Length-adjustable linear light spot spheroidizing and homogenizing system

Abstract

The invention, which relates to the technical field of the laser surface treatment device, discloses a length-adjustable linear light spot spherical aberration eliminating and homogenizing system comprising a light source shaping system, an off-axis reflective micro-cylindrical mirror, an off-axis reflective cylindrical mirror, a plano-concave cylindrical focusing lens and a plano-convex cylindrical focusing lens. Laser emitted by the light source forms a collimated light beam after passing through the light source shaping system, the light beam is divided into a plurality of light beams after passing through the off-axis reflective micro-cylindrical mirror, and the light beams are uniformly superposed on a second focal plane after passing through the off-axis reflective aspheric cylindrical mirror and the plano-concave cylindrical focusing lens. Therefore, light spot homogenization in the length direction is achieved, light beams are focused in the width direction through the plano-convex cylindrical surface focusing lens, and finally linear light spots with uniform energy distribution are obtained. The problems that the length of a linear light spot for laser surface treatment cannot be flexibly adjusted, and the energy uniformity is greatly influenced by spherical aberration are solved, and the uniform linear light spot with adjustable length and high homogenization quality is obtained.

Description

Technical Field

[0001] The invention relates to the technical field of laser surface processing devices, in particular to a length-adjustable linear light spot spherical aberration homogenization system. Background Art

[0002] In recent years, with the rapid development of laser technology research, laser applications are also moving towards the direction of high precision and low damage, especially in the field of laser surface treatment. As a new, green, efficient and damage-free processing method, it is effectively used in laser rust removal, laser paint removal, laser polishing and other industries. It conforms to the industrial development concept of high efficiency, energy saving and environmental protection, and has received widespread attention from the society.

[0003] At present, laser surface treatment processing methods are generally divided into two types: point laser high-speed vibration to form linear scanning and direct shaping of the light source into linear spot scanning. Point laser high-speed vibration to form linear scanning is affected by the mechanical limitations of the galvanometer and the excessive energy density of the point light source. When the average power is higher than 1kW, it is easy to cause point damage to the processed material. Therefore, high-power lasers cannot be used as light sources, which limits their efficiency. By shaping the light source into a linear spot, the length of the linear spot can be changed according to the laser power and the characteristics of the processed material, thereby maximizing the processing efficiency while accurately controlling the energy density. Since the laser light source belongs to a Gaussian beam, the energy of the linear spot obtained by its direct shaping is strong in the middle and weak at both ends. Therefore, in order to achieve high-quality surface treatment effects, the linear spot should be homogenized. In conventional means, a Gaussian beam with uneven energy distribution can be divided into multiple small beams with different energies by using a microlens array combination. After each small beam passes through a plano-convex lens again, its focused spot is re-superimposed at the same position and size to form an overall spot shape, thereby achieving a homogenized spot energy distribution. However, the final spot size obtained in this way is determined by the focal length of the microlens unit, the width of the microlens unit and the focal length of the plano-convex lens, that is, the final spot size cannot be adjusted, which limits its application flexibility. At the same time, the use of a lens system for beam shaping will inevitably introduce spherical aberration, thereby causing the final spot shape to deviate from the design requirements and reduce its homogenization effect. Therefore, it is necessary to provide a technical solution for a uniform linear spot with adjustable length and high homogenization quality. Summary of the invention

[0004] The purpose of the present invention is to provide a linear light spot spherical aberration homogenization system with adjustable length in order to solve the above problems.

[0005] The present invention achieves the above-mentioned purpose through the following technical solutions:

[0006] A length-adjustable linear light spot spherical aberration homogenization system comprises a first light source shaping mirror and a second light source shaping mirror for receiving laser light emitted by an incident light source and expanding and collimating the light beam, wherein the first light source shaping mirror is close to the incident light source, and the first light source shaping mirror and the second light source shaping mirror are arranged in sequence;

[0007] An off-axis reflective micro-cylindrical reflector for splitting the collimated light into multiple focused light beams is fixedly arranged at one end of the second light source shaping mirror away from the first light source shaping mirror;

[0008] An off-axis reflective cylindrical mirror is arranged at a position far away from the off-axis reflective micro-cylindrical reflector, a plano-concave cylindrical focusing lens is arranged at one end of the off-axis reflective cylindrical mirror, the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens form an adjustable focus lens group, the focal plane of the multiple focused light beams coincides with the first focal plane of the adjustable focus lens group, after the multiple focused light beams pass through the adjustable focus lens group, the multiple focused light beams are re-formed into collimated light and converged at the second focal plane of the adjustable focus lens group, the converged light spot obtains uniform energy distribution in the length direction, and forms a square light spot with uniform energy distribution in the length direction;

[0009] The end of the plano-concave cylindrical focusing lens away from the off-axis reflective cylindrical mirror is provided with a plano-convex cylindrical focusing lens for focusing a square light spot with uniform energy distribution in the length direction in the width direction and finally obtaining a linear light spot with uniform energy distribution in the length direction;

[0010] The centers of the first light source shaping mirror, the second light source shaping mirror and the off-axis reflective micro-cylindrical reflector are located on the first optical axis, the centers of the off-axis reflective micro-cylindrical reflector and the off-axis reflective cylindrical mirror are located on the second optical axis, and the centers of the off-axis reflective cylindrical mirror, the plano-concave cylindrical focusing lens and the plano-convex cylindrical focusing lens are located on the third optical axis;

[0011] By changing the relative distance between the off-axis reflective micro-cylindrical reflector and the off-axis reflective cylindrical mirror on the second optical axis and the relative distance between the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens on the third optical axis, the length of the line spot can be changed while ensuring uniformity.

[0012] Preferably, a micro-concave cylindrical surface is provided on the off-axis reflective micro-cylindrical reflector, and there are a plurality of micro-concave cylindrical surfaces, which are arranged adjacent to each other and parallel to each other in sequence on the off-axis reflective micro-cylindrical reflector.

[0013] Preferably, the incident light source is a collimated light beam or a light beam with a divergent angle, and the light spot shape is a square light spot or a circular light spot; the optical axis of the incident light source coincides with the first optical axis where the first light source shaping mirror, the second light source shaping mirror and the off-axis reflective micro-cylindrical reflector are located.

[0014] Preferably, the first optical axis, the second optical axis and the third optical axis are in the same plane.

[0015] Preferably, the length of the line spot can be adjusted in the range of 5 to 15 mm.

[0016] Preferably, the off-axis reflective micro-cylindrical reflector has an overall length of L and an overall width of M. The front surface of the off-axis reflective micro-cylindrical reflector has X identical micro-concave cylindrical surfaces arranged in parallel and coated with a reflective film with the same wavelength of the laser, the length of each micro-concave cylindrical surface is L, the width is M / X, and the focal length is f1. The rear surface of the off-axis reflective micro-cylindrical reflector is a plane, and the relative distance z between the off-axis reflective micro-cylindrical reflector and the off-axis reflective cylindrical mirror along the second optical axis is:

[0017] z=f1+f, wherein f is the combined focal length of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens, and f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector.

[0018] Preferably, the combined focal length f of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens is:

[0019] Wherein, f2 is the focal length of the off-axis reflective cylindrical mirror, f3 is the focal length of the plano-concave cylindrical focusing lens, and d is the relative distance between the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens along the third optical axis.

[0020] Preferably, the length l of the line spot is:

[0021] Wherein, f is the combined focal length of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens, f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector, and M / X is the width of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector.

[0022] Preferably, the first optical axis coincides with the center of the front surface of the off-axis reflective micro-cylindrical reflector and has an angle of 45° with the normal of its rear surface; the second optical axis coincides with the center of the cylinder of the off-axis reflective cylindrical mirror and has an angle of 45° with its normal.

[0023] Preferably, the third optical axis is parallel to the normals of the plano-concave cylindrical focusing lens and the plano-convex cylindrical focusing lens; the focal length of the plano-convex cylindrical focusing lens is f4, and the cylindrical length direction thereof is perpendicular to the cylindrical length direction of the off-axis reflective micro-cylindrical reflector, the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens; the focal length f1 of the micro-concave cylinder on the off-axis reflective micro-cylindrical reflector is less than f, and the focal length f4 of the plano-convex cylindrical focusing lens is less than f.

[0024] The beneficial effects of the present invention are: (1) The present invention solves the problem that the length of the line spot used for laser surface treatment cannot be flexibly adjusted and the energy uniformity is greatly affected by spherical aberration, and obtains a uniform line spot with adjustable length and high homogenization quality. (2) Through the adjustable focus lens group, the final output line spot can be freely adjusted in the length direction. (3) The beam shaping is performed by off-axis reflective micro-cylindrical reflector and off-axis reflective cylindrical mirror, which can avoid the introduction of spherical aberration by the lens-type shaping system and improve the uniformity of the spot energy. (4) After passing through the system of the present invention, the beam energy can be converted from Gaussian distribution to uniform distribution. (5) The optical path system of the present invention is simple, stable, easy to integrate, and can be actually applied to a variety of industrial scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a three-dimensional diagram of the overall structure of the present invention;

[0026] Figure 2 It is a side view of the overall structure of the present invention;

[0027] Figure 3 A stereogram of the off-axis reflective micro-cylindrical reflector of the present invention;

[0028] Figure 4 It is a side view of the off-axis reflective micro-cylindrical reflector of the present invention;

[0029] Figure 5 It is a schematic diagram of the light beam homogenization effect of the present invention.

[0030] Description of reference numerals:

[0031] 1. First light source shaping mirror; 2. Second light source shaping mirror; 3. Off-axis reflective micro-cylindrical reflector; 4. Off-axis reflective cylindrical mirror; 5. Plano-concave cylindrical focusing lens; 6. Plano-convex cylindrical focusing lens. DETAILED DESCRIPTION

[0032] The present invention will be further described below in conjunction with the accompanying drawings:

[0033] like Figure 1 and Figure 2As shown, the present invention provides a length-adjustable linear spot aberration-eliminating homogenizing system, comprising a first light source shaping mirror 1 and a second light source shaping mirror 2 for receiving laser light emitted by an incident light source and expanding and collimating the light beam, wherein the first light source shaping mirror 1 is close to the incident light source, and the first light source shaping mirror 1 and the second light source shaping mirror 2 are arranged in sequence. The first light source shaping mirror 1 and the second light source shaping mirror 2 collimate and expand the light beam so that it matches the aperture of an off-axis reflective micro-cylindrical reflector 3. An off-axis reflective micro-cylindrical reflector 3 for splitting the collimated light into multiple focused light beams is fixedly provided at one end of the second light source shaping mirror 2 away from the first light source shaping mirror 1. The off-axis reflective micro-cylindrical reflector 3 can split the collimated Gaussian light source into multiple focused light beams in the homogenizing direction. An off-axis reflective cylindrical mirror 4 is arranged away from the off-axis reflective micro-cylindrical reflector 3, and a plano-concave cylindrical focusing lens 5 is arranged at one end of the off-axis reflective cylindrical mirror 4. The off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 form an adjustable focus lens group. The focal plane of the multiple focused light beams generated by the off-axis reflective micro-cylindrical reflector 3 coincides with the first focal plane of the adjustable focus lens group. After the multiple focused light beams pass through the adjustable focus lens group, the multiple focused light beams are re-formed into collimated light and converge at the second focal plane of the adjustable focus lens group. The converged light spot obtains uniform energy distribution in the length direction, forming a square light spot with uniform energy distribution in the length direction. A plano-convex cylindrical focusing lens 6 is arranged at one end of the plano-concave cylindrical focusing lens 5 away from the off-axis reflective cylindrical mirror 4, which is used to focus the square light spot with uniform energy distribution in the length direction in the width direction and finally obtain a linear light spot with uniform energy distribution in the length direction. In this embodiment, the centers of the first light source shaping mirror 1, the second light source shaping mirror 2 and the off-axis reflective micro-cylindrical reflector 3 are located on the first optical axis; the centers of the off-axis reflective micro-cylindrical reflector 3 and the off-axis reflective cylindrical mirror 4 are located on the second optical axis; the centers of the off-axis reflective cylindrical mirror 4, the plano-concave cylindrical focusing lens 5 and the plano-convex cylindrical focusing lens 6 are located on the third optical axis; and the first optical axis, the second optical axis and the third optical axis are in the same plane. By changing the relative distance between the off-axis reflective micro-cylindrical reflector 3 and the off-axis reflective cylindrical mirror 4 on the second optical axis and the relative distance between the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 on the third optical axis, the length of the line spot can be changed while ensuring uniformity.

[0034] like Figure 1 and Figure 3 As shown, on the basis of the above embodiment, further, a micro-concave cylindrical surface is provided on the off-axis reflective micro-cylindrical reflector 3, and there are multiple micro-concave cylindrical surfaces, and the multiple micro-concave cylindrical surfaces are sequentially arranged and distributed in parallel adjacent to each other on the off-axis reflective micro-cylindrical reflector 3. After passing through the off-axis reflective micro-cylindrical reflector 3, the collimated light is split into multiple focused light beams by the multiple micro-concave cylindrical surfaces, and the light beams perpendicular to the curved surface direction remain collimated.

[0035] On the basis of the above embodiment, further, the incident light source is a collimated light beam or a light beam with a divergent angle, and the light spot shape is a square light spot or a circular light spot. The optical axis of the incident light source coincides with the first optical axis where the first light source shaping mirror 1, the second light source shaping mirror 2 and the off-axis reflective micro cylindrical reflector 3 are located.

[0036] like Figure 2 and Figure 4 As shown, on the basis of the above embodiment, further, the overall length of the off-axis reflective micro-cylindrical reflector 3 is L, the overall width is M, the front surface of the off-axis reflective micro-cylindrical reflector 3 has X identical micro-concave cylindrical surfaces arranged in parallel and coated with a reflective film with the same wavelength of the laser, the length of each micro-concave cylindrical surface is L, the width is M / X, and the focal length is f1; the rear surface of the off-axis reflective micro-cylindrical reflector 3 is a plane. The relative distance z between the off-axis reflective micro-cylindrical reflector 3 and the off-axis reflective cylindrical mirror 4 along the second optical axis is:

[0037] z=f1+f, wherein f is the combined focal length of the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 , and f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector 3 .

[0038] The front surface of the off-axis reflective cylindrical mirror 4 is a concave cylindrical surface with a focal length of f2, and the cylindrical length direction thereof is parallel to the micro-concave cylindrical surface of the off-axis reflective micro-cylindrical reflector 3 and the cylindrical length direction of the plano-concave cylindrical focusing lens 5. The focal length of the plano-concave cylindrical focusing lens 5 is f3.

[0039] The combined focal length f of the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 is:

[0040] Among them, f2 is the focal length of the off-axis reflective cylindrical mirror 4, f3 is the focal length of the plano-concave cylindrical focusing lens 5, and d is the relative distance between the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 along the third optical axis.

[0041] The length l of the line spot is:

[0042] Wherein, f is the combined focal length of the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5, f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector 3, and M / X is the width of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector 3.

[0043] In specific use, the final line spot length can be adjusted by adjusting the relative distance d between the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5 along the third optical axis, and the relative distance z between the off-axis reflective micro-cylindrical reflector 3 and the off-axis reflective cylindrical mirror 4 along the second optical axis.

[0044] On the basis of the above embodiment, further, the first optical axis coincides with the center of the front surface of the off-axis reflective micro-cylindrical reflector 3 and the angle between the first optical axis and the normal of the rear surface is 45°. The second optical axis coincides with the center of the cylinder of the off-axis reflective cylindrical mirror 4 and the angle between the first optical axis and the normal of the off-axis reflective micro-cylindrical reflector 3 and the normal of the rear surface is 45°.

[0045] like Figure 2 As shown, on the basis of the above embodiment, further, the third optical axis is parallel to the normal of the plano-concave cylindrical focusing lens 5 and the plano-convex cylindrical focusing lens 6. The focal length of the plano-convex cylindrical focusing lens 6 is f4, and the length direction of its cylinder is perpendicular to the length direction of the cylinder in the off-axis reflective micro-cylindrical reflector 3, the off-axis reflective cylindrical mirror 4 and the plano-concave cylindrical focusing lens 5. The focal length f1 of the micro-concave cylinder on the off-axis reflective micro-cylindrical reflector 3 is less than f, and the focal length f4 of the plano-convex cylindrical focusing lens 6 is less than f.

[0046] Specifically, the focal length of the first light source shaping mirror 1 can be 30mm, and the focal length of the second light source shaping mirror 2 can be 90mm. The overall length of the off-axis reflective micro-cylindrical reflector 3 can be 60mm, the overall width can be 60mm, the number of micro-concave cylindrical surfaces thereon can be 60, the length of the micro-concave cylindrical surfaces can be 60mm, the width can be 1mm, and the focal length of the micro-concave cylindrical surfaces can be -100mm. The focal length of the off-axis reflective cylindrical mirror 4 can be -400mm, and the focal length of the plano-concave cylindrical focusing lens 5 can be -266.7mm. The focal length of the plano-convex cylindrical focusing lens 6 can be 222mm.

[0047] The focal length and size of the first light source shaping mirror 1, the second light source shaping mirror 2, the off-axis reflective micro-cylindrical reflector 3, the off-axis reflective cylindrical mirror 4, the plano-concave cylindrical focusing lens 5 and the plano-convex cylindrical focusing lens 6 can be completed with the assistance of ZEMAX optical design software.

[0048] It is found through experiments that the length of the line spot after the laser beam passes through the homogenization system of the present invention can be adjusted within the range of 5 to 15 mm, and the energy uniformity of the line spot is ≥97%.

[0049] like Figure 5 As shown, the light beam homogenization effect diagram after the laser beam passes through the homogenization system of the present invention.

[0050] The present invention utilizes a reflective beam homogenization system to eliminate the influence of spherical aberration introduced when the beam is homogenized by a lens, effectively improves the uniformity of the beam energy in the length direction of the line spot, and can change the length of the line spot by adjusting the relative distance between the lenses. The present invention can be flexibly applied to high-quality laser surface treatment industries such as laser cleaning and laser polishing.

[0051] The above are only preferred embodiments of the present invention, and the scope of the present invention is not limited thereby. It should be understood by those skilled in the art that various changes, modifications, substitutions and deformations may be made to these embodiments without departing from the principles and purposes of the present invention, and all of them should be included in the protection scope of the present invention. The protection scope of the present invention is defined by the claims and their equivalents.

Claims

1. A length-adjustable linear spot spherical aberration homogenization system, characterized by: It includes a first light source shaping mirror and a second light source shaping mirror for receiving laser light emitted by an incident light source and expanding and collimating the light beam, wherein the first light source shaping mirror is close to the incident light source, and the first light source shaping mirror and the second light source shaping mirror are arranged in sequence; An off-axis reflective micro-cylindrical reflector for splitting the collimated light into multiple focused light beams is fixedly arranged at one end of the second light source shaping mirror away from the first light source shaping mirror; An off-axis reflective cylindrical mirror is arranged at a position far away from the off-axis reflective micro-cylindrical reflector, a plano-concave cylindrical focusing lens is arranged at one end of the off-axis reflective cylindrical mirror, the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens form an adjustable focus lens group, the focal plane of the multiple focused light beams coincides with the first focal plane of the adjustable focus lens group, after the multiple focused light beams pass through the adjustable focus lens group, the multiple focused light beams are re-formed into collimated light and converged at the second focal plane of the adjustable focus lens group, the converged light spot obtains uniform energy distribution in the length direction, and forms a square light spot with uniform energy distribution in the length direction; The end of the plano-concave cylindrical focusing lens away from the off-axis reflective cylindrical mirror is provided with a plano-convex cylindrical focusing lens for focusing a square light spot with uniform energy distribution in the length direction in the width direction and finally obtaining a linear light spot with uniform energy distribution in the length direction; The centers of the first light source shaping mirror, the second light source shaping mirror and the off-axis reflective micro-cylindrical reflector are located on the first optical axis, the centers of the off-axis reflective micro-cylindrical reflector and the off-axis reflective cylindrical mirror are located on the second optical axis, and the centers of the off-axis reflective cylindrical mirror, the plano-concave cylindrical focusing lens and the plano-convex cylindrical focusing lens are located on the third optical axis; By changing the relative distance between the off-axis reflective micro-cylindrical reflector and the off-axis reflective cylindrical mirror on the second optical axis and the relative distance between the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens on the third optical axis, the length of the line spot can be changed while ensuring uniformity.

2. The length-adjustable linear spot spherical aberration homogenization system according to claim 1, characterized in that: The off-axis reflective micro-cylindrical reflector is provided with a micro-concave cylindrical surface, and there are a plurality of micro-concave cylindrical surfaces, which are sequentially arranged adjacently and in parallel on the off-axis reflective micro-cylindrical reflector.

3. The length-adjustable linear spot spherical aberration homogenization system according to claim 1, characterized in that: The incident light source is a collimated light beam or a light beam with a divergent angle, and the light spot shape is a square light spot or a circular light spot; the optical axis of the incident light source coincides with the first optical axis where the first light source shaping mirror, the second light source shaping mirror and the off-axis reflective micro-cylindrical reflector are located.

4. The length-adjustable linear spot spherical aberration homogenization system according to claim 1, characterized in that: The first optical axis, the second optical axis and the third optical axis are in the same plane.

5. The length-adjustable linear spot spherical aberration homogenization system according to claim 1, characterized in that: The length adjustment range of the line spot is 5 to 15 mm.

6. The length-adjustable linear spot spherical aberration homogenization system according to claim 2, characterized in that: The off-axis reflective micro-cylindrical reflector has an overall length of L and an overall width of M. The front surface of the off-axis reflective micro-cylindrical reflector has X identical micro-concave cylindrical surfaces arranged in parallel and coated with a reflective film with the same wavelength of the laser, each micro-concave cylindrical surface has a length of L, a width of M / X, and a focal length of f1. The rear surface of the off-axis reflective micro-cylindrical reflector is a plane, and the relative distance z between the off-axis reflective micro-cylindrical reflector and the off-axis reflective cylindrical mirror along the second optical axis is: z=f1+f, wherein f is the combined focal length of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens, and f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector.

7. The length-adjustable linear spot spherical aberration homogenization system according to claim 1, characterized in that: The combined focal length f of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens is: Wherein, f2 is the focal length of the off-axis reflective cylindrical mirror, f3 is the focal length of the plano-concave cylindrical focusing lens, and d is the relative distance between the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens along the third optical axis.

8. The length-adjustable linear spot spherical aberration homogenization system according to claim 6, characterized in that: The length l of the line spot is: Wherein, f is the combined focal length of the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens, f1 is the focal length of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector, and M / X is the width of the micro-concave cylindrical surface on the off-axis reflective micro-cylindrical reflector.

9. The length-adjustable linear spot spherical aberration homogenization system according to claim 6, characterized in that: The first optical axis coincides with the center of the front surface of the off-axis reflective micro-cylindrical reflector and has an angle of 45° with the normal of its rear surface; the second optical axis coincides with the center of the cylinder of the off-axis reflective cylindrical mirror and has an angle of 45° with its normal.

10. The length-adjustable linear spot spherical aberration homogenization system according to claim 6, characterized in that: The third optical axis is parallel to the normals of the plano-concave cylindrical focusing lens and the plano-convex cylindrical focusing lens; the focal length of the plano-convex cylindrical focusing lens is f4, and the cylindrical length direction thereof is perpendicular to the cylindrical length directions of the off-axis reflective micro-cylindrical reflector, the off-axis reflective cylindrical mirror and the plano-concave cylindrical focusing lens; the focal length f1 of the micro-concave cylinder on the off-axis reflective micro-cylindrical reflector is less than f, and the focal length f4 of the plano-convex cylindrical focusing lens is less than f.

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