A corrosion and wear resistant metal seal ring and a method of making the same

Abstract

The application relates to a corrosion-resistant and wear-resistant metal sealing ring and a preparation method thereof, and relates to the technical field of metal sealing members, and comprises a sealing ring base body, the surface of the sealing ring base body is sequentially provided with an interface layer and a corrosion-resistant and wear-resistant layer, the interface layer is a carbon-nitrogen interface layer, the corrosion-resistant and wear-resistant layer comprises a TiN layer and a TiON layer, the TiN layer is arranged on the surface of the carbon-nitrogen interface layer, and the TiON layer is arranged on the surface of the TiN layer. By forming the carbon-nitrogen interface layer, the strength of the metal sealing member and the chemical matching with the corrosion-resistant and wear-resistant layer prepared on the back surface thereof can be improved; meanwhile, the carbon-nitrogen interface layer can relieve the mismatch of the thermal expansion coefficients between the metal sealing ring base body and the corrosion-resistant and wear-resistant layer, reduce the interface stress, improve the bonding strength between the coating and the metal sealing ring base body, enhance the wear resistance and corrosion resistance of the metal sealing ring; by forming the TiON layer, the friction coefficient of the metal sealing ring is reduced, and the wear resistance and corrosion resistance of the metal sealing ring are improved.

Description

Technical Field

[0001] This invention relates to the field of metal sealing technology, specifically to a corrosion-resistant and wear-resistant metal sealing ring and its preparation method. Background Technology

[0002] Metal sealing rings are core components of oil and gas drilling tools, such as top drives and pumps. With the development of deep wells (tens of thousands of meters), metal sealing rings used in drilling tools are often subjected to high temperature, high pressure, high speed, and corrosive environments, making them prone to wear and corrosion. This leads to a rapid decrease in drilling tool efficiency and adversely affects production safety. How to implement corrosion protection for metal sealing rings under high temperature, high pressure, and high speed conditions has become an urgent problem to be solved in oil and gas drilling tools. Currently, the main way to improve the corrosion resistance of metal sealing rings is to use corrosion-resistant alloys. However, corrosion-resistant alloys are expensive, and even under high temperature, high pressure, and high speed conditions, significant wear and corrosion still occur, resulting in a relatively short service life for metal sealing rings, affecting drilling efficiency and operational safety.

[0003] In view of the above problems, the present invention provides a corrosion-resistant and wear-resistant metal sealing ring and its preparation method. Summary of the Invention

[0004] The technical problem to be solved by this invention is to provide a corrosion-resistant and wear-resistant metal sealing ring and its preparation method. The aim is to address the problem of poor wear resistance and corrosion resistance in existing metal sealing rings under high-speed and corrosive environments.

[0005] The technical solution of the present invention to solve the above-mentioned technical problems is as follows:

[0006] In a first aspect, a corrosion-resistant and wear-resistant metal sealing ring includes a sealing ring substrate, wherein an interface layer and a corrosion-resistant and wear-resistant layer are sequentially disposed on the surface of the sealing ring substrate, the interface layer being a carbon-nitrogen interface layer, and the corrosion-resistant and wear-resistant layer including a TiN layer and a TiON layer, wherein the TiN layer is disposed on the surface of the carbon-nitrogen interface layer, and the TiON layer is disposed on the surface of the TiN layer.

[0007] The beneficial effects of this invention are as follows: By forming a carbon-nitrogen interface layer on the surface of the metal sealing component substrate, the strength of the metal sealing component and its chemical compatibility with the corrosion-resistant and wear-resistant layer prepared on the subsequent surface can be improved; at the same time, the carbon-nitrogen interface layer can alleviate the mismatch of thermal expansion coefficients between the metal sealing ring substrate and the corrosion-resistant and wear-resistant layer, while reducing interface stress and improving the bonding strength between the coating and the metal sealing ring substrate, thereby enhancing the wear resistance and corrosion resistance of the metal sealing ring; by setting the TiON layer on the outer layer of the corrosion-resistant and wear-resistant layer, the friction coefficient of the metal sealing ring is further reduced, while its wear resistance and corrosion resistance are improved; therefore, the metal sealing ring with the above structure of this invention has the advantages of good wear resistance, corrosion resistance, and long service life.

[0008] Based on the above technical solution, the present invention can be further improved as follows.

[0009] Furthermore, the thickness of the anti-corrosion and wear-resistant layer is 5-10 μm, and the thickness of the TiON layer is 1-3 μm.

[0010] Furthermore, the thickness of the carbon-nitrogen interface layer is 0.2-1 μm.

[0011] Furthermore, the material of the sealing ring substrate includes at least one of carbon steel, stainless steel, and corrosion-resistant alloy.

[0012] Secondly, the method for preparing the corrosion-resistant and wear-resistant metal sealing ring includes the following steps:

[0013] (1) The surface of the sealing ring substrate is subjected to carbon-nitrogen (CN) co-diffusion treatment to form an interface layer on the surface of the sealing ring substrate;

[0014] (2) Using isochemical vapor deposition, a TiN layer is deposited on the surface of the interface layer to form a TiN layer, which is the corrosion-resistant and wear-resistant layer of the precursor.

[0015] (3) The corrosion-resistant and wear-resistant layer of the precursor is subjected to controlled oxidation treatment by vacuum oxidation method, and a TiON layer is obtained on the outer surface of the corrosion-resistant and wear-resistant layer of the precursor to obtain a corrosion-resistant and wear-resistant metal sealing ring.

[0016] The beneficial effects of the above preparation method are as follows: by using CVD to set the TiN layer on the surface of the carbon-nitrogen interface layer, it is beneficial to significantly improve the hardness, wear resistance and corrosion resistance of the metal sealing ring. Then, by using a micro-oxidation process to vacuum oxidize the TiN layer to obtain the TiON layer, the friction coefficient of the metal sealing ring is further reduced, while improving its wear resistance and corrosion resistance.

[0017] Further, step (1) includes the following steps: introducing NH3 and C2H2, and performing carbon-nitrogen co-diffusion on the surface of the sealing ring substrate using low-temperature plasma technology, with a co-diffusion temperature of 350-450℃ and a time of 25-35min, to form an interface layer on the surface of the sealing ring substrate;

[0018] Among them, NH3 and C2H are introduced. 2。 The dosage only needs to meet the requirements. Specifically, the flow rate of NH3 and C2H2 can be 100 sccm, and the volume ratio of NH3 to C2H2 can be (2-1):5.

[0019] Step (2) includes the following steps: Under vacuum conditions, in an inert gas, hydrogen and titanium tetrachloride gas stream, the sealing ring substrate obtained in step (1) is subjected to a first deposition process by chemical vapor deposition to form a TiN layer, which is the anti-corrosion and wear-resistant layer of the precursor.

[0020] Step (3) includes the following steps: under vacuum conditions, in an argon and oxygen gas flow, the anti-corrosion and wear-resistant layer of the precursor is subjected to vacuum oxidation treatment to obtain a TiON layer on the outer surface of the anti-corrosion and wear-resistant layer of the precursor, and an anti-corrosion and wear-resistant metal sealing ring is obtained (finally obtaining a TiN-TiON layer).

[0021] Furthermore, step (2) includes the following specific steps:

[0022] (2-1) Place the sealing ring substrate obtained in step (1) into the vacuum chamber, evacuate the vacuum chamber, and then introduce a mixture of hydrogen and argon gas.

[0023] (2-2) The sealing ring substrate and the vacuum chamber (reaction chamber) are subjected to heat treatment;

[0024] (2-3) When the temperature in the vacuum chamber is 700-900℃, titanium tetrachloride and nitrogen are introduced to carry out a chemical reaction, thereby forming a TiN layer on the surface of the interface layer. The deposition pressure is 1×10⁻⁶. 4 Pa-5×10 4 Pa, deposition time 5-8h;

[0025] (2-4) After the TiN layer is prepared, stop the introduction of titanium tetrachloride and nitrogen gas, start the controllable cooling program to cool down, and obtain the corrosion-resistant and wear-resistant layer of the precursor.

[0026] Furthermore, in step (2-1), the vacuum degree of the vacuum chamber is 1×10⁻⁶. -2 Pa-6×10 -2 In step (2-3), a mixture of hydrogen and argon gas is introduced at 200-400 sccm, with a volume ratio of hydrogen to argon of 1.2-1.8; in step (2-4), a mixture of titanium tetrachloride and nitrogen gas is introduced at 650-850 sccm, with a volume ratio of titanium tetrachloride to nitrogen of 1.2-1.5; the cooling temperature range in step (2-5) is 400-600℃.

[0027] Furthermore, step (3) includes the following specific steps:

[0028] (3-1) After obtaining the corrosion-resistant and wear-resistant layer of the precursor, argon gas is introduced at 200-400 sccm and kept at a certain temperature for a period of time; after the heat preservation process is completed, oxygen is introduced and the corrosion-resistant and wear-resistant layer of the precursor is subjected to the first oxidation process.

[0029] (3-2) After the first oxidation process is completed, stop the oxygen supply and adjust the vacuum level of the vacuum chamber to 1×10⁻⁶. 1 Pa-6×10 1 Pa; The heating program is started to raise the temperature of the vacuum chamber to 650-850℃; Oxygen is introduced again to carry out a second oxidation process on the corrosion-resistant and wear-resistant layer of the precursor;

[0030] (3-3) After the second oxidation process is completed, stop the flow of all gases and cool down to room temperature to obtain the corrosion-resistant metal sealing ring.

[0031] Further, in step (3-1), the heat preservation time is 5-8 hours, the oxygen flow rate is 100-300 sccm, and the first oxidation process time is 5-8 hours; in step (3-2), the oxygen flow rate is 500-1000 sccm, and the oxidation time of the second oxidation process is 1-3 hours. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the corrosion-resistant and wear-resistant metal sealing ring structure prepared in Example 1 of the present invention.

[0033] Figure 2 This is a SEM image of the anti-corrosion and wear-resistant layer of the anti-corrosion and wear-resistant metal sealing ring prepared in Example 1 of the present invention.

[0034] Figure 3 This is a test diagram of the adhesion force of the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and wear-resistant metal sealing ring substrate prepared in Example 1 of the present invention.

[0035] Figure 4 The figure shows the average wear rate test of the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and wear-resistant metal sealing ring substrate prepared in Example 1 of the present invention.

[0036] Figure 5 The average corrosion rate test diagram is shown for the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and wear-resistant metal sealing ring substrate prepared in Example 1 of the present invention. Detailed Implementation

[0037] The principles and features of this invention are described below. The examples given are for illustrative purposes only and are not intended to limit the scope of the invention. Where specific techniques or conditions are not specified in the embodiments, they should be performed according to the techniques or conditions described in the literature in this field, or according to the product instructions. Reagents or instruments whose manufacturers are not specified are all conventional products that can be purchased through legitimate channels.

[0038] In the following embodiments, the adhesion test standard is: ISO 20502:2005 Fine ceramics (advanced ceramics, advanced industrial ceramics). The adhesion of the ceramic coating is determined by scratch test;

[0039] Wear performance testing standard: ASTM D1894-01 Test method for static and dynamic coefficients of friction of plastic films and sheets;

[0040] Corrosion performance testing standard: GB-T 18590-2001 Method for evaluating pitting corrosion of metals and alloys.

[0041] Example 1

[0042] This embodiment relates to a corrosion-resistant and wear-resistant metal sealing ring, such as... Figure 1 The system includes a sealing ring substrate, on the surface of which an interface layer and an anti-corrosion and wear-resistant layer are sequentially disposed. The interface layer is a carbon-nitrogen interface layer, and the anti-corrosion and wear-resistant layer includes a TiN layer and a TiON layer. The TiN layer is disposed on the surface of the carbon-nitrogen interface layer, and the TiON layer is disposed on the surface of the TiN layer.

[0043] By forming a carbon-nitrogen interface layer on the surface of the metal seal substrate, the strength of the metal seal and its chemical compatibility with the corrosion-resistant and wear-resistant layer prepared on the subsequent surface can be improved. At the same time, the carbon-nitrogen interface layer can alleviate the mismatch of thermal expansion coefficients between the metal sealing ring substrate and the corrosion-resistant and wear-resistant layer, while reducing interface stress and improving the bonding strength between the coating and the metal sealing ring substrate, thereby enhancing the wear resistance and corrosion resistance of the metal sealing ring. The TiON layer is placed on the outer layer of the corrosion-resistant and wear-resistant layer, which further reduces the friction coefficient of the metal sealing ring and improves its wear resistance and corrosion resistance. Therefore, the metal sealing ring with the above structure of the present invention has the advantages of good wear resistance, corrosion resistance and long service life.

[0044] Preferably, in this embodiment, the thickness of the anti-corrosion and wear-resistant layer is 5-10 μm, and the thickness of the TiON layer is 1-3 μm.

[0045] Preferably, in this embodiment, the thickness of the carbon-nitrogen interface layer is 0.2-1 μm.

[0046] Preferably, in this embodiment, the material of the sealing ring substrate includes at least one of carbon steel, stainless steel, and corrosion-resistant alloy.

[0047] Example 2

[0048] This embodiment relates to a method for preparing a corrosion-resistant and wear-resistant metal sealing ring, comprising the following steps:

[0049] 1. Formation of the carbon-nitrogen interface layer:

[0050] (1-1) The metal sealing ring substrate is ground to remove impurities, and then the surface is sandblasted with white corundum sand. After that, the surface is polished, and then the substrate is ultrasonically cleaned with alcohol. After that, the cleaned metal sealing ring substrate is placed in an oven and dried at 100°C for 5 hours before being placed in a vacuum device.

[0051] (1-2) Use a vacuum pump assembly to evacuate the chamber to a vacuum level of 10. -4 Pa; then a certain amount of argon gas is introduced, and a high-frequency pulse voltage is applied to form a high-energy argon plasma to clean the surface of the metal sealing ring substrate. The cleaning time is 20 minutes.

[0052] (1-3) Formation of carbon-nitrogen interface layer: After cleaning, a certain amount of NH3 and C2H2 are introduced, and CN co-infiltrates the surface of the metal sealing ring substrate by low temperature plasma technology. The co-infiltrating temperature is 400℃ and the CN co-infiltrating time is 30min.

[0053] 2. Formation of the anti-corrosion and wear-resistant layer:

[0054] (2-1) Place the metal sealing ring containing the CN interface layer into the CVD apparatus, and use a two-stage vacuum pump set to evacuate the CVD apparatus to 2×10⁻⁶. -2 Pa, then hydrogen and argon are introduced simultaneously, with a hydrogen flow rate of 150 sccm and an argon flow rate of 100 sccm; the furnace heating program is started, with the heating rate set to 3℃ / min and the deposition temperature set to 780℃.

[0055] (2-2) A TiN coating was prepared on the surface of a metal sealing ring substrate containing a CN interface layer by chemical vapor deposition, including the following steps: the CVD heating device was used to heat the substrate to 600℃ at 5℃ / min and hold it for 1 h, then heated to 780℃ at 3℃ / min, and then the coating deposition process was initiated, with titanium tetrachloride, methane, nitrogen and auxiliary gases introduced, wherein the flow rate of titanium tetrachloride was 300 sccm, the flow rate of nitrogen was 450 sccm, the deposition time was 6 h, and the deposition pressure was 4×10⁻⁶. 4 Pa;

[0056] (2-3) After deposition, the CVD device enters the controllable cooling mode, stops the supply of titanium tetrachloride and nitrogen, and cools down at a rate of 8℃ / min until it reaches 550℃.

[0057] (2-4) When the temperature in the reaction chamber drops to 550℃, 300 sccm of argon gas is introduced and kept at that temperature for 7 hours.

[0058] (2-5) After the heat preservation is completed, high-purity oxygen is introduced to carry out a vacuum first oxidation reaction process on the metal sealing ring substrate coated with TiN layer. The temperature of the first oxidation process is 550℃, the oxygen flow rate is 200sccm, and the time of the first oxidation process is 8h.

[0059] (2-6) After the first oxidation process is completed, stop the oxygen supply and adjust the vacuum level in the reaction chamber to 3×10⁻⁶. 1 Pa, then the reaction chamber is heated again to 830°C;

[0060] (2-7) When the reaction chamber is heated to 830°C, oxygen is introduced to carry out a second oxidation process on the metal sealing ring after the first oxidation process. The temperature of the second oxidation process is 830°C, the oxygen flow rate is 800 sccm, and the time of the second oxidation process is 2.5h.

[0061] (2-8) After the second oxidation process is completed, stop the introduction of all gases and allow it to cool naturally to room temperature to obtain the corrosion-resistant metal sealing ring.

[0062] Figure 2 This is a test image of the cross-sectional morphology of the corrosion-resistant metal sealing ring obtained in Example 2 of this application. Figure 2 It can be seen that the corrosion-resistant and wear-resistant layer on the surface of the corrosion-resistant and wear-resistant metal sealing ring substrate obtained in Example 2 is tightly bonded to the metal sealing ring substrate, the coating has high density, and the thickness of the corrosion-resistant and wear-resistant layer (TiN-TiON layer) is about 5 micrometers.

[0063] Figure 3 This image shows the test results of the adhesion between the corrosion-resistant and wear-resistant layer on the surface of the corrosion-resistant and wear-resistant metal sealing ring substrate obtained in Example 2 of this application. Figure 3 It can be seen that the bonding force value of the anti-corrosion and wear-resistant layer on the surface of the anti-corrosion and wear-resistant metal sealing ring substrate obtained in Example 2 is 55N.

[0064] Figure 4 This image shows the wear performance test results of the corrosion-resistant metal sealing ring prepared in Example 2 of this application. Figure 4 It can be seen that the average wear rate of the corrosion-resistant metal sealing ring obtained in Example 2 is 2.5 × 10⁻⁶. -6 mm 3 N -1 m -1 .

[0065] Figure 5 This is a graph showing the average corrosion rate test results of the corrosion-resistant metal sealing ring prepared in Example 2 of this application. Figure 5 It can be seen that the average corrosion rate of the corrosion-resistant metal sealing ring obtained in Example 2 is 0.0033 mm / a.

[0066] Example 3

[0067] The only difference between this embodiment and embodiment 2 is that the co-percolation temperature in steps (1-3) is 800℃.

[0068] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 42N and an average wear rate of 5.5×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0065 mm / a.

[0069] Example 4

[0070] The only difference between this embodiment and embodiment 2 is that the deposition temperature in step (2-1) is 650°C.

[0071] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 38N and an average wear rate of 8.3×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0081 mm / a.

[0072] Example 5

[0073] The only difference between this embodiment and embodiment 2 is that the deposition temperature in step (2-1) is 900℃.

[0074] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 41N and an average wear rate of 6.7×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0095 mm / a.

[0075] Example 6

[0076] The only difference between this embodiment and embodiment 2 is that in step (2-5), the temperature of the first oxidation process is 450°C.

[0077] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 35N and an average wear rate of 9.7×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0120 mm / a.

[0078] Example 7

[0079] The only difference between this embodiment and embodiment 2 is that the temperature of the first oxidation process in steps (2-5) is 650°C.

[0080] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 43N and an average wear rate of 5.1×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0056 mm / a.

[0081] Example 8

[0082] The only difference between this embodiment and embodiment 2 is that the oxygen flow rate is 100 sccm in steps (2-5).

[0083] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 46N and an average wear rate of 4.3×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0049 mm / a.

[0084] Example 9

[0085] The only difference between this embodiment and embodiment 2 is that the oxygen flow rate is 500 sccm in steps (2-7).

[0086] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 40N and an average wear rate of 4.5×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0052 mm / a.

[0087] Example 10

[0088] The only difference between this embodiment and embodiment 2 is that the temperature of the second oxidation process in steps (2-7) is 750°C.

[0089] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 45N and an average wear rate of 4.2×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0041 mm / a.

[0090] Example 11

[0091] The only difference between this embodiment and embodiment 2 is that the temperature of the second oxidation process in steps (2-7) is 930°C.

[0092] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 43N and an average wear rate of 4.8×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0059 mm / a.

[0093] Example 12

[0094] The only difference between this embodiment and embodiment 2 is that the oxygen flow rate is 600 sccm in steps (2-7).

[0095] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 48N and an average wear rate of 3.2×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0040 mm / a.

[0096] Example 13

[0097] The only difference between this embodiment and embodiment 2 is that in steps (2-7), the oxygen flow rate is 1000 sccm℃.

[0098] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 50N and an average wear rate of 3.4×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.0039 mm / a.

[0099] Comparative Example 1

[0100] The only difference between this embodiment and embodiment 2 is that the deposition temperature is 930°C in step (2-1).

[0101] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 32N and an average wear rate of 12.3×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.7347 mm / a.

[0102] Comparative Example 2

[0103] The only difference between this embodiment and embodiment 2 is that in step (2-5), the first oxidation temperature is 400°C.

[0104] The corrosion-resistant and wear-resistant metal sealing ring obtained in this embodiment has a bonding force of 34N and an average wear rate of 11.5×10⁻⁶. - 6 mm 3 N -1 m -1 The average corrosion rate is 0.06522 mm / a.

[0105] In summary, forming a carbon-nitrogen interface layer on the surface of the metal seal substrate can improve the strength of the metal seal and its chemical compatibility with the corrosion-resistant and wear-resistant layer prepared on the subsequent surface. Simultaneously, the carbon-nitrogen interface layer can alleviate the mismatch in thermal expansion coefficients between the metal sealing ring substrate and the corrosion-resistant and wear-resistant layer, while reducing interfacial stress and improving the bonding strength between the coating and the metal sealing ring substrate, thus enhancing the wear resistance and corrosion resistance of the metal sealing ring. Furthermore, placing the TiON layer on the outer layer of the corrosion-resistant and wear-resistant layer further reduces the friction coefficient of the metal sealing ring and improves its wear resistance and corrosion resistance. Therefore, the metal sealing ring with the above structure of this invention has advantages such as good wear resistance, corrosion resistance, and long service life.

[0106] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A corrosion-resistant and wear-resistant metal sealing ring, comprising a sealing ring base, characterized in that, The surface of the sealing ring substrate is sequentially provided with an interface layer and an anti-corrosion and wear-resistant layer. The interface layer is a carbon-nitrogen interface layer. The anti-corrosion and wear-resistant layer includes a TiN layer and a TiON layer. The TiN layer is disposed on the surface of the carbon-nitrogen interface layer, and the TiON layer is disposed on the surface of the TiN layer. The thickness of the anti-corrosion and wear-resistant layer is 5-10 μm, and the thickness of the TiON layer is 1-3 μm; The thickness of the carbon-nitrogen interface layer is 0.2-1 μm.

2. The corrosion-resistant and wear-resistant metal sealing ring according to claim 1, characterized in that, The material of the sealing ring substrate includes at least one of carbon steel and stainless steel.

3. A method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to any one of claims 1 to 2, characterized in that, Includes the following steps: (1) The surface of the sealing ring substrate is subjected to carbon-nitrogen co-diffusion treatment to form an interface layer on the surface of the sealing ring substrate; (2) Using isochemical vapor deposition, a TiN layer is deposited on the surface of the interface layer to form a TiN layer, which is the corrosion-resistant and wear-resistant layer of the precursor. (3) The corrosion-resistant and wear-resistant layer of the precursor is subjected to controlled oxidation treatment by vacuum oxidation method, and a TiON layer is obtained on the outer surface of the corrosion-resistant and wear-resistant layer of the precursor to obtain a corrosion-resistant and wear-resistant metal sealing ring.

4. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 3, characterized in that, Step (1) includes the following steps: introducing NH3 and C2H2, and performing carbon-nitrogen co-diffusion on the surface of the sealing ring substrate using low-temperature plasma technology, with a co-diffusion temperature of 350-450℃ and a time of 25-35min, to form an interface layer on the surface of the sealing ring substrate; Step (2) includes the following steps: Under vacuum conditions, in an inert gas, hydrogen and titanium tetrachloride gas stream, the sealing ring substrate obtained in step (1) is subjected to a first deposition process by chemical vapor deposition to form a TiN layer, which is the anti-corrosion and wear-resistant layer of the precursor. Step (3) includes the following steps: under vacuum conditions, in an argon and oxygen gas flow, the anti-corrosion and wear-resistant layer of the precursor is subjected to vacuum oxidation treatment to obtain a TiON layer on the outer surface of the anti-corrosion and wear-resistant layer of the precursor, thereby obtaining an anti-corrosion and wear-resistant metal sealing ring.

5. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 4, characterized in that, Step (2) includes the following specific steps: (2-1) Place the sealing ring substrate obtained in step (1) into the vacuum chamber, evacuate the vacuum chamber, and then introduce a mixture of hydrogen and argon gas. (2-2) The sealing ring substrate and the vacuum chamber are subjected to heat treatment; (2-3) When the temperature in the vacuum chamber is 700-900℃, titanium tetrachloride and nitrogen are introduced to carry out a chemical reaction, thereby forming a TiN layer on the surface of the interface layer. The deposition pressure is 1×10⁻⁶. 4 Pa-5×10 4 Pa, deposition time 5-8h; (2-4) After the TiN layer is prepared, stop the introduction of titanium tetrachloride and nitrogen gas, start the controllable cooling program to cool down, and obtain the corrosion-resistant and wear-resistant layer of the precursor.

6. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 5, characterized in that, In step (2-1), the vacuum level of the vacuum chamber is 1×10⁻⁶. -2 Pa-6×10 -2 Pa, a mixture of hydrogen and argon is introduced at 200-400 sccm, the volume ratio of hydrogen to argon being 1.2-1.8; in step (2-3), a mixture of titanium tetrachloride and nitrogen is introduced at 650-850 sccm, the volume ratio of titanium tetrachloride to nitrogen being 1.2-1.5; in step (2-4), the cooling temperature range is 400-600℃.

7. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 4, characterized in that, Step (3) includes the following specific steps: (3-1) After obtaining the corrosion-resistant and wear-resistant layer of the precursor, argon gas is introduced at 200-400 sccm and kept at a certain temperature for a period of time; after the heat preservation process is completed, oxygen is introduced and the corrosion-resistant and wear-resistant layer of the precursor is subjected to the first oxidation process. (3-2) After the first oxidation process is completed, stop the oxygen supply and adjust the vacuum level of the vacuum chamber to 1×10⁻⁶. 1 Pa-6×10 1 Pa; The heating program is started to raise the temperature of the vacuum chamber to 650-850℃; Oxygen is introduced again to carry out a second oxidation process on the corrosion-resistant and wear-resistant layer of the precursor; (3-3) After the second oxidation process is completed, stop the flow of all gases and cool down to room temperature to obtain the corrosion-resistant metal sealing ring.

8. The method for preparing the corrosion-resistant and wear-resistant metal sealing ring according to claim 7, characterized in that, In step (3-1), the heat preservation time is 5-8 hours, the oxygen flow rate is 100-300 sccm, and the first oxidation process takes 5-8 hours; in step (3-2), the oxygen flow rate is 500-1000 sccm, and the oxidation time of the second oxidation process is 1-3 hours.

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