Detection device and detection system

Abstract

The invention discloses a detection device and a detection system. The detection device comprises a base, a driving mechanism, a transmission mechanism and a probe, and the driving mechanism is installed on the base; the transmission mechanism is mounted on the base and connected with the driving mechanism, the transmission mechanism comprises a connecting rod assembly and a sleeve assembly, the connecting rod assembly is connected with the driving mechanism, and the sleeve assembly sleeves at least part of the connecting rod assembly and is movably connected with the connecting rod assembly; the probe is connected with the connecting rod assembly; wherein the driving mechanism comprises a first stage and a second stage after being started, in the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously, and in the second stage, the sleeve assembly stops moving relative to the base, and the driving mechanism drives the probe and the connecting rod assembly to move.

Description

Technical Field

[0001] The present application belongs to the technical field of integrated circuit manufacturing, and in particular to a detection device and a detection system. Background Art

[0002] In the manufacturing process of integrated circuits, it is necessary to position and overlay the graphics of different processes and steps, so it is necessary to measure and control the overlay and key dimension uniformity.

[0003] During the measurement process, a scanning electron microscope is generally used to measure the critical dimensions of the surface or shallow layer, and a backscattered electron detector is inserted to collect backscattered electrons. When the backscattered electron detector is inserted, it needs to be moved to the specified position as much as possible and must not interfere with other components in the cavity. Summary of the invention

[0004] The embodiments of the present application provide a detection device and a detection system, aiming to improve the motion dimension of the detection device.

[0005] An embodiment of the first aspect of the present application provides a detection device, which includes a base, a driving mechanism, a transmission mechanism and a probe, wherein the driving mechanism is installed on the base; the transmission mechanism is installed on the base, the transmission mechanism is connected to the driving mechanism, the transmission mechanism includes a connecting rod assembly and a sleeve assembly, the connecting rod assembly is connected to the driving mechanism, the sleeve assembly is sleeved at least partially outside the connecting rod assembly and is movably connected to the connecting rod assembly; the probe is connected to the connecting rod assembly; wherein the driving mechanism includes a first stage and a second stage after startup, wherein in the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously, and in the second stage, the sleeve assembly stops moving relative to the base, and the driving mechanism drives the probe and the connecting rod assembly to move.

[0006] According to the implementation of the first aspect of the present application, in the first stage, the probe, the connecting rod assembly and the sleeve assembly move synchronously in a first direction; in the second stage, the probe and the connecting rod assembly move synchronously in a second direction, and the first direction is different from the second direction.

[0007] According to the implementation scheme of the first aspect of the present application, a positioning member is provided on the base; the sleeve assembly includes an abutment plate, the positioning member and the abutment plate are spaced apart along the first direction, and in the first stage, the abutment plate approaches the positioning member along the first direction; in the second stage, the positioning member abuts against the abutment plate and prevents the abutment plate from continuing to move along the first direction.

[0008] According to the implementation scheme of the first aspect of the present application, the transmission mechanism also includes: an elastic member connecting the driving mechanism and the sleeve assembly; in the first stage, the driving mechanism drives the sleeve assembly to move synchronously along the first direction through the elastic member, and in the second stage, the sleeve assembly stops moving relative to the base, and the elastic member is compressed by the force of the driving mechanism.

[0009] According to an implementation of the first aspect of the present application, the sleeve assembly further includes: a first sleeve extending along a first direction, and the abutment plate is installed on the outer circumferential surface of the first sleeve; a second sleeve directly or indirectly connected to the first sleeve, and the second sleeve extends along a second direction.

[0010] According to an implementation of the first aspect of the present application, a through hole is provided on the positioning member; the first sleeve passes through the through hole, and the abutment plate is located on a side of the positioning member away from the second sleeve.

[0011] According to the implementation scheme of the first aspect of the present application, the connecting rod assembly includes: a first connecting rod, connected to the driving mechanism, the first connecting rod extends along the first direction, and at least a portion of the first connecting rod is located in the first sleeve; a second connecting rod, one end of which is directly or indirectly rotationally connected to the first connecting rod, and the other end is connected to the probe, the second connecting rod extends along the second direction, and at least a portion of the second connecting rod is located in the second sleeve.

[0012] According to the implementation scheme of the first aspect of the present application, it also includes: an elastic sealing tube installed on the base, the two ends of the elastic sealing tube are respectively sealed and connected to the driving mechanism and the base, and the elastic sealing tube sleeve is arranged outside the transmission mechanism to seal the transmission mechanism.

[0013] According to the implementation of the first aspect of the present application, the driving mechanism includes: a driving member installed on a base; a driving rod connecting the driving member and the transmission mechanism, and the driving rod drives the transmission mechanism to move after the driving mechanism is started.

[0014] The detection device of the embodiment of the present application connects the driving mechanism with the probe by setting a transmission mechanism, and the transmission mechanism includes a connecting rod assembly and a sleeve assembly. After the driving mechanism is started, it includes a first stage and a second stage. In the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously. In the second stage, the driving mechanism only drives the probe and the connecting rod assembly to move, which significantly improves the movement dimension of the detection device, thereby improving the detection device's ability to collect backscattered electrons. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solution of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0016] Figure 1 It is a front cross-sectional schematic diagram of a detection system according to some embodiments of the present application;

[0017] Figure 2 A schematic structural diagram of an exemplary detection device is shown;

[0018] Figure 3 A schematic front cross-sectional view of an exemplary detection device is shown;

[0019] Figure 4 A cross-sectional schematic diagram showing an exemplary transmission mechanism and a probe at another viewing angle;

[0020] Figure 5 A cross-sectional schematic diagram showing an example of a bushing assembly at another viewing angle.

[0021] Reference numerals:

[0022] 10. Detection system; 11. Detection device; 12. Scanning electron microscope; 13. Cover body; 14. Vacuum chamber;

[0023] 100, base; 110, positioning member;

[0024] 200, driving mechanism; 210, driving member; 220, driving rod;

[0025] 300, transmission mechanism; 310, connecting rod assembly; 311, first connecting rod; 312, second connecting rod; 313, third connecting rod; 320, sleeve assembly; 321, abutment plate; 322, first sleeve; 323, second sleeve; 324, third sleeve; 330, elastic member;

[0026] 400, probe;

[0027] 500, elastic sealing tube; 510, upper flange; 520, lower flange;

[0028] x, first direction; y, second direction. DETAILED DESCRIPTION

[0029] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating the examples of the present application.

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "include..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0031] In order to solve the defects mentioned in the background technology, the present application provides a detection device, which includes a base, a driving mechanism, a transmission mechanism and a probe, wherein the driving mechanism is installed on the base; the transmission mechanism is installed on the base, the transmission mechanism is connected to the driving mechanism, the transmission mechanism includes a connecting rod assembly and a sleeve assembly, the connecting rod assembly is connected to the driving mechanism, the sleeve assembly is sleeved at least partially outside the connecting rod assembly and is movably connected to the connecting rod assembly; the probe is connected to the connecting rod assembly; wherein the driving mechanism includes a first stage and a second stage after startup, wherein in the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously, and in the second stage, the sleeve assembly stops moving relative to the base, and the driving mechanism drives the probe and the connecting rod assembly to move.

[0032] The detection device provided in the present application connects the driving mechanism with the probe by setting a transmission mechanism. The transmission mechanism includes a connecting rod assembly and a sleeve assembly, and the driving mechanism includes a first stage and a second stage after being started. In the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously. In the second stage, the driving mechanism only drives the probe and the connecting rod assembly to move, which significantly improves the movement dimension of the detection device, thereby improving the detection device's ability to collect backscattered electrons.

[0033] To better understand the present application, firstly, a detection system including the detection device provided by the present application is briefly described in conjunction with the accompanying drawings. It is noted that the x direction in the accompanying drawings is the first direction and the y direction is the second direction. In the accompanying drawings, for the convenience of drawing, the dimensions in the drawings are not necessarily proportional to the actual dimensions.

[0034] Please refer to Figure 1 , Figure 1 It is a schematic front cross-sectional view of a detection system according to some embodiments of the present application.

[0035] like Figure 1As shown, the detection system 10 includes a detection device 11, a housing and a scanning electron microscope 12. The housing includes a cover 13. The housing encloses a vacuum chamber 14. The vacuum chamber 14 is used to place materials to be detected, such as wafers (not shown). The detection device 11 and the scanning electron microscope 12 are installed on the housing. In this embodiment, the detection device 11 and the scanning electron microscope 12 are installed on the cover 13 as an example for description.

[0036] After describing the overall form of the detection system, the detection device is described in detail with reference to the accompanying drawings.

[0037] Please refer to Figure 1 and Figure 2 , Figure 1 It is a front cross-sectional schematic diagram of a detection system according to some embodiments of the present application; Figure 2 A schematic structural diagram of an exemplary detection device is shown.

[0038] like Figure 1 and Figure 2 As shown, the embodiment of the present application provides a detection device 11, which includes a base 100, a driving mechanism 200, a transmission mechanism 300 and a probe 400, wherein the driving mechanism 200 is installed on the base 100. The transmission mechanism 300 is installed on the base 100, and the transmission mechanism 300 is connected to the driving mechanism 200. The transmission mechanism 300 includes a connecting rod assembly 310 and a sleeve assembly 320, wherein the connecting rod assembly 310 is connected to the driving mechanism 200, and the sleeve assembly 320 is sleeved at least partially outside the connecting rod assembly 310 and is movably connected to the connecting rod assembly 310. The probe 400 is connected to the connecting rod assembly 310. Among them, the driving mechanism 200 includes a first stage and a second stage after being started. In the first stage, the driving mechanism 200 drives the probe 400, the connecting rod assembly 310 and the sleeve assembly 320 to move synchronously. In the second stage, the sleeve assembly 320 stops moving relative to the base, and the driving mechanism 200 drives the probe 400 and the connecting rod assembly 310 to move.

[0039] The base 100 can also be understood as a mounting surface of the detection device 11 on the cover 13. The probe 400 is located in the vacuum chamber 14 and is used to collect backscattered electrons.

[0040] Optionally, the base 100 is not necessarily a single component, but may be a plurality of independent and fixed components. For example, the base 100 carrying the driving mechanism 200 and the transmission mechanism 300 may be two independent bases, but the two bases are fixed relative to each other, so the two bases can be regarded as a whole.

[0041] Optionally, in order to realize the detection function, the probe 400 is located in the vacuum chamber 14. In order to facilitate adjustment and maintenance, the driving mechanism 200 is located outside the vacuum chamber 14.

[0042] The detection device 11 of the embodiment of the present application connects the driving mechanism 200 with the probe 400 by setting a transmission mechanism 300, and includes a first stage and a second stage after the driving mechanism 200 is started. In the first stage, the driving mechanism 200 drives the probe 400, the connecting rod assembly 310 and the sleeve assembly 320 to move synchronously. In the second stage, the driving mechanism 200 only drives the probe 400 and the connecting rod assembly 310 to move, which significantly improves the movement dimension of the detection device 11, thereby improving the detection device 11's ability to collect backscattered electrons.

[0043] Please refer to Figures 1 to 3 , Figure 3 A schematic cross-sectional front view of an exemplary detection device is shown.

[0044] like Figures 1 to 3 As shown, in some optional embodiments, in the first stage, the probe 400, the connecting rod assembly 310 and the sleeve assembly 320 move synchronously along the first direction (the x direction in the figure). In the second stage, the probe 400 and the connecting rod assembly 310 move synchronously along the second direction (the y direction in the figure). The first direction x and the second direction y are different.

[0045] Optionally, the angle between the first direction x and the second direction y is an acute angle.

[0046] The detection device 11 of the embodiment of the present application further improves the movement dimension of the detection device 11 and further improves the ability of the detection device 11 to collect backscattered electrons by enabling the driving mechanism 200 to drive the probe 400 to move along the first direction x and the second direction y respectively through the transmission mechanism 300 in the first stage and the second stage.

[0047] In some optional embodiments, the driving mechanism 200 includes a driving member 210 and a driving rod 220. The driving member 210 is installed on the base 100. The driving rod 220 connects the driving member 210 and the transmission mechanism 300. After the driving mechanism 200 is started, the driving rod 220 drives the transmission mechanism 300 to move.

[0048] Optionally, the driving rod 220 moves along the first direction x.

[0049] Optionally, the driving member 210 is a rodless cylinder. The rodless cylinder is a mechanism that uses a piston to directly or indirectly connect to the outside world, which can effectively save space.

[0050] In some optional embodiments, the detection device 11 also includes an elastic sealing tube 500, which is installed on the base 100, and the two ends of the elastic sealing tube 500 are respectively sealed and connected to the driving mechanism 200 and the base 100, and the elastic sealing tube 500 is sleeved outside the transmission mechanism 300 to seal the transmission mechanism 300.

[0051] Optionally, the elastic sealing tube 500 is a bellows, and the elastic sealing tube 500 is in a vacuum environment. The elastic sealing tube 500 extends along the first direction x, and the elastic sealing tube 500 is provided with an upper flange 510 and a lower flange 520 at both ends in the first direction x. The upper end surface of the upper flange 510 is sealed and connected to the driving rod 220, and the lower end surface of the lower flange 520 is sealed and connected to the base 100. The elastic sealing tube 500 is located outside the vacuum chamber 14, but the cavity inside the elastic sealing tube 500 is connected to the vacuum chamber 14, so that the transmission mechanism 300 is in a vacuum environment. When the driving member 210 is started, the driving rod 220 moves into the vacuum chamber 14 along the first direction x, and the upper flange 510 moves synchronously with the driving rod 220 and moves closer to the lower flange 520, so that the elastic sealing tube 500 is compressed.

[0052] The detection device 11 of the embodiment of the present application is configured with an elastic sealing tube 500 outside the transmission mechanism 300, so that the elastic sealing tube 500 can move with the driving rod 220 and ensure that the transmission mechanism 300 is in a vacuum environment, thereby transmitting the driving force to the vacuum chamber 14 without destroying the sealing of the vacuum chamber 14.

[0053] In some optional embodiments, a positioning member 110 is provided on the base 100. The sleeve assembly 320 includes an abutment plate 321, and the positioning member 110 and the abutment plate are spaced apart along the first direction x. In the first stage, the abutment plate 321 approaches the positioning member 110 along the first direction x. In the second stage, the positioning member 110 abuts against the abutment plate 321 and prevents the abutment plate 321 from continuing to move along the first direction x. The positioning member 110 can be in any form such as a positioning block, a positioning plate, a positioning ring, etc., as long as it can achieve the function of preventing the abutment plate 321 from continuing to move along the first direction x when it abuts against the abutment plate 321.

[0054] Optionally, the positioning member 110 is connected to the lower end surface of the lower flange 520, and the positioning member 110 is located outside the elastic sealing tube 500. At the same time, the positioning member 110 is located in the vacuum chamber 14, and the lower flange 520 is fixedly connected to the positioning member 110, so that after the driving mechanism 200 is started, the positions of the lower flange 520 and the positioning member 110 are fixed. The lower flange 520 is provided with a through hole (not shown) for the sleeve assembly 320 to pass through.

[0055] Optionally, the transmission mechanism 300 further includes an elastic member 330 , and the elastic member 330 connects the driving mechanism 200 and the sleeve assembly 320 .

[0056] Optionally, the elastic member 330 is a spring, one end of the elastic member 330 is connected to the lower end surface of the upper flange 510, and the other end is connected to the sleeve assembly 320. Since the upper flange 510 is fixedly connected to the driving rod 220, the elastic member 330 is connected to the driving mechanism 200 through the upper flange 510. The elastic member 330 is used as a transmission member between the driving mechanism 200 and the sleeve assembly 320 in the first stage, and the driving mechanism 200 drives the sleeve assembly 320 to move synchronously along the first direction x through the elastic member 330. In the second stage, the elastic member 330 is compressed by the force of the driving mechanism 200 and accumulates elastic potential energy. When the driving mechanism 200 stops and the driving rod 220 withdraws, the elastic member 330 releases the elastic potential energy and resets the sleeve assembly 320 and the connecting rod assembly 310 along the opposite path. When the elastic member 330 releases its elastic potential energy, the position of the sleeve assembly 320 is fixed, and the first connecting rod 311 moves relative to the sleeve assembly 320 . After the elastic member 330 is reset, the sleeve assembly 320 and the connecting rod assembly 310 move synchronously.

[0057] In this embodiment, the elastic member 330 is partially sleeved outside the sleeve assembly 320, and one end is connected to the abutment plate 321. Of course, the elastic member 330 can also be connected to other positions of the sleeve assembly 320.

[0058] Optionally, the elastic member 330 may also be an elastic rubber block or an elastic sponge block.

[0059] The detection device 11 of the embodiment of the present application is provided with a positioning member 110 and an abutment plate 321 spaced apart along a first direction x, and an elastic member 330 is provided to connect the driving mechanism 200 and the sleeve assembly 320. Since the positioning member 110 is fixed in position, the abutment plate 321 is driven by the driving mechanism 200, so that before the abutment plate 321 contacts the positioning member 110, the sleeve assembly 320 and the connecting rod assembly 310 can be driven by the driving mechanism 200 and move synchronously, until the abutment plate 321 contacts the positioning member 110, the positioning member 110 restricts the abutment plate 321 from continuing to move along the first direction x into the vacuum chamber 14, and then when the driving mechanism 200 continues to operate, the connecting rod assembly 310 continues to move, while the sleeve assembly 320 is fixed in position and the elastic member 330 is compressed, thereby realizing different states between the connecting rod assembly 310 and the sleeve assembly 320 in two operating stages.

[0060] Please refer to Figures 1 to 5 , Figure 4 A cross-sectional schematic diagram showing an exemplary transmission mechanism and a probe at another viewing angle; Figure 5 A cross-sectional schematic diagram of an exemplary sleeve assembly at another viewing angle is shown. Figure 5 The abutment plate is not shown.

[0061] like Figures 1 to 5As shown, in some optional embodiments, the sleeve assembly 320 further includes a first sleeve 322 and a second sleeve 323, the first sleeve 322 extends along the first direction x, and the abutment plate 321 is installed on the outer circumference of the first sleeve 322. The second sleeve 323 is directly or indirectly connected to the first sleeve 322, and the second sleeve 323 extends along the second direction y. The connecting rod assembly 310 includes a first connecting rod 311 and a second connecting rod 312, the first connecting rod 311 is connected to the driving mechanism 200, the first connecting rod 311 extends along the first direction x, and at least part of the first connecting rod 311 is located in the first sleeve 322. One end of the second connecting rod 312 is directly or indirectly connected to the first connecting rod 311 for rotation, and the other end is connected to the probe 400. The second connecting rod 312 extends along the second direction x, and at least part of the second connecting rod 312 is located in the second sleeve 323.

[0062] Optionally, one end of the first connecting rod 311 away from the second connecting rod 312 is connected to the lower end surface of the upper flange 510 and is connected to the driving mechanism 200 through the upper flange 510. One end of the second connecting rod 312 away from the first connecting rod 311 is connected to the probe 400.

[0063] Optionally, a through hole (not shown) is provided on the positioning member 110 , the first sleeve 322 passes through the through hole, and the abutment plate 321 is located on a side of the positioning member 110 away from the second sleeve 323 .

[0064] In the second stage, since the position of the sleeve assembly 320 is fixed, and the connecting rod assembly 310 is still driven by the driving mechanism 200, the first connecting rod 311 is connected to the driving mechanism 200, and is partially located in the first sleeve 322, and is limited by the first sleeve 322, so the first connecting rod 311 still moves along the first direction x. The second connecting rod 312 is rotatably connected to the first connecting rod 311, and is partially located in the second sleeve 323, and the second sleeve 323 extends along the second direction y. The second connecting rod 312 is pushed by the first connecting rod 311, but is also limited by the second sleeve 323, so it rotates relative to the first connecting rod 311 and moves along the extension direction of the second sleeve 323, that is, the second connecting rod 312 moves along the second direction y.

[0065] In other embodiments, the abutment plate 321 may also be directly connected to the driving mechanism 200, and in the first stage, driven by the driving mechanism 200 to approach the positioning member 110 along the first direction x. The first sleeve 322 and the second sleeve 323 are both connected to the abutment plate 321, and move synchronously with the abutment plate 321.

[0066] The detection device 11 of the embodiment of the present application is provided with a first sleeve 322 and a second sleeve 323 extending along the first direction x and the second direction y respectively, and a first connecting rod 311 and a second connecting rod 312 which are directly or indirectly rotatably connected, so that in the second stage, the second connecting rod 312 is driven by the first connecting rod 311 and limited by the second sleeve 323 at the same time, and moves along the extension direction of the second sleeve 323, thereby driving the probe 400 to move along the second direction y.

[0067] In some optional embodiments, the connecting rod assembly 310 further includes a third connecting rod 313, one end of the third connecting rod 313 is rotatably connected to the first connecting rod 311, and the other end is rotatably connected to the second connecting rod 312, so that the first connecting rod 311 and the second connecting rod 312 are rotatably connected through the third connecting rod 313. The sleeve assembly 320 further includes a third sleeve 324, which is located between the first sleeve 322 and the second sleeve 323 and connects the first sleeve 322 and the second sleeve 323, and the third sleeve 324 extends in an arc.

[0068] Optionally, the third connecting rod 313 extends in a straight line or an arc, and at least a portion of the third connecting rod 313 is located in the third sleeve 324 .

[0069] In the second stage, the first link 311 still moves along the first direction x, and the third link 313 is pushed by the first link 311 to move along the first direction x first, until the connection position between the third link 313 and the second link 312 abuts against the side wall of the third sleeve 324, and rotates relative to the first link 311 and the second link 312 respectively under the traction of the arc-shaped third sleeve 324, and then the third link 313 converts the driving force of the first link 311 along the first direction x into driving the second link 312 to move along the second direction y.

[0070] The detection device 11 of the embodiment of the present application is provided with a third sleeve 324 to connect the first sleeve 322 and the second sleeve 323, and a third connecting rod 313 is provided to rotatably connect the first connecting rod 311 and the second connecting rod 312, so that the third connecting rod 313 can be used as a transition connecting rod to improve the movement smoothness of the first connecting rod 311 and the second connecting rod 312 in the sleeve assembly 320. At the same time, with the help of the limiting effect of the third sleeve 324, the third connecting rod 313 can convert the driving force of the first connecting rod 311 moving along the first direction x into driving the second connecting rod 312 to move along the second direction y.

[0071] In addition, the present application also provides a detection system 10, including a shell, a scanning electron microscope 12 and a detection device 11 as described in any of the above embodiments, the shell includes a cover 13, and the shell encloses a vacuum chamber 14, and the vacuum chamber 14 is used to place the material to be detected, such as a wafer. The probe 400 is located in the shell and faces the detection material, and the drive mechanism 200 is located outside the shell. The elastic sealing tube 500 connects the drive mechanism 200 and the transmission mechanism 300, and the elastic sealing tube 500 is a vacuum environment, which is used to isolate the external atmospheric environment from the vacuum chamber 14 while transmitting power.

[0072] Since the detection system 10 provided in the second aspect embodiment of the present application includes the detection device 11 of any of the above embodiments, the detection device 11 provided in the second aspect embodiment of the present application has the beneficial effects of the detection device 11 of any of the above embodiments, which will not be repeated here.

[0073] The above is only a specific implementation of the present application. Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the protection scope of the present application is not limited to this. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in this application, and these modifications or replacements should be included in the protection scope of this application.

Claims

1. A detection device (11), characterized in that: include: Base (100); A driving mechanism (200) mounted on the base (100); A transmission mechanism (300) is installed on the base (100), the transmission mechanism (300) is connected to the driving mechanism (200), the transmission mechanism (300) comprises a connecting rod assembly (310) and a sleeve assembly (320), the connecting rod assembly (310) is connected to the driving mechanism (200), and the sleeve assembly is sleeved at least partially outside the connecting rod assembly (310) and is movably connected to the connecting rod assembly (310); A probe (400) connected to the connecting rod assembly (310); The driving mechanism (200) comprises a first stage and a second stage after being started. In the first stage, the driving mechanism (200) drives the probe (400), the connecting rod assembly (310) and the sleeve assembly (320) to move synchronously. In the second stage, the sleeve assembly (320) stops moving relative to the base (100), and the driving mechanism (200) drives the probe (400) and the connecting rod assembly (310) to move.

2. The detection device (11) according to claim 1, characterized in that In the first stage, the probe (400), the connecting rod assembly (310) and the sleeve assembly (320) move synchronously along a first direction; in the second stage, the probe (400) and the connecting rod assembly (310) move synchronously along a second direction, and the first direction is different from the second direction.

3. The detection device (11) according to claim 2, characterized in that The base (100) is provided with a positioning member (110); The sleeve assembly (320) comprises an abutment plate (321), and the positioning member (110) and the abutment plate (321) are spaced apart along the first direction. In the first stage, the abutment plate (321) approaches the positioning member (110) along the first direction; in the second stage, the positioning member (110) abuts against the abutment plate (321) and prevents the abutment plate (321) from continuing to move along the first direction.

4. The detection device (11) according to claim 3, characterized in that The transmission mechanism (300) further comprises: An elastic member (330) connects the driving mechanism (200) and the sleeve assembly (320); in the first stage, the driving mechanism (200) drives the sleeve assembly (320) to move synchronously along the first direction through the elastic member (330); in the second stage, the sleeve assembly (320) stops moving relative to the base (100), and the elastic member (330) is compressed by the force of the driving mechanism (200).

5. The detection device (11) according to claim 3, characterized in that: The sleeve assembly (320) further includes: A first sleeve (322) extending along the first direction, and the abutment plate (321) is installed on the outer peripheral surface of the first sleeve (322); The second sleeve (323) is directly or indirectly connected to the first sleeve (322), and the second sleeve (323) extends along the second direction.

6. The detection device (11) according to claim 5, characterized in that The positioning member (110) is provided with a through hole; The first sleeve (322) passes through the through hole, and the abutment plate (321) is located on a side of the positioning member (110) that is away from the second sleeve (323).

7. The detection device (11) according to claim 5, characterized in that The connecting rod assembly (310) comprises: A first connecting rod (311), connected to the driving mechanism (200), the first connecting rod (311) extending along the first direction, and at least a portion of the first connecting rod (311) being located in the first sleeve (322); A second connecting rod (312) has one end directly or indirectly connected to the first connecting rod (311) for rotation, and the other end connected to the probe (400). The second connecting rod (311) extends along the second direction, and at least a portion of the second connecting rod (311) is located in the second sleeve (323).

8. The detection device (11) according to claim 1, characterized in that Also includes: An elastic sealing tube (500) is installed on the base (100), and two ends of the elastic sealing tube (500) are respectively sealedly connected to the driving mechanism (200) and the base (100), and the elastic sealing tube (500) is sleeved outside the transmission mechanism (300) to seal the transmission mechanism (300).

9. The detection device (11) according to claim 1, characterized in that The driving mechanism (200) comprises: A driving member (210) mounted on the base (100); A driving rod (220) connects the driving member (210) and the transmission mechanism (300); after the driving mechanism (200) is started, the driving rod (220) drives the transmission mechanism (300) to move.

10. A detection system (10), characterized in that: It comprises a shell, a scanning electron microscope (12) and a detection device (11) according to any one of claims 1 to 9, wherein the probe (400) is located inside the shell, and the driving mechanism (200) is located outside the shell.

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