Measurement processing method, system and platform suitable for array measurement and with different lens magnifications

Abstract

The invention discloses a measurement processing method, system and platform suitable for array measurement and with different lens magnifications. First data corresponding to a workpiece to be measured and processed is generated and obtained through the method; wherein the first data is array distribution characteristic data; based on the first data, creating a mapping relation between a measurement program step and an optical magnification, and generating second data corresponding to the program step; wherein the second data is the optimal optical magnification data required by each program step; traversing and executing program steps corresponding to the second data in the measurement processing array, and generating and outputting corresponding third data; wherein the third data is measurement data corresponding to the to-be-measured workpiece, and the system and the platform corresponding to the method can reduce the number of times of zooming, prolong the service life of a lens, improve the measurement efficiency, improve the measurement efficiency, and are suitable for precise measurement scenes of high-density array workpieces.

Description

Technical Field

[0001] The present invention belongs to the technical field of laser scanning speed processing, and in particular relates to a measurement processing method, system and platform suitable for array measurement and different lens magnifications. Background Art

[0002] Image measurement technology is currently the most widely used measurement method in the field of non-contact precision measurement, with advantages such as fast measurement speed and high accuracy (up to micron level). In array measurement mode, multiple workpieces are placed in rows and columns with equal spacing or circular arrays with equal angles, or there are parts with equal spacing or equal angles on a single workpiece, and each workpiece or part needs to be measured in turn. Due to the measurement accuracy requirements, the lens is usually required to measure at different magnifications, and the lens will have mechanical wear when switching magnifications. The more times the magnification is changed, the shorter the service life.

[0003] In the traditional array measurement method, if M array workpieces are measured, each workpiece needs to switch the magnification N times, and the total number of magnification changes is M×N times, which leads to serious wear and tear of the lens and shortens the service life. In addition, the traditional method adopts a serial measurement mode, which is inefficient and does not fully utilize the parallel characteristics of array measurement.

[0004] Therefore, in view of the technical problems of the above-mentioned serial measurement mode, low efficiency, and failure to fully utilize the parallel characteristics of array measurement, it is urgent to design and develop a measurement processing method, system and platform suitable for array measurement and different lens magnifications. Summary of the invention

[0005] In order to overcome the deficiencies and difficulties of the above-mentioned prior art, the present invention provides a measurement processing method, system and platform suitable for array measurement and lens with different magnifications, which can reduce the number of magnification changes, extend the life of the lens and improve the measurement efficiency.

[0006] The first object of the present invention is to provide a measurement and processing method suitable for array measurement with different lens magnifications; the second object of the present invention is to provide a measurement and processing system suitable for array measurement with different lens magnifications; the third object of the present invention is to provide a measurement and processing platform suitable for array measurement with different lens magnifications.

[0007] The first object of the present invention is achieved in that the method comprises: Generate and obtain first data corresponding to the workpiece to be measured; wherein the first data is array distribution feature data; Based on the first data, a mapping relationship between a measurement program step and an optical magnification is created, and second data corresponding to the program step is generated; wherein the second data is optimal optical magnification data required for each program step; The program steps corresponding to the second data in the measurement processing array are traversed and executed, and third data corresponding to the output is generated; wherein the third data is the measurement data corresponding to the workpiece to be measured.

[0008] Furthermore, the generating and acquiring of first data corresponding to the workpiece to be measured further includes: Generate and obtain fourth data corresponding to the workpiece to be measured; wherein the fourth data is activation control data for starting array program measurement; Based on the fourth data, corresponding first data is generated and extracted in real time; wherein the first data includes array row number data, column number data, spacing data or angle data.

[0009] Furthermore, the step of creating a mapping relationship between a measurement program step and an optical magnification based on the first data and generating second data corresponding to the program step further includes: Based on the measurement task, fifth data corresponding to each measurement step is generated, and based on the fifth data, a measurement step magnification mapping table is constructed; wherein the fifth data is the optical magnification required for each step; Based on the fifth data, corresponding sixth data is generated, and according to the sixth data, the measuring lens is adjusted to the corresponding target magnification; wherein the sixth data is optical lens adjustment control data.

[0010] Further, the traversing and executing the program steps corresponding to the second data in the measurement processing array and generating the third data corresponding to the output also includes: Generate and obtain seventh data corresponding to the measurement lens; wherein the seventh data is data for monitoring the wear status of the lens; According to the seventh data, the ratio grouping strategy is adjusted dynamically in real time.

[0011] Further, the traversing and executing the program steps corresponding to the second data in the measurement processing array and generating the third data corresponding to the output also includes: Determine whether all steps of the last workpiece to be measured are completed. If not, switch to the next magnification and repeat the measurement. If completed, summarize the data and end the measurement program. Based on the third data, a corresponding quality report is generated.

[0012] The second object of the present invention is achieved in this way: the system is applied to the measurement processing method suitable for array measurement and with lenses of different magnifications, and the system comprises: A first data generating unit, used to generate and obtain first data corresponding to the workpiece to be measured; wherein the first data is array distribution characteristic data; A data creation and generation unit, used to create a mapping relationship between a measurement program step and an optical magnification based on the first data, and generate second data corresponding to the program step; wherein the second data is optimal optical magnification data required for each program step; The workpiece measurement processing unit is used to traverse and execute the program steps corresponding to the second data in the measurement processing array, and generate and output corresponding third data; wherein the third data is the measurement data corresponding to the workpiece to be measured.

[0013] Furthermore, the first data generating unit further includes: A first generating module is used to generate and obtain fourth data corresponding to the workpiece to be measured; wherein the fourth data is activation control data for starting array program measurement; A second generating module, for generating and extracting corresponding first data in real time based on the fourth data; wherein the first data includes row number data, column number data, spacing data or angle data of the array; And / or, the data creation generation unit further includes: A third generating module is used to generate fifth data corresponding to each measurement step based on the measurement task, and to construct a measurement step magnification mapping table based on the fifth data; wherein the fifth data is the optical magnification required for each step; A fourth generating module, used to generate corresponding sixth data based on the fifth data, and adjust the measuring lens to the corresponding target magnification according to the sixth data; wherein the sixth data is optical lens adjustment control data; And / or, the workpiece measurement processing unit further includes: A fifth generating module is used to generate and obtain seventh data corresponding to the measuring lens; wherein the seventh data is data for monitoring the wear status of the lens; The first processing module is used to dynamically adjust the ratio grouping strategy in real time according to the seventh data.

[0014] Furthermore, the workpiece measurement processing unit further includes: The first determination module is used to determine whether all the measurement steps of the last workpiece to be measured are completed. If not, it switches to the next magnification and repeats the measurement. If it is completed, it summarizes the data and ends the measurement program; The sixth generating module is used to generate a corresponding quality report based on the third data.

[0015] The third object of the present invention is achieved as follows: it includes a processor, a memory, and a measurement processing platform control program suitable for array measurement and different lens magnifications; wherein the measurement processing platform control program suitable for array measurement and different lens magnifications is executed by the processor, the measurement processing platform control program suitable for array measurement and different lens magnifications is stored in the memory, and the measurement processing platform control program suitable for array measurement and different lens magnifications implements the measurement processing method suitable for array measurement and different lens magnifications.

[0016] The present invention generates and obtains first data corresponding to a workpiece to be measured through a method; wherein the first data is array distribution characteristic data; based on the first data, a mapping relationship between a measurement program step and an optical magnification is created, and second data corresponding to the program step is generated; wherein the second data is the optimal optical magnification data required for each program step; the program steps corresponding to the second data in the measurement processing array are traversed and executed, and third data corresponding to the output is generated; wherein the third data is the measurement data corresponding to the workpiece to be measured, and a system and a platform corresponding to the method can reduce the number of magnification changes, extend the life of the lens, and improve the measurement efficiency.

[0017] That is to say, the present invention provides an array measurement lens with different magnification optimization measurement modes. Through innovative measurement sequence reconstruction, it significantly reduces the number of lens magnification changes, extends the service life of the lens, and improves measurement efficiency. When measuring M array elements, the total number of magnification changes is reduced from M×N to N times, which is reduced to one-M of the original, achieving an order of magnitude reduction, thereby greatly extending the service life of the lens. Experimental data show that in a typical 5×5 array and 3 magnification application scenario, the wear of the magnification mechanism is reduced by 96%, and the expected life is extended by 15 to 20 times. By reducing redundant paths of mechanical motion, the overall measurement time is shortened by more than 40%. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 It is a schematic diagram of a traditional array measurement process, i.e., a process that does not adopt the method of the invention; Figure 2 It is a flow chart of a measurement processing method applicable to array measurement and having different lens magnifications of the present invention; Figure 3It is a schematic diagram of an array measurement process of an embodiment of a measurement processing method applicable to array measurement and having lenses with different magnifications of the present invention; Figure 4 A schematic diagram of a measurement processing system architecture suitable for array measurement and having different lens magnifications according to the present invention; Figure 5 The present invention is a schematic diagram of a measurement and processing platform architecture suitable for array measurement and with lenses of different magnifications. DETAILED DESCRIPTION

[0020] In order to better understand the purpose, technical solutions and advantages of the present invention, the present invention is further described below in conjunction with the accompanying drawings and specific implementation methods. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0021] The present invention may also be implemented or applied through other different specific examples, and the details in this specification may also be modified and changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0022] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0023] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. Secondly, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0024] Preferably, the present invention is a method for measuring and processing arrays and lenses with different magnifications, which is applied in one or more terminals or servers. The terminal is a device that can automatically perform numerical calculations and / or information processing according to pre-set or stored instructions, and its hardware includes but is not limited to microprocessors, application specific integrated circuits (ASIC), field-programmable gate arrays (FPGA), digital signal processors (DSP), embedded devices, etc.

[0025] The terminal can be a computing device such as a desktop computer, a notebook, a PDA, a cloud server, etc. The terminal can interact with the client through a keyboard, a mouse, a remote control, a touch pad, or a voice control device.

[0026] The present invention is to realize a measurement processing method, system and platform suitable for array measurement and different lens magnifications.

[0027] like Figure 2 , which is a flow chart of a measurement processing method applicable to array measurement and having different lens magnifications provided by an embodiment of the present invention. In this embodiment, the measurement processing method applicable to array measurement and having different lens magnifications can be applied to a terminal or a fixed terminal with a display function, and the terminal is not limited to a personal computer, a smart phone, a tablet computer, a desktop computer or an all-in-one computer equipped with a camera, etc.

[0028] The measurement processing method applicable to array measurement and lens with different magnifications can also be applied to a hardware environment composed of a terminal and a server connected to the terminal via a network. The network includes but is not limited to: a wide area network, a metropolitan area network or a local area network. The measurement processing method applicable to array measurement and lens with different magnifications in the embodiment of the present invention can be executed by a server, can be executed by a terminal, or can be executed by both a server and a terminal.

[0029] For example, for a measurement processing terminal that needs to be suitable for array measurement and different lens magnifications, the measurement processing function suitable for array measurement and different lens magnifications provided by the method of the present invention can be directly integrated on the terminal, or a client for implementing the method of the present invention can be installed. For another example, the method provided by the present invention can also be run on a server or other device in the form of a software development kit (SDK), and an interface for the measurement processing function suitable for array measurement and different lens magnifications is provided in the form of SDK. The terminal or other device can implement the measurement processing function suitable for array measurement and different lens magnifications through the provided interface. The present invention is further described below in conjunction with the accompanying drawings.

[0030] like Figure 2-Figure 3 As shown, the present invention provides a measurement processing method applicable to array measurement and having different lens magnifications, wherein the method comprises the following steps: S1, generating and acquiring first data corresponding to the workpiece to be measured; wherein the first data is array distribution characteristic data; S2. Based on the first data, create a mapping relationship between the measurement program steps and the optical magnification, and generate second data corresponding to the program steps; wherein the second data is the optimal optical magnification data required for each program step; S3, traversing and executing the program steps corresponding to the second data in the measurement processing array, and generating and outputting corresponding third data; wherein the third data is the measurement data corresponding to the workpiece to be measured.

[0031] The generating and acquiring first data corresponding to the workpiece to be measured further includes: S11, generating and acquiring fourth data corresponding to the workpiece to be measured; wherein the fourth data is activation control data for starting array program measurement; S12. Based on the fourth data, generate and extract corresponding first data in real time; wherein the first data includes array row number data, column number data, spacing data or angle data.

[0032] The method of creating a mapping relationship between a measurement program step and an optical magnification based on the first data and generating second data corresponding to the program step further includes: S21, based on the measurement task, generating fifth data corresponding to each measurement step, and constructing a measurement step magnification mapping table based on the fifth data; wherein the fifth data is the optical magnification required for each step; S22. Generate corresponding sixth data based on the fifth data, and adjust the measuring lens to the corresponding target magnification according to the sixth data; wherein the sixth data is optical lens adjustment control data.

[0033] The traversing and executing the program steps corresponding to the second data in the measurement processing array and generating the third data corresponding to the output also includes: S31, generating and acquiring seventh data corresponding to the measurement lens; wherein the seventh data is data for monitoring the wear status of the lens; S32. Dynamically adjust the ratio grouping strategy in real time according to the seventh data.

[0034] The traversing and executing the program steps corresponding to the second data in the measurement processing array and generating the third data corresponding to the output also includes: S33, determining whether all steps of the measurement of the last workpiece to be measured are completed, if not, switching to the next magnification to repeat the measurement, if completed, summarizing the data and ending the measurement program; S34. Generate a corresponding quality report based on the third data.

[0035] Specifically, in an embodiment of the present invention, an optimized measurement mode for different magnifications of an array measurement lens is provided. Through innovative reconstruction of the measurement sequence, the number of times the lens is changed can be significantly reduced, the service life of the lens can be extended, and the measurement efficiency can be improved. The core of the present invention is to improve the traditional "measurement by workpiece order" mode to a "measurement by magnification group" mode, which specifically includes the following steps: start array program measurement, that is, start the measurement program, initialize the measurement equipment, and load the array distribution information and measurement tasks of the workpiece to be measured. Obtain the different magnifications corresponding to each continuous measurement step of the array product, that is, analyze the measurement task, and determine the optical magnification required for each measurement step. For example: the magnification corresponding to step 1 / 2 / 3 is magnification 1; the magnification corresponding to step 4 / 5 / 6 is magnification 2; and so on. The lens switches to magnification n, and adjusts the optical lens to the target magnification n according to the requirements of the current measurement step. The program steps corresponding to the magnification n of the first product of the measurement array are measured, and all corresponding measurement steps of the first workpiece are completed at the magnification n. The program steps corresponding to the magnification n of the second product of the measurement array are measured, and all corresponding measurement steps of the second workpiece are completed at the magnification n. Measure the program steps corresponding to the magnification n of the last product in the array, that is, complete all the corresponding measurement steps of the last workpiece under magnification n. Determine whether the measurement of all steps of the last product is completed. If not, return to the step lens switching magnification n, switch to the next magnification, and repeat the above steps; if completed, proceed to the next step. Summarize the measurement data of each product, output the data and end the array program measurement, summarize all the measurement data, generate a quality report, and end the measurement program.

[0036] Example: Taking PCB solder joint array detection as an example, array parameters: 8×8 solder joint matrix, spacing 2.54mm; detection requirements: 3 magnifications (5X, 10X, 20X); traditional method: 64×3=192 magnifications; the method of the present invention: only 3 magnifications are required to complete the full detection.

[0037] The implementation steps are as follows: start the measurement program and load the 8×8 array distribution information of the PCB board solder joints; parse the measurement task and determine the magnification requirement for each step (5X, 10X, 20X); adjust to 5X magnification and measure the corresponding steps of all solder joints in sequence; adjust to 10X magnification and measure the corresponding steps of all solder joints in sequence; adjust to 20X magnification and measure the corresponding steps of all solder joints in sequence; summarize the measurement data, generate a quality report and end the program.

[0038] That is to say, the scheme of the present invention provides an array measurement lens different magnification optimization measurement mode, including the steps: S01, start array program measurement; S02, obtain different magnifications corresponding to each continuous measurement step of the array product; S03, switch the lens to the target magnification n; S04, measure the program steps corresponding to the magnification n of all products in the array in turn; S05, determine whether all steps of the last product are measured. If not, switch to the next magnification to repeat the measurement. If completed, summarize the data and end the program.

[0039] The method of obtaining different magnifications corresponding to each continuous measurement step of the array product includes: analyzing the measurement task to determine the optical magnification required for each step; and constructing a measurement step-magnification mapping table.

[0040] The lens switching to the target magnification n includes: adjusting the optical lens to the target magnification according to the current measurement step requirements; recording the number of magnification changes and monitoring the lens wear state.

[0041] The program steps corresponding to the magnification n of all products in the array are measured in sequence, including: traversing all array elements to complete corresponding measurement steps under a fixed magnification; recording measurement data and associating it with spatial position information.

[0042] The method of summarizing the data and ending the program includes: summarizing all the measurement data and generating a quality report; outputting the measurement results and ending the measurement program.

[0043] Preferably, in the embodiment of the present invention, a method for optimizing measurement of different magnifications of an array measurement lens is also provided, comprising the following steps: S001. Analyze the array distribution characteristics of the workpiece to be measured, and obtain the number of rows, columns, spacing or angle distribution information of the array; S002. Establish a mapping relationship between measurement tasks and optical magnifications, and determine the optimal optical magnification required for each measurement task; S003. Group and optimize the measurement tasks according to the magnification value, and cluster the measurement tasks with the same magnification into the same execution group; wherein, for the magnification group optimization, the following optimization algorithm is executed: establish a magnification group set G={G_1,G_2,...,G_K}, where K≤N; for ∀Task_j∈TASK_MAP, cluster into corresponding groups according to the Mag_j value; arrange the groups in ascending order according to the magnification: G_1.mag <G_2.mag<...<G_K.mag。

[0044] S004. Perform full array scanning measurement in order of magnification grouping, fix the current magnification parameter, and traverse all array elements to complete the measurement task of the corresponding magnification.

[0045] The analysis of the array distribution characteristics of the workpiece to be measured includes: automatically extracting the number of rows, columns, spacing or angle distribution information of the array through the image recognition module, including: array dimensions (rows × columns); element spacing (lateral Δx, longitudinal Δy); feature type (geometric dimension measurement / surface defect detection, etc.). Generate measurement path planning based on array characteristics and optimize mechanical motion trajectory.

[0046] The establishment of the mapping relationship between the measurement task and the optical magnification includes: determining the optimal optical magnification required for each measurement task according to the measurement accuracy requirement; constructing a measurement task-magnification mapping table (TASK_MAP={Task_1:Mag_1,Task_2:Mag_2,...,Task_N:Mag_N} where Mag_i represents the optical magnification required to complete the i-th measurement task), and recording the magnification value corresponding to each measurement task. The grouping and optimization of the measurement tasks according to the magnification value includes: clustering the measurement tasks with the same magnification into the same execution group; arranging the execution groups in ascending order according to the magnification value to generate a magnification group execution sequence. The method of performing full array scanning measurement in order of magnification grouping includes: fixing the current magnification parameter, adjusting the optical system to the target magnification; traversing all array elements, and completing the measurement tasks corresponding to the current magnification in sequence; wherein a layered scanning strategy is adopted: for each magnification group G_k in G: adjusting to the target magnification Mag_k; performing full array scanning: for each workpiece position (i, j) in array, performing all measurement tasks corresponding to G_k; recording the measurement data and generating a quality report.

[0047] The method further includes: monitoring the wear state of the magnification changing mechanism in real time during the measurement process; dynamically adjusting the magnification grouping strategy according to the wear state to further optimize the number of magnification changes.

[0048] To achieve the above object, the present invention further provides a measurement processing system applicable to array measurement and having lenses with different magnifications, wherein the system is applied to the measurement processing method applicable to array measurement and having lenses with different magnifications, such as Figure 4As shown, the system comprises: A first data generating unit, used to generate and obtain first data corresponding to the workpiece to be measured; wherein the first data is array distribution characteristic data; A data creation and generation unit, used to create a mapping relationship between a measurement program step and an optical magnification based on the first data, and generate second data corresponding to the program step; wherein the second data is optimal optical magnification data required for each program step; The workpiece measurement processing unit is used to traverse and execute the program steps corresponding to the second data in the measurement processing array, and generate and output corresponding third data; wherein the third data is the measurement data corresponding to the workpiece to be measured.

[0049] Furthermore, the first data generating unit further includes: A first generating module is used to generate and obtain fourth data corresponding to the workpiece to be measured; wherein the fourth data is activation control data for starting array program measurement; A second generating module, for generating and extracting corresponding first data in real time based on the fourth data; wherein the first data includes row number data, column number data, spacing data or angle data of the array; And / or, the data creation generation unit further includes: A third generating module is used to generate fifth data corresponding to each measurement step based on the measurement task, and to construct a measurement step magnification mapping table based on the fifth data; wherein the fifth data is the optical magnification required for each step; A fourth generating module, used to generate corresponding sixth data based on the fifth data, and adjust the measuring lens to the corresponding target magnification according to the sixth data; wherein the sixth data is optical lens adjustment control data; And / or, the workpiece measurement processing unit further includes: A fifth generating module is used to generate and obtain seventh data corresponding to the measuring lens; wherein the seventh data is data for monitoring the wear status of the lens; The first processing module is used to dynamically adjust the ratio grouping strategy in real time according to the seventh data.

[0050] Furthermore, the workpiece measurement processing unit further includes: The first determination module is used to determine whether all the measurement steps of the last workpiece to be measured are completed. If not, it switches to the next magnification and repeats the measurement. If it is completed, it summarizes the data and ends the measurement program; The sixth generating module is used to generate a corresponding quality report based on the third data.

[0051] Specifically, in an embodiment of the scheme of the present invention, an image measuring device for implementing the above method is provided, including: an automatic variable magnification optical system for adjusting the optical magnification; an array feature recognition module for parsing the array distribution information of the workpiece to be measured; a measurement task optimization processor for establishing a measurement step-magnification mapping table and performing magnification grouping optimization; and a motion control and data acquisition system for performing full array scanning measurement and recording measurement data.

[0052] Among them, the automatic zoom optical system includes: a high-precision zoom lens that supports multiple optical magnification switching; a zoom control module for accurately adjusting the lens magnification and monitoring the number of zoom times. The array feature recognition module includes: a high-resolution image sensor for capturing the array distribution image of the workpiece to be measured; an image processing unit for automatically extracting the number of rows, columns, spacing or angle distribution information of the array. The motion control and data acquisition system includes: a high-precision motion platform for achieving precise positioning of the workpiece to be measured; a data acquisition module for real-time recording of measurement data and generating quality reports; a communication interface for data interaction with a host computer or other devices. A user interface module for displaying measurement progress, magnification switching status and measurement results; a data storage module for saving measurement data and historical records.

[0053] In the system solution embodiment of the present invention, the method steps involved in the measurement processing of a lens with different magnifications suitable for array measurement have been described above in detail, that is, the functional modules in the system are used to implement the steps or sub-steps in the above method embodiment, which will not be repeated here.

[0054] To achieve the above object, the present invention also provides a measurement processing platform suitable for array measurement and lens with different magnifications, such as Figure 5 As shown, it includes a processor, a memory, and a measurement processing platform control program applicable to array measurement and different lens magnifications; wherein the processor executes the measurement processing platform control program applicable to array measurement and different lens magnifications, the measurement processing platform control program applicable to array measurement and different lens magnifications is stored in the memory, and the measurement processing platform control program applicable to array measurement and different lens magnifications implements the measurement processing method steps applicable to array measurement and different lens magnifications. For example: S1, generating and acquiring first data corresponding to the workpiece to be measured; wherein the first data is array distribution characteristic data; S2. Based on the first data, create a mapping relationship between the measurement program steps and the optical magnification, and generate second data corresponding to the program steps; wherein the second data is the optimal optical magnification data required for each program step; S3, traversing and executing the program steps corresponding to the second data in the measurement processing array, and generating and outputting corresponding third data; wherein the third data is the measurement data corresponding to the workpiece to be measured.

[0055] The specific details of the steps have been explained above and will not be repeated here.

[0056] In the embodiment of the present invention, the built-in processor of the measurement processing platform applicable to array measurement and lens with different magnifications can be composed of integrated circuits, such as a single packaged integrated circuit, or a plurality of integrated circuits with the same or different functions, including one or more central processing units (CPU), microprocessors, digital processing chips, graphics processors, and combinations of various control chips. The processor uses various interfaces and lines to connect various components, and executes or executes programs or units stored in the memory, and calls data stored in the memory to perform various functions and process data applicable to array measurement and lens with different magnifications. The memory is used to store program codes and various data. It is installed in a measurement and processing platform suitable for array measurement and with lenses of different magnifications, and can achieve high-speed and automatic access to programs or data during operation.

[0057] The memory includes read-only memory (ROM), random access memory (RAM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), one-time programmable read-only memory (OTPROM), electronically erasable programmable read-only memory (EEPROM), compact disc read-only memory (CD-ROM) or other optical disc storage, magnetic disk storage, magnetic tape storage, or any other computer-readable medium that can be used to carry or store data.

[0058] The present invention generates and obtains first data corresponding to a workpiece to be measured through a method; wherein the first data is array distribution characteristic data; based on the first data, a mapping relationship between a measurement program step and an optical magnification is created, and second data corresponding to the program step is generated; wherein the second data is the optimal optical magnification data required for each program step; the program steps corresponding to the second data in the measurement processing array are traversed and executed, and third data corresponding to the output is generated; wherein the third data is the measurement data corresponding to the workpiece to be measured, and a system and platform corresponding to the method can reduce the number of magnification changes, extend the life of the lens and improve the measurement efficiency, while improving the measurement efficiency, and are suitable for precision measurement scenarios of high-density array workpieces.

[0059] That is to say, the present invention provides an array measurement lens with different magnification optimization measurement modes. Through innovative measurement sequence reconstruction, it significantly reduces the number of lens magnification changes, extends the service life of the lens, and improves measurement efficiency. When measuring M array elements, the total number of magnification changes is reduced from M×N to N times, which is reduced to one-M of the original, achieving an order of magnitude reduction, thereby greatly extending the service life of the lens. Experimental data show that in a typical 5×5 array and 3 magnification application scenario, the wear of the magnification mechanism is reduced by 96%, and the expected life is extended by 15 to 20 times. By reducing redundant paths of mechanical motion, the overall measurement time is shortened by more than 40%.

[0060] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A measurement processing method suitable for array measurement and lens with different magnifications, characterized in that: The method comprises: Generate and obtain first data corresponding to the workpiece to be measured; wherein the first data is array distribution feature data; Based on the first data, a mapping relationship between a measurement program step and an optical magnification is created, and second data corresponding to the program step is generated; wherein the second data is optimal optical magnification data required for each program step; The program steps corresponding to the second data in the measurement processing array are traversed and executed, and third data corresponding to the output is generated; wherein the third data is the measurement data corresponding to the workpiece to be measured.

2. A measurement processing method suitable for array measurement and with lenses of different magnifications according to claim 1, characterized in that: The generating and acquiring first data corresponding to the workpiece to be measured further includes: Generate and obtain fourth data corresponding to the workpiece to be measured; wherein the fourth data is activation control data for starting array program measurement; Based on the fourth data, corresponding first data are generated and extracted in real time; wherein the first data includes row number data, column number data, spacing data or angle data of the array.

3. The measurement processing method for array measurement and lenses with different magnifications according to claim 1, characterized in that: The method of creating a mapping relationship between a measurement program step and an optical magnification based on the first data and generating second data corresponding to the program step further includes: Based on the measurement task, fifth data corresponding to each measurement step is generated, and based on the fifth data, a measurement step magnification mapping table is constructed; wherein the fifth data is the optical magnification required for each step; Based on the fifth data, corresponding sixth data is generated, and according to the sixth data, the measuring lens is adjusted to the corresponding target magnification; wherein the sixth data is optical lens adjustment control data.

4. The measurement processing method for array measurement and lenses with different magnifications according to claim 1, characterized in that: The traversing and executing the program steps corresponding to the second data in the measurement processing array and generating the third data corresponding to the output also includes: Generate and obtain seventh data corresponding to the measurement lens; wherein the seventh data is data for monitoring the wear status of the lens; According to the seventh data, the ratio grouping strategy is adjusted dynamically in real time.

5. A measurement processing method suitable for array measurement and having different lens magnifications according to claim 1 or 4, characterized in that: The traversing and executing the program steps corresponding to the second data in the measurement processing array and generating the third data corresponding to the output also includes: Determine whether all steps of the last workpiece to be measured are completed. If not, switch to the next magnification and repeat the measurement. If completed, summarize the data and end the measurement program. Based on the third data, a corresponding quality report is generated.

6. A measurement processing system suitable for array measurement and lens with different magnifications, characterized in that: The system is applied to the measurement processing method applicable to array measurement and having different lens magnifications as described in any one of claims 1 to 5, and the system comprises: A first data generating unit, used to generate and obtain first data corresponding to the workpiece to be measured; wherein the first data is array distribution characteristic data; A data creation and generation unit, used to create a mapping relationship between a measurement program step and an optical magnification based on the first data, and generate second data corresponding to the program step; wherein the second data is optimal optical magnification data required for each program step; The workpiece measurement processing unit is used to traverse and execute the program steps corresponding to the second data in the measurement processing array, and generate and output corresponding third data; wherein the third data is the measurement data corresponding to the workpiece to be measured.

7. A measurement and processing system suitable for array measurement and having lenses with different magnifications according to claim 6, characterized in that: The first data generating unit further includes: A first generating module is used to generate and obtain fourth data corresponding to the workpiece to be measured; wherein the fourth data is activation control data for starting array program measurement; A second generating module, for generating and extracting corresponding first data in real time based on the fourth data; wherein the first data includes row number data, column number data, spacing data or angle data of the array; And / or, the data creation generation unit further includes: A third generating module is used to generate fifth data corresponding to each measurement step based on the measurement task, and to construct a measurement step magnification mapping table based on the fifth data; wherein the fifth data is the optical magnification required for each step; A fourth generating module, used to generate corresponding sixth data based on the fifth data, and adjust the measuring lens to the corresponding target magnification according to the sixth data; wherein the sixth data is optical lens adjustment control data; And / or, the workpiece measurement processing unit further includes: A fifth generating module is used to generate and obtain seventh data corresponding to the measuring lens; wherein the seventh data is data for monitoring the wear status of the lens; The first processing module is used to dynamically adjust the ratio grouping strategy in real time according to the seventh data.

8. A measurement and processing system suitable for array measurement and having lenses with different magnifications according to claim 6 or 7, characterized in that: The workpiece measurement processing unit further includes: The first determination module is used to determine whether all the measurement steps of the last workpiece to be measured are completed. If not, it switches to the next magnification and repeats the measurement. If it is completed, it summarizes the data and ends the measurement program; The sixth generating module is used to generate a corresponding quality report based on the third data.

9. A measurement and processing platform suitable for array measurement and lens with different magnifications, characterized in that: The invention comprises a processor, a memory and a control program for a measurement processing platform applicable to array measurement and having different lens magnifications; wherein the control program for the measurement processing platform applicable to array measurement and having different lens magnifications is executed by the processor, the control program for the measurement processing platform applicable to array measurement and having different lens magnifications is stored in the memory, and the control program for the measurement processing platform applicable to array measurement and having different lens magnifications implements the measurement processing method applicable to array measurement and having different lens magnifications as described in any one of claims 1 to 5.

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