Wafer boat adhesive bonding and overturning tool

Abstract

The invention discloses a wafer boat adhesive bonding turnover tool, and relates to the technical field of wafer boat production equipment. Comprising a workbench, a first end plate pushing station, a cross beam bottom end aligning station and a second end plate pushing station which are arranged in rows are arranged on the front side of the workbench, and cross beam fixing clamps of a wafer boat are arranged over the first end plate pushing station, the cross beam bottom end aligning station and the second end plate pushing station. The cross beams of the wafer boats are arranged in a rectangular shape according to the positions of finished wafer boats and are vertically and detachably clamped on the cross beam fixing clamps, and the two ends of the cross beams of the wafer boats extend out of the cross beam fixing clamps; a first adhesive bonding pushing mechanism is mounted on the first end plate pushing station, a second adhesive bonding pushing mechanism is mounted on the second end plate pushing station, and a cross beam pushing mechanism is mounted on the cross beam bottom end aligning station; the cross beam and end plate gluing device can efficiently and conveniently complete gluing of a cross beam and an end plate in cooperation with manual assistance.

Description

Technical Field

[0001] The invention relates to the technical field of wafer boat production equipment, in particular to a wafer boat adhesive bonding and flipping tool. Background Art

[0002] Silicon carbide wafer boat is used to carry silicon wafers, such as Figure 3 As shown, the crystal boat includes two end plates 31 spaced apart, and four cross beams 12 arranged in a rectangular shape are arranged between the end plates 31. When the end plates 31 are connected to the cross beams 12, a connecting hole is first opened on the end plate 31, and then glue is applied in the connecting hole, and then the end of the cross beam 12 is pressed into the connecting hole to achieve adhesive bonding (silicon carbide ceramic bonding glue is a commercially available product). The prior art does not disclose dedicated adhesive bonding auxiliary equipment, and generally all adhesive bonding processes are completed manually, which results in technical problems such as different pressing forces and different adhesive bonding strengths, which affect the service life of the crystal boat. Summary of the invention

[0003] The purpose of the present invention is to provide a wafer boat adhesive bonding flipping tool, which can effectively solve the problems in the background technology.

[0004] The technical scheme for achieving the above-mentioned purpose is: a wafer boat adhesive bonding turning tool, characterized in that: it includes a workbench, the front side of the workbench is provided with a first end plate pushing station, a crossbeam bottom end alignment station, and a second end plate pushing station arranged in a row, and a crossbeam fixing fixture of the wafer boat is arranged directly above the first end plate pushing station, the crossbeam bottom end alignment station, and the second end plate pushing station, the crossbeam of the wafer boat is arranged in a rectangular shape according to the position of the finished wafer boat, and is respectively and vertically and detachably clamped on the crossbeam fixing fixture, and both ends of the crossbeam of the wafer boat extend out of the crossbeam fixing fixture; The first end plate pushing station is equipped with a first adhesive pushing mechanism for pushing one end plate upward to be glued to one end of the beam, the second end plate pushing station is equipped with a second adhesive pushing mechanism for pushing the other end plate to be hinged to the other end of the beam, and the beam bottom end alignment station is equipped with a beam pushing mechanism for supporting the bottom end of the beam to make the bottom end of the beam flush; The beam fixing fixture is installed on the workbench through a lateral displacement module. A rotary drive mechanism with an output end facing forward is installed on the slider of the lateral displacement module, and the beam fixing fixture is installed at the output end of the rotary drive mechanism.

[0005] Furthermore, the first adhesive pushing mechanism, the second adhesive pushing mechanism, and the crossbeam pushing mechanism are respectively installed on the workbench through linear guides arranged in front and behind, the linear guides include tracks arranged in the left and right, clamps are slidably installed on the tracks, and mounting plates are arranged between the clamps, and the first adhesive pushing mechanism, the second adhesive pushing mechanism, and the crossbeam pushing mechanism are respectively fixedly installed on the corresponding mounting plates.

[0006] Furthermore, the first adhesive pushing mechanism and the second adhesive pushing mechanism have the same structure and both include a first cylinder installed on the corresponding mounting plate. The telescopic end of the first cylinder extends vertically upward from the mounting plate and is connected to a supporting base plate. The end plate of the crystal boat is positioned and detachably supported on the supporting base plate through a crystal boat end plate positioning seat.

[0007] Furthermore, the rotary drive mechanism includes a front-to-back rotating shaft rotatably installed through a bearing seat, and a servo motor driving the rotating shaft to rotate is also installed on the workbench. The front end of the rotating shaft is connected to a vertical fixing plate, and the front side of the vertical fixing plate is installed with T-shaped frames arranged at intervals, and the crossbeam fixing clamp is detachably connected between the T-shaped frames.

[0008] Furthermore, the beam fixing fixture includes two beam plates arranged in parallel and at intervals between T-frames, and two pairs of notches corresponding to the positions of the two beams are respectively opened on the T-frames on both sides, and each pair includes two notches symmetrically arranged on the T-frames on both sides, and the two ends of the beam plate are respectively detachably clamped downward between the corresponding notches and detachably connected to the T-frames, and the outer sides of the two beam plates are respectively provided with beam sub-parts, and two circular holes for clamping the beams are provided between the beam plates and the corresponding beam sub-parts, and the positions of the four circular holes correspond to the positions of the beams of the crystal boat, and tightening bolts are also threadedly connected between the beam plates and the middle parts of the corresponding beam sub-parts.

[0009] Furthermore, a positioning groove matching the size of the end plate is arranged on the wafer boat end plate positioning seat, and the end plate is positioned in the positioning groove.

[0010] Furthermore, a positioning protrusion and a positioning hole for positioning and matching are arranged between the supporting bottom plate and the positioning seat of the wafer boat end plate.

[0011] Furthermore, a positioning connection mechanism is detachably connected between the crystal boat end plate positioning seat and one end of the crystal boat crossbeam close to the corresponding crystal boat end plate positioning seat, the positioning connection mechanism includes two sets of clamping mechanisms, the clamping mechanism includes an inner clamping plate and an outer clamping plate, the inner clamping plates and the outer clamping plates of the two sets of clamping mechanisms are respectively clamped on the two crossbeams on both sides and are connected in the middle by bolts, a circular hole matching the cross section of the crossbeams on both sides is provided between the inner clamping plates and the outer clamping plates, and legs supported on both sides of the corresponding crystal boat end plate positioning seat are provided at both ends of the inner clamping plate, and the legs are detachably connected to the corresponding crystal boat end plate positioning seat.

[0012] The beneficial effects of the present invention are as follows: the present invention can efficiently and conveniently complete the gluing of the crystal boat beam and the end plate with manual assistance, and synchronously press them through cylinder drive during the gluing process to ensure the consistency of the pressing force, improve the gluing quality, and extend the service life of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1is the first stereogram of the invention; Figure 2 is a second stereogram of the invention; Figure 3 A partial schematic diagram of the invention; Figure 4 This is a schematic diagram of the first working state of the invention; Figure 5 This is a schematic diagram of the state of the beam fixing fixture in the beam bottom end alignment process; Figure 6 This is a schematic diagram of the second working state of the invention; Figure 7 This is a schematic diagram of the third working state of the invention; Figure 8 This is a schematic diagram of the fourth working state of the invention. DETAILED DESCRIPTION

[0014] like Figure 1-3 As shown, the present invention discloses a wafer boat adhesive bonding flipping tool, comprising a workbench 1, a first end plate pushing station 2, a crossbeam bottom end alignment station 3, and a second end plate pushing station 4 arranged in a row are arranged on the front side of the workbench 1, a crossbeam fixing fixture 5 is arranged directly above the first end plate pushing station 1, the crossbeam bottom end alignment station 2, and the second end plate pushing station 3, the crossbeam fixing fixture 5 is installed on the workbench 1 through a lateral displacement module 13, a mounting plate 14 is installed on the slider of the lateral displacement module 13, a rotating shaft 15 arranged front and rear is rotatably installed on the mounting plate 14 through a bearing seat, a servo motor (not shown in the figure) for driving the rotating shaft 15 to rotate is also installed on the workbench 1, the front end of the rotating shaft 15 is connected to a vertical fixing plate 16, and two T-shaped frames 17 arranged at intervals are installed on the front side of the vertical fixing plate 16, and the crossbeam fixing fixture 5 can be detached between the T-shaped frames 17.

[0015] The crossbeam fixing fixture 5 includes two crossbeam plates 6 arranged in parallel and spaced apart between T-frames 17, two pairs of notches 41 corresponding to the positions of the two crossbeams are respectively opened on the T-frames 17 on both sides, and each pair includes two notches 41 symmetrically arranged on the T-frames 17 on both sides, and the two ends of the crossbeam plate 6 are respectively detachably clamped downward between the corresponding notches 41, and the two ends of the crossbeam plate 6 are detachably connected to the T-frame 14 through the first buckle 42, and the outer sides of the two crossbeam plates 6 are respectively provided with crossbeam sub-components 7, and two circular holes 40 for clamping the crossbeams are respectively provided between the crossbeam plate 6 and the corresponding crossbeam sub-component 7, and the positions of the four circular holes 40 correspond to the positions of the crossbeams 12 of the crystal boat, and a tightening bolt 11 is also threadedly connected between the crossbeam plate 6 and the middle part of the corresponding crossbeam sub-component 7.

[0016] The first end plate pushing station 2 is equipped with a first adhesive pushing mechanism 19 for pushing one of the end plates 18 upward to be glued to one end of the beam 12; the second end plate pushing station 3 is equipped with a second adhesive pushing mechanism 20 for pushing the other end plate to be hinged to the other end of the beam; the beam bottom end alignment station is equipped with a beam pushing mechanism 21 for pushing the bottom end of the beam to be flush.

[0017] The first adhesive pushing mechanism 19, the second adhesive pushing mechanism 20, and the crossbeam pushing mechanism 21 are respectively installed on the workbench 1 through linear guides arranged in front and back, and the linear guides include tracks 22 arranged in the left and right, and clamps 23 are slidably installed on the tracks 22, and mounting plates 24 are arranged between the clamps 23. The first adhesive pushing mechanism 19, the second adhesive pushing mechanism 20, and the crossbeam pushing mechanism 21 are respectively fixedly installed on the mounting plates 24 of the corresponding linear guides.

[0018] The first adhesive pushing mechanism 19 , the second adhesive pushing mechanism 20 , and the crossbeam pushing mechanism 21 can be adjusted forward and backward along the corresponding track 22 through the clamp 23 . After the adjustment is completed, the position is locked through the clamp 23 .

[0019] The first adhesive pushing mechanism 19 and the second adhesive pushing mechanism 20 have the same structure and both include a first cylinder 25 installed on a corresponding mounting plate 24. The telescopic end of the first cylinder 25 extends vertically upward from the mounting plate 24 and is connected to a supporting base plate 26. The supporting base plate 26 is used to position and support a crystal boat end plate positioning seat 27. A positioning protrusion 28 is provided on the supporting base plate 26. A positioning hole 29 matching the positioning protrusion 28 is provided at the bottom of the crystal boat end plate positioning seat 27. A positioning groove 30 matching the size of the end plate is provided on the crystal boat end plate positioning seat 27. The end plate 31 is positioned in the positioning groove 30.

[0020] The beam pushing mechanism 21 includes a second cylinder 32 mounted on the corresponding mounting plate 24 . The telescopic end of the second cylinder 32 vertically extends upward from the mounting plate 24 and is connected to an upper plate 33 .

[0021] Furthermore, the workbench 1 is provided with a square hole 43 corresponding to the upper and lower positions of the first cylinder 25 and the second cylinder 32. The lower parts of the first cylinder 25 and the second cylinder 32 are located in the square hole 43. The size of the square hole 43 is larger than the cross-section of the first cylinder 25 and the second cylinder 32, so that the first cylinder 25 and the second cylinder 32 can adjust their positions forward and backward.

[0022] A positioning connection mechanism 34 is detachably connected between the crystal boat end plate positioning seat 27 and one end of the crystal boat cross beam 12 close to the corresponding crystal boat end plate positioning seat 27. The positioning connection mechanism 34 includes two sets of clamping mechanisms 35. The clamping mechanism 35 includes an inner clamping plate 36 and an outer clamping plate 37. The inner clamping plates 36 and the outer clamping plates 37 of the two sets of clamping mechanisms are respectively clamped on the two cross beams 12 on both sides and are connected in the middle by bolts. A circular hole matching the cross section of the cross beams 12 on both sides is provided between the inner clamping plates 36 and the outer clamping plates 37. Support legs 38 supported on both sides of the corresponding crystal boat end plate positioning seat 27 are provided at both ends of the inner clamping plates 36. The support legs 38 are detachably connected to the corresponding crystal boat end plate positioning seat 27. Specifically, a commonly used detachable connection structure such as bolts can be adopted. In this embodiment, a second buckle 39 is adopted for detachable connection.

[0023] , the working process of the present invention: 1) If Figure 4-5 As shown, the beam fixing fixture 5 is driven to move to the bottom end of the beam alignment station 3, and the second cylinder 32 is started to drive the upper plate 33 to move to a high position (the height of different products can be adjusted). At this time, the two beam plates 6 are provided with the notches 41 on one side facing upwards, and the two beam plates 6 are manually placed between the corresponding notches 41 of the T-frame 14, and the first buckles 42 between the T-frame 14 and the beam plates 6 are fastened. The four beams 12 of the crystal boat are respectively inserted into the circular holes 40 between the beam plates 6 on both sides and the corresponding beam sub-components 7, and the lower end of the beam 12 is close to the upper plate 33, and the tightening bolts 11 are tightened to lock the beam 12. The second cylinder 32 is lowered, and the process of aligning the bottom end of the beam to the station 3 is completed.

[0024] 2) If Figure 6 As shown, the lateral displacement module 13 drives the four aligned beams 12 to move to the first end plate pushing station 2, and at the same time, one of the end plates is placed in the crystal boat end plate positioning seat 27, and glue is applied to the connecting holes on the end plate. Then, the crystal boat end plate positioning seat 27 is positioned on the supporting bottom plate 26 of the first end plate pushing station 2, and then the end plate 31 on the crystal boat end plate positioning seat 27 is driven upward by the first cylinder 25 on the first end plate pushing station 2, and the connecting holes on the end plate 31 are pressed one by one against the lower end of the beam 12.

[0025] 3) If Figure 7 As shown, the clamping mechanism 35 is connected between the wafer boat end plate positioning seat 27 and the cross beams 12 on both sides to achieve position fixation between the cross beam 12 and the lower end plate 31 .

[0026] 4) If Figure 8As shown, similarly, the lateral displacement module 13 drives the beam 12 connected to the lower end plate 31 to move to the second end plate pushing station 4, and then the servo motor drives the beam fixing fixture 5 to rotate 180 degrees, so that the end of the beam that is not connected to the end plate is downward, and the other end plate 31 is placed in the crystal boat end plate positioning seat 27, and glue is applied to the connecting hole on the end plate 31, and then the crystal boat end plate positioning seat 27 is positioned and set on the supporting bottom plate 26 of the second end plate pushing station 42, and then the first cylinder 25 on the second end plate pushing station 4 drives the end plate 31 on the crystal boat end plate positioning seat 27 upward, and the connecting holes on the end plate 31 are pressed one by one against the lower end of the beam 12.

[0027] The clamping mechanism 35 is connected between the wafer boat end plate positioning seat 27 on the second end plate pushing station 4 and the cross beams 12 on both sides to achieve position fixation between the cross beam 12 and the lower end plate 31, thereby completing the fixation.

[0028] 5) Open the first buckle 42, remove the wafer boat that has been glued and positioned, then remove the crossbeam fixing fixture 5, and remove the clamping mechanism 35 after the glue is cured.

Claims

1. A wafer boat adhesive bonding and flipping tool, characterized by: The workbench comprises a workbench, the front side of which is provided with a first end plate pushing station, a crossbeam bottom end alignment station, and a second end plate pushing station arranged in a row, a crossbeam fixing fixture of a crystal boat is provided directly above the first end plate pushing station, the crossbeam bottom end alignment station, and the second end plate pushing station, the crossbeam of the crystal boat is arranged in a rectangular shape according to the position of the finished crystal boat, and is respectively and vertically and detachably clamped on the crossbeam fixing fixture, and both ends of the crossbeam of the crystal boat extend out of the crossbeam fixing fixture; The first end plate pushing station is equipped with a first adhesive pushing mechanism for pushing one end plate upward to be glued to one end of the beam, the second end plate pushing station is equipped with a second adhesive pushing mechanism for pushing the other end plate to be hinged to the other end of the beam, and the beam bottom end alignment station is equipped with a beam pushing mechanism for supporting the bottom end of the beam to make the bottom end of the beam flush; The beam fixing fixture is installed on the workbench through a lateral displacement module. A rotary drive mechanism with an output end facing forward is installed on the slider of the lateral displacement module, and the beam fixing fixture is installed at the output end of the rotary drive mechanism.

2. The wafer boat adhesive bonding and flipping tool according to claim 1, characterized in that: The first adhesive pushing mechanism, the second adhesive pushing mechanism and the crossbeam pushing mechanism are respectively installed on the workbench through linear guides arranged in front and back, the linear guides include tracks arranged in left and right, clamps are slidably installed on the tracks, and mounting plates are arranged between the clamps. The first adhesive pushing mechanism, the second adhesive pushing mechanism and the crossbeam pushing mechanism are respectively fixedly installed on the corresponding mounting plates.

3. The wafer boat adhesive bonding and flipping tool according to claim 1, characterized in that: The first adhesive pushing mechanism and the second adhesive pushing mechanism have the same structure and both include a first cylinder mounted on a corresponding mounting plate. The telescopic end of the first cylinder extends vertically upward from the mounting plate and is connected to a supporting base plate. The end plate of the crystal boat is positioned and detachably supported on the supporting base plate through a crystal boat end plate positioning seat.

4. The wafer boat adhesive bonding and flipping tool according to claim 3, characterized in that: The rotary drive mechanism includes a front-to-back rotating shaft rotatably installed through a bearing seat, and a servo motor driving the rotating shaft to rotate is also installed on the workbench. The front end of the rotating shaft is connected to a vertical fixing plate, and the front side of the vertical fixing plate is installed with T-shaped frames arranged at intervals. The crossbeam fixing clamp is detachably connected between the T-shaped frames.

5. The wafer boat adhesive bonding and flipping tool according to claim 4, characterized in that: The crossbeam fixing fixture includes two crossbeam plates arranged in parallel and at intervals between T-frames. Two pairs of notches corresponding to the positions of the two crossbeams are respectively opened on the T-frames on both sides, and each pair includes two notches symmetrically arranged on the T-frames on both sides. The two ends of the crossbeam plate are respectively detachably clamped downward between the corresponding notches and detachably connected to the T-frames. Crossbeam sub-parts are respectively provided on the outer sides of the two crossbeam plates. Two circular holes for clamping the crossbeams are respectively provided between the crossbeam plates and the corresponding crossbeam sub-parts. The positions of the four circular holes correspond to the positions of the crossbeams of the crystal boat. Tightening bolts are also threadedly connected between the crossbeam plates and the middle parts of the corresponding crossbeam sub-parts.

6. The wafer boat adhesive bonding and flipping tool according to claim 3, characterized in that: The wafer boat end plate positioning seat is provided with a positioning groove that matches the size of the end plate, and the end plate is positioned in the positioning groove.

7. The wafer boat adhesive bonding and flipping tool according to claim 3, characterized in that: A positioning protrusion and a positioning hole for positioning and matching are arranged between the supporting bottom plate and the positioning seat of the wafer boat end plate.

8. The wafer boat adhesive bonding and flipping tool according to claim 3, characterized in that: A positioning connection mechanism is detachably connected between the crystal boat end plate positioning seat and one end of the crystal boat crossbeam close to the corresponding crystal boat end plate positioning seat, and the positioning connection mechanism includes two sets of clamping mechanisms, and the clamping mechanism includes an inner clamping plate and an outer clamping plate. The inner clamping plates and the outer clamping plates of the two sets of clamping mechanisms are respectively clamped on the two crossbeams on both sides and are connected in the middle by bolts. A circular hole matching the cross section of the crossbeams on both sides is provided between the inner clamping plates and the outer clamping plates, and legs supported on both sides of the corresponding crystal boat end plate positioning seat are provided at both ends of the inner clamping plate, and the legs are detachably connected to the corresponding crystal boat end plate positioning seat.

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