Multi-channel integrated optical filter and manufacturing method thereof

Abstract

The invention relates to the technical field of optical devices, in particular to a multi-channel integrated optical filter and a manufacturing method thereof.The multi-channel integrated optical filter comprises a plurality of optical filters which are connected in sequence, the spectral transmission ranges of the optical filters are different, the side face of each optical filter is provided with an anti-channeling layer, and the side face of each optical filter is provided with an anti-channeling layer. The light channeling prevention layers are made of one of chromium, chromium oxide, nickel and nickel oxide, the thickness range of the light channeling prevention layers is 100-200 nm, an adhesive layer is arranged between every two adjacent light channeling prevention layers, the adhesive layers are used for connecting the two optical filters in an adhesive mode, the adhesive layers are made of optical cement, and the thickness range of the optical cement is 100-200 nm. And the thickness of the adhesive layer ranges from 10 microns to 20 microns. According to the optical system, a spectrum crosstalk phenomenon among the plurality of optical filters can be prevented, so that the imaging stability of the optical system can be improved, and the detection precision of the optical system can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of optical devices, and in particular to a multi-channel integrated filter and a manufacturing method thereof. Background Art

[0002] Optical systems used in earth remote sensing and observation satellites often use multi-channel integrated filters in the optical path to separate light of different wavelengths due to their high reliability requirements and stringent volume requirements. Multi-channel integrated filters are formed by preparing narrow-band filters of several channels on the same substrate in sequence through a special multi-pass process.

[0003] An existing multi-channel integrated filter uses full-surface spin coating of photoresist, exposure and development, retaining the photoresist in the area where the optical film needs to be plated, removing the photoresist in the area where the optical film does not need to be plated, making a nano-thin film, forming a nano-mask layer, and then using alkaline solution or acetone to remove the photoresist, leaving the area to be plated, and then the multi-channel optical film can be plated.

[0004] However, the above-mentioned multi-channel integrated filter does not take into account the spectral crosstalk between different channels caused by mutual crosstalk between multiple channels during the manufacturing process, which will cause instability in the imaging of the optical system and further affect the detection accuracy of the optical system. Summary of the invention

[0005] In order to prevent spectral crosstalk between multiple filters, thereby improving the imaging stability of the optical system and further improving the detection accuracy of the optical system, the present application provides a multi-channel integrated filter and a method for manufacturing the same.

[0006] The present application provides a multi-channel integrated filter and a manufacturing method thereof, which adopts the following technical solutions: A multi-channel integrated filter comprises a plurality of filters connected in sequence, wherein the spectral transmission ranges of the plurality of filters are different, an anti-light-channeling layer is arranged on the side of each filter, and an adhesive layer is arranged between two adjacent anti-light-channeling layers, and the adhesive layer is used to glue and connect the two filters.

[0007] By adopting the above technical solution, the anti-crosstalk layer helps to prevent spectral crosstalk between multiple filters, thereby helping to improve the stability of optical system imaging, and further helping to improve the detection accuracy of the optical system. The adhesive layer helps to glue and splice multiple filters together, thereby helping to complete the splicing of integrated filters.

[0008] In a specific implementation manner, the anti-light channeling layer is made of a material selected from the group consisting of chromium, chromium oxide, nickel, and nickel oxide.

[0009] By adopting the above technical solution, chromium, chromium oxide, nickel and nickel oxide all have the advantages of good light-shielding performance and strong adhesion, which helps to ensure the light blocking effect, and further helps to ensure the effect of the anti-light-channeling layer.

[0010] In a specific embodiment, the anti-light channeling layer has a thickness ranging from 100 nm to 200 nm.

[0011] In a specific embodiment, the adhesive layer is made of optical adhesive.

[0012] By adopting the above technical solution, the optical glue has strong adhesion and chemical stability and is not easily affected by environmental changes, which helps to ensure its own adhesive effect and further helps to ensure the adhesive connection effect between two adjacent filters.

[0013] In a specific embodiment, the thickness of the adhesive layer is in the range of 10 um to 20 um.

[0014] By adopting the above technical solution, limiting the thickness of the adhesive layer helps to reduce the width of the glue gap between two adjacent filters, thereby helping to reduce the pixel loss of the optical system caused by the glue gap being too wide, and further helping to further improve the detection accuracy of the optical system.

[0015] A method for manufacturing a multi-channel integrated filter, used to prepare the multi-channel integrated filter, comprises the following steps: Step 1: coating filters, coating multiple filters to form multiple filters; Step 2: coating an anti-light-channeling layer on the side of each filter; Step three: splicing and forming, splicing multiple filters in sequence according to the set order.

[0016] By adopting the above technical solution, coating the anti-crosstalk layer on the side of the filter helps to prevent spectral crosstalk between multiple filters, thereby helping to improve the imaging stability of the optical system and further helping to improve the detection accuracy of the optical system.

[0017] In a specific implementation scheme, in step 1, each filter is plated individually, and after the plating is completed, the multiple filters are cut into required sizes.

[0018] By adopting the above technical solution, each filter is plated and cut separately and then spliced ​​together, which helps to increase the error tolerance of the filter during the production process, thereby helping to reduce the production cost of the filter.

[0019] In a specific possible implementation scheme, in step three, when splicing a plurality of optical filters, optical glue is applied between two adjacent optical filters, and an adhesive layer is formed by the optical glue to glue the two adjacent optical filters together.

[0020] By adopting the above technical solution, the adhesive layer formed by optical glue helps to glue and splice multiple filters together; at the same time, the optical glue has strong adhesion and chemical stability and is not easily affected by environmental changes, which helps to ensure its own adhesive effect.

[0021] In a specific implementation scheme, in step 2, the anti-light channeling layer is plated to a thickness ranging from 100 nm to 200 nm; in step 3, the optical adhesive is coated to a thickness ranging from 10 um to 20 um.

[0022] By adopting the above technical solution, limiting the coating thickness of the optical glue helps to reduce the glue gap width between two adjacent filters, thereby helping to reduce the pixel loss of the optical system caused by the glue gap being too wide, and further helping to further improve the detection accuracy of the optical system.

[0023] In summary, the present application includes at least one of the following beneficial technical effects: 1. The present application provides an anti-channeling layer, which helps prevent spectral crosstalk between multiple filters, thereby helping to improve the imaging stability of the optical system, and further helping to improve the detection accuracy of the optical system; 2. The present application helps to reduce the width of the adhesive gap between two adjacent filters by limiting the thickness of the adhesive layer, thereby helping to reduce the pixel loss of the optical system caused by the excessive width of the adhesive gap, and further helping to further improve the detection accuracy of the optical system; 3. The present application helps to increase the error tolerance of the filters during the manufacturing process by separately plating multiple filters, thereby helping to reduce the production cost of the filters. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present application.

[0025] Figure 2 yes Figure 1 Enlarged view of point A in the middle.

[0026] Explanation of the accompanying drawings: 1. filter; 2. anti-light-channeling layer; 3. adhesive layer. DETAILED DESCRIPTION

[0027] The present application is further described in detail below in conjunction with the accompanying drawings.

[0028] The present application embodiment discloses a multi-channel integrated filter. Figure 1 and Figure 2 , including a plurality of filters 1 arranged in sequence, each filter 1 is a composite thin film structure, and the spectral transmission ranges of the plurality of filters 1 are different. An anti-light-channeling layer 2 is plated on the side of each filter 1, and the plating material of the anti-light-channeling layer 2 is one of chromium, chromium oxide, nickel, and nickel oxide. The plating thickness of the anti-light-channeling layer 2 is in the range of 100nm-200nm. In this embodiment, the plating thickness of the anti-light-channeling layer 2 is 150nm. An adhesive layer 3 is filled between two adjacent anti-light-channeling layers 2, and the thickness of the adhesive layer 3 is in the range of 10um-20um. In this embodiment, the adhesive layer 3 is composed of optical glue, and the thickness of the adhesive layer 3 is 15um. In another embodiment, the anti-light-channeling layer 2 and the adhesive layer 3 can be replaced by black glue, and the black glue needs to cover the side of the filter 1, and the coating thickness of the black glue is greater than 20um.

[0029] Reference Figure 1 and Figure 2 During the use of the optical filter 1, the anti-channeling layer 2 helps prevent the spectral interference between multiple optical filters 1, thereby helping to improve the stability of the optical system imaging, and further helping to improve the detection accuracy of the optical system. The material selected for the anti-channeling layer 2 has the advantages of good light-shielding performance and strong adhesion, which helps to ensure the light blocking effect of the anti-channeling layer 2, and further helps to ensure the use effect of the anti-channeling layer 2.

[0030] Reference Figure 1 and Figure 2 The use of optical glue with a thickness of 15um to form the adhesive layer 3 helps to reduce the width of the glue gap between two adjacent filters 1, thereby helping to reduce the pixel loss of the optical system caused by the glue gap being too wide, and further helping to further improve the detection accuracy of the optical system. At the same time, the optical glue has strong adhesion and chemical stability, is not easily affected by environmental changes, and has a good adhesive effect, which helps to ensure the adhesive connection effect between two adjacent filters 1.

[0031] The present application also discloses a method for preparing the above-mentioned multi-channel integrated filter, comprising the following steps: Step 1, coating the filter 1, coating each filter 1 separately on different substrates, and after coating multiple filters separately, cutting the multiple filters 1 into set sizes, so as to prepare multiple filters 1 separately. By coating and cutting multiple filters 1 separately, it is helpful to increase the error tolerance of multiple filters 1 in the manufacturing process, thereby helping to reduce the production cost of the filters 1.

[0032] Step 2: After the multiple filters 1 are formed, a material selected from chromium, chromium oxide, nickel, and nickel oxide is used to plate the anti-light-channeling layer 2 on the side of the filter 1. The anti-light-channeling layer 2 helps prevent the spectral crosstalk between the multiple filters 1, thereby helping to improve the imaging stability of the optical system, and further helping to improve the detection accuracy of the optical system.

[0033] Step three, splicing and forming, splicing multiple filters 1 in sequence on the surface of the same substrate according to a set order, and coating an optical glue with a thickness of 15um between two adjacent filters 1 to form an adhesive layer 3, and gluing the two adjacent filters 1 together.

[0034] The use of optical glue with a thickness of 15 μm to form the adhesive layer 3 helps to reduce the width of the glue gap between two adjacent filters 1, thereby helping to reduce the pixel loss of the optical system caused by the glue gap being too wide, and further helping to further improve the detection accuracy of the optical system. At the same time, the optical glue has strong adhesion and chemical stability, is not easily affected by environmental changes, and has a good adhesive effect, thereby helping to ensure the adhesive connection effect between two adjacent filters 1.

[0035] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A multi-channel integrated filter, characterized in that: The invention comprises a plurality of filters (1) connected in sequence, wherein the spectral transmission ranges of the plurality of filters (1) are different, an anti-light-channeling layer (2) is arranged on the side surface of each filter (1), and an adhesive layer (3) is arranged between two adjacent anti-light-channeling layers (2), and the adhesive layer (3) is used for adhesively connecting the two filters (1).

2. The multi-channel integrated filter according to claim 1, characterized in that: The material of the anti-light-channeling layer (2) is one of chromium, chromium oxide, nickel and nickel oxide.

3. The multi-channel integrated filter according to claim 1, characterized in that: The thickness of the anti-light channeling layer (2) is in the range of 100nm-200nm.

4. The multi-channel integrated filter according to claim 1, characterized in that: The adhesive layer (3) is made of optical glue.

5. The multi-channel integrated filter according to claim 1, characterized in that: The thickness of the adhesive layer (3) is in the range of 10 um to 20 um.

6. A method for manufacturing a multi-channel integrated filter, used for preparing the multi-channel integrated filter according to claims 1-5, characterized in that: The following steps are involved: Step 1: coating the optical filters (1), coating the plurality of optical filters (1) so that the plurality of optical filters (1) are formed; Step 2: coating an anti-light-channeling layer (2), coating an anti-light-channeling layer (2) on the side of each filter (1); Step three, splicing and forming, splicing the multiple filters (1) in sequence according to a set order.

7. The method for manufacturing a multi-channel integrated filter (1) according to claim 6, characterized in that: In step one, each filter (1) is plated individually, and after the plating is completed, the multiple filters (1) are cut into required sizes.

8. The method for manufacturing a multi-channel integrated filter (1) according to claim 6, characterized in that: In step three, when splicing a plurality of optical filters (1), optical glue is applied between two adjacent optical filters (1), and an adhesive layer (3) is formed by the optical glue to bond the two adjacent optical filters (1) together.

9. The method for manufacturing a multi-channel integrated filter according to claim 8, characterized in that: In step 2, the anti-light channeling layer (2) is plated to a thickness ranging from 100 nm to 200 nm; in step 3, the optical adhesive is coated to a thickness ranging from 10 um to 20 um.

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