A substrate carrier apparatus

Abstract

The application discloses a substrate bearing device, which comprises a tray and a frame, the frame comprises a frame body, the frame body comprises a support beam body, the support beam body extends along a first direction, the support beam body comprises a metal beam part and two clamping plate beam parts, the material of the two clamping plate beam parts is different from that of the metal beam part, the two clamping plate beam parts are respectively located on the two sides of the metal beam part in a second direction, and the two clamping plate beam parts are connected with the metal beam part, the two end faces of the metal beam part in a third direction are respectively a first connecting face and a second connecting face, the first connecting face is in contact with the tray, the second connecting face is in contact with a grounding part, and the first direction, the second direction and the third direction are arranged at an angle. The bearing device has high wear resistance and relatively good grounding effect.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of photovoltaic cell manufacturing, in particular to a substrate bearing device. BACKGROUND

[0002] The bearing device of the plasma enhanced chemical vapor deposition (PECVD) equipment includes a tray for bearing the substrate to be processed and a frame for bearing the tray. In the plasma process, the frame is in contact with the roller or the lower heating plate as the grounding electrode, so the conductive performance of the tray and the frame is very important. SUMMARY

[0003] The present application aims to provide a substrate bearing device which can have higher wear resistance and relatively better grounding effect.

[0004] To solve the above technical problems, the present application provides a substrate bearing device, which includes a tray and a frame, the frame includes a frame main body, the frame main body includes a support beam body, the support beam body extends along a first direction, the support beam body includes a metal beam part and two clamping plate beam parts, the two clamping plate beam parts are made of different materials from the metal beam part, the two clamping plate beam parts are respectively located on both sides of the metal beam part in a second direction, and the two clamping plate beam parts are connected to the metal beam part, the two end faces of the metal beam part in a third direction are respectively a first connecting surface and a second connecting surface, the first connecting surface is in contact with the tray, and the second connecting surface is in contact with a grounding component, and the first direction, the second direction and the third direction are arranged at an angle.

[0005] In the embodiment of the present application, the support beam body is connected to the tray through the first connecting surface of the metal beam part and connected to the grounding component through the second connecting surface. The metal beam part is made of metal material, and its conductive performance is relatively better than that of general non-metallic materials, which can improve the grounding effect of the bearing device and greatly avoid the adverse effects caused by poor grounding. At the same time, the metal beam part can also have relatively better wear resistance. When the metal beam part is in contact with the roller and produces rolling friction, it is not easy to produce dust. In this way, on the one hand, it can reduce the possibility of damage to the bearing device, which is conducive to ensuring the service life of the bearing device, and on the other hand, it can also reduce the influence on the quality of the substrate coating.

[0006] Optionally, a cross section of the metal beam portion perpendicular to the first direction is T-shaped, comprising a horizontal plate and a vertical plate arranged along the third direction, the horizontal plate comprising two support plate portions respectively located on two sides of the vertical plate in the second direction, two clamping plate beam portions respectively abutting the two support plate portions along the third direction, and the two clamping plate beam portions each abutting the vertical plate along the second direction, a side of the vertical plate facing away from the horizontal plate being the first connecting surface, and a side of the horizontal plate facing away from the vertical plate being the second connecting surface.

[0007] Optionally, the frame further comprises a first connecting component for connecting the support plate portion and the clamping plate beam portion located on the same side in the second direction.

[0008] Optionally, the frame further comprises a second connecting component, the second connecting component comprising a connecting bolt, a connecting nut and an elastic pad portion, the connecting bolt comprising a head portion and a rod portion, the rod portion penetrating through the two clamping plate beam portions and the metal beam portion, the connecting nut being connected with the rod portion, and the elastic pad portion being located between the support beam body and the head portion, or the elastic pad portion being located between the connecting nut and the support beam body.

[0009] Optionally, the elastic pad portion is a butterfly spring.

[0010] Optionally, the two clamping plate beam portions are each made of a non-metallic conductive material.

[0011] Optionally, the clamping plate beam portion is made of a graphite material or a carbon composite material, and a thermal expansion coefficient of the metal beam portion matches that of the clamping plate beam portion.

[0012] Optionally, the frame body further comprises other beam bodies, the other beam bodies comprising side beam bodies, the number of the side beam bodies and the number of the support beam bodies each being two, the two side beam bodies being arranged at intervals along the first direction, the two support beam bodies being arranged at intervals along the second direction, and the two side beam bodies each being connected with the two support beam bodies to form an outer frame of the frame body.

[0013] Optionally, the other beam bodies further comprise inner beam bodies, the inner beam bodies being connected with the outer frame and located inside the outer frame, and a side of the second connecting surface of the support beam body along the third direction protruding from the inner beam body.

[0014] Optionally, the frame further comprises an elastic conductive component, the elastic conductive component being mounted on the frame body, at least a part of the elastic conductive component being capable of elastically deforming along the third direction, one end of the elastic conductive component being in contact with the tray along the third direction, and the other end of the elastic conductive component being used to contact the grounding component.

[0015] Optionally, the elastic conductive component comprises a first elastic sheet, the first elastic sheet comprises a first deformation part and a second deformation part, the first deformation part and the second deformation part are arranged along the third direction, the first deformation part is used for elastically contacting the tray, and the second deformation part is used for elastically contacting the grounding component.

[0016] Optionally, the elastic conductive component comprises a first elastic sheet, the first elastic sheet comprises a first deformation part and a second deformation part, the first deformation part and the second deformation part are arranged along the third direction, the first deformation part is used for elastically contacting the tray, and the second deformation part is used for elastically contacting the grounding component.

[0017] Optionally, the second elastic sheet comprises a body part in a U shape and a flange part, the body part comprises a bottom plate part and two side plate parts, the flange part is connected to one side of each of the two side plate parts away from the bottom plate part, and the bottom plate part is press-fitted between the tray and the frame body. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A partial structural view of a bearing device of a substrate provided by an embodiment of the present application;

[0019] Figure 2 For Figure 1 A partial structural view of a middle frame;

[0020] Figure 3 A cross-sectional view of a support beam body perpendicular to a first direction;

[0021] Figure 4 A connection structural view of a support beam body, a second connecting component and a transition corner piece;

[0022] Figure 5 For Figure 2 A connection structural view of an elastic conductive component, a tray and a lower heating plate;

[0023] Figure 6 A partial structural view of a middle frame of another bearing device of a substrate provided by an embodiment of the present application;

[0024] Figure 7 For Figure 6 A connection structural view of an elastic conductive component, a tray and a lower heating plate.

[0025] REFERENCE SIGNS:

[0026] 1000 - tray;

[0027] 2000 - frame; 2100 - frame body; 2110 - support beam body; 2111 - metal beam part; 2111A - horizontal plate; 2111A1 - support plate part; 2111A2 - second connection surface; 2111B - vertical plate; 2111B1 first connection surface; 2112 - clamping beam part; 2113 - first connection member; 2120 - side beam body; 2130 - inner beam body; 2131 - first beam body; 2132 - second beam body; 2140 - transition corner piece; 2141 - connection plate part; 2150 - second connection member; 2151 - connection bolt; 2152 - connection nut; 2153 - elastic pad part; 2200 - elastic conductive member; 2210 - first elastic sheet; 2211 - first deformation part; 2212 - second deformation part; 2220 - third connection member; 2230 - support plate; 2240 - second elastic sheet; 2241 - body part; 2241A - bottom plate part; 2241B - side plate part; 2242 - flange part;

[0028] 3000 - lower heating plate. DETAILED DESCRIPTION

[0029] In order for those skilled in the art to better understand the technical solutions of the present application, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0030] In the embodiments of the present application, the terms "first", "second", "third" are only used for descriptive purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second", "third" can explicitly or implicitly include one or more of the features.

[0031] In the description of the embodiments of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood in a broad sense, for example, "connection" can be detachable connection, or can be non-detachable connection; can be direct connection, or indirect connection through intermediate medium.

[0032] The orientation terms mentioned in the embodiments of the present application, such as "inner", "outer" and the like, are only the direction of reference to the drawings, therefore, the orientation terms used are for better and clearer description and understanding of the embodiments of the present application, and are not intended to indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore, should not be understood as a limitation on the embodiments of the present application. In addition, unless otherwise stated in the present application, "multiple" in the present application means two or more; and when "multiple" is used to express the number of different components, it does not mean the mutual relationship in the number of the components.

[0033] In the description of the embodiments of the present application, the term "comprising" or "including" or any other variant thereof is intended to cover a non-exclusive inclusion, so that a process, method, article or apparatus that comprises a list of elements does not only include those elements, but also includes other elements that are not expressly listed or other elements inherent in such process, method, article or apparatus. Without more limitations, the element defined by the phrase "comprising a" does not exclude the presence of additional identical elements in the process, method, article or apparatus that includes the element.

[0034] Please refer to Figures 1-7 , Figure 1 a partial structural view of a bearing device of a substrate provided by an embodiment of the present application; Figure 2 a partial structural view of a bearing device of a substrate provided by an embodiment of the present application; Figure 1 a partial structural view of a bearing device of a substrate provided by an embodiment of the present application; Figure 3 a cross-sectional view of the support beam body perpendicular to the first direction; Figure 4 a connection structural view of the support beam body, the second connecting component and the transition corner piece; Figure 5 a connection structural view of the elastic conductive component and the tray, and the lower heating plate; Figure 2 a connection structural view of the elastic conductive component and the tray, and the lower heating plate; Figure 6 a partial structural view of a bearing device of a substrate provided by an embodiment of the present application; Figure 7 a partial structural view of a bearing device of a substrate provided by an embodiment of the present application; Figure 6 a connection structural view of the elastic conductive component and the tray, and the lower heating plate.

[0035] As shown in Figure 1 , an embodiment of the present application provides a bearing device of a substrate, mainly applied in a PECVD device and the like, which comprises a tray 1000 and a frame 2000.

[0036] The tray 1000 is used for bearing the substrate to be processed, which can be a silicon wafer or the like. The tray 1000 can be of an integrated structure. Alternatively, the tray 1000 can also be of a split structure, comprising a plurality of split components which are assembled and spliced to form the tray 1000, and the specific assembly and splicing manner can be welding, clamping, screw connection, riveting or the like, which is not limited herein as long as the reliability requirement of connection can be met.

[0037] The frame 2000 is used for bearing the tray 1000. In combination with Figure 2 , the frame 2000 comprises a frame body 2100, and the frame body 2100 comprises a support beam body 2110 and other beam bodies.

[0038] For the convenience of description, in the embodiments of the present application, a first direction X, a second direction Y and a third direction Z can be defined. The first direction X is the extending direction of the support beam body 2110. The third direction Z is the direction in which the frame 2000 and the tray 1000 are connected; in a normal use state, the third direction Z is specifically the up-down direction, and the tray 1000 can be arranged on the upper side of the frame 2000, so that the frame 2000 stably bears the tray 1000. The second direction Y is arranged at an angle with the first direction X and the third direction Z, and the angle can be, for example, 90 degrees, and of course, can also be other angle values, which are not limited herein.

[0039] The other beam bodies can include side beam bodies 2120, which can extend along the second direction Y. In actual application, the number of the side beam bodies 2120 and the support beam bodies 2110 can both be two, and the two side beam bodies 2120 can be arranged at intervals along the first direction X, and the two support beam bodies 2110 can be arranged at intervals along the second direction Y. The two side beam bodies 2120 can be connected with the two support beam bodies 2110 to form an outer frame of the frame body 2100, which can be approximately a quadrilateral structure, such as a rectangular structure.

[0040] The other beam bodies can also include inner beam bodies 2130, which can be arranged on the inner side of the outer frame and used to be connected with the outer frame to improve the structural strength of the frame 2000.

[0041] In some optional implementations, the inner beam bodies 2130 can include first beam bodies 2131 and second beam bodies 2132, and the number of the first beam bodies 2131 and the second beam bodies 2132 can both be multiple. The first beam bodies 2131 can extend along the second direction Y, and the second beam bodies 2132 can extend along the first direction X. Each first beam body 2131 can be connected with two support beam bodies 2110. Each second beam body 2132 can be connected with two side beam bodies 2120. The first beam bodies 2131 and the second beam bodies 2132 can also be connected to ensure the structural strength of the inner beam bodies 2130.

[0042] Here, the embodiments of the present application do not limit the connection mode between the first beam bodies 2131 and the support beam bodies 2110, between the second beam bodies 2132 and the side beam bodies 2120, between the first beam bodies 2131 and the second beam bodies 2132, and between the support beam bodies 2110 and the side beam bodies 2120, and in actual application, a person skilled in the art can select according to specific needs as long as the requirements of use can be met. For example, various connection modes such as welding, clamping, riveting, bolt connection and the like can be used to connect the beam bodies.

[0043] For the implementation mode in which bolt connection is adopted, as shown in FIG. 6, the first beam bodies 2131 and the support beam bodies 2110 can be connected through bolts 2140, and the second beam bodies 2132 and the side beam bodies 2120 can also be connected through bolts 2140. Figure 2As shown, the frame body 2100 can also be configured with transition corner pieces 2140. Combined with... Figure 4 The transition corner piece 2140 can be roughly L-shaped, including two connecting plate portions 2141 set at an angle. The two connecting plate portions 2141 can be connected to two beams extending in different directions by bolts, thereby achieving indirect fixation between the two beams extending in different directions.

[0044] It should be understood that, for the inner beam 2130, the first beam 2131 is not limited to extending along the second direction Y, and the second beam 2132 is not limited to extending along the first direction X. In practical applications, those skilled in the art can flexibly adjust the extension directions of the first beam 2131 and the second beam 2132, thereby forming inner beams 2130 with different structural forms, as long as the reliability requirements are met.

[0045] The supporting beam 2110 includes a metal beam portion 2111 and two clamping beam portions 2112. The two clamping beam portions 2112 are made of a different material than the metal beam portion 2111. The two clamping beam portions 2112 are located on both sides of the metal beam portion 2111 in the second direction Y, and both clamping beam portions 2112 are connected to the metal beam portion 2111. The two end faces of the metal beam portion 2111 in the third direction Z are a first connecting surface 2111B1 and a second connecting surface 2111A2, respectively. The first connecting surface 2111B1 contacts the tray 1000, specifically ensuring contact between the first connecting surface 2111B1 and the tray 1000 after the tray 1000 and the frame 2000 are connected. The second connecting surface 2111A2 is used to contact a grounding component. The grounding component can specifically be a roller, or... Figure 5 as well as Figure 7 The lower heating plate 3000 is shown.

[0046] In this embodiment of the invention, the support beam 2110 specifically connects the tray 1000 and the grounding component through a metal beam portion 2111. The metal beam portion 2111 is made of metal material, which has relatively better conductivity compared to general non-metallic materials. This can improve the grounding effect of the bearing device and largely avoid adverse effects caused by poor grounding. These adverse effects include uneven coating thickness and abnormal arcing.

[0047] Meanwhile, the metal beam 2111 also possesses relatively good wear resistance, and is less prone to generating dust when it comes into contact with the roller and experiences rolling friction. This reduces the likelihood of damage to the load-bearing device, thus ensuring its service life, and also minimizes the impact on the substrate coating quality.

[0048] Here, embodiments of the present application do not limit the specific material type of the metal beam part 2111, and in actual applications, a person skilled in the art can select according to the electrical conductivity, cost and other related conditions of different materials, as long as the requirements can be met. For example, Table 1 shows the electrical conductivity of silver, copper, aluminum, titanium and stainless steel, and the relationship between the electrical conductivity of each metal at 20°C is: silver > copper > aluminum > titanium > stainless steel. Based on this, if only one parameter of electrical conductivity is used, the metal beam part 2111 can be made of silver, copper, etc.

[0049] Table 1 Comparison of electrical conductivity of different materials at the same temperature

[0050] Material Temperature (°C) Conductivity (S / m) Silver 20 62.9 x 10 6 ]]> Copper 20 59.5 x 10 6 ]]> Aluminum 20 37.7 x 10 6 ]] Titanium 20 2.5 x 10 6 ]] Stainless Steel 20 1.5 x 10 6 ]]>

[0051] The clamping beam part 2112 can be made of a non-metal material, which can effectively reduce the weight of the support beam body 2110, so as to realize the lightweight of the support beam body 2110.

[0052] In some optional implementations, the clamping beam part 2112 can be made of a non-metal conductive material. In this way, the clamping beam part 2112 can also have conductive properties, which can more effectively ensure the grounding effect of the support beam body 2110.

[0053] Here, embodiments of the present application do not limit the specific type of the above-mentioned non-metal conductive material, and in actual applications, a person skilled in the art can select according to specific needs, as long as the requirements can be met. For example, the non-metal conductive material can be graphite material or carbon composite material, which not only has relatively good conductive properties, but also has good high-temperature resistance and corrosion resistance, and has relatively good mechanical strength when used in high-temperature environments. In combination with the metal beam part 2111, it can more effectively improve the structural strength of the support beam body 2110 and the frame 2000.

[0054] In specific practice, the thermal expansion coefficients of the metal beam part 2111 and the clamping beam part 2112 can be matched, i.e. the thermal expansion coefficients of the two can be close to each other. In this way, after the metal beam part 2111 and the clamping beam part 2112 are connected, thermal stress is not easy to occur between the two, which is more conducive to ensuring the reliable connection between the metal beam part 2111 and the clamping beam part 2112, so that the support beam body 2110 can have relatively good thermal stability and reliability.

[0055] Here, the present embodiment is not limited to the closeness of the thermal expansion coefficients of the metal beam part 2111 and the clamping beam part 2112, and in actual applications, a person skilled in the art can select according to specific needs, as long as the use requirements can be met. For example, when the clamping beam part 2112 is prepared by using the aforementioned graphite material or carbon composite material, the metal beam part 2111 can be prepared by using invar alloy, or aluminum-silver-nickel alloy, etc., so as to balance the thermal expansion coefficients between the metal beam part 2111 and the clamping beam part 2112.

[0056] With Figure 2 For reference, in other beam bodies of the present embodiment, the material of at least the side beam body 2120 and the first beam body 2131 connected with the support beam body 2110 can be consistent with the clamping beam part 2112. In specific installation, the side beam body 2120 and the first beam body 2131 can be connected with the clamping beam part 2112, so that the thermal expansion between the side beam body 2120 and the support beam body 2110, and the thermal expansion between the first beam body 2131 and the support beam body 2110 are not easy to occur, and the connection reliability and thermal stability of the frame 2000 can be improved to a greater extent.

[0057] Of course, in some other implementations of the present embodiment, the material of the side beam body 2120 and the first beam body 2131 can also be different from the clamping beam part 2112, which is also feasible. For example, the side beam body 2120 and the clamping beam part 2112 can be respectively prepared by selecting two different materials with close thermal expansion coefficients, which can also reduce the thermal expansion between the side beam body 2120 and the support beam body 2110.

[0058] In some optional implementations, the frame body 2100 can further include a second connecting component 2150.

[0059] The second connecting component 2150 can include a connecting bolt 2151, a connecting nut 2152 and an elastic pad part 2153. The connecting bolt 2151 can include a head part and a rod part, wherein the rod part can pass through the two clamping beam parts 2112 and the metal beam part 2111 along the second direction Y, and the connecting nut 2152 can be connected with the rod part. The elastic pad part 2153 can be located between the support beam body 2110 and the head part; or the elastic pad part 2153 can be located between the connecting nut 2152 and the support beam body 2110.

[0060] By cooperating with the connecting bolts 2151, connecting nuts 2152, and elastic pads 2153, the metal beam 2111 and the two clamping beams 2112 can be locked in the second direction Y, ensuring a reliable connection between them. Furthermore, the elastic pads 2153 possess elastic deformation capability along the second direction Y, compensating for the thermal deformation of the supporting beam 2110 in the second direction Y, thereby improving the thermal stability of the supporting beam 2110 and ensuring the structural performance of the entire frame 2000.

[0061] Combination Figure 4 In one specific embodiment, the elastic pad 2153 may be disposed between the connecting nut 2152 and the support beam 2110. Furthermore, in the embodiment where the first beam 2131 and the support beam 2110 are connected by a transition angle member 2140, the elastic pad 2153 may specifically be located between the connecting nut 2152 and the connecting plate 2141.

[0062] The elastic pad 2153 can specifically be a butterfly spring. In practical applications, a second connecting part 2150 can be equipped with only one butterfly spring, or two or more butterfly springs can be used. For example, butterfly springs can be used in pairs, which can better achieve the function of compensating for thermal deformation.

[0063] In some alternative implementations, the cross section of the metal beam portion 2111 perpendicular to the first direction X can be T-shaped.

[0064] like Figure 2 and Figure 3 As shown, the metal beam portion 2111 may include a horizontal plate 2111A and a vertical plate 2111B arranged along a third direction Z. The horizontal plate 2111A may include two support plate portions 2111A1, which may be located on both sides of the vertical plate 2111B in a second direction Y. Two clamping beam portions 2112 may be located on both sides of the vertical plate 2111B in a second direction Y. The two clamping beam portions 2112 may be attached to the vertical plate 2111B along the second direction Y, and the two clamping beam portions 2112 may also abut against the two support plate portions 2111A1 along a third direction Z. The side of the vertical plate 2111B facing away from the horizontal plate 2111A may be a first connecting surface 2111B1, and the side of the horizontal plate 2111A facing away from the vertical plate 2111B may be a second connecting surface 2111A2.

[0065] In this way, the two support plate portions 2111A1 can support the two clamping beam portions 2112 in the third direction Z respectively, so as to reduce the possibility of displacement of the clamping beam portions 2112 and the metal beam portions 2111 in the third direction Z, and accordingly, the possibility of the second connecting member 2150 being subjected to a shear force in the third direction Z can be reduced, so as to facilitate guaranteeing the service life of the second connecting member 2150, and the reliable connection of the clamping beam portions 2112 and the metal beam portions 2111 can be guaranteed. In addition, the support of the support plate portions 2111A1 to the clamping beam portions 2112 can also avoid the contact between the clamping beam portions 2112 and the rollers, so as to fundamentally avoid the possibility of dust being generated due to the contact between the clamping beam portions 2112 and the rollers.

[0066] As shown in the drawings, Figure 3 The support beam body 2110 can further include a first connecting member 2113, which is used to connect the support plate portions 2111A1 and the clamping beam portions 2112 located on the same side in the second direction Y.

[0067] Specifically, the first connecting member 2113 can be a screw or the like, which can pass through the support plate portions 2111A1 in the third direction Z and be connected with the clamping beam portions 2112, so as to lock the clamping beam portions 2112 and the metal beam portions 2111 in the third direction Z, and the structural stability of the support beam body 2110 can be improved to a greater extent.

[0068] It should be understood that the cross section of the metal beam portions 2111 perpendicular to the first direction X is not limited to the T shape described above, and in some other implementations of the embodiments of the present application, the cross section can also have other shapes as long as the use requirements can be met. For example, the cross section can also have a character shape, that is, the metal beam portions 2111 can only include the aforementioned vertical plate 2111B. For another example, the cross section can also have an L shape, at this time, the metal beam portions 2111 can include the aforementioned vertical plate 2111B and one support plate portion 2111A1.

[0069] In combination with Figure 4 , the side where the second connecting surface 2111A2 of the support beam body 2110 is located can protrude from the inner beam body 2130 in the third direction Z. In this way, the carrying device provided in the embodiments of the present application is not prone to being stuck due to heating deformation or the presence of foreign matter when being transported, for example, when the second connecting surface 2111A2 and the rollers are in contact to be rolled and transported, so as to be more conducive to guaranteeing the stability and smoothness in the transportation process.

[0070] In fact, along the third direction Z, the side where the second connecting surface 2111A2 of the support beam body 2110 is located can also protrude from the side beam body 2120. That is, the side where the second connecting surface 2111A2 of the support beam body 2110 is located can protrude from all other beam bodies, so that the situation of the transmission card stopping can be avoided to a greater extent.

[0071] In some optional implementations, the frame 2000 can further include an elastic conductive component 2200. The elastic conductive component 2200 can be mounted to the frame body 2100, for example, can be mounted to the side beam body 2120, the inner beam body 2130, and other beam bodies, and at least a part of the elastic conductive component 2200 can be elastically deformed along the third direction Z. Along the third direction Z, one end of the elastic conductive component 2200 can be in contact with the tray 1000, and the other end of the elastic conductive component 2200 can be used to be in contact with a grounding component, which can be specifically in contact with the lower heating plate 3000.

[0072] In a normal state, that is, when the elastic conductive component 2200 is not in contact with the lower heating plate 3000, the elastic conductive component 2200 can have a protruding part protruding from the second connecting surface 2111A2 along the third direction Z, and the size of the protruding part in the third direction Z can be, for example, between 2 mm and 3 mm. When the lower heating plate 3000 is jacked up by a jacking device or the like, and then abuts against the support beam body 2110 along the third direction Z, the elastic conductive component 2200 can be deformed under pressure, and the contact effect of the elastic conductive component 2200 with the tray 1000 and the lower heating plate 3000 can be better, and accordingly, the grounding effect of the load bearing device provided by the embodiment of the application can be better.

[0073] In some schemes, as shown in Figure 5 The elastic conductive component 2200 can include a first elastic sheet 2210.

[0074] The first elastic sheet 2210 can generally present an "arch" shape, which can be connected and fixed by a third connecting component 2220, for example, a bolt, a screw, or the like. The first elastic sheet 2210 can include a first deformation part 2211 and a second deformation part 2212. In a normal state, the first deformation part 2211 can have a protruding part protruding from the first connecting surface 2111B1 along the third direction Z, and the second deformation part 2212 can have a protruding part protruding from the second connecting surface 2111A2 along the third direction Z, and the sizes of the two protruding parts in the third direction Z can be between 2 mm and 3 mm.

[0075] After the tray 1000 and the frame 2000 are connected, the first deformed part 2211 can be elastically deformed, and the first deformed part 2211 can be in elastic contact with the tray 1000. After the lower heating plate 3000 is lifted, the second deformed part 2212 can be elastically deformed, and the second deformed part 2212 can be in elastic contact with the lower heating plate 3000. Since the first deformed part 2211 and the second deformed part 2212 are both in elastic contact under elastic deformation, the contact reliability of the first elastic sheet 2210 with the tray 1000 and the lower heating plate 3000 can be relatively high, and accordingly, the grounding effect can be better.

[0076] In some other schemes, as shown in Figure 6 and Figure 7 , the elastic conductive part 2200 can include a supporting plate 2230 and a second elastic sheet 2240.

[0077] The supporting plate 2230 can be connected with the frame body 2100, and the connection manner can be, for example, welding, clamping, screw connection, riveting, etc. After the supporting plate 2230 is installed, the supporting plate 2230 can realize the press fitting of the second elastic sheet 2240 to press fit the second elastic sheet 2240 between the supporting plate 2230 and the frame body 2100. The supporting plate 2230 can be made of, for example, aluminum alloy, plated carbon fiber, etc. to have relatively better conductive performance and mechanical strength. After the tray 1000 and the frame 2000 are connected, the supporting plate 2230 can be in contact with the tray 1000.

[0078] In a normal state, the second elastic sheet 2240 can have a protruding part protruding from the second connecting surface 2111A2 in the third direction Z, and the size of the protruding part in the third direction Z can be between 2 mm and 3 mm.

[0079] In specific applications, the supporting plate 2230 is used to be in contact with the tray 1000, and the second elastic sheet 2240 is used to be in contact with the grounding part. After the lower heating plate 3000 is lifted, the second elastic sheet 2240 can be elastically deformed, and the second elastic sheet 2240 can be in elastic contact with the lower heating plate 3000, and at this time, the contact reliability of the second elastic sheet 2240 with the lower heating plate 3000 can be relatively high.

[0080] Here, the embodiments of the present application do not limit the specific structure of the second elastic sheet 2240, and in actual applications, a person skilled in the art can select according to specific needs as long as the requirements can be met. For example, please refer to Figure 7The second elastic sheet 2240 can include a body portion 2241 in a U shape and a flange portion 2242. The body portion 2241 can include a bottom plate portion 2241A and two side plate portions 2241B. The flange portion 2242 can be connected to each of the two side plate portions 2241B away from the bottom plate portion 2241A. The bottom plate portion 2241A can be press-fitted between the support plate 2230 and the frame body 2100. The two flange portions 2242 are used to elastically contact the lower heating plate 3000.

[0081] The above merely describes the preferred embodiments of the present application. It should be noted that those skilled in the art can make several improvements and refinements without departing from the principles of the present application. These improvements and refinements should also be considered within the scope of the present application.

Claims

1. A substrate carrier apparatus, comprising: The frame comprises a tray and a frame body, the frame body comprises a support beam body, the support beam body extends along a first direction, the support beam body comprises a metal beam part and two clamping plate beam parts, the material of the two clamping plate beam parts is different from the material of the metal beam part, the two clamping plate beam parts are respectively located on both sides of the metal beam part in a second direction, and the two clamping plate beam parts are connected with the metal beam part, the two end faces of the metal beam part in a third direction are respectively a first connecting face and a second connecting face, the first connecting face is in contact with the tray, and the second connecting face is in contact with a grounding component.

2. The substrate carrier of claim 1, wherein, The cross section of the metal beam part perpendicular to the first direction is T-shaped, comprising a horizontal plate and a vertical plate arranged along the third direction, the horizontal plate comprises two supporting plate parts, the two supporting plate parts are respectively located on both sides of the vertical plate in the second direction, the two clamping plate beam parts are respectively in contact with the two supporting plate parts along the third direction, and the two clamping plate beam parts are respectively in contact with the vertical plate along the second direction, one side of the vertical plate away from the horizontal plate is the first connecting face, and one side of the horizontal plate away from the vertical plate is the second connecting face.

3. The substrate carrier of claim 2, wherein, Further comprising a first connecting component, the first connecting component is used for connecting the supporting plate part and the clamping plate beam part located on the same side in the second direction.

4. The substrate carrier of Claim 1, wherein, Further comprising a second connecting component, the second connecting component comprises a connecting bolt, a connecting nut and an elastic pad part, the connecting bolt comprises a head part and a rod part, the rod part passes through the two clamping plate beam parts and the metal beam part, the connecting nut is connected with the rod part; The elastic pad part is located between the support beam body and the head part, or the elastic pad part is located between the connecting nut and the support beam body.

5. The substrate carrier of claim 4, wherein, The elastic pad part is a butterfly spring.

6. The substrate carrier of Claim 1, wherein, The two clamping plate beam parts are non-metallic conductive materials.

7. The substrate carrier of claim 6, wherein, The clamping plate beam part is a graphite material or a carbon composite material, and the thermal expansion coefficient of the metal beam part matches the clamping plate beam part.

8. The substrate carrier of any of claims 1-7, wherein, The frame body further comprises other beam bodies, the other beam bodies comprise side beam bodies, the number of the side beam bodies and the support beam bodies is two, the two side beam bodies are arranged at intervals along the first direction, the two support beam bodies are arranged at intervals along the second direction, and the two side beam bodies are connected with the two support beam bodies to form an outer frame of the frame body.

9. The substrate carrier of claim 8, wherein, The other beam bodies further comprise inner beam bodies, the inner beam bodies are connected with the outer frame, and the inner beam bodies are located on the inner side of the outer frame. Along the third direction, the second connecting face of the support beam body protrudes from the inner beam body.

10. The substrate carrier of any of claims 1-7, wherein, The frame further comprises an elastic conductive component, the elastic conductive component is mounted on the frame body, at least part of the elastic conductive component can be elastically deformed along the third direction; Along the third direction, one end of the elastic conductive component is in contact with the tray, and the other end of the elastic conductive component is used to contact the grounding component.

11. The substrate carrier of claim 10, wherein, The elastic conductive component comprises a first elastic sheet, the first elastic sheet comprises a first deformation part and a second deformation part, the first deformation part and the second deformation part are arranged along the third direction, the first deformation part is used for elastically contacting the tray, and the second deformation part is used for elastically contacting the grounding component.

12. The substrate carrier of claim 10, wherein, The elastic conductive component comprises a tray plate and a second elastic sheet, the tray plate is connected with the frame body, the second elastic sheet is press-fitted between the tray plate and the frame body, the tray plate is in contact with the tray, and the second elastic sheet is used for elastically contacting the grounding component.

13. The substrate carrier of Claim 12, wherein, The second elastic sheet comprises a U-shaped body part and a flange part, the body part comprises a bottom plate part and two side plate parts, the flange part is connected with one side of each of the two side plate parts away from the bottom plate part, and the bottom plate part is press-fitted between the tray plate and the frame body.

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