Push-pull turntable for vacuum coating

Abstract

The invention discloses a push-pull turntable for vacuum coating. The push-pull turntable comprises a push-pull trolley, a movable turntable placed on the push-pull trolley, a coating platform and a positioning assembly arranged in the coating platform, the push-pull trolley comprises a bottom plate, at least two first guide rails arranged on the bottom plate in parallel, and at least two butt joint blocks rotationally arranged at one ends of the first guide rails correspondingly. The movable rotating disc comprises a movable base and a rotating disc arranged on the base. The coating platform comprises a supporting plate and at least two second guide rails arranged in the supporting plate in parallel. According to the push-and-pull turntable for vacuum coating, the push-and-pull trolley is in butt joint with the coating platform by overturning the butt-joint block, so that the movable turntable is pushed to move from the push-and-pull trolley and enter the coating platform. According to the push-pull turntable for vacuum coating, the butt joint precision and the butt joint efficiency are greatly improved, and the coating efficiency is high.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating, in particular to a push-pull turntable for vacuum coating. Background Art

[0002] The process of vacuum coating refers to a thin film structure with a single layer thickness or multiple layers of thickness deposited on the surface of a substrate by heating evaporation or by accelerated ion bombardment sputtering in a vacuum environment. This process technology has developed very rapidly in recent years, and now it has been widely used in many fields. In the traditional process, the operator needs to place the turntable vertically in the coating position, so there will be a situation where the turntable is not placed in place, and the center axis of the turntable on the turntable is not properly docked with the rotating motor, thereby affecting the coating efficiency. And the coating technology in the form of mobile track docking, such as Chinese patent CN202110359064.0 discloses a continuous vacuum coating production line and method for optical thin film components, which includes a coating chamber, a front conveying track, a rear conveying track, an electric mobile cart and a coating rack; through the setting of the front conveying track, the load-bearing track and the rear conveying track, the track docking and separation can be realized, and the automatic movement and transfer of the coating rack is completed when docking, and the coating process of the components on the coating rack is completed through the coating chamber when separating. It uses mechanical drive to move the track and complete the docking, but the cost of mechanical drive is high, and the mechanical drive must debug the docking position after each coating is completed, which makes the docking extremely troublesome and the docking efficiency is not high. Summary of the invention

[0003] In view of this, the present invention provides a push-pull turntable for vacuum coating to solve the above problems.

[0004] A push-pull turntable for vacuum coating, comprising a push-pull cart, a movable turntable placed on the push-pull cart, a coating platform, and a positioning assembly arranged in the coating platform. The push-pull cart comprises a bottom plate, at least two first guide rails arranged in parallel on the bottom plate, and at least two docking blocks respectively arranged at one end of the first guide rails for rotation. The movable turntable comprises a movable base and a turntable arranged on the base. The coating platform comprises a support plate, at least two second guide rails arranged in parallel in the support plate, a rotating motor arranged on one side of the second guide rail, and a conductive seat arranged on one side of the rotating motor. A guide piece is protruding from one side of the bottom plate toward the coating platform, and the side of the guide piece away from the bottom plate is in the shape of a circular arc concave. A guide groove is provided between the support plate and the vacuum furnace, and one side of the guide groove is in the shape of a circular arc convex. A card block is protruding from the side of the docking block away from the rotation point between the docking block and the first guide rail, and a card slot is provided at one end of the second guide rail toward the first guide rail, and the card block matches the card slot. A conductive sheet is protruding from the side of the mobile base toward the coating platform, and the thickness of the conductive sheet gradually decreases from the end close to the mobile base toward the end away from the mobile base. The conductive seat is fixedly provided on the support plate, and a conductive column is fixedly provided on the side of the support plate away from the conductive seat and corresponding to the position of the conductive seat. Two curved power-carrying sheets are arranged in the conductive seat, and the two power-carrying sheets are in contact with each other in a gap, and the curved parts thereof are arranged facing each other.

[0005] Furthermore, the length direction of the first guide rail is parallel to the arrangement direction of the bottom plate and the guide plates, and the distance between the two second guide rails is equal to the distance between the two first guide rails.

[0006] Furthermore, the width of the movable base corresponds to the distance between the two first guide rails, and at least four rollers are arranged on both sides of the movable base, and the four rollers are respectively placed on the two first guide rails.

[0007] Furthermore, a handle is provided on a side of the movable base away from the conductive sheet.

[0008] Furthermore, there is a plane ball bearing between the movable base and the turntable, and two side surfaces of the plane ball bearing are respectively in contact with the movable base and the turntable.

[0009] Furthermore, at least two stoppers are provided on a side of the support plate away from the guide groove.

[0010] Furthermore, a turntable center axis is fixedly provided on the middle section of the turntable, and the end of the turntable center axis away from the turntable protrudes from the movable base, and a convex strip is provided on the end face of the protruding part. The output end of the rotating motor protrudes from the support plate, and a long strip-shaped through groove is opened at the end of the output end of the rotating motor.

[0011] Furthermore, the positioning assembly includes a positioning pin seat fixedly arranged on one side of the second guide rail, and a positioning pin arranged on the positioning pin seat.

[0012] Compared with the prior art, the push-pull turntable for vacuum coating provided by the present invention can dock the push-pull cart with the coating platform by flipping the docking block, so that the first guide rail, the docking block, and the track on the second guide rail form the same track, so as to push the movable turntable to move from the push-pull cart and enter the coating platform. And the two sides of the conductive sheet can fully contact with the two energized sheets, thereby ensuring the smoothness of the current and improving the coating efficiency. The push-pull turntable for vacuum coating greatly improves the docking accuracy and efficiency, and the coating efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic structural diagram of a push-pull turntable for vacuum coating provided by the present invention.

[0014] Figure 2 for Figure 1 A schematic diagram of the structure of a push-pull car provided on a push-pull turntable for vacuum coating.

[0015] Figure 3 for Figure 1 Schematic diagram of the mechanism of the movable turntable of the push-pull turntable for vacuum coating.

[0016] Figure 4 for Figure 1 Schematic diagram of the exploded view of the coating platform and vacuum furnace of the push-pull turntable for vacuum coating.

[0017] Figure 5 for Figure 1 A schematic cross-sectional view of a coating platform and a vacuum furnace of a push-pull turntable for vacuum coating. DETAILED DESCRIPTION

[0018] The specific embodiments of the present invention are further described in detail below. It should be understood that the description of the embodiments of the present invention herein is not intended to limit the protection scope of the present invention.

[0019] like Figure 1As shown, it is a schematic diagram of the structure of the push-pull turntable for vacuum coating provided by the present invention. The push-pull turntable for vacuum coating includes a push-pull cart 10, a mobile turntable 20 placed on the push-pull cart 10, a coating platform 30, and a positioning component 40 arranged in the coating platform 30. It can be imagined that the push-pull turntable for vacuum coating also includes some other functional modules, such as a power module, a vacuum furnace device, etc., which are technologies well known to those skilled in the art and will not be described one by one here.

[0020] Please also read Figures 2 to 5 It should be noted that the coating platform 30 is arranged inside a vacuum furnace device, and the push-pull cart 10 is located on one side of the coating platform 30. When the movable turntable 20 is placed on the push-pull cart 10, the operator pushes the push-pull cart 10 and docks it with the coating platform 30, thereby pushing the movable turntable 20 onto the coating platform 30 to perform coating operations on the products to be plated placed on the movable turntable 20.

[0021] The push-pull cart 10 includes a bottom plate 11 , at least two first guide rails 12 arranged in parallel on the bottom plate 11 , and at least two docking blocks 13 rotatably arranged at one end of the first guide rails 12 .

[0022] A guide piece 14 is protruding from one side of the bottom plate 11 toward the coating platform 30, and the side of the guide piece 14 away from the bottom plate 11 is in an arc-shaped concave shape. The guide piece 14 is used to cooperate with a part of the coating platform 30 to limit the movement of the push-pull vehicle 10, and the specific cooperation method will be described below.

[0023] The length direction of the first guide rail 12 is parallel to the arrangement direction of the base plate 11 and the guide plate 14 , so that when the guide plate 14 plays a limiting function, the first guide rail 12 can be docked with part of the coating platform 30 through the docking block 13 , thereby transferring the movable turntable 20 .

[0024] The docking block 13 is disposed at one end of the first guide rail 12 close to the guide piece 14, and one side of the docking block 13 is rotatably disposed with the first guide rail 12. The docking block 13 has a track identical to that of the first guide rail 12, so that after the docking block 13 is turned over, the track on the docking block 13 is docked with the track on the first guide rail 12 to prevent the movement of the movable turntable 20 from being affected.

[0025] The docking block 13 is provided with a clamping block 15 protruding from one side away from the rotation point between the docking block 13 and the first guide rail 12. The clamping block 15 is clamped in part of the coating platform 30, thereby completing the docking operation of the docking block 13 and positioning it. The specific clamping situation will be described below.

[0026] The movable turntable 20 includes a movable base 21 and a turntable 22 disposed on the base 21 .

[0027] The width of the movable base 21 corresponds to the distance between the two first guide rails 12, and at least four rollers 23 are arranged on both sides of the movable base 21. The four rollers 23 are respectively placed on the two first guide rails 12 to push the movable base 21 so that the movable base 21 can move along the length direction of the first guide rail 12.

[0028] The moving base 21 moves in the direction toward the coating platform 30. A conductive sheet 24 is provided on one side of the moving base 12 facing the coating platform 30. The thickness of the conductive sheet 24 gradually decreases from the end close to the moving base 21 toward the end away from the moving base 21. The conductive sheet 24 is used to cooperate with a part of the coating platform 30, thereby playing a conductive role for the moving base 21 to complete the coating operation. The specific cooperation method will be described below.

[0029] A handle 25 is provided on a side of the movable base 21 away from the conductive sheet 24 , and the handle 25 is used to facilitate operators to push and pull the movable base 12 .

[0030] A pin hole 26 is provided on one side surface of the mobile base 21 close to the handle 25. The pin hole 26 is used to cooperate with the positioning assembly 40 to complete the positioning operation of the mobile base 21. The specific cooperation method will be described below.

[0031] There is a plane ball bearing 27 between the movable base 21 and the turntable 22, and the two side surfaces of the plane ball bearing 27 are respectively in contact with the movable base 21 and the turntable 22, so that the turntable 22 can rotate freely on the movable base 21 to ensure the uniformity of the coating and improve the coating quality.

[0032] A rotating frame central shaft 28 is fixedly provided in the middle section of the rotating disk 22, and the central axis of the rotating frame central shaft 28 coincides with the central axis of the rotating disk 22. The end of the rotating frame central shaft 28 away from the rotating disk 22 protrudes from the moving base 21, and a convex strip 29 is provided on the end surface of the protruding portion, and the convex strip 29 cooperates with a part of the coating platform 30 to complete the rotation of the rotating disk 22, and the specific cooperation method will be described below.

[0033] The coating platform 30 includes a support plate 31 , at least two second guide rails 32 arranged in parallel in the support plate 31 , a rotating motor 33 arranged on one side of the second guide rail 32 , and a conductive seat 34 arranged on one side of the rotating motor 33 .

[0034] The support plate 31 is arranged in the vacuum furnace, and at least six insulating ceramic sheets 311 are laid between the lower surface of the support plate 31 and the vacuum furnace. The six insulating ceramic sheets 311 are used to insulate the support plate 31 and the vacuum furnace during the coating operation, so as to prevent the support plate 31 and the vacuum furnace from being electrically connected and affecting the coating operation. The vacuum furnace has a guide groove 35 on one side facing the support plate 31, and one side of the guide groove 35 is convex in an arc shape, which corresponds to the guide sheet 14. When the guide sheet 14 is inserted into the guide groove 35, the arc-shaped parts of the two are butted against each other, thereby assisting the push-pull vehicle 10 to quickly find the docking position to improve the docking efficiency.

[0035] The distance between the two second guide rails 32 is equal to the distance between the two first guide rails 12. The second guide rail 32 is provided with a slot 36 at one end facing the first guide rail 12, and the slot 36 corresponds to the block 15. When the push-pull cart 10 and the coating platform 30 are docked, the push-pull cart 10 is first pushed to clamp the guide piece 14 into the guide slot 15 to find the docking position of the two, and then the docking block 13 is turned over to clamp the block 15 into the slot 36. At this time, the first guide rail 12, the docking block 13, and the tracks on the second guide rail 32 form the same track, thus completing the docking operation, and completing the positioning function under the clamping of the block 15, thereby pushing the movable turntable 20 to enter the coating platform 30.

[0036] At least two stoppers 37 are disposed on one side of the support plate 31 away from the guide groove 35 , and the two stoppers 37 are used to block the movable turntable 20 to limit it at the coating position.

[0037] A circle of first insulating pads 331 is connected between the rotating motor 33 and the vacuum furnace to enhance the insulation of the furnace body. The output end of the rotating motor 33 protrudes from the support plate 31, and a long through slot 38 is provided at the end of the output end of the rotating motor 33. When the movable turntable 20 moves to the coating position, the convex strip 29 on the central axis 28 of the rotating frame is clamped in the through slot 38. In this way, under the drive of the rotating motor 33, the rotating disk 22 can be driven to rotate slowly through the central axis 28 of the rotating frame, thereby improving its coating efficiency during the coating operation.

[0038] The conductive seat 34 is fixedly arranged on the support plate 31, and a conductive column 39 is fixedly arranged on the side of the support plate 31 away from the conductive seat 34 and corresponding to the position of the conductive seat 34. The output end of the conductive column 39 passes through the vacuum furnace and is connected to the support plate 31, and the input end of the conductive column is connected to an external power supply, so that the conductive seat 34 is energized through the support plate 31, and the movable turntable 20 is energized through the conductive sheet 24, so as to complete the coating operation. A circle of second insulating pads 391 is connected between the conductive seat 34 and the vacuum furnace to enhance the insulation of the furnace body, and the first and second insulating pads 331 and 391 are both made of polytetrafluoroethylene. Two curved power-carrying sheets 341 are arranged in the conductive seat 34. The two power-carrying sheets 341 are in contact with each other with a gap and the curved parts thereof are arranged facing each other. When the movable turntable 20 reaches the coating position, the conductive sheet 24 is inserted between the two power-carrying sheets 341. Since the thickness of the conductive sheet 24 gradually decreases from the end close to the movable base 21 toward the end away from the movable base 21, the two sides of the conductive sheet 24 can fully contact with the two power-carrying sheets 341, thereby ensuring the smoothness of the current and improving the coating efficiency.

[0039] The positioning assembly 40 includes a positioning pin seat 41 fixedly disposed on one side of the second guide rail 32 , and a positioning pin 42 disposed on the positioning pin seat 41 .

[0040] When the movable turntable 20 reaches the coating position, the through hole on the positioning pin seat 41 corresponds to the pin hole 26 on the movable base 21, so that the positioning pin 42 is inserted into the through hole on the positioning pin seat 41 and the pin hole 26 on the movable base 21 to position the movable base 21 in the coating platform 30, thereby completing the positioning operation.

[0041] Compared with the prior art, the push-pull turntable for vacuum coating provided by the present invention can turn over the docking block 13 to dock the push-pull cart 10 with the coating platform 30, so that the first guide rail 12, the docking block 13, and the track on the second guide rail 32 form the same track, so as to push the movable turntable 20 to move from the push-pull cart 10 and enter the coating platform 30. And the two sides of the conductive sheet 24 can fully contact with the two power-on sheets 341, thereby ensuring the smoothness of the current and improving the coating efficiency. The push-pull turntable for vacuum coating greatly improves the docking accuracy and docking efficiency, and the coating efficiency is high.

[0042] The above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modification, equivalent substitution or improvement within the spirit of the present invention is included in the scope of the claims of the present invention.

Claims

1. A push-pull turntable for vacuum coating, characterized in that: The push-pull turntable for vacuum coating includes a push-pull cart, a movable turntable placed on the push-pull cart, a coating platform, and a positioning assembly arranged in the coating platform, the push-pull cart includes a bottom plate, at least two first guide rails arranged in parallel on the bottom plate, and at least two docking blocks respectively rotatably arranged at one end of the first guide rails, the movable turntable includes a movable base, a turntable arranged on the base, the coating platform includes a support plate, at least two second guide rails arranged in parallel in the support plate, a rotating motor arranged on one side of the second guide rail, and a conductive seat arranged on one side of the rotating motor, the bottom plate is protruding toward one side of the coating platform and is provided with a guide sheet, the guide sheet is away from one side of the bottom plate The side is concave inwardly in an arc shape, and a guide groove is provided between the support plate and the vacuum furnace, and one side of the guide groove is convex outwardly in an arc shape. A clamping block is protruded from the side of the docking block away from the rotation point between the docking block and the first guide rail, and a clamping slot is provided at one end of the second guide rail toward the first guide rail, and the clamping block matches the clamping slot. A conductive sheet is protruded from the side of the movable base toward the coating platform, and the thickness of the conductive sheet gradually decreases from the end close to the movable base toward the end away from the movable base. The conductive seat is fixedly provided on the support plate, and a conductive column is fixedly provided on the side of the support plate away from the conductive seat and corresponding to the position of the conductive seat. Two curved power-carrying sheets are arranged in the conductive seat, and the two power-carrying sheets are in contact with each other in a gap, and their curved parts are arranged facing each other.

2. The push-pull turntable for vacuum coating according to claim 1, characterized in that: The length direction of the first guide rail is parallel to the arrangement direction of the bottom plate and the guide plates, and the distance between the two second guide rails is equal to the distance between the two first guide rails.

3. The push-pull turntable for vacuum coating according to claim 1, characterized in that: The width of the movable base corresponds to the distance between the two first guide rails, and at least four rollers are arranged on both sides of the movable base, and the four rollers are respectively placed on the two first guide rails.

4. The push-pull turntable for vacuum coating according to claim 1, characterized in that: A handle is arranged on a side of the movable base away from the conductive sheet.

5. The push-pull turntable for vacuum coating according to claim 1, characterized in that: There is a plane ball bearing between the movable base and the turntable, and two side surfaces of the plane ball bearing are respectively in contact with the movable base and the turntable.

6. The push-pull turntable for vacuum coating according to claim 1, characterized in that: At least two stoppers are arranged on one side of the support plate away from the guide groove.

7. The push-pull turntable for vacuum coating according to claim 1, characterized in that: A rotating frame center axis is fixedly provided on the middle section of the turntable, and the end of the rotating frame center axis away from the turntable protrudes from the movable base, and a convex strip is provided on the end face of the protruding part. The output end of the rotating motor protrudes from the support plate, and a long strip-shaped through groove is opened at the end of the output end of the rotating motor.

8. The push-pull turntable for vacuum coating according to claim 1, characterized in that: The positioning assembly includes a positioning pin seat fixedly arranged on one side of the second guide rail, and a positioning pin arranged on the positioning pin seat.

Images