Alignment method for ldi exposure machine and ldi exposure machine

Abstract

The application discloses a kind of LDI exposure machine's alignment method and LDI exposure machine, LDI exposure machine includes the motion platform for pulling substrate movement and multiple alignment cameras, motion platform is located below multiple alignment cameras, alignment method includes: control motion platform movement and obtain the real-time moving distance of motion platform;Get the shooting interval distance of alignment camera;When real-time moving distance reaches shooting interval distance every time, then trigger image acquisition signal once, image acquisition signal is used to indicate that multiple alignment cameras synchronously collect positioning point image information;According to all positioning point image information, determine the segmentation image information of each positioning point;According to the segmentation image information of each positioning point, alignment is carried out.Using the alignment method can position point partition more on substrate Maximum degree promotes the alignment speed of LDI exposure machine, avoid the problem of camera redundancy.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of LDI exposure, in particular to a positioning method of an LDI exposure machine and the LDI exposure machine. BACKGROUND

[0002] In the related art, an existing LDI (laser direct imaging) exposure machine searches the position of each positioning point in turn through a line distance, controls the vector motion of a camera and a motion platform relative to each other, so that the camera stops shooting a positioning point image after reaching above each positioning point, and then performs positioning through the positioning point image of each positioning point. However, this method can only position the positioning points one by one in the positioning process, so that the positioning speed is slow when the positioning points are divided into many areas on the substrate, thereby reducing the production capacity of the exposure machine. In addition, when multiple cameras are arranged to collect positioning point images for positioning, only one camera can collect images at the same time, thereby causing the problem of camera redundancy. SUMMARY

[0003] The present application aims to at least solve one of the technical problems in the prior art. To this end, one object of the present application is to provide a positioning method of an LDI exposure machine, which can maximize the positioning speed of the LDI exposure machine when the positioning points are divided into many areas on the substrate, and avoid the problem of camera redundancy.

[0004] A second object of the present application is to provide an LDI exposure machine.

[0005] In order to solve the above problems, the first aspect of the present application provides a positioning method of an LDI exposure machine, the LDI exposure machine comprising a motion platform for pulling the motion of a substrate and a plurality of alignment cameras, the motion platform being located below the plurality of alignment cameras, the positioning method comprising: controlling the motion of the motion platform and obtaining the real-time moving distance of the motion platform; obtaining the shooting interval distance of the alignment camera; triggering an image acquisition signal once every time the real-time moving distance reaches the shooting interval distance, the image acquisition signal being used to indicate that the plurality of alignment cameras synchronously collect positioning point image information; determining the segmentation image information of each positioning point according to all the positioning point image information; and performing positioning according to the segmentation image information of each positioning point.

[0006] The alignment method of the LDI exposure machine according to the embodiment of the present application moves the motion platform carrying the substrate along the length direction of the substrate, triggers the multiple alignment cameras to shoot after the motion platform moves to the shooting interval distance each time, obtains all the positioning point image information at one time, then screens the segmentation image information of each positioning point, and then performs positioning through the segmentation image information of each positioning point, without obtaining the image of each positioning point one by one and performing positioning, and simultaneously reduces the number of multi-division alignment movements to one by controlling the motion platform to move along the length direction of the substrate, so that the positioning speed is maximally improved when the number of positioning point divisions on the substrate is large, and the positioning speed of the LDI exposure machine is improved. In addition, the multiple alignment cameras can shoot images synchronously at the same time, so as to avoid the problem of camera redundancy.

[0007] In some embodiments, the motion of the motion platform is controlled, including: controlling the motion platform to move at a constant speed.

[0008] In some embodiments, the shooting interval distance of the alignment camera is obtained, including: determining the shooting interval distance of the alignment camera according to the pixel size and the lens magnification of the alignment camera.

[0009] In some embodiments, the segmentation image information of each positioning point is determined according to all the positioning point image information, including: performing image stitching according to all the positioning point image information to obtain stitching image information; obtaining the GDS coordinate mapping relationship of the positioning point, and obtaining the conversion relationship between the substrate position unit and the image pixel unit; determining the segmentation image information of each positioning point in the stitching image information according to the GDS coordinate mapping relationship and the conversion relationship.

[0010] In some embodiments, the GDS coordinate mapping relationship of the positioning point is obtained, including: obtaining the GDS coordinate information of the reference positioning point and the GDS coordinate information of the non-reference positioning point; determining the GDS coordinate mapping relationship according to the GDS coordinate information of the reference positioning point and the GDS coordinate information of the non-reference positioning point; determining the segmentation image information of each positioning point in the stitching image information according to the GDS coordinate mapping relationship and the conversion relationship, including: determining a target positioning point corresponding to the reference positioning point in the stitching image information; determining the segmentation image information of each positioning point according to the target positioning point, the GDS coordinate mapping relationship and the conversion relationship.

[0011] In some embodiments, the alignment method further comprises: determining an initial identification position of each positioning point in the corresponding segmented image information; determining a mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras; determining a final identification position of each positioning point in the corresponding segmented image information according to the mapping relationship function and the initial identification position; and determining a substrate position identification result of each positioning point according to the final identification position of each positioning point.

[0012] In some embodiments, the determining of the mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras comprises: determining image coordinate information of each positioning point in the positioning point image information collected by each alignment camera; and determining the mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras according to the image coordinate information of each positioning point.

[0013] In some embodiments, the determining of the substrate position identification result of each positioning point according to the final identification position of each positioning point comprises: determining a mapping relationship between image coordinate information and substrate coordinate information of the positioning point; and performing position conversion on the final identification position of each positioning point according to the mapping relationship to determine the substrate position identification result of each positioning point.

[0014] An embodiment of the second aspect of the present application provides an LDI exposure machine, comprising: a plurality of alignment cameras, each alignment camera being configured to collect positioning point image information in response to an image collection signal; a motion platform, the motion platform being located below the plurality of alignment cameras, and the motion platform being configured to pull a substrate to move; and a controller, the controller being connected with the motion platform and the plurality of alignment cameras, and the controller being configured to execute the alignment method of the LDI exposure machine according to any one of the above embodiments.

[0015] The LDI exposure machine according to the embodiment of the present application can maximize the alignment speed of the LDI exposure machine when the number of positioning point partitions on the substrate is large, and can avoid the problem of camera redundancy by executing the alignment method of the LDI exposure machine according to the above embodiments.

[0016] In some embodiments, the LDI exposure machine further comprises: a PSO board card, the PSO board card being connected with the controller and each alignment camera, and the PSO board card being configured to split the image collection signal sent by the controller into a plurality of image collection sub-signals, and send each image collection sub-signal to each alignment camera; and a light source, the light source being located below the plurality of alignment cameras, and the light source being connected with the PSO board card and being configured to flash according to the image collection signal.

[0017] Additional aspects and advantages of the present application will be made apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description, taken in conjunction with the following drawings of which:

[0019] Figure 1 is a schematic diagram of an LDI exposure machine according to one embodiment of the present application;

[0020] Figure 2 is a flow chart of an alignment method of an LDI exposure machine according to one embodiment of the present application;

[0021] Figure 3 is a schematic diagram of an LDI exposure machine according to one embodiment of the present application;

[0022] Figure 4 is a flow chart of an alignment method of an LDI exposure machine according to another embodiment of the present application;

[0023] Figure 5 is a flow chart of an alignment method of an LDI exposure machine according to another embodiment of the present application.

[0024] Reference Signs:

[0025] LDI exposure machine 10;

[0026] Host computer 1; controller 2; axis driver 3; PSO board card 4; light source 5; memory module 6; alignment camera 7; motion platform 8. DETAILED DESCRIPTION

[0027] Embodiments of the present application are described in detail below with reference to the accompanying drawings. The embodiments described below are exemplary, and embodiments of the present application are described in detail below.

[0028] To solve the above problems, the first aspect embodiment of the present application provides an alignment method of an LDI exposure machine. The alignment method can maximize the alignment speed of the LDI exposure machine when the number of point partitions on the substrate is large, and avoid the problem of camera redundancy.

[0029] In the embodiments, as Figure 1As shown, the LDI exposure machine 10 includes a motion platform 8 for pulling the substrate movement and a plurality of alignment cameras 7, the motion platform is located below the plurality of alignment cameras. Among them, the alignment camera supports the motion snapshot function, the alignment camera can be a high line frequency line scan camera, which is 16380*1, combined with a 0.5 times line scan lens, to build a single imaging system, the shooting range of the plurality of alignment cameras can cover the entire substrate, to form a whole board coverage scanning, which can greatly increase the field of view of the imaging system, the coverage area can reach 114mm*7mm (width*height), the alignment camera shooting picture size is 6384*2048, specifically, there are a plurality of positioning points on the substrate prepared by the GDS (Geodetic Coordinate, ground coordinate system) design drawing about the positioning points, the plurality of positioning points are randomly distributed on the substrate, based on this, the substrate is placed on the motion platform, the motion platform pulls the substrate movement, and the plurality of alignment cameras collect a plurality of positioning point images.

[0030] Reference will now be made to Figure 2 The alignment method of the LDI exposure machine according to the embodiment of the present application is described as follows, as shown in the method, the method includes steps S1-S5. Figure 2

[0031] Step S1, control the motion platform movement and obtain the real-time movement distance of the motion platform.

[0032] Specifically, as shown in the LDI exposure machine includes an axis driver 3 and a controller 2, the axis driver 3 is used to drive the motion platform movement, based on this, the positioning point alignment instruction is issued to the controller 2 under the host computer, after the controller 2 receives the alignment instruction, the controller 2 controls the axis driver 3 to drive the motion platform to move from the starting position of the motion platform to the terminal position of the motion platform along the direction perpendicular to the alignment camera, and the motion platform will feed back the real-time movement distance of the motion platform to the controller 2 in real time during the movement. Figure 3

[0033] Step S2, obtain the shooting interval distance of the alignment camera.

[0034] Among them, the shooting interval distance can be understood as the distance interval of the adjacent two times of the alignment camera shooting images, and the shooting interval distance is determined by the shooting range of the alignment camera.

[0035] Step S3, the image acquisition signal is triggered once every time the real-time movement distance reaches the shooting interval distance, and the image acquisition signal is used to indicate that the plurality of alignment cameras synchronously collect the positioning point image information.

[0036] ​​Specifically, the shooting field of view of the alignment camera on the substrate is fixed, in order to shoot the image information of all areas on the substrate, multiple alignment cameras are fixed above the movement platform in the application, and the movement platform is controlled to move, so that the multiple alignment cameras can shoot the image of different substrate width areas in the same length range of the substrate, that is, all positioning points on the substrate are divided into multiple shooting substrate areas in the length direction of the substrate at a shooting interval distance, and when the real-time movement distance of the movement platform reaches the shooting interval distance, the movement platform loaded with the substrate moves to the unshot substrate area at this time, and an image acquisition signal is triggered once, so that the multiple alignment cameras synchronously acquire the image information in each corresponding substrate area in the shooting substrate area, until the image information in all areas on the substrate is acquired. Therefore, compared with the relative vector motion of the alignment camera and the movement platform in the prior art, the combination of multiple alignment cameras is used to cover the substrate width area in the application, and the movement platform is controlled to move along the length direction of the substrate once, so that the number of multi-partition alignment movements is reduced to once, thereby the positioning point image shooting speed can be maximally improved.

[0037] Step S4, determining the segmentation image information of each positioning point according to all positioning point image information.

[0038] Specifically, since the image shot by the alignment camera contains positioning point image and non-positioning point image, it is necessary to screen the positioning point image from all shot images, that is, the host computer receives all positioning point image information about all shot images, screens the image information of each positioning point from all positioning point image information, and then separates the image of each positioning point from all shot images through an image segmentation algorithm, thereby obtaining the segmentation image information of each positioning point.

[0039] Step S5, alignment according to the segmentation image information of each positioning point.

[0040] Specifically, the prior art cannot determine each positioning point image after obtaining all the images, and thus each positioning point image is obtained and positioned one by one. To this end, the image recognition algorithm is used to recognize and process the segmented image information of each positioning point to determine the position information of each positioning point in the segmented image, and then the position information of each positioning point in the segmented image is converted into the position information of each positioning point in the substrate to realize the rapid alignment of the LDI exposure machine. Thus, compared with the prior art in which the LDI exposure machine aligns each positioning point one by one through the mutual vector motion of the control machine and the motion platform, the segmented image information of each positioning point is obtained after obtaining all the positioning point image information at one time, and then each positioning point is positioned through the segmented image information of each positioning point, instead of obtaining each positioning point image and positioning each positioning point one by one. Meanwhile, the motion platform is controlled to move along the length direction of the substrate to reduce the number of multi-partition alignment motions to one, so that the alignment speed of the LDI exposure machine can be maximally improved. In addition, the multiple alignment cameras can synchronously capture images at the same time, thereby avoiding the problem of camera redundancy.

[0041] According to the alignment method of the LDI exposure machine, the motion platform loaded substrate is moved along the length direction of the substrate, the multiple alignment cameras are triggered to capture to obtain all the positioning point image information at one time when the motion platform moves to the shooting interval distance each time, then the segmented image information of each positioning point is obtained after screening, and then each positioning point is positioned through the segmented image information of each positioning point, without obtaining each positioning point image and positioning each positioning point one by one. Meanwhile, the motion platform is controlled to move along the length direction of the substrate to reduce the number of multi-partition alignment motions to one, so that the positioning speed can be maximally improved when the number of positioning points in the substrate is large, and the positioning speed of the LDI exposure machine is improved. In addition, the multiple alignment cameras can synchronously capture images at the same time, thereby avoiding the problem of camera redundancy.

[0042] In some embodiments, the motion platform is controlled to move, including: controlling the motion platform to move at a uniform speed.

[0043] Specifically, when the motion platform moves to the uniform speed motion trigger starting point, the uniform speed motion trigger starting point is located on a straight line along the width direction of the substrate and a parallel line on the substrate, the motion platform is controlled to move at a uniform speed along the length direction of the substrate from the uniform speed motion trigger starting point to the substrate end point, so that the multiple alignment cameras synchronously collect image information in each shooting interval distance corresponding substrate area.

[0044] In some embodiments, the shooting interval distance of the alignment camera is obtained, including: determining the shooting interval distance of the alignment camera according to the pixel size and the lens magnification of the alignment camera.

[0045] Specifically, the shooting interval distance of the alignment camera can be obtained by dividing the pixel size of the alignment camera by the lens magnification, wherein the pixel size of the alignment camera and the lens magnification are determined by the model of the alignment camera, for example, the pixel size of the alignment camera is 7 μm, and the lens magnification can be 0.5, and the shooting interval distance is 3.5 μm. Thus, in the present application, the shooting interval distance is determined by the pixel size of the alignment camera and the lens magnification, so that the plurality of alignment cameras can obtain images in the entire area of the substrate.

[0046] In some embodiments, the split image information of each positioning point is determined according to all the positioning point image information, including the following steps.

[0047] The image stitching is performed according to all the positioning point image information to obtain the stitched image information. That is, all the positioning point image information is obtained according to the images shot by the plurality of alignment cameras, and all the positioning point image information is input into the image stitching algorithm to obtain the stitched image information, that is, the images shot by the plurality of alignment cameras are stitched by the image stitching algorithm to obtain all the images after stitching.

[0048] The GDS coordinate mapping relationship of the positioning points is obtained. Since the GDS coordinate information of each positioning point exists in the GDS drawing about the positioning points, the GDS coordinate information of each positioning point in the GDS drawing is obtained to determine the correlation information between each positioning point, for example, the position relationship between each positioning point or the distance between each positioning point, for example, the GDS coordinate information of one positioning point is represented as (X1, Y1), and the GDS coordinate information of another positioning point is represented as (X2, Y2), the position relationship between each positioning point is (X1-X2, Y1-Y2), and the correlation information between each positioning point is taken as the GDS coordinate mapping relationship of the positioning points in the GDS drawing.

[0049] In addition, the conversion relationship between the substrate position unit and the image pixel unit is obtained, wherein the substrate position unit is a length unit for describing a physical size, and the image pixel unit is defined by the width and height of a pixel. The conversion relationship between the substrate position unit and the image pixel unit is the corresponding relationship between 1 length unit on the substrate and a pixel in the image, and 1 length unit can be 1 μm, and the conversion relationship is that 7 μm corresponds to 1 pixel.

[0050] According to the GDS coordinate mapping relationship and the conversion relationship, the split image information of each positioning point in the spliced image information is determined. The positioning points on the substrate are prepared according to the GDS coordinate information of each positioning point in the GDS drawing, so the GDS coordinate mapping relationship of the positioning points is the mapping relationship between the positioning points on the substrate. Based on this, the correlation information between each positioning point is determined through the GDS coordinate information of each positioning point, that is, the positional relationship between each positioning point or the distance between each positioning point, and the distance between each positioning point is converted from the length unit to the pixel size between each positioning point in the image through the conversion relationship between the substrate position unit and the image pixel unit. Therefore, all the positioning points in the spliced image can be inferred through the pixel size between each positioning point in the image and the positional relationship between each positioning point in the substrate, so as to obtain the split image information of each positioning point. In this way, in the present application, the split image of each positioning point is obtained from all the images captured by the alignment camera through the GDS coordinate mapping relationship and the conversion relationship, so that the positioning can be performed through the image of each positioning point after all the images are collected, instead of obtaining each positioning point image one by one and then positioning, so as to maximize the positioning speed and improve the alignment speed of the LDI exposure machine.

[0051] In some embodiments, the GDS coordinate mapping relationship of the positioning points is obtained, including: obtaining the GDS coordinate information of the reference positioning point and the GDS coordinate information of the non-reference positioning point; determining the GDS coordinate mapping relationship according to the GDS coordinate information of the reference positioning point and the GDS coordinate information of the non-reference positioning point; determining the split image information of each positioning point in the spliced image information according to the GDS coordinate mapping relationship and the conversion relationship, including: determining a target positioning point corresponding to the reference positioning point in the spliced image information; determining the split image information of each positioning point according to the target positioning point, the GDS coordinate mapping relationship and the conversion relationship.

[0052] The reference positioning point is a positioning point that can be obviously distinguished from other positioning points in the GDS drawing, and the reference positioning point can be located at a corner position of the drawing, for example, at the upper left corner, the lower left corner, the upper right corner or the lower right corner.

[0053] Specifically, the GDS coordinate information of the reference positioning point and the GDS coordinate information of the non-reference positioning point are acquired, the correlation information between the reference positioning point and the non-reference positioning point is determined according to the GDS coordinate information of the reference positioning point and the non-reference positioning point, the correlation information between the reference positioning point and the non-reference positioning point is taken as the GDS coordinate mapping relationship, for example, the positional relationship and the distance between the reference positioning point and the non-reference positioning point are calculated according to the GDS coordinate information of the reference positioning point and the non-reference positioning point, so as to take the positional relationship and the distance between the reference positioning point and the non-reference positioning point as the GDS coordinate mapping relationship, the target positioning point corresponding to the reference positioning point in the spliced image is determined, for example, the reference positioning point can be located at the upper left corner of the drawing, and the target positioning point is at the upper left corner in the spliced image, then the distance between the reference positioning point and each non-reference positioning point is converted from the length unit to the pixel size between the reference positioning point and each non-reference positioning point in the image according to the positional relationship and the distance between the reference positioning point and each non-reference positioning point and the conversion relationship between the substrate position unit and the image pixel unit, so that all the positioning points in the image after image splicing can be inferred through the pixel size between the reference positioning point and each non-reference positioning point in the image and the positional relationship of the reference positioning point and each non-reference positioning point in the substrate, so as to acquire the segmentation image information of each positioning point, and thus, in the present application, the segmentation image of each positioning point is obtained by screening from all the images captured by the alignment camera through the GDS coordinate mapping relationship and the conversion relationship, so that the positioning can be performed through the image of each positioning point after all the images are collected, instead of obtaining each positioning point image and performing positioning one by one, so that the positioning speed can be improved to the greatest extent, and the positioning speed of the LDI exposure machine is improved.

[0054] In some embodiments, an initial identification position of each positioning point in the corresponding segmentation image information is determined, a mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras in the plurality of alignment cameras is determined, a final identification position of each positioning point in the corresponding segmentation image information is determined according to the mapping relationship function and the initial identification position, and a substrate position identification result of each positioning point is determined according to the final identification position of each positioning point.

[0055] Specifically, in order to reflect the position relationship between the positioning points on the substrate in the position relationship between the positioning points in the images captured by all the alignment cameras, the image position information of the positioning points in the images captured by all the alignment cameras is associated by the mapping relationship function between the positioning point image information captured by each two adjacent alignment cameras in the plurality of alignment cameras. Specifically, the position relationship between the same positioning points in the positioning point image information captured by each two adjacent alignment cameras in the plurality of alignment cameras is taken as the conversion relationship between the positioning point image information captured by each two adjacent alignment cameras in the plurality of alignment cameras, and then the conversion relationship between the positioning point image information captured by each two adjacent alignment cameras in the plurality of alignment cameras is taken as the mapping relationship function between the positioning point image information captured by each two adjacent alignment cameras in the plurality of alignment cameras. Then, the final recognition position of each positioning point in the corresponding segmented image information is calculated through the initial recognition position of each positioning point in the corresponding segmented image information and the mapping relationship function, wherein the final recognition position of all the positioning points in the corresponding segmented image information can reflect the position relationship between all the positioning points on the substrate, and the substrate coordinate information of the converted positioning points is taken as the substrate position recognition result of each positioning point by converting each positioning point in the corresponding segmented image information to the substrate coordinate system, so as to realize the alignment of the LDI exposure machine.

[0056] In some embodiments, determining the mapping relationship function between the positioning point image information captured by each two adjacent alignment cameras in the plurality of alignment cameras comprises: determining the image coordinate information of each positioning point in the positioning point image information captured by each alignment camera; and determining the mapping relationship function between the positioning point image information captured by each two adjacent alignment cameras according to the image coordinate information of each positioning point.

[0057] Specifically, for each two adjacent alignment cameras, image coordinate information of each positioning point in the positioning point image information collected by each alignment camera is determined, that is, the positioning point image information collected by each of the two adjacent alignment cameras is acquired, and then image coordinate information of each positioning point in the positioning point image information is recognized through an image recognition algorithm to determine the image coordinate information of the same positioning point in the positioning point image collected by each of the two adjacent alignment cameras, and then a conversion relationship between the image coordinate information of the same positioning point collected by the two adjacent alignment cameras is calculated. The conversion relationship can be the image coordinate difference of the same positioning point collected by the adjacent alignment cameras, so as to calculate the mapping relationship function between the positioning point image information collected by each two adjacent alignment cameras through the conversion relationship between the image coordinate information of the same positioning point collected by the adjacent alignment cameras. For example, the conversion relationship between the image coordinate information of a certain same positioning point is taken as the mapping relationship function between the positioning point image information collected by the adjacent alignment cameras. The conversion relationship between the image coordinate information of a certain same positioning point can be the most accurate conversion relationship among the conversion relationships between the image coordinate information of all same positioning points. Alternatively, a final conversion relationship can also be calculated through the conversion relationships between the image coordinate information of all same positioning points, and the final conversion relationship is taken as the mapping relationship function between the positioning point image information collected by the adjacent alignment cameras.

[0058] For example, the first alignment camera and the second alignment camera are two adjacent alignment cameras, a column of positioning points with equal intervals in width on the substrate is selected, the interval can be 110 mm, then the first alignment camera and the second alignment camera are used to capture the selected column of positioning points to obtain positioning point images of the positioning points respectively, then an image recognition algorithm is used to recognize image coordinate information of each same positioning point in the positioning point images captured by the first alignment camera and the second alignment camera, a conversion relationship between the image coordinate information of the same positioning point captured by the first alignment camera and the second alignment camera is calculated, the conversion relationship can be a difference value of the image coordinates of the same positioning point captured by the first alignment camera and the second alignment camera, for example, the coordinates of a positioning point captured by the first alignment camera are A (X3, Y3), the coordinates of the same positioning point captured by the second alignment camera are B (X4, Y4), then the conversion relationship can be (X3-X4, Y3-Y4), so as to determine a mapping relationship function between the positioning point image information collected by the first alignment camera and the second alignment camera by the conversion relationship between the image coordinate information of the same positioning point, for example, the conversion relationship between the image coordinate information of the same positioning point is taken as the mapping relationship function between the positioning point image information collected by the first alignment camera and the second alignment camera. The conversion relationship between the image coordinate information of the same positioning point can be the most accurate conversion relationship among the conversion relationships between the image coordinate information of all the same positioning points.

[0059] In addition, it should be noted that if the second alignment camera further has a third adjacent alignment camera, the third alignment camera and the second alignment camera are used to obtain the mapping relationship function between the positioning point image information collected by the second alignment camera and the third alignment camera in the above manner.

[0060] Therefore, the mapping relationship function between the positioning point image information collected by the two adjacent alignment cameras is used to associate the positioning point image information collected by all the cameras. In some embodiments, the substrate position recognition result of each positioning point is determined according to the final recognition position of each positioning point, including: determining a mapping relationship between the image coordinate information of the positioning point and the substrate coordinate information; and performing position conversion on the final recognition position of each positioning point according to the mapping relationship to determine the substrate position recognition result of each positioning point.

[0061] The substrate coordinate information is coordinate information of the positioning point in the substrate coordinate system.

[0062] For example, one or more positioning points on the substrate that are clearly distinguishable from other positioning points are selected. These positioning points can be located at the upper left, lower left, upper right, or lower right corner of the substrate. The user manually inputs the coordinate information of the positioning point in the substrate coordinate system, or uses the GDS coordinate information of the positioning point as the substrate coordinate information of the positioning point. The controller obtains the substrate coordinate information of the positioning point, then uses a camera to capture the image coordinate information of the positioning point, and then calculates the correlation information between the image coordinate information of the positioning point and the substrate coordinate information. This correlation information is used as a mapping relationship between the image coordinate information of the positioning point and the substrate coordinate information. Then, based on the mapping relationship, the final identification position of each positioning point is converted to determine the substrate position identification result of each positioning point. For example, the final identification position of each positioning point is subtracted from the mapping relationship to obtain the substrate position identification result of each positioning point.

[0063] Finally, the controller can also calculate the rotation, translation, and expansion / contraction information of each positioning point based on the substrate position identification result of each positioning point and the GDS coordinate information of each positioning point.

[0064] In some embodiments, reference Figure 3 As shown, the LDI exposure machine 10 also includes: a PSO (position synchronized output) board 4 and a light source 5.

[0065] The PSO board 4 is connected to the controller 2 and each alignment camera 7, and is used to split the image acquisition signal sent by the controller 2 into multiple image acquisition sub-signals, and send each image acquisition sub-signal to each alignment camera 7; the light source 5 is located below the multiple alignment cameras 7, and is connected to the PSO board 4, and is used to perform strobe based on the image acquisition signal.

[0066] And, such as Figure 3 As shown, the axis driver 3 is used to drive the motion platform 8 to move, and the memory module 6 is used to store the image information acquired by the alignment camera 7.

[0067] Specifically, the PSO board is used to receive the image acquisition signal sent by the controller, and then divide the image acquisition signal sent by the controller into multiple image acquisition sub-signals accordingly. The multiple image acquisition sub-signals are then sent to each alignment camera, and each alignment camera performs image acquisition after receiving the image acquisition sub-signals.

[0068] The following is for reference. Figure 4 The alignment method of an LDI exposure machine according to an embodiment of the present invention is described in detail below.

[0069] Step S6, the host computer acquires the GDS coordinate information of all positioning points.

[0070] Step S7, the controller receives the alignment identification command about the positioning point, and controls the motion platform to start accelerating motion from the starting point of the motion platform.

[0071] Step S8, when the motion platform moves to the uniform motion trigger starting point, the uniform motion starts.

[0072] Step S9, the real-time moving distance of the motion platform triggers an image acquisition signal every time the shooting interval distance is reached, and the image acquisition signal is sent to the controller.

[0073] Step S10, the controller sends the image acquisition signal to the PSO board card, and the PSO board card receives the image acquisition signal, performs voltage boosting processing on the image acquisition signal, and then transmits the image acquisition signal to the light source controller.

[0074] Step S11, after the light source controller receives the image acquisition signal, the image acquisition signal is synchronized to multiple alignment cameras and light sources, and steps S12 and S14 are executed.

[0075] Step S12, the alignment camera snaps all pictures in the process of one-way uniform motion of the motion platform, and stores them in the image queue of the corresponding alignment camera, and steps S13 and S15 are executed.

[0076] Step S13, the motion platform moves to the limit switch and stops and sends a stop signal to the controller, and the controller sends an image acquisition stop signal to the PSO board card to control multiple alignment cameras to stop acquiring images.

[0077] Step S14, the light source is controlled to flash according to the image acquisition signal.

[0078] Step S15, according to the GDS coordinate mapping relationship, the stitching image containing the positioning point is screened out and input into the image recognition algorithm, and the remaining images except the stitching image containing the positioning point in all pictures are deleted.

[0079] Step S16, the stitching image containing the positioning point is identified by the image recognition algorithm, and the rotation, translation and expansion information between the GDS coordinate information of the positioning point and the substrate coordinate information of the positioning point are calculated.

[0080] Step S17, the substrate position identification result of each positioning point is counted, and the alignment of the LDI exposure machine is completed.

[0081] Reference will now be made to Figure 5 The alignment method of the LDI exposure machine according to the embodiment of the present application is described as follows.

[0082] Step S18: Obtain images of all areas on the substrate captured by the camera.

[0083] Step S19: Image difference detection is used to detect two right-angled positions of the substrate in the image.

[0084] Step S20: Calculate the segmented image region for each location point in the image based on the rigid transformation.

[0085] Step S21: Segment the image of each localization point.

[0086] Step S22: Extract subpixel positions from the segmented image of each location point to obtain the initial recognition position of each location point in the corresponding segmented image information, as well as the lens distortion correction for the camera.

[0087] Step S23: Determine the final identification position of each positioning point in the corresponding segmented image information based on the initial identification position and mapping function of each positioning point in the corresponding segmented image information, and perform coordinate transformation on the final identification position to obtain the substrate position identification result of each positioning point.

[0088] Step S24: Obtain the substrate position recognition result for each positioning point, and determine the overlapping areas in the images acquired by adjacent aligned cameras to avoid image edge distortion.

[0089] Step S25: Complete image processing for all areas on the substrate.

[0090] A second aspect of the present invention provides an LDI exposure machine, such as... Figure 3 As shown, the LDI exposure machine 10 includes: a plurality of alignment cameras 7, a motion platform 8, and a controller 2. Each alignment camera 7 is used to acquire positioning point image information in response to an image acquisition signal. The motion platform 8 is located below the plurality of alignment cameras 7 and is used to pull the substrate to move. The controller 2 is connected to the motion platform 8 and the plurality of alignment cameras 7 and is used to execute the alignment method of the LDI exposure machine in any of the above embodiments.

[0091] According to the LDI exposure machine 10 of the present invention, by executing the alignment method of the LDI exposure machine of the above embodiment, the alignment speed of the LDI exposure machine can be maximized when there are many positioning point partitions on the substrate, thus avoiding the problem of camera redundancy.

[0092] In this embodiment, five alignment cameras are used, and their shooting range can cover an area of ​​114mm*7mm (width*height). There is an 8mm redundancy field of view between every two alignment cameras, so that the shooting range of all alignment cameras can cover a substrate with a width of 538mm.

[0093] In the description of the specification, reference to "one embodiment", "some embodiments", "an exemplary embodiment", "an example", "a specific example", or "some examples" means that a particular feature, structure, material, or characteristic being described is included in at least one embodiment or example of the application. The appearances of the phrases "in one embodiment", "in some embodiments", "in an exemplary embodiment", "an example", "a specific example", or "some examples" in various places in the specification are not necessarily referring to the same embodiment or example.

[0094] While embodiments of the application have been shown and described, it is to be understood that the application is not limited to these embodiments. Rather, it is the intention that modifications, changes, substitutions, and variations be made to the embodiments disclosed herein without departing from the spirit and scope of the application, which is defined solely by the claims and their equivalents.

Claims

1. A method for aligning an LDI exposure machine, characterized in that, The LDI exposure machine includes a motion platform for pulling the substrate and multiple alignment cameras, the motion platform being located below the multiple alignment cameras, and the alignment method including: Control the movement of the motion platform and obtain the real-time movement distance of the motion platform; Obtain the shooting interval distance of the aligned camera; An image acquisition signal is triggered every time the real-time moving distance reaches the shooting interval distance. The image acquisition signal is used to instruct multiple aligned cameras to simultaneously acquire positioning point image information. Determine the segmented image information for each location point based on the image information of all location points; Alignment is performed based on the segmented image information of each location point.

2. The alignment method for an LDI exposure machine according to claim 1, characterized in that, Controlling the movement of the motion platform includes: Control the motion platform to move at a constant speed.

3. The alignment method for an LDI exposure machine according to claim 1, characterized in that, Obtaining the shooting interval distance of the aligned camera includes: The shooting interval distance of the aligned camera is determined based on the pixel size and lens magnification of the aligned camera.

4. The alignment method for an LDI exposure machine according to claim 1, characterized in that, Based on the image information of all localization points, the segmented image information of each localization point is determined, including: Image stitching is performed based on the image information of all positioning points to obtain stitched image information; Obtain the GDS coordinate mapping relationship of the positioning point, and obtain the conversion relationship between the substrate position unit and the image pixel unit; The segmented image information of each positioning point in the stitched image information is determined based on the GDS coordinate mapping relationship and the conversion relationship.

5. The alignment method for an LDI exposure machine according to claim 4, characterized in that, Obtain the GDS coordinate mapping relationship of the positioning point, including: Obtain the GDS coordinate information of the reference positioning point and the GDS coordinate information of the non-reference positioning point; The GDS coordinate mapping relationship is determined based on the GDS coordinate information of the reference positioning point and the GDS coordinate information of the non-reference positioning point. Based on the GDS coordinate mapping relationship and the conversion relationship, the segmented image information of each positioning point in the stitched image information is determined, including: Determine the target positioning point in the stitched image information that corresponds to the reference positioning point; The segmented image information of each positioning point is determined based on the target positioning point, the GDS coordinate mapping relationship, and the conversion relationship.

6. The alignment method for an LDI exposure machine according to any one of claims 1-5, characterized in that, The alignment method further includes: Determine the initial recognition position of each localization point in the corresponding segmented image information; Determine the mapping relationship function between the positioning point image information acquired by every two adjacent alignment cameras in a plurality of alignment cameras; The final identification position of each localization point in the corresponding segmented image information is determined based on the mapping relationship function and the initial identification position. The substrate position identification result of each positioning point is determined based on the final identification position of each positioning point.

7. The alignment method for an LDI exposure machine according to claim 6, characterized in that, Determine the mapping relationship function between the positioning point image information acquired by every two adjacent alignment cameras in a plurality of alignment cameras, including: Determine the image coordinates of each positioning point in the positioning point image information acquired by each aligned camera; The mapping function between the image information of each positioning point acquired by the two adjacent aligned cameras is determined based on the image coordinate information of each positioning point.

8. The alignment method for an LDI exposure machine according to claim 7, characterized in that, The substrate position identification result for each positioning point is determined based on the final identified position of each positioning point, including: Determine the mapping relationship between the image coordinate information and the substrate coordinate information regarding the positioning points; Based on the mapping relationship, the final identified position of each positioning point is converted to determine the substrate position identification result of each positioning point.

9. An LDI exposure machine, characterized in that, include: Multiple alignment cameras, each used to acquire positioning point image information in response to an image acquisition signal; A motion platform, located below a plurality of alignment cameras, is used to move a substrate. A controller, connected to the motion platform and the plurality of alignment cameras, is used to perform the alignment method of the LDI exposure machine according to any one of claims 1-8.

10. The LDI exposure machine according to claim 9, characterized in that, Also includes: The PSO board, which is connected to the controller and each alignment camera, is used to split the image acquisition signal sent by the controller into multiple image acquisition sub-signals and send each image acquisition sub-signal to each alignment camera; A light source, located below multiple aligned cameras, is connected to the PSO board and is used to perform strobe based on image acquisition signals.

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