Method for measuring and evaluating uniformity of periodic high-density cylindrical object

Abstract

The invention provides a method for measuring and evaluating the uniformity of a periodic high-density cylindrical object, and the method comprises the steps: S1, obtaining the data of the height and coordinates of the periodic high-density cylindrical object through a microscope, and organizing the data into a data matrix; s2, according to the collected data matrix, reconstructing and drawing the original morphology of the periodic high-density cylindrical object, calculating the average height of the periodic high-density cylindrical object, and setting the relative height of which the uniformity needs to be calculated; s3, determining coordinates of the center of each periodic high-density cylindrical object contained in the data matrix; s4, for each periodic high-density cylindrical object, calculating the sectional area of the periodic high-density cylindrical object at a set relative height, and storing a result into a sectional area data matrix; s5, carrying out statistical analysis on the sectional area data matrix; and S6, according to a calculation result in the step S4, drawing a periodic high-density cylindrical object sectional view at a set relative height.

Description

Technical Field

[0001] The invention relates to the technical field of material detection and evaluation, and in particular to a method for measuring the average height and uniformity of a high-density columnar object. Background Art

[0002] High-density cylindrical objects are mainly conventional ways of interconnecting area array and linear semiconductor optoelectronic chips with integrated circuits, such as indium column flip solder interconnection and copper-copper interconnection in the preparation process of cameras. Therefore, the growth quality of cylindrical objects, including growth height, uniformity and other indicators, directly affects the working performance of the interconnected devices. If the cylindrical objects used for interconnection have poor uniformity, it cannot be guaranteed that the signal of each pixel can be output normally, which will greatly affect the yield and blind pixel rate of the device.

[0003] At present, conventional detection methods for columnar objects include observations using microscopes, laser confocal microscopes, SEM, etc. After observing the sample or taking an image, the height of periodic high-density columnar objects within the field of view can be manually measured by relying on the simple measurement software that comes with some microscopes. Measuring the number of periodic high-density columnar objects completely relies on manual operation, and measuring one by one is very inefficient. It is impossible to quickly and uniformly analyze all periodic high-density columnar objects within the field of view, and it is impossible to analyze the uniformity and fullness of high-density columnar objects. Therefore, the existing methods are qualitative rather than quantitative in their evaluation of high-density columnar objects, and are subjective rather than observable. It is also impossible to obtain the uniformity, fullness, and other parameters of the entire periodic high-density columnar object that are crucial to interconnection. Summary of the invention

[0004] The purpose of the present invention is to provide a method for measuring and evaluating the uniformity of periodic high-density columnar objects, which can quickly and quantitatively detect the uniformity of high-density periodic distributed columnar objects and quickly determine whether they meet the requirements for the next process step.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A method for measuring and evaluating the uniformity of a periodic high-density cylindrical object, used for measuring and evaluating the uniformity of a periodic high-density cylindrical object, comprises the following steps:

[0007] Step S1: using a microscope to obtain the height and coordinate data of a periodic high-density cylindrical object, and organizing it into a data matrix;

[0008] Step S2: reconstructing and drawing the original morphology of the periodic high-density columnar object according to the collected data matrix, calculating the average height of the periodic high-density columnar object, and setting the relative height for which uniformity needs to be calculated;

[0009] Step S3: determining the coordinates of the center of each periodic high-density cylindrical object included in the data matrix;

[0010] Step S4: for each periodic high-density cylindrical object, calculate its cross-sectional area at a set relative height, and store the result in a cross-sectional area data matrix;

[0011] Step S5: performing statistical analysis on the cross-sectional area data matrix, including calculating the mean value, standard deviation and coefficient of variation to evaluate uniformity;

[0012] Step S6: based on the calculation result of step S4, a cross-sectional diagram of the periodic high-density cylindrical object at a set relative height is drawn.

[0013] Preferably, the step S2 of calculating the average height of the periodic high-density columnar object comprises:

[0014] Step S21: bottom area calculation: set the step value in the bottom area, calculate the number of data points contained in each bottom step value, find the step interval with the largest number of data points, average the height values ​​z of all data points in the interval, and use the obtained value as the bottom z value of the cylindrical object;

[0015] Step S22: top area calculation: set the step value in the top area, calculate the number of data points contained in each section of the top step value, find the step interval with the largest number of data points, average the height values ​​z of all data points in the interval, and use the obtained value as the top z value of the cylindrical object;

[0016] Step S23: Average height of the periodic high-density columnar object: the difference between the top z value and the bottom z value of the columnar object is the average height of the periodic high-density columnar object.

[0017] Preferably, in step S3, the coordinates of the center of each periodic high-density cylindrical object contained in the data matrix are determined, including using the contour function in MATLAB to obtain a contour function matrix at half the average height, which contains the data point coordinates of all the periodic high-density cylindrical objects at half the average height, and averaging the x value and y value of the coordinates of each data point of the periodic high-density cylindrical object to obtain the coordinates of the center of each periodic high-density cylindrical object.

[0018] Preferably, the specific steps of step S3 include:

[0019] Step S31: Determine half of the average height value of the periodic high-density cylindrical object calculated in step S2.

[0020] Step S32: Using the contour function in MATLAB, extract z=h based on the data matrix mid The contour data matrix ContourMatrix;

[0021] This matrix contains the coordinates (x, y) of all data points of the periodic high-density cylindrical objects at half the average height;

[0022] Step S33: separating a set of data points belonging to each of the periodic high-density cylindrical objects from ContourMatrix;

[0023] Step S34: For each set of data points of the periodic high-density cylindrical object, the average values ​​of the x and y coordinates are calculated respectively:

[0024]

[0025] Where N is the number of data points belonging to the periodic high-density cylindrical object, and the coordinates (x center ,y center ).

[0026] Preferably, in step S4, for each periodic high-density cylindrical object, its cross-sectional area is calculated at a set relative height, and the result is stored in a cross-sectional area data matrix, including using the coordinates of the center obtained in step S3, and dividing the height and coordinate data matrix of all the initial cylindrical objects into a separate height and coordinate data matrix of each periodic high-density cylindrical object according to the periodic spacing between the periodic high-density cylindrical objects. A contour function is used for each of the periodic high-density cylindrical objects to obtain a contour function matrix for each of the periodic high-density cylindrical objects at a given height, which includes the data point coordinates of the periodic high-density cylindrical object at a given height, and a polyarea function is used to obtain the cross-sectional area of ​​each of the periodic high-density cylindrical objects at a given height, and the result is stored in the cross-sectional area matrix of the periodic high-density cylindrical object at a given height.

[0027] Preferably, the specific steps of step S4 include:

[0028] Step S41: using the center coordinates of each of the periodic high-density cylindrical objects obtained in step S3, according to the periodic spacing d between the periodic high-density cylindrical objects, the initial data matrix is ​​divided into independent sub-matrices, each sub-matrix corresponding to the height and coordinate data of one of the periodic high-density cylindrical objects;

[0029] Step S42: For each independent sub-matrix of the height and coordinates of the periodic high-density cylindrical object, use the contour function in MATLAB to extract the coordinates at the specified relative height z=h relative Contour line data at the height, obtaining the contour point (x, y) of the periodic high-density cylindrical object at the height;

[0030] Step S43: Using the polyarea function in MATLAB, calculate the cross-sectional area A for the contour points (x, y) in the contour data:

[0031] A = polyarea(x, y).

[0032] Preferably, in step S5, the cross-sectional area data matrix is ​​statistically analyzed, including calculating the mean value, standard deviation and coefficient of variation to evaluate uniformity, including using the cross-sectional area data matrix of all the periodic high-density cylindrical objects at a given height obtained in step S4 to calculate the mean value, standard deviation and coefficient of variation of the cross-sectional area at a given height, and generating an analysis report.

[0033] Preferably, the specific steps of step S5 include:

[0034] Step S51: Using the cross-sectional area data matrix of all the periodic high-density cylindrical objects at a given height obtained in step S4, AreaMatrix = [A1, A2, ..., A n ], where A i represents the cross-sectional area of ​​the i-th periodic high-density cylindrical object;

[0035] Step S52: Calculate the mean μ:

[0036]

[0037] Where n is the total number of cylindrical objects;

[0038] Standard deviation σ:

[0039]

[0040] Coefficient of variation CV:

[0041]

[0042] Step S53: Arrange the statistical results into a report, including the following information:

[0043] Given height h relative , the mean, standard deviation and coefficient of variation of the cross-sectional area data matrix AreaMatrix and simple visualization of the data include bar charts, histograms or box plots to intuitively present the cross-sectional area distribution.

[0044] Compared with the prior art, the present invention has the following beneficial effects:

[0045] (1) The present invention realizes the fully automatic measurement and analysis of all cylindrical objects in a single field of view or multiple fields of view through a high-precision microscope combined with algorithm analysis, greatly improving the detection efficiency and meeting the needs of rapid evaluation of large-scale high-density cylindrical objects.

[0046] (2) Based on the three-dimensional height and coordinate data, the present invention uses an algorithm to accurately calculate the average height of the column, the cross-sectional area at different heights, the standard deviation and the coefficient of variation, and other parameters, thereby achieving a quantitative analysis of the growth quality of the columnar object. The results are objective and consistent, providing a reliable basis for the optimization of the interconnection process.

[0047] (3) The present invention can comprehensively evaluate the uniformity and fullness of cylindrical objects by statistically calculating the mean, standard deviation and coefficient of variation of the cross-sectional area. These indicators directly reflect whether the growth quality meets the interconnection requirements, which helps to reduce the blind pixel rate of the device and improve the yield.

[0048] (4) The present invention supports unified analysis of all cylindrical objects in a single field of view or multiple fields of view to obtain overall uniformity, fullness and growth quality parameters, providing a global reference for device performance evaluation.

[0049] (5) The present invention accurately analyzes indicators such as column growth height and uniformity, timely discovers process defects and provides feedback on optimization directions, effectively improves the yield of the device, reduces the blind pixel rate, and ensures stable output of each pixel signal after interconnection.

[0050] (6) The present invention realizes automatic analysis report generation based on computer algorithms, including data statistics, chart display and parameter summary, providing an efficient and convenient tool for research and development and quality control. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 A high-density cylindrical object qualitative analysis program interface provided by an embodiment of the present invention;

[0052] Figure 2 A periodic high-density cylindrical object restoration diagram provided by an embodiment of the present invention;

[0053] Figure 3A cross-sectional view of a high-density cylindrical object when a height of 50% is set provided in an embodiment of the present invention;

[0054] Figure 4 An analysis report is provided for an embodiment of the present invention.

[0055] Figure 5 Flow chart of the method of the present invention. DETAILED DESCRIPTION

[0056] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0057] like Figure 5 As shown, a method for measuring and evaluating the uniformity of a periodic high-density cylindrical object provided by this embodiment, the specific steps are as follows:

[0058] Step S1: First, use a confocal microscope, a white light microscope or other instruments to capture and obtain periodic high-density cylindrical object images, and export and save their height and coordinate data files.

[0059] like Figure 1 Open the program interface as shown, fill in the necessary parameters, click start, and a pop-up window will pop up for selecting the file path to be calculated, and then the automatic calculation will begin.

[0060] Step S2: Figure 2 As shown, restore and draw its original morphology and then calculate the average height of the cylinder. The specific steps are as follows:

[0061] Step S21: bottom area calculation: set the step value in the bottom area, calculate the number of data points contained in each bottom step value, find the step interval with the largest number of data points, average the height values ​​z of all data points in the interval, and use the obtained value as the bottom z value of the cylindrical object;

[0062] Step S22: top area calculation: set the step value in the top area, calculate the number of data points contained in each section of the top step value, find the step interval with the largest number of data points, average the height values ​​z of all data points in the interval, and use the obtained value as the top z value of the cylindrical object;

[0063] Step S23: Average height of the periodic high-density columnar object: the difference between the top z value and the bottom z value of the columnar object is the average height of the periodic high-density columnar object.

[0064] Step S3: Then determine the coordinates of the center of each cylindrical object included in the data matrix. The specific steps are as follows:

[0065] Step S31: Determine half of the average height value of the periodic high-density cylindrical object calculated in step S2.

[0066] Step S32: Using the contour function in MATLAB, extract z=h based on the data matrix mid The contour data matrix ContourMatrix;

[0067] This matrix contains the coordinates (x, y) of all data points of the periodic high-density cylindrical objects at half the average height;

[0068] Step S33: separating a set of data points belonging to each of the periodic high-density cylindrical objects from ContourMatrix;

[0069] Step S34: For each set of data points of the periodic high-density cylindrical object, the average values ​​of the x and y coordinates are calculated respectively:

[0070]

[0071] Where N is the number of data points belonging to the periodic high-density cylindrical object, and the coordinates (x center ,y center ).

[0072] Step S4: Then, the cross-sectional area of ​​each cylindrical object at a given relative height is calculated and stored in a cross-sectional area data matrix. The specific method is as follows:

[0073] Step S41: using the center coordinates of each of the periodic high-density cylindrical objects obtained in step S3, according to the periodic spacing d between the periodic high-density cylindrical objects, the initial data matrix is ​​divided into independent sub-matrices, each sub-matrix corresponding to the height and coordinate data of one of the periodic high-density cylindrical objects;

[0074] Step S42: For each independent sub-matrix of the height and coordinates of the periodic high-density cylindrical object, use the contour function in MATLAB to extract the coordinates at the specified relative height z=h relative Contour line data at the height, obtaining the contour point (x, y) of the periodic high-density cylindrical object at the height;

[0075] Step S43: Using the polyarea function in MATLAB, calculate the cross-sectional area A for the contour points (x, y) in the contour data:

[0076] A = polyarea(x, y).

[0077] Draw as Figure 3 The cross-sectional view at a given height is shown and stored in the cross-sectional area matrix at a given height of the cylinder.

[0078] Step S5: Finally, according to the cross-sectional area data matrix of each cylinder at a given height, the mean, standard deviation and coefficient of variation of the cross-sectional area at a given height are calculated. The specific steps are as follows:

[0079] The cross-sectional area data matrix of all the periodic high-density cylindrical objects at a given height obtained in step S4 is AreaMatrix=[A1, A2, ..., A n ], where A i represents the cross-sectional area of ​​the i-th periodic high-density cylindrical object;

[0080] Step S52: Calculate the mean μ:

[0081]

[0082] Where n is the total number of cylindrical objects;

[0083] Standard deviation σ:

[0084]

[0085] Coefficient of variation CV:

[0086]

[0087] Step S53: Figure 4 The statistical results are organized into a report as shown, including the following information:

[0088] Given height h relative , the mean, standard deviation and coefficient of variation of the cross-sectional area data matrix AreaMatrix and simple visualization of the data include bar charts, histograms or box plots to intuitively present the cross-sectional area distribution.

[0089] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0090] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0091] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A method for measuring and evaluating the uniformity of a periodic high-density cylindrical object, used for measuring and evaluating a periodic high-density cylindrical object, characterized in that: The steps include: Step S1: using a microscope to obtain the height and coordinate data of a periodic high-density cylindrical object, and organizing it into a data matrix; Step S2: reconstructing and drawing the original morphology of the periodic high-density columnar object according to the collected data matrix, calculating the average height of the periodic high-density columnar object, and setting the relative height for which uniformity needs to be calculated; Step S3: determining the coordinates of the center of each periodic high-density cylindrical object included in the data matrix; Step S4: for each periodic high-density cylindrical object, calculate its cross-sectional area at a set relative height, and store the result in a cross-sectional area data matrix; Step S5: performing statistical analysis on the cross-sectional area data matrix, including calculating the mean value, standard deviation and coefficient of variation to evaluate uniformity; Step S6: based on the calculation result of step S4, a cross-sectional diagram of the periodic high-density cylindrical object at a set relative height is drawn.

2. The method for measuring and evaluating uniformity of a periodic high-density cylindrical object according to claim 1, characterized in that: The step S2 of calculating the average height of the periodic high-density columnar object comprises: Step S21: bottom area calculation: set the step value in the bottom area, calculate the number of data points contained in each bottom step value, find the step interval with the largest number of data points, average the height values ​​z of all data points in the interval, and use the obtained value as the bottom z value of the cylindrical object; Step S22: top area calculation: set the step value in the top area, calculate the number of data points contained in each section of the top step value, find the step interval with the largest number of data points, average the height values ​​z of all data points in the interval, and use the obtained value as the top z value of the cylindrical object; Step S23: Average height of the periodic high-density columnar object: the difference between the top z value and the bottom z value of the columnar object is the average height of the periodic high-density columnar object.

3. The method for measuring and evaluating uniformity of a periodic high-density cylindrical object according to claim 1, characterized in that: In the step S3, the coordinates of the center of each periodic high-density cylindrical object contained in the data matrix are determined, including using the contour function in MATLAB to obtain a contour function matrix at half the average height, which contains the data point coordinates of all the periodic high-density cylindrical objects at half the average height. The x value and y value of the coordinates of each data point of the periodic high-density cylindrical object are averaged to obtain the coordinates of the center of each periodic high-density cylindrical object.

4. The method for measuring and evaluating the uniformity of a periodic high-density cylindrical object according to claim 3, characterized in that: The specific steps of step S3 include: Step S31: Determine half of the average height value of the periodic high-density cylindrical object calculated in step S2. Step S32: Using the contour function in MATLAB, extract z=h based on the data matrix mid The contour data matrix ContourMatrix; This matrix contains the coordinates (x, y) of all data points of the periodic high-density cylindrical objects at half the average height; Step S33: separating a set of data points belonging to each of the periodic high-density cylindrical objects from ContourMatrix; Step S34: For each set of data points of the periodic high-density cylindrical object, the average values ​​of the x and y coordinates are calculated respectively: Where N is the number of data points belonging to the periodic high-density cylindrical object, and the coordinates (x center ,y center ).

5. The method for measuring and evaluating the uniformity of a periodic high-density cylindrical object according to claim 1, characterized in that: In step S4, for each periodic high-density cylindrical object, its cross-sectional area is calculated at a set relative height, and the result is stored in a cross-sectional area data matrix, including the coordinates of the center obtained in step S3, and the height and coordinate data matrix of all the initial cylindrical objects is divided into the height and coordinate data matrix of each individual periodic high-density cylindrical object according to the periodic spacing between the periodic high-density cylindrical objects. A contour function is used for each periodic high-density cylindrical object to obtain a contour function matrix for each periodic high-density cylindrical object at a given height, which includes the data point coordinates of the periodic high-density cylindrical object at a given height, and a polyarea function is used to obtain the cross-sectional area of ​​each periodic high-density cylindrical object at a given height, and the result is stored in the cross-sectional area matrix of the periodic high-density cylindrical object at a given height.

6. A method for measuring and evaluating uniformity of a periodic high-density cylindrical object according to claim 5, characterized in that: The specific steps of step S4 include: Step S41: using the center coordinates of each of the periodic high-density cylindrical objects obtained in step S3, according to the periodic spacing d between the periodic high-density cylindrical objects, the initial data matrix is ​​divided into independent sub-matrices, each sub-matrix corresponding to the height and coordinate data of one of the periodic high-density cylindrical objects; Step S42: For each independent sub-matrix of the height and coordinates of the periodic high-density cylindrical object, use the contour function in MATLAB to extract the height and coordinates of the periodic high-density cylindrical object at the specified relative height z=h relatiove Contour line data at the height, obtaining the contour point (x, y) of the periodic high-density cylindrical object at the height; Step S43: Using the polyarea function in MATLAB, calculate the cross-sectional area A for the contour points (x, y) in the contour data: A=polyarea(x,y).

7. The method for measuring and evaluating the uniformity of a periodic high-density cylindrical object according to claim 1, characterized in that: In the step S5, the cross-sectional area data matrix is ​​statistically analyzed, including calculating the mean value, standard deviation and coefficient of variation to evaluate uniformity, including using the cross-sectional area data matrix of all the periodic high-density cylindrical objects at a given height obtained in the step S4 to calculate the mean value, standard deviation and coefficient of variation of the cross-sectional area at a given height, and generating an analysis report.

8. The method for measuring and evaluating the uniformity of a periodic high-density cylindrical object according to claim 7, characterized in that: The specific steps of step S5 include: Step S51: Using the cross-sectional area data matrix of all the periodic high-density cylindrical objects at a given height obtained in step S4, AreaMatrix = [A1, A2, ..., A n ], where A i represents the cross-sectional area of ​​the i-th periodic high-density cylindrical object; Step S52: Calculate the mean μ: Where n is the total number of cylindrical objects; Standard deviation σ: Coefficient of variation CV: Step S53: Arrange the statistical results into a report, including the following information: Given height h relative , the mean, standard deviation and coefficient of variation of the cross-sectional area data matrix AreaMatrix and simple visualization of the data include bar charts, histograms or box plots to intuitively present the cross-sectional area distribution.

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