A plasma surface particle flow detection probe

Abstract

The present invention relates to the technical field of plasma surface particle flow detection, and discloses a plasma surface particle flow detection probe, comprising: a base, the base is provided with a first mounting hole extending from the top surface to the bottom surface, a first cooling cavity is provided in the base, the first cooling cavity is used to pass a cooling medium, and the first cooling cavity is connected to the first mounting hole; an insulating sleeve, the insulating sleeve is inserted in the first mounting hole; a probe column, the probe column is inserted in the insulating sleeve, one end of the probe column is provided with a probe head for contacting plasma, and the probe column is connected to a wire. The present invention provides a plasma surface particle flow detection probe, which can quickly remove the heat flow deposited in the probe, improve the service life, and can detect for a longer time.

Description

Technical Field

[0001] The invention relates to the technical field of plasma surface particle flow detection, in particular to a plasma surface particle flow detection probe. Background Art

[0002] In a nuclear fusion device, the plasma-facing material is the material exposed to the plasma region. During the operation of the nuclear fusion device, the plasma-facing material at the first wall and the divertor will be bombarded by high-energy ions, electrons and neutral particles, as well as impacted by steady-state and transient strong heat flows. In order to measure the ion saturation flow, electron temperature, electron density and heat flow on the surface of the plasma-facing material at the first wall and the divertor, probes are usually set in the plasma-facing material. The plasma surface particle flow detection probe in the nuclear fusion device has a weak heat load bearing capacity and is prone to failure in a large beam plasma measurement environment.

[0003] At present, high temperature resistant materials such as tungsten, graphite, and carbon fiber composite materials are used at the front end of the probe, but in the case of fusion devices with a capacity of 1~20MW / m 2 It is impossible to carry out long-term detection when the heat flow is too large. It will be ablated, melted, and burned during a short working period, and its service life is short. Summary of the invention

[0004] The purpose of the present invention is to provide a plasma surface particle flow detection probe, which can quickly remove the heat flow deposited in the probe, increase the service life, and enable detection for a longer time.

[0005] In order to achieve the above object, the present invention provides a plasma surface particle flow detection probe, comprising:

[0006] A base, wherein the base is provided with a first mounting hole extending from the top surface to the bottom surface, and a first cooling cavity is provided in the base, the first cooling cavity is used for passing a cooling medium, and the first cooling cavity is connected to the first mounting hole;

[0007] An insulating sleeve, the insulating sleeve being inserted into the first mounting hole;

[0008] A probe column is inserted into the insulating sleeve, one end of the probe column is provided with a probe head for contacting with plasma, and the probe column is connected with a wire.

[0009] Preferably, a plurality of first mounting holes are formed on the base, the insulating sleeve is inserted into each of the first mounting holes, and the probe column is inserted into each of the insulating sleeves.

[0010] Preferably, the plurality of first mounting holes are distributed in a cross shape, the first mounting hole located at the center point of the cross is a central mounting hole, and the central mounting hole is opened on the central axis of the base.

[0011] Preferably, the first cooling cavity includes a plurality of cooling channels, the cooling channels are used to allow cooling medium to pass through, and each of the cooling channels is connected to at least one of the first mounting holes.

[0012] Preferably, the bottom of the base is provided with a plurality of inlets and a plurality of outlets, the inlets are used to introduce cooling medium, the outlets are used to discharge cooling medium, and each of the inlets and outlets is connected to one of the cooling channels;

[0013] A guide plate is installed in the cooling channel, and the guide plate is used to guide the cooling medium introduced from the inlet to flow in sequence to contact the insulating sleeve in each first installation hole and then flow out from the outlet.

[0014] Preferably, a second cooling cavity is further provided in the base, the second cooling cavity is arranged around the first cooling cavity, and the second cooling cavity is used for passing a cooling medium.

[0015] Preferably, it also includes:

[0016] A heat shield, wherein the heat shield is installed on the top of the base, and the heat shield is provided with a second mounting hole extending from the top surface to the bottom surface, the second mounting hole and the first mounting hole are arranged correspondingly, the probe column is inserted into the insulating sleeve and the second mounting hole, and the probe head is arranged at one end of the probe column close to the heat shield.

[0017] Preferably, it also includes:

[0018] A signal terminal is sleeved on the outer side of one end of the probe column away from the probe head, and the signal terminal is used to connect the wire.

[0019] Preferably, it also includes:

[0020] A bottom plate, the bottom plate is connected to the outer peripheral walls of the plurality of insulating sleeves near the bottom ends, and the bottom surface of the bottom plate is flush with the bottom ends of the insulating sleeves in the horizontal direction;

[0021] A ceramic baffle is provided with a plurality of fixing holes, the signal terminals are inserted into the fixing holes, the top ends of the signal terminals are flush with the top surface of the ceramic baffle in the horizontal direction, and the top surface of the ceramic baffle abuts against the bottom surface of the base plate.

[0022] Preferably, it also includes:

[0023] Bolts are passed through the base, the bottom plate and the ceramic baffle in sequence to connect the base, the bottom plate and the ceramic baffle.

[0024] Compared with the prior art, the plasma surface particle flow detection probe of the embodiment of the present invention has the following beneficial effects:

[0025] The probe column is inserted into the insulating sleeve, and the insulating sleeve is inserted into the first mounting hole of the base. After the probe head at one end of the probe column contacts the plasma, the probe column is connected to a wire, which can detect the particle flow, and the heat of the heat flow is deposited from the probe head to the probe column. A cooling medium is introduced into the first cooling cavity of the base, and the cooling medium flows in the first cooling cavity. The first cooling cavity is connected to the first mounting hole, and the cooling medium directly contacts the insulating sleeve inserted in the first mounting hole, indirectly cooling and exchanging heat for the probe column in the insulating sleeve, which can quickly remove the heat deposited in the probe, improve the service life, and enable detection for a longer time. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the structure of a plasma surface particle flow detection probe according to an embodiment of the present invention;

[0027] Figure 2 is a top view of a plasma surface particle flow detection probe according to an embodiment of the present invention;

[0028] Figure 3 is a cross-sectional top view of a base according to an embodiment of the present invention;

[0029] Figure 4 is a cross-sectional perspective view of a base according to an embodiment of the present invention;

[0030] Figure 5 is a cross-sectional perspective view of a base according to another embodiment of the present invention;

[0031] Figure 6 1 is a schematic diagram of the structure of the insulating sleeve, the base plate, the probe column, the signal terminal and the ceramic baffle according to an embodiment of the present invention;

[0032] Figure 7 is an exploded view of the insulating sleeve, the base plate, the probe post, the signal terminal and the ceramic baffle according to the embodiment of the present invention;

[0033] Figure 8 is an exploded view of a plasma surface particle flow detection probe according to an embodiment of the present invention;

[0034] In the figure, 1. insulating sleeve; 2. probe column; 21. probe head; 3. base; 31. first mounting hole; 311. center mounting hole; 32. first cooling chamber; 321. cooling channel; 33. second cooling chamber; 34. inlet; 35. outlet; 4. guide plate; 5. heat shield; 6. signal terminal; 7. bottom plate; 8. ceramic baffle; 81. fixing hole; 9. bolt; 10. inlet pipe; 11. outlet pipe; 12. outlet box. DETAILED DESCRIPTION

[0035] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0036] In the description of the present invention, it should be understood that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0037] In the description of the present invention, it should be understood that the terms "first", "second" and "third" used in the present invention are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance. In addition, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", "longitudinal", "X-axis direction", "Y-axis direction", "Z-axis direction" and the like indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. Moreover, in addition to being used to indicate orientation or position relationship, some of the above terms may also be used to indicate other meanings, such as the term "upper" may also be used to indicate a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to the specific circumstances.

[0038] like Figure 1-7 As shown, a plasma surface particle flow detection probe according to an embodiment of the present invention comprises: a base 3, an insulating sleeve 1 and a probe column 2;

[0039] The base 3 is provided with a first mounting hole 31 extending from the top surface to the bottom surface. A first cooling cavity 32 is provided in the base 3. The first cooling cavity 32 is used to introduce a cooling medium. The first cooling cavity 32 is connected to the first mounting hole 31.

[0040] The insulating sleeve 1 is inserted into the first mounting hole 31;

[0041] The probe column 2 is inserted into the insulating sleeve 1 , one end of the probe column 2 is provided with a probe head 21 for contacting with plasma, and the probe column 2 is connected with a wire.

[0042] It should be noted that the probe column 2 is inserted into the insulating sleeve 1, and the insulating sleeve 1 is inserted into the first mounting hole 31 of the base 3. After the probe head 21 at one end of the probe column 2 contacts the plasma, the probe column 2 is connected with a wire, which can detect the particle flow, and the heat of the heat flow is deposited from the probe head 21 into the probe column 2. A cooling medium is introduced into the first cooling cavity 32 of the base 3, and the cooling medium flows in the first cooling cavity 32. The first cooling cavity 32 is connected to the first mounting hole 31. The cooling medium directly contacts the insulating sleeve 1 inserted in the first mounting hole 31, and indirectly cools and exchanges heat on the probe column 2 in the insulating sleeve 1, which can quickly remove the heat deposited in the probe, improve the service life, and enable detection for a longer time.

[0043] The probe column 2 is made of tungsten, tungsten alloy, graphene and other materials and is a solid cylinder. The diameter of the probe column 2 can be adjusted to be smaller, so that the current collection error is small and more accurate parameters can be obtained.

[0044] The height of the top end of the probe head 21 in the vertical direction Y is not lower than the height of the top end of the insulating sleeve 1 in the vertical direction Y, so as to ensure that the probe head 21 can contact the plasma.

[0045] The cooling medium can be cooling water, cooling gas or other substances capable of cooling and heat exchange.

[0046] The material of the insulating sleeve 1 includes aluminum oxide, boron nitride or sapphire.

[0047] like Figure 1-7 As shown, in a more specific embodiment, a plurality of first mounting holes 31 are formed on the base 3 , an insulating sleeve 1 is inserted into each first mounting hole 31 , and a probe post 2 is inserted into each insulating sleeve 1 .

[0048] It should be noted that a plurality of first mounting holes 31 are provided on the base 3, and a plurality of insulating sleeves 1 are inserted into the plurality of first mounting holes 31 one by one. A probe column 2 is inserted into each insulating sleeve 1, and the plurality of probe columns 2 contact the plasma together to diagnose the data of the particle flow of the overall cross-section of the plasma, and can also measure different parameters of the particle flow, making the detection more comprehensive.

[0049] like Figure 1-7 As shown, in a more specific embodiment, the plurality of first mounting holes 31 are distributed in a cross shape, the first mounting hole 31 located at the center point of the cross is the central mounting hole 311 , and the central mounting hole 311 is opened on the central axis of the base 3 .

[0050] It should be noted that the multiple first mounting holes 31 are distributed in a cross shape, and the first mounting hole 31 located at the center point of the cross is the center mounting hole 311. The center mounting hole 311 is opened on the central axis of the base 3. Therefore, when the probe heads 21 of the multiple probe columns 2 contact the plasma, the radial data on the plasma cross section can be detected with the center mounting hole 311 as the center point.

[0051] The multiple probe columns 2 have high spatial resolution, and the measurement accuracy compensates for each other's errors to dynamically observe the evolution of the plasma in real time, meeting the requirements of complex plasma multi-parameter monitoring, and can also more accurately find the center of the plasma to obtain more accurate parameters.

[0052] The first cooling cavity 32 is cross-shaped, and the center point of the first cooling cavity 32 coincides with the center mounting hole 311. The extension direction of the center point of the first cooling cavity 32 is the same as the extension direction of the multiple first mounting holes 31 with the center mounting hole 311 as the center point, thereby saving space in the first cooling cavity 32 and guiding the cooling medium to flow and contact the insulating sleeve 1 in each first mounting hole 31 more quickly. A straight strip partition is connected between the two opposite sides of the center mounting hole 311 and the two corners of the first cooling cavity 32 symmetrical to its center point, and the straight strip partition divides the first cooling cavity 32 into two cooling channels 321. The guide plate 4 installed in the cooling channel 321 extends in a right angle along the distribution positions of the multiple first mounting holes 31 in sequence.

[0053] The distribution positions of the plurality of first mounting holes 31 can be adjusted according to actual needs.

[0054] like Figure 3-5 As shown, in a more specific embodiment, the first cooling cavity 32 includes a plurality of cooling channels 321 , the cooling channels 321 are used to pass cooling medium, and each cooling channel 321 is connected to at least one first mounting hole 31 .

[0055] It should be noted that the first cooling cavity 32 includes a plurality of cooling channels 321 , and each cooling channel 321 is connected to at least one first mounting hole 31 , that is, the plurality of first mounting holes 31 are split and connected to the plurality of cooling channels 321 .

[0056] Compared with introducing the cooling medium into the entire first cooling cavity 32 , introducing the cooling medium into each cooling channel 321 simultaneously allows all first mounting holes 31 to contact the cooling medium more quickly, thereby improving the efficiency of cooling and heat exchange.

[0057] The plurality of cooling channels 321 may be formed by dividing the first cooling cavity 32 by partitions, or a plurality of cooling channels 321 that are not interconnected may be opened on the base 3 .

[0058] like Figure 3-5 As shown, in a more specific embodiment, a plurality of inlets 34 and a plurality of outlets 35 are provided at the bottom of the base 3, the inlets 34 are used to introduce cooling medium, the outlets 35 are used to discharge cooling medium, and each inlet 34 and outlet 35 are connected to a cooling channel 321;

[0059] A guide plate 4 is installed in the cooling channel 321 , and the guide plate 4 is used to guide the cooling medium introduced from the inlet 34 to flow sequentially to contact the insulating sleeve 1 in each first mounting hole 31 and then flow out from the outlet 35 .

[0060] It should be noted that each inlet 34 and outlet 35 are connected to a cooling channel 321, that is, the cooling medium in each cooling channel 321 is introduced from an inlet 34 and discharged from an outlet 35. The inlet 34 is connected to the inlet pipe 10, and the outlet 35 is connected to the outlet pipe 11. The cooling medium flowing out of multiple outlets 35 can be concentrated and discharged to the outlet box 12 for storage. The outlet box 12 is made of 316 stainless steel. The outlet 35, the outlet pipe 11 and the outlet box 12 can be welded into a whole.

[0061] A guide plate 4 is installed in the cooling channel 321. The guide plate 4 is used to guide the cooling medium introduced from the inlet 34 to flow sequentially to contact the insulating sleeve 1 in each first mounting hole 31 and then flow out from the outlet 35. Therefore, after the cooling medium enters the cooling channel 321 from the inlet 34, it can flow to the vicinity of each first mounting hole 31 along with the turbulent flow of the guide plate 4 to cool the probe column 2 in the insulating sleeve 1, and finally guide it to flow out from the outlet 35 to improve the efficiency of cooling and heat exchange. For example: the two ends of the guide plate 4 are close to the inlet 34 and the outlet 35 respectively, and the guide plate 4 extends from the position close to the inlet 34 to the position close to each first mounting hole 31 in sequence, and finally extends to the position close to the outlet 35.

[0062] like Figure 3-5 As shown, in a more specific embodiment, a second cooling cavity 33 is further provided in the base 3. The second cooling cavity 33 is arranged around the first cooling cavity 32. The second cooling cavity 33 is used for passing cooling medium.

[0063] It should be noted that a second cooling cavity 33 is also provided in the base 3 , and the second cooling cavity 33 is arranged around the first cooling cavity 32 . The cooling medium is introduced into the second cooling cavity 33 to cool and dissipate heat of the base 3 , thereby making full use of the space in the base 3 .

[0064] The first cooling chamber 32 and the second cooling chamber 33 are separated by a partition, or by other separation methods.

[0065] like Figure 1 As shown, in a more specific embodiment, it also includes: a heat shield 5;

[0066] The heat shield 5 is installed on the top of the base 3. The heat shield 5 is provided with a second mounting hole extending from the top surface to the bottom surface. The second mounting hole and the first mounting hole 31 are arranged correspondingly. The probe column 2 is inserted into the insulating sleeve 1 and the second mounting hole. The probe head 21 is arranged at one end of the probe column 2 close to the heat shield 5.

[0067] It should be noted that the probe column 2 is inserted into the insulating sleeve 1, and the probe head 21 is arranged at one end of the probe column 2 close to the heat shield 5, so that when the probe head 21 contacts the plasma, the heat shield 5 can block between the plasma and the base 3, isolating the heat flow, and effectively reducing the influence of the heat flow on the cooling and heat exchange effect in the base 3.

[0068] The height of the top end of the probe head 21 in the vertical direction Y is not lower than the height of the top surface of the heat shield 5 in the vertical direction Y, so as to ensure that the probe head 21 can contact the plasma.

[0069] The material of the heat shield 5 includes high melting point materials such as tungsten or molybdenum.

[0070] like Figure 1 , 6 -7, in a more specific embodiment, further comprising: a signal terminal 6;

[0071] The signal terminal 6 is sleeved on the outer side of one end of the probe column 2 away from the probe head 21 , and the signal terminal 6 is used for connecting a wire.

[0072] It should be noted that the probe column 2 is connected to the wire through the signal terminal 6, which facilitates the connection, disconnection and replacement of the compensation wire. In addition, the wire connected to the signal terminal 6 has good conductivity and stability, which can effectively ensure the normal operation of the circuit and avoid signal interference.

[0073] The material of the signal terminal 6 includes a copper alloy.

[0074] like Figure 6-7 As shown, in a more specific embodiment, it also includes: a bottom plate 7 and a ceramic baffle 8;

[0075] The bottom plate 7 is connected to the outer peripheral wall of the plurality of insulating sleeves 1 near the bottom end, and the bottom surface of the bottom plate 7 is flush with the bottom end of the insulating sleeve 1 in the horizontal direction X;

[0076] The ceramic baffle 8 is provided with a plurality of fixing holes 81 , into which the signal terminals 6 are inserted, the top ends of the signal terminals 6 and the top surface of the ceramic baffle 8 are flush in the horizontal direction X, and the top surface of the ceramic baffle 8 abuts against the bottom surface of the bottom plate 7 .

[0077] It should be noted that a base plate 7 is connected to the outer peripheral wall near the bottom end of the multiple insulating sleeves 1, and the bottom surface of the base plate 7 is flush with the bottom end of the insulating sleeve 1 in the horizontal direction X. The signal terminal 6 is inserted into the fixing hole 81 of the ceramic baffle 8, and the top of the signal terminal 6 is flush with the top surface of the ceramic baffle 8 in the horizontal direction X. The base plate 7 can limit the ceramic baffle 8 and the signal terminal 6 to prevent the probe column 2 from being inserted too deeply into the signal terminal 6, thereby ensuring the stability of the position between the probe column 2, the insulating sleeve 1 and the signal terminal 6.

[0078] The material of the ceramic stopper 8 includes aluminum oxide.

[0079] like Figure 8 As shown, in a more specific embodiment, it also includes: a bolt 9;

[0080] The bolt 9 passes through the base 3 , the bottom plate 7 and the ceramic baffle 8 in sequence to connect the base 3 , the bottom plate 7 and the ceramic baffle 8 .

[0081] It should be noted that the bolt 9 passes through the base 3, the bottom plate 7 and the ceramic baffle 8 in sequence to connect the base 3, the bottom plate 7 and the ceramic baffle 8 to ensure the position stability between the base 3, the insulating sleeve 1 and the signal terminal 6 and improve the heat conduction efficiency.

[0082] When a heat shield 5 is installed on the top of the base 3, the bolt 9 passes through the heat shield 5, the base 3, the bottom plate 7 and the ceramic baffle 8 in sequence to ensure the stability of the position between the heat shield 5, the base 3, the insulating sleeve 1 and the signal terminal 6, thereby improving the heat conduction efficiency.

[0083] The bolts 9 are preferably stainless steel bolts 9 .

[0084] The working process of the present invention is as follows: the probe column 2 is inserted into the insulating sleeve 1, the insulating sleeve 1 is inserted into the first mounting hole 31 of the base 3, and after the probe head 21 at one end of the probe column 2 contacts the plasma, the probe column 2 is connected with a wire, which can detect the particle flow, and the heat of the heat flow is deposited from the probe head 21 into the probe column 2. A cooling medium is introduced into the first cooling cavity 32 of the base 3, and the cooling medium flows in the first cooling cavity 32, the first cooling cavity 32 is connected to the first mounting hole 31, and the cooling medium directly contacts the insulating sleeve 1 inserted in the first mounting hole 31, and indirectly cools and exchanges heat on the probe column 2 in the insulating sleeve 1.

[0085] In summary, the embodiments of the present invention provide a plasma surface particle flow detection probe, which can quickly remove the heat flow deposited in the probe, increase the service life, and enable detection for a longer time.

[0086] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A plasma surface particle flow detection probe, characterized in that: include: A base, wherein the base is provided with a first mounting hole extending from the top surface to the bottom surface, a first cooling cavity is provided in the base, the first cooling cavity is used for introducing a cooling medium, the first cooling cavity is connected to the first mounting hole, a plurality of first mounting holes are provided on the base, an insulating sleeve is inserted in each of the first mounting holes, a probe column is inserted in each of the insulating sleeves, the first cooling cavity includes a plurality of cooling channels, the cooling channels are used for introducing a cooling medium, each of the cooling channels is connected to at least one of the first mounting holes, a plurality of inlets and a plurality of outlets are provided at the bottom of the base, the inlet is used for introducing a cooling medium, the outlet is used for discharging a cooling medium, each of the inlet and the outlet is connected to a cooling channel, a guide plate is installed in the cooling channel, the guide plate is used to guide the cooling medium introduced from the inlet to flow in sequence to contact the insulating sleeve in each first mounting hole and then flow out from the outlet; An insulating sleeve, the insulating sleeve being inserted into the first mounting hole; A probe column is inserted into the insulating sleeve, one end of the probe column is provided with a probe head for contacting with plasma, and the probe column is connected with a wire.

2. The plasma surface particle flow detection probe according to claim 1, characterized in that: The plurality of first mounting holes are distributed in a cross shape, the first mounting hole located at the center point of the cross is a central mounting hole, and the central mounting hole is opened on the central axis of the base.

3. The plasma surface particle flow detection probe according to claim 1, characterized in that: A second cooling cavity is also provided in the base, and the second cooling cavity is arranged around the first cooling cavity, and the second cooling cavity is used for passing a cooling medium.

4. The plasma surface particle flow detection probe according to claim 1, characterized in that: Also includes: A heat shield, wherein the heat shield is installed on the top of the base, and the heat shield is provided with a second mounting hole extending from the top surface to the bottom surface, the second mounting hole and the first mounting hole are arranged correspondingly, the probe column is inserted into the insulating sleeve and the second mounting hole, and the probe head is arranged at one end of the probe column close to the heat shield.

5. The plasma surface particle flow detection probe according to claim 1, characterized in that: Also includes: A signal terminal is sleeved on the outer side of one end of the probe column away from the probe head, and the signal terminal is used to connect the wire.

6. The plasma surface particle flow detection probe according to claim 5, characterized in that: Also includes: A bottom plate, the bottom plate is connected to the outer peripheral walls of the plurality of insulating sleeves near the bottom ends, and the bottom surface of the bottom plate is flush with the bottom ends of the insulating sleeves in the horizontal direction; A ceramic baffle is provided with a plurality of fixing holes, the signal terminals are inserted into the fixing holes, the top ends of the signal terminals are flush with the top surface of the ceramic baffle in the horizontal direction, and the top surface of the ceramic baffle abuts against the bottom surface of the base plate.

7. The plasma surface particle flow detection probe according to claim 6, characterized in that: Also includes: Bolts are passed through the base, the bottom plate and the ceramic baffle in sequence to connect the base, the bottom plate and the ceramic baffle.

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