Plasma driving circuit and driving method thereof

Abstract

The invention discloses a plasma driving circuit and a driving method thereof. The plasma driving circuit comprises a double-balanced mixer, a power setting circuit, an error amplifier, a voltage-controlled oscillator, a single-ended to differential circuit, a driving circuit and a transformer circuit, the double-balanced mixer is respectively connected with the driving circuit and the transformer circuit, the input end of the error amplifier is respectively connected with the double-balanced mixer and the power setting circuit, and the output end of the error amplifier is connected with the input end of the voltage-controlled oscillator; the output end of the voltage-controlled oscillator is connected with the input end of the single-ended to differential circuit, and the output end of the single-ended to differential circuit is connected with the input end of the driving circuit. The output end of the drive circuit is connected with the transformer circuit. According to the plasma driving circuit and the driving method thereof provided by the invention, a mode of adjusting frequency by pure hardware can be utilized to simply and quickly adapt to the mutation condition of a sample injection solution, and the stability of power can be ensured.

Description

Technical Field

[0001] The present invention belongs to the technical field of plasma driving, and relates to a driving circuit, and in particular to a plasma driving circuit and a driving method thereof. Background Art

[0002] The usual plasma power supply uses a Class E power amplifier to drive the plasma coil to generate RF voltage, but to control the power stability, it is necessary to collect voltage, current and reflected current, and then obtain the total power and reflected power by multiplying the voltage and current. When the RF power supply is stable, it is necessary to ensure that the reflected power is minimized; the value of the reflected power is collected by the single-chip microcomputer, and the terminal mechanical capacitance is adjusted by the motor to achieve the set impedance matching and minimize the reflected power. However, the existing method has a slow response and cannot be applied to situations where the concentration of the sample solution changes suddenly.

[0003] In view of this, there is an urgent need to design a new plasma driving circuit to overcome at least part of the above-mentioned defects of the existing plasma driving circuit. Summary of the invention

[0004] The invention provides a plasma driving circuit and a driving method thereof, which can simply and quickly adapt to the situation of sudden change of the injection solution and can ensure the stability of power.

[0005] To solve the above technical problem, according to one aspect of the present invention, the following technical solution is adopted:

[0006] A plasma driving circuit, comprising: a double-balanced mixer, a power setting circuit, an error amplifier, a voltage-controlled oscillator, a single-ended to differential circuit, a driving circuit and a transformer circuit;

[0007] The double-balanced mixer is connected to the driving circuit and the transformer circuit respectively, the input end of the error amplifier is connected to the double-balanced mixer and the power setting circuit respectively, and the output end of the error amplifier is connected to the input end of the voltage-controlled oscillator;

[0008] The output end of the voltage-controlled oscillator is connected to the input end of the single-ended to differential circuit, and the output ends of the single-ended to differential circuit are respectively connected to the input end of the driving circuit; the output ends of the driving circuit are respectively connected to the transformer circuit;

[0009] The double-balanced mixer is used to collect the signal finally output by the transformer circuit and the signal of the driving circuit for mixing and filter out the base frequency; the power setting circuit is used to generate the comparative power;

[0010] The error amplifier is used to dynamically compare the screened fundamental frequency with the comparison power generated by the power setting circuit to generate an error signal;

[0011] The voltage-controlled oscillator is used to drive the voltage-controlled oscillator to generate a finely adjustable frequency using the generated error signal; the single-ended to differential circuit is used to convert a single-channel signal into a differential signal to enhance the driving force;

[0012] The driving circuit is used to further enhance the driving force to drive the transformer circuit; the transformer circuit is used to realize the impedance transformation and impedance matching functions to adapt the plasma coil.

[0013] As an embodiment of the present invention, the double balanced mixer includes a second transformer T2, a third transformer T3, a first mixer D1, a second inductor L2, a third inductor L3, a fourth inductor L4, a fifth inductor L5, a sixth inductor L6, a seventh inductor L7, a first zero capacitor C10, a first first capacitor C11, a first second capacitor C12, a first third capacitor C13, a first fourth capacitor C14, a first fifth capacitor C15, a first fifth resistor R15, a second first resistor R21 and a second second resistor R22;

[0014] The first end of the first zero capacitor C10 is connected to the voltage feedback end output by the driving circuit, the second end of the first zero capacitor C10 is connected to the first end of the first capacitor C11, the second end of the first capacitor C11 is respectively connected to the first end of the second inductor L2 and the first end of the first five resistors R15; the second end of the second inductor L2 is respectively connected to the first end of the third inductor L3 and the first end of the first three capacitors C13; the second end of the third inductor L3 is respectively connected to the first end of the fourth inductor L4 and the first end of the first two capacitors C12; the first five resistors R15, the first three capacitors C13, and the first two capacitors C12 are respectively grounded;

[0015] The second end of the fourth inductor L4 is connected to the sixth end of the second transformer T2, the fourth end of the second transformer T2 is grounded, and the second end of the second transformer T2 is grounded; the first end of the second transformer T2 is connected to the first end of the first mixer D1, and the third end of the second transformer T2 is connected to the second end of the first mixer D1;

[0016] The third end of the first mixer D1 is connected to the third end of the third transformer T3, the fourth end of the first mixer D1 is connected to the first end of the third transformer T3; the sixth end of the third transformer T3 is grounded; the second end of the third transformer T3 is connected to the first end of the second-first resistor R21, and the second end of the second-first resistor R21 is grounded;

[0017] The fourth end of the third transformer T3 is connected to the second end of the seventh inductor L7, and the first end of the seventh inductor L7 is respectively connected to the second end of the sixth inductor L6 and the first end of the first four capacitors C14; the first end of the sixth inductor L6 is respectively connected to the second end of the fifth inductor L5 and the first end of the first five capacitors C15; the first end of the fifth inductor L5 is connected to the first end of the second second resistor R22; the second end of the second second resistor R22, the second end of the first five capacitors C15, and the second end of the first four capacitors C14 are respectively grounded.

[0018] As an implementation mode of the present invention, the error amplifier includes a sixth A chip U6A, a sixth B chip U6B, a first six resistor R16, a first seven resistor R17, a first nine resistor R19, and a second three resistor R23;

[0019] The non-phase input terminal of the sixth B chip U6B is connected to the output terminal of the double-balanced mixer, and the inverting input terminal of the sixth B chip U6B is connected to the output terminal of the sixth B chip U6B and the first terminal of the first nine resistors R19;

[0020] The output end of the first nine resistors R19 are respectively connected to the inverting input end of the sixth A chip U6A and the first end of the second three resistors R23;

[0021] The positive phase input end of the sixth A chip U6A is respectively connected to the second end of the first six resistors R16 and the first end of the first seven resistors R17; the first end of the first six resistors R16 is connected to the first power supply voltage, and the second end of the first seven resistors R17 is grounded; the output end of the sixth A chip U6A is connected to the second end of the second three resistors R23.

[0022] As an implementation mode of the present invention, the voltage-controlled oscillator includes a fifth chip U5, a first eight-resistance resistor R18, and a second zero resistor R20; the third pin of the fifth chip U5 is respectively connected to the second end of the second zero resistor R20 and the second end of the first eight-resistance resistor R18; the fifth pin of the fifth chip U5 outputs a frequency adjustment signal; the second pin of the fifth chip U5 is grounded, and the fourth pin of the fifth chip U5 is grounded;

[0023] A first end of the first eight-resistance resistor R18 is connected to a second power supply voltage, and a first end of the second zero-resistance resistor R20 is connected to an output end of the error amplifier.

[0024] As an implementation mode of the present invention, the single-ended to differential circuit includes a second chip U2 and a seventh resistor R7; the first five pins of the second chip U2 are connected to the second end of the seventh resistor R7, and the first end of the seventh resistor R7 is connected to the second power supply voltage;

[0025] The first pin 1 and the first pin 4 of the second chip U2 are connected to the frequency adjustment signal output by the voltage-controlled oscillator.

[0026] As an embodiment of the present invention, the driving circuit includes a first chip U1, a third chip U3, a fourth chip U4, a first A diode Q1A, a first B diode Q1B, a second A diode Q2A, a second B diode Q2B, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, an eighth resistor R8, a ninth resistor R9, a first zero resistor R10, a first first resistor R11, a first second resistor R12, and a first third resistor R13;

[0027] The third chip U3 is connected to the first chip U1 and the fourth chip U4 respectively, one of the six pins of the third chip U3 is connected to the second end of the eighth resistor R8, and the first end of the eighth resistor R8 is connected to the second power supply voltage;

[0028] Some pins of the first chip U1 are respectively connected to the first end of the second resistor R2, the first end of the third resistor R3, the first end of the fourth resistor R4, the first end of the first resistor R1, and the first end of the fifth resistor R5; the second end of the second resistor R2, the second end of the third resistor R3, and the second end of the third resistor R4 are respectively grounded;

[0029] The second end of the first resistor R1 is connected to the anode of the first B diode Q1 B, and the second end of the fifth resistor R5 is connected to the anode of the first A diode Q1A; the cathode of the first B diode Q1 B and the cathode of the first A diode Q1A output voltage are fed back to the transformer circuit;

[0030] Some pins of the fourth chip U4 are respectively connected to the first end of the first zero resistor R10, the first end of the first first resistor R11, the first end of the first second resistor R12, the first end of the ninth resistor R9, and the first end of the first third resistor R13; the second end of the first zero resistor R10, the second end of the first first resistor R11, and the second end of the first second resistor R12 are respectively grounded;

[0031] The second end of the ninth resistor R9 is connected to the anode of the second B diode Q2B, and the second end of the first third resistor R13 is connected to the anode of the second A diode Q2A; the cathode of the second B diode Q2B and the cathode of the second A diode Q2A output voltage are fed back to the transformer circuit.

[0032] As an implementation mode of the present invention, the transformer circuit includes a first transformer T1, a first A capacitor C1A, a second capacitor C2, a third capacitor C3, a fourth A capacitor C4A, a fifth A capacitor C5A and a first interface circuit P1;

[0033] A first end of the first transformer T1 is connected to a voltage feedback signal output by a driving circuit, and a third end of the first transformer T1 is connected to a voltage feedback signal output by a driving circuit;

[0034] The sixth end of the first transformer T1 is respectively connected to the first end of the second capacitor C2, the first end of the third capacitor C3, the first end of the fourth A capacitor C4A, and the first end of the first A capacitor C1A; the second end of the first A capacitor C1A is connected to the first end of the first interface circuit P1;

[0035] The fourth end of the first transformer T1 is respectively connected to the second end of the second capacitor C2, the second end of the third capacitor C3, the second end of the fourth A capacitor C4A, and the first end of the fifth A capacitor C5A; the second end of the fifth A capacitor C5A is connected to the second end of the first interface circuit P1;

[0036] The second end of the first transformer T1 is connected to a third voltage, and the fifth end of the first transformer T1 is grounded; the first interface circuit P1 is connected to the output coil.

[0037] As an implementation mode of the present invention, the double-balanced mixer is used to collect the signal finally output by the transformer circuit and the signal of the driving circuit by using the antenna for mixing and filtering out the baseband.

[0038] According to another aspect of the present invention, the following technical solution is adopted: a driving method of the above-mentioned plasma driving circuit, the driving method comprising:

[0039] The double-balanced mixer collects the final output signal of the transformer circuit and the signal of the driving circuit for mixing and filters out the base frequency; the power setting circuit generates the comparative power;

[0040] The error amplifier dynamically compares the screened base frequency with the comparison power generated by the power setting circuit to generate an error signal; the voltage-controlled oscillator drives the voltage-controlled oscillator to generate a finely adjustable frequency using the generated error signal;

[0041] The single-ended to differential circuit converts a single-channel signal into a differential signal to enhance the driving force; the driving circuit further enhances the driving force to drive the transformer circuit; the transformer circuit realizes impedance transformation and impedance matching functions to adapt to the plasma coil.

[0042] The beneficial effect of the present invention is that the plasma driving circuit and driving method thereof proposed in the present invention can simply and quickly adapt to the sudden change of the injection solution by adjusting the frequency in a pure hardware manner, and can ensure the stability of the power. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 FIG. 4 is a schematic diagram of the composition of a plasma driving circuit in one embodiment of the present invention.

[0044] Figure 2 FIG. 4 is a circuit diagram of a plasma driving circuit in one embodiment of the present invention. DETAILED DESCRIPTION

[0045] The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0046] In order to further understand the present invention, preferred embodiments of the present invention are described below in conjunction with examples. However, it should be understood that these descriptions are only for further illustrating the features and advantages of the present invention, rather than limiting the claims of the present invention.

[0047] The description in this section is only for several typical embodiments, and the present invention is not limited to the scope of the embodiments. The same or similar prior art means and some technical features in the embodiments are mutually replaced within the scope of the present invention.

[0048] The description of the steps in each embodiment in the specification is only for the convenience of explanation, and the implementation method of the present application is not limited by the order of implementation of the steps.

[0049] The term "connection" as used in the specification includes both direct connection and indirect connection, such as connection through some active devices, passive devices or electrically conductive media; it may also include connection through other active devices or passive devices known to those skilled in the art on the basis of achieving the same or similar functional purposes, such as connection through circuits or components such as switches and follower circuits.

[0050] The present invention discloses a plasma driving circuit. Figure 1 FIG. 1 is a schematic diagram of the composition of a plasma driving circuit in one embodiment of the present invention; please refer to FIG. Figure 1 The plasma driving circuit includes: a double-balanced mixer 1, a power setting circuit 2, an error amplifier 3, a voltage-controlled oscillator 4, a single-ended to differential circuit 5, a driving circuit 6 and a transformer circuit 7. In one embodiment, the plasma driving circuit may be an inductively coupled plasma driving circuit, and may also be other plasma driving circuits.

[0051] The double-balanced mixer 1 is respectively connected to the driving circuit 6 and the transformer circuit 7, the input end of the error amplifier 3 is respectively connected to the double-balanced mixer 1 and the power setting circuit 2, and the output end of the error amplifier 3 is connected to the input end of the voltage-controlled oscillator 4. The output end of the voltage-controlled oscillator 4 is connected to the input end of the single-ended to differential circuit 5, and the output end of the single-ended to differential circuit 5 is respectively connected to the input end of the driving circuit 6; the output end of the driving circuit 6 is respectively connected to the transformer circuit 7.

[0052] The double-balanced mixer 2 is used to collect the final output signal of the transformer circuit 7 and the signal of the driving circuit 6 by using the antenna for mixing and filtering out the base frequency; the power setting circuit 2 is used to generate the comparative power. The error amplifier 3 is used to dynamically compare the filtered base frequency with the comparative power generated by the power setting circuit 2 to generate an error signal. The voltage-controlled oscillator 4 is used to drive the voltage-controlled oscillator 4 to generate a fine-tunable frequency using the generated error signal; the single-ended to differential circuit 5 is used to convert a single-channel signal into a differential signal to enhance the driving force. The driving circuit 6 is used to further enhance the driving force to drive the transformer circuit 7; the transformer circuit 7 is used to realize the impedance transformation and impedance matching functions to adapt the plasma coil.

[0053] Figure 2 is a circuit diagram of a plasma driving circuit in one embodiment of the present invention; please refer to Figure 2 In one embodiment of the present invention, the double balanced mixer includes a second transformer T2, a third transformer T3, a first mixer D1, a second inductor L2, a third inductor L3, a fourth inductor L4, a fifth inductor L5, a sixth inductor L6, a seventh inductor L7, a first zero capacitor C10, a first first capacitor C11, a first second capacitor C12, a first third capacitor C13, a first fourth capacitor C14, a first fifth capacitor C15, a first fifth resistor R15, a second first resistor R21 and a second second resistor R22.

[0054] The first end of the first zero capacitor C10 is connected to the voltage feedback end output by the driving circuit, the second end of the first zero capacitor C10 is connected to the first end of the first capacitor C11, the second end of the first capacitor C11 is respectively connected to the first end of the second inductor L2 and the first end of the first five resistors R15; the second end of the second inductor L2 is respectively connected to the first end of the third inductor L3 and the first end of the first three capacitors C13; the second end of the third inductor L3 is respectively connected to the first end of the fourth inductor L4 and the first end of the first two capacitors C12; the first five resistors R15, the first three capacitors C13, and the first two capacitors C12 are respectively grounded.

[0055] The second end of the fourth inductor L4 is connected to the sixth end of the second transformer T2, the fourth end of the second transformer T2 is grounded, and the second end of the second transformer T2 is grounded; the first end of the second transformer T2 is connected to the first end of the first mixer D1, and the third end of the second transformer T2 is connected to the second end of the first mixer D1.

[0056] The third end of the first mixer D1 is connected to the third end of the third transformer T3, the fourth end of the first mixer D1 is connected to the first end of the third transformer T3; the sixth end of the third transformer T3 is grounded; the second end of the third transformer T3 is connected to the first end of the second-first resistor R21, and the second end of the second-first resistor R21 is grounded.

[0057] The fourth end of the third transformer T3 is connected to the second end of the seventh inductor L7, and the first end of the seventh inductor L7 is respectively connected to the second end of the sixth inductor L6 and the first end of the first four capacitors C14; the first end of the sixth inductor L6 is respectively connected to the second end of the fifth inductor L5 and the first end of the first five capacitors C15; the first end of the fifth inductor L5 is connected to the first end of the second second resistor R22; the second end of the second second resistor R22, the second end of the first five capacitors C15, and the second end of the first four capacitors C14 are respectively grounded.

[0058] See also Figure 2 , the error amplifier includes the sixth A chip U6A, the sixth B chip U6B, the first six resistors R16, the first seven resistors R17, the first nine resistors R19, and the second three resistors R23. The non-inverting input end of the sixth B chip U6B is connected to the output end of the double-balanced mixer, and the inverting input end of the sixth B chip U6B is connected to the output end of the sixth B chip U6B and the first end of the first nine resistors R19. The output ends of the first nine resistors R19 are respectively connected to the inverting input end of the sixth A chip U6A and the first end of the second three resistors R23. The non-inverting input end of the sixth A chip U6A is respectively connected to the second end of the first six resistors R16 and the first end of the first seven resistors R17; the first end of the first six resistors R16 is connected to the first power supply voltage, and the second end of the first seven resistors R17 is grounded; the output end of the sixth A chip U6A is connected to the second end of the second three resistors R23.

[0059] The circuit of voltage controlled oscillator is as follows Figure 2 As shown, the voltage controlled oscillator includes a fifth chip U5, a first eight-resistance resistor R18, and a second zero resistor R20; the third pin of the fifth chip U5 is respectively connected to the second end of the second zero resistor R20 and the second end of the first eight-resistance resistor R18; the fifth pin of the fifth chip U5 outputs a frequency adjustment signal; the second pin of the fifth chip U5 is grounded, and the fourth pin of the fifth chip U5 is grounded. The first end of the first eight-resistance resistor R18 is connected to the second power supply voltage, and the first end of the second zero resistor R20 is connected to the output end of the error amplifier.

[0060] like Figure 2 As shown, the single-ended to differential circuit includes a second chip U2 and a seventh resistor R7; the first five pins of the second chip U2 are connected to the second end of the seventh resistor R7, and the first end of the seventh resistor R7 is connected to the second power supply voltage. The first one pin and the first four pins of the second chip U2 are connected to the frequency adjustment signal output by the voltage-controlled oscillator.

[0061] Please continue reading Figure 2The driving circuit includes a first chip U1, a third chip U3, a fourth chip U4, a first A diode Q1A, a first B diode Q1B, a second A diode Q2A, a second B diode Q2B, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, an eighth resistor R8, a ninth resistor R9, a first zero resistor R10, a first first resistor R11, a first second resistor R12, and a first third resistor R13.

[0062] The third chip U3 is connected to the first chip U1 and the fourth chip U4 respectively, and the one-six pins of the third chip U3 are connected to the second end of the eighth resistor R8, and the first end of the eighth resistor R8 is connected to the second power supply voltage. Some pins of the first chip U1 are respectively connected to the first end of the second resistor R2, the first end of the third resistor R3, the first end of the fourth resistor R4, the first end of the first resistor R1, and the first end of the fifth resistor R5; the second end of the second resistor R2, the second end of the third resistor R3, and the second end of the third resistor R4 are grounded respectively. The second end of the first resistor R1 is connected to the positive electrode of the first B diode Q1 B, and the second end of the fifth resistor R5 is connected to the positive electrode of the first A diode Q1A; the negative electrode of the first B diode Q1 B and the negative electrode of the first A diode Q1A output voltage are fed back to the transformer circuit.

[0063] Some pins of the fourth chip U4 are respectively connected to the first end of the first zero resistor R10, the first end of the first resistor R11, the first end of the first resistor R12, the first end of the ninth resistor R9, and the first end of the first resistor R13; the second end of the first zero resistor R10, the second end of the first resistor R11, and the second end of the first resistor R12 are grounded respectively. The second end of the ninth resistor R9 is connected to the positive electrode of the second B diode Q2B, and the second end of the first three resistors R13 is connected to the positive electrode of the second A diode Q2A; the negative electrode of the second B diode Q2B and the negative electrode of the second A diode Q2A output voltage are fed back to the transformer circuit.

[0064] like Figure 2As shown, the transformer circuit includes a first transformer T1, a first A capacitor C1A, a second capacitor C2, a third capacitor C3, a fourth A capacitor C4A, a fifth A capacitor C5A and a first interface circuit P1. The first end of the first transformer T1 is connected to the voltage feedback signal output by the driving circuit, and the third end of the first transformer T1 is connected to the voltage feedback signal output by the driving circuit. The sixth end of the first transformer T1 is respectively connected to the first end of the second capacitor C2, the first end of the third capacitor C3, the first end of the fourth A capacitor C4A, and the first end of the first A capacitor C1A; the second end of the first A capacitor C1A is connected to the first end of the first interface circuit P1. The fourth end of the first transformer T1 is respectively connected to the second end of the second capacitor C2, the second end of the third capacitor C3, the second end of the fourth A capacitor C4A, and the first end of the fifth A capacitor C5A; the second end of the fifth A capacitor C5A is connected to the second end of the first interface circuit P1. The second end of the first transformer T1 is connected to the third voltage, and the fifth end of the first transformer T1 is grounded; the first interface circuit P1 is connected to the output coil.

[0065] The present invention further discloses a driving method of the above-mentioned plasma driving circuit, the driving method comprising:

[0066] The double-balanced mixer collects (e.g., can use an antenna to collect) the final output signal of the transformer circuit and the signal of the driving circuit to mix and filter out the base frequency; the power setting circuit generates a comparative power;

[0067] The error amplifier dynamically compares the screened base frequency with the comparison power generated by the power setting circuit to generate an error signal; the voltage-controlled oscillator drives the voltage-controlled oscillator to generate a finely adjustable frequency using the generated error signal;

[0068] The single-ended to differential circuit converts a single-channel signal into a differential signal to enhance the driving force; the driving circuit further enhances the driving force to drive the transformer circuit; the transformer circuit realizes impedance transformation and impedance matching functions to adapt to the plasma coil.

[0069] In summary, the plasma driving circuit and driving method thereof proposed in the present invention can simply and quickly adapt to the sudden change of the sample solution by adjusting the frequency in a pure hardware manner, and can ensure the stability of the power.

[0070] It should be noted that the present application can be implemented in software and / or a combination of software and hardware; for example, it can be implemented using an application-specific integrated circuit (ASIC), a general-purpose computer, or any other similar hardware device. In some embodiments, the software program of the present application can be executed by a processor to implement the above steps or functions. Similarly, the software program of the present application (including related data structures) can be stored in a computer-readable recording medium; for example, a RAM memory, a magnetic or optical drive or a floppy disk and the like. In addition, some steps or functions of the present application can be implemented in hardware; for example, as a circuit that cooperates with a processor to perform various steps or functions.

[0071] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0072] The description and application of the present invention here are illustrative, and it is not intended to limit the scope of the present invention to the above-mentioned embodiments. The effects or advantages involved in the embodiments may not be embodied in the embodiments due to interference from various factors, and the description of the effects or advantages is not used to limit the embodiments. The deformation and change of the embodiments disclosed here are possible, and the replacement of the embodiments and the various equivalent parts are well known to those of ordinary skill in the art. It should be clear to those skilled in the art that the present invention can be implemented in other forms, structures, arrangements, proportions, and with other components, materials and parts without departing from the spirit or essential features of the present invention. Other deformations and changes can be made to the embodiments disclosed here without departing from the scope and spirit of the present invention.

Claims

1. A plasma driving circuit, characterized in that: The plasma driving circuit includes: a double-balanced mixer, a power setting circuit, an error amplifier, a voltage-controlled oscillator, a single-ended to differential circuit, a driving circuit and a transformer circuit; The double-balanced mixer is connected to the driving circuit and the transformer circuit respectively, the input end of the error amplifier is connected to the double-balanced mixer and the power setting circuit respectively, and the output end of the error amplifier is connected to the input end of the voltage-controlled oscillator; The output end of the voltage-controlled oscillator is connected to the input end of the single-ended to differential circuit, and the output ends of the single-ended to differential circuit are respectively connected to the input end of the driving circuit; the output ends of the driving circuit are respectively connected to the transformer circuit; The double-balanced mixer is used to collect the signal finally output by the transformer circuit and the signal of the driving circuit for mixing and filter out the base frequency; the power setting circuit is used to generate the comparative power; The error amplifier is used to dynamically compare the screened fundamental frequency with the comparison power generated by the power setting circuit to generate an error signal; The voltage-controlled oscillator is used to drive the voltage-controlled oscillator to generate a finely adjustable frequency using the generated error signal; the single-ended to differential circuit is used to convert a single-channel signal into a differential signal to enhance the driving force; The driving circuit is used to further enhance the driving force to drive the transformer circuit; the transformer circuit is used to realize impedance transformation and impedance matching functions to adapt the plasma coil.

2. The plasma driving circuit according to claim 1, characterized in that: The double balanced mixer includes a second transformer T2, a third transformer T3, a first mixer D1, a second inductor L2, a third inductor L3, a fourth inductor L4, a fifth inductor L5, a sixth inductor L6, a seventh inductor L7, a first zero capacitor C10, a first first capacitor C11, a first second capacitor C12, a first third capacitor C13, a first fourth capacitor C14, a first fifth capacitor C15, a first fifth resistor R15, a second first resistor R21 and a second second resistor R22; The first end of the first zero capacitor C10 is connected to the voltage feedback end output by the driving circuit, the second end of the first zero capacitor C10 is connected to the first end of the first capacitor C11, the second end of the first capacitor C11 is respectively connected to the first end of the second inductor L2 and the first end of the first five resistors R15; the second end of the second inductor L2 is respectively connected to the first end of the third inductor L3 and the first end of the first three capacitors C13; the second end of the third inductor L3 is respectively connected to the first end of the fourth inductor L4 and the first end of the first two capacitors C12; the first five resistors R15, the first three capacitors C13, and the first two capacitors C12 are respectively grounded; The second end of the fourth inductor L4 is connected to the sixth end of the second transformer T2, the fourth end of the second transformer T2 is grounded, and the second end of the second transformer T2 is grounded; the first end of the second transformer T2 is connected to the first end of the first mixer D1, and the third end of the second transformer T2 is connected to the second end of the first mixer D1; The third end of the first mixer D1 is connected to the third end of the third transformer T3, the fourth end of the first mixer D1 is connected to the first end of the third transformer T3; the sixth end of the third transformer T3 is grounded; the second end of the third transformer T3 is connected to the first end of the second-first resistor R21, and the second end of the second-first resistor R21 is grounded; The fourth end of the third transformer T3 is connected to the second end of the seventh inductor L7, and the first end of the seventh inductor L7 is respectively connected to the second end of the sixth inductor L6 and the first end of the first four capacitors C14; the first end of the sixth inductor L6 is respectively connected to the second end of the fifth inductor L5 and the first end of the first five capacitors C15; the first end of the fifth inductor L5 is connected to the first end of the second second resistor R22; the second end of the second second resistor R22, the second end of the first five capacitors C15, and the second end of the first four capacitors C14 are respectively grounded.

3. The plasma driving circuit according to claim 1, characterized in that: The error amplifier includes a sixth A chip U6A, a sixth B chip U6B, a first six resistor R16, a first seven resistor R17, a first nine resistor R19, and a second three resistor R23; The non-phase input terminal of the sixth B chip U6B is connected to the output terminal of the double-balanced mixer, and the inverting input terminal of the sixth B chip U6B is connected to the output terminal of the sixth B chip U6B and the first terminal of the first nine resistors R19; The output end of the first nine resistors R19 are respectively connected to the inverting input end of the sixth A chip U6A and the first end of the second three resistors R23; The positive phase input end of the sixth A chip U6A is respectively connected to the second end of the first six resistors R16 and the first end of the first seven resistors R17; the first end of the first six resistors R16 is connected to the first power supply voltage, and the second end of the first seven resistors R17 is grounded; the output end of the sixth A chip U6A is connected to the second end of the second three resistors R23.

4. The plasma driving circuit according to claim 1, characterized in that: The voltage-controlled oscillator includes a fifth chip U5, a first eight-resistance resistor R18, and a second zero resistor R20; the third pin of the fifth chip U5 is respectively connected to the second end of the second zero resistor R20 and the second end of the first eight-resistance resistor R18; the fifth pin of the fifth chip U5 outputs a frequency adjustment signal; the second pin of the fifth chip U5 is grounded, and the fourth pin of the fifth chip U5 is grounded; A first end of the first eight-resistance resistor R18 is connected to a second power supply voltage, and a first end of the second zero-resistance resistor R20 is connected to an output end of the error amplifier.

5. The plasma driving circuit according to claim 1, characterized in that: The single-ended to differential circuit includes a second chip U2 and a seventh resistor R7; the first five pins of the second chip U2 are connected to the second end of the seventh resistor R7, and the first end of the seventh resistor R7 is connected to the second power supply voltage; The first pin 1 and the first pin 4 of the second chip U2 are connected to the frequency adjustment signal output by the voltage-controlled oscillator.

6. The plasma driving circuit according to claim 1, characterized in that: The driving circuit includes a first chip U1, a third chip U3, a fourth chip U4, a first A diode Q1A, a first B diode Q1B, a second A diode Q2A, a second B diode Q2B, a first resistor R1, a second resistor R2, a third resistor R3, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, an eighth resistor R8, a ninth resistor R9, a first zero resistor R10, a first first resistor R11, a first second resistor R12, and a first third resistor R13; The third chip U3 is connected to the first chip U1 and the fourth chip U4 respectively, one of the six pins of the third chip U3 is connected to the second end of the eighth resistor R8, and the first end of the eighth resistor R8 is connected to the second power supply voltage; Some pins of the first chip U1 are respectively connected to the first end of the second resistor R2, the first end of the third resistor R3, the first end of the fourth resistor R4, the first end of the first resistor R1, and the first end of the fifth resistor R5; the second end of the second resistor R2, the second end of the third resistor R3, and the second end of the third resistor R4 are respectively grounded; The second end of the first resistor R1 is connected to the anode of the first B diode Q1 B, and the second end of the fifth resistor R5 is connected to the anode of the first A diode Q1A; the cathode of the first B diode Q1 B and the cathode of the first A diode Q1A output voltage are fed back to the transformer circuit; Some pins of the fourth chip U4 are respectively connected to the first end of the first zero resistor R10, the first end of the first first resistor R11, the first end of the first second resistor R12, the first end of the ninth resistor R9, and the first end of the first third resistor R13; the second end of the first zero resistor R10, the second end of the first first resistor R11, and the second end of the first second resistor R12 are respectively grounded; The second end of the ninth resistor R9 is connected to the anode of the second B diode Q2B, and the second end of the first third resistor R13 is connected to the anode of the second A diode Q2A; the cathode of the second B diode Q2B and the cathode of the second A diode Q2A output voltage are fed back to the transformer circuit.

7. The plasma driving circuit according to claim 1, characterized in that: The transformer circuit includes a first transformer T1, a first A capacitor C1A, a second capacitor C2, a third capacitor C3, a fourth A capacitor C4A, a fifth A capacitor C5A and a first interface circuit P1; A first end of the first transformer T1 is connected to a voltage feedback signal output by a driving circuit, and a third end of the first transformer T1 is connected to a voltage feedback signal output by a driving circuit; The sixth end of the first transformer T1 is respectively connected to the first end of the second capacitor C2, the first end of the third capacitor C3, the first end of the fourth A capacitor C4A, and the first end of the first A capacitor C1A; the second end of the first A capacitor C1A is connected to the first end of the first interface circuit P1; The fourth end of the first transformer T1 is respectively connected to the second end of the second capacitor C2, the second end of the third capacitor C3, the second end of the fourth A capacitor C4A, and the first end of the fifth A capacitor C5A; the second end of the fifth A capacitor C5A is connected to the second end of the first interface circuit P1; The second end of the first transformer T1 is connected to a third voltage, and the fifth end of the first transformer T1 is grounded; the first interface circuit P1 is connected to the output coil.

8. The plasma driving circuit according to claim 1, characterized in that: The double-balanced mixer is used to collect the signal finally output by the transformer circuit and the signal of the driving circuit by using the antenna for mixing and filtering out the base frequency.

9. A driving method of the plasma driving circuit according to any one of claims 1 to 8, characterized in that: The driving method comprises: The double-balanced mixer collects the final output signal of the transformer circuit and the signal of the driving circuit for mixing and filters out the base frequency; the power setting circuit generates the comparative power; The error amplifier dynamically compares the screened base frequency with the comparison power generated by the power setting circuit to generate an error signal; the voltage-controlled oscillator drives the voltage-controlled oscillator to generate a finely adjustable frequency using the generated error signal; The single-ended to differential circuit converts a single-channel signal into a differential signal to enhance the driving force; the driving circuit further enhances the driving force to drive the transformer circuit; the transformer circuit realizes impedance transformation and impedance matching functions to adapt to the plasma coil.

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