Exposure lens
By using vertically arranged deviation correction mechanisms and driving adjustment mechanisms in the mask exposure machine to adjust the relative position of the mask plate and the workpiece, the complex motion control and high cost problems caused by the multi-axis working mechanism in the prior art are solved, and the effect of simplifying control and reducing costs is achieved.
Patent Information
- Application Number
- CN202410902283.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-10-10
- Filing Date
- 2024-07-06
- Publication Date
- 2025-04-11
AI Technical Summary
In the production of photovoltaic cell cells, existing mask exposure machines require multi-axis working mechanisms to align masks and workpieces, resulting in complex motion control and high cost.
An exposure lens is designed, and a vertically arranged deviation correction mechanism is used to adjust the relative position of the mask plate and the workpiece by driving the adjustment mechanism, avoiding the multi-axis working mechanism on each workbench.
Simplifies motion control, reduces costs, and avoids the disadvantage of excessive exposure lenses and takes up little space.
Smart Images
Figure CN119805870A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of mask exposure, in particular to an exposure lens applied to photovoltaic cell exposure equipment. Background Art
[0002] At present, the main methods used to make photovoltaic cell grid lines are silver paste screen printing technology or copper electroplating technology. Silver paste screen printing technology has high cost and low efficiency and production capacity. At the same time, the conductivity of the grid lines and the energy conversion efficiency of the battery are relatively low, making the copper electroplating process more concerned.
[0003] The copper electroplating process includes four steps: depositing a seed layer, patterning, copper electroplating, and post-processing. Patterning is a relatively important step in the copper electroplating process, and an exposure process is used to generate a pattern on the substrate. The current exposure process mainly includes digital scanning and mask projection. Digital scanning photolithography machines can meet the process requirements of copper electroplating grid lines. However, due to the small light output width of each optical lens in the digital scanning method, more parts are required. When making finer grid lines, a higher resolution configuration is required, the cost is high, the scanning speed of the working process is limited, and the processing efficiency is limited. Compared with PCB boards, the size of photovoltaic product substrates is relatively fixed, and the material number information rarely changes. Basically, the same size of substrates is used to make grid lines of the same specifications. The mask required for patterning is relatively fixed. It is difficult for digital scanning photolithography machines to give full play to their advantages of being able to expose a variety of patterns, and their production efficiency is limited.
[0004] When the mask exposure machine is applied to photovoltaic cells, due to production capacity requirements, it is usually necessary to adopt a multi-workbench working mode. In order to align the mask and the workpiece, a multi-axis motion mechanism needs to be set up on each workbench, which makes motion control complex and costly. Summary of the invention
[0005] The technical problem to be solved by the present invention is to provide an exposure lens applied to a mask exposure machine, wherein the exposure lens can adjust the relative position of a mask plate and an exposure workpiece.
[0006] In order to solve the above problems, the present invention provides an exposure lens, including a light source, a shaping unit, a mask plate and a projection lens, the light emitted by the light source passes through the shaping unit, the mask plate and the projection lens in sequence, the exposure lens also includes a correction mechanism, the correction mechanism is vertically arranged and installed on the projection lens, the mask plate is installed on the correction mechanism, the correction mechanism includes a mounting base plate, a driving adjustment mechanism and an adjustment plate, the driving adjustment mechanism is installed on the mounting base plate, the adjustment plate is connected to the driving adjustment mechanism, the driving adjustment mechanism includes at least three driving devices, the driving devices are respectively arranged on two adjacent sides of the mounting base plate, including a first driving device that drives the adjustment plate to move in a vertical direction, and a second driving device that drives the adjustment plate to move in a horizontal direction perpendicular to the vertical direction, at least the second driving device includes a driving source, a cross-moving mechanism and an auxiliary moving mechanism, the cross-moving mechanism and the auxiliary moving mechanism are located on both sides of the driving source, and the driving source drives the cross-moving mechanism and the auxiliary mechanism to move.
[0007] Preferably, the cross-moving mechanism includes a first sliding member installed on a base plate, a second sliding member installed on the first sliding member, and a rotating bearing installed on the second sliding member, the sliding directions of the first sliding member and the second sliding member are perpendicular, the auxiliary moving mechanism is consistent with the sliding direction of the first sliding member, and the adjustment plate is connected to the rotating bearing.
[0008] Preferably, the cross moving mechanism of the second driving device is located at the lower part, and the auxiliary moving mechanism is located at the upper side.
[0009] Preferably, the cross-movement mechanism adopts a cross-roller guide.
[0010] Preferably, the auxiliary movement mechanism includes a guide rail and a slider, and the slider is connected to the driving source.
[0011] Preferably, the driving source is a servo screw or a linear motor. When the driving source is a linear motor, the driving device of the driving adjustment mechanism includes a cross moving mechanism and an auxiliary moving mechanism.
[0012] Preferably, the linear motor drives the cross-moving mechanism and the auxiliary moving mechanism to move through a connecting member, and the connecting member includes a first connecting part, a second connecting part and a third connecting part. The first connecting part is connected to the side of the linear motor and slides along the side of the linear motor. The second connecting part is laterally connected to the first sliding part of the cross-moving mechanism. The third connecting part is connected to the top of the auxiliary moving mechanism. The first connecting part and the second connecting part are connected, and the second connecting part and the third connecting part are vertically connected.
[0013] Preferably, the mounting base plate of the deviation-correcting mechanism and the adjusting plate are provided with magnetic attraction devices.
[0014] Preferably, the correction mechanism also includes a mask mounting plate for mounting a fixed mask, which is integrally installed on the adjustment plate. Adjustment members are respectively provided at the four corners of the adjustment plate. The adjustment members include two pushing members, which are respectively close to two adjacent sides of the adjustment plate. The adjustment members abut against the mask mounting plate. By adjusting the adjustment members, the mask mounting plate is pushed up, and the position of the mask mounting plate is adjusted to obtain the optimal image surface of the mask plate.
[0015] Preferably, the driving and adjusting mechanism further comprises an independently arranged rotating member, the rotating member and the three driving devices are symmetrically arranged and connected to the adjusting plate.
[0016] Compared with the prior art, the exposure lens uses a vertically arranged correction mechanism to adjust the position of the mask plate and align it with the exposure workpiece, without the need to set up a multi-axis motion mechanism on each workbench, and the motion control is simple and the cost is low. At the same time, by vertically arranging the mask plate, the exposure lens is divided into the front section and the rear section, which avoids the exposure lens being too long and occupies less space. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a schematic diagram of a mask exposure lens.
[0018] Figure 2 It is a schematic diagram of the correction mechanism.
[0019] Figure 3 It is a schematic diagram of an embodiment of a driving and adjusting mechanism of a deviation correcting mechanism.
[0020] Figure 4 It is a cross-sectional view of the cross-movement mechanism.
[0021] Figure 5 Schematic diagram of the adjustment plate and mask mounting plate.
[0022] Figure 6 Schematic diagram of the adjustment member installed on the adjustment plate.
[0023] Figure 7 It is a schematic diagram of motion control principle.
[0024] Figure 8 It is a schematic diagram of another embodiment of the driving and adjusting mechanism of the deviation correcting mechanism.
[0025] Fig. 9 It is a cross-sectional schematic diagram of another embodiment of the driving and adjusting mechanism of the deviation correcting mechanism.
[0026] Fig.10 It is a cross-sectional view of a driving device of another embodiment of a driving and adjusting mechanism of a deviation correcting mechanism.
[0027] Fig.11 It is a cross-sectional view of a connecting piece of another embodiment of a driving and adjusting mechanism of a deviation correcting mechanism. DETAILED DESCRIPTION
[0028] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described below by means of specific embodiments shown in the accompanying drawings.
[0029] like Figure 1 As shown, an exposure lens includes a light source, a shaping unit 20, a mask plate 30, a correction mechanism 40 and a projection lens 50. The light source transmits light to the shaping unit 20 through an optical fiber. A mask plate 30 and a correction mechanism 40 are arranged between the shaping unit 20 and the projection lens 40. The correction mechanism 40 is fixedly connected to the projection lens 50, and the mask plate 30 is installed on the correction mechanism 40. The mask plate 30 is arranged vertically, and the exposure lens is divided into a front section and a rear section, so as to avoid the exposure lens being too long and occupying a small space. At the same time, the correction mechanism 40 is arranged to adjust the positional relationship between the mask plate 30 and the workpiece, and there is no need to set an adjustment mechanism on the workbench carrying the workpiece. Especially for the mode of setting multiple workbenches, the components of the workbench are greatly reduced, making the workbench simpler, reducing the weight of the workbench, and facilitating control. However, after the correction mechanism 40 is arranged vertically, the movement accuracy is affected due to the action of force.
[0030] In order to improve the accuracy of the vertical correction mechanism, Figure 2-Figure 11 The correction mechanism 40 shown includes a mounting base plate 400, an adjustment plate 500, a mask mounting plate 600 and a drive adjustment mechanism 700. The mounting base plate 400 is used to fix the position of the correction mechanism 40. The drive adjustment mechanism 700 is mounted on the mounting base plate 400. The mounting base plate 400 and the adjustment plate 500 are connected through the drive adjustment mechanism 700. The drive adjustment mechanism pushes the adjustment plate 500 to move and adjust it to a suitable position. The mask mounting plate 600 is detachably mounted on the adjustment plate 500. The mounting base plate 400, the adjustment plate 500 and the mask mounting plate 600 are all hollow.
[0031] The driving and adjusting mechanism includes at least three driving devices, which are respectively arranged on two adjacent sides of the mounting base plate 400, including a first driving device 701 that drives the adjusting plate 500 to move in the vertical direction, and a second driving device 702 that drives the adjusting plate to move in the horizontal direction perpendicular to the vertical direction. The number of the first driving device 701 or the second driving device 702 is two, and the rotation of the adjusting plate is achieved by adjusting the different feed amounts of the two first driving devices 701 or the two second driving devices 702. By controlling the three driving devices, the adjusting plate 500 is driven to perform linear motion and rotational movement in the vertical plane. The driving and adjusting mechanism 700 also includes an independently arranged rotating member 703 to cooperate with the rotation of the adjusting plate. Preferably, the rotating member 703 and the three driving devices (701, 702) are symmetrically arranged and connected to the adjusting plate 500.
[0032] At least the second driving device located at the lower part of the installation base plate includes a driving source 710, a cross-moving mechanism 711 and an auxiliary moving mechanism 712. The cross-moving mechanism 711 and the auxiliary moving mechanism 712 are located on both sides of the driving source 710. The driving source 710 is connected to the cross-moving mechanism 711 and the auxiliary moving mechanism 712 through a connecting piece. The adjustment plate 500 is connected to the cross-moving mechanism 711. The driving source 710 drives the cross-moving mechanism 711 to drive the adjustment plate 500 to move, and the auxiliary moving mechanism 712 guides the movement to ensure the accuracy of the cross-moving mechanism 711 and avoid the accuracy influence caused by the vertical installation force. The cross moving mechanism 711 includes a first sliding member 7110 installed on the bottom plate, a second sliding member 7111 installed on the first sliding member 7110, and a rotating bearing 7112 installed on the second sliding member 7111. The sliding directions of the first sliding member 7110 and the second sliding member 7111 are perpendicular. The auxiliary moving mechanism 712 is consistent with the sliding direction of the first sliding member 7110, and the adjustment plate 700 is connected to the rotating bearing 7112. The auxiliary moving mechanism 712 includes a guide rail and a slider. The slider is connected to the driving source and adopts a linear guide rail. The first sliding member 7110 and the second sliding member 7111 can adopt a cross roller guide rail. For the driving device located at the lower part of the mounting bottom plate, preferably, the auxiliary moving mechanism 712 is located on the upper side, and the cross moving mechanism 711 is located on the lower side. The auxiliary moving mechanism 712 selects a moving mechanism that can bear a load greater than the load of the corresponding correction mechanism. Such arrangement allows the auxiliary moving mechanism 712 to bear more longitudinal loads, thereby protecting the cross moving mechanism 711 from wear and deformation due to stress, thereby ensuring the accuracy of the cross moving mechanism 711.
[0033] The four corners of the adjustment plate 500 are respectively provided with adjustment members 501, and the adjustment members 501 are against the mask mounting plate 500. By adjusting the adjustment members, the mask mounting plate 500 is pushed up, and the position of the mask mounting plate 500 is adjusted to obtain the best image plane of the mask. Preferably, the adjustment member 501 includes two pushers, which are respectively close to the two adjacent sides of the adjustment plate to adjust the mask mounting plate 500 in multiple directions. The adjustment member 501 can adopt a precision thread pair.
[0034] The mask mounting plate 600 includes a substrate 601, a light hole located in the middle of the substrate 601, a strip stopper 603 located around the light hole, and two corner positioning members 604 located at the lower part of the light hole, and the corner positioning members 604 cover the corner positions of the mask plate 30 located at the lower part. The strip stopper 603 fixes the four sides of the mask plate 30, and the two corner positioning members 604 and the lower strip stopper 603 support and limit the position of the mask plate 30. The lower part of the substrate 601 has two notches, which cooperate with the protrusion 502 set on the adjustment plate 500 to support and limit the position of the mask mounting plate 600. The mask mounting plate 600 and the adjustment plate 500 are also positioned by the side fixing members 605. When replacing the mask plate, it is only necessary to remove the mask mounting plate 600 as a whole, and there is no need to adjust the optimal focal plane of the mask plate when reinstalling it. The operation is simple and convenient, and the debugging time is shortened.
[0035] When the mask plate and the workpiece are aligned and corrected, the feed amount of the three drive devices is adjusted respectively to achieve the movement and rotation of the mask plate in a certain plane in the vertical direction and the horizontal direction. Take the setting of two first drive devices and one second drive device as an example.
[0036] like Figure 7 As shown, a coordinate system is established with the vertical direction as the X direction and the horizontal direction as the Y direction.
[0037] The relative feed amount d corresponding to the first driving device A701a X1 =Rcos(dθ+θ X1 +θ 0 )-Rcos(θ X1 +θ 0 ).
[0038] The relative feed amount d corresponding to the first driving device B701b X2 =Rcos(dθ+θ X2 +θ 0 )-Rcos(θ X2 +θ 0 ).
[0039] The relative feed amount d corresponding to the second driving device 702 Y =Rsin(dθ+θ Y +θ 0 )-Rsin(θ Y +θ 0 ).
[0040] Where R is the radius of the virtual circle determined by the initial rotation bearing center of the first driving device A701a, the first driving device B701b and the second driving device 702, θ X1 is the angular position of the center of the rotating bearing of the first drive device A701a, θ X2 is the angular position of the center of the rotating bearing of the first drive device B701b, θ Y is the angular position of the center of the rotating bearing of the second driving device 7002, θ 0 To calculate the angle of the adjustment plate before action, dθ is the rotation angle of the adjustment plate.
[0041] The following describes the deviation correction mechanism using different driving sources through different embodiments.
[0042] like Figure 2-Figure 6 As shown, it is the first embodiment of the correction mechanism, the correction mechanism adopts a servo screw as a driving source, and the driving adjustment mechanism includes three driving devices, namely a first driving device A701a, a first driving device B701b and a second driving device 702.
[0043] The first drive device A701a and the first drive device B701b include a vertical servo screw 720 and a vertical cross-moving mechanism 721. The vertical servo screw 720 includes a servo motor and a screw 722 connected to the servo motor. The first sliding member of the vertical cross-moving mechanism 721 moves vertically, and the second sliding member arranged on the upper part of the first sliding member moves horizontally perpendicular to the vertical direction, and the rotating bearing is arranged above the second sliding member. The vertical servo screw 720 is located on one side of the vertical cross-moving mechanism 721, connected to the first sliding member of the cross-moving mechanism 721, and the servo motor drives the screw 722 to drive the cross-moving mechanism to move vertically.
[0044] The second driving device 702 includes a transverse servo screw 710, a transverse cross-moving mechanism 711 and an auxiliary moving mechanism 712. The transverse servo screw 710 is located between the transverse cross-moving mechanism 711 and the auxiliary moving mechanism 712, and drives the transverse cross-moving mechanism 711 and the auxiliary moving mechanism 712 to move at the same time. The first sliding member of the transverse cross-moving mechanism 711 moves horizontally, and the second sliding member arranged on the upper part of the first sliding member moves vertically perpendicular to the horizontal direction, and the rotating bearing is arranged above the second sliding member. The auxiliary moving mechanism 712 moves in the same horizontal direction as the first sliding member. The longitudinal load is borne by the auxiliary moving mechanism to ensure the accuracy of the cross-moving mechanism.
[0045] Preferably, a rotating member 703 is symmetrically arranged with respect to the second driving device 702 , and the rotating member 703 includes a transverse cross movement mechanism 730 and an auxiliary movement mechanism 731 , and the auxiliary movement mechanism 731 is connected to the first sliding member of the transverse cross movement mechanism 730 .
[0046] like Figure 8-Figure 11 As shown, it is a second embodiment of the correction mechanism, which adopts a linear motor as a driving source. Like the first embodiment, the driving adjustment mechanism includes three driving devices, namely a first driving device A741a, a first driving device B741b and a second driving device 742.
[0047] The first driving device A741a, the first driving device B741a and the second driving device 742 all include a linear motor 750, a cross moving mechanism 751, an auxiliary moving mechanism 752 and a connecting member 753. The linear motor 750 drives the cross moving mechanism 751 and the auxiliary moving mechanism 752 to move through the connecting member. The movement direction of the auxiliary moving mechanism 752 is the same as the movement direction of the first sliding member 7510 of the cross moving mechanism 751. The first sliding mechanisms of the cross moving mechanisms of the first driving device A741a and the first driving device B741a move vertically, and the first sliding mechanism of the cross moving mechanism of the second driving device 742 moves horizontally. The connecting member 753 includes a first connecting portion 7530, a second connecting portion 7531 and a third connecting portion 7532, wherein the first connecting portion 7530 is connected to the side of the linear motor 750, the second connecting portion 7531 is laterally connected to the first sliding member 7510 of the cross moving mechanism 751, and the third connecting portion 7532 is connected to the top of the auxiliary moving mechanism 752, the first connecting portion 7530 and the second connecting portion 7531 are connected, and the second connecting portion 7531 and the third connecting portion 7532 are vertically connected. The linear motor 750 drives the connecting member 753 to move, and the connecting member 753 drives the cross moving mechanism 751 and the auxiliary moving mechanism 752 to move. The linear motor 750 is externally arranged, and the cross moving mechanism 751 and the auxiliary moving mechanism 752 are driven to move by the connecting member 753, so as to facilitate the synchronous control of the cross moving mechanism 752 and the auxiliary moving mechanism 753, better play the guiding role of the auxiliary moving mechanism 752, and avoid the cross moving mechanism 751 from being worn and deformed by force, which affects the accuracy of the system.
[0048] The mounting base plate and the adjusting plate of the correction mechanism are provided with a magnetic device 760. When the power is off, the mounting base plate and the adjusting plate are fixed in position by the magnetic device 760 to avoid loss of the limiting device after the power is off, and free sliding, which is not conducive to transportation and fixation, and can also avoid damage due to external force after the power is off.
[0049] The use of linear motor drive can increase the moving speed and match a faster processing rhythm.
Claims
1. An exposure lens, comprising a light source, a shaping unit, a mask plate and a projection lens, wherein the light emitted by the light source passes through the shaping unit, the mask plate and the projection lens in sequence, and is characterized in that: The exposure lens also includes a correction mechanism, which is vertically arranged and installed on the projection lens, and the mask is installed on the correction mechanism. The correction mechanism includes a mounting base plate, a drive adjustment mechanism and an adjustment plate. The drive adjustment mechanism is installed on the mounting base plate, and the adjustment plate is connected to the drive adjustment mechanism. The drive adjustment mechanism includes at least three drive devices, and the drive devices are respectively arranged on two adjacent sides of the mounting base plate, including a first drive device that drives the adjustment plate to move in a vertical direction, and a second drive device that drives the adjustment plate to move in a horizontal direction perpendicular to the vertical direction. At least the second drive device includes a drive source, a cross-moving mechanism and an auxiliary moving mechanism. The cross-moving mechanism and the auxiliary moving mechanism are located on both sides of the drive source, and the drive source drives the cross-moving mechanism and the auxiliary mechanism to move.
2. The exposure lens according to claim 1, characterized in that: The cross-moving mechanism includes a first sliding member installed on a base plate, a second sliding member installed on the first sliding member, and a rotating bearing installed on the second sliding member. The sliding directions of the first sliding member and the second sliding member are perpendicular. The auxiliary moving mechanism is consistent with the sliding direction of the first sliding member, and the adjustment plate is connected to the rotating bearing.
3. The exposure lens according to claim 1, characterized in that: The cross movement mechanism of the second driving device is located at the lower part, and the auxiliary movement mechanism is located at the upper side.
4. The exposure lens according to claim 1, characterized in that: The cross movement mechanism adopts a cross roller guide rail.
5. The exposure lens according to claim 1, characterized in that: The auxiliary movement mechanism includes a guide rail and a slider, and the slider is connected to the driving source.
6. The exposure lens according to claim 1, characterized in that: The driving source is a servo screw or a linear motor. When the driving source is a linear motor, the driving device of the driving adjustment mechanism includes a cross moving mechanism and an auxiliary moving mechanism.
7. The exposure lens according to claim 6, characterized in that: The linear motor drives the cross-moving mechanism and the auxiliary moving mechanism to move through a connecting member, and the connecting member includes a first connecting part, a second connecting part and a third connecting part. The first connecting part is connected to the side of the linear motor and slides along the side of the linear motor. The second connecting part is laterally connected to the first sliding part of the cross-moving mechanism. The third connecting part is connected to the top of the auxiliary moving mechanism. The first connecting part and the second connecting part are connected, and the second connecting part and the third connecting part are vertically connected.
8. The deviation correction mechanism according to claim 1, characterized in that: The mounting base plate of the deviation-correcting mechanism and the adjusting plate are provided with magnetic attraction devices.
9. The exposure lens according to claim 1, characterized in that: The correction mechanism also includes a mask mounting plate, which is used to install a fixed mask and is integrally installed on the adjustment plate. Adjustment members are respectively arranged at the four corners of the adjustment plate. The adjustment members include two pushing members, which are respectively close to two adjacent sides of the adjustment plate. The adjustment members abut against the mask mounting plate. By adjusting the adjustment members, the mask mounting plate is pushed up, and the position of the mask mounting plate is adjusted to obtain the best image surface of the mask plate.
10. The exposure lens according to claim 1, characterized in that: The driving and adjusting mechanism further comprises an independently arranged rotating member, the rotating member and the three driving devices are symmetrically arranged and connected to the adjusting plate.