Sucking and clamping module for three-FA coupling

By designing a suction clamp module for three-FA coupling, using support frame components and multiple sets of clamp suction components, the problems of poor adaptability and low gripping efficiency of traditional clamp jaws are solved, and the stable coupling and efficient machining of multiple optical fiber arrays and chips are achieved.

CN119839898APending Publication Date: 2025-04-18WUHAN FAST INFORMATION TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202510263224.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-06
Publication Date
2025-04-18

AI Technical Summary

Technical Problem

Traditional jaws have poor adaptability during the coupling process of fiber arrays and chips, low gripping efficiency, and generally only have two jaws, making it difficult to effectively clamp and absorb the fiber array.

Method used

A suction clamping module for three FA coupling is designed, including a support frame assembly and three sets of clamping suction components (No. 1, No. 2, No. 3 clamping suction components). Each component is cooperated with each other through an external moving mechanism, and clamp and absorb the optical fiber array respectively to improve the grip firmness.

Benefits of technology

The stable coupling of three FAs and the chip is achieved, ensuring that each coupling does not interfere with each other and improving processing efficiency.

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Abstract

The invention relates to the technical field of chip processing, in particular to a suction clamping module for three-FA coupling, which comprises a support frame assembly, a first clamping suction assembly, a second clamping suction assembly and a third clamping suction assembly, the first clamping and sucking assembly, the second clamping and sucking assembly and the third clamping and sucking assembly are installed on the supporting frame assembly. In the using process, the supporting frame assembly moves through an external moving mechanism, so that the first clamping and sucking assembly, the second clamping and sucking assembly and the third clamping and sucking assembly are matched with one another and clamp and suck a set of light arrays correspondingly, and the grabbing firmness is improved by clamping and sucking chips; the three FAs are respectively coupled with the chip, mutual interference of each coupling is avoided, and the processing efficiency is improved.
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Description

Technical Field

[0001] The invention relates to the technical field of chip processing, and in particular to a suction clamping module for triple FA coupling. Background Art

[0002] FiberArray is abbreviated as FA, which means fiber array. In the process of coupling the fiber array and the chip, the corresponding module needs to be picked up by a gripper for coupling. Traditional grippers generally absorb or hold individually, resulting in poor adaptability of the gripper, and there are only two grippers at most, resulting in slow grasping efficiency. Summary of the invention

[0003] In order to solve the above technical problems, the present invention provides a suction clamp module for triple FA coupling which improves the grasping efficiency.

[0004] A suction clamping module for three-FA coupling of the present invention comprises a support frame assembly, and also comprises a first clamping and sucking assembly, a second clamping and sucking assembly and a third clamping and sucking assembly, wherein the first clamping and sucking assembly, the second clamping and sucking assembly and the third clamping and sucking assembly are respectively mounted on the support frame assembly; during use, the support frame assembly is moved by an external moving mechanism, so that the first clamping and sucking assembly, the second clamping and sucking assembly and the third clamping and sucking assembly cooperate with each other and clamp and suck a group of light arrays respectively, and the gripping firmness is improved by clamping and sucking the chip, so that the three FAs are coupled with the chip respectively, and each coupling is achieved without interfering with each other, thereby improving the processing efficiency.

[0005] Preferably, the support frame assembly includes a No. 1 vertical fixing plate, a horizontal fixing plate and a No. 2 vertical fixing plate, and a group of No. 1 vertical fixing plates and a group of No. 2 vertical fixing plates are respectively installed at the bottom end of the horizontal fixing plate; the No. 1 vertical fixing plate, the horizontal fixing plate and the No. 2 vertical fixing plate cooperate with each other to drive the No. 1 clamping and suction assembly, the No. 2 clamping and suction assembly and the No. 3 clamping and suction assembly to move, thereby improving convenience.

[0006] Preferably, the No. 1 clamping and suction component includes a No. 1 cylinder component, a No. 1 clamping component, a No. 1 left clamp, a No. 1 right clamp, a No. 1 vacuum suction nozzle and a No. 1 vacuum adsorption interface, the No. 1 cylinder component is installed on a No. 1 vertical fixed plate, the No. 1 clamping component is installed on the bottom end of the No. 1 cylinder component, and a group of No. 1 left clamps, a group of No. 1 right clamps and a group of No. 1 vacuum suction nozzles are respectively installed on the No. 1 clamping component, the No. 1 vacuum suction nozzle is between the No. 1 left clamp and the No. 1 right clamp, and the No. 1 vacuum adsorption interface is arranged on the No. 1 vacuum suction nozzle; when in use, the staff operates the No. 1 clamping component through the No. 1 cylinder component to make the No. 1 left clamp and the No. 1 right clamp cooperate with each other to grab the first group of optical fiber arrays, and then the vacuum pumping component cooperates with the No. 1 vacuum adsorption interface and the No. 1 vacuum suction nozzle to vacuum adsorb the group of optical fiber arrays, so as to improve the firmness of grabbing.

[0007] Preferably, the No. 2 clamping and suction component includes a No. 2 cylinder component, a No. 2 clamping component, a No. 2 left clamp, a No. 2 right clamp, a No. 2 vacuum suction nozzle and a No. 2 vacuum adsorption interface, the No. 2 cylinder component is installed on the No. 1 vertical fixed plate, the No. 2 clamping component is installed at the bottom end of the No. 2 cylinder component, a group of No. 2 left clamps, a group of No. 2 right clamps and a group of No. 2 vacuum suction nozzles are respectively installed on the No. 2 clamping component, the No. 2 vacuum suction nozzle is between the No. 2 left clamp and the No. 2 right clamp, and the No. 2 vacuum suction nozzle is provided with a No. 2 vacuum adsorption interface; when in use, the staff operates the No. 2 clamping component through the No. 2 cylinder component to make the No. 2 left clamp and the No. 2 right clamp cooperate with each other to grab the second group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 2 vacuum adsorption interface and the No. 2 vacuum suction nozzle to vacuum adsorb the group of optical fiber arrays, so as to improve the firmness of grabbing.

[0008] Preferably, the No. 3 clamping and suction component includes a No. 3 cylinder component, a No. 3 clamping component, a No. 3 left clamp, a No. 3 right clamp, a No. 3 vacuum suction nozzle and a No. 3 vacuum adsorption interface, the No. 3 cylinder component is installed on a horizontal fixed plate, the No. 3 clamping component is installed on the bottom end of the No. 3 cylinder component, and the No. 3 clamping component is respectively installed with a group of No. 3 left clamps, a group of No. 3 right clamps and a group of No. 3 vacuum suction nozzles, the No. 3 vacuum suction nozzles are between the No. 3 left clamps and the No. 3 right clamps, and the No. 3 vacuum suction nozzles are provided with No. 3 vacuum adsorption interface; when in use, the staff operates the No. 3 clamping component through the No. 3 cylinder component to make the No. 3 left clamp and the No. 3 right clamp cooperate with each other to grab the third group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 3 vacuum adsorption interface and the No. 3 vacuum suction nozzle to vacuum adsorb the group of optical fiber arrays, so as to improve the firmness of grabbing.

[0009] Preferably, it further comprises a tightening assembly, and the tightening assembly is installed on the first vertical fixing plate;

[0010] The tightening assembly includes a mounting frame and a tightening cylinder, the mounting frame is mounted on the No. 1 vertical fixing plate, and the mounting frame is provided with a tightening cylinder; the No. 1 vertical fixing plate, the horizontal fixing plate and the No. 2 vertical fixing plate are moved as a whole through an external moving mechanism, thereby driving the No. 1 clamping and suction assembly, the No. 2 clamping and suction assembly and the No. 3 clamping and suction assembly to move, and after the movement is completed, the tightening cylinder is operated to extend and tighten, so that the No. 1 vertical fixing plate, the horizontal fixing plate and the No. 2 vertical fixing plate are positioned and fixed, thereby improving the operational firmness.

[0011] Preferably, a prism is further included, and the first clamping component is equipped with a prism; the staff can see the image directly above the chip through the prism through a side view, thereby improving convenience.

[0012] Preferably, the No. 1 clamping and suction component as a whole has a displacement sensing function.

[0013] Preferably, the displacement sensing function of the No. 1 clamping and suction component senses a displacement of 0.5 microns.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: during use, the support frame assembly is moved by an external moving mechanism, so that the No. 1 clamping and suction assembly, the No. 2 clamping and suction assembly and the No. 3 clamping and suction assembly cooperate with each other and clamp and suction a group of light arrays respectively, and the gripping firmness is improved by clamping and suctioning the chip, so that the three FAs are coupled with the chip respectively, and each coupling does not interfere with each other, thereby improving the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the present invention;

[0016] Figure 2 is a first axonometric schematic diagram of the present invention;

[0017] Figure 3 It is a second axonometric schematic diagram of the present invention.

[0018] Markings in the accompanying drawings: 101, vertical fixing plate No. 1; 102, horizontal fixing plate; 103, vertical fixing plate No. 2; 201, cylinder assembly No. 1; 202, clamping assembly No. 1; 203, left clamp No. 1; 204, right clamp No. 1; 205, vacuum nozzle No. 1 206, vacuum adsorption interface No. 1; 207, prism; 301, cylinder assembly No. 2; 302, clamping assembly No. 2; 303, left clamp No. 2; 304, right clamp No. 2; 305, vacuum nozzle No. 2; 306, vacuum adsorption interface No. 2; 401, cylinder assembly No. 3; 402, clamping assembly No. 3; 403, left clamp No. 3; 404, right clamp No. 3; 405, vacuum nozzle No. 3; 406, vacuum adsorption interface No. 3; 501, mounting frame; 502, tightening cylinder. DETAILED DESCRIPTION

[0019] In order to facilitate understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0020] Example 1

[0021] like Figures 1 to 3 As shown, a suction clamping module for triple FA coupling of the present invention comprises a support frame assembly, and also comprises a No. 1 clamping suction assembly, a No. 2 clamping suction assembly and a No. 3 clamping suction assembly, wherein the No. 1 clamping suction assembly, the No. 2 clamping suction assembly and the No. 3 clamping suction assembly are respectively mounted on the support frame assembly;

[0022] The support frame assembly includes a first vertical fixing plate 101, a horizontal fixing plate 102 and a second vertical fixing plate 103, and a group of first vertical fixing plates 101 and a group of second vertical fixing plates 103 are respectively installed at the bottom end of the horizontal fixing plate 102;

[0023] The No. 1 clamping and suction component includes a No. 1 cylinder component 201, a No. 1 clamping component 202, a No. 1 left clamp 203, a No. 1 right clamp 204, a No. 1 vacuum suction nozzle 205 and a No. 1 vacuum suction interface 206. The No. 1 cylinder component 201 is installed on the No. 1 vertical fixed plate 101, and the No. 1 clamping component 202 is installed at the bottom of the No. 1 cylinder component 201. A group of No. 1 left clamps 203, a group of No. 1 right clamps 204 and a group of No. 1 vacuum suction nozzles 205 are respectively installed on the No. 1 clamping component 202. The No. 1 vacuum suction nozzle 205 is between the No. 1 left clamp 203 and the No. 1 right clamp 204, and the No. 1 vacuum suction nozzle 205 is provided with a No. 1 vacuum suction interface 206;

[0024] The No. 2 clamping and sucking assembly includes a No. 2 cylinder assembly 301, a No. 2 clamping assembly 302, a No. 2 left clamp 303, a No. 2 right clamp 304, a No. 2 vacuum suction nozzle 305 and a No. 2 vacuum suction interface 306. The No. 2 cylinder assembly 301 is installed on the No. 1 vertical fixed plate 101, and the No. 2 clamping assembly 302 is installed at the bottom of the No. 2 cylinder assembly 301. A group of No. 2 left clamps 303, a group of No. 2 right clamps 304 and a group of No. 2 vacuum suction nozzles 305 are respectively installed on the No. 2 clamping assembly 302. The No. 2 vacuum suction nozzles 305 are between the No. 2 left clamps 303 and the No. 2 right clamps 304, and the No. 2 vacuum suction nozzles 305 are provided with No. 2 vacuum suction interfaces 306;

[0025] The No. 3 clamping and suction component includes a No. 3 cylinder component 401, a No. 3 clamping component 402, a No. 3 left clamp 403, a No. 3 right clamp 404, a No. 3 vacuum suction nozzle 405 and a No. 3 vacuum adsorption interface 406. The No. 3 cylinder component 401 is installed on the horizontal fixed plate 102, and the No. 3 clamping component 402 is installed at the bottom end of the No. 3 cylinder component 401. A group of No. 3 left clamps 403, a group of No. 3 right clamps 404 and a group of No. 3 vacuum suction nozzles 405 are respectively installed on the No. 3 clamping component 402. The No. 3 vacuum suction nozzle 405 is between the No. 3 left clamp 403 and the No. 3 right clamp 404, and the No. 3 vacuum suction nozzle 405 is provided with a No. 3 vacuum adsorption interface 406.

[0026] In this embodiment, the No. 1 vertical fixing plate 101, the horizontal fixing plate 102 and the No. 2 vertical fixing plate 103 cooperate with each other to drive the No. 1 clamping and suction component, the No. 2 clamping and suction component and the No. 3 clamping and suction component to move, and the staff operates the No. 1 clamping component 202 through the No. 1 cylinder component 201 to make the No. 1 left clamp 203 and the No. 1 right clamp 204 cooperate with each other to grab the first group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 1 vacuum adsorption interface 206 and the No. 1 vacuum suction nozzle 205 to vacuum adsorb the group of optical fiber arrays, and the No. 2 cylinder component 301 operates The No. 2 clamping assembly 302 enables the No. 2 left clamp 303 and the No. 2 right clamp 304 to cooperate with each other to grab the second group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 2 vacuum adsorption interface 306 and the No. 2 vacuum suction nozzle 305 to vacuum adsorb this group of optical fiber arrays. The No. 3 cylinder assembly 401 operates the No. 3 clamping assembly 402 to enable the No. 3 left clamp 403 and the No. 3 right clamp 404 to cooperate with each other to grab the third group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 3 vacuum adsorption interface 406 and the No. 3 vacuum suction nozzle 405 to vacuum adsorb this group of optical fiber arrays.

[0027] Example 2

[0028] like Figures 1 to 3 As shown, a suction clamping module for triple FA coupling of the present invention comprises a support frame assembly, and also comprises a No. 1 clamping suction assembly, a No. 2 clamping suction assembly and a No. 3 clamping suction assembly, wherein the No. 1 clamping suction assembly, the No. 2 clamping suction assembly and the No. 3 clamping suction assembly are respectively mounted on the support frame assembly;

[0029] The support frame assembly includes a first vertical fixing plate 101, a horizontal fixing plate 102 and a second vertical fixing plate 103, and a group of first vertical fixing plates 101 and a group of second vertical fixing plates 103 are respectively installed at the bottom end of the horizontal fixing plate 102;

[0030] The No. 1 clamping and suction component includes a No. 1 cylinder component 201, a No. 1 clamping component 202, a No. 1 left clamp 203, a No. 1 right clamp 204, a No. 1 vacuum suction nozzle 205 and a No. 1 vacuum suction interface 206. The No. 1 cylinder component 201 is installed on the No. 1 vertical fixed plate 101, and the No. 1 clamping component 202 is installed at the bottom of the No. 1 cylinder component 201. A group of No. 1 left clamps 203, a group of No. 1 right clamps 204 and a group of No. 1 vacuum suction nozzles 205 are respectively installed on the No. 1 clamping component 202. The No. 1 vacuum suction nozzle 205 is between the No. 1 left clamp 203 and the No. 1 right clamp 204, and the No. 1 vacuum suction nozzle 205 is provided with a No. 1 vacuum suction interface 206;

[0031] The No. 2 clamping and sucking assembly includes a No. 2 cylinder assembly 301, a No. 2 clamping assembly 302, a No. 2 left clamp 303, a No. 2 right clamp 304, a No. 2 vacuum suction nozzle 305 and a No. 2 vacuum suction interface 306. The No. 2 cylinder assembly 301 is installed on the No. 1 vertical fixed plate 101, and the No. 2 clamping assembly 302 is installed at the bottom of the No. 2 cylinder assembly 301. A group of No. 2 left clamps 303, a group of No. 2 right clamps 304 and a group of No. 2 vacuum suction nozzles 305 are respectively installed on the No. 2 clamping assembly 302. The No. 2 vacuum suction nozzles 305 are between the No. 2 left clamps 303 and the No. 2 right clamps 304, and the No. 2 vacuum suction nozzles 305 are provided with No. 2 vacuum suction interfaces 306;

[0032] The No. 3 clamping and suction assembly includes a No. 3 cylinder assembly 401, a No. 3 clamping assembly 402, a No. 3 left clamp 403, a No. 3 right clamp 404, a No. 3 vacuum suction nozzle 405 and a No. 3 vacuum adsorption interface 406. The No. 3 cylinder assembly 401 is installed on the horizontal fixed plate 102, and the No. 3 clamping assembly 402 is installed at the bottom of the No. 3 cylinder assembly 401. A group of No. 3 left clamps 403, a group of No. 3 right clamps 404 and a group of No. 3 vacuum suction nozzles 405 are respectively installed on the No. 3 clamping assembly 402. The No. 3 vacuum suction nozzles 405 are between the No. 3 left clamps 403 and the No. 3 right clamps 404, and the No. 3 vacuum suction nozzles 405 are provided with No. 3 vacuum adsorption interfaces 406;

[0033] It also includes a tightening assembly, and the tightening assembly is installed on the first vertical fixing plate 101;

[0034] The tightening assembly includes a mounting frame 501 and a tightening cylinder 502. The mounting frame 501 is mounted on the first vertical fixing plate 101, and the tightening cylinder 502 is arranged on the mounting frame 501.

[0035] A prism 207 is also included, and the prism 207 is installed on the first clamping assembly 202 .

[0036] In this embodiment, the No. 1 vertical fixing plate 101, the horizontal fixing plate 102 and the No. 2 vertical fixing plate 103 cooperate with each other to drive the No. 1 clamping and suction component, the No. 2 clamping and suction component and the No. 3 clamping and suction component to move. After the movement is completed, the tightening cylinder 502 is operated to extend and tighten, so that the No. 1 vertical fixing plate 101, the horizontal fixing plate 102 and the No. 2 vertical fixing plate 103 are positioned and fixed. The staff operates the No. 1 clamping component 202 through the No. 1 cylinder component 201 to make the No. 1 left clamp 203 and the No. 1 right clamp 204 cooperate with each other to grab the first group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 1 vacuum adsorption interface 206 and the No. 1 vacuum suction nozzle 205 to carry out vacuum suction on the group of optical fiber arrays. Perform vacuum adsorption, the No. 2 cylinder assembly 301 operates the No. 2 clamping assembly 302 to make the No. 2 left clamp 303 and the No. 2 right clamp 304 cooperate with each other to grab the second group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 2 vacuum adsorption interface 306 and the No. 2 vacuum suction nozzle 305 to vacuum adsorb this group of optical fiber arrays, the No. 3 cylinder assembly 401 operates the No. 3 clamping assembly 402 to make the No. 3 left clamp 403 and the No. 3 right clamp 404 cooperate with each other to grab the third group of optical fiber arrays, and then the vacuum assembly cooperates with the No. 3 vacuum adsorption interface 406 and the No. 3 vacuum suction nozzle 405 to vacuum adsorb this group of optical fiber arrays, and the staff uses the prism 207 to see the image directly above the chip by side vision.

[0037] like Figures 1 to 3 As shown, a suction clamping module for triple FA coupling of the present invention, when working, driven by air pressure, the first clamping and suction component moves downward as a whole, and then the first group of light arrays are clamped by the No. 1 left clamp 203 and the No. 1 right clamp 204, and then the first group of light arrays are further adsorbed by the No. 1 vacuum suction nozzle 205, and after the clamping and adsorption are completed, it rises upward, and the second group of clamping and suction components and the third group of clamping and suction components respectively adsorb the second group of light arrays and the third group of optical fiber arrays according to the process of the first group of clamping and suction components. After the three groups of optical fiber arrays are completed with the support and adsorption, they are moved to the chip that needs to be coupled and coupled in sequence.

[0038] The vacuum nozzle No. 1 205, vacuum nozzle No. 2 305 and vacuum nozzle No. 3 405 of the suction clamp module for triple FA coupling of the present invention are purchased on the market. The technicians in the industry only need to install and operate them according to the accompanying instruction manual without the need for the technicians in this field to make creative efforts.

[0039] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A suction clamp module for triple FA coupling, comprising a support frame assembly, characterized in that: It also includes a No. 1 clamping and suction component, a No. 2 clamping and suction component and a No. 3 clamping and suction component, and the No. 1 clamping and suction component, the No. 2 clamping and suction component and the No. 3 clamping and suction component are respectively installed on the support frame component.

2. A suction clamp module for triple FA coupling as claimed in claim 1, characterized in that: The support frame assembly comprises a first vertical fixing plate (101), a horizontal fixing plate (102) and a second vertical fixing plate (103), wherein a group of the first vertical fixing plate (101) and a group of the second vertical fixing plate (103) are respectively installed at the bottom end of the horizontal fixing plate (102).

3. A suction clamp module for triple FA coupling as claimed in claim 2, characterized in that: The No. 1 clamping and suction component comprises a No. 1 cylinder component (201), a No. 1 clamping component (202), a No. 1 left clamp (203), a No. 1 right clamp (204), a No. 1 vacuum suction nozzle (205) and a No. 1 vacuum suction interface (206). The No. 1 cylinder component (201) is installed on a No. 1 vertical fixed plate (101). The No. 1 clamping component (202) is installed at the bottom end of the No. 1 cylinder component (201). A group of No. 1 left clamps (203), a group of No. 1 right clamps (204) and a group of No. 1 vacuum suction nozzles (205) are respectively installed on the No. 1 clamping component (202). The No. 1 vacuum suction nozzle (205) is between the No. 1 left clamp (203) and the No. 1 right clamp (204). The No. 1 vacuum suction nozzle (205) is provided with a No. 1 vacuum suction interface (206).

4. A suction clamp module for triple FA coupling as claimed in claim 2, characterized in that: The No. 2 clamping and suction component comprises a No. 2 cylinder component (301), a No. 2 clamping component (302), a No. 2 left clamp (303), a No. 2 right clamp (304), a No. 2 vacuum suction nozzle (305) and a No. 2 vacuum suction interface (306). The No. 2 cylinder component (301) is installed on a No. 1 vertical fixed plate (101). The No. 2 clamping component (302) is installed at the bottom end of the No. 2 cylinder component (301). A group of No. 2 left clamps (303), a group of No. 2 right clamps (304) and a group of No. 2 vacuum suction nozzles (305) are respectively installed on the No. 2 clamping component (302). The No. 2 vacuum suction nozzle (305) is between the No. 2 left clamp (303) and the No. 2 right clamp (304). The No. 2 vacuum suction nozzle (305) is provided with a No. 2 vacuum suction interface (306).

5. A suction clamp module for triple FA coupling as claimed in claim 2, characterized in that: The No. 3 clamping and suction component comprises a No. 3 cylinder component (401), a No. 3 clamping component (402), a No. 3 left clamp (403), a No. 3 right clamp (404), a No. 3 vacuum suction nozzle (405) and a No. 3 vacuum suction interface (406). The No. 3 cylinder component (401) is installed on the horizontal fixed plate (102). The No. 3 clamping component (402) is installed at the bottom of the No. 3 cylinder component (401). A group of No. 3 left clamps (403), a group of No. 3 right clamps (404) and a group of No. 3 vacuum suction nozzles (405) are respectively installed on the No. 3 clamping component (402). The No. 3 vacuum suction nozzle (405) is between the No. 3 left clamp (403) and the No. 3 right clamp (404). The No. 3 vacuum suction nozzle (405) is provided with a No. 3 vacuum suction interface (406).

6. A suction clamp module for triple FA coupling as claimed in claim 2, characterized in that: It also includes a tightening assembly, and the tightening assembly is installed on the first vertical fixing plate (101); The tightening assembly comprises a mounting frame (501) and a tightening cylinder (502); the mounting frame (501) is mounted on a first vertical fixing plate (101); and the tightening cylinder (502) is arranged on the mounting frame (501).

7. A suction clamp module for triple FA coupling as claimed in claim 3, characterized in that: It also includes a prism (207), and the prism (207) is installed on the first clamping component (202).

8. A suction clamp module for triple FA coupling as claimed in claim 1, characterized in that: The No. 1 clamping and suction component as a whole has a displacement sensing function.

9. A suction clamp module for triple FA coupling as claimed in claim 8, characterized in that: The displacement sensing function of the No. 1 clamping and suction component has a sensing displacement of 0.5 microns.