Cavity door rotating device for supporting vacuum cavities arranged side by side

Abstract

The invention discloses a cavity door rotating device for supporting vacuum cavities arranged side by side, and relates to the technical field of vacuum cavity door rotation, which comprises a left vacuum cavity, a right vacuum cavity and a rotating mechanism, a left cavity door is rotationally arranged on the left vacuum cavity, and a right cavity door is rotationally arranged on the right vacuum cavity; the rotating mechanism comprises a first rotating assembly, a second rotating assembly, a driving device and a vacuumizing mechanism; an electric telescopic rod, a fixing rod, a fixing block and a fixing seat fix two adjacent groups of control valves, a rotary clamping cylinder and a contact block tension or loosen a left cavity door or a right cavity door, and a rotary motor, a speed reducer, a first rotating shaft piece, a first rotating shaft support, a second rotating shaft piece and a second rotating shaft support enable the left cavity door or the right cavity door to rotate by 180 degrees. Space is saved when the cavity doors are opened, the multiple sets of vacuum cavities are stacked in a three-dimensional mode, and the space utilization rate and the productivity of the semiconductor clean room space are improved.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum chamber door rotation, and in particular is a chamber door rotation device for supporting vacuum chambers placed side by side. Background Art

[0002] A vacuum chamber refers to a sealed container that can maintain a certain degree of vacuum. The internal space can be evacuated into a vacuum state. The vacuum chamber provides an environment without gas interference and is used for various physical, chemical or biological experiments. Vacuum chambers are widely used in semiconductor manufacturing, vacuum coating, material processing and other fields. The clean room space of semiconductors is a vital component in the semiconductor manufacturing process. It provides a highly controlled environment to ensure the production quality of semiconductor chips. In the semiconductor manufacturing process, vacuum chambers need to be used in clean room spaces.

[0003] Existing vacuum chambers are usually used in conjunction with robots for pick-and-place operations in semiconductor clean room spaces. However, semiconductor clean room space is very valuable, and the number of vacuum chambers is linked to production capacity. In the same amount of time, more vacuum chambers mean that more samples or products can be processed simultaneously, thereby directly increasing overall production capacity. However, multiple groups of vacuum chambers are placed up and down, with the chamber door opening angle of 90-180 degrees, and the vacuum chambers are placed left and right, with the chamber door opening angle ≤90 degrees. This means that when the chamber door is open, the vacuum chamber occupies a large space, thereby reducing the utilization rate of semiconductor clean room space and failing to meet people's needs. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art; to this end, the present invention provides a chamber door rotating device that supports the side-by-side placement of vacuum chambers.

[0005] A chamber door rotating device for supporting vacuum chambers placed side by side, comprising a plurality of left vacuum chambers, a right vacuum chamber arranged side by side with the left vacuum chamber, and a rotating mechanism, wherein the plurality of left vacuum chambers and the plurality of right vacuum chambers are placed in a row on a support frame, and the left vacuum chamber and the right vacuum chamber are both closed metal containers for bearing negative pressure; wherein a left chamber door is rotatably arranged on the left vacuum chamber, and a right chamber door is rotatably arranged on the right vacuum chamber; the rotating mechanism comprises a first rotating component arranged on a side of the left vacuum chamber, a second rotating component arranged on a side of the right vacuum chamber, and two groups of the first rotating component and the second rotating component are arranged between the left vacuum chamber and the right vacuum chamber and respectively control the left vacuum chamber and the right vacuum chamber. The driving device is a driving device for the components to work; the first rotating component and the second rotating component are staggered, the first rotating component is detachably connected to the left chamber door, and the second rotating component is detachably connected to the right chamber door. The driving device controls the left chamber door to rotate to 180 degrees on the left vacuum chamber through the first rotating component, and controls the right chamber door to rotate to 180 degrees on the right vacuum chamber through the second rotating component, so that the staff can easily access the inside of the chamber from all angles, which is convenient for various complex operations and maintenance work; the left vacuum chamber and the right vacuum chamber are both provided with a vacuum pumping mechanism, and the vacuum pumping mechanism can perform a vacuum pumping operation on the left vacuum chamber or the right vacuum chamber.

[0006] As a further solution of the present invention: the first rotating assembly includes two groups of first rotating shaft brackets arranged on the left vacuum chamber and a first rotating shaft member rotatably connected to the first rotating shaft bracket, and the driving device can be removably installed on the lower end surface of the upper first rotating shaft bracket and control the first rotating shaft member to rotate 180 degrees.

[0007] As a further solution of the present invention: the second rotating assembly includes two groups of second rotating shaft brackets arranged on the right chamber door and a second rotating shaft member rotatably arranged on the second rotating shaft bracket, the second rotating shaft bracket is arranged on the first rotating shaft bracket, the driving device can be removably installed on the upper end surface of the second rotating shaft bracket below and control the second rotating shaft member to rotate 180 degrees, and the outer surface of the left chamber door can be in contact with the outer surface of the right chamber door.

[0008] As a further solution of the present invention: the first rotating shaft bracket and the second rotating shaft bracket are both in an "L"-shaped structure, the first rotating shaft bracket is provided with a first connecting member for connecting the first rotating shaft member, the second rotating shaft bracket is provided with a second connecting member for connecting the second rotating shaft member, and the first rotating shaft member and the second rotating shaft member are both in a "b"-shaped structure.

[0009] As a further solution of the present invention: the two groups of driving devices are symmetrically arranged between the left vacuum chamber and the right vacuum chamber, the driving devices include a rotating motor and a reducer connected to the rotating motor, and the two groups of reducers are respectively installed on the first rotating shaft bracket and the second rotating shaft bracket.

[0010] As a further solution of the present invention: a cylinder bracket is detachably installed on the other side of the left vacuum chamber and the other side of the right vacuum chamber, and a rotating clamping cylinder for closing the left chamber door and the right chamber door is detachably installed on the cylinder bracket. The output shaft of the rotating clamping cylinder is detachably provided with a contact block. The rotating clamping cylinder is a starting component capable of performing forward and backward and rotational actions. The rotating clamping cylinder and the contact block cooperate to tighten the left chamber door and the right chamber door, so that the left chamber door is tightly connected to the left vacuum chamber, and the right chamber door is tightly connected to the right vacuum chamber.

[0011] As a further scheme of the present invention: the vacuum pumping mechanism includes a vacuum pumping device arranged on the rear sides of the left vacuum chamber and the right vacuum chamber, a first air suction branch pipe respectively arranged on a side of the left vacuum chamber and a side of the right vacuum chamber, a control valve connected to the first air suction branch pipe and an air guide member connecting the two groups of control valves, wherein an initial state of one group of control valves in the control valve of the left vacuum chamber and the control valve of the right vacuum chamber is open, and an initial state of the other group of control valves is closed, and the left vacuum chamber and the right vacuum chamber are both provided with mounting members for fixing the control valves, and the air guide member is composed of a first air guide pipe and two groups of second air guide pipes, the second air guide pipe group is in an "L" shape, one end of the second air guide pipe is connected to the lower end of the control valve, and the other end of the second air guide pipe is connected to the first air guide pipe, the vacuum pumping device is provided with a second air suction branch pipe and an air suction main pipe connected to the second air suction branch pipe, and a connecting pipe detachably connected to the air suction main pipe is vertically provided at one end of the air guide member.

[0012] As a further solution of the present invention: the vacuum mechanism also includes a fixed seat arranged on one group of control valves, a fixed block arranged on another group of control valves and an electric telescopic rod detachably mounted on one side of the fixed seat, a fixing rod for fixing or removing the fixing block is mounted on the output shaft of the electric telescopic rod, one side of the fixing block and one side of the fixing seat are respectively fitted with the outer walls of the two groups of control valves, the end of the fixing block close to the fixed seat is a cylindrical structure, a fixing groove matching the fixing block is provided on the fixing seat, a fixing hole connected to the fixing rod is provided on the fixing block, the fixing seat and the fixing block cooperate to ensure a stable connection between the two groups of control valves, and to ensure a stable placement between the left vacuum chamber and the right vacuum chamber, so as to avoid displacement of the left vacuum chamber and the right vacuum chamber when subjected to external force, thereby causing damage to the rotating mechanism.

[0013] As a further solution of the present invention: a handle block for controlling the rotation of the valve core is provided on the control valve, and the vacuum extraction mechanism also includes a drive motor detachably mounted on the other side of the fixed seat and a first gear detachably connected to the output shaft of the drive motor and a second gear detachably mounted on the handle block, the first gear is respectively engaged with two groups of second gears, and the drive motor controls the rotation of the handle block via the first gear and the second gear, thereby being able to control the opening and closing of the control valve.

[0014] As a further solution of the present invention: a pneumatic valve can be detachably installed on the rear side surface of the left vacuum chamber and the rear side surface of the right vacuum chamber, and the pneumatic valve can connect the left vacuum chamber or the right vacuum chamber with the outside, and several groups of the left vacuum chambers and several groups of the right vacuum chambers are aligned from top to bottom, and the length dimensions of the several groups of connecting pipes gradually decrease from top to bottom.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] (1) The present invention can fix two adjacent control valve groups by setting a rotating mechanism, an electric telescopic rod, a fixed rod, a fixed block and a fixed seat, and the rotating clamping cylinder and the contact block can tighten or relax the left chamber door or the right chamber door. The rotating motor, the reducer, the first rotating shaft, the first rotating shaft bracket, the second rotating shaft and the second rotating shaft bracket can make the left chamber door or the right chamber door rotate 180 degrees to open, thereby saving space when the chamber door is open, so that a plurality of vacuum chambers can be stacked in three dimensions, thereby improving the space utilization rate of the semiconductor clean room space and improving the production capacity of the semiconductor clean room space;

[0017] (2) The present invention sets a vacuum mechanism, and the fixed seat, fixed block, electric telescopic rod and fixed rod cooperate to fix two adjacent groups of control valves, so that the left vacuum chamber and the right vacuum chamber are stably placed, avoiding the left vacuum chamber and the right vacuum chamber from being offset when subjected to external force, thereby causing damage to the rotating mechanism. The driving motor, the first gear, the second gear and the handle block can open and close the control valve. The vacuum equipment, the first exhaust branch pipe, the control valve, the air guide, the connecting pipe, the exhaust main pipe and the second exhaust branch pipe can perform vacuum work on any left vacuum chamber and the right vacuum chamber. There is no need to connect or disassemble the vacuum equipment with the left vacuum chamber or the right vacuum chamber, thereby improving the vacuum efficiency of the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0019] Figure 2 It is a partial structural diagram of the rotating mechanism in the present invention.

[0020] Figure 3 For the present invention Figure 2 Enlarged view of point A in the middle.

[0021] Figure 4 It is a top view of the left vacuum chamber, the right vacuum chamber and the vacuum pumping mechanism in the present invention.

[0022] Figure 5 It is a partial structural diagram of the vacuum pumping mechanism in the present invention.

[0023] Figure 6 It is a partial structural diagram of the fixing seat and the first gear in the present invention.

[0024] Figure 7 It is a partial structural diagram of the fixing base and the electric telescopic rod in the present invention.

[0025] In the figure: 1. left vacuum chamber; 2. right vacuum chamber; 3. left chamber door; 4. right chamber door; 5. first rotating shaft bracket; 6. first rotating shaft member; 7. second rotating shaft bracket; 8. second rotating shaft member; 9. rotating motor; 10. reducer; 11. cylinder bracket; 12. rotating clamping cylinder; 13. contact block; 14. vacuum pumping equipment; 15. first exhaust branch pipe; 16. control valve; 17. air guide; 18. second exhaust branch pipe; 19. exhaust main pipe; 20. fixing seat; 21. fixing block; 22. electric telescopic rod; 23. fixing rod; 24. handle block; 25. driving motor; 26. first gear; 27. second gear; 28. pneumatic valve; 29. ​​connecting pipe. DETAILED DESCRIPTION

[0026] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] Embodiment 1

[0028] See also Figure 1 - Figure 4The present application provides a chamber door rotating device for supporting vacuum chambers placed side by side, comprising a plurality of left vacuum chambers 1, a right vacuum chamber 2 arranged side by side with the left vacuum chamber 1, and a rotating mechanism, wherein the plurality of left vacuum chambers 1 and the plurality of right vacuum chambers 2 are placed in a row on a support frame, and the left vacuum chamber 1 and the right vacuum chamber 2 are both closed metal containers for bearing negative pressure; wherein a left chamber door 3 is rotatably arranged on the left vacuum chamber 1, and a right chamber door 4 is rotatably arranged on the right vacuum chamber 2; the rotating mechanism comprises a first rotating component arranged on one side of the left vacuum chamber 1, a second rotating component arranged on one side of the right vacuum chamber 2, and two groups of first rotating components arranged between the left vacuum chamber 1 and the right vacuum chamber 2 and respectively controlling the first rotating components. The first rotating assembly and the second rotating assembly are staggered, the first rotating assembly is detachably connected to the left chamber door 3, and the second rotating assembly is detachably connected to the right chamber door 4. The driving device controls the left chamber door 3 to rotate to 180 degrees on the left vacuum chamber 1 through the first rotating assembly, and controls the right chamber door 4 to rotate to 180 degrees on the right vacuum chamber 2 through the second rotating assembly, so that the staff can easily access the inside of the cavity from all angles, which is convenient for various complex operations and maintenance work; the left vacuum chamber 1 and the right vacuum chamber 2 are both provided with vacuum pumping mechanisms, which can perform vacuum pumping operations on the left vacuum chamber 1 or the right vacuum chamber 2.

[0029] The first rotating assembly in the present invention includes two groups of first rotating shaft brackets 5 arranged on the left vacuum chamber 1 and first rotating shaft members 6 rotatably connected to the first rotating shaft brackets 5. One of the two groups of first rotating shaft members 6 is driven by a driving device that can be detachably installed on the lower end surface of the upper first rotating shaft bracket 5 and controls the first rotating shaft member 6 to rotate 180 degrees.

[0030] The second rotating assembly in the present invention includes two groups of second rotating shaft brackets 7 arranged on the right chamber door 4 and a second rotating shaft 8 rotatably arranged on the second rotating shaft bracket 7. The second rotating shaft bracket 7 is arranged on the first rotating shaft bracket 5. The driving device can be removably installed on the upper end surface of the second rotating shaft bracket 7 below and controls the second rotating shaft 8 to rotate 180 degrees. The outer surface of the left chamber door 3 can be in contact with the outer surface of the right chamber door 4.

[0031] In the present invention, the first rotating shaft bracket 5 and the second rotating shaft bracket 7 are both in an "L"-shaped structure. The first rotating shaft bracket 5 is provided with a first connecting member for connecting the first rotating shaft 6, and the second rotating shaft bracket 7 is provided with a second connecting member for connecting the second rotating shaft 8. The first rotating shaft 6 and the second rotating shaft 8 are both in a "b"-shaped structure.

[0032] In the present invention, two sets of driving devices are symmetrically arranged between the left vacuum chamber 1 and the right vacuum chamber 2. The driving device includes a rotating motor 9 and a reducer 10 connected to the rotating motor 9. The two sets of reducers 10 are respectively installed on the first rotating shaft bracket 5 and the second rotating shaft bracket 7.

[0033] In the present invention, a cylinder bracket 11 is detachably installed on the other side of the left vacuum chamber 1 and the other side of the right vacuum chamber 2, and a rotating clamping cylinder 12 for closing the left chamber door 3 and the right chamber door 4 is detachably installed on the cylinder bracket 11. The output shaft of the rotating clamping cylinder 12 is detachably provided with a contact block 13. The rotating clamping cylinder 12 is a starting component that can perform forward and backward and rotational actions. The rotating clamping cylinder 12 and the contact block 13 cooperate to tighten the left chamber door 3 and the right chamber door 4, so that the left chamber door 3 is tightly connected to the left vacuum chamber 1, and the right chamber door 4 is tightly connected to the right vacuum chamber 2.

[0034] In summary, the left vacuum chamber 1 and the right vacuum chamber 2 are placed side by side. When the left vacuum chamber 1 needs to be opened, the rotary clamping cylinder 12 is started to drive the contact block 13 to move, so that the contact block 13 is separated from the left chamber door 3, and the rotary motor 9 is started. The first rotating shaft 6 is driven to rotate on the first rotating shaft bracket 5 through the reducer 10, so that the first rotating shaft 6 drives the left chamber door 3 to rotate, and the left chamber door 3 drives another group of first rotating shafts 6 to rotate on the first rotating shaft bracket 5, and the left chamber door 3 is rotated to 180 degrees, so that the left chamber door 3 is fitted with the right chamber door 4, and the left vacuum chamber 1 is opened. Similarly, when the right vacuum chamber 2 needs to be opened, the rotary clamping cylinder 12 and the rotary motor 9 are started, and the second rotating shaft 8 is rotated on the second rotating shaft bracket 7, so that the right chamber door 4 is rotated to 180 degrees and fits with the left chamber door 3.

[0035] Embodiment 2

[0036] Reference Figure 4 - Figure 7 , which is a second embodiment of the present invention, wherein the vacuum pumping mechanism of the present invention includes a vacuum pumping device 14 arranged at the rear side of the left vacuum chamber 1 and the right vacuum chamber 2, a first air pumping branch pipe 15 respectively arranged at one side of the left vacuum chamber 1 and one side of the right vacuum chamber 2, a control valve 16 connected to the first air pumping branch pipe 15, and an air guide 17 connecting the two groups of control valves 16, and the initial state of one group of control valves 16 of the control valves 16 of the left vacuum chamber 1 and the control valves 16 of the right vacuum chamber 2 is open, and the initial state of the other group of control valves 16 is closed. The left vacuum chamber 1 and the right vacuum chamber 2 are both provided with mounting parts for fixing the control valve 16. The air guide member 17 is composed of a first air guide tube and two groups of second air guide tubes. The second air guide tube group is in an "L" shape. One end of the second air guide tube is connected to the lower end of the control valve 16, and the other end of the second air guide tube is connected to the first air guide tube. The vacuum pumping device 14 is provided with a second air extraction branch pipe 18 and an air extraction main pipe 19 connected to the second air extraction branch pipe 18. A connecting pipe 29 detachably connected to the air extraction main pipe 19 is vertically provided at one end of the air guide member 17.

[0037] The vacuum pumping mechanism of the present invention further comprises a fixing seat 20 arranged on one group of control valves 16, a fixing block 21 arranged on another group of control valves 16, and an electric telescopic rod 22 detachably mounted on one side of the fixing seat 20, a fixing rod 23 for fixing or removing the fixing block 21 is mounted on the output shaft of the electric telescopic rod 22, a through hole corresponding to the output shaft of the electric telescopic rod 22 is opened on the fixing seat 21, the diameter of the output shaft of the electric telescopic rod 22 is larger than the diameter of the fixing rod 23, one side of the fixing block 21 and one side of the fixing seat 20 are connected to each other. The side surfaces are respectively fitted with the outer walls of the two groups of control valves 16. The end of the fixing block 21 close to the fixing seat 20 is a cylindrical structure. The fixing seat 20 is provided with a fixing groove matching the fixing block 21. The fixing block 21 is provided with a fixing hole connected to the fixing rod 23. The fixing seat 20 and the fixing block 21 cooperate to ensure a stable connection between the two groups of control valves 16 and to ensure a stable placement between the left vacuum chamber 1 and the right vacuum chamber 2, thereby avoiding displacement of the left vacuum chamber 1 and the right vacuum chamber 2 when subjected to external forces, thereby causing damage to the rotating mechanism.

[0038] In the present invention, a handle block 24 for controlling the rotation of the valve core is provided on the control valve 16, and the vacuum pumping mechanism also includes a drive motor 25 detachably mounted on the other side of the fixed seat 20 and a first gear 26 detachably connected to the output shaft of the drive motor 25 and a second gear 27 detachably mounted on the handle block 24. The first gear 26 is respectively engaged with two groups of second gears 27. The drive motor 25 controls the rotation of the handle block 24 through the first gear 26 and the second gear 27, thereby being able to control the opening and closing of the control valve 16.

[0039] In the present invention, the rear side of the left vacuum chamber 1 and the rear side of the right vacuum chamber 2 are both detachably installed with a pneumatic valve 28. Both the control valve 16 and the pneumatic valve 28 are made of Neway. The pneumatic valve 28 can connect the left vacuum chamber 1 or the right vacuum chamber 2 with the outside. Several groups of left vacuum chambers 1 and several groups of right vacuum chambers 2 are aligned from top to bottom, and the length of several groups of connecting pipes 29 gradually decreases from top to bottom.

[0040] In summary, when the left vacuum chamber 1 and the right vacuum chamber 2 are aligned and placed side by side, the fixing block 21 is inserted into the fixing groove, the electric telescopic rod 22 is started, the fixing rod 23 is driven to move, the fixing rod 23 is inserted into the fixing hole, the fixing block 21 is fixed to the fixing seat 20, the two adjacent groups of control valves 16 are fixedly connected, the first gear 26 is respectively meshed with the two groups of second gears 27, the left chamber door 3 is sealedly connected to the left vacuum chamber 1, and the right chamber door 4 is sealedly connected to the right vacuum chamber 2. When it is necessary to evacuate the left vacuum chamber 1 or the right vacuum chamber 2, the drive is started. The motor 25 drives the first gear 26 to rotate, the first gear 26 drives the two sets of second gears 27 to rotate, and the second gear 27 drives the handle block 24 to rotate, thereby opening the control valve 16 to be evacuated, starting the vacuum pumping equipment 14, allowing air to enter the control valve 16 from the first air extraction branch pipe 15, and enter the air guide 17 from the control valve 16, enter the air extraction main pipe 19 through the connecting pipe 29, and enter the vacuum pumping equipment 14 through the second air extraction branch pipe 18, thereby evacuating any left vacuum chamber 1 and right vacuum chamber 2.

[0041] Embodiment 3

[0042] Reference Figure 1 - Figure 7 , combining Example 1 and Example 2 to obtain this embodiment.

[0043] The electric telescopic rod 22, the fixed rod 23, the fixed block 21 and the fixed seat 20 can fix the two adjacent control valves 16 together, the rotating clamping cylinder 12 and the contact block 13 can tighten or loosen the left chamber door 3 or the right chamber door 4, the rotating motor 9, the reducer 10, the first rotating shaft 6, the first rotating shaft bracket 5, the second rotating shaft 8 and the second rotating shaft bracket 7 can make the left chamber door 3 or the right chamber door 4 rotate 180 degrees to open, the fixed seat 20, the fixed block 21, the electric telescopic rod 22 and The fixing rod 23 can cooperate to fix the two adjacent groups of control valves in connection, the driving motor 25, the first gear 26, the second gear 27 and the handle block 24 can open and close the control valves, the vacuum pumping equipment 14, the first air extraction branch pipe 15, the control valve 16, the air guide 17, the connecting pipe 29, the air extraction main pipe 19 and the second air extraction branch pipe 18 can perform vacuum extraction on any left vacuum chamber 1 and the right vacuum chamber 2, and there is no need to connect or disassemble the vacuum pumping equipment 14 with the left vacuum chamber 1 or the right vacuum chamber 2.

[0044] The above embodiments are only used to illustrate the technical method of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A chamber door rotating device for supporting parallel placement of vacuum chambers, characterized in that: It comprises a plurality of groups of left vacuum chambers (1), a right vacuum chamber (2) arranged side by side with the left vacuum chamber (1), and a rotating mechanism; Wherein, a left chamber door (3) is rotatably provided on the left vacuum chamber (1), and a right chamber door (4) is rotatably provided on the right vacuum chamber (2); The rotating mechanism comprises a first rotating assembly arranged on a side of the left vacuum chamber (1), a second rotating assembly arranged on a side of the right vacuum chamber (2), and two sets of driving devices arranged between the left vacuum chamber (1) and the right vacuum chamber (2) and respectively controlling the first rotating assembly and the second rotating assembly to operate; The first rotating assembly and the second rotating assembly are staggered, the first rotating assembly is detachably connected to the left chamber door (3), and the second rotating assembly is detachably connected to the right chamber door (4); The left vacuum chamber (1) and the right vacuum chamber (2) are both provided with a vacuum pumping mechanism.

2. A chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 1, characterized in that: The first rotating assembly comprises two groups of first rotating shaft brackets (5) arranged on the left vacuum chamber (1) and a first rotating shaft member (6) rotatably connected to the first rotating shaft bracket (5); the driving device is detachably mounted on the lower end surface of the upper first rotating shaft bracket (5) and controls the first rotating shaft member (6) to rotate 180 degrees.

3. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 2, characterized in that: The second rotating assembly comprises two sets of second rotating shaft brackets (7) arranged on the right chamber door (4) and a second rotating shaft member (8) rotatably arranged on the second rotating shaft bracket (7); the second rotating shaft bracket (7) is arranged on the first rotating shaft bracket (5); the driving device can be detachably mounted on the upper end surface of the second rotating shaft bracket (7) below and controls the second rotating shaft member (8) to rotate 180 degrees; the outer surface of the left chamber door (3) can be in contact with the outer surface of the right chamber door (4).

4. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 3, characterized in that: The first rotating shaft bracket (5) and the second rotating shaft bracket (7) are both in an "L"-shaped structure, and the first rotating shaft component (6) and the second rotating shaft component (8) are both in a "b"-shaped structure.

5. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 4, characterized in that: The two groups of driving devices are symmetrically arranged between the left vacuum chamber (1) and the right vacuum chamber (2), and the driving devices include a rotating motor (9) and a reducer (10) connected to the rotating motor (9). The two groups of reducers (10) are respectively installed on the first rotating shaft bracket (5) and the second rotating shaft bracket (7).

6. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 5, characterized in that: A cylinder bracket (11) is detachably mounted on the other side of the left vacuum chamber (1) and the other side of the right vacuum chamber (2); a rotary clamping cylinder (12) for closing the left chamber door (3) and the right chamber door (4) is detachably mounted on the cylinder bracket (11); and a contact block (13) is detachably mounted on the output shaft of the rotary clamping cylinder (12).

7. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 1, characterized in that: The vacuum pumping mechanism comprises a vacuum pumping device (14) arranged at the rear side of the left vacuum chamber (1) and the right vacuum chamber (2), a first air extraction branch pipe (15) respectively arranged at one side of the left vacuum chamber (1) and one side of the right vacuum chamber (2), a control valve (16) connected to the first air extraction branch pipe (15), and an air guide (17) connecting the two groups of control valves (16); the vacuum pumping device (14) is provided with a second air extraction branch pipe (18) and an air extraction main pipe (19) connected to the second air extraction branch pipe (18); and a connecting pipe (29) detachably connected to the air extraction main pipe (19) is vertically arranged at one end of the air guide (17).

8. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 7, characterized in that: The vacuum extraction mechanism further comprises a fixing seat (20) arranged on one group of control valves (16), a fixing block (21) arranged on another group of control valves (16), and an electric telescopic rod (22) detachably mounted on one side of the fixing seat (20), wherein a fixing rod (23) for fixing or removing the fixing block (21) is mounted on the output shaft of the electric telescopic rod (22).

9. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 8, characterized in that: The control valve (16) is provided with a handle block (24) for controlling the valve core to rotate. The vacuum pumping mechanism also includes a drive motor (25) detachably mounted on the other side of the fixing seat (20), a first gear (26) detachably connected to the output shaft of the drive motor (25), and a second gear (27) detachably mounted on the handle block (24), wherein the first gear (26) is respectively meshed with two sets of second gears (27).

10. The chamber door rotating device for supporting parallel placement of vacuum chambers according to claim 9, characterized in that: A pneumatic valve (28) is detachably mounted on the rear side of the left vacuum chamber (1) and the rear side of the right vacuum chamber (2); a plurality of groups of left vacuum chambers (1) and a plurality of groups of right vacuum chambers (2) are arranged in alignment from top to bottom; and the lengths of the plurality of groups of connecting tubes (29) gradually decrease from top to bottom.

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