Film preparation method and related equipment thereof

Abstract

The embodiment of the invention relates to the field of display, in particular to a thin film preparation method which comprises the steps that a substrate is provided, and the substrate comprises a plurality of target pixel openings; functional ink is arranged in the target pixel opening to form a liquid film; emitting a detection light beam to the liquid film, and determining an absorption coefficient or a reflection coefficient of the material of the functional ink to the detection light beam; and executing ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient. The invention further relates to related equipment for thin film detection. According to the invention, the accuracy of detection and ink compensation is effectively improved, so that a more uniform film is obtained.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a thin film preparation method and related equipment. Background Art

[0002] In existing optoelectronic devices, each thin film in the optoelectronic device can be prepared by a solution method. However, the thin film prepared by the solution method is prone to defects such as uneven film thickness.

[0003] In order to ensure the quality of finished optoelectronic devices, the film morphology and thickness of optoelectronic devices need to be tested. However, since the thickness of each film layer in the optoelectronic device is relatively thin and the material color contrast is poor, the detection results are inaccurate. Summary of the invention

[0004] Based on this, an embodiment of the present application provides a thin film preparation method and related equipment.

[0005] In order to solve the above technical problems, the present application provides a thin film preparation method, which adopts the following technical solution:

[0006] A method for preparing a thin film, comprising:

[0007] providing a substrate, the substrate comprising a plurality of target pixel openings;

[0008] Disposing functional ink in the target pixel opening to form a liquid film;

[0009] emitting a detection light beam to the liquid film, and determining an absorption coefficient or a reflection coefficient of the material of the functional ink to the detection light beam;

[0010] An ink compensation operation is performed on the liquid film according to the absorption coefficient or the reflection coefficient.

[0011] Further, the step of performing an ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient includes:

[0012] Determining an actual height parameter of the liquid film according to the absorption coefficient or the reflection coefficient;

[0013] Determining a first average parameter according to the actual height parameter of each of the liquid films;

[0014] comparing the actual height parameter of each of the liquid films with the first average parameter;

[0015] Acquire the liquid film whose actual height parameter is less than the first average parameter, and perform an ink compensation operation on the liquid film;

[0016] Alternatively, the step of performing an ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient comprises:

[0017] Determining an actual volume parameter of the liquid film according to the absorption coefficient or the reflection coefficient;

[0018] Determining a second average parameter according to the actual volume parameter of each of the liquid films;

[0019] comparing the actual volume parameter of each of the liquid films with the second average parameter;

[0020] The liquid film whose actual volume parameter is smaller than the second average parameter is obtained, and an ink compensation operation is performed on the liquid film.

[0021] Further, the liquid film whose actual height parameter is less than the first average parameter is defined as a first target liquid film, and the actual height parameter of the first target liquid film is defined as a target actual height parameter;

[0022] The step of obtaining the liquid film whose actual height parameter is less than the first average parameter and performing ink compensation comprises:

[0023] Calculating the difference between the actual height parameter of the target and the first average parameter to obtain a difference parameter; determining a first compensation volume parameter corresponding to the difference parameter according to the absorption coefficient or the reflection coefficient;

[0024] performing an ink compensation operation on the first target liquid film according to the first compensation volume parameter;

[0025] Or, define the liquid film whose actual volume parameter is smaller than the second average parameter as a second target liquid film, and define the actual volume parameter of the second target liquid film as a target actual volume parameter;

[0026] The step of obtaining the liquid film whose actual volume parameter is smaller than the second average parameter and performing ink compensation comprises:

[0027] Calculating the difference between the target actual volume parameter and the second average parameter to obtain a second compensation volume parameter;

[0028] An ink compensation operation is performed on the second target liquid film according to the second compensation volume parameter.

[0029] Furthermore, the step of determining the actual height parameter of the liquid film according to the absorption coefficient or the reflection coefficient comprises:

[0030] receiving a reflected light beam formed by the liquid film reflecting the detection light beam;

[0031] Acquire a reflected light intensity corresponding to the reflected light beam and an initial volume parameter corresponding to the functional ink;

[0032] Determining a reflection frequency of the reflected light intensity according to the absorption coefficient or the reflection coefficient;

[0033] An actual height parameter of the liquid film is determined according to the initial volume parameter and the reflection frequency.

[0034] Furthermore, before the step of emitting a detection light beam to the liquid film, the method further comprises:

[0035] Obtaining a reference height parameter corresponding to the target pixel opening;

[0036] The step of determining the actual height parameter of the liquid film according to the initial volume parameter and the reflection frequency comprises:

[0037] Determining a detection height parameter corresponding to the liquid film according to the initial volume parameter and the reflection frequency;

[0038] The difference between the detected height parameter and the reference height parameter is calculated to obtain an actual height parameter.

[0039] Further, the substrate includes a plurality of target pixel opening groups, the target pixel opening group includes at least one target pixel opening, and at least one reference pixel opening is provided on both sides of the target pixel opening group;

[0040] Before the step of obtaining the reference height parameter corresponding to the target pixel opening, the method further includes:

[0041] Obtaining an initial height parameter of each reference pixel opening;

[0042] Determining a third average parameter according to the initial height parameter of each reference pixel opening;

[0043] The third average parameter is determined as a reference height parameter.

[0044] Furthermore, the substrate includes a central detection area and a plurality of edge detection areas, each of the edge detection areas is arranged around the central detection area, and the central detection area and the edge detection area are each independently provided with at least one target pixel opening.

[0045] Further, after the step of performing the ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient, the method further includes:

[0046] Drying the liquid film to obtain a solid film;

[0047] marking a plurality of test points on the solid film;

[0048] Obtaining the point thickness parameter of each of the test points;

[0049] The thickness parameter of the solid film is determined according to the plurality of point thickness parameters.

[0050] Further, at least one of the plurality of test points is a middle point and at least two are edge points;

[0051] The middle point is located in the middle of the solid film;

[0052] The edge points are distributed around the middle point; or, the edge points are symmetrically distributed with the middle point as the symmetry center.

[0053] Furthermore, the material of the functional ink is one of a hole injection material, a hole transport material, a luminescent material, and an electron transport material;

[0054] The hole injection material and the hole transport material independently include at least one of TFB, CuPc, PVK, Poly-TPD, PFB, DNTPD, TCATA, TCCA, CBP, TPD, NPB, NPD, PEDOT:PSS, TAPC, MCC, F4-TCNQ, HATCN, 4,4',4'-tris(N-3-methylphenyl-Nphenylamino)triphenylamine, polyaniline, transition metal oxides, transition metal sulfides, transition metal tin compounds, doped graphene, undoped graphene and C60; and / or,

[0055] The luminescent material is an organic luminescent material or a quantum dot luminescent material, and the organic luminescent material includes at least one of 4,4'-bis(N-carbazole)-1,1'-biphenyl:tris[2-(p-tolyl)pyridine-C2,N)iridium(III), 4,4',4"-tris(carbazole-9-yl)triphenylamine:tris[2-(p-tolyl)pyridine-C2,N)iridium, diaromatic anthracene derivatives, distilbene aromatic derivatives, pyrene derivatives, fluorene derivatives, TBPe fluorescent materials, TTPX fluorescent materials, TBRb fluorescent materials and DBP fluorescent materials, polyacetylene and its derivatives, polyparaphenylene and its derivatives, polythiophene and its derivatives, polyfluorene and its derivatives;The quantum dot luminescent material is at least one of a single structure quantum dot and a core-shell structure quantum dot, and the material of the single structure quantum dot, the core material of the core-shell structure quantum dot and the shell material of the core-shell structure quantum dot are independently selected from at least one of II-VI group compounds, IV-VI group compounds, III-V group compounds and I-III-VI group compounds, wherein the II-VI group compound is selected from CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, ZnO, HgS, HgSe, HgTe, CdSeS, CdSeTe, CdSTe, Z At least one of nSeS, ZnSeTe, ZnSTe, HgSeS, HgSeTe, HgSTe, CdZnS, CdZnSe, CdZnTe, CdHgS, CdHgSe, CdHgTe, HgZnS, HgZnSe, HgZnTe, CdZnSeS, CdZnSeTe, CdZnSTe, CdHgSeS, CdHgSeTe, CdHgSTe, HgZnSeS, HgZnSeTe and HgZnSTe, and the IV-VI group compound is selected from SnS, SnSe, SnTe, PbS, Pb At least one of SnPbS, SnPbSe, SnPbTe, SnPbSSe, SnPbSeTe and SnPbSTe, wherein the III-V compound is selected from GaN, GaP, GaAs, GaSb, AlN, AlP, AlAs, AlSb, InN, InP, InAs, InSb, GaNP, GaNAs, GaNSb, GaPAs, GaPSb, AlNP, AlNAs, AlNSb, A At least one of lPAs, AlPSb, InNP, InNAs, InNSb, InPAs, InPSb, GaAlNP, GaAlNAs, GaAlNSb, GaAlPAs, GaAlPSb, GaInNP, GaInNAs, GaInNSb, GaInPAs, GaInPSb, InAlNP, InAlNAs, InAlNSb, InAlPAs or InAlPSb, and the I-III-VI group compound is selected from at least one of CuInS2, CuInSe2 and AgInS2; and / or;

[0056] The electron transport material includes an organic material, and the organic material includes at least one of quinoxaline compounds, imidazole compounds, triazine compounds, fluorene compounds, hydroxyquinoline compounds, polythiophene compounds, perylene imide compounds, and fullerene compounds.

[0057] In order to solve the above technical problems, the present application also provides a thin film preparation device, which adopts the following technical solution:

[0058] A thin film preparation device, comprising:

[0059] A stage, used for carrying a substrate, on which a thin film to be prepared is disposed;

[0060] A detection beam emitting module, used for emitting a detection beam to the film to be prepared;

[0061] an ink supply module; and

[0062] The control module is used to control the ink supply module to provide functional ink to the film to be prepared according to the absorption coefficient or reflection coefficient of the film to be prepared.

[0063] Further, the control module is electrically connected to the ink supply module, and the control module is used to determine the actual height parameter and the first average parameter of each of the thin films to be prepared according to the absorption coefficient or the reflection coefficient, and control the ink supply module to provide functional ink to the thin films to be prepared whose actual height parameter is less than the first average parameter; or

[0064] The control module is used to determine the actual volume parameter and the second average parameter of each of the films to be prepared according to the absorption coefficient or the reflection coefficient, and control the ink supply module to provide functional ink to the films to be prepared whose actual volume parameter is less than the second average parameter.

[0065] Further, the control module is used to calculate a difference parameter between the actual height parameter and the first average parameter, determine a first compensation volume parameter corresponding to the difference parameter according to the absorption coefficient or the reflection coefficient, and control the ink supply module to provide functional ink to the film to be prepared according to the first compensation volume parameter; or

[0066] The control module is used for calculating the difference between the actual volume parameter and the second average parameter to obtain a second compensation volume parameter, and controlling the ink supply module to provide functional ink to the film to be prepared according to the second compensation volume parameter.

[0067] In order to solve the above technical problems, the embodiment of the present application further provides a computer-readable storage medium, which adopts the following technical solution:

[0068] A computer-readable storage medium stores computer-readable instructions, and when the computer-readable instructions are executed by a processor, the steps of the thin film preparation method described above are implemented.

[0069] Compared with the prior art, the embodiments of the present application have the following main beneficial effects: utilizing the absorption coefficient and reflection coefficient of the functional ink to the detection light beam to determine the distribution of the functional ink in the target pixel opening, thereby judging whether to perform ink compensation operation on the liquid film, thereby improving the accuracy of detection and ink compensation to obtain a more uniform film. BRIEF DESCRIPTION OF THE DRAWINGS

[0070] In order to more clearly illustrate the scheme of the present application, a brief introduction is given below to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0071] Figure 1 is a flow chart of a film preparation method according to the present application;

[0072] Figure 2 is a schematic structural diagram of a substrate in a thin film preparation method according to the present application;

[0073] Figure 3 is a schematic structural diagram of the middle detection area of ​​the film preparation method according to the present application;

[0074] Figure 4 is a schematic diagram of the structure of a solid film in the thin film preparation method according to the present application;

[0075] Figure 5 It is a relationship diagram between the length of the solid film and the thickness parameter of the point according to the present application;

[0076] Figure 6 is a schematic structural diagram of a thin film preparation device according to the present application;

[0077] Figure 7 is a schematic structural diagram of an ink supply module in a thin film preparation device according to the present application;

[0078] Figure 8 is a schematic structural diagram of a detection beam emission module in a thin film preparation device according to the present application;

[0079] Fig. 9 It is a schematic diagram of the structure of the moving device in the thin film preparation equipment according to the present application.

[0080] Reference numerals:

[0081] 10. Control module; 11. Stage; 12. Moving device; 121. First X-axis movable guide rail; 122. Second X-axis movable guide rail; 123. First fixed guide rail; 124. Second fixed guide rail; 13. Ink supply module; 131. Ink circulation system; 132. Inkjet print head; 14. Detection beam emission module; 141. Control unit; 142. Lifting assembly; 143. Camera; 144. Bracket; 145. Laser receiver; 146. Laser transmitter; 15. Ink supply device; 16. Waste liquid recovery device; 200. Substrate; 210. Target pixel pit; 220. Liquid film; 230. Reference pixel pit; 240. Edge detection area; 250. Middle detection area; 260. Solid film; 270. Middle point; 280. Edge point. DETAILED DESCRIPTION

[0082] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0083] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0084] In the prior art, in order to ensure the film formation quality of the functional ink liquid film, a step meter or a white light interferometer is usually used for detection. However, due to the low contrast of the image obtained by the detection, if the functional ink fails to cover the inner side of the pixel opening, it will be impossible to accurately reflect the spreading of the functional ink in the pixel opening.

[0085] Based on this, Figure 1 As shown, the embodiment of the present application provides a method for preparing a thin film, comprising:

[0086] Step S110 , providing a substrate, wherein the substrate includes a plurality of target pixel openings.

[0087] In this step, the substrate includes a plurality of pixel openings, and the pixel openings where the functional ink is to be set are defined as target pixel openings.

[0088] Step S120, setting functional ink in the target pixel opening to form a liquid film.

[0089] In this step, functional ink is disposed on the target pixel opening using a solution method.

[0090] In some embodiments, the solution method includes but is not limited to sol-gel method, printing, inkjet printing, spin coating, coating.

[0091] In some embodiments, when the thin film preparation method described in the present application is applied to OLED devices, the material of the functional ink is one of a hole injection material, a hole transport material, and a luminescent material; when the thin film preparation method described in the present application can be applied to QLED devices, the material of the functional ink is one of a hole injection material, a hole transport material, a luminescent material, and an electron transport material.

[0092] In some embodiments, the hole injection material and the hole transport material independently include at least one of TFB, CuPc, PVK, Poly-TPD, PFB, DNTPD, TCATA, TCCA, CBP, TPD, NPB, NPD, PEDOT:PSS, TAPC, MCC, F4-TCNQ, HATCN, 4,4',4'-tris(N-3-methylphenyl-Nphenylamino)triphenylamine, polyaniline, transition metal oxides, transition metal sulfides, transition metal tinides, doped graphene, undoped graphene and C60.

[0093] In some embodiments, when the thin film preparation method described in the present application is applied to an OLED device, the light-emitting material is an organic light-emitting material, and the organic light-emitting material includes at least one of 4,4'-bis(N-carbazole)-1,1'-biphenyl:tris[2-(p-tolyl)pyridine-C2,N)iridium(III), 4,4',4"-tri(carbazole-9-yl)triphenylamine:tris[2-(p-tolyl)pyridine-C2,N)iridium, diaromatic anthracene derivatives, distyrene aromatic derivatives, pyrene derivatives, fluorene derivatives, TBPe fluorescent materials, TTPX fluorescent materials, TBRb fluorescent materials and DBP fluorescent materials, polyacetylene and its derivatives, polyparaphenylene and its derivatives, polythiophene and its derivatives, polyfluorene and its derivatives.

[0094] In some embodiments, when the thin film preparation method described in the present application is applied to a QLED device, the luminescent material is a quantum dot luminescent material, and the quantum dot luminescent material is at least one of a single structure quantum dot and a core-shell structure quantum dot, and the material of the single structure quantum dot, the core material of the core-shell structure quantum dot, and the shell material of the core-shell structure quantum dot are independently selected from at least one of a II-VI group compound, a IV-VI group compound, a III-V group compound, and a I-III-VI group compound, wherein the II-VI group compound is selected from CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, Z nO, HgS, HgSe, HgTe, CdSeS, CdSeTe, CdSTe, ZnSeS, ZnSeTe, ZnSTe, HgSeS, HgSeTe, HgSTe, CdZnS, CdZnSe, CdZnTe, CdHgS, CdHgSe, CdHg At least one of Te, HgZnS, HgZnSe, HgZnTe, CdZnSeS, CdZnSeTe, CdZnSTe, CdHgSeS, CdHgSeTe, CdHgSTe, HgZnSeS, HgZnSeTe and HgZnSTe, the IV-VI The III-V compound is selected from at least one of SnS, SnSe, SnTe, PbS, PbSe, PbTe, SnSeS, SnSeTe, SnSTe, PbSeS, PbSeTe, PbSTe, SnPbS, SnPbSe, SnPbTe, SnPbSSe, SnPbSeTe and SnPbSTe, and the III-V compound is selected from GaN, GaP, GaAs, GaSb, AlN, AlP, AlAs, AlSb, InN, InP, InAs, InSb, GaNP, GaNAs, GaNSb, GaPAs, GaPSb, AlN P, at least one of AlNAs, AlNSb, AlPAs, AlPSb, InNP, InNAs, InNSb, InPAs, InPSb, GaAlNP, GaAlNAs, GaAlNSb, GaAlPAs, GaAlPSb, GaInNP, GaInNAs, GaInNSb, GaInPAs, GaInPSb, InAlNP, InAlNAs, InAlNSb, InAlPAs or InAlPSb, and the I-III-VI group compound is selected from at least one of CuInS2, CuInSe2 and AgInS2.

[0095] In some embodiments, the electron transport material includes an organic material, and the organic material includes at least one of quinoxaline compounds, imidazole compounds, triazine compounds, fluorene compounds, hydroxyquinoline compounds, polythiophene compounds, perylene imide compounds, and fullerene compounds.

[0096] In some embodiments, the substrate includes a central detection area and a plurality of edge detection areas, each of the edge detection areas is disposed around the central detection area, and the central detection area and the edge detection area are each independently provided with at least one target pixel opening.

[0097] In this embodiment, in order to take into account the differences in the solvent evaporation rates of the functional ink in different areas on the substrate, part of the target pixel openings are selected from the middle area and the edge area of ​​the substrate respectively, and are divided into a middle detection area and an edge detection area correspondingly. The detection results of the liquid film in the target pixel openings in the middle detection area and the edge detection area are used to reflect the detection results of the liquid film in all the target pixel openings on the entire substrate, thereby avoiding the problem of large solvent evaporation of the functional ink in the target pixel openings and low detection accuracy due to the need to detect the liquid film of all the target pixel openings on the substrate.

[0098] In some embodiments, a multi-order edge detection area group is provided on the substrate, and each order edge detection area group includes at least two edge detection areas; wherein each order edge detection area group in the multi-order edge detection area group surrounds the middle detection area layer by layer, thereby covering areas in different directions outside the middle detection area on the substrate, thereby improving the comprehensiveness and accuracy of detection.

[0099] For example, see Figure 2 The thin film preparation method of the present application is applied to the detection stage before the formal stage. At this time, the substrate 200 is a detection substrate, and there are eight edge detection areas 240 on the detection substrate. Four edge detection areas 240 in one group surround the middle detection area 250 to form a first-order edge detection area group, and four edge detection areas 240 in another group surround the first-order edge detection area group to form a second-order edge detection area group; in this way, outside the middle detection area 250 of the detection substrate, the second-order edge detection area group is arranged layer by layer, so that more areas of the substrate 200 can be covered, thereby improving the comprehensiveness and accuracy of the detection.

[0100] Step S130, emitting a detection light beam to the liquid film, and determining an absorption coefficient or a reflection coefficient of the material of the functional ink to the detection light beam.

[0101] In this step, the liquid film is detected using a detection light beam, so that the actual height parameters of the liquid film can be determined based on the absorption coefficient or reflection coefficient of the material of the functional ink in the liquid film to the detection light beam. Therefore, based on the actual height parameters of the liquid film, the distribution of the functional ink in the target pixel opening can be accurately reflected, thereby improving the detection accuracy.

[0102] Understandably, after the functional ink is set in the target pixel opening, the distribution of the functional ink has the following example situations: ① The boundary of the functional ink does not reach the pixel definition layer of the target pixel opening, that is, part of the area inside the pixel definition layer is not covered by the functional ink; ② The boundary of the functional ink reaches the pixel definition layer of the target pixel opening, that is, the area inside the pixel definition layer is covered by the functional ink; ③ The boundary of the functional ink overflows the pixel definition layer of the target pixel opening, that is, the boundary of the functional ink is exposed outside the pixel definition layer. It can be seen that based on the spreading degree of the functional ink in the target pixel opening, it can be determined that the height of the liquid film in the target pixel opening has the following relationship: situation ① < situation ② < situation ③; in this way, the actual height parameter of the liquid film can be used to reflect the distribution of the functional ink in the target pixel opening.

[0103] Step S140: performing an ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient.

[0104] In an embodiment of step S140, the step of performing an ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient includes:

[0105] Step S141, determining an actual height parameter of the liquid film according to the absorption coefficient or the reflection coefficient.

[0106] In some embodiments, in the above step S141, the step of determining the actual height parameter of the liquid film according to the absorption coefficient or the reflection coefficient includes:

[0107] Step S1411, receiving a reflected light beam formed by the liquid film reflecting the detection light beam;

[0108] Step S1412, obtaining the reflected light intensity corresponding to the reflected light beam and the initial volume parameter corresponding to the functional ink;

[0109] Step S1413, determining the reflection frequency of the reflected light intensity according to the absorption coefficient or the reflection coefficient;

[0110] Step S1414: determining the actual height parameter of the liquid film according to the initial volume parameter and the reflection frequency.

[0111] In the above steps S1411 to S1414, when the detection beam is incident on the surface of the liquid film, a portion of the detection beam with energy E0 is reflected with energy E1 to form a reflected beam, and the remaining beam with energy E2 is absorbed by the material of the functional ink in the liquid film. According to the principle of energy conservation, the following first formula can be obtained:

[0112] E0=E1+E2

[0113] Dividing both sides of the first formula by E0 gives the following second formula:

[0114]

[0115] Wherein, R is the reflection coefficient of the material of the functional ink to the detection beam, and ρ is the absorption coefficient of the material of the functional ink to the detection beam. For the detection beam incident vertically on the surface of the liquid film, the reflection coefficient R is obtained by the following third formula:

[0116] R=|(n-1)(n+1)| 2

[0117] Where n is the refractive index of the material of the functional ink. Therefore, the fourth formula for calculating the absorption coefficient ρ is as follows:

[0118] ρ=1-R=1-|(n-1)(n+1)| 2

[0119] It is understandable that, since the refractive index n of the material of the functional ink is a function of the wavelength, the absorption coefficient ρ of the material of the functional ink is not the same for detection beams of different wavelengths. Based on this, when the reflection coefficient R of the material of the functional ink to the detection beam is used to determine the actual height parameter of the liquid film, the energy E2 of the received reflected light beam is used as the reflected light intensity, and the product of the reflected light intensity and the reflection coefficient R is calculated to obtain the reflection frequency, and the initial volume parameter of the functional ink set in the target pixel opening in step S120 is obtained, and the actual height parameter is calculated based on the following fifth formula; when the actual height parameter of the liquid film is determined according to the absorption coefficient ρ of the material of the functional ink to the detection beam, the reflection coefficient R is calculated according to the second formula above, and then the actual height parameter is calculated according to the above calculation method in "When the actual height parameter of the liquid film is determined according to the absorption coefficient ρ of the material of the functional ink to the detection beam".

[0120] Among them, the fifth formula is as follows:

[0121] V = kh;

[0122] Substitute the reflection frequency k and the initial volume parameter V into the fifth formula respectively, and the calculated h value is used as the actual height parameter.

[0123] Furthermore, in an embodiment of step S130, before the step of emitting a detection light beam to the liquid film, the method further includes:

[0124] Step S131, obtaining a reference height parameter corresponding to the target pixel opening.

[0125] In this step, the reference height parameter is characterized by a height parameter when the target pixel opening is not provided with a liquid film.

[0126] In an embodiment of step S1414, the step of determining the actual height parameter of the liquid film according to the initial volume parameter and the reflection frequency includes:

[0127] Step S14141, determining a detection height parameter corresponding to the liquid film according to the initial volume parameter and the reflection frequency.

[0128] Step S14142, calculating the difference between the detected height parameter and the reference height parameter to obtain an actual height parameter.

[0129] In the above steps S14141 and S14142, after substituting the reflection frequency k and the initial volume parameter V into the above fifth formula, the calculated h value is determined as the detection height parameter corresponding to the liquid film, and the difference between the detection height parameter and the reference height parameter is calculated to obtain the actual height parameter, thereby further improving the accuracy of the actual height parameter.

[0130] For example, see Figure 3 , Figure 3 2 is a schematic diagram of the structure of the middle detection area 250 of the present application. The middle detection area 250 includes two reference pixel openings 230 and three target pixel openings 210. The reference height parameter is h4, and the detection height parameter is h5. The difference between the detection height parameter h5 and the reference height parameter h4 is calculated to obtain the actual height parameters h1 / h2 / h3 of the liquid film 220.

[0131] In some embodiments, the substrate includes a plurality of target pixel opening groups, the target pixel opening groups include at least one target pixel opening, and at least one reference pixel opening is provided on both sides of the target pixel opening group. The height of the reference pixel opening is used as a reference height parameter to detect the height of the liquid film in the target pixel opening to ensure the accuracy of the detection.

[0132] In some embodiments, the reference pixel opening may be surface treated in advance to ensure the flatness of the inner surface of the reference pixel opening, thereby improving the accuracy of detecting the reference height parameter, and further improving the accuracy of detecting the height of the liquid film in the target pixel opening.

[0133] Furthermore, the above step S131, before the step of obtaining the reference height parameter corresponding to the target pixel opening, further includes:

[0134] Step S132, obtaining the initial height parameter of each reference pixel opening.

[0135] In this step, the initial height parameters of the reference pixel opening may be detected using an optical thickness preparation method, a laser thickness preparation method, or the like.

[0136] Step S133, determining a third average parameter according to the initial height parameter of each reference pixel opening.

[0137] Step S134: determine the third average parameter as a reference height parameter.

[0138] In the above steps S133 and S134, the initial height parameters of each reference pixel opening are added to obtain a first sum value, and then the first sum value is divided by the total number of reference pixel openings to obtain a third average parameter, and the third average parameter is determined as the reference height parameter. In this way, the reference height parameter is calculated by averaging to reduce the influence of morphological differences in different reference pixel openings due to processing accuracy, thereby improving the accuracy of the obtained reference height parameter.

[0139] Step S142: determining a first average parameter according to the actual height parameter of each of the liquid films.

[0140] In this step, the actual height parameters of each liquid film are added to obtain a second sum value, and the first sum value is divided by the total number of target pixel openings to obtain a first average parameter.

[0141] As an example, see Figure 3 and Figure 4 , Figure 3 : is a schematic diagram of the structure of the middle detection area 250 of the present application. The middle detection area 250 includes two reference pixel openings 230 and three target pixel openings 210. The actual height parameters corresponding to the liquid film 220 in the three target pixel openings 210 are h1, h2, and h3 respectively. After adding h1, h2, and h3 to obtain the second sum value, the first sum value is divided by the total number of target pixel openings to obtain the first average parameter.

[0142] Step S143, comparing the actual height parameter of each of the liquid films with the first average parameter.

[0143] Step S144, obtaining the liquid film whose actual height parameter is smaller than the first average parameter, and performing an ink compensation operation on the liquid film.

[0144] In the above steps S143 and S144, the actual height parameter of each liquid film is compared with the first average parameter respectively, and the following situations exist: ① When the actual height parameter of the liquid film is less than the first average parameter, ink compensation is performed on the liquid film to ensure the height consistency of each liquid film on the substrate. ② When the actual parameter of the liquid film is equal to the first average parameter, it indicates that the liquid film meets the height requirement and there is no need to perform ink compensation. ③ When the actual height parameter of the liquid film is greater than the first average parameter, in some embodiments, the current substrate can be directly scrapped, and another substrate can be taken to re-execute the above steps S110 to S140; in other embodiments, it can be first determined whether the difference between the actual height parameter and the first average parameter exceeds a preset threshold. If it exceeds, the current substrate is scrapped, and another substrate is taken to re-execute the above steps S110 to S140. If it does not exceed, the difference between the actual height parameter and the first average parameter does not affect the performance of the manufactured film, thereby avoiding the waste of substrate resources.

[0145] Further, the liquid film whose actual height parameter is less than the first average parameter is defined as a first target liquid film, and the actual height parameter of the first target liquid film is defined as a target actual height parameter; in the above step S144, the step of obtaining the liquid film whose actual height parameter is less than the first average parameter and performing an ink compensation operation on the liquid film includes:

[0146] Step S1441, calculating the difference between the actual target height parameter and the first average parameter to obtain a difference parameter.

[0147] Step S1442: Determine a first compensation volume parameter corresponding to the difference parameter according to the absorption coefficient or the reflection coefficient.

[0148] Step S1443: performing ink compensation on the first target liquid film according to the first compensation volume parameter.

[0149] In the above steps S1441 to S1443, when the actual height parameter of the liquid film is less than the first average parameter, the difference between the actual height parameter of the liquid film and the first average parameter is calculated to obtain the height difference parameter. For the process of obtaining the reflection frequency k using the absorption coefficient or the reflection coefficient, please refer to the above steps S131 to S134. Substitute the height difference parameter h and the reflection frequency k into the fifth formula respectively, and use the calculated V value as the first compensation parameter to perform ink compensation on the first target liquid film with the first compensation volume parameter.

[0150] In another embodiment of step S140, the step of performing an ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient includes:

[0151] Step S145: determining the actual volume parameter of the liquid film according to the absorption coefficient or the reflection coefficient.

[0152] In this step, the actual volume parameter corresponding to the actual height parameter can be determined according to the absorption coefficient or the reflection coefficient. For the process of obtaining the reflection frequency k using the absorption coefficient or the reflection coefficient, please refer to the above steps S1411 to S1414, and substitute the actual height parameter h and the reflection frequency k into the fifth formula respectively, and the calculated V value is used as the actual volume parameter.

[0153] Step S146: determining a second average parameter according to the actual volume parameter of each of the liquid films.

[0154] In this step, the actual volume parameter V of each liquid film is added to obtain a third sum value, and the third sum value is divided by the total number of target pixel openings to obtain a second average parameter.

[0155] Step S147, comparing the actual volume parameter of each of the liquid films with the second average parameter.

[0156] Step S148, obtaining the liquid film whose actual volume parameter is smaller than the second average parameter, and performing ink compensation.

[0157] In the above steps S147 and S148, the actual volume parameter of each liquid film is compared with the second average parameter respectively, and the following situations exist: ① When the actual volume parameter of the liquid film is less than the second average parameter, ink compensation is performed on the liquid film to ensure the high consistency of each liquid film on the substrate. ② When the actual parameter of the liquid film is equal to the second average parameter, it indicates that the liquid film meets the volume requirement and there is no need to perform ink compensation. ③ When the actual volume parameter of the liquid film is greater than the second average parameter, in some embodiments, the current substrate can be directly scrapped, and another substrate can be taken to re-execute the above steps S110 to S140; in other embodiments, it can be first determined whether the difference between the actual volume parameter and the second average parameter exceeds the preset threshold. If it exceeds, the current substrate is scrapped, and another substrate is taken to re-execute the above steps S110 to S140. If it does not exceed, the difference between the actual volume parameter and the second average parameter does not affect the performance of the manufactured film, thereby avoiding the waste of substrate resources.

[0158] Further, the liquid film whose actual volume parameter is less than the second average parameter is defined as a second target liquid film, and the actual volume parameter of the second target liquid film is defined as a target actual volume parameter; in the above step S148, the step of obtaining the liquid film whose actual volume parameter is less than the second average parameter and performing an ink compensation operation on the liquid film includes:

[0159] Step S1481, calculating the difference between the target actual volume parameter and the second average parameter to obtain a second compensation volume parameter.

[0160] Step S1482: Perform ink compensation on the second target liquid film according to the second compensation volume parameter.

[0161] In the above steps S1481 and S1482, when the actual volume parameter of the liquid film is less than the second average parameter, the difference between the actual volume parameter V of the liquid film and the second average parameter is calculated to obtain the second compensation volume parameter, and the second target liquid film is compensated for ink with the second compensation volume parameter.

[0162] In some embodiments, the above step S140, after the step of performing the ink compensation operation, further includes:

[0163] Step S150, drying the liquid film to obtain a solid film.

[0164] In this step, after determining that the liquid film in any target pixel opening on the substrate does not need to be used for ink compensation, the liquid film is dried to remove the solvent of the functional ink in the liquid film, thereby forming a corresponding solid film in the target pixel opening.

[0165] Step S160, marking a plurality of test points on the solid film.

[0166] Step S170, obtaining the point thickness parameter of each of the test points.

[0167] In step S160 and step S170, in some embodiments, at least one of the multiple test points is a middle point and at least two are edge points; the middle point is located in the middle of the solid film; the edge points are distributed around the middle point; or, the edge points are symmetrically distributed with the middle point as the center of symmetry.

[0168] It can be understood that among the test points marked on the solid film, some are middle points and the other are edge points, and the edge points are arranged on the outside of the middle points. The multiple test points marked in this way are evenly distributed on the solid film, so that the point thickness parameters obtained by respectively detecting the multiple test points are highly comprehensive, thereby improving the detection accuracy of the solid film.

[0169] For example, see Figure 4 ,Should Figure 4 4a in the figure shows the situation that “the edge points 280 on the solid film 260 are distributed around the middle point 270”, wherein the number of the middle point 270 is 1, the number of the edge points 280 is 8, and the 8 edge points 280 are arranged around the middle point 290; Figure 44b in the figure shows the situation that "the edge points 280 on the solid film 260 are symmetrically distributed with the middle point 270 as the symmetry center", wherein the number of the middle point 270 is 1, the number of the edge points 280 is 8, and the 8 edge points 280 are evenly and symmetrically distributed on the left and right with the middle point 270 as the symmetry center, forming a "W" shape.

[0170] In some embodiments, an automatic optical inspection device (Automated Optical Inspection, AOI) is used to test the point thickness parameters of each test point; specifically, the light source of the automatic optical inspection device is controlled to emit test light to each middle point and each edge point respectively, and the reflected light corresponding to each beam of test light is obtained by a CCD camera in the automatic optical inspection device, and the time difference between the moment of emitting the test light and the moment of receiving the reflected light is calculated, and the thickness corresponding to the time difference is determined as the point thickness parameter of the test point.

[0171] It should be noted that the corresponding relationship between the time difference and the thickness can be obtained through preliminary experiments.

[0172] Step S180, determining the thickness parameter of the solid film according to the plurality of point thickness parameters.

[0173] In this step, the point thickness parameters corresponding to each test point on the solid film are added together to obtain a fourth sum value, and the fourth sum value is divided by the total number of test points on the solid film to obtain the thickness parameter of the solid film. In this way, the problem of poor accuracy of the thickness parameter of the solid film obtained by detection due to the difference in topographic flatness at different test points on the solid film is reduced.

[0174] In some embodiments, after the step S180 of determining the thickness parameter of the solid film according to the plurality of point thickness parameters, the above step further includes: determining whether a preset thickness condition is met according to the thickness parameter of the solid film.

[0175] In this step, the thickness parameters of the solid film are compared with the preset thickness conditions, so that when the thickness parameters of the solid film meet the preset thickness conditions, the formal stage of preparing the thin film can be entered; or, when the thickness parameters of the solid film do not meet the preset thickness conditions, the volume of the functional ink is adjusted based on the thickness parameters of the solid film, and the solid film is prepared and tested again after the adjustment, so as to ensure the accuracy of the thickness of the solid film.

[0176] In some embodiments, the preset thickness condition is a preset thickness threshold; the thickness parameter of the solid film is compared with the preset thickness threshold, and when the thickness parameter of the solid film is greater than the preset thickness threshold, the substrate is scrapped, and another substrate is taken to re-execute the above steps S110 to S180; when the thickness parameter of the solid film is less than or equal to the preset thickness threshold, the thickness parameter detection characterizing the solid film has passed, and the thin film is prepared in the formal stage with the preparation parameters of the solid film.

[0177] It should be noted that the above-mentioned preset thickness threshold can be obtained through preset experiments.

[0178] For example, see Figure 4 The test points on the solid film 250 include a middle point 270 and an edge point 280. After obtaining the point thickness parameters of the middle point 270 and the edge point 280 and obtaining the test data, the following is established: Figure 5 The relationship between the length of the solid film and the point thickness parameter shown in FIG. 1 reflects the relationship between the position corresponding to the length of the solid film and the point thickness parameter in the length direction of the solid film, and is represented by Figure 5 It can be seen that as the length of the solid-state film gradually increases, the point thickness parameters show a changing trend; based on this, in order to reduce the problem of changes in the thickness parameters of the solid-state film 250 detected due to differences in the morphological flatness at different test points on the solid-state film 250, the present application calculates the average value of the point thickness parameters corresponding to each test point, and uses the average value as the thickness parameter of the solid-state film 250, so as to use the thickness parameter to determine whether it exceeds the preset thickness threshold (upper limit / lower limit), thereby improving the accuracy of the solid-state film 250 film thickness detection.

[0179] See also Figure 6 The embodiment of the present application also provides a thin film preparation device, comprising a stage 11, a detection beam emitting module 14, an ink supply module 13 and a control module 10; the stage 11 is used to carry a substrate, on which a thin film to be prepared is provided. The detection beam emitting module 14 is used to emit a detection beam to the thin film to be prepared; the ink supply module 13 is electrically connected to the control module 10; the control module 10 is used to control the ink supply module 13 to provide functional ink to the thin film to be prepared according to the absorption coefficient or reflection coefficient of the thin film to be prepared.

[0180] In this embodiment, combined with Figure 6As shown, in actual application, by placing a substrate on the stage 11, the target pixel opening of the substrate already has a thin film to be prepared, or the control module 10 can first control the ink supply module 13 to set functional ink on the target pixel opening of the substrate, and after forming a liquid film as the thin film to be prepared, the detection beam emitting module 14 is used to emit a detection beam to the liquid film on the target pixel opening of the substrate. The control module 10 receives a reflected beam generated by the liquid film reflecting the detection beam, and determines the actual height parameters of the liquid film based on the absorption coefficient or reflection coefficient of the material of the functional ink in the liquid film to the detection beam, so that the distribution of the functional ink in the target pixel opening can be accurately reflected based on the actual height parameters of the liquid film, thereby improving the detection accuracy.

[0181] In some embodiments, the detection beam emitting module 14 includes a laser emitter, which is used to emit the detection beam.

[0182] In some embodiments, the ink supply module 13 includes but is not limited to a printer, an inkjet printer, a coater, etc., and is used to set functional ink on the target pixel pits on the substrate.

[0183] In some embodiments, the control module 10 includes a memory, a processor, and a network interface that are interconnected through a system bus. Those skilled in the art can understand that the thin film preparation device here is a device that can automatically perform numerical calculations and / or information processing according to pre-set or stored instructions, and its hardware includes but is not limited to a microprocessor, an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a digital signal processor (DSP), an embedded device, etc.

[0184] The memory includes at least one type of readable storage medium, and the readable storage medium includes flash memory, hard disk, multimedia card, card-type memory (for example, SD or DX memory, etc.), random access memory (RAM), static random access memory (SRAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), programmable read-only memory (PROM), magnetic memory, disk, optical disk, etc. In some embodiments, the memory can be an internal storage unit of the thin film preparation device, such as a hard disk or memory of the thin film preparation device. In other embodiments, the memory can also be an external storage device of the thin film preparation device, such as a plug-in hard disk equipped on the thin film preparation device, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (FlashCard), etc. Of course, the memory can also include both the internal storage unit of the thin film preparation device and its external storage device. In this embodiment, the memory is generally used to store the operating system and various application software installed in the thin film preparation device, such as the program code of the thin film preparation method, etc. In addition, the memory can also be used to temporarily store various types of data that have been output or are to be output.

[0185] The processor may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor, or other data processing chip in some embodiments. The processor is generally used to control the overall operation of the thin film preparation device. In this embodiment, the processor is used to run the program code stored in the memory or process data, such as running the program code of the thin film preparation method.

[0186] The network interface may include a wireless network interface or a wired network interface, which is generally used to establish a communication connection between the thin film preparation device and other electronic devices.

[0187] In some embodiments, the control module 10 is used to determine the actual height parameter and the first average parameter of each of the thin films to be prepared according to the absorption coefficient or the reflection coefficient, and control the ink supply module 13 to provide functional ink to the thin films to be prepared whose actual height parameter is less than the first average parameter; or

[0188] The control module 10 is used to determine the actual volume parameter and the second average parameter of each of the films to be prepared according to the absorption coefficient or the reflection coefficient, and control the ink supply module 13 to provide functional ink to the films to be prepared whose actual volume parameter is less than the second average parameter.

[0189] In some embodiments, the control module 10 is used to calculate a difference parameter between the actual height parameter and the first average parameter, determine a first compensation volume parameter corresponding to the difference parameter according to the absorption coefficient or the reflection coefficient, and control the ink supply module 13 to provide functional ink to the film to be prepared according to the first compensation volume parameter; or

[0190] The control module 10 is used to calculate the difference between the actual volume parameter and the second average parameter to obtain a second compensation volume parameter, and control the ink supply module 13 to provide functional ink to the film to be prepared according to the second compensation volume parameter.

[0191] In some embodiments, see Figure 6 and Figure 7 The ink supply module 13 is an inkjet printing device, and the inkjet printer includes an ink circulation system 131 and an inkjet print head 132; wherein the ink circulation system 131 and the inkjet print head 132 are both electrically connected to the control module 10, and the control module controls the ink circulation system 131 to supply ink and controls the inkjet print head 132 to perform functional ink printing.

[0192] In some embodiments, continue to refer to Figure 6 The thin film preparation device further includes an ink supply device 15 and a waste liquid recovery device 16, both of which are connected to the ink circulation system 131 and are electrically connected to the control module 10. The control module 1010 controls the ink supply device 15 to supply ink to the ink circulation system 131, and controls the waste liquid recovery device 16 to recover the cleaned ink.

[0193] In some embodiments, see Figure 6 and Figure 8 The detection beam emitting module 14 includes a control unit 141, a bracket 144, a camera 143, a laser emitter 146 and a laser receiver 145; wherein the control unit 141 is electrically connected to the control module 10; the camera 143, the laser emitter 146 and the laser receiver 145 are all arranged on the bracket 144; the camera 143 is used as a CCD camera in an automatic optical detection device to obtain an image of a solid film on a target pixel pit; the laser emitter 146 is used to emit a detection beam; and the laser receiver 145 is used to receive a reflected beam reflected by the detection beam.

[0194] In some embodiments, continue to refer to Figure 8 The laser emitter 146 and / or the laser receiver 145 can be rotatably mounted on the bracket 144, so that the angle of the laser emitter 146 and / or the laser receiver 145 can be adjusted according to different usage conditions, and the applicability is wide.

[0195] In some embodiments, continue to refer to Figure 6 and Figure 8 The detection beam emission module 14 further includes a lifting assembly 142, which is disposed on a bracket 144 and is electrically connected to the control unit 141. In practical applications, the control unit 141 controls the lifting assembly 142 to drive the bracket 144 to move up and down, thereby achieving the lifting and moving of the laser emitter 146, the laser receiver 145, and the camera 143.

[0196] In some embodiments, the lifting assembly 142 includes but is not limited to a lifting motor assembly, a lifting cylinder assembly, a hydraulic lifting assembly, etc.

[0197] In some embodiments, see Figure 6 The thin film preparation equipment also includes a moving device 12 , the control module 10 is electrically connected to the moving device 12 , and the ink supply module 13 and / or the detection beam emission module 14 are transmission-connected to the moving device 12 .

[0198] In this embodiment, the control module 10 is used to control the moving device 12 to drive the ink supply module 13 and / or the detection light beam emitting module 14 to move, thereby meeting the processing requirements of workpieces of different types and sizes.

[0199] In some embodiments, see Figure 6 and Fig. 9 The moving device 12 includes a first fixed guide rail 123, a second fixed guide rail 124, and a movable guide rail. The two ends of the movable guide rail are movably installed on the first fixed guide rail 123 and the second fixed guide rail 124 respectively, and the movable guide rail is transmission-connected to the control module 10, and the ink supply module 13 and / or the detection beam emitting module 14 are transmission-connected to the movable guide rail; the control module 10 drives the ink supply module 13 and / or the detection beam emitting module 14 to move by controlling the movable guide rail.

[0200] In some embodiments, the movable guide rail includes at least one of an X-direction movable guide rail, a Y-direction movable guide rail, and a Z-direction movable guide rail.

[0201] In some embodiments, continue to refer to Fig. 9 There are two movable rails, one of which is connected to the ink supply module 13, and the other is connected to the detection beam emission module 14. In this way, the ink supply module 13 and the detection beam emission module 14 can be controlled independently, which is flexible.

[0202] In some embodiments, continue to refer to Fig. 9Among the two movable guide rails, one is a first X-direction movable guide rail 121 , which is transmission-connected to the ink supply module 13 , and the other is a second X-direction movable guide rail 122 , which is transmission-connected to the detection device 14 .

[0203] In some embodiments, the movable guide rail includes but is not limited to a screw rod, a slide rail, etc.

[0204] The present application also provides another embodiment, namely, providing a computer-readable storage medium, wherein the computer-readable storage medium stores a thin film preparation program, and the thin film preparation program can be executed by at least one processor so that the at least one processor performs the steps of the thin film preparation method as described above.

[0205] The beneficial effects of the embodiments of the present application are as follows: the actual height parameters of the liquid film are detected by using a detection light beam, so that the actual height parameters of the liquid film can be determined based on the absorption coefficient or reflection coefficient of the material of the functional ink in the liquid film to the detection light beam, so that the distribution of the functional ink in the target pixel opening can be accurately reflected based on the actual height parameters of the liquid film, thereby improving the accuracy of detection and ink compensation to obtain a more uniform film.

[0206] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present application, or the part that contributes to the prior art, can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk), and includes a number of instructions for a terminal device (which can be a mobile phone, computer, server, air conditioner, or network device, etc.) to execute the methods described in each embodiment of the present application.

[0207] Obviously, the embodiments described above are only some embodiments of the present application, rather than all embodiments. The preferred embodiments of the present application are given in the accompanying drawings, but they do not limit the patent scope of the present application. The present application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. Although the present application is described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific implementation methods, or to perform equivalent replacement of some of the technical features therein. Any equivalent structure made using the contents of the specification and drawings of this application, directly or indirectly used in other related technical fields, is similarly within the scope of patent protection of this application.

Claims

1. A method for preparing a thin film, characterized in that: include: providing a substrate, the substrate comprising a plurality of target pixel openings; Disposing functional ink in the target pixel opening to form a liquid film; emitting a detection light beam to the liquid film, and determining an absorption coefficient or a reflection coefficient of the material of the functional ink to the detection light beam; An ink compensation operation is performed on the liquid film according to the absorption coefficient or the reflection coefficient.

2. The thin film preparation method according to claim 1, characterized in that: The step of performing an ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient comprises: Determining an actual height parameter of the liquid film according to the absorption coefficient or the reflection coefficient; Determining a first average parameter according to the actual height parameter of each of the liquid films; comparing the actual height parameter of each of the liquid films with the first average parameter; Acquire the liquid film whose actual height parameter is less than the first average parameter, and perform an ink compensation operation on the liquid film; Alternatively, the step of performing an ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient comprises: Determining an actual volume parameter of the liquid film according to the absorption coefficient or the reflection coefficient; Determining a second average parameter according to the actual volume parameter of each of the liquid films; comparing the actual volume parameter of each of the liquid films with the second average parameter; The liquid film whose actual volume parameter is smaller than the second average parameter is obtained, and an ink compensation operation is performed on the liquid film.

3. The thin film preparation method according to claim 2, characterized in that: defining the liquid film whose actual height parameter is less than the first average parameter as a first target liquid film, and defining the actual height parameter of the first target liquid film as a target actual height parameter; The step of obtaining the liquid film whose actual height parameter is less than the first average parameter and performing an ink compensation operation on the liquid film comprises: Calculating the difference between the actual target height parameter and the first average parameter to obtain a difference parameter; Determining a first compensation volume parameter corresponding to the difference parameter according to the absorption coefficient or the reflection coefficient; performing an ink compensation operation on the first target liquid film according to the first compensation volume parameter; Or, define the liquid film whose actual volume parameter is smaller than the second average parameter as a second target liquid film, and define the actual volume parameter of the second target liquid film as a target actual volume parameter; The step of obtaining the liquid film whose actual volume parameter is smaller than the second average parameter and performing an ink compensation operation on the liquid film comprises: Calculating the difference between the target actual volume parameter and the second average parameter to obtain a second compensation volume parameter; An ink compensation operation is performed on the second target liquid film according to the second compensation volume parameter.

4. The method for preparing a thin film according to claim 2, characterized in that: The step of determining the actual height parameter of the liquid film according to the absorption coefficient or the reflection coefficient comprises: receiving a reflected light beam formed by the liquid film reflecting the detection light beam; Acquire a reflected light intensity corresponding to the reflected light beam and an initial volume parameter corresponding to the functional ink; Determining a reflection frequency of the reflected light intensity according to the absorption coefficient or the reflection coefficient; An actual height parameter of the liquid film is determined according to the initial volume parameter and the reflection frequency.

5. The method for preparing a thin film according to claim 4, characterized in that: Before the step of emitting a detection light beam to the liquid film, the method further comprises: Obtaining a reference height parameter corresponding to the target pixel opening; The step of determining the actual height parameter of the liquid film according to the initial volume parameter and the reflection frequency comprises: Determining a detection height parameter corresponding to the liquid film according to the initial volume parameter and the reflection frequency; The difference between the detected height parameter and the reference height parameter is calculated to obtain an actual height parameter.

6. The method for preparing a thin film according to claim 5, characterized in that: The substrate comprises a plurality of target pixel opening groups, wherein the target pixel opening group comprises at least one target pixel opening, and at least one reference pixel opening is disposed on both sides of the target pixel opening group; Before the step of obtaining the reference height parameter corresponding to the target pixel opening, the method further includes: Obtaining an initial height parameter of each reference pixel opening; Determining a third average parameter according to the initial height parameter of each reference pixel opening; The third average parameter is determined as a reference height parameter.

7. The method for preparing a thin film according to any one of claims 1 to 6, characterized in that: The substrate includes a central detection area and a plurality of edge detection areas, each of the edge detection areas is arranged around the central detection area, and the central detection area and the edge detection area are respectively independently provided with at least one target pixel opening.

8. The method for preparing a thin film according to any one of claims 1 to 6, characterized in that: After the step of performing the ink compensation operation on the liquid film according to the absorption coefficient or the reflection coefficient, the method further includes: Drying the liquid film to obtain a solid film; marking a plurality of test points on the solid film; Obtaining the point thickness parameter of each of the test points; The thickness parameter of the solid film is determined according to the plurality of point thickness parameters.

9. The method for preparing a thin film according to claim 8, characterized in that: At least one of the plurality of test points is a middle point and at least two are edge points; The middle point is located in the middle of the solid film; The edge points are distributed around the middle point; or, the edge points are symmetrically distributed with the middle point as the symmetry center.

10. The method for preparing a thin film according to any one of claims 1 to 6, characterized in that: The material of the functional ink is one of a hole injection material, a hole transport material, a luminescent material, and an electron transport material; The hole injection material and the hole transport material independently include at least one of TFB, CuPc, PVK, Poly-TPD, PFB, DNTPD, TCATA, TCCA, CBP, TPD, NPB, NPD, PEDOT:PSS, TAPC, MCC, F4-TCNQ, HATCN, 4,4',4'-tris(N-3-methylphenyl-Nphenylamino)triphenylamine, polyaniline, transition metal oxides, transition metal sulfides, transition metal tin compounds, doped graphene, undoped graphene and C60; and / or, The luminescent material is an organic luminescent material or a quantum dot luminescent material, and the organic luminescent material includes at least one of 4,4'-bis(N-carbazole)-1,1'-biphenyl:tris[2-(p-tolyl)pyridine-C2,N)iridium(III), 4,4',4"-tris(carbazole-9-yl)triphenylamine:tris[2-(p-tolyl)pyridine-C2,N)iridium, diaromatic anthracene derivatives, distilbene aromatic derivatives, pyrene derivatives, fluorene derivatives, TBPe fluorescent materials, TTPX fluorescent materials, TBRb fluorescent materials and DBP fluorescent materials, polyacetylene and its derivatives, polyparaphenylene and its derivatives, polythiophene and its derivatives, polyfluorene and its derivatives;The quantum dot luminescent material is at least one of a single structure quantum dot and a core-shell structure quantum dot, and the material of the single structure quantum dot, the core material of the core-shell structure quantum dot and the shell material of the core-shell structure quantum dot are independently selected from at least one of II-VI group compounds, IV-VI group compounds, III-V group compounds and I-III-VI group compounds, wherein the II-VI group compound is selected from CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, ZnO, HgS, HgSe, HgTe, CdSeS, CdSeTe, CdSTe, Z At least one of nSeS, ZnSeTe, ZnSTe, HgSeS, HgSeTe, HgSTe, CdZnS, CdZnSe, CdZnTe, CdHgS, CdHgSe, CdHgTe, HgZnS, HgZnSe, HgZnTe, CdZnSeS, CdZnSeTe, CdZnSTe, CdHgSeS, CdHgSeTe, CdHgSTe, HgZnSeS, HgZnSeTe and HgZnSTe, and the IV-VI group compound is selected from SnS, SnSe, SnTe, PbS, Pb At least one of SnPbS, SnPbSe, SnPbTe, SnPbSSe, SnPbSeTe and SnPbSTe, wherein the III-V compound is selected from GaN, GaP, GaAs, GaSb, AlN, AlP, AlAs, AlSb, InN, InP, InAs, InSb, GaNP, GaNAs, GaNSb, GaPAs, GaPSb, AlNP, AlNAs, AlNSb, A At least one of lPAs, AlPSb, InNP, InNAs, InNSb, InPAs, InPSb, GaAlNP, GaAlNAs, GaAlNSb, GaAlPAs, GaAlPSb, GaInNP, GaInNAs, GaInNSb, GaInPAs, GaInPSb, InAlNP, InAlNAs, InAlNSb, InAlPAs or InAlPSb, and the I-III-VI group compound is selected from at least one of CuInS2, CuInSe2 and AgInS2; and / or; The electron transport material includes an organic material, and the organic material includes at least one of quinoxaline compounds, imidazole compounds, triazine compounds, fluorene compounds, hydroxyquinoline compounds, polythiophene compounds, perylene imide compounds, and fullerene compounds.

11. A thin film preparation device, characterized in that: include: A stage, used for carrying a substrate, on which a thin film to be prepared is disposed; A detection beam emitting module, used for emitting a detection beam to the film to be prepared; Ink supply module; as well as The control module is used to control the ink supply module to provide functional ink to the film to be prepared according to the absorption coefficient or reflection coefficient of the film to be prepared.

12. The thin film forming device according to claim 11, characterized in that: The control module is electrically connected to the ink supply module, and the control module is used to determine the actual height parameter and the first average parameter of each of the thin films to be prepared according to the absorption coefficient or the reflection coefficient, and control the ink supply module to provide functional ink to the thin films to be prepared whose actual height parameter is less than the first average parameter; or The control module is used to determine the actual volume parameter and the second average parameter of each of the films to be prepared according to the absorption coefficient or the reflection coefficient, and control the ink supply module to provide functional ink to the films to be prepared whose actual volume parameter is less than the second average parameter.

13. The thin film preparation device according to claim 12, characterized in that: The control module is used to calculate a difference parameter between the actual height parameter and the first average parameter, determine a first compensation volume parameter corresponding to the difference parameter according to the absorption coefficient or the reflection coefficient, and control the ink supply module to provide functional ink to the film to be prepared according to the first compensation volume parameter; or The control module is used for calculating the difference between the actual volume parameter and the second average parameter to obtain a second compensation volume parameter, and controlling the ink supply module to provide functional ink to the film to be prepared according to the second compensation volume parameter.

14. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer-readable instructions, and when the computer-readable instructions are executed by a processor, the steps of the thin film preparation method according to any one of claims 1 to 10 are implemented.

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