Tail gas absorption treatment equipment and treatment method

Abstract

The embodiment of the invention provides tail gas absorption treatment equipment and a treatment method, and relates to the technical field of tail gas harmful ingredient absorption treatment, the tail gas absorption treatment equipment comprises a tail gas treatment device which comprises a treatment device body, an annular overflow groove, a baffle and a spray head, the treatment device body is provided with a treatment cavity, a gas inlet end and a gas outlet end, and the gas inlet end is arranged in the middle of the treatment device body; the gas inlet end is tangent to the inner wall of the treatment cavity so that fluid in the gas inlet end can enter the treatment cavity in the tangential direction, the gas outlet end is located at the top of the treatment cavity, the annular overflow groove is connected with the cavity wall of the treatment cavity and located between the gas inlet end and the gas outlet end, a notch is defined in the middle of the annular overflow groove, and the baffle is arranged under the notch. The nozzle is installed on the baffle and located on the side, away from the air outlet end, of the baffle. In the embodiment of the invention, the contact time of the tail gas with the annular water curtain and the spray can be prolonged, so that harmful components in the tail gas are fully reacted and absorbed, and the tail gas treatment effect is improved.

Description

Technical Field

[0001] The present application relates to the technical field of exhaust gas harmful component absorption treatment, and in particular to an exhaust gas absorption treatment device and a treatment method. Background Art

[0002] In the semiconductor material production industry, mixed gases with complex components are often used for production operations, such as hydrogen as a reaction promoter, combustible gas as a raw material gas, and argon as an inert protective gas. The tail gas from the production device has complex components, for example, there are combustible and explosive components in the tail gas, harmful components that can be absorbed by water, components that can react with water to form scum, etc. At present, conventional box-type spraying and packed tower spraying methods are usually used for tail gas treatment, which have the disadvantages of large floor space, high investment cost, insufficient gas-liquid contact, and difficult scum cleaning. Summary of the invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a tail gas absorption treatment device and a treatment method, which can make the tail gas fully contact with the liquid to improve the tail gas treatment effect.

[0004] An embodiment of one aspect of the present application provides a tail gas absorption treatment device, comprising:

[0005] An exhaust gas treatment device comprises a treatment device body, an annular overflow groove, a baffle and a nozzle, wherein the treatment device body has a treatment chamber, an air inlet end and an air outlet end, wherein the air inlet end is arranged in the middle of the treatment device body, the air inlet end is tangent to the inner wall of the treatment chamber, so that the fluid in the air inlet end enters the treatment chamber in a tangential direction, the air outlet end is located at the top of the treatment chamber, the annular overflow groove is connected to the chamber wall of the treatment chamber, and the annular overflow groove is located between the air inlet end and the air outlet end, a notch is enclosed in the middle of the annular overflow groove, the baffle is arranged directly below the notch, and the contour of the projection of the baffle along the vertical direction is located within the contour of the notch, and the nozzle is installed on the baffle and is located on the side of the baffle away from the air outlet end.

[0006] Furthermore, the annular overflow trough includes an overflow trough body and an inclined plate, one side of the overflow trough body is connected to the inner wall of the processing chamber, one side of the inclined plate is connected to one side of the overflow trough body close to the notch, and the other side of the inclined plate is inclined downward compared to the horizontal plane.

[0007] Furthermore, it also includes an exhaust duct, a demister and an induced draft fan, one end of the exhaust duct is connected to the air outlet end, the demister is installed on the exhaust duct, and the induced draft fan is connected to the other end of the exhaust duct.

[0008] Furthermore, the exhaust pipe is arranged at an angle so that condensed water in the exhaust pipe can flow back into the processing chamber.

[0009] Furthermore, it also includes a first pipeline and a second pipeline, the air inlet end is fluidically connected to the first pipeline, the first pipeline is used to transport exhaust gas into the processing chamber, one end of the second pipeline is connected to the first pipeline, and the second pipeline is used to transport nitrogen to the first pipeline.

[0010] Furthermore, it also includes a pH adjustment device, and the scum treatment device includes an adjustment tank, a connecting pipe and an overflow pipe, one end of the connecting pipe is connected to the bottom fluid of the treatment chamber, and the other end of the connecting pipe is connected to the fluid of the adjustment tank, and the overflow pipe obliquely connects the treatment chamber and the adjustment tank, wherein the projection of the overflow pipe in the vertical direction is tangent to the inner wall of the treatment chamber.

[0011] Furthermore, the pH adjustment device includes an agitator, a filter plate and a circulation component, the agitator is arranged in the adjustment tank, the filter plate is arranged in the adjustment tank, wherein the filter plate and the wall surface of the adjustment tank enclose a filter cavity, and the circulation component is used to transport the liquid in the filter cavity to the treatment cavity.

[0012] Furthermore, the regulating tank is provided with a scum inspection window, the filter plate is formed with a filter tank installation position, the filter tank installation position is used to place the filter tank, and the scum inspection window is located above the filter tank.

[0013] Furthermore, the regulating tank is connected to a third pipeline and a fourth pipeline, the third pipeline is used to transport tap water into the regulating tank, and the fourth pipeline is used to transport alkaline liquid into the regulating tank.

[0014] The embodiment of the second aspect of the present application discloses a tail gas absorption treatment method, which is applied to the tail gas absorption treatment device as described above, and comprises the following steps:

[0015] Passing water into the annular overflow groove until the water in the annular overflow groove overflows and forms an annular water curtain;

[0016] Turning on the nozzle;

[0017] Introducing nitrogen from the air inlet to discharge the air in the processing chamber;

[0018] The tail gas is introduced into the processing chamber from the air inlet. It can be seen from the above technical solution that the embodiment of the present application has at least the following beneficial effects:

[0019] In the tail gas absorption treatment equipment and treatment method provided by the embodiment of the present application, the tail gas to be treated enters the treatment chamber from the tangential direction of the treatment chamber through the air inlet end, and then rotates and rises to form a cyclone gas. The cyclone gas can fully contact with the annular water curtain during the spiral rise. In this process, some components in the cyclone gas react with the water curtain to produce scum floating on the water surface. At the same time, the HCl gas in the cyclone gas is absorbed by the water. After passing through the annular water curtain, the cyclone gas enters the central area (i.e., the area below the baffle) and can continue to contact with the water mist sprayed by the nozzle. At this time, the harmful components that are easily soluble in water are further absorbed by the water. As the cyclone gas rises to be blocked by the baffle, the cyclone gas passes through the annular water curtain near the baffle again, and then flows from the gap of the annular overflow groove to the upper part of the treatment chamber and is discharged from the degassing end. In the embodiment of the present application, the exhaust gas enters the device body in a tangential manner, forcing the exhaust gas to spiral upward, thereby increasing the path of the exhaust gas, reducing the impact force of the exhaust gas, and extending the residence time of the exhaust gas in the device. The contact time between the exhaust gas and the annular water curtain and the spray can be increased, so that the harmful components in the exhaust gas can be fully reacted and absorbed, thereby improving the exhaust gas treatment effect; at the same time, if the exhaust gas carries static electricity, it can also be eliminated by leaching with the water curtain, therefore, the risk of combustion and explosion of the exhaust gas can be greatly reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0021] Figure 1 A schematic diagram of the structure of a tail gas absorption treatment device provided in one embodiment of the present application;

[0022] Figure 2 A schematic plan view of a tail gas absorption treatment device provided in one embodiment of the present application;

[0023] Figure 3 for Figure 1 Schematic diagram of the central annular overflow trough and water curtain.

[0024] Reference numerals:

[0025] 1. Water curtain; 2. Airflow;

[0026] 110, treatment device body; 111, air inlet end; 112, air outlet end; 113, treatment chamber; 114, upper cover window; 115, quick-open bolt; 120, annular overflow groove; 121, overflow groove body; 122, inclined plate; 123, guide part; 130, baffle; 140, nozzle; 151, first pipeline; 152, second pipeline;

[0027] 210, regulating tank; 211, drainage interface; 220, connecting pipe; 230, overflow pipe; 240, agitator; 250, filter plate; 251, filter tank; 260, scum inspection window; 271, third pipeline; 274, fourth pipeline; 281, pH meter; 282, liquid level switch; 290, circulation component; 291, circulation pump; 292, circulation pipeline; 293, tap water switch valve;

[0028] 310. Exhaust duct; 320. demister; 330. induced draft fan; 340. chimney. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] See also Figures 1 to 3 As shown, the embodiment of the first aspect of the present application discloses a tail gas absorption treatment device, including a tail gas treatment device, the tail gas treatment device includes a treatment device body 110, an annular overflow groove 120, a baffle 130 and a nozzle 140, the treatment device body 110 has a treatment chamber 113, an air inlet end 111 and an air outlet end 112, the air inlet end 111 is arranged in the middle of the treatment device body 110, and the air inlet end 111 is tangent to the cavity wall of the treatment chamber 113, so that the fluid in the air inlet end 111 is tangentially Entering into the processing chamber 113, the gas outlet end 112 is located at the top of the processing chamber 113, the annular overflow groove 120 is connected to the inner wall of the processing chamber 113, and the annular overflow groove 120 is located between the gas inlet end 111 and the gas outlet end 112, and the middle part of the annular overflow groove 120 is surrounded by a notch, the baffle 130 is arranged directly below the notch, and the outline of the projection of the baffle 130 along the vertical direction is located within the outline of the notch, and the nozzle 140 is installed on the baffle 130 and is located on the side of the baffle 130 away from the gas outlet end 112.

[0031] It is worth understanding that the fluid entering the processing chamber 113 in a tangential direction means that the fluid is tangent to the wall of the processing chamber 113 when entering the processing chamber 113. In this way, the fluid can form a swirling airflow 2 under the action of the wall of the processing chamber 113, thereby increasing the residence time of the airflow 2 in the processing chamber 113, which is beneficial for the various components in the fluid to fully contact with the annular water curtain 1 or the spray.

[0032] It should be noted that the middle of the processing device body 110 refers to any position between the bottom and the top of the processing device body 110. Exemplarily, the middle of the processing device body 110 can be the middle position of the processing device body 110, or can be the position corresponding to one-third of the height of the processing device body 110.

[0033] In the tail gas absorption treatment equipment provided by the embodiment of the present application, the tail gas to be treated enters the treatment chamber 113 from the tangential direction of the treatment chamber 113 through the air inlet end 111, and then rotates and rises to form a cyclone gas. The cyclone gas can fully contact with the annular water curtain 1 during the spiral rise. In this process, some components in the cyclone gas react with the water curtain 1 to produce scum floating on the water surface. At the same time, the HCl gas in the cyclone gas is absorbed by water. After passing through the annular water curtain 1, the cyclone gas enters the central area (i.e., the area below the baffle 130) and can continue to contact with the water mist sprayed by the nozzle 140. At this time, the harmful components that are easily soluble in water are further absorbed by the water. As the cyclone gas rises to be blocked by the baffle 130, the cyclone gas passes through the annular water curtain 1 near the baffle 130 again, and then flows from the gap of the annular overflow groove 120 to the upper part of the treatment chamber 113, and is discharged from the degassing end.

[0034] In the embodiment of the present application, the exhaust gas enters the device body in a tangential manner, forcing the exhaust gas to spiral upward, thereby increasing the path of the exhaust gas, reducing the impact force of the exhaust gas, and prolonging the residence time of the exhaust gas in the device. The contact time between the exhaust gas and the annular water curtain 1 and the spray can be increased, so that the harmful components in the exhaust gas can be fully reacted and absorbed, thereby improving the exhaust gas treatment effect; at the same time, if the exhaust gas carries static electricity, it can also be eliminated by leaching of the water curtain 1, therefore, the risk of combustion and explosion of the exhaust gas can be greatly reduced.

[0035] In some embodiments of the present application, see Figure 1 and Figure 3 The annular overflow trough 120 includes an overflow trough body 121 and an inclined plate 122. One side of the overflow trough body 121 is connected to the inner wall of the processing chamber 113. One side of the inclined plate 122 is connected to the side of the overflow trough body 121 close to the notch. The other side of the inclined plate 122 is inclined downward compared to the horizontal plane. The overflow trough body 121 has an annular groove for accommodating water. When the water in the annular groove continues to overflow, the overflowed water can flow through the inclined plate 122 and form a stable annular water curtain 1 in the processing chamber 113.

[0036] It is worth to understand that, in the vertical direction, there is a gap between the outline of the projection of the inclined plate 122 and the outline of the baffle 130 , so that the annular water curtain 1 will not be blocked by the baffle 130 , thereby preventing the annular water curtain 1 from being damaged by the baffle 130 .

[0037] In this embodiment, see Figure 1 and Figure 3The annular overflow trough 120 includes an overflow trough body 121, an inclined plate 122 and a guide portion 123. The guide portion 123 extends downward from the side of the overflow trough body 121 to a certain length and forms an interval with the baffle 130 to allow the exhaust gas to pass through. A circle of inclined plates 122 are welded on the upper part of the overflow trough body 121. The angle between the inclined plates 122 and the horizontal line is set to a reasonable range to form a continuous water curtain 1 state.

[0038] Exemplarily, the angle between the inclined plate 122 and the horizontal line is set to 8°-10° to ensure the formation effect of the water curtain 1. The guide portion 123 extends downward from the side of the overflow trough body 121 for a certain length. When there is a situation where the water flows along the side, the guide portion 123 can guide the water flow downward to prevent the water flow from flowing along the bottom of the overflow trough body 121 and affecting the formation effect of the water curtain 1.

[0039] Furthermore, the processing device body 110 is provided with an upper cover window 114, which is located above the annular overflow groove 120. Therefore, the water curtain 1 can be observed through the upper cover window 114, and the water supply size of the annular overflow groove 120 can be adjusted according to the water curtain 1 to adjust the size of the water curtain 1.

[0040] Exemplarily, the tail gas absorption treatment equipment includes a circulation pump 291 and a circulation pipe 292. The circulation pump 291 is used to transport the liquid in the treatment chamber 113 to the annular overflow tank 120 through the circulation pipe 292. The size of the water curtain 1 can be adjusted by adjusting the operating frequency of the circulation pump 291.

[0041] In some embodiments of the present application, see Figure 1 The tail gas absorption treatment equipment includes an exhaust pipe 310 and an induced draft fan 330. One end of the exhaust pipe 310 is connected to the gas outlet 112, and the induced draft fan 330 is connected to the other end of the exhaust pipe 310. Specifically, the induced draft fan 330 is used to form a negative pressure in the exhaust pipe 310 to drive the tail gas in the treatment chamber 113 to flow upward and flow out from the gas outlet 112. Under the joint action of the induced draft fan 330 and the tail gas flowing into the treatment chamber 113 in a tangential direction, the tail gas in the chamber can be formed to present a spiral upward airflow 2.

[0042] In a possible implementation, after the tail gas flows out from the gas outlet 112 of the treatment device body 110, it will carry some water vapor. Since the acidic components in the tail gas are dissolved in water, the water vapor is acidic and can easily cause corrosion to the induced draft fan 330 and subsequent equipment. Therefore, in this embodiment, the tail gas absorption treatment equipment also includes a demister 320, which is installed in the exhaust pipe 310. The demister 320 can intercept and absorb the water vapor of the gas in the exhaust pipe 310, so that the acid mist can reduce the corrosion of the rear-end induced draft fan 330, detection instruments, etc.

[0043] Furthermore, the exhaust duct 310 is tilted so that the condensed water in the exhaust duct 310 flows back into the processing chamber 113, which can further prevent the bottom water formed at the demister 320 from flowing toward the induced draft fan 330 and other devices, thereby reducing the probability of the induced draft fan 330 being corroded.

[0044] Since the exhaust gas contains flammable components, when the flammable exhaust gas comes into direct contact with air, there is a risk of explosion. Figure 1 and Figure 2 The tail gas absorption treatment device also includes a first pipeline 151 and a second pipeline 152. The air inlet end 111 is fluidically connected to the first pipeline 151. The first pipeline 151 is used to transport tail gas into the treatment chamber 113. One end of the second pipeline 152 is connected to the first pipeline 151. The second pipeline 152 is used to transport nitrogen to the first pipeline 151, wherein the second pipeline 152 is provided with a first switch valve. Specifically, the first pipeline 151 is connected to the air inlet end 111. When the first pipeline 151 is closed and the second pipeline 152 is opened, nitrogen can be transported into the treatment chamber 113 through the first pipeline 151 to replace the air in the treatment chamber 113 to achieve nitrogen sealing, and then the tail gas to be treated is introduced into the treatment chamber 113, which can reduce the risk of explosion hazards.

[0045] In actual application, when the exhaust gas in the first pipe 151 contacts the moist air in the pipe, scum is easily generated and adheres to the pipe wall. Figure 1 and Figure 2 One end of the second pipe 152 is connected to the bend of the first pipe 151 , so that nitrogen can be introduced into the first pipe 151 through the second pipe 152 to flush away the scum attached to the pipe wall of the first pipe 151 .

[0046] In some embodiments of the present application, see Figure 1 and Figure 2 The tail gas absorption treatment device also includes a pH adjustment device, and the scum treatment device includes a regulating tank 210, a connecting pipe 220 and an overflow pipe 230, one end of the connecting pipe 220 is connected to the bottom fluid of the treatment chamber 113, and the other end of the connecting pipe 220 is connected to the fluid of the regulating tank 210, and the overflow pipe 230 is connected to the treatment chamber 113 and the regulating tank 210 at an angle, wherein the projection of the overflow pipe 230 in the vertical direction is tangent to the inner wall of the treatment chamber 113, so that the scum in the treatment chamber 113 can flow into the overflow pipe 230 along the flow direction.

[0047] It should be noted that see Figure 2The vertical projection of the overflow pipe 230 extends in the same direction as the liquid flow direction at the inlet end of the overflow pipe 230 (i.e., the connection between the overflow pipe 230 and the processing device body 110). Since a vortex is formed in the processing chamber 113, the liquid in the processing chamber 113 can be driven to form a vortex. Under the action of inertia, the scum in the processing chamber 113 can flow into the overflow pipe 230.

[0048] In the above embodiment, the position where the overflow pipe 230 is connected to the processing chamber 113 is flush with the liquid level in the processing chamber 113, and the liquid level is lower than the height of the air inlet end 111, so that the scum floating on the liquid surface can flow into the overflow pipe 230.

[0049] Furthermore, the height of the end of the overflow pipe 230 connected to the treatment device body 110 is higher than the height of the end of the overflow pipe 230 connected to the regulating tank 210, that is, when the scum in the treatment chamber 113 flows to the regulating tank 210 through the overflow pipe 230, it will first contact the liquid in the regulating tank 210. In this embodiment, a downwardly inclined overflow pipe 230 is provided, and the outlet of the overflow pipe 230 is immersed below the liquid surface to achieve liquid sealing, so that the exhaust gas can be prevented from entering the regulating tank 210 through the overflow pipe 230 to cause environmental accidents, and the combustible exhaust gas can be prevented from leaking into the regulating tank 210 or other operating environments to cause explosion hazards.

[0050] In the solution of tilting the overflow pipe 230 , the scum in the processing chamber 113 rotates with the large amount of liquid in the tank, and under the action of inertia, the scum overcomes the liquid seal and gradually floats to the water surface of the regulating tank 210 .

[0051] In some embodiments of the present application, see Figure 1 and Figure 2 The pH adjustment device includes an agitator 240, a filter plate 250 and a circulation component 290. The agitator 240 is disposed in the adjustment tank 210. The filter plate 250 is disposed in the adjustment tank 210. The filter plate 250 and the wall surface of the adjustment tank 210 enclose a filter cavity. The circulation component 290 is used to transport the liquid in the filter cavity to the processing cavity 113. Specifically, the filter plate 250 separates the space in the adjustment tank 210 into at least a filter cavity. The liquid flowing into the adjustment tank 210 from the processing cavity 113 flows into the filter cavity after being filtered by the filter plate 250, and then is transported to the processing cavity 113 again by the circulation component 290.

[0052] In one possible implementation, see Figure 1 and Figure 2The circulation assembly 290 includes a circulation pump 291 and a circulation pipe 292. The circulation pump 291 transports the liquid in the filter chamber to the processing chamber 113 of the processing device body 110 through the circulation pipe 292 to achieve the purpose of saving water. The filter plate 250 can prevent the scum from being sucked into the circulation pump 291 and causing damage to the circulation pump 291.

[0053] Furthermore, the end of the circulation pipe 292 includes a first water supply end and a second water supply end. The first water supply end is connected to the annular overflow groove 120 through a pipeline, and is used to supply water to the annular overflow groove 120 to generate a water curtain 1, while the second water supply end is connected to the nozzle 140 through a pipeline, and is used to supply water to the nozzle 140 to generate a spray.

[0054] Since the tail gas contains components that react with water to form scum, if the scum is not removed, the accumulated scum may block the overflow pipe 230 over time, causing the tail gas treatment system to be paralyzed. However, if personnel are arranged to remove the scum all the time, the labor intensity is too high. Therefore, it is of great significance to design a set of automatic scum collection facilities.

[0055] In some embodiments of the present application, see Figure 1 and Figure 2 , the regulating tank 210 is provided with a scum inspection window 260, the filter plate 250 is formed with a filter tank 251 installation position, the filter tank 251 installation position is used to place the filter tank 251, and the scum inspection window 260 is located above the filter tank 251. Among them, a movable filter tank 251 is placed in the filter tank 251 installation position, and the upper part of the filter tank 251 is flush with the liquid surface of the regulating tank 210, so that the scum in the regulating tank 210 can pass through the filter plate 250 and be collected in the filter tank 251. During the operation of the tail gas absorption treatment equipment, the amount of internal scum can be observed through the scum inspection window 260. When it is collected to a certain extent, the window can be opened and the filter tank 251 can be lifted to remove the scum. This embodiment is provided with a built-in filter tank 251, and the amount of scum in the filter tank 251 is observed through the visual inspection window. When the filter tank 251 is full, the quick-opening bolt is manually opened to take out the filter tank 251 to remove the scum.

[0056] In the above embodiment, a filter partition is also provided below the built-in filter tank 251 for filtering scum and supporting the filter tank 251 at the same time.

[0057] In some embodiments of the present application, the regulating tank 210 is connected to a third pipe 271 and a fourth pipe 274, the third pipe 271 is used to transport tap water into the regulating tank 210, and the fourth pipe 274 is used to transport alkaline liquid into the regulating tank 210 to adjust the pH value of the liquid in the regulating tank 210.

[0058] In one possible implementation, since the tail gas contains acidic gases that are absorbed by water, the pH of the spray liquid continues to decrease. When the pH drops to 2-3, the liquid alkali valve in the fourth pipeline 274 is automatically opened to allow the alkali liquid to flow into the regulating tank 210 to adjust the pH value of the wastewater. When the pH reaches 9-10, the liquid alkali valve is automatically closed.

[0059] In this embodiment, see Figure 1 and Figure 2 The regulating tank 210 further includes a pH meter 281 and a liquid level switch 282. The pH meter 281 is used to detect the pH value of the liquid in the regulating tank 210, and the liquid level switch 282 is used to monitor the liquid level in the regulating tank 210. It is worth understanding that the regulating tank 210 is connected to the processing chamber 113, and the liquid heights of the two are the same.

[0060] In some embodiments of the present application, the processing device body 110 is provided with an upper cover window 114, which is connected to the processing device body 110 by a quick-opening bolt 115. The upper cover window 114 is made of a transparent PVC board, which can be used to conveniently observe the formation of the annular water curtain 1 inside the processing device body 110. The upper cover window 114 not only plays a sealing role, but also can be used to observe the annular water curtain 1, so as to facilitate the operator to adjust the operating frequency of the circulation pump 291 according to the condition of the water curtain 1 to adjust the water curtain 1.

[0061] Furthermore, the upper cover window 114 can be detachably mounted on the processing device body 110 , and the nozzle 140 can be conveniently replaced by disassembling the upper cover window 114 .

[0062] In some embodiments of the present application, after the exhaust gas enters the processing chamber 113, the humidity of the exhaust gas can be increased, thereby achieving the effect of removing static electricity.

[0063] In one embodiment, the exhaust gas absorption treatment device includes an exhaust gas treatment device and a pH adjustment device, which can achieve an exhaust gas absorption treatment effect integrating scum removal, static electricity removal, and pH adjustment.

[0064] In the embodiment of the present application, there is no post-spray tower, but the tail gas spray and the post-spray wastewater pH adjustment tank 210 are integrated into an integral device, which can reduce the footprint of the tail gas absorption treatment equipment. At the same time, by adopting a treatment method combining the water curtain 1 with the water mist spray, the tail gas is fully in contact with the water curtain 1 and the water mist, and the pollutants of the exhaust gas can be absorbed and removed in one device, and the scum on the surface of the spray liquid can be removed at the same time.

[0065] The embodiment of the second aspect of the present application discloses a tail gas absorption treatment method, which is applied to the tail gas absorption treatment device as described above, comprising the following steps:

[0066] Water is introduced into the annular overflow groove 120 until the water in the annular overflow groove 120 overflows and forms an annular water curtain 1;

[0067] Turning on the spray head 140;

[0068] Exhaust gas is introduced into the processing chamber 113 from the air inlet end 111 .

[0069] In one embodiment, the tail gas absorption treatment method comprises the following steps:

[0070] (1) Open the tap water valve in the third tap pipe 271. When the liquid level reaches the set value of the liquid level switch 282, the tap water valve is automatically closed. Open the tap water switch valve 293 at the first water supply end, start the circulation pump 291, and the water in the regulating tank 210 enters the annular overflow groove 120, and then overflows to the inclined plate 122 to form an annular water curtain 1; open the tap water switch valve 293 at the second water supply end, so that the water flows to the nozzle 140 and forms a spray. Open the nitrogen valve in the second pipe 152, and the nitrogen enters the processing chamber 113 through the first pipe 151 and the air inlet end 111.

[0071] (2) Turn on the induced draft fan 330, and the exhaust gas to be treated enters the treatment chamber 113 of the treatment device body 110 from the tangential direction through the air inlet end 111, and then rotates and rises to form a cyclonic gas. The exhaust gas fully contacts the annular water curtain 1 during the rising process. Specifically, one component in the exhaust gas reacts with the water curtain 1 to produce scum floating on the water surface, and the HCl gas in the exhaust gas is absorbed by the water. The airflow 2 passes through the annular water curtain 1 and enters the central area, and continues to contact the water mist sprayed by the nozzle 140. The harmful components that are easily soluble in water are further absorbed by the water. As the exhaust gas rises, it is blocked by the baffle 130 and passes through the annular water curtain 1 near the baffle 130 again, and comes out from the space between the inclined plate 122 and the baffle 130 to the upper part of the treatment chamber 113.

[0072] (3) The exhaust gas comes out from the outlet 112 of the treatment device body 110, passes through the demister 320 to remove the water mist entrained in the gas, enters the induced draft fan 330, and is discharged from the chimney 340 in compliance with the standards.

[0073] (4) The scum in the treatment device body 110 enters the adjustment tank 210 in a tangential direction through the overflow pipe 230. The floating scum passes through the top of the filter plate 250 and overflows into the built-in filter tank 251. The amount of scum accumulated in the filter tank 251 can be observed through the scum inspection window 260. When it reaches a certain level, the quick-opening bolt of the scum inspection window 260 can be opened, the filter tank 251 can be lifted out, and the scum can be cleaned.

[0074] (5) Since the tail gas contains acidic gases which are absorbed by water, the pH of the spray liquid in the treatment chamber 113 continues to decrease. When the pH drops to 2-3, the liquid alkali valve in the fourth pipeline 274 is automatically opened to add alkali liquid to adjust the pH value of the wastewater. When the pH reaches 9-10, the liquid alkali valve is automatically closed.

[0075] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0076] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0077] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0078] In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0079] It should be understood that, although the steps in the flowchart of the accompanying drawings are displayed in sequence as indicated by the arrows, these steps are not necessarily executed in sequence in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least a part of the steps in the flowchart of the accompanying drawings may include multiple sub-steps or multiple stages, and these sub-steps or stages are not necessarily executed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be executed in turn or alternately with other steps or at least a part of the sub-steps or stages of other steps.

Claims

1. A tail gas absorption treatment equipment, characterized in that: include: An exhaust gas treatment device comprises a treatment device body, an annular overflow groove, a baffle and a nozzle, wherein the treatment device body has a treatment chamber, an air inlet end and an air outlet end, wherein the air inlet end is arranged in the middle of the treatment device body, the air inlet end is tangent to the inner wall of the treatment chamber, so that the fluid in the air inlet end enters the treatment chamber in a tangential direction, the air outlet end is located at the top of the treatment chamber, the annular overflow groove is connected to the chamber wall of the treatment chamber, and the annular overflow groove is located between the air inlet end and the air outlet end, a notch is enclosed in the middle of the annular overflow groove, the baffle is arranged directly below the notch, and the contour of the projection of the baffle along the vertical direction is located within the contour of the notch, and the nozzle is installed on the baffle and is located on the side of the baffle away from the air outlet end.

2. The tail gas absorption treatment equipment according to claim 1, characterized in that: The annular overflow trough includes an overflow trough body and an inclined plate, one side of the overflow trough body is connected to the inner wall of the processing chamber, one side of the inclined plate is connected to one side of the overflow trough body close to the notch, and the other side of the inclined plate is inclined downward compared to the horizontal plane.

3. The tail gas absorption treatment equipment according to claim 1, characterized in that: It also includes an exhaust duct, a demister and an induced draft fan, one end of the exhaust duct is connected to the air outlet end, the demister is installed on the exhaust duct, and the induced draft fan is connected to the other end of the exhaust duct.

4. The tail gas absorption treatment equipment according to claim 3, characterized in that: The exhaust pipe is arranged obliquely so that condensed water in the exhaust pipe can flow back into the processing chamber.

5. The tail gas absorption treatment equipment according to claim 1, characterized in that: It also includes a first pipeline and a second pipeline, the air inlet end is fluidically connected to the first pipeline, the first pipeline is used to transport exhaust gas into the processing chamber, one end of the second pipeline is connected to the first pipeline, and the second pipeline is used to transport nitrogen to the first pipeline.

6. The tail gas absorption treatment equipment according to claim 1, characterized in that: It also includes a pH adjustment device, and the scum treatment device includes an adjustment tank, a connecting pipe and an overflow pipe, one end of the connecting pipe is connected to the bottom fluid of the treatment chamber, the other end of the connecting pipe is connected to the fluid of the adjustment tank, and the overflow pipe obliquely connects the treatment chamber and the adjustment tank, wherein the projection of the overflow pipe in the vertical direction is tangent to the inner wall of the treatment chamber.

7. The tail gas absorption treatment equipment according to claim 6, characterized in that: The pH adjustment device includes an agitator, a filter plate and a circulation component. The agitator is arranged in the adjustment tank, and the filter plate is arranged in the adjustment tank. The filter plate and the wall surface of the adjustment tank enclose a filter cavity, and the circulation component is used to transport the liquid in the filter cavity to the treatment cavity.

8. The tail gas absorption treatment equipment according to claim 7, characterized in that: The regulating tank is provided with a scum inspection window, the filter plate is formed with a filter tank installation position, the filter tank installation position is used to place the filter tank, and the scum inspection window is located above the filter tank.

9. The tail gas absorption treatment equipment according to claim 6, characterized in that: The regulating tank is connected with a third pipeline and a fourth pipeline, the third pipeline is used to transport tap water into the regulating tank, and the fourth pipeline is used to transport alkaline liquid into the regulating tank.

10. A tail gas absorption treatment method, characterized in that: The tail gas absorption treatment device according to any one of claims 1 to 9 comprises the following steps: Passing water into the annular overflow groove until the water in the annular overflow groove overflows and forms an annular water curtain; Turning on the nozzle; Introducing nitrogen from the air inlet to discharge the air in the processing chamber; Exhaust gas is introduced into the processing chamber from the air inlet end.

Images