Transfer printing processing method and transfer printing processing tool for ceramic edge ring

Abstract

The invention discloses a transfer printing machining tool for a ceramic edge ring. The transfer printing machining tool comprises the following steps that S1, a first base, a part blank and first paraffin are heated, S2, the part blank is placed on a bonding boss, and S3, the whole part blank is moved to a cast iron platform to be rapidly cooled; s4, the part blank is subjected to first feature machining; s5, molten second paraffin is uniformly coated in the bonding clamping groove of the second base; s6, the first base and the part blank are reversely buckled on the second base; S7, first paraffin between the first base and the part blank is melted; step S8, separating the first base from the part blank; step S9, performing second feature processing on the part blank; s10, the part blank and the second base are separated; after one face is machined, the precision of the machined first face can be reserved, the second face is directly machined with the first face as the reference, and the machining precision of the second face is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of edge rings, and in particular to a transfer processing method of a ceramic edge ring and a transfer processing tooling thereof. Background Art

[0002] The edge ring (also called Edge Ring) is an important structural component in direct contact with the wafer in the wafer rapid thermal processing (RTP) equipment. It is made of ceramic and its main function is to support the wafer during the thermal treatment process of rapid temperature rise and fall. The key technologies such as the development and production of this component are still in the hands of foreign technology companies. Therefore, the ceramic edge rings used by domestic equipment manufacturers are still highly dependent on imports. With the rapid and vigorous development of the semiconductor market, the demand for the localization of ceramic edge rings is becoming more and more urgent.

[0003] Rapid thermal processing (RTP) equipment is a single-wafer heat treatment equipment that can quickly raise the temperature of the wafer to the temperature required by the process (200-1300°C) and can quickly cool it down, with a temperature rise / fall rate of 20-250°C / s.

[0004] Ceramics, as a structural and functional integrated material with various material advantages such as low density, high temperature resistance, oxidation resistance, high rigidity, and wide bandgap, is recognized as the most promising alternative material for the next generation of semiconductor wafers and core components. Its comprehensive performance indicators can well meet the production and preparation requirements of higher process chips, and gradually replace oxide ceramics and nitride ceramics in traditional structural components, becoming the preferred material in the chip preparation process.

[0005] Ceramic edge rings have the characteristics of thin walls, hardness, brittleness, and easy changeability after processing. As a thin-walled part, it is necessary to process one surface first and then turn it over, and process the second surface based on the first surface. It is difficult to fix thin-walled parts by clamping them with tooling. When the clamping force is too large, it will cause prestress in the parts before processing, which will cause further deformation of the parts and affect the dimensional accuracy after processing. At the same time, due to the existence of prestress, it is very easy to produce internal defects during the processing, resulting in the scrapping of parts. Therefore, the traditional processing of this part mostly adopts the clamping method of gluing or wax gluing. The gluing method has the advantages of strong bonding reliability and the workpiece is not easy to fall off during the processing, but due to the uncontrollable amount of glue. It often causes the workpiece to be unable to be completely glued flat, resulting in poor parallelism between the upper and lower surfaces of the processed workpiece. At the same time, the glue is often accompanied by shrinkage in all directions during the curing process. Therefore, wax gluing is often used for clamping and fixing.

[0006] The wax bonding method has the characteristics of a thin wax layer, which can ensure that the bottom surface of the workpiece fits the tooling as closely as possible, thereby improving the parallelism of the upper and lower surfaces of the workpiece. However, the current wax bonding processing also has certain risks. For example, after processing the first surface of the part, due to differences in material uniformity and the force of the tool on the surface of the part during processing, the part will often deform after being removed, causing the processed features to lose precision due to deformation, thereby affecting the processing of the second surface of the part. At the same time, after processing the first surface, the part is easily broken due to the adsorption force of the wax layer during the heating and removal process. Therefore, it is necessary to propose a method that can retain the accuracy of the first surface after processing and use it as a reference to directly process the second surface, while avoiding breakage when removing the part. Summary of the invention

[0007] In view of the above problems in the prior art, the present invention provides a transfer processing method and transfer processing tooling for a ceramic edge ring, which solves the problem of precision loss caused by deformation of the workpiece after the first surface of the existing ceramic edge ring is processed.

[0008] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0009] In one aspect, a method for using a transfer processing tool for a ceramic edge ring is provided, comprising the following steps:

[0010] Step S1, heating the first base, the part blank and the first paraffin wax, the heating temperature is the same as the melting point of the first paraffin wax, after the first paraffin wax is completely melted, the melted first paraffin wax is evenly coated on the bonding boss of the first base;

[0011] Step S2, placing the heated part blank on a bonding boss coated with melted first paraffin wax;

[0012] Step S3, placing the counterweight tooling on the part blank; then, moving the first base, the part blank and the counterweight tooling as a whole to the cast iron platform for rapid cooling;

[0013] Step S4: after cooling is completed, remove the counterweight tooling and perform the first feature processing on the part blank;

[0014] Step S5, heating the second base and the second paraffin wax, the heating temperature being the same as the melting point of the second paraffin wax, and after the second paraffin wax is completely melted, evenly coating the melted second paraffin wax in the bonding groove of the second base;

[0015] Step S6, the part blank after the first feature processing is completed and the first base are inverted on the second base, so that the part blank is embedded in the bonding groove, and then the whole part is moved to the cast iron platform for rapid cooling;

[0016] Step S7, heating the first base, the part blank and the second base after cooling to melt the first paraffin between the first base and the part blank;

[0017] Step S8, after the first paraffin wax melts, separate the first base and the part blank, and move the part blank and the second base to the cast iron platform for cooling;

[0018] Step S9, after the part blank and the second base are cooled, the first paraffin wax on the surface of the part blank is removed, and the part blank is subjected to a second feature processing;

[0019] Step S10: After the second feature processing is completed, the part blank and the second base are heated to melt the second paraffin wax, and after the second paraffin wax is melted, the part blank and the second base are separated.

[0020] The present invention uses two paraffin waxes with different melting points to bond two surfaces of a part blank of a thin-walled ceramic part to a first base and a second base respectively, so that after processing one surface, the accuracy of the processed first surface can be retained and the second surface can be directly processed based on the first surface, thereby ensuring the processing accuracy of the second surface.

[0021] On the other hand, a transfer processing tool for a ceramic edge ring and a method of using the same are provided, which include a first base and a second base; and a counterweight tool acting on the first base and the second base, wherein the first base and the second base are arranged relative to each other to clamp the part blank.

[0022] Furthermore, the upper surface of the first base is provided with a bonding boss for placing the part blank.

[0023] Furthermore, a first groove is provided in the middle of the first base, and a plurality of first mounting holes are evenly provided in a ring shape at the bottom of the first groove.

[0024] Furthermore, a second groove is provided in the middle of the second base, and a second mounting hole that matches the part blank is evenly provided in a ring shape at the bottom of the second groove.

[0025] Furthermore, a bonding groove for placing the part blank is provided on the top circumference of the second groove.

[0026] Furthermore, the first base and the second base are made of graphite material.

[0027] Furthermore, the counterweight tooling is made of metal material.

[0028] The invention discloses a transfer processing method of a ceramic edge ring and a transfer processing tool thereof, and the beneficial effects thereof are:

[0029] The present invention uses two paraffin waxes with different melting points to bond the two surfaces of the part blank of the thin-walled ceramic part to the first base and the second base respectively, so that after processing one surface, the accuracy of the first surface after processing can be retained and the second surface can be directly processed based on the first surface, thereby ensuring the processing accuracy of the second surface. At the same time, after the first feature processing is performed on one surface of the part blank of the edge ring, the problem of part breakage and damage during the removal process is avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 The present invention is a schematic structural diagram of a transfer processing tooling for a transfer processing method of a ceramic edge ring.

[0031] Figure 2 It is a schematic structural diagram of the first base of the present invention.

[0032] Figure 3 It is a structural schematic diagram of the second base of the present invention.

[0033] Figure 4 It is a schematic diagram of the structure of the first coordinate processing of the present invention.

[0034] Figure 5 It is a schematic diagram of the structure of the second coordinate processing of the present invention.

[0035] Among them, 1. first base; 11. first groove; 12. first mounting hole; 13. bonding boss; 2. second base; 21. second groove; 22. second mounting hole; 23. bonding slot; 3. part blank. DETAILED DESCRIPTION

[0036] The specific embodiments of the present invention are described to facilitate those skilled in the art to understand the present invention. However, it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, as long as various changes are within the spirit and scope of the present invention as defined and determined by the attached claims, these changes are obvious, and all inventions and creations utilizing the concept of the present invention are protected.

[0037] Example 1

[0038] This embodiment provides a transfer processing tool for a transfer processing method of a ceramic edge ring, the purpose of which is to solve the problem of precision loss caused by deformation after the workpiece is removed after the first surface of the existing ceramic edge ring is processed. Figure 1-Figure 5 , the specific structure of this embodiment will be described in detail below.

[0039] A transfer processing tool for a ceramic edge ring comprises a first base 1, a second base 2, and a counterweight tool acting on the first base 1 and the second base 2.

[0040] The first base 1 and the second base 2 are arranged opposite to each other to clamp the part blank 3 .

[0041] In this embodiment, the first base 1 and the second base 2 are both circular, and the first base 1 and the second base 2 are made of graphite material, such as high-purity graphite, isostatic graphite, etc., and the counterweight tooling is made of metal material, such as steel, cast iron or copper, etc. The part blank 3 can be first bonded to the first base 1 by paraffin wax for the fixed support of the first feature processing of the part blank 3, so as to perform the first feature processing on one side (A side) of the part blank 3.

[0042] Then, the part blank 3 and the first base 1 are inverted on the second base 2, and the part blank 3 and the first base 1 are separated, and the second base 2 is used as a fixed support to perform a second feature processing on the other side (side B) of the part blank 3. In this way, after processing one side, the accuracy of the first side after processing can be retained and the second side can be directly processed based on it, thereby ensuring the processing accuracy of the second side.

[0043] Specifically, the upper surface of the first base 1 is provided with a bonding boss 13 for placing the part blank 3. The shape and size of the bonding boss 13 match the part blank 3 and are used to support and bond the part blank 3.

[0044] A first groove 11 is formed in the middle of the first base 1, and a plurality of first mounting holes 12 are formed evenly in an annular shape at the bottom of the first groove 11. The first mounting holes 12 are arc-shaped and are used to connect and fix the first base 1 to the mounting table of an external machine tool.

[0045] Specifically, a second groove 21 is formed in the middle of the second base 2, and a second mounting hole 22 that matches the part blank 3 is formed evenly in an annular shape at the bottom of the second groove 21. The second mounting hole 22 is arc-shaped and is used for connecting and fixing the second base 2 to the external mounting platform.

[0046] The top circumference of the second groove 21 is provided with a bonding slot 23 for placing the part blank 3. The shape and size of the bonding slot 23 match the part blank 3 to ensure that the profile of the part blank 3 is completely fitted with the tooling.

[0047] Example 2

[0048] This embodiment provides a transfer processing method for a ceramic edge ring, the purpose of which is to solve the problem of precision loss caused by deformation after the workpiece is removed after the first surface of the ceramic edge ring is processed. Figure 1-Figure 5 , the specific steps in this embodiment will be described in detail below.

[0049] This embodiment provides a method for using a transfer processing tool for a ceramic edge ring, which includes the following steps:

[0050] Step S1, heating the first base 1, the part blank 3 and the first paraffin wax, the heating temperature is the same as the melting point of the first paraffin wax, after the paraffin wax is completely melted, the melted paraffin wax is evenly coated on the bonding boss 13 of the first base 1;

[0051] In this embodiment, a heating plate is used to heat the first base 1 and the part blank 3. The first paraffin wax uses a paraffin with a lower melting point, specifically a paraffin with a melting point of 40°. The temperature for heating the first base 1 and the part blank 3 is 40°. After the 40° first paraffin wax is heated until it is completely melted, the melted first paraffin wax is evenly coated on the mold surface of the bonding boss 13 of the first base 1.

[0052] Step S2, placing the heated part blank 3 on the bonding boss 13 coated with melted paraffin; when placing, the A side of the part blank 3 faces upward and the B side faces downward.

[0053] Step S3, placing the counterweight tooling on the part blank 3; then, moving the first base 1, the part blank 3 and the counterweight tooling as a whole to the cast iron platform for rapid cooling;

[0054] In this embodiment, the counterweight tooling can be a circular counterweight block that matches the shape of the part blank 3. Its specific weight can be set according to actual needs. Placing the counterweight tooling on the part blank 3 can squeeze out excess wax liquid between the part blank 3 and the bonding boss 13 while ensuring the uniformity of the wax layer thickness.

[0055] Step S4, after cooling is completed, remove the counterweight tooling and perform the first feature processing on one side (side A) of the part blank 3;

[0056] Step S5, heating the second base 2 and the second paraffin wax, the heating temperature being the same as the melting point of the second paraffin wax, and after the paraffin wax is completely melted, evenly coating the melted paraffin wax in the bonding groove 23 of the second base 2;

[0057] In this embodiment, the second paraffin wax uses a paraffin wax with a higher melting point, specifically a paraffin wax with a melting point of 80°. The temperature for heating the second base 2 is 80°, and the heating time is 3 to 5 minutes. After the 80° second paraffin wax is heated until it is completely melted, the melted second paraffin wax is evenly coated on the inside of the adhesive groove 23 of the second base 2.

[0058] Step S6, the part blank 3 and the first base 1 after the first feature processing are inverted on the second base 2, so that the part blank 3 is embedded in the bonding groove 23, that is, the part blank 3 is placed with the B side facing up and the A side facing down, and it is necessary to ensure that one side (A side) of the part blank 3 is completely embedded in the bonding groove 23 of the second base 2, and then it is moved as a whole to the cast iron platform for rapid cooling;

[0059] Step S7, heating the first base 1, the part blank 3 and the second base 2 after cooling to melt the first paraffin between the first base 1 and the part blank 3;

[0060] In this embodiment, the heating temperature for the overall heating of the first base 1, the part blank 3 and the second base 2 is not lower than the melting point of the first paraffin wax, but lower than the melting point of the second paraffin wax. This embodiment uses a first paraffin wax of 40° and a second paraffin wax of 80°, specifically between 40°-80°. The first base 1, the part blank 3 and the second base 2 are heated as a whole through a heating plate at a temperature of 40°, thereby melting the first paraffin wax between the first base 1 and the part blank 3.

[0061] Step S8: After the first paraffin wax melts, separate the first base 1 and the part blank 3, turn over the part blank 3 and the second base 2 and move them to the cast iron platform for cooling.

[0062] Step S9, after the cooling of the part blank 3 and the second base 2 is completed, xylene is used to remove the first paraffin on the surface of the part blank 3, and the other surface (surface B) of the part blank 3 is subjected to a second feature processing.

[0063] Step S10, after the second feature processing is completed, the part blank 3 and the second base 2 are heated to melt the second paraffin wax, and after the second paraffin wax is melted, the part blank 3 and the second base 2 are separated.

[0064] In this embodiment, the heating temperature for the overall heating of the part blank 3 and the second base 2 is not lower than the melting point of the second paraffin wax. This embodiment uses a second paraffin wax of 80°, specifically above 80°. The part blank 3 and the second base 2 are heated as a whole through a heating plate at a temperature of 80°, thereby melting the second paraffin wax between the part blank 3 and the second base 2. After the second paraffin wax melts, the part blank 3 and the second base 2 are separated.

[0065] Although the specific implementation of the invention is described in detail in conjunction with the drawings, it should not be understood as limiting the scope of protection of this patent. Within the scope described in the claims, various modifications and variations that can be made by those skilled in the art without creative work still fall within the scope of protection of this patent.

Claims

1. A transfer processing method for a ceramic edge ring, characterized in that: The following steps are involved: Step S1, heating the first base (1), the part blank (3) and the first paraffin wax, wherein the heating temperature is the same as the melting point of the first paraffin wax, and after the first paraffin wax is completely melted, the melted first paraffin wax is evenly coated on the bonding boss (13) of the first base (1); Step S2, placing the heated part blank (3) on the bonding boss (13) coated with melted first paraffin wax; Step S3, placing the counterweight fixture on the part blank (3); then, moving the first base (1), the part blank (3) and the counterweight fixture as a whole to the cast iron platform for rapid cooling; Step S4, after cooling is completed, remove the counterweight tooling and perform the first feature processing on the part blank (3); Step S5, heating the second base (2) and the second paraffin wax, the heating temperature being the same as the melting point of the second paraffin wax, and after the second paraffin wax is completely melted, evenly coating the melted second paraffin wax in the adhesive groove (23) of the second base (2); Step S6, the part blank (3) and the first base (1) after the first feature processing are inverted on the second base (2), so that the part blank (3) is embedded in the bonding groove (23), and then the whole part is moved to the cast iron platform for rapid cooling; Step S7, heating the first base (1), the part blank (3) and the second base (2) after cooling, so as to melt the first paraffin between the first base (1) and the part blank (3); Step S8, after the first paraffin wax is melted, the first base (1) and the part blank (3) are separated, and the part blank (3) and the second base (2) are moved to the cast iron platform for cooling; Step S9, after the cooling of the part blank (3) and the second base (2) is completed, the first wax on the surface of the part blank (3) is removed, and the part blank (3) is subjected to a second feature processing; Step S10: After the second feature processing is completed, the part blank (3) and the second base (2) are heated to melt the second paraffin wax, and after the second paraffin wax is melted, the part blank (3) and the second base (2) are separated.

2. A transfer processing tool for the transfer processing method of the ceramic edge ring according to claim 1, characterized in that: The invention comprises a first base (1) and a second base (2); and a counterweight tooling acting on the first base (1) and the second base (2); the first base (1) and the second base (2) are arranged relative to each other to clamp a part blank (3).

3. The transfer processing tooling of the transfer processing method of the ceramic edge ring according to claim 2, characterized in that: The upper surface of the first base (1) is provided with a bonding boss (13) for placing a part blank (3).

4. The transfer processing tooling of the transfer processing method of the ceramic edge ring according to claim 2, characterized in that: A first groove (11) is provided in the middle of the first base (1), and a plurality of first mounting holes (12) are evenly and evenly provided in a ring shape at the bottom of the first groove (11).

5. The transfer processing tooling of the transfer processing method of the ceramic edge ring according to claim 2, characterized in that: A second groove (21) is provided in the middle of the second base (2), and second mounting holes (22) that fit the part blank (3) are evenly provided in an annular shape at the bottom of the second groove (21).

6. The transfer processing tooling of the transfer processing method of the ceramic edge ring according to claim 5, characterized in that: A bonding groove (23) for placing the part blank (3) is provided on the top circumference of the second groove (21).

7. The transfer processing tooling of the transfer processing method of the ceramic edge ring according to claim 2, characterized in that: The first base (1) and the second base (2) are made of graphite material.

8. The transfer processing tooling of the transfer processing method of the ceramic edge ring according to claim 2, characterized in that: The material of the counterweight tooling is metal material.

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