Silicon-based reconfigurable photon processing chip
By using a combination structure of a wavelength division multiplexer, a micro-ring resonator group and a detector array in a silicon-based reconstructible photon processing chip, the resonant wavelength of the micro-ring resonator is regulated to achieve the selection and switching of the optically-mounted radio frequency signal, solving the problems of complex structure and large power consumption in the traditional chip, and achieving high-performance reconstructible photon processing.
Patent Information
- Application Number
- CN202510162869.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-14
- Publication Date
- 2025-04-11
AI Technical Summary
The traditional reconfigurable photon processing chip has complex structure, large insertion loss, large power consumption, slow switching time, and too many devices, the stability and consistency of the process are difficult to ensure.
Using a combined structure of a wavelength division multiplexer, a micro-ring resonator group and a detector array, the selection and switching of the optically-mounted radio frequency signal is achieved by regulating the resonant wavelength of the micro-ring resonator, realizing N×N completely non-blocking reconstructible photon processing.
The photon processing with a simple structure, low power consumption and fast switching speed is realized, which reduces the number of switching units, reduces the insertion loss, and improves the stability and consistency of the process.
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Figure CN119805668A_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of optical communications, and more specifically, to a silicon-based reconfigurable photonic processing chip. Background Art
[0002] With the rapid growth of data traffic in modern electronic communication systems, the demand for bandwidth is also rising sharply year by year. Traditional electrical systems can no longer meet this demand due to their inherent bandwidth limitations. In order to overcome this challenge and meet the growing demand for data transmission, researchers have begun to turn to photonic technology for solutions.
[0003] In the existing RF signal transmission and processing network, each antenna unit has exclusive access to RF resources of the corresponding bandwidth, and the RF signal in a single channel corresponds to only one purpose. In order to achieve large bandwidth and realize the RF multifunctionality of a single antenna unit, it is necessary to introduce a reconfigurable photonic processing chip.
[0004] The switch array in the traditional reconfigurable photon processing chip is composed of multiple switch units in cascade, and most of them use Mach-Zehnder interference type switch arrays to realize data exchange in the link. According to the different functions implemented, it is divided into three types: completely non-blocking, rearranged non-blocking and restricted blocking. Among them, only the completely non-blocking structure can realize a fully traversed connection. For an N×N reconfigurable photon processing chip, at least N(N-1) switch units and (N-1) levels of cascade are required, and a large number of cross waveguides will inevitably be introduced. Therefore, the traditional reconfigurable photon processing chip has the disadvantages of complex structure, large insertion loss, high power consumption, and slow switching time. At the same time, when the number of devices is too large, the stability and consistency of the process are difficult to guarantee. Summary of the invention
[0005] In view of this, the present disclosure provides a silicon-based reconfigurable photonic processing chip, including: a wavelength division multiplexer, used to combine multiple input optical radio frequency signals of different wavelengths and output a first light beam, wherein each of the multiple optical radio frequency signals of different wavelengths is composed of one radio frequency signal loaded on each optical carrier; a microring resonator group, including multiple cascaded microring resonators, the microring resonator group is connected to the wavelength division multiplexer, and by adjusting the resonant wavelength corresponding to each of at least one microring resonator in the microring resonator group, each microring resonator in the at least one microring resonator selects to receive the optical radio frequency signal of the corresponding wavelength based on its own resonant wavelength, and outputs the selected received optical radio frequency signal; a detector array, wherein a detector in the detector array is correspondingly connected to a microring resonator in the microring resonator group, and the detector is used to receive the optical radio frequency signal output by the corresponding microring resonator.
[0006] According to an embodiment of the present disclosure, by regulating the resonant wavelength corresponding to each of at least one microring resonator in a microring resonator group, the method includes: determining at least one light-carrying radio frequency signal from a plurality of light-carrying radio frequency signals with different wavelengths as at least one target light-carrying radio frequency signal; and determining the resonant wavelength corresponding to each of at least one microring resonator according to the wavelength corresponding to each of the at least one target light-carrying radio frequency signals.
[0007] According to an embodiment of the present disclosure, it also includes: regulating the resonant wavelength corresponding to at least one microring resonator by regulating the refractive index corresponding to at least one microring resonator.
[0008] According to an embodiment of the present disclosure, the wavelength division multiplexer includes: a plurality of first input ends, each input end is used to input a light-carrying radio frequency signal of a corresponding wavelength; and a first output end is used to output a first light beam.
[0009] According to an embodiment of the present disclosure, the microring resonator group includes: a second input end, which is arranged to be connected to the first output end and is used to input a first light beam; a plurality of second output ends, one of the plurality of second output ends is correspondingly connected to a detector in a detector array, and the second output end is used to output a corresponding target light-carrying radio frequency signal.
[0010] According to an embodiment of the present disclosure, each microring resonator in the microring resonator group is an upload-download type microring resonator; each microring resonator includes: a heating electrode for adjusting the refractive index of the microring resonator.
[0011] According to an embodiment of the present disclosure, each detector in the detector array is a silicon germanium detector.
[0012] According to an embodiment of the present disclosure, it also includes: when the number of multiple input ports of the wavelength division multiplexer, the number of cascaded microring resonators and the number of detector arrays are the same, the number of channel switches from the wavelength division multiplexer to the detector array is the factorial of N, where N is the number of the cascaded microring resonators.
[0013] According to an embodiment of the present disclosure, it also includes: a stacked silicon substrate, a silicon dioxide lower cladding layer, a silicon core layer and a silicon dioxide upper cladding layer; a wavelength division multiplexer, a cascaded microring resonator and a detector array are arranged on the silicon core layer.
[0014] The silicon-based reconfigurable photon processing chip provided in the embodiments of the present disclosure has at least the following beneficial effects:
[0015] By setting up a microring resonator group connected to a wavelength division multiplexer, N×N completely non-blocking reconfigurable photon processing can be achieved. By tuning the resonant state of the microring resonator, channel selection can be performed and the switching function of different channels can be realized, thereby realizing the channel reconfiguration of the chip and improving the performance of the chip. This can solve the problems of complex structure and large non-blocking connection loss of the current traditional Mach-Zehnder interferometer reconfigurable chip.
[0016] The wavelength division multiplexer, microring resonator group and detector array provided in this embodiment can be integrated on the SOI platform, which is fully compatible with the existing mature CMOS process and has the advantages of low manufacturing cost, high integration and easy integration with electrical components. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The above and other objects, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:
[0018] Figure 1 A schematic diagram of the structure of a silicon-based reconfigurable photonic processing chip according to an embodiment of the present disclosure is shown;
[0019] Figure 2 The schematic diagram of the structure of a microring resonator according to an embodiment of the present disclosure is shown;
[0020] Figure 3 A schematic diagram of the structure of a silicon-based reconfigurable photonic processing chip according to another embodiment of the present disclosure is shown;
[0021] Figure 4 The schematic diagram shows a transmittance spectrum of the output end of the microring resonator in a resonant state according to an embodiment of the present disclosure. DETAILED DESCRIPTION
[0022] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known systems and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.
[0023] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise", "include", etc. used herein indicate the existence of features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.
[0024] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.
[0025] When using expressions such as "at least one of A, B, and C, etc.", they should generally be interpreted according to the meaning of the expression commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).
[0026] Figure 1 The schematic diagram shows the structure of a silicon-based reconfigurable photonic processing chip according to an embodiment of the present disclosure.
[0027] like Figure 1 As shown, the present disclosure provides a silicon-based reconfigurable photonic processing chip, including: a wavelength division multiplexer 301, which is used to combine multiple input optical radio frequency signals of different wavelengths and output a first light beam, wherein each of the multiple optical radio frequency signals of different wavelengths is composed of each optical carrier loaded with a radio frequency signal.
[0028] The microring resonator group 302 includes a plurality of cascaded microring resonators. The microring resonator group 302 is connected to the wavelength division multiplexer 301. By adjusting the resonant wavelength corresponding to each of at least one microring resonator in the microring resonator group 302, each microring resonator in the at least one microring resonator selects to receive the light-carrying radio frequency signal of the corresponding wavelength based on the respective resonant wavelength, and outputs the selected received light-carrying radio frequency signal. Wherein, when at least one microring resonator is in working state at the same time, and the number of at least one microring resonator is greater than or equal to two, the resonant wavelength corresponding to each of the at least one microring resonator is different.
[0029] The detector array 303 , wherein one detector in the detector array 303 is connected to one microring resonator in the microring resonator group 302 , and the detector is used to receive the light-carrying radio frequency signal output by the corresponding microring resonator.
[0030] In the embodiment of the present disclosure, by setting the wavelength division multiplexer 301, multiple optical radio frequency signals of different wavelengths can be combined into a composite optical signal and then output, thereby improving the integration and flexibility. Among them, each optical radio frequency signal is composed of an optical carrier of a specific wavelength loading a radio frequency signal. Each wavelength of the optical carrier can load different radio frequency signals.
[0031] By setting up multiple cascaded microring resonators and adjusting the resonant wavelength of at least one microring resonator, each microring resonator can selectively receive a light-carrying radio frequency signal that matches its resonant wavelength and output the selected light-carrying radio frequency signal. Among them, multiple cascaded microring resonators can work simultaneously, each microring resonator is independent of each other, and the light-carrying radio frequency signal input by any microring resonator is sent to any detector without affecting the orientation of all other microring resonators.
[0032] Each detector in the detector array 303 is connected to a corresponding microring resonator, and each detector is used to receive the light-carrying radio frequency signal output by the corresponding microring resonator.
[0033] In this embodiment, completely non-blocking reconfigurable photon processing can be achieved. Compared with the traditional optical switch array, the number of switch units is greatly reduced, and it has the advantages of simple structure, low power consumption, and fast switching speed. It avoids the use of a large number of cross waveguides when the number of optically carried radio frequency signals is greater than or equal to 4, thereby reducing the insertion loss of the chip.
[0034] For example, the wavelength division multiplexer 301 inputs λ1, λ2, λ3, ... N The optical radio frequency signal of each wavelength λ i , 1≦i≦N, by λ i The optical carrier carries a radio frequency signal, λ i represents the i-th wavelength.
[0035] The microring resonator group 302 includes a plurality of cascaded microring resonators 302-1, 302-2, ..., 302-M. For example, the yth microring resonator may be selected to receive λ i The optical radio frequency signal is , where 1≦y≦M, and the resonant wavelength of the y-th microring resonator is adjusted to match the corresponding λ i The wavelength of the optical radio frequency signal λ i It can be coupled input and output by the yth microring resonator. At this time, RF signals of other wavelengths are not selected to pass through, realizing the selective switching function of the microring resonator. At the same time, the detector connected to the yth microring resonator can receive the optical RF signal λ i .
[0036] The xth microring resonator and the yth microring resonator may receive λ i The optically-carried RF signal and λ j The optical radio frequency signal is , where j≠i, 1≦j≦N. By adjusting the resonant wavelength of the x-th microring resonator and the resonant wavelength of the y-th microring resonator to match the corresponding λ i and the wavelength of λj, so that the optically carried RF signal λ ican be coupled into and out of the xth microring resonator, and the optically-carried RF signal λ j can be coupled into and output by the yth microring resonator. At this time, except for λ i The RF signals of other wavelengths are not selected to pass through. j At the same time, the detector connected to the xth microring resonator can receive the optically-carried RF signal λ i The detector connected to the yth microring resonator can receive the optical radio frequency signal λ j .
[0037] On the basis of the above embodiment, by adjusting the resonant wavelength corresponding to at least one microring resonator in the microring resonator group 302, the method includes: determining at least one optical radio frequency signal from a plurality of optical radio frequency signals with different wavelengths as at least one target optical radio frequency signal. According to the wavelength corresponding to the at least one target optical radio frequency signal, determining the resonant wavelength corresponding to the at least one microring resonator.
[0038] In the embodiments of the present disclosure, a radio frequency signal carried by a corresponding wavelength can be selected as a target light-carrying radio frequency signal according to the actual application scenario. According to the application scenario requirements of the selected target light-carrying radio frequency signal, a target detector is determined from the detector array, and the target light-carrying radio frequency signal is output from the target detector. A microring resonator corresponding to the target detector is determined, and its resonant wavelength is adjusted to match the corresponding target light-carrying radio frequency signal.
[0039] Based on the above embodiment, the method further includes: regulating the resonant wavelength corresponding to at least one microring resonator by regulating the refractive index corresponding to at least one microring resonator.
[0040] On the basis of the above embodiment, the wavelength division multiplexing device 301 includes: a plurality of first input ends, each input end is used to input a light-carrying radio frequency signal of a corresponding wavelength; and a first output end is used to output a first light beam.
[0041] In the embodiment of the present disclosure, the wavelength division multiplexer is of N×1 type, that is, N input ports and 1 output port, and each input port corresponds to λ1, λ2, λ3, etc. N The channels are connected to the optical carrier radio frequency signals of the corresponding wavelengths. The radio frequency signals of the corresponding wavelengths are optical carriers of the corresponding wavelengths carrying different radio frequency signals. After the N input ends input the optical carrier radio frequency signals of the corresponding wavelengths, the first light beam is output after beam combining.
[0042] Figure 2 The schematic diagram shows the structure of a microring resonator according to an embodiment of the present disclosure.
[0043] like Figure 1 and Figure 2 As shown, according to an embodiment of the present disclosure, the microring resonator group 302 includes: a second input end, which is connected to the first output end and used to input a first light beam. A plurality of second output ends, one of the plurality of second output ends is connected to a detector in the detector array, and the second output end is used to output a corresponding target light-carrying radio frequency signal.
[0044] A plurality of cascaded microring resonators share a second input end, namely, an optical input end. Each microring resonator in the microring resonator group 302 can be tuned to a specific resonance wavelength to selectively receive an optically-carried radio frequency signal that matches its resonance wavelength.
[0045] For example, if the resonant wavelength of the microring resonator is λ1, it will selectively receive the optically-carried RF signal with the wavelength λ1, and output the optically-carried RF signal with the wavelength λ1 through its corresponding second output terminal.
[0046] On the basis of the above embodiment, each microring resonator in the microring resonator group 302 is an upload-download type microring resonator; each microring resonator includes: a heating electrode for adjusting the refractive index of the microring resonator.
[0047] In the embodiment of the present disclosure, each microring resonator is an up-download type microring resonator, including an optical input end, a drop end, i.e., a second output end, and a through end, wherein the through end is used to output the optically-carried radio frequency signal that is not coupled by the microring resonator. A titanium nitride heating electrode is provided on each microring resonator, and the resonant wavelength of the corresponding microring resonator can be adjusted by controlling the heating electrode, so that a non-blocking optical switch with an N×N microring resonator composition can be realized.
[0048] According to an embodiment of the present disclosure, each detector in the detector array 303 is a silicon germanium detector.
[0049] According to an embodiment of the present disclosure, it also includes: when the number of multiple input ports of the wavelength division multiplexer 301, the number of multiple cascaded microring resonators and the number of detector arrays 303 are the same, the number of channel switches from the wavelength division multiplexing device to the detector array is a factorial of N, where N is the number of multiple cascaded microring resonators.
[0050] In the embodiment of the present disclosure, the number of multiple input ports of the wavelength division multiplexing device 301, the number of multiple cascaded microring resonators, and the number of detectors in the detector array 303 are all N, indicating that there are N different optically-carried RF signals in the system, each signal has a unique wavelength, and each signal is transmitted from the microring resonator to the corresponding detector through an independent channel.
[0051] Specifically, the optical radio frequency signal input into any channel and sent to any detector does not affect the orientation of all other channels, which means that the channel exchange types can reach the factorial of N. Therefore, the photon processing chip of this embodiment can realize completely non-blocking photon exchange processing, so that the optical radio frequency signal entering each channel of the wavelength division multiplexer can enter different silicon germanium detectors. Subsequently, the signal received by each silicon germanium detector can be processed accordingly according to different uses, so that the signal can realize different functions.
[0052] like Figure 1 As shown, according to an embodiment of the present disclosure, it also includes: a stacked silicon substrate 1, a silicon dioxide lower cladding layer 2, a silicon core layer 3 and a silicon dioxide upper cladding layer 4; a wavelength division multiplexer 301, a microring resonator group 302 and a detector array 303 are arranged on the silicon core layer 3.
[0053] In the embodiments of the present disclosure, the wavelength division multiplexer, cascaded microring resonator, and silicon germanium detector can be integrated on the SOI (Silicon-on-Insulator) platform, which is fully compatible with the existing mature CMOS (Complementary Metal-Oxide-Semiconductor) process, and has the advantages of low manufacturing cost, high integration, and easy integration with electrical components.
[0054] Figure 3 The structural diagram of a silicon-based reconfigurable photonic processing chip according to another embodiment of the present disclosure is schematically shown.
[0055] Figure 4 The schematic diagram shows a transmittance spectrum of the output end of the microring resonator in a resonant state according to an embodiment of the present disclosure.
[0056] like Figure 3 As shown, in some possible embodiments, an 8-channel silicon-based reconfigurable photonic processing chip is provided, that is, the number of multiple input ports of the wavelength division multiplexing device, the number of cascaded microring resonators and the number of detector arrays are the same, all of which are 8.
[0057] The device includes an 8×1 wavelength division multiplexer 301 , a micro-ring resonator group 302 of 8 up-link and down-link type micro-ring resonators in cascade connection, and 8 silicon germanium detectors 303 .
[0058] The output end of the wavelength division multiplexer 301 is connected to the optical input end of the microring resonator group 302, and the drop ends of the first microring resonator 302-1, the second microring resonator 302-2, the third microring resonator 302-3, the fourth microring resonator 302-4, the fifth microring resonator 302-5, the sixth microring resonator 302-6, the seventh microring resonator 302-7, and the eighth microring resonator 302-8 are respectively connected to the first silicon germanium detector 303-1, The second silicon germanium detector 303-2, the third silicon germanium detector 303-3, the fourth silicon germanium detector 303-4, the fifth silicon germanium detector 303-5, the sixth silicon germanium detector 303-6, the seventh silicon germanium detector 303-7 and the eighth silicon germanium detector 303-8 are connected to each other, and tuning the titanium nitride heating electrode of each microring resonator can change the resonant wavelength of each microring resonator, thereby making the microring resonator group 302 an 8×8 optical switch.
[0059] The wavelengths of the 8 optical radio frequency signals with different wavelengths are λ1, λ2, λ3·····λ8, which are respectively input into the 1st channel 301-1, the 2nd channel 301-2, the 3rd channel 301-3, the 4th channel 301-4, the 5th channel 301-5, the 6th channel 301-6, the 7th channel 301-7, and the 8th channel 301-8 of the wavelength division multiplexer corresponding to the central wavelength. Among them, the optical carriers with wavelengths of λ1, λ2, λ3······λ8 can carry different radio frequency signals respectively, and become optical radio frequency signals with central wavelengths of λ1, λ2, λ3······λ8 respectively. The optically-carrying RF signals with central wavelengths of λ1, λ2, λ3, ... λ8 are respectively input into the first channel 301-1, the second channel 301-2, ... the eighth channel 301-8 of the wavelength division multiplexer, and enter the optical input end of the microring resonator group 302 together after being combined by the wavelength division multiplexer 301.
[0060] For example, when the optical RF signal input into the third channel 301-3 of the wavelength division multiplexer is to be received by the fourth silicon germanium detector 303-4, it is only necessary to tune the fourth microring resonator 302-4 correspondingly connected to the fourth silicon germanium detector 303-4 so that its resonant wavelength is λ3.
[0061] like Figure 4As shown in FIG. 1 , the transmittance of the microring resonator at the drop end of λ3 approaches 1, and the drop end of the fourth microring resonator 302-4 outputs the optical radio frequency signal of the third channel 301-3 of the wavelength division multiplexer to the fourth silicon germanium detector 303-4. That is, at this time, the fourth cascaded microring resonator 302-4 is in the "on" state for the optical radio frequency signal of the third channel 301-3 of the wavelength division multiplexer, and at the same time, the optical radio frequency signals of the first channel 301-1, the second channel 301-2, the fourth channel 301-4, the fifth channel 301-5, the sixth channel 301-6, the seventh channel 301-7, and the eighth channel 301-8 of the wavelength division multiplexer are in the "off" state, realizing the channel switching function as an 8×8 optical switch. At the same time, eight micro-ring filters can work simultaneously. The entire switching process is independent for each channel. The optical radio frequency signal input by any channel is sent to any detector without affecting the orientation of all other channels. This means that the number of channel switching types can reach 8 factorial types.
[0062] It will be appreciated by those skilled in the art that the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways, even if such combinations and / or combinations are not explicitly described in the present disclosure. In particular, the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways without departing from the spirit and teachings of the present disclosure. All of these combinations and / or combinations fall within the scope of the present disclosure.
[0063] The embodiments of the present disclosure are described above. However, these embodiments are only for illustrative purposes and are not intended to limit the scope of the present disclosure. Although the embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. The scope of the present disclosure is defined by the attached claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present disclosure.
Claims
1. A silicon-based reconfigurable photon processing chip, characterized in that: include: A wavelength division multiplexer, configured to combine a plurality of input optical radio frequency signals of different wavelengths and output a first light beam, wherein each of the plurality of optical radio frequency signals of different wavelengths is composed of each optical carrier loaded with a radio frequency signal; A microring resonator group, comprising a plurality of cascaded microring resonators, wherein the microring resonator group is connected to the wavelength division multiplexer, and each microring resonator in the at least one microring resonator group is made to select and receive a light-carrying radio frequency signal of a corresponding wavelength based on its own resonant wavelength by regulating the resonant wavelength corresponding to each microring resonator, and output the light-carrying radio frequency signal selected to be received; A detector array, wherein a detector in the detector array is connected to a microring resonator in the microring resonator group, and the detector is used to receive the light-carrying radio frequency signal output by the corresponding microring resonator.
2. The silicon-based reconfigurable photon processing chip according to claim 1, characterized in that: By adjusting the resonant wavelength corresponding to at least one microring resonator in the microring resonator group, the method comprises: Determine at least one radio frequency-over-light signal from the plurality of radio frequency-over-light signals of different wavelengths as at least one target radio frequency-over-light signal; The resonant wavelength corresponding to each of the at least one microring resonators is determined according to the wavelength corresponding to each of the at least one target light-carrying radio frequency signals.
3. The silicon-based reconfigurable photonic processing chip according to claim 2, characterized in that: Also includes: The resonance wavelength corresponding to each of the at least one microring resonators is regulated by regulating the refractive index corresponding to each of the at least one microring resonators.
4. The silicon-based reconfigurable photonic processing chip according to claim 1, characterized in that: The wavelength division multiplexer comprises: A plurality of first input terminals, each of which is used to input an optically-carried radio frequency signal of a corresponding wavelength; The first output end is used to output the first light beam.
5. The silicon-based reconfigurable photonic processing chip according to claim 4, characterized in that: The microring resonator group comprises: A second input end, arranged to be connected to the first output end and used for inputting the first light beam; A plurality of second output ends, one of the plurality of second output ends is connected to a detector in the detector array, and the second output end is used to output a corresponding target light-carrying radio frequency signal.
6. The silicon-based reconfigurable photonic processing chip according to claim 3, characterized in that: Each microring resonator in the microring resonator group is an upload-download type microring resonator; Each of the microring resonators comprises: The heating electrode is used to adjust the refractive index of the microring resonator.
7. The silicon-based reconfigurable photonic processing chip according to claim 1, characterized in that: Each detector in the detector array is a silicon germanium detector.
8. The silicon-based reconfigurable photonic processing chip according to claim 1, characterized in that: Also includes: When the number of multiple input ports of the wavelength division multiplexer, the number of the multiple cascaded microring resonators and the number of the detector arrays are the same, the number of channel switches from the wavelength division multiplexer to the detector array is a factorial of N, where N is the number of the multiple cascaded microring resonators.
9. The silicon-based reconfigurable photonic processing chip according to claim 1, characterized in that: Also includes: A silicon substrate, a silicon dioxide lower cladding layer, a silicon core layer and a silicon dioxide upper cladding layer are stacked; the wavelength division multiplexer, the microring resonator group and the detector array are arranged on the silicon core layer.