Diamond-doped thin film and preparation method and preparation device thereof

Abstract

The invention provides a doped diamond film and a preparation method and device thereof. The preparation device comprises a first main body, a second main body, a heating assembly, a carrying assembly, a vacuum assembly and a laser emitting assembly. The first main body is provided with a first cavity for placing a base material and introducing reaction gas; the heating assembly is arranged in the first cavity. The second main body is provided with a second cavity, and the first cavity and the second cavity can be switched between the communicating state and the isolated state through the switch valve. The carrying assembly is arranged in the second cavity and used for conveying the doping target material from the second cavity to the first cavity or from the first cavity to the second cavity when the first cavity communicates with the second cavity. The vacuum assembly is used for vacuumizing the first cavity and / or the second cavity. The laser emitting assembly is used for emitting laser towards the doping target material located in the first cavity. According to the technical scheme, preparation of the doped diamond film doped with multiple elements is achieved.

Description

Technical Field

[0001] The present application relates to the technical field of diamond film preparation, and in particular to a doped diamond film and a preparation method and a preparation device thereof. Background Art

[0002] Doped diamond film is prepared by doping other elements in the diamond film to change its properties. In the related art, hot wire chemical vapor deposition is usually used to prepare doped diamond film, but it can only achieve the doping of a single type of element, which is not conducive to the modification of the doped diamond film. Summary of the invention

[0003] The embodiments of the present application provide a doped diamond film and a preparation method and a preparation device thereof, aiming to realize the preparation of a doped diamond film doped with multiple elements.

[0004] In a first aspect, an embodiment of the present application provides a device for preparing a doped diamond film, comprising:

[0005] The first body is provided with a first cavity, and the first cavity is used to place the substrate and access the reaction gas;

[0006] A first main body is provided with a first cavity, wherein the first cavity is used to place a substrate and access a reaction gas;

[0007] A heating component, disposed in the first cavity;

[0008] The second body is provided with a second cavity, and a switch valve is provided between the first body and the second body, and the switch valve is used to switch the first cavity and the second cavity between a connected state and an isolated state;

[0009] A transport assembly, disposed in the second cavity, and used for transporting the doping target from the second cavity to the first cavity or from the first cavity to the second cavity when the first cavity and the second cavity are connected;

[0010] A vacuum component, used for evacuating the first cavity and / or the second cavity;

[0011] The laser emitting assembly is used to emit laser toward the doped target material located in the first cavity.

[0012] Optionally, the transport assembly comprises:

[0013] A first carrier, disposed in the second cavity, having a plurality of carrier parts for carrying the doping target material;

[0014] An end effector, used for connecting to the doping target;

[0015] The first driving assembly is at least partially disposed in the second cavity and is transmission-connected to the end effector to drive the end effector to move to the first cavity.

[0016] Optionally, the transport assembly further includes:

[0017] The second driving component is at least partially disposed in the second cavity and is transmission-connected to the first bearing member. The second driving component is used to drive the first bearing member to move so that one of the plurality of bearing parts moves to a first preset position.

[0018] Optionally, the first driving assembly is used to drive the end effector to move along a first direction, the end effector is located on one side of the first bearing member along a second direction, and the first direction is different from the second direction;

[0019] The handling assembly also includes:

[0020] A third driving component is at least partially disposed in the second cavity, and is used to drive the doped target material on the carrying part at the first preset position to move in the reverse direction along the second direction to the second preset position, and to drive the doped target material at the second preset position to move in the forward direction along the second direction to the carrying part at the first preset position; the first direction is different from the second direction.

[0021] Optionally, each of the carrying parts is provided with a through hole penetrating two opposite sides of the first carrying member along the second direction, and the through hole is used to accommodate the doping target material;

[0022] The third driving component can pass from an end of the through hole away from the end effector to an end of the through hole close to the end effector.

[0023] Optionally, a third body is provided between the first body and the second body, the third body is provided with a channel, both ends of the channel are connected to the first cavity and the second cavity respectively, the third body is provided with the switch valve, and the switch valve is used to close or open the channel.

[0024] Optionally, the preparation device further includes a second carrier, which is disposed in the first cavity and located in the extension direction of the channel, and the second carrier is used to carry the doping target material.

[0025] Optionally, the first cavity is provided with a grid structure, and the grid structure is used to filter substances generated by the doped target material under the laser irradiation; and / or,

[0026] The first cavity is provided with an electromagnetic component, and the electromagnetic component is used to generate an electromagnetic field to filter substances generated by the doped target material under the irradiation of the laser.

[0027] In a second aspect, an embodiment of the present application further provides a method for preparing a doped diamond film, wherein the doped diamond film is prepared by a preparation device as used in the first aspect, and the preparation method comprises:

[0028] placing a substrate in the first cavity;

[0029] The doping target is transported to the first cavity by the transport component, and the switch valve is controlled to isolate the first cavity from the second cavity;

[0030] evacuating the first cavity by using the vacuum component;

[0031] Connecting the reaction gas to the first cavity, and controlling the heating component to heat the reaction gas;

[0032] Controlling the laser emitting assembly to emit laser toward the doped target material in the first cavity;

[0033] evacuating the second cavity by means of the vacuum component;

[0034] Controlling the first cavity and the second cavity to be in a connected state;

[0035] transporting the doping target material in the first cavity to the second cavity by the transport component;

[0036] Another doping target is transported to the first cavity again by the transport component, and the switch valve is controlled to isolate the first cavity from the second cavity.

[0037] In a third aspect, an embodiment of the present application further provides a doped diamond film prepared by the preparation method described in the second aspect.

[0038] The embodiment of the present application provides a doped diamond film and a preparation method and a preparation device thereof. When preparing the doped diamond film, a substrate can be placed in a first cavity, a transport component is controlled to transport a doped target material to the first cavity, and then a switch valve is controlled to isolate the first cavity from the second cavity. After the first cavity is evacuated by a vacuum component, a reaction gas is controlled to enter the first cavity, and a heating component is controlled to heat the reaction gas so that the reaction gas decomposes to generate carbon atoms. The laser emission component is controlled to emit a laser toward the doped target material in the first cavity. The doped target material generates dopants under laser irradiation. The dopants include atoms or molecules of at least one doping element, and the carbon atoms and the doping element are The material is deposited on the substrate, and then the vacuum component can be controlled to evacuate the second cavity, and then the switch valve can be controlled to make the first cavity and the second cavity in a connected state, the transport component transports the doped target material of the first cavity to the second cavity, and then another doped target material is transported to the first cavity to achieve the replacement of the doped target material, and then the switch valve is controlled to make the first cavity and the second cavity in an isolated state, and the laser emission component can again emit laser towards the replaced doped target material in the first cavity, and the doped target material produces dopants under laser irradiation, and the dopants contain atoms or molecules of doping elements different from before, and the dopants are precipitated on the substrate to obtain a doped diamond film doped with multiple doping elements. In addition, during the preparation process, the first cavity is evacuated by the vacuum component to reduce impurities in the first cavity, and the second cavity is evacuated by the vacuum component to reduce the impact on the environment of the first cavity when the doped target material is replaced, so as to prepare a high-quality doped diamond film doped with multiple elements. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0040] Figure 1 A left view of a device for preparing a doped diamond film provided in an embodiment of the present application;

[0041] Figure 2 for Figure 1 A schematic cross-sectional view of the preparation device along the AA direction;

[0042] Figure 3 for Figure 1 A schematic cross-sectional view of the preparation device along the BB direction;

[0043] Figure 4 A right side view of the preparation device provided in an embodiment of the present application;

[0044] Figure 5 A cross-sectional schematic diagram of another device for preparing a doped diamond film provided in an embodiment of the present application. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0046] The flowcharts shown in the accompanying drawings are only examples and do not necessarily include all the contents and operations / steps, nor must they be executed in the order described. For example, some operations / steps may also be decomposed, combined or partially merged, so the actual execution order may change according to actual conditions.

[0047] It should be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the application. As used in this application specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0048] Some embodiments of the present application are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0049] Please refer to Figures 1 to 4 The embodiment of the present application provides a doped diamond film preparation device, comprising a first body 10, a second body 20, a heating assembly 30, a transport assembly 40, a vacuum assembly (not shown) and a laser emission assembly 50. The first body 10 is provided with a first cavity 10a, and the first cavity 10a is used to place a substrate and access a reaction gas. The heating assembly 30 is arranged in the first cavity 10a. The second body 20 is provided with a second cavity 20a, and a switch valve 100 is arranged between the first body 10 and the second body 20, and the switch valve 100 is used to switch the first cavity 10a and the second cavity 20a between a connected state and an isolated state. The transport assembly 40 is arranged in the second cavity 20a, and the transport assembly 40 is used to transport the doped target from the second cavity 20a to the first cavity 10a or from the first cavity 10a to the second cavity 20a when the first cavity 10a and the second cavity 20a are connected. The vacuum assembly is used to evacuate the first cavity 10a and / or the second cavity 20a. The laser emitting assembly 50 is used to emit laser toward the doped target material located in the first cavity 10a.

[0050] The preparation device in this embodiment can use the heating component 30 to heat the reaction gas connected to the first cavity 10a, and the carbon atoms generated by the decomposition of the reaction gas are deposited on the substrate. The conveying component 40 can also be used to transport different doping targets to the first cavity 10a. The laser emitting component 50 emits laser to different doping targets in the first cavity 10a, so that different doping targets obtain different dopants under laser irradiation. The dopants include but are not limited to the forms of plasma, gas and solid particles. Different dopants may contain atoms or molecules of different doping elements. Different dopants are deposited on the substrate to prepare a doped diamond film with multiple doping elements. Moreover, the vacuum component connects the first cavity 10a and the second cavity 20a. By evacuating the first cavity 10a through the vacuum component, impurities in the first cavity 10a can be reduced, so that the first cavity 10a reaches the environmental conditions required for the reaction. By evacuating the second cavity 20a through the vacuum component, impurities in the second cavity 20a can be reduced. Therefore, when it is necessary to replace the doping target material using the conveying component 40, so that the first cavity 10a and the second cavity 20a are switched to a connected state, the impact on the environment in the first cavity 10a is small, so that high-quality doped diamond films doped with multiple elements can be prepared.

[0051] For example, when the preparation device is used to prepare a doped diamond film, a substrate can be placed in the first cavity 10a, and a plurality of doped targets can be placed in the second cavity 20a. When the switch valve 100 is controlled to be opened so that the first cavity 10a and the second cavity 20a are in a connected state, the transport component 40 disposed in the second cavity 20a can transport one of the plurality of doped targets to the first cavity 10a, and then the transport component 40 returns to a state of being accommodated in the second cavity 20a. The switch valve 100 is controlled to be closed so that the first cavity 10a and the second cavity 20a are in an isolated state. The first cavity 10a is evacuated by the vacuum component so that the first cavity 10a reaches the required environmental conditions. Then, the reaction gas is connected to the first cavity 10a, and the heating component 30 disposed in the first cavity 10a is controlled to heat the reaction gas so that the reaction gas decomposes to generate carbon atoms. The laser emitting component 50 is controlled to emit a laser toward the doped target in the first cavity 10a. The doped target obtains a dopant under the irradiation of the laser, and the dopant includes at least one doping Atoms or molecules of impurity elements, carbon atoms and atoms or molecules in dopants can be deposited on the substrate. When other elements need to be doped later, the second cavity 20a can be evacuated by the vacuum component first, and then the switch valve 100 is controlled again to make the first cavity 10a and the second cavity 20a in a connected state. The transport component 40 can transport the doped target in the first cavity 10a to the second cavity 20a again, and then transport another doped target among the multiple doped target materials in the second cavity 20a to the first cavity 10a to achieve the replacement of the doped target. When the transport component 40 returns to the state of being accommodated in the second cavity 20a, the switch valve 100 is controlled to be closed again so that the first cavity 10a and the second cavity 20a are in an isolated state. The laser emitting component 50 emits laser toward the replaced doped target in the first cavity 10a again, so that the doped target obtains dopants under laser irradiation. The dopants contain atoms or molecules of doping elements different from before, and the dopants can be precipitated on the substrate, thereby obtaining a doped diamond film doped with multiple elements.

[0052] It can be understood that the first cavity 10a and the second cavity 20a can switch between being connected and isolated from the external environment. Specifically, the reaction gas is heated by the heating component 30 so that carbon atoms are deposited on the substrate, and the laser emission component 50 is used to emit a laser toward the doping target material of the first cavity 10a so that the dopant is deposited on the substrate. The first cavity 10a is isolated from the external environment, and only one of the first cavity 10a and the external environment can be in a connected state with the second cavity 20a, or the first cavity 10a and the external environment are both isolated from the second cavity 20a.

[0053] For example, Figure 1As shown, the first main body 10 is provided with a first opening 10b connecting the first cavity 10a and the external environment, and the first movable door (not shown) is movably connected to the first main body 10, and the first movable door can switch between the state of closing the first opening 10b and the state of opening the first opening 10b, so that the first cavity 10a and the external environment are switched between the isolated state and the connected state. Specifically, the first movable door is in the state of opening the first opening 10b, so that the first cavity 10a and the external environment are connected through the first opening 10b, and the preset component can be placed in the first cavity 10a through the first opening 10b, or the preset component can be taken out from the first cavity 10a, for example, the substrate can be placed in the first cavity 10a through the first opening 10b, or the substrate can be taken out from the first cavity 10a, and for another example, the heating component 30 can be installed in the first cavity 10a through the first opening 10b, or the heating component 30 can be removed from the first cavity 10a.

[0054] For example, Figure 4 As shown, the second body 20 is provided with a second opening 20b connecting the second cavity 20a and the external environment, and the second movable door is movably connected to the second body 20, and the second movable door can switch between the state of closing the second opening 20b and the state of opening the second opening 20b, so that the second cavity 20a and the external environment are switched between the isolated state and the connected state. Specifically, the second movable door is in the state of opening the second opening 20b, so that the second cavity 20a and the external environment are connected through the second opening 20b, and the preset component can be placed in the second cavity 20a through the second opening 20b, or the preset component can be taken out from the second cavity 20a, for example, the doped target material can be placed in the second cavity 20a through the second opening 20b, or the doped target material can be taken out from the second cavity 20a, and for another example, the transport assembly 40 can be installed in the second cavity 20a through the second opening 20b, or the transport assembly 40 can be removed from the second cavity 20a.

[0055] It is worth noting that while the heating component 30 heats the reaction gas, the laser emitting component 50 emits laser toward the doped target material in the first cavity 10a, or, when the heating component 30 stops heating the reaction gas after a period of time, the laser emitting component 50 emits laser toward the doped target material in the first cavity 10a. In other words, the heating timing and time of the heating component 30 and the timing and time of the laser emitting component 50 emitting laser can be adjusted according to actual conditions and are not limited here.

[0056] Exemplarily, the first body 10 may be a laser protection body to prevent the laser from penetrating from the first cavity 10 a to the outside of the first body 10 and irradiating the human body, thereby avoiding causing harm to the human body.

[0057] In some embodiments, such as Figure 1 As shown, the first body 10 is provided with a light-transmitting window, and the laser emitted by the laser emitting assembly 50 can enter the first cavity 10a through the light-transmitting window and irradiate the doped target material.

[0058] In some embodiments, the preparation device also includes a protective cover (not shown), which and the first body 10 enclose a containing space. The laser emitting assembly 50 can be located in the containing space to prevent the laser emitted by the laser emitting assembly 50 from contacting the human body and causing harm to the human body during transmission to the first body 10. At the same time, it can prevent the laser emitting assembly 50 from being affected by external interference and affecting the preparation quality.

[0059] Exemplarily, the power of the laser emitted by the laser emitting assembly 50 is adjustable to meet the irradiation conditions of different doped target materials and to adjust the concentration of dopants.

[0060] For example, Figure 3 As shown, the heating assembly 30 includes a hot wire 31, which is energized to generate heat to heat the reaction gas. Figure 3 As shown, the heating assembly 30 includes four electrodes 32, and the four electrodes 32 are symmetrically distributed in pairs, wherein two adjacent electrodes 32 are provided with a wire rack 33, and the other two adjacent electrodes 32 are provided with another wire rack 33, and the two wire racks 33 are arranged at intervals relative to each other, so that the two ends of the hot wire 31 can be connected to the two wire racks 33 respectively, so as to fix the hot wire 31. The multiple hot wires 31 can be evenly spaced.

[0061] Exemplarily, the laser emitting assembly 50 can emit a pulsed laser toward the doped target material of the first cavity 10 a .

[0062] For example, Figure 2 As shown, the first cavity 10a is provided with a base 11, and the substrate can be placed on the base 11. Specifically, the base 11 can be a movable base 11, and the distance between the substrate disposed on the base 11 and the hot wire 31 can be adjusted by controlling the movement of the base 11. For example, along the gravity direction, the base 11 is located below the hot wire 31, and the base 11 can be a lifting base 11, and the distance between the substrate on the base 11 and the hot wire 31 can be adjusted by controlling the lifting of the base 11.

[0063] Exemplarily, the surface of the doped target to be irradiated by laser is arranged opposite to the deposition surface of the substrate. For example, along the gravity direction, the doped target is located above the substrate, and the laser emitting assembly 50 can emit laser toward the lower surface of the doped target, and carbon atoms and dopants can be deposited on the upper surface of the substrate. The doped target can be located directly above the substrate, or the doped target can be located obliquely above the substrate.

[0064] In some embodiments, such as Figure 2 and Figure 3As shown, the transport assembly 40 includes a first carrier 41, an end effector 42, and a first drive assembly. The first carrier 41 is disposed in the second cavity 20a and has a plurality of carrier portions 411 for carrying doped targets. The end effector 42 is used to connect to the doped targets. The first drive assembly is at least partially disposed in the second cavity 20a, and the first drive assembly is transmission-connected to the end effector 42, and is used to drive the end effector 42 to move to the first cavity 10a. It can be understood that the first carrier 41 can carry multiple doping targets. Before replacing the doping targets, the doping targets to be transported to the first cavity 10a can be located in the second cavity 20a. When the doping targets in the first cavity 10a need to be replaced, the switch valve 100 can be controlled to make the first cavity 10a and the second cavity 20a connected. Then, the end actuator 42 is driven by the first driving component to move to the first cavity 10a, and the doping targets in the first cavity 10a are transported to the first carrier 41 of the second cavity 20a. Then, the end actuator 42 can be driven by the first driving component again to move another doping target on the first carrier 41 to the first cavity 10a. During this process, the second cavity 20a is always isolated from the external environment, which saves the time required for switching the doping targets and helps to reduce the impact on the environment of the first cavity 10a.

[0065] Exemplarily, when the number of the carrying parts 411 is greater than or equal to the number of doped targets, during the preparation of the doped diamond film, the second cavity 20a can be kept isolated from the external environment; when the number of the carrying parts 411 is less than the number of doped targets, the first cavity 10a can be isolated from the external environment, and when the first cavity 10a and the second cavity 20a are isolated, the second cavity 20a and the external environment are connected, the doped target replaced from the first cavity 10a on the first carrying member 41 is taken out, the doped target to be transported is placed on the first carrying member 41, and after the second cavity 20a and the external environment are connected, the second cavity 20a is evacuated by the vacuum component, and then the switch valve 100 is controlled to make the first cavity 10a and the second cavity 20a connected, so as to replace the doped targets.

[0066] For example, the end effector 42 can adsorb the doped target material by vacuum adsorption, or, for example, Figure 3 As shown, the end effector 42 includes a mechanical gripper. The end effector 42 can grasp the doped target material by clamping, and then move the doped target material to the first cavity 10a under the drive of the first driving component.

[0067] Exemplarily, the first drive assembly includes a first drive motor and a first transmission assembly, and the first drive motor can be connected to the end effector 42 through the first transmission assembly. Figure 3 As shown, a slide rail is provided in the first cavity 10a, and the end effector 42 is slidably connected to the slide rail. The first transmission assembly may include a belt transmission assembly, and the end effector 42 is connected to the first driving member through the belt transmission assembly, so that the first driving member can drive the end effector 42 to slide relative to the slide rail through the belt transmission assembly, so that the end effector 42 can transport the doped target material from the second cavity 20a to the first cavity 10a.

[0068] Furthermore, if Figure 2 As shown, the transport assembly 40 further includes a second drive assembly 43, which is at least partially disposed in the second cavity 20a, and is transmission-connected to the first carrier 41. The second drive assembly 43 is used to drive the first carrier 41 to move, so that one of the multiple bearing parts 411 moves to the first preset position. It can be understood that the second drive assembly 43 can drive the first carrier 41 to move, so that any one of the multiple bearing parts 411 of the first carrier 41 moves to the first preset position, and the first preset position is a preset position in the second cavity 20a, so that the end effector 42 can obtain the doping target material on the first carrier 41 from a certain position of the second cavity 20a under the drive of the first drive assembly, or move the doping target material of the first cavity 10a to the second cavity 20a and then place it at a certain position, limit the movement of the end effector 42, simplify the transmission structure between the end effector 42 and the first drive assembly, and facilitate the end effector 42 to move between the first cavity 10a and the second cavity 20a.

[0069] Exemplarily, the second driving assembly 43 is used to drive the first bearing member 41 to transmit, or the second driving assembly 43 is used to drive the first bearing member 41 to slide. Specifically, the first driving assembly drives the first bearing member 41 to rotate, and the plurality of bearing parts 411 are sequentially arranged along the rotation direction of the first bearing member 41, so that the first driving assembly can drive any one of the plurality of bearing parts 411 to rotate to the first preset position.

[0070] Furthermore, if Figure 2As shown, the first driving assembly is used to drive the end effector 42 to move along the first direction, and the end effector 42 is located on one side of the first carrier 41 along the second direction, and the first direction is different from the second direction. The transport assembly 40 also includes a third driving assembly 44, and the third driving assembly 44 is at least partially disposed in the second cavity 20a. The third driving assembly 44 is used to drive the doped target material on the carrier 411 at the first preset position to move in the reverse direction of the second direction to the second preset position, and to drive the doped target material at the second preset position to move in the forward direction of the second direction to the carrier 411 at the first preset position. It can be understood that the second preset position is a preset position in the second cavity 20a, which is different from the first preset position. The third driving component 44 can drive the doping target material on the carrying part 411 at the first preset position to move in the reverse direction of the second direction to the second preset position, and the end actuator 42 can obtain the doping target material from the second preset position and move in the reverse direction of the first direction to transport the doping target material to the first cavity 10a, or the end actuator 42 can obtain the doping target material from the first cavity 10a and then move in the forward direction of the first direction to move the doping target material to the second preset position of the second cavity 20a, and the third driving component 44 can obtain the doping target material at the second preset position from the end actuator 42 and then drive the doping target material to move in the forward direction of the second direction to the carrying part 411 at the first preset position. In this way, the end effector 42 only needs to move along the first direction, which limits the movement of the end effector 42, simplifies the transmission structure between the end effector 42 and the first drive assembly, and facilitates the movement of the end effector 42 between the first cavity 10a and the second cavity 20a.

[0071] For example, the first direction is Figure 2 The Y0-Y1 direction is shown in the second direction. Figure 2 As shown in the Z0-Z1 direction in FIG. , the positive direction of the second direction can be as follows Figure 1 The Z0 direction is shown in FIG. 1 , and the reverse direction of the second direction can be as shown in FIG. Figure 1 The Z1 direction is shown.

[0072] In some embodiments, such as Figure 3 As shown, each bearing part 411 is provided with through holes 411a penetrating the first bearing part 41 on opposite sides along the second direction, and the through holes 411a are used to accommodate the doping target. The third driving component 44 can pass from the end of the through hole 411a away from the end actuator 42 to the end of the through hole 411a close to the end actuator 42. It can be understood that the doping target can be located in the through hole 411a of the bearing part 411 to achieve the fixation of the doping target, and the third driving component 44 can pass through the through hole 411a to push the doping target to the second preset position along the second direction, so that the third driving component 44 can drive the doping target to move.

[0073] Exemplarily, the first carrier 41 can be wound around Figure 2 When the bearing portion 411 of the first bearing member 41 rotates in the second direction shown in the Z0-Z1 direction, and the bearing portion 411 of the first bearing member 41 rotates to the first preset position around the Z0-Z1 direction, the third driving component 44 can move in the opposite direction of the second direction, from the end of the through hole 411a away from the end actuator 42 to the end of the through hole 411a close to the end actuator 42.

[0074] For example, Figure 3 As shown, the through hole 411a can be a stepped hole, the doping target is located at one end of the through hole 411a close to the end actuator 42 and is supported on the stepped surface of the through hole 411a, and the third driving component 44 can pass from the end of the through hole 411a away from the end actuator 42 to the end of the through hole 411a close to the end actuator 42, lift the doping target and drive the doping target to move in the reverse direction along the second direction to a second preset position.

[0075] Exemplarily, the third driving assembly 44 includes an electric push rod.

[0076] Furthermore, the third driving assembly 44 is provided with an annular portion, which is used to connect to the edge of the doped target. It can be understood that the third driving assembly 44 is connected to the edge of the doped target through the annular portion to avoid impact or wear on the middle structure of the doped target, and the laser emitting assembly 50 can emit laser toward the middle of the doped target, so as to prepare a high-quality doped diamond film.

[0077] In some embodiments, such as Figure 2 and Figure 3 As shown, a third body 60 is provided between the first body 10 and the second body 20, and the third body 60 is provided with a channel 60a, and the two ends of the channel 60a are connected to the first cavity 10a and the second cavity 20a respectively, and the third body 60 is provided with a switch valve 100, and the switch valve 100 is used to close or open the channel 60a, so that the first cavity 10a and the second cavity 20a are switched between an isolated state and a connected state. It can be understood that the first cavity 10a and the second cavity 20a need to accommodate more components, and the first cavity 10a and the second cavity 20a need to occupy a larger space. The third body 60 between the first body 10 and the second body 20 opens a channel 60a, so that the radial size of the channel 60a can be smaller than the first cavity 10a and the second cavity 20a, and when the first cavity 10a and the second cavity 20a are switched to a connected state, the influence on the environment inside the first cavity 10a can be reduced.

[0078] It can be understood that the radial dimension of the channel 60a can be adjusted according to the structure of the transport component 40. Specifically, as mentioned above, when simplifying the transmission structure of the end actuator 42 and the first drive component, it is beneficial to reduce the size of the transmission structure of the end actuator 42 and the first drive component, which in turn helps to reduce the radial dimension of the channel 60a and reduce the impact on the environment of the first cavity 10a.

[0079] Exemplarily, the switch valve 100 includes a flapper valve, and the flapper can close or open the passage 60a by controlling the movement of the flapper.

[0080] In some embodiments, the preparation device further includes a second carrier 12 , which is disposed in the first cavity 10 a , and is used to carry the doping target material transported to the first cavity 10 a .

[0081] Exemplarily, the second carrier 12 has a support plate, and the end effector 42 can move the doped target material to the upper side of the support plate in the direction of gravity, and place the doped target material on the support plate. Specifically, the support plate can be provided with an avoidance hole, and when the support plate carries the doped target material, the edge of the doped target material can be supported on the support plate, and the middle of the doped target material is provided corresponding to the avoidance hole, so that the laser passes through the avoidance hole and irradiates the middle of the doped target material.

[0082] Furthermore, if Figure 2 As shown, the second carrier 12 is located in the extension direction of the channel 60a. In this way, it is convenient for the transport assembly 40 to drive the doped target material through the channel 60a and place the doped target material on the second carrier 12, which reduces the requirements for the degree of freedom of the transport assembly 40, simplifies the structure of the transport assembly 40, reduces the radial size of the channel 60a, and reduces the impact of the second cavity 20a on the environment inside the first cavity 10a.

[0083] In some embodiments, such as Figure 3 As shown, the first cavity 10a is provided with a grid structure 13a, which is used to filter the substances produced by the doped target under laser irradiation, so that the dopants that meet the preset conditions can pass through the grid of the grid structure 13a and precipitate on the substrate, while large particles and low-energy ions are blocked by the grid structure 13, thereby preventing large particles and low-energy ions from being deposited on the substrate and affecting the quality of the doped diamond film.

[0084] Exemplarily, the shape of the grid includes but is not limited to circle, ellipse, square, etc.

[0085] Exemplarily, the doping target, the grid structure 13a, and the substrate are sequentially arranged along a preset direction. For example, the doping target, the grid structure 13a, and the substrate are sequentially arranged at intervals along the gravity direction.

[0086] Exemplarily, the baffle is provided with a grid structure 13 a , and the baffle is provided in the first cavity 10 a . The baffle may be provided adjacent to the second carrier 12 .

[0087] In some embodiments, the baffle is provided with an avoidance hole, so that the laser emitted by the laser emitting assembly 50 can pass through the avoidance hole and irradiate the doped target material, thereby preventing the baffle from blocking the laser.

[0088] Exemplarily, the grid structure 13a may be arranged around the outer periphery of the avoidance hole, and the grids of the grid structure 13a and the avoidance hole are arranged at intervals.

[0089] Furthermore, the baffle can be movably connected to the first main body 10, and the baffle can move relative to the first main body 10 in the first cavity 10a, so that the baffle can move relative to the doped target material arranged in the first cavity 10a, so that the baffle can switch between a shielding state and an avoidance state according to actual conditions. In the shielding state, the baffle shields the doped target material so as to filter the substances produced by the doped target material under laser irradiation, and in the avoidance state, the doped target material is exposed, and the baffle does not filter the substances produced by the doped target material under laser irradiation.

[0090] Exemplarily, the baffle may be rotatably connected to the first body 10 , or the baffle may be slidably connected to the first body 10 .

[0091] like Figure 5 As shown, in some embodiments, the first cavity 10a is further provided with an electromagnetic component 70, which is used to generate an electromagnetic field to filter substances generated by the doped target under laser irradiation, so that dopants that meet preset conditions can be precipitated on the substrate, while impurities such as large particles and low-energy ions are blocked under the action of the electromagnetic field, thereby preventing large particles and low-energy ions from being deposited on the substrate and affecting the quality of the doped diamond film.

[0092] For example, taking the doping target and the substrate in the first cavity 10a as being spaced apart from each other, the electromagnetic assembly 70 may be located between the doping target and the substrate. The electromagnetic assembly 70 is spaced apart from the doping target, and the electromagnetic assembly 70 is spaced apart from the substrate.

[0093] Exemplarily, by controlling the current connected to the electromagnetic component 70 , the magnetic field strength of the electromagnetic component 70 can be adjusted, thereby adjusting the filtering effect of the electromagnetic component 70 .

[0094] Furthermore, the electromagnetic assembly 70 includes an electromagnetic ring, which generates an electromagnetic field when energized.

[0095] For example, Figure 5 As shown, the second carrier and the base can be located at opposite sides of the axis of the electromagnetic ring, so that the doping target and the substrate can be located at opposite sides of the axis of the electromagnetic ring. Specifically, the doping target and the substrate can be located on the axis of the electromagnetic ring.

[0096] Exemplarily, the two opposite sides of the electromagnetic ring can be connected to the first body 10 respectively through connecting rods, so that the electromagnetic ring is disposed between the second carrier and the base, and the electromagnetic ring is spaced apart from the second carrier and the base.

[0097] The embodiment of the present application also provides a method for preparing a doped diamond film. The doped diamond film is prepared by the preparation device as described above. The preparation method comprises the following steps:

[0098] Step S101, placing a substrate in a first cavity.

[0099] Exemplarily, step S101 can be completed by controlling the first movable door described above to be in a state of opening the first opening, then placing the substrate into the first cavity, and then controlling the first movable door again to be in a state of closing the first opening.

[0100] Step S102: transport a doping target to the first cavity by using a transport assembly, and control the switch valve to isolate the first cavity from the second cavity.

[0101] It can be understood that after the transport assembly transports the doped target material to the first cavity, the transport assembly returns to a state of being accommodated in the second cavity, so that the switch valve can be closed to isolate the first cavity from the second cavity.

[0102] Step S103: evacuate the first cavity by using a vacuum component.

[0103] It can be understood that at this time, the external environment and the second cavity are both isolated from the first cavity, and the first cavity is evacuated by using the vacuum component so that the first cavity reaches the environmental adjustment required for the reaction.

[0104] Step S104: introducing the reaction gas into the first cavity, and controlling the heating component to heat the reaction gas.

[0105] It is understandable that the heating power and heating time of the heating component can be adjusted according to actual conditions.

[0106] Step S105 , controlling the laser emitting assembly to emit laser toward the doped target material in the first cavity.

[0107] It should be noted that step S104 may be performed first, and then step S105, or steps S104 and S105 may be performed simultaneously, or step S105 may be performed first, and then step S104.

[0108] It is understandable that the power and time of the laser emission component emitting the laser can be adjusted according to actual conditions.

[0109] Step S106: evacuate the second cavity using a vacuum component.

[0110] It can be understood that at this time, the external environment and the first cavity are isolated from the second cavity.

[0111] Step S107: Control the switch valve to make the first cavity and the second cavity connected.

[0112] Step S108 , transporting the doping target material in the first cavity to the second cavity by using a transport assembly.

[0113] Step S109: transport another doping target to the first cavity again through the transport assembly, and control the switch valve to isolate the first cavity from the second cavity.

[0114] Step S110, controlling the laser emitting assembly again to emit laser toward the doped target material in the first cavity.

[0115] It can be understood that step S106 to step S110 can be repeatedly performed to achieve replacement of the doping target material in the first cavity, achieve doping of multiple elements, and obtain a doped diamond film doped with multiple elements.

[0116] In the preparation method, the reaction gas connected to the first cavity is heated by a heating component, and the carbon atoms generated by the decomposition of the reaction gas are deposited on the substrate, and the different doping targets can be transported to the first cavity by a conveying component, and the laser emitting component emits lasers to the different doping targets in the first cavity, so that the dopants obtained by the different doping targets under laser irradiation are deposited on the substrate, and a doped diamond film doped with multiple elements is prepared. In addition, the vacuum component connects the first cavity and the second cavity, and the first cavity is evacuated by the vacuum component to reduce the impurities in the first cavity, so that the first cavity reaches the required environmental conditions, and the second cavity is evacuated by the vacuum component to remove the impurities in the second cavity. When the doping target needs to be replaced by the conveying component, the first cavity and the second cavity are in a connected state, and the second cavity has less impact on the environment in the first cavity, so that a high-quality doped diamond film doped with multiple elements can be prepared.

[0117] Exemplarily, the vacuum component can evacuate the second component each time before replacing the doping target, that is, before controlling the switching valve to connect the first and second components, to ensure that when the first cavity and the second cavity are switched to a connected state, the impact on the environment of the first cavity is small.

[0118] Exemplarily, the vacuum component performs a vacuum process on the second cavity so that the vacuum degrees of the first cavity and the second cavity are equal.

[0119] Specifically, after the preparation is completed, stop introducing the reaction gas into the first cavity, control the heating component to stop heating the reaction gas, so that the heating component cools down, and the first cavity is kept in a vacuum state until the temperature in the first cavity reaches room temperature, and then the substrate can be taken out of the first cavity.

[0120] In some embodiments, before placing the substrate in the first cavity, the switch valve can be controlled to close so that the first cavity and the second cavity are in an isolated state, the first cavity is evacuated by a vacuum component, and then the reaction gas is introduced into the first cavity, and the heating component is controlled to heat the reaction gas. In this way, the carbonization pretreatment of the heating component is achieved to improve the quality of the prepared doped diamond film.

[0121] The embodiment of the present application also provides a doped diamond film, which is prepared by the above preparation method. The doped diamond film can be doped with multiple elements, and the specific doped elements can be adjusted according to actual conditions.

[0122] It should be understood that the term "and / or" used in the present specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, including these combinations. It should be noted that, in this article, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or system. In the absence of further restrictions, an element defined by the sentence "including a..." does not exclude the presence of other identical elements in the process, method, article or system including the element.

[0123] The serial numbers of the embodiments of the present application are only for description and do not represent the advantages and disadvantages of the embodiments. The above are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A device for preparing a doped diamond film, characterized in that: include: A first main body is provided with a first cavity, wherein the first cavity is used to place a substrate and access a reaction gas; A heating component, disposed in the first cavity; The second body is provided with a second cavity, and a switch valve is provided between the first body and the second body, and the switch valve is used to switch the first cavity and the second cavity between a connected state and an isolated state; A transport assembly, disposed in the second cavity, and used for transporting the doping target from the second cavity to the first cavity or from the first cavity to the second cavity when the first cavity and the second cavity are connected; A vacuum component, used for evacuating the first cavity and / or the second cavity; The laser emitting assembly is used to emit laser toward the doped target material located in the first cavity.

2. The device for preparing a doped diamond film according to claim 1, characterized in that: The handling assembly comprises: A first carrier, disposed in the second cavity, having a plurality of carrier parts for carrying the doping target material; An end effector, used for connecting to the doping target; The first driving assembly is at least partially disposed in the second cavity and is transmission-connected to the end effector to drive the end effector to move to the first cavity.

3. The device for preparing a doped diamond film according to claim 2, characterized in that: The handling assembly also includes: The second driving component is at least partially disposed in the second cavity and is transmission-connected to the first bearing member. The second driving component is used to drive the first bearing member to move so that one of the plurality of bearing parts moves to a first preset position.

4. The device for preparing a doped diamond film according to claim 3, characterized in that: The first driving assembly is used to drive the end effector to move along a first direction, the end effector is located on one side of the first bearing member along a second direction, and the first direction is different from the second direction; The handling assembly also includes: A third driving component is at least partially disposed in the second cavity, and is used to drive the doped target material on the carrying part at the first preset position to move in the reverse direction along the second direction to the second preset position, and to drive the doped target material at the second preset position to move in the forward direction along the second direction to the carrying part at the first preset position; the first direction is different from the second direction.

5. The device for preparing a doped diamond film according to claim 4, characterized in that: Each of the carrying parts is provided with a through hole penetrating two opposite sides of the first carrying member along the second direction, and the through hole is used to accommodate the doping target material; The third driving component can pass from an end of the through hole away from the end effector to an end of the through hole close to the end effector.

6. The device for preparing a doped diamond film according to any one of claims 1 to 5, characterized in that: A third body is disposed between the first body and the second body. The third body is provided with a channel. Two ends of the channel are connected to the first cavity and the second cavity respectively. The third body is provided with a switch valve for closing or opening the channel.

7. The device for preparing a doped diamond film according to claim 6, characterized in that: The preparation device further includes a second carrier, which is disposed in the first cavity and located in the extension direction of the channel, and is used to carry the doping target material.

8. The device for preparing a doped diamond film according to any one of claims 1 to 5, characterized in that: The first cavity is provided with a grid structure, and the grid structure is used to filter substances generated by the doped target material under the laser irradiation; and / or, The first cavity is provided with an electromagnetic component, and the electromagnetic component is used to generate an electromagnetic field to filter substances generated by the doped target material under the irradiation of the laser.

9. A method for preparing a doped diamond film, characterized in that: The doped diamond film is prepared by a preparation device as used in any one of claims 1 to 8, and the preparation method comprises: placing a substrate in the first cavity; The doping target is transported to the first cavity by the transport component, and the switch valve is controlled to isolate the first cavity from the second cavity; evacuating the first cavity by using the vacuum component; Connecting the reaction gas to the first cavity, and controlling the heating component to heat the reaction gas; Controlling the laser emitting assembly to emit laser toward the doped target material in the first cavity; evacuating the second cavity by means of the vacuum component; Controlling the switch valve to make the first cavity and the second cavity in a connected state; transporting the doping target material in the first cavity to the second cavity by the transport component; Another doping target is transported to the first cavity again by the transport component, and the switch valve is controlled to isolate the first cavity from the second cavity.

10. A doped diamond film, characterized in that: The method according to claim 9 is used to prepare the present invention.

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