Ppm-level multi-element gas standard gas configuration device based on weighing calibration

By using a ppm-level multi-gas standard gas configuration device with weighing calibration in the standard gas configuration device, and using the total supply pipeline and weighing components for gas configuration, the problems of strong gas cylinder dependence and inaccurate concentration control in the prior art are solved, and a simpler and more accurate standard gas configuration process is achieved.

CN119793256APending Publication Date: 2025-04-11HEFEI ZHENGFAN ELECTRONICS MATERIAL
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Patent Information

Application Number
CN202411987765.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2025-04-11

AI Technical Summary

Technical Problem

Due to the strong cylinder dependence, the existing standard gas configuration devices have complex operating steps and dilution errors will gradually accumulate, resulting in the standard gas concentration deviating from the expected value.

Method used

The ppm-level multi-gas standard gas configuration device based on weighing calibration is used to release the raw gas into an independent weighing container through the total supply pipeline, and the gas is finely weighed through the weighing parts, and finally the gas is poured into the standard gas cylinder.

Benefits of technology

The gas configuration that does not rely on media cylinders is realized, the operation process is simplified, error accumulation is reduced, and the accuracy and consistency of standard gas concentration is improved.

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Abstract

The invention discloses a ppm-level multi-element gas standard gas configuration device based on weighing calibration, which comprises a raw material allocation unit, the raw material allocation unit is connected with a main supply pipeline, the main supply pipeline is connected with a plurality of weighing containers, each weighing container is arranged on a weighing component, the plurality of weighing containers are connected with a standard gas bottle, the weighing component comprises a U-shaped seat, and the U-shaped seat is connected with a plurality of weighing containers. A pressure sensing piece is arranged on the bottom face of a groove in the U-shaped base, a hypersensitive spring matrix is arranged on the top of the U-shaped base, the top of the hypersensitive spring matrix is connected with an annular wing plate, and the annular wing plate is connected with the outer wall of the weighing container. Through independent storage of gas and fine weighing of the weighing part, the whole configuration process does not depend on use of a medium gas cylinder, so that the whole operation process is simple, and error accumulation is small. Meanwhile, the homogeneous generator is arranged at the upstream of the standard gas cylinder, so that the multi-element gas is mixed more uniformly, and the quality of the standard gas in the standard gas cylinder is higher.
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Description

Technical Field

[0001] The invention relates to the technical field of gas configuration, and in particular to a ppm-level multi-component gas standard gas configuration device based on weighing calibration. Background Art

[0002] Standard gases are mainly used in scientific research, formulation and verification of product standards for industrial production, environmental monitoring of gaseous pollutants, calibration of analytical instruments, quality control, capability verification and technical arbitration. Due to the rapid development of my country's high-tech industry, the development of my country's metrological standard materials has been greatly promoted. Therefore, not only the amount of standard gases is increasing day by day, but also the requirements for standard gases, especially ppm-level standard gases, are constantly increasing.

[0003] At present, the existing standard gas configuration device mainly takes out a small amount of gas from a high-concentration gas cylinder, mixes it with a large amount of inert gas (such as nitrogen or air) to form an intermediate gas with a lower concentration, and then further dilutes the intermediate gas after the first-level dilution to obtain a gas with a lower concentration, and finally obtains the required standard gas.

[0004] However, this method is highly dependent on gas cylinders, the operating steps are complicated, and the dilution error will gradually accumulate, causing the standard gas concentration to deviate from the expected value. Summary of the invention

[0005] The purpose of the present invention is to provide a ppm-level multi-gas standard gas configuration device based on weighing calibration to solve the technical problems in the prior art of complicated operation and inaccurate concentration control due to strong dependence on gas cylinders.

[0006] In order to solve the above technical problems, the present invention specifically provides the following technical solutions:

[0007] A ppm-level multi-element gas standard gas configuration device based on weighing calibration comprises a plurality of raw material distribution units, wherein the plurality of raw material distribution units are connected to a main supply pipeline through a plurality of independently opened and closed delivery pipelines, and the main supply pipeline is connected to a plurality of weighing containers through multi-directional branch pipes, the plurality of weighing containers are arranged in a corresponding matching manner with the plurality of raw material distribution units, and each of the weighing containers is arranged on a weighing component, and the plurality of weighing containers are connected to a standard gas cylinder;

[0008] The weighing component includes a U-shaped seat, a pressure sensing sheet is arranged on the bottom surface of the internal groove of the U-shaped seat, a super-sensitive spring matrix is ​​arranged on the top of the U-shaped seat, an annular wing plate is connected to the top of the super-sensitive spring matrix, and the annular wing plate is connected to the outer wall of the weighing container. The super-sensitive spring matrix supports the unloaded weighing container and sets it at the critical point position where it contacts the pressure sensing sheet.

[0009] As a preferred solution of the present invention, a plurality of metering pipes with different diameters are arranged on the main supply pipe, and a shut-off valve and a flow meter are arranged on the metering pipe.

[0010] As a preferred solution of the present invention, a plurality of reflux containers are arranged on the multidirectional branch pipe, and the plurality of reflux containers are arranged in one-to-one correspondence with the plurality of weighing containers. One side of the reflux container is connected to the main supply pipeline through the multidirectional branch pipe, and the other side of the reflux container is connected to the weighing container through a bidirectional pipeline.

[0011] The bidirectional pipeline includes a forward pipeline and a reverse pipeline. The forward pipeline is used to guide the airflow from the reflux container into the weighing container, and the reverse pipeline is used to guide the airflow from the weighing container into the reflux container.

[0012] As a preferred solution of the present invention, a homogenizer is provided between the standard gas bottle and the weighing container, and the homogenizer is connected to the standard gas bottle and the weighing container respectively;

[0013] The homogenizer includes a mixing tank and an air pipe, the air pipe is axially rotatably arranged in the middle of the mixing tank, one end of the air pipe is connected to a rotation driver, and the other end is connected to the multiple weighing containers through a multi-way pipe, a plurality of homogenizing arc tubes are arranged on the air pipe, each of the homogenizing arc tubes is connected to the multiple weighing containers one by one through the multi-way pipe, the homogenizing arc tube is connected to the inside of the air pipe, and a plurality of air holes are evenly arranged on the outer surface of the homogenizing arc tube.

[0014] As a preferred solution of the present invention, a plurality of the homogeneous arc-shaped tubes are arranged on the outer surface of the gas passage tube in a circle with the long axis of the gas passage tube as the rotation center line.

[0015] As a preferred solution of the present invention, a plurality of blades are further provided on the homogenizing arc tube, and the blades are provided between two adjacent air holes.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The present invention utilizes a total supply pipeline to release different raw material gases in multiple raw material configuration units into independent weighing containers, and uses a weighing component to individually weigh each weighing container to obtain a preset weight of target gas, and finally merges the various gases into a standard gas cylinder to complete the configuration process. The independent storage of gases and the refined weighing of weighing components make the overall configuration process independent of the use of medium gas cylinders, thereby making the overall operation process simple and the error accumulation small. At the same time, a homogenizer is arranged upstream of the standard gas cylinder to make the mixing of the multi-component gases more uniform and the standard gas in the standard gas cylinder higher in quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 It is a schematic diagram of the cutaway structure of the weighing container of the present invention;

[0021] Figure 3 It is a structural schematic diagram of the homogenizing generator of the present invention;

[0022] Figure 4 It is a schematic diagram of the cross-section structure of the homogeneous arc tube of the present invention.

[0023] The numbers in the figure represent the following:

[0024] 1. Raw material distribution unit; 2. Conveying pipeline; 3. Main supply pipeline; 4. Multi-directional branch pipe; 5. Weighing container; 6. Weighing component; 7. Standard gas bottle; 8. U-shaped seat; 9. Pressure sensor; 10. Supersensitive spring matrix; 11. Annular wing plate; 12. Measuring pipeline; 13. Shutoff valve; 14. Flow meter; 15. Reflux container; 16. Forward pipeline; 17. Reverse pipeline; 18. Homogenizer; 19. Mixing tank; 20. Air pipe; 21. Rotary drive; 22. Homogenizing arc tube; 23. Air vent; 24. Blade. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] like Figures 1 to 4As shown, the present invention provides a ppm-level multi-element gas standard gas configuration device based on weighing calibration, including multiple raw material distribution units 1, multiple raw material distribution units 1 are connected to a main supply pipeline 3 through multiple independently opened and closed delivery pipelines 2, and a control valve can be set on the delivery pipeline 2 to control the raw material supply of a single raw material distribution unit 1. The main supply pipeline 3 is connected to multiple weighing containers 5 through multi-directional branch pipes 4, and the multiple weighing containers 5 are matched with the multiple raw material distribution units 1. By controlling the opening and closing of the valve, each weighing container 5 has a gas raw material. Specifically, as Figure 1 As shown, by controlling the opening and closing of the valve, a raw material gas can be supplied each time, and after multiple supplies, different gases can be contained in each weighing container 5. In addition, a vacuum valve can be set on the main supply pipeline 3. After each gas distribution, the valve of the weighing container 5 is closed, and the vacuum valve is opened to make the pipeline vacuum, so as to output and supply the next gas. Each weighing container 5 is set on the weighing component 6, and multiple weighing containers 5 are connected to the standard gas bottle 7.

[0027] like Figure 2 As shown, the weighing component 6 includes a U-shaped seat 8, a pressure sensing sheet 9 is arranged on the bottom surface of the internal groove of the U-shaped seat 8, a super-sensitive spring matrix 10 is arranged on the top of the U-shaped seat 8, an annular wing plate 11 is connected to the top of the super-sensitive spring matrix 10, and the annular wing plate 11 is connected to the outer wall of the weighing container 5. The super-sensitive spring matrix 10 supports the empty weighing container 5 and sets it at the critical point position where it contacts the pressure sensing sheet 9.

[0028] Specifically, the function of the weighing component 6 is to weigh the mass of the gas in each weighing container 5. Since the mass of the gas cylinder is relatively large, the scale that can usually display the mass of the gas cylinder cannot display the minute changes in the gas mass. Therefore, in this device, the gas cylinder is suspended in the U-shaped seat 8 by using the annular wing plate 11 and the super-sensitive spring matrix 10, so that its bottom is at the critical point of contact with the pressure sensing sheet 9. Therefore, when there is gas input or output in the weighing container 5, the gas cylinder will move up or down under the action of the super-sensitive spring matrix 10, thereby triggering the sensing force of the pressure sensing sheet 9, so as to accurately weigh the weight of the gas inside.

[0029] Among them, the super-sensitive spring matrix 10 can be composed of a plurality of super-fine coil springs or diaphragm springs or bellows springs, which can support the unloaded gas cylinder on the one hand, and sense slight mass changes on the other hand, thereby causing the spring itself to deform, thereby causing the pressure sensing sheet 9 to sense force.

[0030] In the initial state, that is, when the super-sensitive spring matrix 10 stably supports the gas cylinder, the bottom of the gas cylinder and the pressure sensing sheet 9 are at a critical point of contact. This critical point can make the pressure sensing sheet 9 not display pressure data at this time. If the empty gas cylinder is filled with gas, the slight downward movement of the gas cylinder will squeeze the pressure sensing sheet 9 to generate pressure data.

[0031] Furthermore, the total supply pipeline 3 is provided with a plurality of metering pipelines 12 of different diameters, and the metering pipelines 12 are provided with a shutoff valve 13 and a flow meter 14. Through a plurality of metering pipelines 12 of different diameters, it is more convenient to introduce gases with different required masses. For example, the configuration of methane standard gas requires a large amount of nitrogen and a light-quality methane raw gas. At this time, when the methane raw gas is input, the metering pipeline 12 with a small diameter can be opened and used, so that the output of the small-quality methane raw gas is more stable and precise. When nitrogen needs to be input, the metering pipeline 12 with a larger diameter can be opened, which can make the filling of a large amount of nitrogen more rapid and the operation process more efficient. At the end of the nitrogen filling period, the metering pipeline 12 with a small diameter is used to control the precision of the gas input.

[0032] In addition, if Figure 1 As shown, a plurality of reflux containers 15 are arranged on the multi-directional branch pipe 4, and the plurality of reflux containers 15 are arranged one-to-one correspondingly to the plurality of weighing containers 5. One side of the reflux container 15 is connected to the main supply pipeline 3 through the multi-directional branch pipe 4, and the other side of the reflux container 15 is connected to the weighing container 5 through a bidirectional pipeline.

[0033] The bidirectional pipeline includes a forward pipeline 16 and a reverse pipeline 17 . The forward pipeline 16 is used to guide the airflow from the reflux container 15 into the weighing container 5 , and the reverse pipeline 17 is used to guide the airflow from the weighing container 5 into the reflux container 15 .

[0034] When the gas is input into the weighing container 5 through the metering pipe 12, the quality control is generally performed through the flow meter 14. However, there are slight errors in the control of the flow meter 14. Therefore, the device is provided with a reflux container 15 and a reverse pipe 17. When the gas weighed by the weighing component 6 is too heavy, a control valve can be used to output a part of the gas from the weighing container 5 through the reverse pipe 17 to the reflux container 15 for temporary storage, so that the weight of the gas in the weighing container 5 can be controlled more conveniently and precisely according to the data displayed by the pressure sensing sheet 9.

[0035] like Figure 3 and Figure 4 As shown, in addition, a homogenizer 18 is provided between the standard gas bottle 7 and the weighing container 5, and the homogenizer 18 is connected to the standard gas bottle 7 and the weighing container 5 respectively.

[0036] The homogenizing generator 18 includes a mixing tank 19 and an air pipe 20. The air pipe 20 is axially rotatably arranged in the middle of the mixing tank 19. One end of the air pipe 20 is connected to a rotating driver 21, and the other end is connected to multiple weighing containers 5 through a multi-way pipe. A plurality of homogenizing arc tubes 22 are arranged on the air pipe 20. Each homogenizing arc tube 22 is connected to a plurality of weighing containers 5 one by one through the multi-way pipe. The homogenizing arc tube 22 is connected to the inside of the air pipe 20, and a plurality of air holes 23 are evenly arranged on the outer surface of the homogenizing arc tube 22.

[0037] A plurality of homogeneous arc-shaped tubes 22 are circumferentially arranged on the outer surface of the gas passage tube 20 with the long axis of the gas passage tube 20 as the rotation center line.

[0038] Multiple raw gasses are introduced into the homogeneous arc tube 22 through multi-way pipes, and then the homogeneous arc tube 22 is driven to rotate through the gas pipe 20, so that the multiple raw gasses are input into the mixing tank 19 in a uniformly rotating manner. The multi-point output method can make the gas mixing in the mixing tank 19 more uniform, so that the output standard gas quality is higher.

[0039] The homogenizing arc tube 22 is also provided with a plurality of blades 24 , and the blades 24 are arranged between two adjacent air holes 23 .

[0040] The above embodiments are only exemplary embodiments of the present application and are not intended to limit the present application. The protection scope of the present application is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present application within the essence and protection scope of the present application, and such modifications or equivalent substitutions shall also be deemed to fall within the protection scope of the present application.

Claims

1. A ppm-level multi-element gas standard gas configuration device based on weighing calibration, characterized in that: The invention comprises a plurality of raw material distribution units (1), wherein the plurality of raw material distribution units (1) are connected to a main supply pipeline (3) through a plurality of independently opened and closed delivery pipelines (2), the main supply pipeline (3) is connected to a plurality of weighing containers (5) through a multi-directional branch pipe (4), the plurality of weighing containers (5) are arranged in a matching manner with the plurality of raw material distribution units (1), and each of the weighing containers (5) is arranged on a weighing component (6), and the plurality of weighing containers (5) are connected to a standard gas cylinder (7); The weighing component (6) comprises a U-shaped seat (8), a pressure sensing sheet (9) is arranged on the bottom surface of the inner groove of the U-shaped seat (8), a super-sensitive spring matrix (10) is arranged on the top of the U-shaped seat (8), an annular wing plate (11) is connected to the top of the super-sensitive spring matrix (10), and the annular wing plate (11) is connected to the outer wall of the weighing container (5), and the super-sensitive spring matrix (10) supports the empty weighing container (5) to be arranged at a critical point position where it contacts the pressure sensing sheet (9).

2. A ppm-level multi-element gas standard gas configuration device based on weighing calibration according to claim 1, characterized in that: The main supply pipeline (3) is provided with a plurality of metering pipelines (12) of different diameters, and the metering pipelines (12) are provided with shut-off valves (13) and flow meters (14).

3. A ppm-level multi-element gas standard gas configuration device based on weighing calibration according to claim 1, characterized in that: A plurality of reflux containers (15) are arranged on the multidirectional branch pipe (4), and the plurality of reflux containers (15) are arranged in one-to-one correspondence with the plurality of weighing containers (5); one side of the reflux container (15) is connected to the main supply pipeline (3) through the multidirectional branch pipe (4), and the other side of the reflux container (15) is connected to the weighing container (5) through a bidirectional pipeline; The bidirectional pipeline comprises a forward pipeline (16) and a reverse pipeline (17), wherein the forward pipeline (16) is used to guide the airflow from the reflux container (15) into the weighing container (5), and the reverse pipeline (17) is used to guide the airflow from the weighing container (5) into the reflux container (15).

4. A ppm-level multi-gas standard gas configuration device based on weighing calibration according to claim 1, characterized in that: A homogenizer (18) is provided between the standard gas bottle (7) and the weighing container (5), and the homogenizer (18) is connected to the standard gas bottle (7) and the weighing container (5) respectively; The homogenizer (18) comprises a mixing tank (19) and an air pipe (20), wherein the air pipe (20) is axially rotatably arranged in the middle of the mixing tank (19), one end of the air pipe (20) is connected to a rotation driver (21), and the other end is connected to the plurality of weighing containers (5) via a multi-way pipe, and the air pipe (20) is provided with a plurality of homogenizing arc tubes (22), each of the homogenizing arc tubes (22) is connected to the plurality of weighing containers (5) in a one-to-one correspondence via the multi-way pipe, the homogenizing arc tube (22) is connected to the inside of the air pipe (20), and a plurality of air holes (23) are evenly arranged on the outer surface of the homogenizing arc tube (22).

5. A gas concentration control device according to claim 4, characterized in that: The plurality of homogeneous arc-shaped tubes (22) are arranged on the outer surface of the gas passage tube (20) in a circle with the long axis of the gas passage tube (20) as the rotation center line.

6. A gas concentration control device according to claim 5, characterized in that: The homogenizing arc tube (22) is also provided with a plurality of blades (24), and the blades (24) are arranged between two adjacent air holes (23).