A focusing platform for optical range finder and working method

Abstract

The application discloses a focusing platform for an optical range finder and a working method, and solves the problem of low flatness of the focusing platform of the optical range finder in the prior art, has the beneficial effects of ensuring the focusing accuracy and stability of the focusing platform, and specifically has the following arrangement: a focusing platform for an optical range finder, comprising an XY parallel piezoelectric positioning table, the XY parallel piezoelectric positioning table comprising a first base, the first base being hollow, an X-direction positioning table being arranged in the hollow of the first base in a first direction, and a Y-direction positioning table being arranged in the hollow of the first base in a second direction, the X-direction positioning table and the Y-direction positioning table being connected with a support base, an external decoupling module being arranged on the other side of the X-direction positioning table and the Y-direction positioning table of the first base, the external decoupling module being connected with the support base, the support base being connected with a Z-axis compensation piezoelectric positioning table, and a back hinge being arranged on the two sides of the Z-axis compensation piezoelectric positioning table as a guide mechanism of the Z-axis compensation piezoelectric positioning table, and the XY parallel piezoelectric positioning table is compensated by the Z-axis compensation piezoelectric positioning table.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of distance measurement, in particular to a focusing platform for optical range finder and working method. BACKGROUND

[0002] The statements in this section merely provide background information related to the present application and do not necessarily constitute the prior art.

[0003] In recent years, multi-degree-of-freedom ultra-precision positioning platforms that can realize high-precision motion scanning and tracking are important components of current core components in the forefront field, and are widely used in high-precision fields such as semiconductor manufacturing, micro-electro-mechanical systems, medical devices, space communication, etc.

[0004] The current two-degree-of-freedom piezoelectric positioning platform generally relies too much on the external decoupling hinge between the driving amplifier and the mover to complete the motion decoupling of the mover, and few people consider the influence of the coupling problem of the XY parallel piezoelectric positioning table on the driving amplifier itself. Due to the integrated design of the two-degree-of-freedom parallel piezoelectric positioning table, there is an unavoidable coupling error, and the coupling error generated by the mover will directly act on the output end of the driving amplifier through the flexible hinge, and will be transmitted to the input end of the piezoelectric ceramic driver through the input end of the driving amplifier, thereby affecting the stability of the input end piezoelectric ceramic driver. In addition, during the motion of the two-degree-of-freedom parallel piezoelectric positioning table, in addition to the conventional XY coupling error, there will also be out-of-plane parasitic error, i.e. Z-axis error. At present, the Z-axis error is rarely analyzed, but at the present stage, the optical range finder relies on the piezoelectric positioning platform for focusing, and during the focusing process, the planar precision of the parallel platform has a relatively strict requirement, and the planar precision of the Z-axis will directly affect the focusing precision.

[0005] In addition, the current XY parallel piezoelectric positioning table has output error caused by piezoelectric ceramic mounting deviation because both ends of the piezoelectric ceramic are rigidly connected, and the overall stability is insufficient due to the structure of the XY parallel piezoelectric positioning table, thereby affecting the focusing precision and stability of the optical range finder. SUMMARY

[0006] In view of the deficiencies in the prior art, the purpose of the present application is to provide a focusing platform for optical range finder, which is connected with the XY parallel piezoelectric positioning table and the support seat, the support seat is connected with the Z-axis compensation piezoelectric positioning table, and the Z-axis compensation piezoelectric positioning table compensates the XY parallel piezoelectric positioning table out of plane to ensure the planar precision.

[0007] In order to achieve the above purpose, the present application is realized by the following technical scheme:

[0008] The application discloses a focusing platform for an optical range finder, which comprises an XY parallel piezoelectric positioning table, wherein the XY parallel piezoelectric positioning table comprises a first base, the first base is hollow, an X-direction positioning table is arranged in the first base in a first direction, and a Y-direction positioning table is arranged in the first base in a second direction; the X-direction positioning table and the Y-direction positioning table are connected with a support base; an external decoupling module is arranged on the other side of the X-direction positioning table and the Y-direction positioning table of the first base; the external decoupling module is connected with the support base; piezoelectric ceramics are arranged on the X-direction positioning table and the Y-direction positioning table respectively; the two ends of the piezoelectric ceramics are spherical; the support base is connected with a Z-axis compensation piezoelectric positioning table; a back hinge is arranged on the two sides of the Z-axis compensation piezoelectric positioning table as a guide mechanism of the Z-axis compensation piezoelectric positioning table; the Z-axis compensation piezoelectric positioning table is used for compensating the out-of-plane parasitic of the XY parallel piezoelectric positioning table, so that the flatness of the XY parallel piezoelectric positioning table is adjusted.

[0009] The application discloses a focusing platform for an optical range finder, which comprises an XY parallel piezoelectric positioning table, wherein the XY parallel piezoelectric positioning table comprises an X-direction positioning table and a Y-direction positioning table, both of which are the same in structure and comprise a driving amplifier module; the driving amplifier module comprises a guide input unit, a primary amplification unit, a displacement turning unit, a secondary amplification unit, an output unit and a decoupling unit which are connected in sequence; the displacement turning unit is used for converting the vertical upward displacement into horizontal displacement for output; and the decoupling unit is connected with the Z-axis compensation piezoelectric positioning table.

[0010] The application discloses a focusing platform for an optical range finder, which comprises an XY parallel piezoelectric positioning table, wherein the guide input unit comprises an input rod, the two ends of the input rod are respectively provided with guide plate spring beams, one side of the guide plate spring beam away from the support base is movably connected with the primary amplification unit; the primary amplification unit comprises an amplification lever, and the amplification lever is connected with the displacement turning unit through a primary output hinge.

[0011] The application discloses a focusing platform for an optical range finder, which comprises an XY parallel piezoelectric positioning table, wherein one side of the amplification lever towards the support base is provided with a straight leaf hinge, the other side of the amplification lever is provided with the primary output hinge, a fulcrum hinge connected with the first base is further arranged, and the fulcrum hinge is arranged opposite to the primary output hinge.

[0012] The application discloses a focusing platform for an optical range finder, which comprises an XY parallel piezoelectric positioning table, wherein the displacement turning unit is arranged at two positions, the two displacement turning units are arranged opposite to each other, the displacement turning unit comprises a turning rod, the turning rod is L-shaped, a turning fulcrum hinge is arranged on the outer side of the longer side of the turning rod, the turning fulcrum hinge is connected with the first base, the inner sides of the longer sides of the two turning rods are respectively connected with the secondary amplification units, and the decoupling units are arranged in the middle parts of the two secondary amplification units.

[0013] The application discloses a focusing platform for an optical range finder, which comprises an XY parallel piezoelectric positioning table, wherein one side of the guide input unit away from the support base is provided with a conical limiting hole, one end of the piezoelectric ceramic is in contact with the conical limiting hole, and the other end of the piezoelectric ceramic is fixedly connected with the first base.

[0014] The decoupling unit comprises an output rod, which is connected to the support base through a leaf spring type hinge.

[0015] The opposite sides of the external decoupling module are respectively provided with leaf spring type hinges to be connected to the first base.

[0016] The secondary amplification unit comprises an amplification input rod, one side of which is connected to the displacement turning unit through an input hinge, and the other side of which is connected to the decoupling unit through a secondary output hinge.

[0017] The Z-axis compensation piezoelectric positioning table comprises a second base, which is installed on the support base, supports a mover through the hinge, and is provided with a Z-direction piezoelectric ceramic between the second base and the mover, and the mover is connected to the optical equipment of the optical distance meter.

[0018] In a second aspect, the application further provides a working method of the focusing platform for the optical distance meter, which comprises the following contents.

[0019] The first base is connected to the X-direction positioning table, the Y-direction positioning table and the support base as a whole, the support base is connected to the Z-axis compensation piezoelectric positioning table, and the Z-axis compensation piezoelectric positioning table is provided with a hinge on each side.

[0020] The Z-axis compensation piezoelectric positioning table is used to compensate for the out-of-plane parasitic of the XY parallel piezoelectric positioning table, so that the flatness of the XY parallel piezoelectric positioning table is adjusted.

[0021] The piezoelectric ceramic drives the support base to move, so that the focusing of the optical distance meter is realized.

[0022] The application has the following beneficial effects:

[0023] 1) In the application, the Z-axis compensation piezoelectric positioning table is connected in series to the original two-degree-of-freedom parallel piezoelectric platform to compensate for the out-of-plane parasitic of the XY parallel piezoelectric positioning table, so that the flatness is ensured, the requirement of the focusing platform for the optical distance meter on the flatness is met, the XY parallel piezoelectric positioning table is used to finely adjust the position of the light path at the nanometer level, the accuracy of the position of the light path is determined, the Z-axis compensation piezoelectric positioning table is used to finely adjust the position, the stability of the focusing plane is determined, and the focusing problem of the plane is solved.

[0024] 2) The piezoelectric ceramics are arranged on the X-direction positioning table and the Y-direction positioning table, both ends of the piezoelectric ceramics are spherical, flexible contact of both ends of the piezoelectric ceramics with corresponding components is realized to transmit force, relative to traditional rigid connection, stability of piezoelectric ceramic output is ensured, output error caused by piezoelectric ceramic installation deviation is effectively eliminated, the spherical contact mode reduces stress concentration problems of the piezoelectric ceramics caused by installation deviation, the life of the piezoelectric ceramics is improved, and risks such as piezoelectric ceramic breakdown are reduced.

[0025] 3) The X-direction positioning table and the Y-direction positioning table comprise a driving amplifier module, a multi-stage amplification mechanism is adopted, smaller piezoelectric ceramics can be used to generate larger displacement, under the same displacement amplification ratio state, the driving amplifier module has higher inherent frequency and greater lateral stiffness under the premise of ensuring compactness of the mechanism, has better dynamic performance, the driving amplifier module has an internal decoupling function, can effectively offset the influence of external coupling error on the driving amplifier module, reduces the motion inertia of the driving amplifier input end, and ensures stability of driving amplifier motion.

[0026] 4) The hinges are reasonably arranged, the straight-leaf hinge has good guiding function and also has certain torsional characteristics, and good guiding and decoupling performance is provided for the mechanism; the leaf spring hinge has good guiding function, good guiding performance is provided by using the torsional sensitive characteristics, and stability of linear output can be ensured. BRIEF DESCRIPTION OF DRAWINGS

[0027] The drawings accompanying the specification of this application form a part thereof, serve to further provide a further understanding of the application, and together with the description of the exemplary embodiments of the application, explain the application, and do not constitute an improper limitation of the application.

[0028] Figure 1 is a schematic view of a focusing platform for an optical range finder according to one or more embodiments of the application.

[0029] Figure 2 is a schematic view of an XY parallel piezoelectric positioning table in a focusing platform for an optical range finder according to one or more embodiments of the application.

[0030] Figure 3 is an enlarged view of a Y-direction positioning table in a focusing platform for an optical range finder according to one or more embodiments of the application.

[0031] Figure 4 is a sectional view of a Y-direction positioning table in a focusing platform for an optical range finder according to one or more embodiments of the application.

[0032] Figure 5It is a front view of a Z-axis compensation piezoelectric positioning table in a focusing platform for an optical range finder according to one or more embodiments of the present application.

[0033] Figure 6 It is a schematic view of a Z-axis compensation piezoelectric positioning table in a focusing platform for an optical range finder according to one or more embodiments of the present application.

[0034] In the figure: the mutual distance or size is exaggerated to show the position of each part, and the schematic view is only illustrative.

[0035] Among them: 1-XY parallel piezoelectric positioning table; 2-Z-axis compensation piezoelectric positioning table; P1-X direction piezoelectric ceramic, P2-Y direction piezoelectric ceramic;

[0036] 11-driving amplifier module; 12-external decoupling module; 13-support seat; 14-first base;

[0037] 21-guiding plate spring beam; 22-input rod; 23-straight leaf hinge;

[0038] 31-amplification lever; 32-fulcrum hinge; 33-first level output hinge;

[0039] 41-steering rod; 42-steering fulcrum hinge;

[0040] 51-input hinge; 52-amplification input rod; 53-second level output hinge;

[0041] 61-output rod;

[0042] 71-conical limiting hole; 72-pre-tightening threaded hole;

[0043] 81-second base; 82-back type hinge; 83-mover;

[0044] 121-straight leaf hinge; 122-plate spring type hinge. DETAILED DESCRIPTION

[0045] It should be noted that the following detailed description is illustrative only, and is intended to provide further description in connection with the present application. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the application belongs.

[0046] It should be noted that the terms used herein are merely for the purpose of describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless otherwise explicitly stated herein, and it should be further understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of a feature, step, operation, device, component and / or combination thereof.

[0047] As introduced in the background, the existing optical range finder focusing platform has the problem of poor plane accuracy, in order to solve the above technical problems, the application provides an optical range finder focusing platform.

[0048] In a typical embodiment of the application, referring to Figure 1 As shown in a, an optical range finder focusing platform, including XY parallel piezoelectric positioning table 1, XY parallel piezoelectric positioning table 1 including the first base 14, the first base 14 is hollow, the first base 14 is hollow in the first direction X positioning table, the second direction Y positioning table is arranged, X positioning table and Y positioning table are arranged adjacent to each other, both are connected with support seat 13, X positioning table, Y positioning table are provided with piezoelectric ceramic respectively, both ends of piezoelectric ceramic are spherical, support seat 13 and Z axis compensation piezoelectric positioning table 2 are connected, Z axis compensation piezoelectric positioning table 2 is provided with a hinge as a guide mechanism of Z axis compensation piezoelectric positioning table 2 on both sides, through Z axis compensation piezoelectric positioning table 2 to XY parallel piezoelectric positioning table 1 face outside parasitic compensation, realize the adjustment of XY parallel piezoelectric positioning table 1 flatness.

[0049] It is easy to understand that XY parallel piezoelectric positioning table 1 and Z axis compensation piezoelectric positioning table 2 are integrated models, and the two are connected through the threaded hole on the support seat 13 of XY parallel piezoelectric positioning table 1 and the second base 81 of Z axis compensation piezoelectric positioning table 2.

[0050] The first base 14 is specifically an integrated rigid frame structure, and the first base 14 is provided with a positioning hole, and the first base 14 can be installed at a set position of a test platform or an experimental platform through the positioning hole.

[0051] In this embodiment, referring to Figure 2 As shown in, the structure of X positioning table and Y positioning table is the same, both adopt symmetrical structure, the drive amplifier module 11 of X positioning table includes guiding input unit, primary amplification unit, displacement steering unit, secondary amplification unit, output unit and decoupling unit connected in sequence, the amplification lever of primary amplification unit is connected with displacement steering unit through the output hinge of primary amplification unit; displacement steering unit is connected with secondary amplification unit through the input hinge of secondary amplification unit, the secondary output hinge of secondary amplification unit is connected with decoupling unit, through displacement steering unit, the vertical upward displacement is converted into horizontal displacement for output, decoupling unit is connected with support seat 13 through hinge, support seat 13 is connected with Z axis compensation piezoelectric positioning table 2.

[0052] In this embodiment, referring to Figure 3As shown, the guide input unit includes a guide plate spring beam 21, an input rod 22, and a straight-leaf hinge 23, and the first-stage amplification unit includes an amplification lever 31, a fulcrum hinge 32, and an output hinge 33. The two ends of the input rod 22 are respectively provided with the guide plate spring beam 21. The two sides of the input rod 22 towards the piezoelectric ceramic side are respectively provided with the straight-leaf hinge 23. The two straight-leaf hinges 23 are respectively connected with the amplification lever 31 of the first-stage amplification unit. The amplification lever 31 is connected with the steering rod 41 in the displacement steering unit through the first-stage output hinge 33 and is connected with the first base 14 through the fulcrum hinge 32. The fulcrum hinge 32 is arranged opposite to the first-stage output hinge 33.

[0053] The steering rod 41 is L-shaped, the shorter side of the steering rod is connected with the first-stage output hinge 33, the first-stage output hinge 33 is specifically a circular arc hinge, the outer side of the longer side of the steering rod is provided with a steering fulcrum hinge 42, the steering fulcrum hinge 42 is connected with the first base 14, the inner sides of the two longer sides of the steering rod are respectively connected with the second-stage amplification unit, the middle parts of the two second-stage amplification units are provided with a decoupling unit, and the decoupling unit specifically includes an output rod 61. It can be understood that the guide input unit is arranged on the inner side of the decoupling unit and is arranged at a distance from the decoupling unit.

[0054] It can be easily understood that the input rod 22 of the guide input unit and the first base 14 of the XY parallel piezoelectric positioning table 1 are placed with piezoelectric ceramics (piezoelectric ceramic driver), and the two ends of the piezoelectric ceramics are specifically pasted with ball heads so that the two ends of the piezoelectric ceramics are spherical. For reference Figure 4 As shown, the side of the input rod 22 of the guide input unit towards the straight-leaf hinge 23 is provided with a conical limiting hole 71 for matching the ball heads at the two ends of the piezoelectric ceramic. The input rod 22 is in contact with the ball heads at one end of the X-direction piezoelectric ceramic P1 and the Y-direction piezoelectric ceramic P2 through the conical limiting hole 71 thereon. The ball heads at the other end of the X-direction piezoelectric ceramic P1 and the Y-direction piezoelectric ceramic P2 are in contact through a pre-tightening screw and provide pre-tightening. The pre-tightening screw is installed at a pre-tightening threaded hole 72. The first base 14 is provided with a pre-tightening threaded hole 72 on both sides of the shorter side of the steering rod 41. The contact mode of the conical limiting hole 71 and the piezoelectric ceramic ball head can effectively eliminate the vertical driving direction component force generated by the installation of the piezoelectric ceramic, can effectively reduce the parasitic of the flexible mechanism caused by the assembly error, and the symmetrical design of the driving amplifier module 11 can ensure the symmetrical and stable output of the mechanism on both sides.

[0055] The one side of the amplification lever 31 is provided with the straight-leaf hinge 23, the other side is provided with the fulcrum hinge 32 and the output hinge 33, the straight-leaf hinge 23 has good guiding performance and has certain torsional performance and is relatively flexible.

[0056] It is easy to understand that the primary amplification unit adopts the lever principle to amplify the input displacement, wherein the fulcrum of the amplification lever 31 is the fulcrum hinge of the primary amplification unit, and the output end of the amplification lever 31 is the primary output hinge 33 of the primary amplification unit. The fulcrum hinge 32 and the primary output hinge 33 are both circular arc hinges, which have good rotation performance. The main movement direction of the primary amplification unit is the same as the direction of the X-direction piezoelectric ceramic P1 or the Y-direction piezoelectric ceramic P2. Due to the inherent characteristics of the integrated flexible mechanism and the inevitable result of the lever principle, the amplification lever 31 will produce slight rotation, and the circular arc hinge can better solve this problem. The length of the amplification lever 31 of the primary amplification unit or the relative positions of the fulcrum hinge 32 and the primary output hinge 33 are adjusted to adjust the amplification ratio of the primary amplification unit. The change of the amplification ratio will affect the output and output stiffness of the primary amplification unit.

[0057] In addition, by adjusting the length of the steering lever 41, the position of the steering fulcrum hinge 42 and the relative position of the primary output hinge 33 of the primary amplification unit, the displacement amplification ratio of the displacement steering unit can be changed, and the input and output stiffness of the displacement steering unit will also be affected.

[0058] Specifically, the secondary amplification unit includes an input hinge 51 connected to the longer inner side of the steering lever, the input hinge 51 is connected to an amplification input lever 52, the other end of the amplification input lever 52 is provided with a secondary output hinge 53, and two amplification input levers 52 are arranged on both sides of the decoupling unit. By adjusting the relative positions of the input hinge 51 and the secondary output hinge 53 of the secondary amplification unit and the amplification input levers 52 of the secondary amplification unit, the displacement amplification ratio of the secondary amplification unit can be changed, and the output and output stiffness of the secondary amplification unit will also be affected. By changing the up-down positions of the input hinge 51 and the secondary output hinge 53 of the secondary amplification unit, the movement direction of the secondary amplification unit can be changed. When the input hinge 51 is located below the secondary output hinge 53, the composite bridge mechanism is a convex structure, the composite bridge mechanism is subjected to tension, and the output lever 61 produces downward movement. Conversely, the opposite is true.

[0059] In addition, the external decoupling module 12 is connected to the Z-axis compensation piezoelectric positioning table 2 through a straight leaf hinge 121 to complete the transmission of the main movement and decoupling work of the parallel movement. The external decoupling module 12 is provided with a leaf spring hinge 122 on both sides to ensure the stability of the output of the support seat 13 and further reduce the generation of coupling errors.

[0060] It should be noted that the secondary output hinge 53 and the input hinge 51 are both existing hinges.

[0061] Reference Figure 5 and Figure 6As shown, the Z-axis compensation piezoelectric positioning table 2 comprises a second base 81 mounted at the support base 13, the second base 81 is a reverse T-shaped structure, the vertical section of the second base 81 is provided with a back-shaped hinge 82 on each side, the mover 83 is supported by the back-shaped hinges 82 on both sides, the second base 81, the back-shaped hinge 82 and the mover 83 are integrated, the side and top of the second base 81 are respectively provided with threaded holes 84 for connection with the packaging plate, the top side of the second base 81 is hollow, the mover 83 is a reverse T-shaped component, the top of the mover 83 extends out of the hollow of the second base 81, the surface of the mover 83 is provided with a threaded hole 84 for connection with the optical device, the back-shaped hinges on both sides of the mover 83 serve as the guide mechanism of the Z-axis compensation piezoelectric positioning table 2, ensuring the stable output of the mover 83, the back-shaped hinge 82 has the advantages of compactness, good single-axis driving guide performance and high inherent frequency, providing good dynamic performance for the Z-axis compensation piezoelectric positioning table;

[0062] The second base 81 is provided with a recess 85 at the lower part of the mover 83, the Z-direction piezoelectric ceramic is located between the bottom of the recess 85 and the mover 83, the upper end of the Z-direction piezoelectric ceramic is directly combined with the mover 83, the mover 83 is provided with a conical groove for matching the ball head structure of the Z-direction piezoelectric ceramic, the Z-direction piezoelectric ceramic is installed at the second base 81 by a pre-tightening screw, which can ensure that the Z-direction piezoelectric ceramic is uniformly stressed and eliminate the influence of installation errors as much as possible.

[0063] When the XY parallel piezoelectric positioning table 1 generates out-of-plane parasitic during operation, the Z-axis compensation piezoelectric positioning table 2 outputs displacement of the mover 83 through the Z-direction piezoelectric ceramic. The compensation for the out-of-plane parasitic of the XY parallel piezoelectric positioning table 1 is completed, and the focusing of the optical range finder is realized. At the same time, in order to meet the precision requirements of the light source focusing and other optical devices for the Z-axis, the Z-axis compensation piezoelectric positioning table 2 can drive the mover to complete the Z-direction adjustment work.

[0064] The embodiment also provides a working method of the focusing platform for the optical range finder, which comprises the following contents:

[0065] The first base 14 is connected with the X-direction positioning table, the Y-direction positioning table and the support base 13 as a whole, the support base 13 is connected with the Z-axis compensation piezoelectric positioning table 2, and the Z-axis compensation piezoelectric positioning table 2 is provided with back-shaped hinges 82 on both sides;

[0066] For the compensation of the out-of-plane parasitic of the XY parallel piezoelectric positioning table 1, the Z-axis compensation piezoelectric positioning table 2 compensates for the out-of-plane parasitic of the XY parallel piezoelectric positioning table 1, and adjusts the flatness of the XY parallel piezoelectric positioning table 1.

[0067] The X direction piezoelectric ceramic P1 and the Y direction piezoelectric ceramic P2 of the XY parallel piezoelectric positioning table 1 respectively act to drive the support base 13 to act, the support base 13 supports the measuring mechanism of the optical range finder through the Z axis compensation piezoelectric positioning table 2, and the focusing of the optical range finder is realized through the action of the XY parallel piezoelectric positioning table 1 and the Z axis compensation piezoelectric positioning table 2.

[0068] The above only describes the preferred embodiments of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A focusing platform for optical range finders, characterized in that, The application relates to a parallel XY piezoelectric positioning table, which comprises a first base, a X-direction positioning table and a Y-direction positioning table, a support base, an external decoupling module, a piezoelectric ceramic and a Z-axis compensation piezoelectric positioning table. The X-direction positioning table and the Y-direction positioning table have the same structure, and both comprise a driving amplifier module, a guiding input unit, a primary amplification unit, a displacement steering unit, a secondary amplification unit, an output unit and a decoupling unit. The Z-axis compensation piezoelectric positioning table comprises a second base, a support moving element, a second base and a moving element.

2. The focusing platform for optical range finder according to claim 1, wherein, The guiding input unit comprises an input rod, and guiding plate spring beams are arranged at the two ends of the input rod.

3. The focusing platform for optical range finder according to claim 2, wherein, The amplification lever is provided with a straight leaf hinge on the side facing the support base.

4. The focusing platform for optical range finder according to claim 1, wherein, The displacement steering unit is provided with two displacement steering units, and the two displacement steering units are oppositely arranged.

5. The focusing platform for optical range finder according to claim 1, wherein, The guiding input unit is provided with a conical limiting hole on the side away from the support base.

6. The focusing platform for optical range finder according to claim 1, wherein, The decoupling unit comprises an output rod, and the output rod is connected with the support base through a plate spring hinge. The external decoupling module is provided with plate spring hinges on the opposite sides to be connected with the first base.

7. The focusing platform for optical range finder according to claim 1, wherein, The secondary amplification unit comprises an amplification input rod, and the amplification input rod is connected with the displacement steering unit through an input hinge.

8. The focusing platform for optical range finder according to claim 1, wherein, The Z-direction piezoelectric ceramic is arranged between the second base and the mover, and the mover is connected with the optical device of the optical distance meter.

9. The working method of the focusing platform for optical range finders according to any one of claims 1-8, characterized in that, The application comprises the following contents: The first base is connected with the X-direction positioning table, the Y-direction positioning table and the support seat as a whole, the support seat is connected with the Z-axis compensation piezoelectric positioning table, and the back-shaped hinges are arranged on the two sides of the Z-axis compensation piezoelectric positioning table; The Z-axis compensation piezoelectric positioning table is used to compensate the out-of-plane parasitic of the XY parallel piezoelectric positioning table, so that the flatness of the XY parallel piezoelectric positioning table is adjusted; The piezoelectric ceramic drives the support seat to move, so that the focusing of the optical distance meter is adjusted.

Images