Silicon wafer flower basket with fixed structure and fixing method thereof

Abstract

The present invention discloses a silicon wafer flower basket with a fixing structure and a fixing method thereof, which relates to the technical field of silicon wafer flower baskets, and includes a first end plate and a second end plate, a plurality of evenly distributed flower basket tooth rods are fixedly arranged between the first end plate and the second end plate, a plurality of equally spaced silicon wafer grooves are opened on the flower basket tooth rod, a placement groove is opened in the silicon wafer groove, a protective cover is fixedly arranged on the second end plate, and also includes a guide groove, a fixing mechanism for fixing the silicon wafer placed in the silicon wafer groove, a transmission mechanism arranged on the second end plate, and a driving mechanism arranged on the protective cover. The device is provided with a fixing mechanism, so that after the staff puts the silicon wafer into the silicon wafer groove on the flower basket tooth rod, the device can simultaneously press and fix multiple silicon wafers synchronously, thereby avoiding the problem that the silicon wafer placed in the device slides off the flower basket tooth rod during transportation, causing damage to the silicon wafer.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower baskets, and in particular to a silicon wafer flower basket with a fixing structure and a fixing method thereof. Background Art

[0002] In the semiconductor manufacturing process, the transportation and storage of silicon wafers are very important links. As a container for carrying and transporting silicon wafers, the rationality and stability of the structure of the silicon wafer basket has a vital impact on the quality and production efficiency of the silicon wafers.

[0003] There are some problems in the use of existing silicon wafer flower baskets. For example, during transportation or storage, silicon wafers are easily affected by external forces such as vibration and collision, which causes damage to the surface of the silicon wafers and affects the quality and performance of the silicon wafers. In addition, the silicon wafers are not fixed firmly in the flower basket, and are prone to displacement or shaking during transportation, and even slip off the silicon wafer flower tray, causing damage to the silicon wafers. Therefore, improvement is urgently needed. Summary of the invention

[0004] In view of the deficiencies in the prior art, the object of the present invention is to provide a silicon wafer basket with a fixing structure and a fixing method thereof, aiming to solve the above-mentioned technical problems.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A silicon wafer flower basket with a fixed structure comprises a first end plate and a second end plate, a plurality of evenly distributed flower basket tooth rods are fixedly arranged between the first end plate and the second end plate, a plurality of equally spaced silicon wafer grooves are provided on the flower basket tooth rods, a placement groove is provided in the silicon wafer grooves, a transverse groove connected to the placement groove is provided in the flower basket tooth rods, an L-shaped groove connected to the transverse groove is provided on the flower basket tooth rods, a control device is fixedly arranged on the first end plate, a protective cover is fixedly arranged on the second end plate, and the silicon wafer flower basket with a fixed structure also comprises:

[0007] A guide groove is provided on a surface of the turnbuckle gear rod on one side close to the second end plate;

[0008] A fixing mechanism has multiple groups, and the multiple groups of fixing mechanisms are equidistantly arranged on the flower basket gear rod, and the fixing mechanism is used to fix the silicon wafer placed in the silicon wafer groove;

[0009] The transmission mechanism has multiple groups, and the multiple groups of transmission mechanisms are evenly arranged on the second end plate;

[0010] The driving mechanism is arranged on the protective cover and is electrically connected to the control device.

[0011] Preferably, the fixing mechanism comprises:

[0012] A fixing block is slidably disposed in the placement groove, and the fixing block is used to fix the silicon wafer placed in the silicon wafer groove;

[0013] A reset portion, disposed in the transverse groove, and used to push the fixed block;

[0014] The sliding part is arranged in the L-shaped groove, and is used to apply a force to the resetting part.

[0015] Preferably, the reset unit includes:

[0016] A reset plate, slidably disposed in the transverse groove;

[0017] A trapezoidal block is fixedly arranged on the surface of the reset plate close to the L-shaped groove, an end of the trapezoidal block away from the reset plate is provided with an inclined surface, and a plurality of first balls are rollingly arranged on the trapezoidal block;

[0018] A push rod is fixedly arranged on the reset plate, and one end of the push rod away from the reset plate is fixedly connected to the fixed block;

[0019] The return spring is arranged in the transverse groove, and the return spring is always in a compressed state.

[0020] Preferably, the sliding portion comprises:

[0021] A sliding block is slidably disposed in the L-shaped groove, and a plurality of second balls are rollingly disposed on the sliding block;

[0022] The matching block is fixedly arranged on the sliding block, and two symmetrically distributed wheel plates are fixedly arranged on the matching block. An auxiliary wheel is rotatably arranged between the two wheel plates, and the auxiliary wheel is always in contact with the inclined surface on the trapezoidal block;

[0023] The middle block is fixedly arranged on the sliding block, a connecting block is fixedly arranged at one end of the middle block away from the sliding block, a slope is arranged on one side of the connecting block close to the second end plate, and a connecting plate is fixedly arranged at one end of the middle block away from the matching block.

[0024] Preferably, the transmission mechanism comprises:

[0025] A guide block is slidably disposed in the guide groove, and a built-in groove is disposed in the guide block;

[0026] A U-shaped plate, fixedly disposed on a surface of the guide block away from the second end plate;

[0027] There are multiple driving wheels, and the multiple driving wheels are equidistantly arranged on the U-shaped plate, the driving wheels are rotatably connected to the U-shaped plate, and the driving wheels are used to cooperate with the inclined surface on the connecting block to push the connecting block to slide into the L-shaped groove;

[0028] A first transmission part is arranged on the second end plate, and the first transmission part is used to push the guide block to slide in the guide groove;

[0029] The second transmission part is arranged on the second end plate, and is used for providing power to the first transmission part.

[0030] Preferably, the first transmission part comprises:

[0031] A threaded sleeve, fixedly disposed on the second end plate;

[0032] A transmission screw rod is arranged on the threaded sleeve and is threadedly connected with the threaded sleeve;

[0033] The built-in block is fixedly arranged on the transmission screw rod, and the built-in block is rotatably connected with the built-in groove;

[0034] A spacer plate is fixedly arranged at one end of the transmission screw rod close to the protective cover;

[0035] The transmission shaft is fixedly arranged on the surface of the intermediate plate close to the protective cover, and the axis of the transmission shaft coincides with the axis of the intermediate plate, and a plurality of evenly distributed fixing keys are fixedly arranged on the transmission shaft;

[0036] The baffle is fixedly arranged at one end of the transmission shaft close to the protective cover.

[0037] Preferably, the second transmission part comprises:

[0038] A fixed plate, fixedly arranged on the second end plate;

[0039] A hollow cylinder is rotatably mounted on a fixed plate;

[0040] The transmission gear is fixedly arranged at one end of the hollow cylinder away from the protective cover. A plurality of evenly distributed key slots are provided on the transmission gear, and the key slots are slidably connected with the fixed keys.

[0041] Preferably, the driving mechanism comprises:

[0042] A driving motor is arranged on the protective cover and is electrically connected to the control device;

[0043] A drive shaft is rotatably disposed on the protective cover, and one end of the drive shaft close to the drive motor is fixedly connected to the output end of the drive motor;

[0044] The driving part is arranged on the driving shaft.

[0045] Preferably, the driving part comprises:

[0046] A driving disk is fixedly arranged at one end of the driving shaft away from the driving motor;

[0047] There are multiple connecting plates, and the multiple connecting plates are fixedly arranged on the side of the driving disk;

[0048] The incomplete gear ring is fixedly connected to one end of the connecting plate away from the driving disk, and the incomplete gear ring is meshed with the transmission gear.

[0049] A method for fixing a silicon wafer flower basket with a fixing structure, using the above-mentioned silicon wafer flower basket, comprises the following steps:

[0050] S1. After the staff puts the silicon wafer into the silicon wafer slot on the basket gear rod, the driving motor is started through the control device to rotate the driving shaft fixedly connected to the output end of the driving motor;

[0051] S2, the driving shaft drives the fixedly connected driving plate to rotate, and the connecting plate on the driving plate rotates around its axis, so that the incomplete gear ring fixedly connected to the connecting plate rotates, and the incomplete gear ring meshes with the transmission gear, so that each transmission gear rotates, and then the keyway on the transmission gear cooperates with the fixed key on the transmission shaft to make the transmission shaft rotate;

[0052] S3, the transmission shaft drives the fixedly connected intermediate plate to rotate, so that the transmission screw rotates, and the transmission screw moves away from the protective cover through the threaded transmission cooperation with the threaded sleeve, thereby pushing the guide block, the U-shaped plate, and the driving wheel to move in this direction;

[0053] S4. The pushing wheel applies force to the connecting block, causing the connecting block, the middle block, and the sliding block to slide in sequence, allowing the matching block to move toward the trapezoidal block. The auxiliary wheel applies force to the trapezoidal block to make it slide in the transverse groove, driving the reset plate to push the push rod, causing the fixed block to slide out of the placement groove to fit the surface of the adjacent side silicon wafer and apply pressure, thereby fixing the silicon wafer in the silicon wafer groove.

[0054] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0055] The device is provided with a fixing mechanism so that after the staff puts the silicon wafers into the silicon wafer grooves on the flower basket gear rod, the device can simultaneously press and fix multiple silicon wafers synchronously, thereby avoiding the problem of the silicon wafers placed in the device slipping off the flower basket gear rod during transportation and causing damage to the silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0057] Figure 1 A schematic diagram of the three-dimensional structure of a silicon wafer flower basket with a fixed structure is shown.

[0058] Figure 2 A front view of a silicon wafer basket with a fixing structure is shown.

[0059] Figure 3 A right side view of a silicon wafer flower basket with a fixing structure is shown.

[0060] Figure 4Shows Figure 3 Sectional view of AA.

[0061] Figure 5 A top view of a silicon wafer flower basket with a fixing structure is shown.

[0062] Figure 6 A three-dimensional diagram of a partial structure of a silicon wafer basket with a fixed structure and a protective cover removed is shown.

[0063] Figure 7 Shows Figure 6 Exploded view of part of the structure.

[0064] Figure 8 A partial structural schematic diagram of a silicon wafer flower basket with a fixed structure is shown.

[0065] Fig. 9 Shows Figure 8 Cross-sectional view of BB.

[0066] Fig.10 Shows Fig. 9 A schematic diagram of the enlarged local structure at point A in the middle.

[0067] Fig.11 Shows Fig.10 A magnified schematic diagram of the local structure at point B in the middle.

[0068] Fig.12 Shows Fig.10 Enlarged schematic diagram of the local structure at point C in the middle.

[0069] Fig.13 A flow chart of a method for fixing a silicon wafer flower basket with a fixing structure is shown.

[0070] Legend:

[0071] 1. First end plate; 2. Second end plate; 3. Turnbuckle; 4. Wafer slot; 5. Placement slot; 6. Horizontal slot; 7. L-shaped slot; 8. Control device; 9. Protective cover; 10. Guide slot; 11. Fixed block; 12. Reset plate; 13. Trapezoidal block; 14. First ball; 15. Push rod; 16. Reset spring; 17. Sliding block; 18. Second ball; 19. Matching block; 20. Wheel plate; 21. Auxiliary wheel; 22. Intermediate block; 23. Connecting block; 24. Connecting plate; 25. Guide block; 26. Built-in groove; 27. U-shaped plate; 28. Push wheel; 29. ​​Threaded sleeve; 30. Transmission screw; 31. Built-in block; 32. Intermediate plate; 33. Transmission shaft; 34. Fixed key; 35. Baffle; 36. Fixed plate; 37. Hollow cylinder; 38. Transmission gear; 39. Keyway; 40. Driving motor; 41. Driving shaft; 42. Driving disk; 43. Connecting plate; 44. Incomplete gear ring. DETAILED DESCRIPTION

[0072] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0073] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0074] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0075] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0076] Reference Figures 1 to 12 , an embodiment of a silicon wafer flower basket with a fixing structure and a fixing method thereof of the present invention is further described.

[0077] A silicon wafer flower basket with a fixed structure comprises a first end plate 1 and a second end plate 2, a plurality of evenly distributed flower basket tooth rods 3 are fixedly arranged between the first end plate 1 and the second end plate 2, a plurality of equally spaced silicon wafer grooves 4 are provided on the flower basket tooth rod 3, a placement groove 5 is provided in the silicon wafer groove 4, a transverse groove 6 connected to the placement groove 5 is provided in the flower basket tooth rod 3, an L-shaped groove 7 connected to the transverse groove 6 is provided on the flower basket tooth rod 3, a control device 8 is fixedly arranged on the first end plate 1, a protective cover 9 is fixedly arranged on the second end plate 2, and the silicon wafer flower basket with a fixed structure also includes:

[0078] The guide groove 10 is formed on a surface of the turnbuckle rod 3 near the second end plate 2;

[0079] Reference Figures 1 to 12 , a fixing mechanism, having a plurality of groups, and the plurality of groups of fixing mechanisms are equidistantly arranged on the flower basket gear rod 3, and the fixing mechanism is used to fix the silicon wafer placed in the silicon wafer slot 4;

[0080] The fixing mechanism includes:

[0081] The fixing block 11 is slidably arranged in the placement groove 5, and the fixing block 11 is used to fix the silicon wafer placed in the silicon wafer groove 4; it should be noted that the material of the fixing block 11 is soft and has a large friction coefficient, such as rubber. The softness of the material to a certain extent avoids the fixing block 11 from crushing the silicon wafer, thereby ensuring the safety of the silicon wafer. The large friction coefficient is conducive to the fixing block 11 to fix the silicon wafer, thereby preventing the silicon wafer from slipping out of the silicon wafer groove 4 during transportation.

[0082] The reset part is arranged in the transverse groove 6 and is used to push the fixing block 11. The reset part includes:

[0083] A reset plate 12 is slidably disposed in the transverse groove 6;

[0084] The trapezoidal block 13 is fixedly arranged on the surface of the reset plate 12 close to the L-shaped groove 7, and an inclined surface is arranged at one end of the trapezoidal block 13 away from the reset plate 12, and a plurality of first balls 14 are rollingly arranged on the trapezoidal block 13;

[0085] It should be noted that, by providing the first ball 14, when the trapezoidal block 13 slides in the L-shaped groove 7, it avoids direct contact between the trapezoidal block 13 and the surface of the L-shaped groove 7, thereby converting the sliding friction force encountered by the trapezoidal block 13 when sliding into rolling friction force, thereby greatly reducing the resistance encountered by the trapezoidal block 13 when sliding, thereby improving the sliding smoothness of the trapezoidal block 13 to a certain extent.

[0086] The push rod 15 is fixedly disposed on the reset plate 12, and one end of the push rod 15 away from the reset plate 12 is fixedly connected to the fixed block 11;

[0087] The return spring 16 is disposed in the transverse groove 6 , and the return spring 16 is always in a compressed state.

[0088] It should be noted that, by providing a reset spring 16, after the trapezoidal block 13 loses its force, the compressed reset spring 16 releases its elastic potential energy, so that the reset plate 12 slides in the direction of the L-shaped groove 7, thereby driving the fixed block 11 fixedly connected to the reset plate 12 to move into the placement groove 5, until the fixed block 11 completely slides into the placement groove 5 to complete the reset, thereby releasing the fixation of the silicon wafer.

[0089] The sliding part is arranged in the L-shaped groove 7, and is used to apply a force to the reset part. The sliding part includes:

[0090] A sliding block 17 is slidably disposed in the L-shaped groove 7, and a plurality of second balls 18 are rollingly disposed on the sliding block 17;

[0091] It should be noted that, by providing the second ball 18, when the sliding block 17 slides in the L-shaped groove 7, it avoids direct contact between the sliding block 17 and the surface of the L-shaped groove 7, thereby converting the sliding friction force encountered by the sliding block 17 when sliding into rolling friction force, thereby greatly reducing the resistance encountered by the sliding block 17 when sliding, thereby improving the smoothness of the sliding of the sliding block 17 to a certain extent.

[0092] The matching block 19 is fixedly arranged on the sliding block 17. Two symmetrically distributed wheel plates 20 are fixedly arranged on the matching block 19. An auxiliary wheel 21 is rotatably arranged between the two wheel plates 20. The auxiliary wheel 21 is always in contact with the inclined surface on the trapezoidal block 13.

[0093] The middle block 22 is fixedly arranged on the sliding block 17, and a connecting block 23 is fixedly arranged on the end of the middle block 22 away from the sliding block 17, and a slope is arranged on the side of the connecting block 23 close to the second end plate 2, and a connecting plate 24 is fixedly arranged on the end of the middle block 22 away from the matching block 19. It should be noted that by providing the connecting plate 24, the pushing wheel 28 is prevented from turning over the contacting connecting block 23 when rolling on the slope on the connecting block 23.

[0094] The device is provided with a fixing mechanism, so that after the staff puts the silicon wafers into the silicon wafer slots 4 on the flower basket gear rod 3, the device can simultaneously press and fix multiple silicon wafers synchronously, thereby avoiding the problem of the silicon wafers placed in the device slipping off the flower basket gear rod 3 during transportation and causing damage to the silicon wafers.

[0095] Reference Figures 1 to 12 , the transmission mechanism has multiple groups, and the multiple groups of transmission mechanisms are evenly arranged on the second end plate 2;

[0096] The transmission mechanism includes:

[0097] A guide block 25 is slidably disposed in the guide groove 10, and a built-in groove 26 is disposed in the guide block 25;

[0098] A U-shaped plate 27, fixedly disposed on a surface of the guide block 25 away from the second end plate 2;

[0099] There are multiple push wheels 28, and the multiple push wheels 28 are equidistantly arranged on the U-shaped plate 27, the push wheels 28 are rotatably connected to the U-shaped plate 27, and the push wheels 28 are used to cooperate with the inclined surface on the connecting block 23 to push the connecting block 23 to slide into the L-shaped groove 7;

[0100] The first transmission part is arranged on the second end plate 2, and is used to push the guide block 25 to slide in the guide groove 10. The first transmission part includes:

[0101] The threaded sleeve 29 is fixedly disposed on the second end plate 2;

[0102] The transmission screw 30 is disposed on the threaded sleeve 29 and is threadedly connected to the threaded sleeve 29;

[0103] The built-in block 31 is fixedly disposed on the driving screw 30, and the built-in block 31 is rotatably connected to the built-in groove 26;

[0104] The intermediate plate 32 is fixedly arranged at one end of the transmission screw 30 close to the protective cover 9;

[0105] The transmission shaft 33 is fixedly arranged on the surface of the intermediate plate 32 close to the protective cover 9, and the axis of the transmission shaft 33 coincides with the axis of the intermediate plate 32. A plurality of evenly distributed fixing keys 34 are fixedly arranged on the transmission shaft 33;

[0106] The baffle 35 is fixedly disposed on one end of the transmission shaft 33 close to the protective cover 9 .

[0107] The second transmission part is arranged on the second end plate 2, and is used to provide power for the first transmission part. The second transmission part includes:

[0108] A fixing plate 36, fixedly disposed on the second end plate 2;

[0109] The hollow cylinder 37 is rotatably mounted on the fixed plate 36;

[0110] The transmission gear 38 is fixedly arranged at one end of the hollow cylinder 37 away from the protective cover 9 . A plurality of evenly distributed key slots 39 are formed on the transmission gear 38 . The key slots 39 are slidably connected to the fixed key 34 .

[0111] The device is provided with a transmission mechanism, and the transmission mechanism and the fixing mechanism cooperate with each other, so that the device can fix the silicon wafer in the device at the same time.

[0112] Reference Figures 1 to 12, a driving mechanism is arranged on the protective cover 9 and is electrically connected to the control device 8;

[0113] The driving mechanism includes:

[0114] The driving motor 40 is arranged on the protective cover 9 and is electrically connected to the control device 8;

[0115] The driving shaft 41 is rotatably disposed on the protective cover 9, and one end of the driving shaft 41 close to the driving motor 40 is fixedly connected to the output end of the driving motor 40;

[0116] The driving part is arranged on the driving shaft 41, and the driving part includes:

[0117] The driving plate 42 is fixedly disposed on one end of the driving shaft 41 away from the driving motor 40;

[0118] There are multiple connecting plates 43, and the multiple connecting plates 43 are fixedly arranged on the side of the driving plate 42;

[0119] The incomplete toothed ring 44 is fixedly connected to one end of the connecting plate 43 away from the driving plate 42 , and the incomplete toothed ring 44 is meshed with the transmission gear 38 .

[0120] Reference Figures 1 to 12 The control device 8 controls the drive motor 40 to start, so that the drive shaft 41 fixedly connected to the output end of the drive motor 40 rotates, driving the driving plate 42 fixedly connected to the drive shaft 41 to rotate, so that the connecting plate 43 arranged on the driving plate 42 rotates around the axis of the driving plate 42, so that the incomplete toothed ring 44 fixedly connected to the connecting plate 43 rotates, and through the meshing between the incomplete toothed ring 44 and the transmission gear 38, each transmission gear 38 is rotated, and through the cooperation between the keyway 39 on the transmission gear 38 and the fixed key 34 on the transmission shaft 33, the transmission shaft 33 is rotated, thereby driving the fixed key 34 on the transmission shaft 33. The connected intermediate plate 32 rotates, thereby causing the transmission screw 30 fixedly connected to the intermediate plate 32 to rotate. Through the threaded transmission cooperation between the transmission screw 30 and the threaded sleeve 29, the transmission screw 30 also moves in the direction away from the protective cover 9 while rotating, so that the built-in block 31 arranged on the transmission screw 30 pushes the guide block 25 to move in the direction away from the protective cover 9, thereby causing the U-shaped plate 27 fixedly connected to the guide block 25 to move in the direction away from the protective cover 9, and then causing the pushing wheel 28 arranged on the U-shaped plate 27 to move in the direction away from the protective cover 9, and continuously applying a force to the connecting block 23 during the movement of the pushing wheel 28.

[0121] The device is provided with a driving mechanism, so that the device can provide power to the transmission mechanism, so that the transmission mechanism can transmit power to the fixing mechanism, thereby facilitating the subsequent fixing of the silicon wafer.

[0122] Reference Fig.13 A method for fixing a silicon wafer flower basket with a fixing structure, using the above silicon wafer flower basket, comprises the following steps:

[0123] S1, after the staff puts the silicon wafer into the silicon wafer slot 4 on the basket gear rod 3, the driving motor 40 is started through the control device 8, so that the driving shaft 41 fixedly connected to the output end of the driving motor 40 rotates;

[0124] S2, the driving shaft 41 drives the fixed driving plate 42 to rotate, and the connecting plate 43 on the driving plate 42 rotates around its axis, so that the incomplete gear ring 44 fixedly connected to the connecting plate 43 rotates, and the incomplete gear ring 44 meshes with the transmission gear 38, so that each transmission gear 38 rotates, and then the keyway 39 on the transmission gear 38 cooperates with the fixed key 34 on the transmission shaft 33, so that the transmission shaft 33 rotates;

[0125] S3, the transmission shaft 33 drives the fixed intermediate plate 32 to rotate, so that the transmission screw 30 rotates, and the transmission screw 30 moves away from the protective cover 9 through the threaded transmission cooperation with the threaded sleeve 29, thereby pushing the guide block 25, the U-shaped plate 27, and the driving wheel 28 to move in this direction;

[0126] S4, the pushing wheel 28 applies force to the connecting block 23, so that the connecting block 23, the middle block 22, and the sliding block 17 slide in sequence, allowing the matching block 19 to move toward the trapezoidal block 13, and the auxiliary wheel 21 applies force to the trapezoidal block 13 to make it slide in the transverse groove 6, driving the reset plate 12 to push the push rod 15, so that the fixed block 11 slides out of the placement groove 5 to fit the surface of the adjacent side silicon wafer and apply pressure, thereby fixing the silicon wafer in the silicon wafer groove 4.

[0127] Working principle: Refer to Figures 1 to 12When the staff puts the silicon wafer into the silicon wafer slot 4 on the flower basket gear rod 3, the control device 8 controls the driving mechanism to start, and then the silicon wafer in the silicon wafer slot 4 is fixed by the cooperation of the transmission mechanism and the fixing mechanism. The specific process is as follows: the control device 8 controls the driving motor 40 to start, so that the driving shaft 41 fixedly connected to the output end of the driving motor 40 rotates, driving the driving disk 42 fixedly connected to the driving shaft 41 to rotate, so that the connecting plate 43 arranged on the driving disk 42 rotates around the axis of the driving disk 42, so that the incomplete fixedly connected to the connecting plate 43 The full gear ring 44 rotates, and the incomplete gear ring 44 meshes with the transmission gear 38, thereby causing each transmission gear 38 to rotate, and the keyway 39 on the transmission gear 38 cooperates with the fixed key 34 on the transmission shaft 33, thereby causing the transmission shaft 33 to rotate, thereby driving the intermediate plate 32 fixedly connected to the transmission shaft 33 to rotate, and then causing the transmission screw 30 fixedly connected to the intermediate plate 32 to rotate, and through the threaded transmission cooperation between the transmission screw 30 and the threaded sleeve 29, the transmission screw 30 also moves in a direction away from the protective cover 9 while rotating, thereby setting the transmission screw 30 in the transmission shaft 33. The built-in block 31 on the screw rod 30 pushes the guide block 25 to move in the direction away from the protective cover 9, so that the U-shaped plate 27 fixedly connected to the guide block 25 moves in the direction away from the protective cover 9, and then the pushing wheel 28 arranged on the U-shaped plate 27 moves in the direction away from the protective cover 9. During the movement of the pushing wheel 28, a force is continuously applied to the connecting block 23, so that the connecting block 23 slides into the L-shaped groove 7, and then the intermediate block 22 fixedly connected to the connecting block 23 pushes the sliding block 17 to slide into the L-shaped groove 7, so that the matching block 22 arranged on the sliding block 17 The engaging block 19 moves toward the trapezoidal block 13. During the continuous movement of the engaging block 19 toward the trapezoidal block 13, the auxiliary wheel 21 continuously applies force to the trapezoidal block 13, so that the trapezoidal block 13 slides in the transverse groove 6, driving the reset plate 12 provided on the trapezoidal block 13 to push the push rod 15 to slide in the transverse groove 6, thereby causing the fixed block 11 fixedly connected to the push rod 15 to slide out of the placement groove 5 and move toward the direction of the adjacent side silicon wafer, until the fixed block 11 is attached to the surface of the adjacent side silicon wafer and applies corresponding pressure to the silicon wafer, thereby achieving the fixation of the silicon wafer in the silicon wafer groove 4.

[0128] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A silicon wafer flower basket with a fixed structure, comprising a first end plate (1) and a second end plate (2), a plurality of evenly distributed flower basket tooth rods (3) are fixedly arranged between the first end plate (1) and the second end plate (2), a plurality of equally spaced silicon wafer grooves (4) are formed on the flower basket tooth rod (3), a placement groove (5) is formed in the silicon wafer groove (4), a transverse groove (6) connected to the placement groove (5) is formed in the flower basket tooth rod (3), an L-shaped groove (7) connected to the transverse groove (6) is formed on the flower basket tooth rod (3), a control device (8) is fixedly arranged on the first end plate (1), characterized in that: The silicon wafer basket with fixed structure also includes: A guide groove (10) is formed on a side surface of the turnbuckle gear rod (3) close to the second end plate (2); A fixing mechanism having a plurality of groups, and the plurality of groups of fixing mechanisms are equidistantly arranged on the flower basket gear rod (3), the fixing mechanism being used to fix the silicon wafer placed in the silicon wafer groove (4); The transmission mechanism comprises a plurality of groups, and the plurality of groups of transmission mechanisms are evenly arranged on the second end plate (2); The driving mechanism is electrically connected to the control device (8); The fixing mechanism includes: A fixing block (11) is slidably disposed in the placement groove (5), and the fixing block (11) is used to fix the silicon wafer placed in the silicon wafer groove (4); A reset portion, disposed in the transverse groove (6), the reset portion being used to push the fixed block (11); A sliding portion, disposed in the L-shaped groove (7), the sliding portion being used to apply a force to the resetting portion; The reset section includes: A reset plate (12) is slidably disposed in the transverse groove (6); A trapezoidal block (13) is fixedly arranged on a surface of the reset plate (12) close to the L-shaped groove (7), an end of the trapezoidal block (13) away from the reset plate (12) is provided with an inclined surface, and a plurality of first balls (14) are rollingly arranged on the trapezoidal block (13); A push rod (15) is fixedly disposed on the reset plate (12), and one end of the push rod (15) away from the reset plate (12) is fixedly connected to the fixed block (11); The return spring (16) is arranged in the transverse groove (6), and the return spring (16) is always in a compressed state.

2. The silicon wafer basket with a fixed structure according to claim 1, characterized in that: The sliding part includes: A sliding block (17) is slidably disposed in the L-shaped groove (7), and a plurality of second balls (18) are rollably disposed on the sliding block (17); A matching block (19) is fixedly arranged on the sliding block (17), two symmetrically distributed wheel plates (20) are fixedly arranged on the matching block (19), an auxiliary wheel (21) is rotatably arranged between the two wheel plates (20), and the auxiliary wheel (21) is always in contact with the inclined surface on the trapezoidal block (13); The middle block (22) is fixedly arranged on the sliding block (17); a connecting block (23) is fixedly arranged on one end of the middle block (22) away from the sliding block (17); a side of the connecting block (23) close to the second end plate (2) is provided with an inclined surface; and a connecting plate (24) is fixedly arranged on one end of the middle block (22) away from the matching block (19).

3. The silicon wafer basket with a fixed structure according to claim 2, characterized in that: The transmission mechanism includes: A guide block (25) is slidably disposed in the guide groove (10), and a built-in groove (26) is disposed in the guide block (25); A U-shaped plate (27) fixedly disposed on a surface of the guide block (25) away from the second end plate (2); A plurality of driving wheels (28) are provided, and the plurality of driving wheels (28) are equidistantly arranged on the U-shaped plate (27), the driving wheels (28) are rotatably connected to the U-shaped plate (27), and the driving wheels (28) are used to cooperate with the inclined surface on the connecting block (23) to push the connecting block (23) to slide into the L-shaped groove (7); A first transmission part, disposed on the second end plate (2), the first transmission part being used to push the guide block (25) to slide in the guide groove (10); The second transmission part is arranged on the second end plate (2), and is used to provide power for the first transmission part.

4. The silicon wafer basket with a fixed structure according to claim 3, characterized in that: A protective cover (9) is fixedly arranged on the second end plate (2), and the first transmission part comprises: A threaded sleeve (29) fixedly disposed on the second end plate (2); A transmission screw (30) is disposed on the threaded sleeve (29) and is threadably connected to the threaded sleeve (29); An internal block (31) is fixedly mounted on the transmission screw (30), and the internal block (31) is rotationally connected to the internal groove (26); A spacer plate (32) is fixedly arranged on one end of the transmission screw (30) close to the protective cover (9); A transmission shaft (33) is fixedly arranged on a surface of the intermediate plate (32) close to the protective cover (9), and the axis of the transmission shaft (33) coincides with the axis of the intermediate plate (32). A plurality of evenly distributed fixing keys (34) are fixedly arranged on the transmission shaft (33); The baffle (35) is fixedly arranged on one end of the transmission shaft (33) close to the protective cover (9).

5. The silicon wafer basket with a fixed structure according to claim 4, characterized in that: The second transmission unit comprises: A fixed plate (36) fixedly disposed on the second end plate (2); A hollow cylinder (37) rotatably mounted on the fixed plate (36); The transmission gear (38) is fixedly arranged at one end of the hollow cylinder (37) away from the protective cover (9). The transmission gear (38) is provided with a plurality of evenly distributed key slots (39), and the key slots (39) are slidably connected to the fixed key (34).

6. The silicon wafer basket with a fixed structure according to claim 5, characterized in that: The driving mechanism includes: A drive motor (40) is disposed on the protective cover (9) and is electrically connected to the control device (8); A drive shaft (41) is rotatably disposed on the protective cover (9), and one end of the drive shaft (41) close to the drive motor (40) is fixedly connected to an output end of the drive motor (40); The driving part is arranged on the driving shaft (41).

7. The silicon wafer basket with a fixed structure according to claim 6, characterized in that: The driving force includes: A driving disk (42) is fixedly disposed on an end of the driving shaft (41) away from the driving motor (40); A plurality of connecting plates (43) are provided, and the plurality of connecting plates (43) are fixedly arranged on the side surface of the driving disk (42); The incomplete toothed ring (44) is fixedly connected to one end of the connecting plate (43) away from the driving disk (42), and the incomplete toothed ring (44) is meshed with the transmission gear (38).

8. A method for fixing a silicon wafer basket with a fixing structure, characterized in that: The silicon wafer basket according to any one of claims 1 to 7 comprises the following steps: S1, after placing the silicon wafer into the silicon wafer slot (4) on the flower basket gear rod (3), the driving motor (40) is started through the control device (8), so that the driving shaft (41) fixedly connected to the output end of the driving motor (40) rotates; S2, the driving shaft (41) drives the fixedly connected driving plate (42) to rotate, and the connecting plate (43) on the driving plate (42) rotates around its axis, so that the incomplete toothed ring (44) fixedly connected to the connecting plate (43) rotates, and the incomplete toothed ring (44) meshes with the transmission gear (38), so that each transmission gear (38) rotates, and then the keyway (39) on the transmission gear (38) cooperates with the fixed key (34) on the transmission shaft (33), so that the transmission shaft (33) rotates; S3, the transmission shaft (33) drives the fixedly connected intermediate plate (32) to rotate, so that the transmission screw (30) rotates, and the transmission screw (30) moves in a direction away from the protective cover (9) through the threaded transmission cooperation with the threaded sleeve (29), thereby pushing the guide block (25), the U-shaped plate (27), and the driving wheel (28) to move in this direction; S4, the pushing wheel (28) applies a force to the connecting block (23), so that the connecting block (23), the intermediate block (22), and the sliding block (17) slide in sequence, so that the matching block (19) moves toward the trapezoidal block (13), and the auxiliary wheel (21) applies a force to the trapezoidal block (13) so that it slides in the transverse groove (6), driving the reset plate (12) to push the push rod (15), so that the fixed block (11) slides out of the placement groove (5) and fits the surface of the adjacent side silicon wafer and applies pressure, thereby fixing the silicon wafer in the silicon wafer groove (4).

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