a flow of a first purge fluid 210 to the fixture 300 and through it to the mixing block 100. In this regard, it is contemplated that the first purge fluid source 202 includes the first purge fluid 210 and is coupled to the fixture 300 via a first purge fluid conduit 206. In certain examples, the first purge fluid source 202 may be coupled to the first purge fluid conduit 206 via a first flow control device 214, which may in turn include one or more of an orifice plate, a flow restrictor, a metering valve, a pressure regulator, and a pressure sensor. According to certain examples, the first purge fluid 210 may include (or consist of or substantially consist of) a gaseous purge fluid. In this regard, it is contemplated that the first purge fluid 210 may include nitrogen (N2), oil-free air (OFA), clean dry air (CDA), or a mixture including one or more of the foregoing gases. In view of the present disclosure, those skilled in the art will also appreciate that purging the mixing block body 114 with a gas such as nitrogen (N2), OFA and / or CDA can enable the removal of foreign matter (e.g., solids such as debris and / or shavings and abrasive materials used to impart a rough surface texture to the flow channels defined within the mixing block 100) from within the mixing block while maintaining the cleanliness of the mixing block 100 and presenting a relatively small risk of contamination of the mixing block 100 with trace metals.

[0063] The second purge fluid source 204 is similar to the first purge fluid source 202 and is additionally configured to provide a second purge fluid 212 flow to the fixture 300 and through it to the mixing block 100. In this regard, it is contemplated that the second purge fluid source 204 is coupled to the fixture 300 via a second purge fluid conduit 208. In some examples, the second purge fluid source 204 can be coupled to the second purge fluid conduit 208 via a second flow control device 216, which can in turn include one or more of an orifice plate, a flow restrictor, a metering valve, a pressure regulator, and a pressure sensor. In some examples, the second purge fluid 212 may include (or consist of or substantially consist of) a liquid purge fluid. Examples of suitable liquids include water, such as ultrapure water (UPW) and deionized water. In view of the present disclosure, those skilled in the art will also appreciate that purging the mixing block 100 with a liquid such as UPW and deionized water can remove foreign matter that resists gas removal, such as cleaning agents and / or residual etchants and etchant products, from within the mixing block while maintaining the cleanliness of the mixing block 100 with little associated risk of trace metal contamination.

[0064] The groove 218 may be positioned below the fixture 300 and configured to collect a liquid purge fluid, such as the second purge fluid 212, flowing from the mixing block 100. In certain embodiments, the groove 218 may be configured with an edge 220 that provides a visual indication of the flow resistance imposed on the purge fluid by the first source channel 110 and the one or more second source channels 112. For example, fluid flowing from the mixing block 100 less than a predetermined distance A may indicate a blockage in the flow channel, such as due to debris or shavings 7 residing within the first source channel 110. Alternatively (or in addition), fluid flowing from the mixing block 100 more than a predetermined distance B may indicate an anomaly in the surface texture, such as the presence of residual patina on the inner surface of one or more second source channels 112. In view of the present disclosure, those skilled in the art will appreciate that this may limit the cost of the mixing block 100 and / or the cost of the fluid system 10 (such as Figure 1 The reliability of the mixing block 100 may be improved by, for example, triggering rework of the mixing block 100 when foreign matter resides in a newly built mixing block and whether cleaning of a refurbished mixing block was successful.

[0065] refer to Figure 5-15 , showing the fixture 300. Figure 5 , the clamp 300 may generally include a first end plate 302, a second end plate 304, and a plurality of threaded members 306. The clamp 300 may also include a plurality of compression members 308, a plug 310, and a purge fluid fitting 312. It is also contemplated that the clamp 300 may also include one or more sealing members, such as a first sealing member 314 and a second sealing member 316. Although shown and described herein as having certain elements and arrangements, it should be understood and appreciated that the clamp 300 may include additional elements and / or exclude elements shown and described herein, as well as have different arrangements than shown and described herein, and still be within the scope of the present disclosure. For example, as shown and described herein, the clamp 300 includes four (4) threaded members 306 and four (4) compression members 308. This is for purposes of example and illustration only and is not intended to be limiting. In view of the present disclosure, one skilled in the art will appreciate that the clamp 300 may include fewer or more threaded members and / or compression members and still be within the scope of the present disclosure. In view of this disclosure, one skilled in the art will also appreciate that the clamp 300 may include fewer or more sealing components and still be within the scope of the present disclosure.

[0066] refer to Figure 6 and 7 , showing a first end plate 302. The first end plate 302 is configured to connect the mixing block 100 ( Figure 1 ) is compressed and fixed to the first end plate 302 and the second end plate 304 ( Figure 5 In this regard, it is contemplated that the first end plate 302 includes a first end plate material 320 (such as Figure 4The first end plate material 320 may have a thickness smaller than that of the first end plate body 114 (as shown in FIG. Figure 2 The mixed block main material 116 (as shown) Figure 2 In some examples, the first end plate material 320 may include a metallic material, such as stainless steel or an aluminum alloy. According to some examples, the first end plate material 320 may include (or consist of or consist essentially of) a polymeric material. Examples of suitable polymeric materials include UHMW, high density polyethylene (HDPE), and polyamide materials. In view of this disclosure, those skilled in the art will appreciate that forming the first end plate 302 from a material having a hardness less than the hardness of the hybrid block body material 116 forming the hybrid block body body 114 may limit the assembly of the fixture device 200 ( Figure 1 The risk of damaging the mixing block body 100 during the mixing process, such as due to a misoperation caused by a collision with one of the sealing surfaces of the mixing block body 100; for example, the first end surface 118 (such as Figure 2 As shown), the second end surface 120 (as Figure 2 As shown), the first side 122 (as Figure 2 ) and / or one or more second sides 124 (as shown Figure 2 during assembly of the fixture device 200.

[0067] The distal end surface 322 of the first end plate body 318 may define a plurality of threaded member holes 328. The plurality of threaded member holes 328 may be individually configured to receive a plurality of threaded members 306 ( Figure 5 ) and in this regard may extend through a major thickness 330 of the first end plate body 318 and be distributed around the first end plate recess 326. In some examples, one or more of the plurality of threaded member holes 328 may define a female thread segment 332 therein. In such an example, the female thread segment may correspond to a male thread segment defined at least partially along the plurality of threaded members 306. According to certain examples, the female thread segment 332 may extend continuously and uninterruptedly between the distal surface 322 and the proximal surface 324 of the first end plate body 318. It is also contemplated that, according to certain examples, the plurality of threaded member holes 328 may define a generally polygonal shape 334 without threads, such as a square or keyed shape. The polygonal shape 334 may correspond to a polygonal profile 336 (such as a square or keyed shape) defined by one or more of the plurality of threaded members 306. Fig.12 In view of the present disclosure, those skilled in the art will appreciate that the polygonal shape 334 can cooperate with the polygonal profile 336 defined by the threaded member 306 to simplify the clamping device 200 ( Figure 1306 ), for example by rotationally fixing the threaded members relative to the first end plate 302 so that the plurality of threaded members 306 can be assembled into the first end plate 302 without the use of tools.

[0068] In some examples, the distal surface 322 of the first end plate body 318 can define a plug / purge fluid fitting hole 338. The plug / purge fluid fitting hole 338 can couple the distal surface 322 of the first end plate body 318 to a first end plate recess surface 340 defining a first end plate recess 326 of the first end plate body 318. It is contemplated that the plug / purge fluid fitting hole 338 can be configured to attach the plug 310 (e.g., Figure 5 ) or purge fluid fitting 312 (as shown Figure 5 In this regard, it is contemplated that the plug 310 and the purge fluid fitting 312 may be interchangeable with one another, such that the fixture 300 is reversible. For example, the plug 310 may be disposed in the second end plate 304 for purging the mixing block 100 ( Figure 1 ), so as to use the dead-end port 134 ( Figure 2 As shown) introduces the mixing block body 114 ( Figure 2 ) is purged with a gaseous purge fluid, such as a first purge fluid 210 ( Figure 1 ), the plug 310 is thereafter removed and subsequently placed in the first end plate 302, and the mixing block 100 is used to pass through the outlet port 106 (as shown in FIG. Figure 2 The liquid purge fluid introduced into the chamber (such as the second purge fluid 212) is shown in FIG. Figure 1 as shown) for purging.

[0069] In some examples, the plug / purge fluid fitting bore 338 may define a female threaded section 346 therein. The female threaded section 346 may correspond to the plug 310 ( Figure 5 The male threaded section 348 (shown) Fig.14 shown) and purge fluid fitting 312 ( Figure 5 The male thread section 350 (shown) Fig.15The female thread segment 346 can extend from the distal end surface 322 of the first end plate body 318 and terminate within the plug / purge fluid fitting hole 338 at a position intermediate the distal end surface 322 of the first end plate body 318 and the first end plate recess surface 340 of the first end plate body 318. In view of the present disclosure, those skilled in the art will appreciate that terminating the female thread segment 346 at a position intermediate the distal end surface 322 of the first end plate body 318 and the first end plate recess surface 340 can limit the assembly of the fixture device 200 ( Figure 1 The mixing block 100 (shown) is damaged during Figure 1 By limiting (or eliminating) the risk of the assembler over-tightening the plug 310 or purging the fluid fitting 312 (thereby over-advancing in a direction toward the first end face 118 to contact the sealing surface defined thereon) during assembly of the clamp device 200, the plug 310 ( Figure 5 shown) or purge fluid fitting 312 ( Figure 5 ) contacts the first end surface 118 (shown) of the mixing block body 114 Figure 2 shown).

[0070] The first end plate recess 326 may be configured to receive the mixing block body 114 (eg, Figure 2 In this regard, it is contemplated that the first end plate recess 326 is sized to accommodate the first end surface 118 (eg, Figure 2 ). In another aspect, the first end plate recess 326 can have a shape that substantially matches the axial profile of the first end face 118 of the mixing block body 114. It is also contemplated that the plug / purge fluid fitting hole 338 is defined within the first end plate recess surface 340 and is positioned such that when the first end face 118 of the mixing block body 114 is received within the first end plate recess hole 342, the plug / purge fluid fitting hole 338 is aligned with the dead-end port 134 (e.g., Figure 2 as shown) alignment.

[0071] In some examples, the major thickness 330 and the minor thickness 344 of the first end plate body 318 can be sized such that the first sealing member 314 ( Figure 5 As shown) can be assembled in the fixture device 200 ( Figure 1 ) is placed on the first end plate recess surface 340 (shown) of the first end surface 118 of the mixing block body 114 Figure 2In this regard, it is contemplated that the correspondence between the first end plate recess 326 and the first end surface 118 of the mixing block body 114 may allow the first end plate 302 to support the mixing block body 114 in a substantially vertical position, with the first sealing member 314 in a substantially uncompressed state (e.g., Figure 8 ), without requiring the assembler to maintain the mixing block body 114 in a vertical orientation. In view of this disclosure, those skilled in the art will appreciate that this can simplify the assembly of the clamp device 200, for example by allowing a single assembler to assemble the second end plate 304 ( Figure 5 ) and the second end surface 120 ( Figure 2 ) are aligned, and then a plurality of threaded members 306 ( Figure 5 ) is slidably received in the second end plate 304, enabling a single assembler to assemble the clamp device 200.

[0072] like Figure 8 , a first sealing member 314 according to an example of the present disclosure is shown. It is contemplated that the first sealing member 314 is formed of an elastic material 352 so that the mixing block body 114 can be compressed between the first end plate 302 and the second end plate 304 ( Figure 5 ), so that once assembled into the clamp device 200, the mixing block body 114 is fluid-tightly sealed within the clamp 300. Examples of suitable elastic materials include fluororubbers, such as , which is available from Chemours, Inc. (formerly EI du Pont de Nemours & Co.) of Wilmington, Del. It is also contemplated that the first sealing member 314 can define a first sealing member profile 354 that can be substantially circular when the first sealing member 314 is in a nominal state, wherein the first sealing member 314 can be uncompressed.

[0073] In some examples, when assembling the fixture device 200 (eg Figure 1 340), the first sealing member 314 may float (e.g., be movably supported) on the first end plate recess surface 340 in loose registration with the plug / purge fluid fitting hole 338. So supported, subsequent compression of the first sealing member 314 between the first end face 118 of the mixing block body 114 and the first end plate 302 may compressively secure the first sealing member 314 between the first end plate recess surface 340 and the first end face 118 of the mixing block body 114. The compressive securing of the first sealing member 314 between the first end face 118 of the mixing block body 114 and the first end plate recess surface 340, in turn, fluidly couples the dead-end port 134 of the mixing block body 114 to the plug / purge fluid fitting hole 338. It is contemplated that the compressive securing is also associated with the plug 310 (e.g., Figure 5) cooperates to seal the first end face 118 of the mixing block body 114 fluidly within the first end plate recess 326, thereby limiting the outlet port 106 and the external environment 8 ( Figure 1 ) to the first inlet port 102 ( Figure 2 ) and one or more second inlet ports 104 ( Figure 2 The fluid delivery of (as shown) can purge the mixing block body 114.

[0074] like Fig. 9 As shown, according to certain examples of the present disclosure, the first end plate recess surface 340 may define a first sealing member groove 356. The first sealing member groove 356 may be configured to capture the first sealing member 314 such that the first sealing member 314 is carried by the first end plate 302 and secured to the first end plate 302 before the first end surface 118 of the mixing block body 114 is placed in the first end plate recess 326. The first sealing member groove 356 may extend around the plug / purge fluid fitting hole 338, for example, circumferentially around the plug / purge fluid fitting hole 338. In certain examples, the first sealing member groove 356 may define a necked or trapezoidal profile 358 having a base 360 ​​that is wider than an opening 362 of the necked or trapezoidal profile 358. In view of the present disclosure, one skilled in the art will appreciate that compression of the first sealing member 314 during insertion through the opening 362 and subsequent relaxation after insertion may secure the first sealing member 314 within the first sealing member groove 356. In view of this disclosure, those skilled in the art will appreciate that this can simplify the clamp device 200 ( Figure 2 ) by limiting the number of operations required to assemble the clamp device 200, reducing the time required to assemble the clamp device 200 and the costs associated with purging the mixing block body 114.

[0075] Reference Fig.10 and 11 , showing a second end plate 304. The second end plate 304 is similar to the first end plate 302 (eg Figure 5 ), and is configured to mix the mixing block 100 (as shown Figure 2) is pressed against the first end plate 302. In this regard, it is contemplated that the second end plate 304 includes a second end plate body 364. The second end plate body 364 may be formed of a second end plate material 366 and have a distal surface 368 and a proximal surface 370. In some examples, the second end plate material 366 may include a metal material (or consist of or consist essentially of it). Examples of suitable metal materials include stainless steel materials and aluminum alloy materials. According to some examples, the second end plate material 366 may include a polymer material (or consist of or consist essentially of it). Examples of suitable polymer materials include UHMW, HDPE, and polyamide materials. It is contemplated that the second end plate material 366 forming the second end plate body 364 may have a smaller thickness than the second end plate material 366 forming the hybrid block body 114 (as shown). Figure 2 The mixed block main material 116 (as shown) Figure 2 Advantageously, forming the second end plate 304 from a material having a hardness less than the hardness of the mixing block material 116 forming the mixing block body 114 can further limit the assembly of the fixture device 200 ( Figure 1 There is a risk of damaging the mixing block 100 during assembly of the fixture device 200, such as due to a misoperation caused by hitting one of the sealing surfaces of the mixing block body 114 during assembly of the fixture device 200.

[0076] It is contemplated that the distal end surface 368 of the second end plate body 364 defines a plurality of threaded member holes 372. The plurality of threaded member holes 372 may be configured to slidably receive a plurality of threaded members 306 (eg, Figure 5 More specifically, it is contemplated that the plurality of threaded member holes 372 are configured to receive male threaded segments 374 ( Fig.12 ), for example, so that the male threaded segments 374 of the plurality of threaded members 306 are partially separated from the distal end surface 368 and in contact with the first end plate 302 ( Figure 5 shown) and the mixing block body 114 ( Figure 2 In view of the present disclosure, those skilled in the art will appreciate that this allows the compression member 308 ( Figure 5 304) is threadably received on the plurality of threaded members 306 to compress the mixing block body 114 between the first end plate 302 and the second end plate 304. In this regard, it is contemplated that the plurality of threaded member holes 372 extend through the main thickness 376 of the second end plate body 364 and extend between the distal surface 368 and the proximal surface 370 of the second end plate body 364. In another aspect, the plurality of threaded member holes 372 can be distributed around a second end plate recess 378 defined in the proximal surface 370 of the second end plate 304 and configured to receive the second end surface 120 (as shown) of the mixing block body 114 therein. Figure 2In some examples, the plurality of threaded member holes 372 may be provided with a plurality of threaded member holes 372 defined in the first end plate body 318 ( Figure 6 ) in a plurality of threaded member holes 328 (shown in Figure 6 In view of the present disclosure, those skilled in the art will appreciate that this can make the second end plate 304 and the first end plate 302 ( Figure 3 ) are interchangeable, thereby simplifying the clamp device 200 ( Figure 1 Assembling as shown).

[0077] The second end plate recess 378 may be configured to receive the mixing block body 114 ( Figure 2 The second end surface 120 (shown) Figure 2 ), and a purge fluid such as a first purge fluid 210 ( Figure 1 ) and / or the second purge fluid 212 ( Figure 1 310 (shown) to the mixing block body 114. In this regard, it is contemplated that the second end plate recess 378 substantially matches the second end face 120 of the mixing block body 114 in size and shape. In another aspect, it is also contemplated that the second end plate recess 378 defines a plug / purge fluid fitting hole 380. The plug / purge fluid fitting hole 380 can extend between the distal end surface 368 of the second end plate body 364 and a second end plate recess surface 382 that defines the second end plate recess 378. It is contemplated that the plug / purge fluid fitting hole 380 can be configured to receive the plug 310 ( Figure 5 shown) and purge fluid fitting 312 ( Figure 5 ) is disposed therein, so that the clamp 300 can be configured to purge fluid through the dead-end port 134 ( Figure 2 shown) and outlet port 106 ( Figure 2 In some examples, the second end plate recess 378 can be shaped, sized, and along the compression axis 144 ( Figure 5 One or more aspects of the axial depth of the first end plate recess 326 ( Figure 6 304 and 302). According to some examples, the second end plate recess 378 can be wider than the first end plate recess 326. In view of this disclosure, those skilled in the art will appreciate that sizing the second end plate recess 378 to match one of the first end face 118 and the second end face 120 of the mixing block body 114 can limit the tendency of the mixing block body 114 to move, such as to tilt the mixing channel 108 relative to the compression axis 144, during compression of the mixing block body 114 between the second end plate 304 and the first end plate 302.

[0078] In some examples, the plug / purge fluid fitting bore 338 may define a female threaded section 384 therein. The female threaded section 384 may correspond to the plug 310 ( Figure 5 The male threaded section 348 (shown) Fig.14 shown) and purge fluid fitting 312 ( Figure 5 The male thread section 350 (shown) Fig.15 The female thread segment 384 may also at least partially span a smaller thickness 386 of the second end plate body 364, which is defined between the second end plate recess surface 382 and the distal surface 368 of the second end plate body 364. In some examples, the female thread segment 384 defined by the plug / purge fluid fitting hole 380 may only partially extend through the smaller thickness 386 of the second end plate body 364. In this regard, it is contemplated that the female thread segment 384 terminates at an axial position intermediate the distal surface 368 of the second end plate body 364 and the second end plate recess surface 382 of the second end plate body 364. Advantageously, terminating the female thread segment 384 at a position intermediate the distal surface 368 and the second end plate recess surface 382 can further limit the assembly fixture device 200 ( Figure 1 The mixing block 100 is damaged during Figure 1 ) by limiting (or eliminating) the risk of embolism 310 ( Figure 3 shown) or purge fluid fitting 312 ( Figure 3 The second end surface 120 (shown) of the mixing block 100 is in contact with the mixing block 100. Figure 3 ), such as in the case where the plug 310 or the purge fluid fitting 312 is over-tightened or advanced in a direction toward the second end face 120 sufficiently to contact a sealing surface defined on the mixing block body 114.

[0079] Continue to refer Figure 8 and Fig. 9 , further showing the second sealing member 316. Figure 8 As shown, the major thickness 376 and the minor thickness 386 of the second end plate body 364 can be sized such that when the clamp device 200 ( Figure 1 106, the second end plate 304 can be slidably received on the plurality of threaded members 306 ( Figure 5 ), and a plurality of compression members 308 ( Figure 5 As shown) thereafter, the male threaded section 374 of the threaded member 306 is threadedly installed (at Fig.12 382) and advances so that the second sealing member 316 is compressed between the second end plate recess surface 382 and the second end face 120 of the mixing block body 114. In view of this disclosure, those skilled in the art will appreciate that the loose registration of the second sealing member 316 can simplify the assembly of the clamp device 200, such as by avoiding the need for clamps or adhesives to secure the second sealing member 316 to the second end plate recess surface 382, ​​enabling a single assembler to assemble the clamp device 200.

[0080] like Fig. 9 As shown, the second end plate recess surface 382 may alternatively define a second sealing member groove 388. The second sealing member groove 388 may be similar to the first sealing member groove 356 and is further configured to capture the second sealing member 316 in the second end plate recess 378. As described above, capturing the second sealing member 316 within the second end plate recess surface 382 may also simplify the clamping device 200 (e.g., by further limiting the number of operations required to assemble the clamping device 200). Figure 1 Assembling as shown).

[0081] refer to Fig.14 , a threaded member 306 is shown. The threaded member 306 is configured to connect the mixing block 100 ( Figure 1 shown) is compressed and fixed in the clamp 300 ( Figure 1 The first end plate 302 (shown) Figure 5 as shown) and the second end plate 304 ( Figure 5 390 ) and in this regard is formed of a threaded member material 390 having a head 392 and longitudinally opposed ends 394, and defining a male threaded section 374 intermediate the head 392 and the end 394, the end 394 being a blunt end. The head 392 can be rounded or faceted, and can be configured to receive a tool thereon to facilitate assembly of the threaded member 306 into the fixture 300. In some examples, the threaded member material 390 can include a metallic material (e.g., consisting of or consisting essentially of it). Examples of suitable metallic materials include stainless steel materials, such as 316L stainless steel. According to some examples, the threaded member material 390 can include a polymeric material (or consisting of or consisting essentially of it). Examples of suitable polymeric materials include UHMW, HDPE, and polyamide materials, such as nylon.

[0082] In some examples, the threaded member material 390 may have a thickness less than that of the hybrid block body 114 ( Figure 4 The mixed block main material 116 (shown) Figure 4For example, the mixing block 100 may be formed of 316 stainless steel or Hastelloy, and the threaded member material 390 may have a hardness less than 316 stainless steel or Hastelloy. Advantageously, forming the plurality of threaded members 306 from a material softer than the material forming the mixing block body 114 may limit the number of threaded members 306 that are formed during assembly of the fixture 200 ( Figure 1 There is a risk of damaging the sealing surfaces defined on the mixing block body, such as the first side 122 ( Figure 2 shown) and / or one or more second sides 124 ( Figure 2 shown).

[0083] The male threaded section 374 of the threaded member 306 is configured to threadably receive the compression member 308 thereon and in this regard extends from the end 394 toward the head 392. The male threaded section 374 can also be at least partially extended from the second end plate 304 ( Figure 5 The distal end surface 368 (shown) Fig.10 ) protrudes to threadably receive the compression member 308 ( Figure 5 ), for mixing the mixing block body 114 ( Figure 2 shown) is compressed and fixed on the first end plate 302 ( Figure 5 as shown) and the second end plate 304 ( Figure 5 In some examples, the male threaded segment 374 can extend continuously and uninterruptedly from the end 394 of the threaded member 306 to the head 392 of the threaded member 306. According to some examples, the male threaded segment 374 of the threaded member 306 can be separated from the head 392 of the threaded member 306 by an unthreaded segment 398, such as an unthreaded segment 398 that defines a substantially circular cross-sectional area. In view of the present disclosure, those skilled in the art will appreciate that examples including the unthreaded segment 398 can be limited to the assembly fixture device 200 ( Figure 1 ) during the mixing block body 114, such as the first side 122 ( Figure 2 shown) and / or one or more second sides 124 ( Figure 2 shown).

[0084] In some examples, the threaded member 306 may have a polygonal section 301. The polygonal section 301 may separate the head 392 from the male threaded section 374 of the threaded member 306 and be close to the head 392 of the threaded member 306. In such an example, the polygonal section 301 may conform to the threaded member hole 328 ( Figure 6 In this example, the threaded member 306 is received in the threaded member hole 328 so that the threaded member 306 is relatively close to the first end plate 302 ( Figure 3Advantageously, the threaded member 306 can be rotationally fixed relative to the first end plate 302 to simplify the clamping device 200 ( Figure 1 ), for example by enabling the threaded member 306 to be assembled in the first end plate 302 without the use of tools or fasteners.

[0085] refer to Fig.13 , a compression member 308 is shown. The compression member 308 is configured to be coupled to the threaded member 306 ( Figure 5 As shown) cooperate with the second end plate 304 ( Figure 5 shown) is pushed toward the first end plate 302 ( Figure 5 As shown), the mixing block body 114 ( Figure 2 306 (shown) is compressed between the first end plate 302 and the second end plate 304. In this regard, it is contemplated that the compression member 308 includes a compression member body 303 formed by a compression member body material 305 and defining a compression member hole 307. It is contemplated that the compression member hole 307 extends longitudinally between a first end face 309 and a longitudinally opposite second end face 311 of the compression member body 303. It is also contemplated that the compression member hole 307 defines a female threaded section 313 therein. The female threaded section 313 can extend longitudinally between the first end face 309 and the second end face 311 of the compression member body 303. The female threaded section 313 can also include a female thread that corresponds to the female thread defined in the threaded member 306 ( Figure 5 The male threaded section 374 (shown) Fig.12 The female threaded section 313 thereby secures the compression member 308 to the threaded member 306 on the side of the second end plate 304 opposite the mixing block body 114.

[0086] In some examples, the compression member body material 305 may include a metallic material, such as stainless steel. It is also contemplated that the compression member body material 305 may include a polymeric material. Examples of suitable polymeric materials include UHMW, HDPE, and polyamide materials. According to some examples, the compression member body 303 may have one or more lugs 315 configured to enable an assembler to assemble the mixing block body 114 ( Figure 2 shown) is compressed and fixed on the first end plate 302 ( Figure 5 as shown) and the second end plate 304 ( Figure 5 In such an example, one or more lugs 315 can protrude laterally from the compression member body 303, such as protruding laterally (at least partially) at a longitudinal position between the first end face 309 and the second end face 311 of the compression member body 303. In view of this disclosure, those skilled in the art will appreciate that assembling the compression member 308 to the threaded member 306 (such as FIG. 10 ) without the use of tools Figure 5The fixture device 200 (as shown) can be simplified Figure 1 Assembling as shown).

[0087] refer to Fig.14 , showing a plug 310. The plug 310 is configured to be threadedly received in the first end plate 302 ( Figure 5 ) defined by the plug / purge fluid fitting hole 338 ( Figure 6 shown) and by the second end plate 304 ( Figure 5 ) defined by the plug / purge fluid fitting hole 380 ( Fig.10 As shown) in order to place the first end plate recess 326 ( Figure 6 shown) or the second end plate recess 378 ( Fig.10 shown) and external environment 8( Figure 5 ) as shown, and in this regard includes an embolism body 317. The embolism body 317 is formed of an embolism body material 319 and has an embolism body head 321, an embolism body rod 323 and an embolism body face 325. The embolism body material 319 may include a metallic material, such as stainless steel, or a polymeric material, such as UHMW, HDPE and polyamide materials. The embolism body head 321 and the embolism body face 325 are located at opposite longitudinal ends of the embolism body 317 and are separated from each other by the embolism body rod 323. It is contemplated that the embolism body rod 323 includes a male threaded section 327. The male threaded section 327 may define a male thread that corresponds to a female threaded section 332 (defined in the embolism / purge fluid fitting hole 338) Figure 7 ) and a female threaded section 384 (shown) defined within the plug / purge fluid fitting hole 380 of the second end plate 304 Fig.11 shown).

[0088] In some examples, the plug 310 can be configured to be sealingly disposed within a portion of the first end plate 302 ( Figure 5 Plug / purge fluid fitting hole 338 (shown) Figure 6 ) and extending through the second end plate 304 ( Figure 5 Plug / purge fluid fitting hole 380 (shown) Fig.10 As shown), the fixture device 200 ( Figure 1 In view of this disclosure, one skilled in the art will appreciate that, with respect to sealingly seating the plug 310, the plug / purge fluid assembly hole 338 extending through the first end plate 302 enables the gaseous purge fluid to flow through the mixing block body 114 ( Figure 2 ), wherein the purge fluid passes through the dead-end port 134 ( Figure 4 ) into the mixing block body 114 and from the first inlet port 102 ( Figure 4 ) and one or more second inlet ports 104 ( Figure 4 In view of this disclosure, one skilled in the art will also appreciate that the plug 310 will be sealingly seated within the plug / purge fluid assembly hole 380 of the first end plate 302 to allow liquid purge fluid to flow through the mixing block body 114 in a reverse flow direction, wherein the purge fluid passes through the outlet port 106 ( Figure 4 ) into the mixing block body 114, and also from the first inlet port 102 ( Figure 4 ) and one or more second inlet ports 104 ( Figure 4 Advantageously, the source channel is disposed at the first end face 118 ( Figure 4 In an example where the mixing channel 108 is joined at an acute angle near the first source channel 110 (shown in FIG. 1 ), the introduction of the gaseous purge fluid can improve the purge of the gaseous purge fluid from the first source channel 110 ( Figure 4 ) and one or more second source channels 112 ( Figure 4 ) to remove debris, and in the example where the source channel joins the mixing channel 108 at an acute angle near the first end surface 118 of the mixing block body 114, the outlet port 106 ( Figure 4 Introducing the liquid purge fluid into the mixing block body 114 (as shown) can provide a relatively uniform distribution of the liquid purge fluid.

[0089] In some examples, the plug body rod 323 may have a smaller diameter than the first end plate 302 ( Figure 5 The smaller thickness 344 (shown) Figure 7 as shown) and the second end plate 304 ( Figure 5 The smaller thickness 386 (shown) Fig.11 Advantageously, this can limit the length of the mixing block body 114 ( Figure 1 ), such as the first end face 118 ( Figure 2 as shown) and the second end surface 120 ( Figure 2 310 to the point where the plug body head 321 extends into the first end plate recess 326 (shown in FIG. 310 ) of the first end plate 302. Figure 7 ) or the second end plate recess 378 (shown in FIG. 1 ) of the second end plate 304 Fig.11 ), limiting (or eliminating) the degree to which the plug 310 is assembled to the clamp device 200 ( Figure 1 310 during the mixing process (as shown), while maintaining the advantageous reversibility described above.

[0090] refer to Fig.15, a purge fluid fitting 312 is shown. The purge fluid fitting 312 includes a purge fluid fitting body 329 formed of a purge fluid fitting material 331 and having an inlet 333 and an outlet 335. The inlet 333 is configured to receive a purge fluid from a purge source, such as when coupled to the first purge fluid source 202 ( Figure 1 The first purge fluid 210 (shown) Figure 1 shown) and when connected to the second purge fluid source 204 ( Figure 1 The second purge fluid 212 (shown) Figure 1 335 through a purge fluid introduction channel 337. The purge fluid introduction channel 337 connects the inlet 333 of the purge fluid fitting body 329 to the outlet 335 of the purge fluid fitting body 329 and is configured to introduce the purge fluid into the fixture 300 ( Figure 1 ), for example, introduced into the first end plate 302 ( Figure 5 as shown) and the second end plate 304 ( Figure 5 ) and enters the mixing block body 114 ( Figure 2 shown).

[0091] The purge fluid fitting body 329 may have one or more of a stem segment 339, a flange 341, and a root segment 343. The root segment 343 may extend from the outlet 335 of the purge fluid fitting body 329 toward the flange 341 and define a male thread segment 350. It is contemplated that the male threads of the male thread segment 350 of the purge fluid fitting body 329 may correspond to the male threads defined on the first end plate 302 ( Figure 5 shown) and / or the second end plate 304 ( Figure 5 For example, the male thread of the male threaded section 350 may correspond to the female thread defined in the first end plate 302 ( Figure 5 Plug / purge fluid fitting hole 338 (shown) Figure 6 The female threaded section 332 (shown) Figure 7 The male thread of the male thread section 345 may correspond to the female thread defined in the second end plate 304 ( Figure 5 Plug / purge fluid fitting hole 380 (shown) Fig.11 It is also contemplated that the male threads of the male threaded segment 345 may correspond to the female threads of the female threaded segment 332 defined in the first end plate 302 and the female threaded segment 384 defined in the second end plate 304. Advantageously, the above correspondence of the male threaded segment 345 with the female threaded segment 332 and the female threaded segment 384 enables the purge fluid fitting 312 to be connected to the plug 310 ( Figure 5 As shown) interchangeably, so that it is possible to Figure 2 shown) and the second end surface 120 ( Figure 2 ) to purge the mixing block body 114, suitably using a purge fluid.

[0092] The flange 341 of the purge fluid fitting body 329 is configured to be used to place the purge fluid fitting 312 on the first end plate 302 ( Figure 5 as shown) and the second end plate 304 ( Figure 5 ), the flange 341 thereby enables the purge fluid fitting 312 to be placed in the first end plate 302 so that the first purge fluid 210 ( Figure 1 ) flows through the mixing block body 114 ( Figure 2 ), after which the purge fluid fitting 312 can be removed from the first end plate 302, and the purge fluid fitting 312 can then be placed in the second end plate 304 to allow the second purge fluid 212 ( Figure 1 341 flows through the mixing block body 114. In this regard, the flange 341 can be intermediate (e.g., between) the root segment 343 and the stem segment 339 of the purge fluid fitting body 329 and extend circumferentially around the purge fluid introduction passage 337. In some examples, the flange 341 can be a polygonal shape that defines a plurality of facets distributed circumferentially around the purge fluid introduction passage 337, and the flange 341 facilitates assembly of the clamp device 200 ( Figure 1 According to some examples, flange 341 can define one or more lugs that protrude laterally from purge fluid fitting body 329. In such examples, flange 341 facilitates placement of purge fluid fitting 312 on first end plate 302 or second end plate 304 without the use of hand tools, simplifying assembly of clamp device 200.

[0093] The stem section 339 of the purge fluid fitting body 329 is configured to seat the first purge fluid conduit 206 ( Figure 1 ) and a second purge fluid conduit 208 ( Figure 1 In this regard, the stem segment 339 can extend between the flange 341 and the inlet 333 of the purge fluid fitting body 329. In some examples, the stem segment 339 can define a quick connect / disconnect feature 351. In view of this disclosure, those skilled in the art will appreciate that such examples can simplify the mixing block body 114 ( Figure 2 ) is manufactured, for example by being able to be in the first purge fluid source 202 ( Figure 1 ) and a second purge fluid source 204 ( Figure 1 ), such as in a method of purging (e.g., blowing out) the mixing block body 114 and then purging with a liquid purge fluid to remove additional debris and / or evaluate the first source channel 110 ( Figure 2) and one or more second source channels 112 ( Figure 2 The relative flow resistance within the vessel is shown in FIG.

[0094] In some examples, the purge fluid fitting material 331 may include a metallic material, such as 316 stainless steel or Hastelloy. According to some examples, the purge fluid fitting material 331 may include a polymeric material, such as UHMW, HDPE, or a polyamide material, such as nylon. It is also contemplated that the first end plate 302 and the second end plate 304 are configured to pass the purge fluid fitting 312 into the fixture device 200 ( Figure 1 In an example where the advancement of the purge fluid accessory material 331 is limited to a position where the inlet 333 is located intermediate the recessed surface and the distal surface of the end plate, the purge fluid accessory material 331 may have a greater thickness than the mixing block material 116 ( Figure 2 The greater hardness of the ...

[0095] refer to Figure 1-18 , showing the manufacture of a mixing block, such as mixing block 100 ( Figure 1 As shown in FIG. Fig.16 As shown, method 400 includes compressively securing a mixing block body of a mixing block, such as mixing block body 114 ( Figure 2 As shown) at the first end plate 302 ( Figure 3 as shown) and the second end plate 304 ( Figure 3 ), as shown in block 402. The method 400 also includes placing a purge fluid fitting in one of the first end plate and the second end plate, and placing a plug in the other of the first end plate and the second end plate, such as the purge fluid fitting 312 ( Figure 3 ) and embolization 310 ( Figure 3 ), as shown in block 404. The method 400 also includes defining a first end plate recess in the first end plate and defining a second end plate recess in the second end plate, such as the first end plate recess 326 ( Figure 6 shown) and the second end plate recess 378 ( Fig.10 ) to introduce the purge fluid into the mixing block body, as shown in block 406. It is contemplated that a portion of the purge fluid is accumulated in the other of the first recess and the second recess, as shown in block 408. It is also contemplated that the purge fluid is transferred from a mixing channel that couples the plug fluid to the purge fluid fitting to the first inlet port and the second inlet port, such as from mixing channel 108 ( Figure 2shown) to the first inlet port 102 ( Figure 2 shown) and a second inlet port 104 ( Figure 2 As shown in FIG. 4 , the purge fluid flows in the reverse direction through the mixing block body, as shown in block 410. It is contemplated that the purge fluid introduced into the mixing block body flows out from the first inlet port and the second outlet port to an external environment defining the mixing block body, such as the external environment 8 ( Figure 2 As shown), as shown in box 412.

[0096] like Fig.17 As shown, compressively securing 402 the mixing block body in the fixture may include securing a threaded member within a first end plate, such as first end plate 302 (eg, Figure 5 ), as shown in block 414. Compressively securing 402 the mixing block in the fixture may also include positioning a first end surface of the mixing block body in a first end surface recess of the first end plate, such as first end surface 118 (such as Figure 2 ), as shown in block 416. Compressively securing 402 the mixing block in the fixture may also include aligning the second end plate to a second end surface of the mixing block body, such as the second end surface 120 of the mixing block body (such as Figure 2 As shown in block 418. With such alignment, the threaded member is slidably received in the second end plate, the second end plate recess faces the second end face of the mixing block body, so that the second end face of the mixing block body is received in the second end plate recess of the second end plate, and the male threaded section of the threaded member protrudes from the second end plate in a direction opposite to the second end plate recess, such as male threaded section 374 (as shown in block 419). Fig.12 ), as shown in block 420. It is contemplated that the compression member is disposed on a side of the second end plate opposite the first end plate and threadedly seated on the male threaded section of the threaded member, as shown in block 422, and that the compression member and the first end plate cooperate to apply a tensile load on the threaded member, as shown in block 424.

[0097] like Fig.18 As shown, method 400 may also include causing the purge fluid to flow in reverse through the mixing channel of the mixing block body while maintaining the purge fluid flowing in reverse through the first source channel and the second channel of the mixing block body, such as the first source channel 110 (eg, Figure 2 shown) and the second source channel 112 ( Figure 2426. In this regard, the purge fluid fitting may be removed from the first end plate and the plug may be removed from the second end plate, as shown in blocks 428 and 430. The purge fluid fitting may be disposed in the second end plate, the plug disposed in the first end plate, the purge fluid fitting thereby being fluidly coupled to the mixing channel through the second end plate recess, and the plug passing through the mixing channel via the first end plate recess of the first end plate, as shown in blocks 432 and 434. The purge fluid may then be introduced into the mixing channel of the mixing block body, for example, through the second end face of the mixing block body, via the purge fluid fitting and the second end plate recess, as shown in block 436. It is contemplated that a portion of the purge fluid may be accumulated within the mixing block body between the plug and the first end plate recess using a plug, such that the purge fluid flows in reverse through the mixing block via the first source channel and the second source channel, as shown in blocks 438 and 440, and the purge fluid flows out of the mixing block body (e.g., simultaneously) from the first inlet port and the second inlet port and into an external environment defining the mixing block body, as shown in block 442.

[0098] Continue to refer to Fig.16 , a liquid purge fluid, such as the second purge fluid 212 ( Figure 1 444). In such an example, when the first inlet port and the second inlet port are located above the junction relative to gravity, a portion of the liquid purge fluid may be accumulated in the fixture device between the plug and the junction, also as shown in box 444. Advantageously, this enables the surface conditions within the first source channel and the second source channel to be evaluated in a relative manner based on the arc (and lateral distance) of the liquid purge fluid from the first inlet port and the second inlet port, thereby limiting the risk of the refurbished mixing block escaping the refurbishment process, wherein the adhering material is not completely removed from one of the first source channel and the second source channel relative to the other of the first source channel and the second source channel. In some examples, the fixture device may also include an oil pan arranged below the first end plate relative to gravity, and a comparative distance is emitted relative to the lip of the oil pan to evaluate the efficiency of a previous operation to remove debris and chips (and deburr) from the first source channel and the second source channel, such as during cleaning after manufacturing a newly constructed mixing block, as further shown in box 444. Advantageously, the distance traveled by the liquid purge fluid may further provide an indication of which of the first source channel and the second source channel requires rework, limiting the amount of rework required when a cleaning process employed in a newly constructed mixing block is unsuccessful.

[0099] It is also contemplated that a gaseous purge fluid, such as the first purge fluid 212 (eg, Figure 1446). In such an example, a portion of the gaseous purge fluid may be accumulated in the fixture between the plug and the junction, with the first inlet port and the second inlet port being lower than the junction relative to gravity, also as shown in block 446. Advantageously, this enables the pressure of the gaseous purge fluid to be used to force debris such as chips and shavings to remain within the first source channel and / or the second source channel, thereby increasing the efficiency of the removal operation for removing such material in the newly constructed mixing block.

[0100] Although the present disclosure has been provided in the context of certain embodiments and examples, it will be understood by those skilled in the art that the present disclosure extends to other alternative embodiments and / or uses of embodiments beyond the specifically described embodiments and obvious modifications and equivalents thereof. In addition, although various variations of the embodiments of the present disclosure have been shown and described in detail, other modifications within the scope of the present disclosure will be apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or sub-combinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that the various features and aspects of the disclosed embodiments may be combined or replaced with one another to form different modes of embodiments of the present disclosure. Therefore, the scope of the present disclosure should not be limited by the specific embodiments described above.

[0101] The headings provided herein, if any, are for convenience only and do not necessarily affect the scope or meaning of the apparatus and methods disclosed herein.

Claims

1. A clamp, comprising: a first end plate having a first end plate recess; a threaded member fixed in the first end plate and extending in a direction opposite to the recessed portion of the first end plate; a second end plate having a second end plate recess, which is slidably received on the threaded member, the second end plate recess facing the first end plate recess; and A compression member is disposed on a side of the second end plate opposite the first end plate and threadedly seated on the male threaded section of the threaded member to reversely flow the purge fluid through the mixing block compressively fixed between the first and second end plates.

2. The clamp according to claim 1, wherein: The first end plate is formed of a polymeric material, wherein the second end plate is formed of a polymeric material.

3. The clamp according to claim 1, wherein: The threaded member is formed of a polymeric material, and wherein the compression member is formed of a metallic material.

4. The clamp according to claim 1, further comprising: a first sealing member disposed in the first end plate recess; a second sealing member disposed in the second end plate recess; wherein a first sealing member fluidly couples the first end plate to a second sealing member; and Wherein a second sealing member fluidly couples the second end plate to the first sealing member.

5. The clamp according to claim 4, wherein: The first sealing member is loosely fitted in a first end plate recess defined by the first end plate, and wherein the second sealing member is loosely fitted in a second end plate recess of the second end plate.

6. The clamp according to claim 4, wherein: The first sealing member is captured within a first end plate recess surface of the first end plate, and wherein the second sealing member is captured in a second end plate recess surface of the second end plate.

7. The clamp according to claim 1, further comprising: a purge fluid fitting disposed in the first end plate and fluidly coupled to the second end plate recess through the first end plate; and A first purge fluid source including a first purge fluid is coupled to the purge fluid fitting and fluidly coupled therethrough to the second end plate recess.

8. The clamp according to claim 7, wherein: The first purge fluid is a gaseous purge fluid.

9. The clamp according to claim 7, wherein: The first purge fluid includes oil-free air or clean dry air.

10. The clamp of claim 7, further comprising a plug disposed in the second end plate and fluidly isolating the second end plate recess from an external environment outside the clamp.

11. The clamp according to claim 1, further comprising: a purge fluid fitting disposed in the second end plate and fluidly coupled to the first end plate recess through the second end plate; as well as A second purge fluid source including a second purge fluid is coupled to the purge fluid fitting and fluidly coupled therethrough to the first end plate recess.

12. The clamp according to claim 11, wherein: The first purge fluid is a liquid purge fluid.

13. The clamp according to claim 11, wherein: The second purge fluid includes ultrapure water or deionized water.

14. A clamp device comprising: The clamp as claimed in claim 1; A mixing block comprising a mixing block body compressively secured between a first end plate and a second end plate, the mixing block body having: a first end surface having a dead-end port received in a first recess of the first end plate; a second end surface having an outlet port longitudinally opposed to the first end surface, the outlet port being received in a second recess of the second end plate, the outlet port being fluidly coupled to a dead-end port defined by the first end surface via a mixing passage extending through the mixing block body; a first side surface having a first inlet port separating the second end surface from the first end surface, the first inlet port being fluidly coupled to the mixing channel at a junction; and a second side surface having a second inlet port separating the second end surface from the first end surface, the second inlet port being fluidly coupled to the mixing channel at a junction; a purge fluid fitting disposed in one of the first end plate and the second end plate to deliver a purge fluid to the mixing passage; as well as A plug is disposed in the other of the first end plate and the second end plate to force the purge fluid through the first inlet port and the second inlet port of the mixing block body.

15. The clamp device according to claim 14, further comprising: a first purge fluid source comprising a gaseous purge fluid coupled to the purge fluid fitting; a first sealing member disposed within the first recess and fluidly coupling a first purge fluid source to a dead-end port of the mixing block body; and Wherein, the first inlet port and the second inlet port fluidly couple a first purge fluid source to an external environment defining a mixing block body through a dead-end port.

16. The clamp device according to claim 14, further comprising: a second purge fluid source comprising a liquid purge fluid coupled to the purge fluid fitting; a second sealing member disposed within the second recess and fluidly coupling a second purge fluid source to an outlet port of the mixing block body; and Wherein, the first inlet port and the second inlet port fluidly couple a second purge fluid source to an external environment defining a mixing block body through the dead end port.

17. The clamp device according to claim 14, wherein: The purge fluid fitting is disposed in the first end plate, wherein the first end surface of the mixing block body is received in the first end plate recess, and wherein the first end plate recess separates the purge fluid fitting from the first end surface of the mixing block body.

18. The clamp device according to claim 14, wherein: The purge fluid fitting is disposed in the second end plate, wherein the second end surface of the mixing block body is received in the second end plate recess, and wherein the second end plate recess separates the purge fluid fitting from the second end surface of the mixing block body.

19. The clamp device according to claim 14, wherein: The mixing block is formed of a mixing block material having a hardness, wherein the first end plate is formed of a first end plate material having a hardness less than the hardness of the mixing block material, wherein the second end plate is formed of a second end plate material having a hardness less than the hardness of the mixing block material, and wherein the threaded member is formed of a threaded member material having a hardness less than the hardness of the mixing block material.

20. A method for making a mixing block, comprising: at a mixing block, the mixing block comprising a mixing block body having a first end face having a dead end port, a second end face having an outlet port, a first side face having a first inlet port, and a second side face having a second inlet port, the first inlet port and the second inlet port being fluidly coupled to the outlet port via a mixing channel extending between the dead end port and the outlet port; The mixing block body is compressively secured in a fixture between a first end plate having a first end plate recess and a second end plate having a second recess by: securing the threaded member in the first end plate such that the threaded member extends in a direction opposite to the recessed portion of the first end plate; slidably receiving the threaded member in the second end plate so that the second end plate recess faces the first end plate recess; disposing a compression member on a side of the second end plate opposite the first end plate, and threadingly seating the compression member on the threaded member; disposing a purge fluid fitting in one of the first end plate and the second end plate, and disposing a plug in the other of the first end plate and the second end plate; introducing a purge fluid into the mixing passage through the purge fluid fitting and one of the first recess and the second recess, the plug member accumulating a portion of the purge fluid in one of the first end plate recess and the second end plate recess; reversely flowing the purge fluid through the mixing block body by delivering the purge fluid from the mixing channel to the first inlet port and the second inlet port from a junction defined along the mixing channel, the junction being coupled to the first inlet port through the first source channel and to the second inlet port through the second source channel; as well as A purge fluid is flowed from the first inlet port and the second inlet port into an environment defining a mixing block body.

21. The method according to claim 20, wherein: The purge fluid is a gaseous purge fluid, and one of the first end plate and the second end plate is a first end plate of the fixture, the method further comprising: removing the plug from the second end plate and removing the purge fluid fitting from the first end plate; securing the plug in the first end plate and securing the purge fluid fitting in the second end plate; introducing a liquid purge fluid into the mixing passage through the purge fluid fitting and the second end plate recess, the plug member accumulating a portion of the liquid purge fluid in the first end plate recess; reversely flowing the liquid purge fluid through the mixing block body by delivering the liquid purge fluid from the mixing channel to the first inlet port and the second inlet port from a junction defined along the mixing channel; and A liquid purge fluid is flowed from the first inlet port and the second inlet port into an environment defining a mixing block body.

22. A hybrid block made using the method of claim 20.

23. A semiconductor processing system comprising: a first source of treatment fluid and a second source of treatment fluid; A mixing block manufactured using the method of claim 20, wherein a first source of treatment fluid is connected to a first inlet port of the mixing block body, wherein a second source of treatment fluid is connected to a second inlet port of the mixing block body; a chamber means coupled to the outlet port of the mixing block body and through it to a first source of process fluid and a second source of process fluid; a substrate support and a distribution plate disposed within the chamber arrangement, The distribution plate fluidly couples the substrate support to the mixing block body to deposit a material layer onto and / or remove material from the substrate using a first process fluid from a first process fluid source and a second process fluid from a second process fluid source mixed within the mixing block body.

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