Spectrometer and testing method of spectrometer

Abstract

The invention discloses a spectrograph and a testing method of the spectrograph, and the spectrograph comprises a spectrograph main body which is internally provided with a vacuum cavity; the at least one optical element is mounted in the vacuum cavity, and an optical path is formed on the at least one optical element; the device comprises a vacuum cavity, a gas discharge light source, a slit assembly and a detector assembly, the gas discharge light source, the slit assembly and the detector assembly are all installed outside the vacuum cavity, and light emitted by the gas discharge light source enters the vacuum cavity after passing through the slit assembly and enters the detector assembly after being emitted along an optical path. The spectrograph provided by the embodiment of the invention can be used for carrying out spectral analysis on ultraviolet light, the application range of the spectrograph can be enlarged, and light rays emitted by the gas discharge light source can enter the vacuum cavity after passing through the slit assembly and then enter the detector assembly after being propagated along an optical path in the vacuum cavity; therefore, the spectral analysis function of the spectrograph is realized or the accuracy, the resolution ratio and the like of the spectrograph are evaluated.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrometers, and in particular to a spectrometer and a testing method suitable for the spectrometer. Background Art

[0002] As a scientific instrument, the spectrometer can be used to measure the spectrum of substances. However, existing spectrometers can usually only perform spectral analysis on infrared light, and their application scope is small, so there is room for improvement. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a spectrometer, which can be used to perform spectral analysis on ultraviolet light, which can increase the scope of application of the spectrometer, help improve user satisfaction, and realize the spectral analysis function of the spectrometer or evaluate the accuracy and resolution of the spectrometer.

[0004] A spectrometer according to an embodiment of the present invention comprises: a spectrometer body, wherein a vacuum cavity is formed in the spectrometer body; at least one optical element, wherein at least one of the optical elements is installed in the vacuum cavity, and wherein at least one of the optical elements forms an optical path; a gas discharge light source, a slit assembly, and a detector assembly, wherein the gas discharge light source, the slit assembly, and the detector assembly are all installed outside the vacuum cavity, and light emitted by the gas discharge light source is suitable for entering the vacuum cavity after passing through the slit assembly, and entering the detector assembly after being emitted along the optical path.

[0005] According to the spectrometer of the embodiment of the present invention, a vacuum cavity is formed in the main body of the spectrometer so that ultraviolet light can propagate in the vacuum cavity, and the spectrometer can be used to perform spectral analysis on ultraviolet light, which can increase the application range of the spectrometer and help improve user satisfaction. In addition, by arranging a gas discharge light source, a slit assembly, at least one optical element and a detector assembly, the light emitted by the gas discharge light source can enter the vacuum cavity after passing through the slit assembly, and enter the detector assembly after propagating along an optical path formed by at least one optical element in the vacuum cavity, and be converted into an electrical signal in the detector assembly to realize the spectral analysis function of the spectrometer or evaluate the accuracy and resolution of the spectrometer.

[0006] According to the spectrometer of some embodiments of the present invention, the slit assembly is formed with an incident light slit, the light emitted by the gas discharge light source is suitable for entering the vacuum chamber after passing through the incident light slit, and the width of the incident light slit is set to be adjustable.

[0007] In the spectrometer according to some embodiments of the present invention, the width of the incident light slit is D, and satisfies: 5 μm≤D≤300 μm.

[0008] In the spectrometer according to some embodiments of the present invention, there are three optical elements, namely a grating component and two parabolic mirror components. The light at the incident light slit is suitable for being reflected from one of the parabolic mirror components to the grating component, and after being reflected from the grating component, is reflected from another of the parabolic mirror components to the detector component.

[0009] According to some embodiments of the spectrometer of the present invention, the optical element satisfies: d(sini±sinθ)=mλ, d(cosα0+cosα x )=mλ, or i+α0=90°,θ+α x =90°; where d is the grating constant, λ is the diffraction wavelength, m is the diffraction order, i is the incident angle, θ is the diffraction angle, a is the slit width, n is the number of grating lines, f1 is the focal length of the collimator, α0 is the angle between the incident light and one end of the grating plane, α x is the angle formed by the diffracted light and one end of the grating plane, β is the minimum angle between the incident light and the diffracted light, and (λ1, λ2) is the spectral range.

[0010] The spectrometer according to some embodiments of the present invention further includes a laser collimation assembly, which is installed between the gas discharge light source and the slit assembly, and the laser collimation assembly is detachable relative to the spectrometer body; wherein the laser collimation assembly has a normal state and a reverse state, and is used to calibrate the light path on one side of the slit assembly in the normal state, and is used to calibrate the light path on one side of the gas discharge light source in the reverse state.

[0011] According to some embodiments of the spectrometer of the present invention, the spectrometer body includes a vacuum housing and a mounting base, the vacuum housing is movably mounted above the mounting base, and the vacuum chamber is formed in the vacuum housing.

[0012] According to some embodiments of the spectrometer of the present invention, the vacuum housing includes an upper housing and an adjustment base plate, the upper housing is connected to the adjustment base plate and together define the vacuum chamber, and the adjustment base plate is adjustably connected to the mounting base via a six-dimensional adjustment mechanism.

[0013] According to some embodiments of the spectrometer of the present invention, the upper shell forms a chamber, the chamber is open toward the adjustment base plate, the adjustment base plate is provided with a sealing groove on a side facing the upper shell, and the sealing groove is connected to the chamber to jointly define the vacuum chamber.

[0014] According to the spectrometer of some embodiments of the present invention, the spectrometer body is further formed with a vacuum port, the vacuum port is communicated with the vacuum chamber, and the vacuum port is suitable for being externally connected to a vacuum pump.

[0015] According to the spectrometer of some embodiments of the present invention, there are multiple vacuum ports, and the multiple vacuum ports are distributed at intervals; and / or the vacuum ports are arranged on a side of the vacuum chamber away from the slit assembly.

[0016] The invention also provides a testing method for the spectrometer.

[0017] According to the testing method of the spectrometer of the present invention, the testing method is applicable to the spectrometer described in any one of the above embodiments, and the testing method includes: presetting test parameters for the spectrometer; turning on the gas discharge light source to discharge along the optical path; collecting and analyzing the acquired spectrum to perform performance evaluation on the spectrometer.

[0018] According to the testing method of the spectrometer of the present invention, the presetting of the testing parameters for the spectrometer includes: presetting the scanning range, resolution, and integration time in the software of the spectrometer.

[0019] According to the testing method of the spectrometer of the present invention, starting the gas discharge light source includes: fine-tuning the voltage and current of the gas discharge light source, and making the gas discharge light source reach a stable discharge state.

[0020] According to the testing method of the spectrometer of the present invention, the collecting and analyzing the spectrum acquired by the detector assembly includes: comparing the collected spectrum with a standard discharge spectrum database of the gas discharge light source.

[0021] According to the testing method of the spectrometer of the present invention, the performance evaluation of the spectrum includes: evaluating the resolution of the spectrometer according to the characteristic peak spacing of the gas discharge light source.

[0022] According to the testing method of the spectrometer of the present invention, the testing method further comprises: performing performance verification on the spectrometer.

[0023] According to the testing method of the spectrometer of the present invention, the performance verification of the spectrometer includes: calibrating the incident light slit of the slit assembly; calibrating the spectrum of the gas discharge light source; and calibrating the resolution of the incident light slits with different opening widths.

[0024] The testing method of the spectrometer has the same advantages as the above-mentioned spectrometer over the prior art, and will not be described in detail here.

[0025] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0027] Figure 1 is a schematic structural diagram of a spectrometer according to an embodiment of the present invention;

[0028] Figure 2 is a partial schematic diagram of a spectrometer according to an embodiment of the present invention;

[0029] Figure 3 FIG. 1 is a schematic diagram of the installation positions of the laser collimation assembly and the slit assembly according to an embodiment of the present invention. Figure 1 ;

[0030] Figure 4 FIG. 1 is a schematic diagram of the installation positions of the laser collimation assembly and the slit assembly according to an embodiment of the present invention. Figure 2 ;

[0031] Figure 5 is a schematic diagram of an optical path of a spectrometer according to an embodiment of the present invention;

[0032] Figure 6 is a schematic diagram of a testing method of a spectrometer according to the present invention;

[0033] Figure 7 is a schematic diagram of performance verification of a testing method for a spectrometer according to the present invention;

[0034] Figure 8 is a data fitting diagram of slit calibration according to the testing method of the spectrometer of the present invention;

[0035] Fig. 9 is a spectrum calibration result diagram of the testing method of the spectrometer according to the present invention;

[0036] Fig.10 is a data fitting diagram of incident light slit and resolution according to the testing method of the spectrometer of the present invention;

[0037] Fig.11 It is a wavelength resolution calibration curve of the testing method of the spectrometer according to the present invention.

[0038] Reference numerals:

[0039] Spectrometer 100,

[0040] Spectrometer body 1, vacuum housing 12, upper housing 121, adjusting bottom plate 122, sealing groove 124, mounting base 13, vacuum extraction port 14, light inlet 15, light outlet 16,

[0041] Optical element 2, grating assembly 21, grating 211, grating clamping assembly 212, parabolic mirror assembly 22, parabolic mirror 221, parabolic mirror clamping assembly 222,

[0042] Slit assembly 3, incident light slit 31, detector assembly 4, detector 41, support adjustment device 42,

[0043] Laser alignment assembly 5 , laser pen 51 , mounting bracket 52 , and adjusting screw 6 . DETAILED DESCRIPTION

[0044] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0045] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0046] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] Reference below Figure 1-Figure 11A spectrometer 100 according to an embodiment of the present invention is described. By forming a vacuum cavity in the spectrometer body 1, ultraviolet light can propagate in the vacuum cavity, and the spectrometer 100 can be used to perform spectral analysis on ultraviolet light, which can increase the application scope of the spectrometer 100 and help improve user satisfaction. In addition, by arranging a gas discharge light source, a slit assembly 3, at least one optical element 2 and a detector assembly 4, the light emitted by the gas discharge light source can enter the vacuum cavity after passing through the slit assembly 3, and enter the detector assembly 4 after propagating along the optical path formed by at least one optical element 2 in the vacuum cavity, and is converted into an electrical signal in the detector assembly 4 to realize the spectral analysis function of the spectrometer 100 or evaluate the accuracy and resolution of the spectrometer 100.

[0048] like Figure 1-Figure 4 As shown, a spectrometer 100 according to an embodiment of the present invention includes: a spectrometer body 1, at least one optical element 2, a gas discharge light source, a slit assembly 3 and a detector assembly 4.

[0049] A vacuum cavity is formed in the spectrometer body 1; at least one optical element 2 is installed in the vacuum cavity, and at least one optical element 2 forms an optical path; a gas discharge light source, a slit assembly 3 and a detector assembly 4 are all installed outside the vacuum cavity, and the light emitted by the gas discharge light source is suitable for passing through the slit assembly 3 to enter the vacuum cavity, and enter the detector assembly 4 after being emitted along the optical path.

[0050] Specifically, the spectrometer 100 is used to perform spectral analysis on light. The spectrometer body 1 serves as the shell structure of the spectrometer 100, and can be used to install and protect some components in the spectrometer 100. A vacuum cavity is formed in the spectrometer body 1. The vacuum cavity is a vacuum environment, which can be used to prevent ultraviolet light from being strongly absorbed by certain molecules in the air, that is, the vacuum cavity allows ultraviolet light to propagate inside it, so that the spectrometer 100 can be used to perform spectral analysis on ultraviolet light, so as to increase the scope of application of the spectrometer 100 and help improve user satisfaction.

[0051] It should be noted that light with a wavelength in the range of 115nm to 200nm will be strongly absorbed by certain molecules in the air and can only propagate in a vacuum environment. Light with a wavelength in the range of 115nm to 200nm is in the ultraviolet band. A vacuum cavity is formed in the spectrometer body 1, so that light in this wavelength range can propagate in the vacuum cavity, thereby realizing the use of the spectrometer 100 in the ultraviolet band, thereby increasing the scope of application of the spectrometer 100.

[0052] At the same time, an optical element 2 is installed in the vacuum chamber. The optical element 2 can be used to decompose, transmit and focus the optical signal, so as to facilitate accurate spectral analysis through the spectrometer 100. The optical element 2 is set in the vacuum chamber, that is, the optical element 2 can be set in the spectrometer body 1, so that the spectrometer body 1 can install and protect the optical element 2 to avoid damage and failure of the optical element 2 due to collision. The spectrometer 100 includes at least one optical element 2, that is, the number of optical elements 2 can be one, two or three, etc., so that the optical signal can be processed by at least one optical element 2 in the spectrometer 100 in turn to improve the accuracy of the spectrometer 100. Moreover, at least one optical element 2 forms an optical path, so that the light entering the vacuum chamber can propagate along the optical path formed by the optical element 2 to ensure the accuracy of the light propagation direction.

[0053] In addition, the spectrometer 100 also includes a gas discharge light source, a slit assembly 3 and a detector assembly 4. The gas discharge light source serves as a light source for emitting light. The slit assembly 3 is used to limit the width of the light beam passing through, ensuring that only a very narrow light beam can enter the spectrometer 100, thereby improving the resolution of the spectrometer 100. Moreover, the light emitted by the gas discharge light source is suitable for passing through the slit assembly 3 and entering the vacuum chamber, and entering the detector assembly 4 after being emitted along the optical path, that is, the light emitted by the gas discharge light source can first be irradiated to the slit assembly 3, enter the vacuum chamber after passing through the slit assembly 3, propagate along the optical path formed by at least one optical element 2 and enter the detector assembly 4 after being processed. The detector assembly 4 is used to detect and measure light signals, and convert light signals into electrical signals for further analysis and processing, which can facilitate the formation of a spectrum to realize the spectral analysis function of the spectrometer 100.

[0054] It should be noted that the gas discharge light source can also be used as a standard light source for evaluating the accuracy and resolution of the spectrometer 100, and the gas discharge light source, the slit assembly 3 and the detector assembly 4 are all arranged outside the vacuum chamber, that is, the gas discharge light source, the slit assembly 3 and the detector assembly 4 are all separated and distributed from the optical element 2 to avoid any one of the gas discharge light source, the slit assembly 3 or the detector assembly 4 from blocking the optical element 2, resulting in a change in the optical path, and further resulting in a reduction in the accuracy of the spectrometer 100 or the spectrometer 100 cannot be used normally.

[0055] And, if Figure 1As shown, a light inlet 15 and a light outlet 16 are provided on the spectrometer body 1, the light inlet 15 allows light to enter, and the light outlet 16 allows light to exit, and the slit assembly 3 is arranged opposite to the light inlet 15, and the detector assembly 4 is arranged opposite to the light outlet 16, so that the light emitted by the gas discharge light source passes through the slit assembly 3, enters the vacuum chamber from the light inlet 15, is processed by at least one optical element 2 in the vacuum chamber, and is emitted from the light outlet 16 to the detector assembly 4, and is converted from an optical signal to an electrical signal in the detector assembly 4 to form a spectrum.

[0056] According to the spectrometer 100 of the embodiment of the present invention, a vacuum cavity is formed in the spectrometer body 1, so that ultraviolet light can propagate in the vacuum cavity, and then the spectrometer 100 can be used to perform spectral analysis on ultraviolet light, which can increase the application scope of the spectrometer 100 and help improve user satisfaction. In addition, by arranging a gas discharge light source, a slit assembly 3, at least one optical element 2 and a detector assembly 4, the light emitted by the gas discharge light source can enter the vacuum cavity after passing through the slit assembly 3, and enter the detector assembly 4 after propagating along the optical path formed by at least one optical element 2 in the vacuum cavity, and is converted into an electrical signal in the detector assembly 4, so as to realize the spectral analysis function of the spectrometer 100 or evaluate the accuracy and resolution of the spectrometer 100.

[0057] In some embodiments, the slit assembly 3 is formed with an incident light slit 31 , and the light emitted by the gas discharge light source is suitable for entering the vacuum chamber after passing through the incident light slit 31 , and the width of the incident light slit 31 is set to be adjustable.

[0058] Specifically, the slit assembly 3 is formed with an incident light slit 31, and the incident light slit 31 has a certain width for limiting the width of the light beam that can pass through, ensuring that only a very narrow light beam can enter the spectrometer 100, that is, the incident light slit 31 can be used to filter the light beam to improve the resolution of the spectrometer 100, and the width of the incident light slit 31 is constructed to be adjustable, that is, the width of the incident light slit 31 can be changed to adjust the light flux, so that the spectrometer 100 can adapt to different measurement requirements and different sample characteristics, and can be beneficial to improving the resolution of the spectrometer 100, and can allow the user to adjust the width of the incident light slit 31 according to the specific experimental design or sample characteristics, which can improve the flexibility of the use of the spectrometer 100.

[0059] Furthermore, the light emitted by the gas discharge light source can enter the vacuum chamber after passing through the incident light slit 31, that is, the light emitted by the gas discharge light source can first be irradiated to the slit assembly 3, enter the vacuum chamber after being filtered by the incident light slit 31, and enter the detector assembly 4 after propagating along the optical path in the vacuum chamber, so as to realize the spectral analysis function of the spectrometer 100 or evaluate the accuracy and resolution of the spectrometer 100.

[0060] In some embodiments, the width of the incident light slit 31 is D, and satisfies: 5 μm≤D≤300 μm.

[0061] Specifically, the width of the incident light slit 31 can be adjusted within a certain range, and the incident light slit 31 should not be too wide or too narrow. An incident light slit 31 that is too wide is not conducive to improving the resolution of the spectrometer 100, and an incident light slit 31 that is too narrow will cause a loss of light intensity. The width D of the incident light slit 31 can be set between 5 μm and 300 μm, which can avoid the incident light slit 31 being too wide or too narrow, and the width of the incident light slit 31 can be infinitely adjusted between 5 μm and 300 μm. The width of the incident light slit 31 can be adjusted to adjust the light flux, so that the spectrometer 100 can adapt to different measurement requirements or sample characteristics, and can help improve the resolution of the spectrometer 100.

[0062] In some embodiments, there are three optical elements 2, which are a grating component 21 and two parabolic mirror components 22. The light at the incident light slit 31 is suitable for being reflected to the grating component 21 through a parabolic mirror component 22, and after being reflected by the grating component 21, it is reflected to the detector component 4 through another parabolic mirror component 22.

[0063] Specifically, there are three optical elements 2, which are a grating component 21 and two parabolic mirror components 22, that is, the three optical elements 2 can be arranged inside the vacuum chamber, and the light at the incident light slit 31 is suitable for passing through a parabolic mirror component 22 to be reflected to the grating component 21, and after passing through the grating component 21, it is reflected to the detector component 4 through another parabolic mirror component 22, that is, the light passing through the incident light slit 31 can first reach one of the parabolic mirror components 22, and the divergent light beam is converted into a parallel light beam at the parabolic mirror component 22 and irradiated to the grating component 21, the grating component 21 can convert the complex color light into monochromatic light and irradiate it to another parabolic mirror component 22, and then it can be focused at the parabolic mirror component 22 and irradiated to the detector component 4, and then it can be converted from an optical signal to an electrical signal in the detector component 4 to form a spectrum.

[0064] It should be noted that, Figure 2As shown, the grating assembly 21 includes a grating 211 and a grating clamping assembly 212, the grating 211 is used to convert complex light into monochromatic light, the grating clamping assembly 212 is used to fix the grating 211, and the parabolic mirror assembly 22 includes a parabolic mirror 221 and a parabolic mirror clamping assembly 222, the two parabolic mirrors 221 are both constructed as off-axis parabolic mirrors, one of the parabolic mirrors 221 is used to receive light passing through the slit assembly 3 and convert the divergent light into parallel light, and the other parabolic mirror 221 is used to focus the light, that is, one of the parabolic mirrors 221 can be used as a collimating mirror, and the other parabolic mirror 221 can be used as a focusing mirror, and the parabolic mirror clamping assembly 222 is used to install the parabolic mirror 221.

[0065] Furthermore, the light passes through a parabolic mirror assembly 22, a grating assembly 21 and another parabolic mirror assembly 22 in the vacuum chamber in sequence, and the two parabolic mirror assemblies 22 can be respectively arranged on both sides of the grating assembly 21, and then the collimating mirror can be arranged on the side of the grating assembly 21 facing the slit assembly 3, and the focusing mirror can be arranged on the side of the grating assembly 21 facing the detector assembly 4, so that the light passes through the collimating mirror, the grating 211 and the focusing mirror in sequence, and the three optical elements 2 can be arranged at intervals in the vacuum chamber to ensure that each optical element 2 can work reliably.

[0066] And, if Figure 2 As shown, the detector assembly 4 includes a detector 41 and a support and adjustment device 42 . The detector 41 is used to convert an optical signal into an electrical signal. The detector 41 may be a CCD detector (Charge-Coupled Device). The support and adjustment device 42 is used to install the detector 41 .

[0067] In some embodiments, the optical element 2 satisfies: d(sini±sinθ)=mλ, d(cosα0+cosα x )=mλ, or i+α0=90°,θ+α x =90°; wherein, d is the grating 211 constant, λ is the diffraction wavelength, m is the diffraction order, i is the incident angle, θ is the diffraction angle, a is the slit width, n is the number of lines on the grating 211, f1 is the focal length of the collimator, α0 is the angle formed by the incident light and one end of the grating 211 plane, α x is the angle formed by the diffracted light and one end of the grating 211 plane, β is the minimum angle between the incident light and the diffracted light, and (λ1, λ2) is the spectral range.

[0068] Specifically, in the spectrometer 100, the incident light and the diffracted light at the grating component 21 are very likely to interfere with each other. In order to avoid interference between the incident light and the diffracted light, d(sini±sinθ)=mλ can be set. When i and θ are on the same side of the normal of the grating 211, the left side of the equation is "+"; when i and θ are on the opposite sides of the normal of the grating 211, the left side of the equation is "-". Assuming the spectral range is λ1~λ2 (λ1<λ2), when d, i, and m are the same, the diffraction angle θ corresponding to different λ is also different. When the diffraction angles corresponding to λ1 and λ2 differ too much, the diffracted light will be distributed on both sides of the incident light. At this time, the focusing mirror will receive diffracted light with wavelengths between λ1 and λ2, which will interfere with the incident light.

[0069] Furthermore, in order to determine the position of the diffracted light relative to the incident light and determine the specific conditions for anti-interference, d(cosα0+cosα x )=mλ, where α0 is an acute angle, that is, the value range of α0 is (0, 90°), α x The value range of is (0, 180°). When the incident light and the diffracted light are on the same side of the normal, i+α0=90°, θ+α x =90°, there are sini+sinθ=cosα0+cosα x ; When the incident light and the diffracted light are on the opposite side of the normal, i+α0=90°, θ+(180°-α x )=90°, there are sini-sinθ=cosα0+cosα x At the same time, by comparing α0 and α x The size of can more directly distinguish the position of the diffracted light relative to the incident light, denoted by α x The maximum and minimum values ​​of xmax and α xmin To ensure that all diffracted rays are on the same side of the incident ray, only α xmax <α0 or α xmin >α0, and when α xmax When <α0, it should satisfy When α xmin >α0, it should satisfy

[0070] And, according to the theoretical formula of system resolution Relevant parameters are determined to determine the angle between the incident light and the plane of the grating 211, and then the position of the optical element 2 and the tilt angle of the grating 211 can be designed to effectively avoid interference between the incident light and the diffracted light at the grating 211, which is beneficial to improving the resolution of the spectrometer 100.

[0071] Thus, the curvature and positional relationship of the collimating lens and the focusing lens can be optimized, thereby improving the optical transmission efficiency of the light beam in a vacuum environment and enhancing the sensitivity of the spectrometer 100 .

[0072] In some embodiments, the spectrometer 100 also includes a laser collimation assembly 5, which is installed between the gas discharge light source and the slit assembly 3, and the laser collimation assembly 5 is detachable relative to the spectrometer body 1; wherein the laser collimation assembly 5 has a normal state and a reverse state, and is used to calibrate the light path on one side of the slit assembly 3 in the normal state, and is used to calibrate the light path on one side of the gas discharge light source in the reverse state.

[0073] Specifically, Figure 2-Figure 4 As shown, the laser alignment component 5 is arranged between the gas discharge light source and the slit component 3, that is, the gas discharge light source, the laser alignment component 5 and the slit component 3 can be arranged in sequence, and the laser alignment component 5 is detachable relative to the spectrometer 100, so that the laser alignment component 5 can be easily installed or removed, and the laser alignment component 5 has a normal state and a reverse state, wherein the normal state is to arrange the laser alignment component 5 toward the slit component 3, and the reverse state is to arrange the laser alignment component 5 away from the slit component 3, and then when the state of the laser alignment component 5 is switched, the laser alignment component 5 can be removed, and then turned 180° and reinstalled.

[0074] Furthermore, when the laser collimation component 5 is in the upright state, the laser collimation component 5 can be set toward the slit component 3, so that the laser collimation component 5 can irradiate light toward the slit component 3 to calibrate the light path on one side of the slit component 3, ensuring that the light can be emitted to the detector component 4 under the action of the three optical elements 2; when the laser collimation component 5 is in the reverse state, the laser collimation component 5 can be set away from the slit component 3, so that the laser collimation component 5 can irradiate light toward the gas discharge light source, so as to calibrate the light path on one side of the gas discharge light source, ensuring that the light from the gas discharge light source can irradiate the slit component 3 and enter the vacuum chamber from the incident light slit 31, thereby ensuring the accuracy and reliability of the spectrometer 100.

[0075] It should be noted that, Figure 2-Figure 4As shown, the laser alignment component 5 includes a laser pen 51 and a mounting bracket 52. The laser pen 51 can emit light so as to calibrate the light path on one side of the slit component 3 or the light path on one side of the gas discharge light source when the laser alignment component 5 is in the upright state or the reversed state, respectively. Moreover, after the laser alignment component 5 has finished calibrating the light path, the laser alignment component 5 can be moved to a position staggered from the gas discharge light source and the slit component 3 to avoid the laser alignment component 5 blocking the light of the gas discharge light source, which causes the spectrometer 100 to be unusable or reduce its accuracy. Moreover, the laser alignment component 5 can be detachably installed by means of a pin-pin hole fit, so that the laser alignment component 5 can be mounted upright or reversed to calibrate the light path.

[0076] In some embodiments, the spectrometer body 1 includes a vacuum housing 12 and a mounting base 13 . The vacuum housing 12 is movably mounted above the mounting base 13 , and a vacuum cavity is formed in the vacuum housing 12 .

[0077] Specifically, the spectrometer body 1 includes a vacuum shell 12 and a mounting base 13, and the vacuum shell 12 and the mounting base 13 can jointly form a shell structure of the spectrometer 100. The vacuum shell 12 is installed above the mounting base 13, and the vacuum shell 12 and the mounting base 13 can be distributed in the up and down directions, and the vacuum cavity is formed in the vacuum shell 12, and the three optical elements 2 can be arranged in the vacuum shell 12, so that the vacuum shell 12 can be used to protect the three optical elements 2 to prevent any of the optical elements 2 from being damaged and failing due to collision. At the same time, the mounting base 13 can also be arranged at the bottom of the spectrometer 100, so that the mounting base 13 can be used as a bottom structure to install and support other components of the spectrometer 100.

[0078] In some embodiments, the vacuum housing 12 includes an upper housing 121 and an adjustment base plate 122 . The upper housing 121 is connected to the adjustment base plate 122 and together define a vacuum chamber. The adjustment base plate 122 is adjustably connected to the mounting base 13 via a six-dimensional adjustment mechanism.

[0079] Specifically, the vacuum shell 12 includes an upper shell 121 and an adjusting bottom plate 122. The upper shell 121 can be connected to the adjusting bottom plate 122 to make the vacuum shell 12 a whole, which can improve the overall structural strength of the vacuum shell 12 and improve the reliability of the vacuum shell 12 in protecting the three optical elements 2. The upper shell 121 and the adjusting bottom plate 122 jointly define a vacuum cavity, and the three optical elements 2 can be arranged between the upper shell 121 and the adjusting bottom plate 122, so that the upper shell 121 and the adjusting bottom plate 122 can be used to protect the three optical elements 2 together, which can further improve the reliability of protecting the three optical elements 2.

[0080] It should be noted that, Figure 1 As shown, the upper shell 121 and the adjustment base plate 122 can be distributed in the up and down directions, so that the adjustment base plate 122 can support the three optical elements 2 from the bottom to ensure the reliability of their work. At the same time, the laser collimation assembly 5, the slit assembly 3 and the detector assembly 4 are also installed above the adjustment base plate 122, so that the adjustment base plate 122 can also support the laser collimation assembly 5, the slit assembly 3 and the detector assembly 4 from the bottom to ensure the reliability of their work. The upper shell 121 and the adjustment base plate 122 can be connected by multiple spaced-apart connecting parts. The connection method is simple, reliable and easy to operate.

[0081] Furthermore, the adjustment base plate 122 can be adjustably connected to the mounting base 13 through a six-dimensional adjustment mechanism, that is, the adjustment base plate 122 can be connected above the mounting base 13 to install the adjustment base plate 122, and the adjustment base plate 122 can be movable relative to the mounting base 13, so that the position of the adjustment base plate 122 can be adjusted through the six-dimensional adjustment mechanism, that is, the positions of the adjustment base plate 122 and multiple components located on the adjustment base plate 122 can be adjusted to adjust the overall posture of the spectrometer 100, so that the spectrometer 100 can adapt to different test conditions.

[0082] Among them, it should be noted that the six-dimensional adjustment mechanism can be used to perform precise position adjustment in six degrees of freedom. The adjustment base plate 122 is connected to the mounting base 13 through the six-dimensional adjustment mechanism, so that the adjustment base plate 122 and multiple components located on the adjustment base plate 122 can be adjusted in position relative to the mounting base 13 in six degrees of freedom to adapt to different test conditions, and the six-dimensional adjustment mechanism includes multiple adjustment screws 6, and the multiple adjustment screws 6 can be arranged at intervals along the circumference of the adjustment base plate 122, so that the position of the adjustment base plate 122 can be adjusted simultaneously by multiple adjustment screws 6, which can improve the reliability and stability of adjusting the position of the adjustment base plate 122.

[0083] In some embodiments, the upper shell 121 is formed with a chamber, which is open toward the adjustment base plate 122 . The adjustment base plate 122 is provided with a sealing groove 124 on a side facing the upper shell 121 . The sealing groove 124 is connected to the chamber to jointly define a vacuum chamber.

[0084] Specifically, the upper shell 121 and the adjusting base plate 122 jointly define a vacuum chamber, and the three optical elements 2 are installed in the vacuum chamber, and the upper shell 121 forms a chamber, and the chamber has a certain height and space, which can be used to accommodate the three optical elements 2, and the chamber is opened toward the adjusting base plate 122, that is, when the upper shell 121 is connected to the adjusting base plate 122, the three optical elements 2 can extend from the open side of the chamber to the interior of the chamber, so that the three optical elements 2 can be installed between the upper shell 121 and the adjusting base plate 122 to achieve the installation of the three optical elements 2, and the upper shell 121 and the adjusting base plate 122 can be used to protect the three optical elements 2 together.

[0085] In addition, the sealing groove 124 is used to seal the chamber to ensure that the vacuum chamber can form a vacuum environment. In actual use, a sealing ring or the like can be set in the sealing groove 124 to enhance the sealing effect of the vacuum chamber and ensure that the ultraviolet light can be reliably propagated therein. The sealing groove 124 is set on the side of the adjustment base plate 122 facing the upper shell 121, that is, the sealing groove 124 can be set above the adjustment base plate 122, and the sealing groove 124 is connected to the chamber, that is, the adjustment base plate 122 is connected to the upper shell 121, and the chamber can be sealed to jointly define the vacuum chamber.

[0086] In some embodiments, the spectrometer body 1 is further formed with a vacuum port 14 , which is in communication with the vacuum chamber and is suitable for being connected to an external vacuum pump.

[0087] Specifically, a vacuum cavity is formed in the spectrometer body 1, and the spectrometer body 1 also forms a vacuum extraction port 14, which is connected to the vacuum cavity, that is, the vacuum cavity is connected to the external space through the vacuum extraction port 14, so that the air in the vacuum cavity can be extracted from the vacuum extraction port 14 to form a vacuum environment in the vacuum cavity. At the same time, the vacuum extraction port 14 is suitable for an external vacuum pump, that is, the vacuum pump can be connected to the vacuum extraction port 14, so that the vacuum pump can extract the air in the vacuum cavity from the vacuum extraction port 14, and then ultraviolet light can be transmitted inside it, so as to increase the application range of the spectrometer 100.

[0088] It should be noted that the gas in the vacuum chamber is evacuated by a vacuum pump, so that the vacuum chamber can form a vacuum environment with a vacuum degree of 1E-4Pa, which is conducive to the propagation of ultraviolet light inside.

[0089] In some embodiments, there are multiple vacuum ports 14 , and the multiple vacuum ports 14 are spaced apart and distributed; and / or, the vacuum port 14 is disposed on a side of the vacuum chamber away from the slit assembly 3 .

[0090] Specifically, the vacuum port 14 is used to enable a vacuum pump to extract the air in the vacuum chamber from here. The vacuum port 14 can be set to be multiple, that is, the number of vacuum ports 14 can be two, three or more, so that the air in the vacuum chamber can be extracted from multiple vacuum ports 14 at the same time, which can increase the rate of extracting the air in the vacuum chamber. The multiple vacuum ports 14 are spaced apart and distributed, so that there is a distance between the multiple vacuum ports 14 to avoid interference between the multiple vacuum pumps connected to the multiple vacuum ports 14, resulting in inability to connect to the vacuum ports 14, thereby improving the reliability of extracting the air in the vacuum chamber.

[0091] In such Figure 1 In the illustrated embodiment, there are two vacuum ports 14 , and the two vacuum ports 14 are spaced apart from each other, so that the air in the vacuum chamber can be simultaneously extracted from the two vacuum ports 14 , thereby improving the speed and reliability of extracting the air in the vacuum chamber.

[0092] Furthermore, the vacuum port 14 is disposed on a side of the vacuum chamber away from the slit assembly 3, and the vacuum port 14 and the slit assembly 3 are disposed on different sides of the vacuum chamber, respectively, to avoid interference between the vacuum port 14 and the slit assembly 3, which would cause the spectrometer 100 to be unable to be used normally.

[0093] And, it should be noted that the spectrometer 100 of the present application can realize spectral analysis within the range of 115nm to 400nm, and in actual use, the three optical elements 2 can be designed according to actual use requirements. For example, when a wavelength of 115nm to 400nm and a spectral resolution of ≤1nm@400nm are required, in order to make the spectral resolution and the system acceptance angle higher, an off-axis parabolic mirror can be selected as a collimator and a focusing mirror, and the incident arm can be 250mm, the included angle is 30°, the grating 211 adopts a plane blazed grating, the line is 3001 / mm, the wavelength is 200nm, and the incident angle of the grating 211 is 30°, which can be drawn by software as shown below: Figure 5 As shown in the optical path layout diagram, in order to more intuitively obtain the resolution and spectral flux of the spectrometer 100, simulation analysis can be performed through Zemax software. During the analysis, the light source size can be 50μm, the system receiving angle is 20°, and the detector 41 is placed at 10°.

[0094] The present invention also provides a testing method for the spectrometer 100 .

[0095] like Figure 6 As shown, according to the testing method of the spectrometer 100 of the present invention, the testing method is applicable to the spectrometer 100 of any of the above embodiments, and the testing method includes:

[0096] S10: Preset test parameters for the spectrometer 100.

[0097] Specifically, the spectrometer 100 can be tested when the spectrometer 100 is produced, a new spectrometer 100 is obtained, or the accuracy and sensitivity of the spectrometer 100 are in doubt, so as to judge and evaluate the accuracy and sensitivity of the spectrometer 100. When testing the spectrometer 100, a Penning lamp can be used as a gas discharge light source, and the test parameters can be preset to ensure the consistency of the experiment and the reliability of the results. The test parameters can also be adjusted according to the expected emission spectrum of the gas discharge light source to improve the accuracy of the test.

[0098] S20: Turn on the gas discharge light source to discharge along the optical path.

[0099] Then, after the test parameters are preset and adjusted according to the expected emission spectrum of the gas discharge light source, the test steps can be started. At this time, the gas discharge light source can be turned on so that the gas discharge light source can discharge along the optical path, that is, the light emitted by the gas discharge light source can be propagated along the optical path, ensuring that the light emitted by the gas discharge light source can eventually be emitted to the detector assembly 4.

[0100] S30: Collecting and analyzing the acquired spectrum, and performing performance evaluation on the spectrometer 100 .

[0101] Finally, the detector component 4 can receive the optical signal and convert it into an electrical signal to form a spectrum. At this time, the acquired spectrum can be collected and analyzed, and the performance of the spectrometer 100 can be evaluated based on the collected spectrum. The accuracy and sensitivity of the spectrometer 100 can be judged, and the test of the spectrometer 100 can be completed. The accuracy of the performance evaluation results can be improved by increasing the number of experiments.

[0102] According to the testing method of the spectrometer 100 of the present invention, presetting the testing parameters for the spectrometer 100 includes: presetting the scanning range, resolution, and integration time in the software of the spectrometer 100 .

[0103] Specifically, when testing the spectrometer 100, it is necessary to first preset the test parameters in the spectrometer software to ensure the consistency of the experiment and the reliability of the results. The test parameters that need to be preset include scanning range, resolution, and integration time, etc., and multiple test parameters can be preset at the same time to ensure the consistency of the experiment, which is conducive to reducing errors caused by other factors, and further helps to improve the accuracy of the evaluation results. The method of presetting the test parameters through the spectrometer software can also reduce the influence of human factors and further improve the accuracy of the results.

[0104] According to the testing method of the spectrometer 100 of the present invention, starting the gas discharge light source includes: fine-tuning the voltage and current of the gas discharge light source, and making the gas discharge light source reach a stable discharge state.

[0105] Specifically, after the test parameters are preset and adjusted, the gas discharge light source can be turned on so that the gas discharge light source can discharge along the optical path to test the spectrometer 100. After the gas discharge light source is turned on, the voltage and current of the gas discharge light source can be fine-tuned so that the gas discharge light source can reach a stable discharge state. At this time, the spectral intensity and resolution can reach a better state, which can help ensure the accuracy of the test results, and further ensure the accuracy of the results of the performance evaluation of the spectrometer 100.

[0106] According to the testing method of the spectrometer 100 of the present invention, collecting and analyzing the spectrum acquired by the detector assembly 4 includes: comparing the collected spectrum with a standard discharge spectrum database of the gas discharge light source.

[0107] Specifically, a spectrum can be formed after the gas discharge light source discharges along the optical path. The formed spectrum can be collected by the spectrometer software. During the collection process, it is necessary to monitor whether there is any abnormality or noise interference. Until the collection is completed, the collected spectrum is compared with the standard Penning discharge spectrum database. It can be more clearly seen whether there is a difference between the obtained spectrum and the standard Penning discharge spectrum database, so that the accuracy and sensitivity of the spectrometer 100 can be evaluated based on the comparison results.

[0108] According to the testing method of the spectrometer 100 of the present invention, the performance evaluation of the spectrum includes: evaluating the resolution of the spectrometer 100 according to the characteristic peak spacing of the gas discharge light source.

[0109] Specifically, when evaluating the resolution of the spectrometer 100, the characteristic peak spacing of the Penning lamp can be used to evaluate whether the resolution of the spectrometer 100 meets the standard, that is, two clear and close characteristic peaks are selected, and the distance between the two characteristic peaks is measured. According to the Rayleigh criterion, when the center of one spectral line coincides with the first dark ring of another spectral line, the two spectral lines can just be distinguished. This can be used to determine the minimum resolving power of the spectrometer 100, so as to evaluate the resolution of the spectrometer 100.

[0110] Furthermore, the detection limit and stability of the spectrometer 100 may also be measured by calculating the signal-to-noise ratio of the characteristic peak.

[0111] Therefore, the spectrometer 100 can be evaluated from multiple dimensions, which can effectively improve the accuracy of the evaluation result and the comprehensiveness of the evaluation.

[0112] According to the testing method of the spectrometer 100 of the present invention, the testing method further includes: performing performance verification on the spectrometer 100 .

[0113] Specifically, after the performance evaluation of the spectrometer 100 is completed, the performance of the spectrometer 100 can also be verified. The performance verification is to confirm whether the spectrometer 100 meets the expected performance standards and requirements through a series of tests and evaluations. The accuracy of the evaluation results can be verified through performance verification. In other words, the results of the performance evaluation can be verified through performance verification to confirm the accuracy and reliability of the performance evaluation results.

[0114] like Figure 7 As shown, according to the testing method of the spectrometer 100 of the present invention, the performance verification of the spectrometer 100 includes:

[0115] S40: Calibrate the incident light slit 31 of the slit assembly 3.

[0116] Specifically, the performance verification of the spectrometer 100 includes calibrating the incident light slit 31 of the spectrometer 100. The opening width of the incident light slit 31 will affect the resolution of the spectrometer 100, so it is important to calibrate the incident light slit 31. When calibrating the incident light slit 31, the incident light slit 31 can be tested first, and the test results can be data processed. Then, the opening width of the incident light slit 31 can be calibrated according to the formula y=a1-867.98246*X, wherein X represents the differential head reading of the incident light slit 31, in mm, and the differential head reading can directly reflect the actual width of the incident light slit 31. y represents the opening size of the incident light slit 31, that is, the width of the incident light slit 31, in mm, and a1 is a constant, a1=21883.65. The opening width of the incident light slit 31 can be obtained by calculation, and then the following can be obtained: Figure 8 The slit calibration data fit plot is shown.

[0117] S50: calibrating the spectrum of the gas discharge light source.

[0118] Specifically, the main purpose of calibrating the spectrum of the gas discharge light source is to ensure the accuracy and reliability of the measurement results of the spectrometer 100. When calibrating the spectrum, a 30 mm aperture can be fixed at the light entrance 15 on the side of the incident light slit 31 facing the vacuum chamber. The aperture can be used to control the diameter and shape of the light beam to adapt to the specific optical element 2 or imaging requirements. Then, the parameters are set to make the differential head read 25.15 mm. At this time, the opening width of the incident light slit 31 is about 55 μm, the length of the incident light slit 31 is about 16 mm, and the detector 41 can be Andor DO 920P, pixel is 1024*255, cooling is -10℃, integration time is 1.5s, and then the spectrum test can be performed using a Penning lamp, and wavelength calibration is performed according to the formula λ=a2+b*Pixel+c*Pixel*Pixel to ensure accurate wavelength measurement of the spectrometer 100, where a2=112.16113, b=0.28163, c=5.28126E-6, and Pixel is the pixel of the detector 41, thus the following can be obtained: Fig. 9 The diagram shows the spectrum calibration result. Through the result, the resolution variation of the spectrometer 100 in different wavelength ranges can be intuitively understood.

[0119] S60: calibrating the resolution of the incident light slit 31 with different opening widths.

[0120] Specifically, the resolution of the spectrometer 100 is an important parameter of the spectrometer 100, and the resolution will be affected by the opening width of the incident light slit 31, so the resolution of the incident light slit 31 with different opening widths can be calibrated to ensure the accuracy and reliability of the measurement result of the spectrometer 100. When calibrating the resolution of the incident light slit 31 with different opening widths, the parameters can be set first. The detector 41 can be Andor DO 920P, and the pixel can be 1024*255. At room temperature, the integration time is 0.5s. Then, a Penning lamp is used to perform a spectrum test, and the opening width of the incident light slit 31 is controlled within the range of 34μm to 315μm. It is measured every 20μm or so, and then the opening width and resolution can be fitted to obtain the following: Fig.10 From the fitting curve shown, it can be seen that the resolution is nearly linearly related to the opening width of the incident light slit 31 , and as the opening width of the incident light slit 31 increases, the fitting error also increases.

[0121] And, if Fig.11 The calibration curve of wavelength resolution is shown, which can intuitively show the resolution performance of the spectrometer 100 at different wavelengths.

[0122] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0123] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A spectrometer, characterized in that: include: A spectrometer body, wherein a vacuum cavity is formed in the spectrometer body; at least one optical element, wherein at least one of the optical elements is installed in the vacuum chamber, and at least one of the optical elements forms an optical path; A gas discharge light source, a slit assembly and a detector assembly, wherein the gas discharge light source, the slit assembly and the detector assembly are all installed outside the vacuum chamber, and the light emitted by the gas discharge light source is suitable for passing through the slit assembly to enter the vacuum chamber, and enter the detector assembly after being emitted along the optical path.

2. The spectrometer according to claim 1, characterized in that The slit assembly is formed with an incident light slit, and the light emitted by the gas discharge light source is suitable for entering the vacuum chamber after passing through the incident light slit, and the width of the incident light slit is set to be adjustable.

3. The spectrometer according to claim 2, characterized in that The width of the incident light slit is D, and satisfies: 5 μm≤D≤300 μm.

4. The spectrometer according to claim 2, characterized in that: There are three optical elements, namely a grating component and two parabolic mirror components. The light at the incident light slit is suitable for being reflected to the grating component through one of the parabolic mirror components, and after being reflected by the grating component, it is reflected to the detector component through another of the parabolic mirror components.

5. The spectrometer according to claim 4, characterized in that The optical element satisfies: d(sini±sinθ)=mλ, d(cosα0+cosα x )=mλ, or i+α0=90°,θ+α x =90°; Where d is the grating constant, λ is the diffraction wavelength, m is the diffraction order, i is the incident angle, θ is the diffraction angle, a is the slit width, n is the number of grating lines, f1 is the focal length of the collimator, α0 is the angle between the incident light and one end of the grating plane, and α x is the angle formed by the diffracted light and one end of the grating plane, β is the minimum angle between the incident light and the diffracted light, and (λ1, λ2) is the spectral range.

6. The spectrometer according to claim 1, characterized in that: It also includes a laser collimation assembly, which is installed between the gas discharge light source and the slit assembly, and the laser collimation assembly is detachable relative to the spectrometer body; The laser collimation assembly has a normal state and a reverse state, and is used to calibrate the light path on one side of the slit assembly in the normal state, and is used to calibrate the light path on one side of the gas discharge light source in the reverse state.

7. The spectrometer according to any one of claims 1 to 6, characterized in that: The spectrometer body comprises a vacuum shell and a mounting base. The vacuum shell can be movably mounted above the mounting base, and the vacuum chamber is formed in the vacuum shell.

8. The spectrometer according to claim 7, characterized in that The vacuum housing comprises an upper housing and an adjustment base plate. The upper housing is connected to the adjustment base plate and together define the vacuum chamber. The adjustment base plate is adjustably connected to the mounting base through a six-dimensional adjustment mechanism.

9. The spectrometer according to claim 8, characterized in that The upper shell is formed with a chamber, and the chamber is open toward the adjustment bottom plate. The adjustment bottom plate is provided with a sealing groove on a side facing the upper shell, and the sealing groove is connected to the chamber to jointly define the vacuum chamber.

10. The spectrometer according to claim 1, characterized in that: The spectrometer body is also formed with a vacuum port, which is communicated with the vacuum chamber and is suitable for being connected to an external vacuum pump.

11. The spectrometer according to claim 10, characterized in that: There are multiple vacuum ports, and the multiple vacuum ports are spaced apart and distributed; And / or, the vacuum outlet is arranged on a side of the vacuum chamber away from the slit assembly.

12. A method for testing a spectrometer, characterized in that: The testing method is applicable to the spectrometer according to any one of claims 1 to 11, and the testing method comprises: Preset test parameters for the spectrometer; Turn on the gas discharge light source to discharge along the optical path; The acquired spectra are collected and analyzed, and the performance of the spectrometer is evaluated.

13. The method for testing a spectrometer according to claim 12, characterized in that: The preset test parameters for the spectrometer include: The scanning range, resolution, and integration time are preset in the software of the spectrometer.

14. The method for testing a spectrometer according to claim 12, characterized in that: The starting gas discharge light source comprises: The voltage and current of the gas discharge light source are fine-tuned to make the gas discharge light source reach a stable discharge state.

15. The method for testing a spectrometer according to claim 12, characterized in that: The spectrum acquired by the acquisition and analysis detector assembly includes: The collected spectrum is compared with a standard discharge spectrum database of the gas discharge light source.

16. The method for testing a spectrometer according to claim 12, characterized in that: The performance evaluation of the spectrum comprises: The resolution of the spectrometer is evaluated based on the characteristic peak spacing of the gas discharge light source.

17. The method for testing a spectrometer according to claim 12, characterized in that: The test method also includes: The performance of the spectrometer was verified.

18. The method for testing a spectrometer according to claim 17, characterized in that: The performance verification of the spectrometer comprises: Calibrating the incident light slit of the slit assembly; Calibrate the spectrum of the gas discharge light source; The resolution of the incident light slits with different opening widths is calibrated.

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