Five-axis space precision measuring jig

By designing a special shape of five-axis spatial accuracy measurement tool, combined with the photoelectric measurement module, the complex and time-consuming problem of the five-axis tool machine accuracy measurement is solved, and fast and accurate measurement and compensation are achieved, improving measurement efficiency and reducing costs.

CN119772656APending Publication Date: 2025-04-08IND TECH RES INST
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Patent Information

Application Number
CN202311413501.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-10-05
Filing Date
2023-10-27
Publication Date
2025-04-08

AI Technical Summary

Technical Problem

The accuracy measurement methods of existing five-axis tool machines are complex and time-consuming. The traditional method requires a variety of expensive equipment and takes measurements for a long time, and there are artificial deviations.

Method used

A five-axis spatial accuracy measurement fixture is designed, using special-shaped main body and sphere mounting holes, combined with the photoelectric measurement module to achieve rapid accuracy measurement and compensation of the five-axis tool machine.

Benefits of technology

The fixture can quickly and accurately measure the accuracy of the five-axis tool machine, simplify the process, reduce human error, improve measurement efficiency, and reduce the cost of laser equipment.

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Abstract

The invention discloses a five-axis spatial precision measuring jig, which comprises a main body, a plurality of mounting holes for mounting a first ball body and a plurality of second ball bodies, the main body is provided with a first surface, a second surface, a third surface and an inclined surface; the first face and the second face are parallel to each other and located on the two opposite sides of the third face respectively, the inclined face is arranged between the first face and the second face relative to the third face, and the included angle between the inclined face and the third face is 45 degrees; the first balls are arranged in multiple rows and multiple columns at equal intervals on the first face, the arrangement direction of the first balls in each row is parallel to the third face, the arrangement direction of the first balls in each column is perpendicular to the third face, and the first balls protrude out of the first face in the direction parallel to the first direction; the second balls are arranged on the inclined face at equal intervals and protrude out of the inclined face in the direction parallel to the second direction, and the second direction is perpendicular to the third face and the first direction.
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Description

Technical Field

[0001] The present invention relates to the field of machining technology, and in particular to a five-axis spatial precision measuring jig capable of quickly performing precision measurement and compensation technology for a five-axis machine tool. Background Art

[0002] As the global energy transition and the aerospace industry drive the demand for five-axis high-precision machining, countries have invested in the development of five-axis machining equipment in order to save manpower and improve surface machining accuracy. This enables the workpiece to complete complex cutting processes under one-time clamping, and interpolation through spatial geometric calculations to improve high-precision and high-quality machining of turbine blades, artificial joints, etc., to achieve optimal flow efficiency and joint fit.

[0003] In addition, the development trend of environmental protection issues such as green energy and energy conservation has driven the technological development of five-axis machining centers to meet the market needs of industries such as aerospace, energy, medical care, and transportation, and to provide solutions to reduce labor requirements, improve machining accuracy, and increase production efficiency, making them more competitive in the increasingly fierce international machining market.

[0004] However, with the evolution of the times and the advancement of technology, consumers and manufacturers have increasingly stringent requirements for the quality and precision of the products they produce. Machine tools have gradually developed from traditional three-axis machining centers to high-end machine tools with five-axis simultaneous motion. How to improve the product precision of high-end machine tools and how to quickly perform precision measurement and compensation technology for machine tools are currently a problem faced by manufacturers in the processing field.

[0005] In addition, the traditional five-axis precision measurement method requires the integration of expensive equipment such as laser interferometers, pointer scales, and large straight and square gauges and circular testers to measure 21 errors in the linear axis and 22 errors in the two rotational axes, a total of 43 error items. The entire measurement and precision adjustment is not only complicated but also takes several days to complete.

[0006] Furthermore, human error in measurement due to different operating habits of each person is inevitable.

[0007] Therefore, how to develop a "five-axis spatial precision measurement fixture" that can quickly perform precision measurement and compensation technology for five-axis machine tools is an issue that people in the relevant technical field need to solve urgently. Summary of the invention

[0008] In one embodiment, the present invention provides a five-axis spatial precision measurement fixture, which includes:

[0009] A main body, comprising a first surface, a second surface, a third surface, a fourth surface and an inclined surface, wherein the first surface and the second surface are parallel to each other and are respectively located on opposite sides of the third surface, the third surface is perpendicular to the first surface and the second surface, the fourth surface is disposed between the first surface and the second surface and adjacent to the third surface, the fourth surface is perpendicular to the first surface, the second surface and the third surface, the inclined surface is disposed between the first surface and the second surface relative to the third surface, and the angle between the inclined surface and the third surface is 45 degrees;

[0010] A plurality of first ball mounting holes are used to mount a plurality of first balls, which are arranged in a plurality of rows and columns at equal intervals on the first surface, each row and each column respectively having a plurality of first balls, the arrangement direction of the plurality of first balls in each row is parallel to the third surface, the arrangement direction of the plurality of first balls in each column is perpendicular to the third surface, each first ball protrudes from the first surface in parallel to a first direction, and the first direction is perpendicular to the first surface; and

[0011] A plurality of second ball mounting holes are used to mount a plurality of second balls, which are equidistantly arranged on the inclined plane along the inclined direction of the inclined plane. Each second ball protrudes from the inclined plane in parallel with a second direction, the second direction is perpendicular to the third surface, and the second direction is perpendicular to the first direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0013] Figure 2 for Figure 1 A schematic diagram of the three-dimensional structure of the embodiment from another angle;

[0014] Figure 3 for Figure 1 A front structural schematic diagram of an embodiment;

[0015] Figure 4 for Figure 1 A schematic diagram of the structure of the embodiment from the right side;

[0016] Figure 5 for Figure 1 A schematic diagram of an embodiment applied to measuring the verticality of an XY plane of a work surface;

[0017] Figure 6 for Figure 1 A schematic diagram of an embodiment applied to ZY plane verticality measurement of a work surface;

[0018] Figure 7 for Figure 1 A schematic diagram of an embodiment applied to ZX plane verticality measurement of a work surface;

[0019] Figure 8 and Fig. 9 for Figure 1Schematic diagram of the embodiment applied to the ZY positioning accuracy measurement of the work surface;

[0020] Fig.10 and Fig.11 for Figure 1 A schematic diagram of an embodiment applied to ZX positioning accuracy measurement of a work surface;

[0021] Fig.12 for Figure 1 A schematic diagram of measuring the positioning accuracy of an inclined plane in an embodiment;

[0022] Fig.13 for Figure 1 Schematic diagram of the embodiment applied to the pitch, roll, yaw and accuracy measurement of the XY plane of the work surface;

[0023] Fig.14 It is a schematic diagram of the three-dimensional structure of another embodiment of the present invention.

[0024] Explanation of symbols

[0025] 100,100A: Five-axis spatial precision measurement fixture

[0026] 10,10A: Main body

[0027] 11: Side 1

[0028] 12: Side 2

[0029] 13: The third side

[0030] 14: The fourth side

[0031] 15: Side 5

[0032] 16:Sixth side

[0033] 17: Incline

[0034] 171: First Platform

[0035] 172: Second Platform

[0036] 173: The third platform

[0037] 18: Flange

[0038] 181: Flange surface

[0039] 20: The First Sphere

[0040] 201: First sphere mounting hole

[0041] 30: Second Sphere

[0042] 301: Second sphere mounting hole

[0043] 40A, 40B: Diameter type ten thousand scale

[0044] 50: Photoelectric measurement module

[0045] 200: work surface

[0046] C1: First column

[0047] C2: Second column

[0048] C3: The third column

[0049] C4: The fourth column

[0050] C5: Fifth column

[0051] D1~D26: Distance

[0052] F1: First direction

[0053] F2: Second direction

[0054] L: Length

[0055] R1: First row

[0056] R2: Second row

[0057] R3: The third row

[0058] R4: The fourth row

[0059] R5: The fifth row

[0060] θ1,θ2: Angle DETAILED DESCRIPTION

[0061] See also Figures 1 to 4 As shown, the five-axis spatial precision measuring fixture 100 of the present invention comprises a main body 10 , a plurality of first spheres 20 and a plurality of second spheres 30 mounted on the main body 10 .

[0062] The main body 10 is made of a material with a low expansion coefficient, such as granite.

[0063] The first sphere 20 and the second sphere 30 are a spherical lens (probe style) that can be applied to a photoelectric sensor module for photoelectric non-contact measurement of a five-axis machine tool. The first sphere 20 and the second sphere 30 are, for example, the lens assembly 20 in Taiwan Invention Patent No. I378843; the present invention may selectively include or exclude the first sphere 20 and the second sphere 30.

[0064] See also Figures 1 to 4As shown, the main body 10 has a first surface 11 , a second surface 12 , a third surface 13 , a fourth surface 14 , a fifth surface 15 , a sixth surface 16 and an inclined surface 17 .

[0065] The first surface 11 and the second surface 12 are parallel to each other and are located on opposite sides of the third surface 13. The third surface 13 is perpendicular to the first surface 11 and the second surface 12. The first surface 11 has a plurality of first sphere mounting holes 201 for correspondingly mounting a plurality of first spheres 20, and the first sphere mounting holes 201 are, for example, screw holes.

[0066] The fourth surface 14 is disposed between the first surface 11 and the second surface 12 and is adjacent to the third surface 13. The fourth surface 14 is perpendicular to the first surface 11, the second surface 12 and the third surface 13.

[0067] The fifth surface 15 is disposed on the main body 10 relative to the third surface 13. The fifth surface 15 is parallel to the third surface 13. The periphery of the fifth surface 15 is adjacent to the inclined surface 17, the first surface 11, the second surface 12, and the fourth surface 14. The fifth surface 15 is perpendicular to the first surface 11, the second surface 12, and the fourth surface 14.

[0068] The sixth surface 16 is disposed on the main body 10 relative to the fourth surface 14. The sixth surface 16 is parallel to the fourth surface 14. The periphery of the sixth surface 15 is adjacent to the inclined surface 17, the first surface 11, the second surface 12, and the third surface 13. The sixth surface 16 is perpendicular to the first surface 11, the second surface 12, and the third surface 13.

[0069] The inclined surface 17 is disposed between the first surface 11 and the second surface 12 relative to the third surface 13. The angle θ1 between the inclined surface 17 and the third surface 13 is 45 degrees. The angle between the inclined surface 17 and the sixth surface 16 is 135 degrees. The angle θ2 between the inclined surface 17 and the fifth surface 15 is 135 degrees.

[0070] A flange 18 is disposed adjacent to the first surface 11 and the third surface 13. The flange 18 protrudes from the first surface 11. The flange 18 has a flange surface 181, which is adjacent to the first surface 11 and perpendicular to the first surface 11. The flange surface 181 extends parallel to the third surface 13 and has a length L. In this embodiment, the length L is equal to the distance D20 between the fourth surface 14 and the sixth surface 16.

[0071] See also Figure 3 to Figure 4As shown, the first spheres 20 are arranged equidistantly on the first surface 11 as a first row R1, a second row R2, a third row R3, a fourth row R4 and a fifth row R5, and a first column C1, a second column C2, a third column C3, a fourth column C4 and a fifth column C5. The center distance between any two adjacent first spheres 20 is equal, that is, the center distance between any two adjacent first sphere mounting holes 201 is equal. For example, the adjacent two first spheres 20 in the first row R1 have a distance D11, and the adjacent two first spheres 20 in the third column C3 have a distance, and the distance D11 is equal to the distance D12.

[0072] The arrangement direction of the first spheres 20 in the first row R1 to the fifth row R5 is parallel to the third surface 13. The arrangement direction of the first spheres 20 in the first column C1 to the fifth column C5 is perpendicular to the third surface 13. The axial direction of each first sphere 20 is parallel to a first direction F1 and protrudes from the first surface 11. The first direction F1 is perpendicular to the first surface 11, and the axial direction of the first sphere mounting hole 201 is the axial direction of the first sphere 20. The distance D13 between the center of each first sphere 20 and the first surface 11 is equal.

[0073] The distances D1 to D5 between the first row R1, the second row R2, the third row R3, the fourth row R4 and the fifth row R5 and the third surface 13 increase in sequence. In this embodiment, the first row R1, the second row R2 and the third row R3 each have 5 first spheres, the fourth row R4 has 4 first spheres 20, and the fifth row R5 has 3 first spheres 20. That is, the number of the first spheres 20 in the first row R1, the second row R2 and the third row R3 is equal, the number of the first spheres 20 in the fourth row R4 is less than the number of the first spheres 20 in the third row R3, and the number of the first spheres 20 in the fifth row R5 is less than the number of the first spheres 20 in the fourth row R4.

[0074] The distances D6 to D10 between the first row C1, the second row C2, the third row C3, the fourth row C4 and the fifth row C5 and the fourth surface 14 increase in sequence. In this embodiment, the first row C1, the second row C2 and the third row C3 each have five first spheres 20, the fourth row C4 has four first spheres 20, and the fifth row has three first spheres 20. That is, the number of the first spheres 30 in the first row C1, the second row C2 and the third row C3 is equal, the number of the first spheres 20 in the fourth row C4 is less than the number of the first spheres 20 in the third row C3, and the number of the first spheres 20 in the fifth row C5 is less than the number of the first spheres 20 in the fourth row C4.

[0075] See also Figure 3 to Figure 4As shown, the second sphere 30 is equidistantly arranged on the inclined surface 17 along the inclined direction of the inclined surface 17. A first platform 171, a second platform 172 and a third platform 173 are provided on the inclined surface 17 along the inclined direction. In this embodiment, the fifth surface 15 is coplanar with the first platform 171. The first platform 171, the second platform 172 and the third platform 173 are parallel to the third surface 13. The distances D14 to D16 between the first platform 171, the second platform 172 and the third platform 173 and the third surface 13 decrease in sequence. The first platform 171, the second platform 172 and the third platform 173 respectively have second sphere mounting holes 301 for mounting the second sphere 30, and the second sphere mounting holes 301 are, for example, screw holes.

[0076] The axial direction of each second sphere 30 is parallel to a second direction F2 and protrudes from the inclined surface 17 (that is, protrudes from the first platform 171, the second platform 172 or the third platform 173 on which each second sphere 30 is disposed), and the axial direction of the second sphere mounting hole 301 is the axial direction of the second sphere 30. The second direction F2 is perpendicular to the third surface 13, and the second direction F2 is perpendicular to the first direction F1.

[0077] The first platform 171 , the second platform 172 , and the third platform 173 are at the same distance D17 from the center of the second sphere 30 disposed thereon.

[0078] The center distances D18 and D19 of the projections of two adjacent second spheres 30 or second sphere mounting holes 301 on the third surface 13 are equal, and the distances D18 and D19 are equal to the center distances D11 and D12 of two adjacent first spheres 20 or first sphere mounting holes 201 .

[0079] See also Figures 1 to 4 As shown, the size of the main body 10 is not limited, and is determined by the size of the work surface of the five-axis machine tool in actual application. For example, if the work surface is a circular surface with a diameter of 600 mm, the distance D20 between the fourth surface 14 and the sixth surface 16 can be 420 mm, the distance D21 between the third surface 13 and the fifth surface 15 can be 420 mm, the distance D22 between the first surface 11 and the second surface 12 can be 80 mm, and the distances D11, D12, D18, and D19 can be 80 mm. As for the number of the first sphere 20 and the second sphere 30, the configuration can also be changed according to actual needs.

[0080] In addition, Figures 1 to 4 In the illustrated embodiment, the third surface 13, the fourth surface 14, the fifth surface 15, the sixth surface 16 and the inclined surface 17 are rectangular, and the first surface 11 and the second surface 12 are rectangular with chamfers due to the arrangement of the inclined surface 17, so that the shape of the main body 10 is generally a three-dimensional rectangular block structure. However, the shape of the main body 10 is not limited thereto, and the design can be changed according to actual needs.

[0081] See also Figures 5 to 13 As shown in the figure, it is explained that the five-axis spatial precision measuring fixture 100 provided by the present invention is applied to a work surface 200 for different types of measurements. The work surface 200 is parallel to the XY plane, and the work surface 200 is, for example, the work surface of a five-axis machining center. Figures 5 to 13 The work surface 200 is circular, and the size of the work surface 200 may be, for example, 600 mm in diameter, but is not limited thereto.

[0082] See also Figure 5 As shown, the five-axis spatial precision measuring fixture 100 is placed on the work surface 200 with the second surface 12 facing the work surface 200. The first surface 11 is parallel to the XY plane, the fourth surface 14 is parallel to the ZX plane, and the third surface 13 is parallel to the ZY plane. The diameter-type permafrost scale 40A is abutted against the flange surface 181 and moves parallel to the Y axis, and the diameter-type permafrost scale 40B is abutted against the fourth surface 14 and moves parallel to the X axis, thereby measuring the verticality of the work surface 200 in the XY plane, and then performing error analysis and compensation based on the total measurement data. The present invention does not include the diameter-type permafrost scale 40A or the diameter-type permafrost scale 40B.

[0083] See also Figure 6 As shown, the five-axis spatial precision measuring fixture 100 is placed on the work surface 200 with the third surface 13 facing the work surface 200. The first surface 11 is parallel to the ZX plane, the third surface 13 is parallel to the XY plane, and the fourth surface 14 is parallel to the ZY plane. The diameter-type multi-scale 40A is attached to the flange surface 181 and moves parallel to the X axis, and the diameter-type multi-scale 40B is attached to the fourth surface 14 and moves parallel to the Z axis, thereby measuring the verticality of the ZY plane of the work surface 200, and then performing error analysis and compensation based on the total measurement data.

[0084] See also Figure 7 As shown, the five-axis spatial precision measuring fixture 100 is placed on the work surface 200 with the third surface 13 facing the work surface 200. The first surface 11 is parallel to the ZY plane, the third surface 13 is parallel to the XY plane, and the fourth surface 14 is parallel to the ZX plane. The diameter-type multi-scale gauge 40A is attached to the flange surface 181 and moves parallel to the Y axis, and the diameter-type multi-scale gauge 40B is attached to the fourth surface 14 and moves parallel to the Z axis, thereby measuring the verticality of the ZX plane of the work surface 200, and then performing error analysis and compensation based on the total measurement data.

[0085] See also Figure 8 and Fig. 9As shown, the five-axis spatial precision measuring fixture 100 is placed on the work surface 200 with the third surface 13 facing the work surface 200. The first surface 11 is parallel to the ZY plane, the third surface 13 is parallel to the XY plane, and the fourth surface 14 is parallel to the ZX plane. Figure 8 In the figure, the straight line distance between the flange 18 and the center of the work surface 200 is D23; Fig. 9 In the figure, the straight-line distance D24 between the flange 18 and the center of the work surface 200 is greater than the distance D23. For example, the distance D23 is 150 mm and the distance D24 is 300 mm, but it is not limited thereto.

[0086] A photoelectric measurement module 50 is used to measure the first spheres 20 in the first row R1, the second row R2 and the third row R3 in parallel with the Y axis, and a photoelectric measurement module 50 is used to measure the first spheres 20 in the first column C1, the second column C2 and the third column C3 in parallel with the Y axis, and a comprehensive analysis is performed. Figure 8 and Fig. 9 The measurement results are used to measure the ZY positioning accuracy of the worktable 200, and then error analysis and compensation are performed based on the total measurement data. The above-mentioned photoelectric measurement module 50 is, for example, the sensor head 10 in Taiwan Invention Patent No. I378843; the present invention does not include the photoelectric measurement module 50.

[0087] See also Fig.10 and Fig.11 As shown, the five-axis spatial precision measuring fixture 100 is placed on the work surface 200 with the third surface 13 facing the work surface 200. The first surface 11 is parallel to the ZX plane, the third surface 13 is parallel to the XY plane, and the fourth surface 14 is parallel to the ZY plane. Fig.10 In the figure, the straight line distance between the flange 18 and the center of the work surface 200 is D25; Fig.11 In the figure, the straight-line distance D26 between the flange 18 and the center of the work surface 200 is greater than the distance D25. For example, the distance D25 is 150 mm and the distance D26 is 300 mm, but it is not limited thereto.

[0088] The photoelectric measurement module 50 is used to measure the first spheres 20 in the first row R1, the second row R2 and the third row R3 in parallel with the X axis, and the photoelectric measurement module 50 is used to measure the first spheres 20 in the first column C1, the second column C2 and the third column C3 in parallel with the Z axis, and the comprehensive analysis is performed. Fig.10 and Fig.11 The measurement results are used to measure the ZX positioning accuracy of the worktable 200, and then error analysis and compensation are performed based on the total measurement data.

[0089] See also Fig.12As shown, the five-axis spatial precision measuring fixture 100 is placed on the work surface 200 with the third surface 13 facing the work surface 200. The first surface 11 is parallel to the ZY plane, the third surface 13 is parallel to the XY plane, and the fourth surface 14 is parallel to the ZX plane. The photoelectric measurement module 50 is used to measure each second sphere 30 parallel to the inclined surface 17, thereby measuring the inclined surface positioning accuracy of the work surface 200, and then error analysis and compensation are performed based on the total measurement data.

[0090] See also Fig.13 As shown, the five-axis spatial precision measuring fixture 100 is placed on the work surface 200 with the second surface 12 facing the work surface 200. The first surface 11 is parallel to the XY plane, the fourth surface 14 is parallel to the ZX plane, and the third surface 13 is parallel to the ZY plane. Three diameter-type ten thousand-force scales (not shown in the figure) are used to measure the first spheres 20 of the first row R1, the second row R2 and the third row R3 in parallel to the Y axis, and three diameter-type ten thousand-force scales (not shown in the figure) are used to measure the first spheres 20 of the first column C1, the second column C2 and the third column C3 in parallel to the X axis, and the measurement results are comprehensively analyzed, thereby measuring the pitch, roll, yaw and precision of the work surface 200 in the XY plane, and then error analysis and compensation are performed based on the total measurement data.

[0091] Similarly, when the pitch, roll, yaw and precision measurement of the work surface 200 in the XZ plane and the YZ plane is to be performed, the five-axis spatial precision measurement fixture 100 is respectively Figure 6 and Figure 7 The state shown is placed on the workbench 200, and then three diameter-type 10,000-pound gauges are used to measure the first spheres 20 in the first row R1, the second row R2, the third row R3, the first column C1, the second column C2 and the third column C3, and then error analysis and compensation are performed based on the total measurement data.

[0092] It is worth noting that whether to provide the flange 18 can be determined based on the actual items to be measured. Figure 8 to Figure 12 If the project is not provided with flange 18, the main body 10 does not need to be provided with flange 18. Fig.14 The five-axis spatial precision measuring fixture 100A includes a main body 10A, a plurality of first spheres 20 and a plurality of second spheres 30. The main body 10A has a first surface 11, a second surface 12, a third surface 13, a fourth surface 14, a fifth surface 15, a sixth surface 16 and an inclined surface 17.

[0093] In summary, the five-axis spatial precision measuring fixture provided by the present invention has a specially designed shape structure and is equipped with a plurality of first spheres and a plurality of second spheres placed in special positions. Therefore, different measuring tools can be used to measure the three-axis straightness and motion angle errors, and to measure the positioning accuracy and rotational geometric errors of polyhedrons. By measuring multiple sets of data in one positioning, it can not only simplify the process, avoid human measurement errors, improve measurement accuracy, and effectively speed up measurement efficiency, but also significantly reduce the cost required for laser equipment.

[0094] Different from the existing method of calculating each position error value in space using a mechanism chain model, the present invention uses the actual measurement point accuracy to perform cyclic accumulation of multiple sets of measurement data to achieve a spatial grid compensation method to achieve the best accuracy error correction.

[0095] Although the present invention is disclosed in conjunction with the above embodiments, they are not intended to limit the present invention. Any ordinary technician in the technical field may make slight changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be based on the definition of the attached claims.

Claims

1. A five-axis spatial precision measurement fixture, comprising: A main body, which at least has a first surface, a third surface, a fourth surface and an inclined surface, wherein the first surface is adjacent to the third surface and is perpendicular to each other, the fourth surface is adjacent to the first surface and the third surface and is perpendicular to the first surface and the third surface, and the inclined surface is adjacent to the first surface and the angle between the inclined surface and the third surface is 45 degrees; a plurality of first ball mounting holes, arranged in a plurality of rows and columns at equal intervals on the first surface, wherein the arrangement direction of the plurality of first ball mounting holes in each row is parallel to the third surface, the arrangement direction of the plurality of first ball mounting holes in each column is perpendicular to the third surface, and the axial direction of each first ball mounting hole is parallel to a first direction, and the first direction is perpendicular to the first surface; and A plurality of second ball mounting holes are equidistantly arranged along the inclined direction of the inclined plane and their axes are parallel to a second direction, the second direction is perpendicular to the third plane, and the second direction is perpendicular to the first direction.

2. The five-axis spatial precision measuring fixture as described in claim 1, wherein the center distance between any two adjacent first sphere mounting holes in the multiple rows is equal to the center distance between any two adjacent first sphere mounting holes in the multiple columns.

3. The five-axis spatial precision measuring fixture as described in claim 1, wherein the center distance between two adjacent second sphere mounting holes projected on the third surface is equal to the center distance between any two adjacent first sphere mounting holes.

4. The five-axis spatial precision measuring fixture as described in claim 1, wherein the inclined surface has a plurality of platforms along the inclined direction, the plurality of platforms are parallel to the third surface, and the distances from the third surface decrease sequentially, and the plurality of platforms are respectively provided with the second sphere mounting holes.

5. The five-axis spatial precision measuring jig as claimed in claim 4, wherein the center distances between two adjacent second sphere mounting holes on the plurality of platforms are equal.

6. The five-axis spatial precision measuring fixture according to claim 1, wherein: A flange is provided adjacent to the first surface and the third surface. The flange protrudes from the first surface and has a flange surface. The flange surface is adjacent to the first surface and perpendicular to the first surface. The flange surface extends parallel to the third surface and has a length.

7. The five-axis spatial precision measurement fixture as described in claim 1, wherein the plurality of first sphere mounting holes and the plurality of second sphere mounting holes are used to mount a plurality of first spheres and a plurality of second spheres respectively, and the distances from the centers of the plurality of first spheres to the first surface are all equal.