A transfer processing method of a ceramic edge ring and a transfer processing tool thereof

Abstract

The application discloses a kind of processing frock of ceramic edge ring transfer, it includes the following steps: step S1, heating first base, part blank and first paraffin wax, step S2, part blank is placed on bonding boss, step S3, whole is moved to cast iron platform and is rapidly cooled;Step S4, first feature processing is carried out to part blank;Step S5, after melting, second paraffin wax is evenly coated in the bonding card slot of second base;Step S6, first base and part blank are inverted on second base, step S7, melt first paraffin wax between first base and part blank;Step S8, separate first base and part blank, step S9, second feature processing is carried out to part blank;Step S10, separate part blank and second base;The application can retain the accuracy of the first face after processing after processing one face and directly process the second face with it as datum, guarantee the processing accuracy of the second face.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of edge ring, and particularly relates to a ceramic edge ring transfer processing method and a transfer processing tool thereof. BACKGROUND

[0002] The edge ring (also known as Edge Ring) is an important structural part in contact with the wafer in the rapid thermal processing (RTP) equipment, which is made of ceramic and mainly functions to support the wafer in the rapid heating and cooling process. The key technologies such as development and production of the part are still controlled by foreign technology companies, so the ceramic edge ring used by the domestic equipment manufacturers still highly depends on import. With the rapid development of the semiconductor market, the demand for the localization development of the ceramic edge ring is becoming more and more urgent.

[0003] The rapid thermal processing (RTP) equipment is a single wafer thermal processing equipment, which can rapidly increase the temperature of the wafer to the required temperature (200-1300℃) and can rapidly decrease the temperature, and the temperature increasing / decreasing rate is 20-250℃ / s.

[0004] The ceramic is a kind of structural and functional integrated material with various material advantages such as low density, high temperature resistance, oxidation resistance, high stiffness and wide band gap, and is recognized as the most potential alternative material for the next generation of semiconductor wafers and core components. The comprehensive performance index can well meet the production and preparation requirements of higher process chips, and gradually replace the oxide ceramic and nitride ceramic in the traditional structural components, and become the preferred material in the chip preparation process.

[0005] The ceramic edge ring has the characteristics of thin wall, hard and brittle, and easy to change after processing. As a thin-walled part, one surface needs to be processed first and then turned over, and the second surface is processed based on the first surface. As a thin-walled part, it is difficult to fix by pressing with a tool. When the pressing force is too large, the part will generate pre-stress before processing, which will further deform the part and affect the size accuracy after processing. At the same time, due to the existence of pre-stress, internal defects are easily generated during processing, which will lead to the scrap of the part. Therefore, the traditional processing of the part usually adopts the clamping method of glue or wax. The glue sticking method has the advantages of strong adhesion reliability and the workpiece is not easy to fall off during processing, but the amount of glue is uncontrollable. Therefore, the workpiece cannot be completely stuck flat, which leads to poor parallelism of the upper and lower surfaces of the workpiece after processing. At the same time, the glue is accompanied by shrinkage in various directions during the curing process. Therefore, the wax sticking method is usually used for clamping and fixing.

[0006] Wax sticking has the characteristics that the wax layer is thin, the bottom surface of the workpiece can be as close as possible to the tooling, and the parallelism of the upper and lower surfaces of the workpiece can be improved. However, the wax sticking process also has some risks, for example, after the first surface of the part is machined, due to the difference in material uniformity and the force of the tool acting on the surface of the part during machining, the part will deform after being taken out, resulting in loss of precision of the machined features due to deformation, thereby affecting the machining of the second surface. At the same time, after the first surface is machined, the part is taken out after heating, and the part is prone to breakage due to the adsorption force of the wax layer. Therefore, a method is needed that can retain the precision of the first surface after machining and directly machine the second surface based on the first surface, while avoiding breakage when the part is taken out. SUMMARY

[0007] To solve the problem of precision loss caused by deformation of the workpiece after the first surface of the ceramic edge ring is machined, the present application provides a transfer machining method for a ceramic edge ring and a transfer machining tool for the same.

[0008] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows:

[0009] On the one hand, a method for using a transfer machining tool for a ceramic edge ring is provided, which includes the following steps:

[0010] Step S1, heat the first base, the part blank and the first paraffin wax, the heating temperature is the same as the melting point of the first paraffin wax, after the first paraffin wax is completely melted, the melted first paraffin wax is evenly coated on the bonding boss of the first base;

[0011] Step S2, place the heated part blank on the bonding boss coated with the melted first paraffin wax;

[0012] Step S3, place the counterweight tool on the part blank; then, move the first base, the part blank and the counterweight tool as a whole to the cast iron platform for rapid cooling;

[0013] Step S4, after cooling is completed, remove the counterweight tool and perform first feature machining on the part blank;

[0014] Step S5, heat the second base and the second paraffin wax, the heating temperature is the same as the melting point of the second paraffin wax, after the second paraffin wax is completely melted, the melted second paraffin wax is evenly coated in the bonding slot of the second base;

[0015] Step S6, place the first base and the part blank after the first feature machining is completed upside down on the second base, so that the part blank is embedded in the bonding slot, and then move the whole to the cast iron platform for rapid cooling;

[0016] Step S7, heating the first base, the part blank and the second base after the cooling is completed, melting the first paraffin between the first base and the part blank;

[0017] Step S8, after the first paraffin is melted, separating the first base and the part blank, and moving the part blank and the second base to the cast iron platform for cooling;

[0018] Step S9, after the part blank and the second base are cooled, removing the first paraffin on the surface of the part blank, and performing second feature processing on the part blank;

[0019] Step S10, after the second feature processing is completed, heating the part blank and the second base to melt the second paraffin, and separating the part blank and the second base after the second paraffin is melted.

[0020] The present application uses two paraffins with different melting points to adhere two surfaces of the part blank of the thin-wall ceramic part to the first base and the second base respectively, so that after processing one surface, the precision of the first surface after processing can be preserved and used as a reference to directly process the second surface, thereby ensuring the processing precision of the second surface.

[0021] On the other hand, a ceramic edge ring transfer processing tool and a method for using the same are provided, which include a first base and a second base, and a counterweight tool acting on the first base and the second base, the first base and the second base are oppositely arranged to clamp the part blank.

[0022] Further, the upper surface of the first base is provided with an adhesive boss for placing the part blank.

[0023] Further, a first recess is formed in the middle of the first base, and a plurality of first mounting holes are uniformly arranged in the bottom of the first recess in a ring shape.

[0024] Further, a second recess is formed in the middle of the second base, and a plurality of second mounting holes that match the part blank are uniformly arranged in the bottom of the second recess in a ring shape.

[0025] Further, an adhesive clamping groove for placing the part blank is arranged on the top of the second recess in a circumferential direction.

[0026] Further, the first base and the second base are made of graphite material.

[0027] Further, the counterweight tool is made of metal material.

[0028] The present application discloses a ceramic edge ring transfer processing method and a transfer processing tool, which have the following beneficial effects:

[0029] The present application sticks two faces of a part blank of a thin-wall ceramic part to a first base and a second base respectively by using two paraffins with different melting points, so that the precision of the first face after processing can be kept and used as a reference to directly process the second face after processing the first face, ensuring the processing precision of the second face, and avoiding the problem of part breakage or damage during the taking process after the first feature processing of the part blank of the edge ring. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 A structure diagram of a transfer processing tool for a ceramic edge ring transfer processing method of the present application.

[0031] Figure 2 A structure diagram of a first base of the present application.

[0032] Figure 3 A structure diagram of a second base of the present application.

[0033] Figure 4 A structure diagram of the present application during first coordinate processing.

[0034] Figure 5 A structure diagram of the present application during second coordinate processing.

[0035] Wherein, 1, first base; 11, first groove; 12, first mounting hole; 13, bonding boss; 2, second base; 21, second groove; 22, second mounting hole; 23, bonding clamping groove; 3, part blank. DETAILED DESCRIPTION

[0036] The specific embodiments of the present application are described in order to facilitate the understanding of the present application for those skilled in the art, but it should be clear that the present application is not limited to the scope of the specific embodiments, and for those skilled in the art, as long as various changes are within the spirit and scope of the present application defined and determined by the appended claims, these changes are obvious, and all the inventions using the concept of the present application are within the scope of protection.

[0037] Example 1

[0038] The present embodiment provides a transfer processing tool for a ceramic edge ring transfer processing method, which aims to solve the problem of precision loss caused by deformation after the workpiece is taken out after processing the first face of the existing ceramic edge ring, and the reference Figures 1-5 will be described in detail below.

[0039] A transfer processing tool for a ceramic edge ring, which comprises a first base 1 and a second base 2, and a counterweight tool acting on the first base 1 and the second base 2.

[0040] Wherein, the first base 1 and the second base 2 are oppositely arranged to clamp the part blank 3.

[0041] In this embodiment, the first base 1 and the second base 2 are both circular, and the material of the first base 1 and the second base 2 is graphite material, such as high-purity graphite, isostatic graphite, etc., and the material of the counterweight tooling is metal material, such as steel, cast iron or copper, etc. The part blank 3 can be first bonded to the first base 1 by paraffin for fixed support for the first time feature processing of the part blank 3, so as to perform the first time feature processing on one side (A side) of the part blank 3.

[0042] Then, the part blank 3 and the first base 1 are inverted on the second base 2, and the part blank 3 and the first base 1 are separated, and the second base 2 is used as a fixed support to perform the second time feature processing on the other side (B side) of the part blank 3, so that after processing one side, the accuracy of the processed first side can be preserved and used as a reference to directly process the second side, thereby ensuring the processing accuracy of the second side.

[0043] Specifically, the upper surface of the first base 1 is provided with a bonding boss 13 for placing the part blank 3. The bonding boss 13 is matched in shape and size with the part blank 3, and is used to support and bond the part blank 3.

[0044] A first recess 11 is formed in the middle of the first base 1, and a plurality of first mounting holes 12 are uniformly formed in the bottom of the first recess 11 in a ring shape. The first mounting holes 12 are arc-shaped, and are used to connect and fix the first base 1 with the mounting table of the external machine tool.

[0045] Specifically, a second recess 21 is formed in the middle of the second base 2, and a plurality of second mounting holes 22 matched with the part blank 3 are uniformly formed in the bottom of the second recess 21 in a ring shape. The second mounting holes 22 are arc-shaped, and are used to connect and fix the second base 2 with the mounting table.

[0046] A bonding clamping groove 23 for placing the part blank 3 is arranged on the top of the second recess 21 in a circumferential direction. The bonding clamping groove 23 is matched in shape and size with the part blank 3, so as to ensure that the profile of the part blank 3 is completely matched with the tooling.

[0047] Embodiment 2

[0048] The embodiment provides a transfer processing method of a ceramic edge ring, which aims to solve the problem of accuracy loss caused by deformation of a workpiece after processing the first side of the ceramic edge ring, and the method comprises the following steps: Figures 1-5 The specific steps in the embodiment will be described in detail below.

[0049] The embodiment provides a use method of a transfer processing tooling of a ceramic edge ring, which comprises the following steps:

[0050] Step S1, heat the first base 1, the part blank 3 and the first paraffin wax, the heating temperature is the same as the melting point of the first paraffin wax, after the paraffin wax is completely melted, the melted paraffin wax is evenly coated on the bonding boss 13 of the first base 1;

[0051] In this embodiment, the first base 1 and the part blank 3 are heated by a heating plate, the first paraffin wax is a paraffin wax with a lower melting point, specifically a paraffin wax with a melting point of 40°, and the temperature for heating the first base 1 and the part blank 3 is 40°, after the first paraffin wax at 40° is heated until completely melted, the melted first paraffin wax is evenly coated on the profile of the bonding boss 13 of the first base 1.

[0052] Step S2, place the heated part blank 3 on the bonding boss 13 coated with the melted paraffin wax; when placed, the A face of the part blank 3 faces upward and the B face faces downward.

[0053] Step S3, place the counterweight tooling on the part blank 3; then, move the first base 1, the part blank 3 and the counterweight tooling as a whole to the cast iron platform for rapid cooling;

[0054] In this embodiment, the counterweight tooling can be a circular counterweight block that fits the shape of the part blank 3, and the specific weight can be set according to actual needs, placing the counterweight tooling on the part blank 3 can squeeze out the excess wax liquid between the part blank 3 and the bonding boss 13, while ensuring the uniformity of the wax layer thickness.

[0055] Step S4, after cooling is completed, remove the counterweight tooling and perform the first feature processing on one side (A face) of the part blank 3;

[0056] Step S5, heat the second base 2 and the second paraffin wax, the heating temperature is the same as the melting point of the second paraffin wax, after the paraffin wax is completely melted, the melted paraffin wax is evenly coated in the bonding clamping groove 23 of the second base 2;

[0057] In this embodiment, the second paraffin wax is a paraffin wax with a higher melting point, specifically a paraffin wax with a melting point of 80°, and the temperature for heating the second base 2 is 80°, the heating time is 3-5 min, after the second paraffin wax at 80° is heated until completely melted, the melted second paraffin wax is evenly coated in the bonding clamping groove 23 of the second base 2.

[0058] Step S6, place the part blank 3 after the first feature processing and the first base 1 upside down on the second base 2, so that the part blank 3 is embedded in the bonding clamping groove 23, that is, the B face of the part blank 3 faces upward and the A face faces downward, it is necessary to ensure that one side (A face) of the part blank 3 is completely embedded in the bonding clamping groove 23 of the second base 2, then move the whole to the cast iron platform for rapid cooling.

[0059] Step S7, heating the first base 1, the part blank 3 and the second base 2 after the cooling is completed, melting the first paraffin between the first base 1 and the part blank 3;

[0060] In the embodiment, the heating temperature of the overall heating of the first base 1, the part blank 3 and the second base 2 is not lower than the melting point of the first paraffin and lower than the melting point of the second paraffin, the first paraffin of 40° and the second paraffin of 80° are used in the embodiment, specifically between 40°-80°, the temperature of 40° is used to heat the first base 1, the part blank 3 and the second base 2 as a whole by the heating plate, so as to melt the first paraffin between the first base 1 and the part blank 3.

[0061] Step S8, after the first paraffin is melted, separating the first base 1 and the part blank 3, turning over the part blank 3 and the second base 2 and moving to the cast iron platform to cool.

[0062] Step S9, after the part blank 3 and the second base 2 are cooled, using xylene to remove the first paraffin on the surface of the part blank 3, and performing the second feature processing on the other surface (B surface) of the part blank 3.

[0063] Step S10, after the second feature processing is completed, heating the part blank 3 and the second base 2 to melt the second paraffin, and separating the part blank 3 and the second base 2 after the second paraffin is melted.

[0064] In the embodiment, the heating temperature of the overall heating of the part blank 3 and the second base 2 is not lower than the melting point of the second paraffin, the second paraffin of 80° is used in the embodiment, specifically above 80°, the temperature of 80° is used to heat the part blank 3 and the second base 2 as a whole by the heating plate, so as to melt the second paraffin between the part blank 3 and the second base 2, and separating the part blank 3 and the second base 2 after the second paraffin is melted.

[0065] Although the specific embodiments of the application are described in detail with reference to the accompanying drawings, it should not be understood as limiting the scope of protection of the patent. Various modifications and variations made by those skilled in the art within the scope described in the claims are still within the scope of protection of the patent.

Claims

1. A transfer processing method of a ceramic edge ring, characterized by, The method comprises the following steps: Step S1, heating the first base (1), the part blank (3) and the first paraffin wax, the heating temperature is the same as the melting point of the first paraffin wax, after the first paraffin wax is completely melted, the melted first paraffin wax is evenly coated on the bonding boss (13) of the first base (1); Step S2, placing the heated part blank (3) on the bonding boss (13) coated with the melted first paraffin wax; Step S3, placing the counterweight tool on the part blank (3); then, the first base (1), the part blank (3) and the counterweight tool are integrally moved to the cast iron platform for rapid cooling; Step S4, after the cooling is completed, the counterweight tool is removed, and the part blank (3) is subjected to first feature processing; Step S5, heating the second base (2) and the second paraffin wax, the heating temperature is the same as the melting point of the second paraffin wax, after the second paraffin wax is completely melted, the melted second paraffin wax is evenly coated in the bonding clamping groove (23) of the second base (2); Step S6, the part blank (3) and the first base (1) after the first feature processing are inverted on the second base (2), so that the part blank (3) is embedded in the bonding clamping groove (23), and then the second base (2) is integrally moved to the cast iron platform for rapid cooling; Step S7, heating the first base (1), the part blank (3) and the second base (2) after the cooling is completed, melting the first paraffin wax between the first base (1) and the part blank (3); Step S8, after the first paraffin wax is melted, the first base (1) and the part blank (3) are separated, and the part blank (3) and the second base (2) are moved to the cast iron platform for cooling; Step S9, after the part blank (3) and the second base (2) are cooled, the first paraffin wax on the surface of the part blank (3) is removed, and the part blank (3) is subjected to second feature processing; Step S10, after the second feature processing is completed, the part blank (3) and the second base (2) are heated to melt the second paraffin wax, and after the second paraffin wax is melted, the part blank (3) and the second base (2) are separated.

2. A transfer processing tool for the transfer processing method of the ceramic edge ring according to claim 1, characterized by: The first base (1) and the second base (2) are oppositely arranged to clamp the part blank (3).

3. The transfer processing tool for the transfer processing method of a ceramic edge ring according to claim 2, characterized by: The upper surface of the first base (1) is provided with a bonding boss (13) for placing the part blank (3).

4. The transfer processing tool for the transfer processing method of a ceramic edge ring according to claim 2, characterized by: The middle part of the first base (1) is provided with a first recess (11), and the bottom of the first recess (11) is uniformly provided with a plurality of first mounting holes (12) in a ring shape.

5. The transfer processing tool for the transfer processing method of the ceramic edge ring according to claim 2, characterized by: The middle part of the second base (2) is provided with a second recess (21), and the bottom of the second recess (21) is uniformly provided with a second mounting hole (22) in a ring shape.

6. The transfer processing tool for the transfer processing method of the ceramic edge ring according to claim 5, characterized by: The top of the second recess (21) is provided with a bonding clamping groove (23) for placing the part blank (3).

7. The transfer processing tool for the transfer processing method of the ceramic edge ring according to claim 2, characterized by: The materials of the first base (1) and the second base (2) are graphite materials.

8. The transfer processing tool for the transfer processing method of the ceramic edge ring according to claim 2, characterized by: The material of the counterweight tool is a metal material.

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