Automatic jig replacement and storage bin and method for substrate detection device

Abstract

The invention discloses an automatic jig replacement and storage bin and method for a substrate detection device, the automatic jig replacement and storage bin comprises a storage rack and an automatic moving mechanism, the storage rack is provided with a plurality of storage grids, and a single jig is placed in each storage grid; the automatic material moving mechanism is used for transferring the jig between the material storage rack and the detection device body; the automatic material moving mechanism comprises a first material moving frame and a second material moving frame which are independently driven, the first material moving frame and the second material moving frame are each provided with an insertion column matched with an insertion hole in the jig, and the insertion columns conduct sectional type material moving or feeding on the jig. A plurality of types of jigs can be stored on the storage rack, and each jig is independently stored; the automatic material moving mechanism capable of translating and lifting is used for transferring the jig between the material storage frame and the detection device body, the jig replacing steps of taking, storing, installing and the like can be automatically achieved, the jig replacing efficiency is greatly improved, manual participation is not needed, and the labor cost is saved.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate detection, and in particular to an automatic replacement storage bin of a fixture of a substrate detection device and a method thereof. Background Art

[0002] Before leaving the factory, the circuit board needs to be electrically tested for short circuits and open circuits of the integrated circuit. During the test, the board needs to be fixed on the positioning mechanism, and the test fixture on the test device is moved above the board. The probes on the test fixture contact the contacts on the board for electrical testing. The board has various specifications and sizes, and needs to be matched with different types of test fixtures.

[0003] At present, the replacement of the fixture on the substrate inspection device is a manual operation, which requires removing the original fixture on the inspection device and then reinstalling the new fixture. The whole process is cumbersome, and omissions and errors may occur when switching the fixture, affecting the subsequent inspection results of the substrate. Summary of the invention

[0004] In order to solve the above problems, the present invention provides a fixture automatic replacement storage bin and method for a substrate detection device, which can automatically replace the fixture without manual operation, thus saving labor costs.

[0005] To this end, the technical solution of the present invention is: a fixture automatic replacement storage bin of a substrate detection device, comprising: A material storage rack, which is provided with a plurality of material storage grids, each of which is provided with a single fixture; Automatic material transfer mechanism, used to transfer the jig between the material storage rack and the detection device body; The automatic material moving mechanism comprises a first material moving rack and a second material moving rack which are driven independently. The first material moving rack and the second material moving rack are respectively provided with plug-in columns which match the plug-in holes on the fixture. The plug-in columns perform segmented material moving or feeding on the fixture.

[0006] On the basis of the above scheme and as a preferred scheme of the above scheme: the automatic material moving mechanism is installed on the horizontal moving module, and the automatic material moving mechanism is provided with a longitudinal moving module which drives the first material moving rack and the second material moving rack to rise and fall as a whole, and can drive the first material moving rack and the second material moving rack to move to a position opposite to any material storage grid.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: the first material moving rack and the second material moving rack are both provided with independent translation mechanisms, and both can perform independent translation; a lifting mechanism is provided under the plug post, which can drive the plug post to be inserted into the socket or pulled out from the socket.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: the first material moving rack is provided with a first pin, the second material moving rack is provided with a second pin, and the fixture is provided with two rows of front and rear sockets, and there are three position states: the first pin is inserted into the front socket alone, the first pin is inserted into the rear socket and the second pin is inserted into the front socket, and the second pin is inserted into the rear socket alone.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: a blocking cylinder and a beam sensor are provided at the inlet and outlet of each material storage grid, the blocking cylinder is used to limit the fixture, and the beam sensor is used to sense the fixture; a scanner is provided at the inlet of each material storage grid to obtain the fixture model.

[0010] On the basis of the above scheme and as a preferred scheme of the above scheme: it also includes a sheet metal warehouse body, which covers the outside of the storage rack and the automatic material moving mechanism, and the sheet metal warehouse body is provided with a material moving port for the first material moving rack and the second material moving rack to move.

[0011] Another technical solution of the present invention is: a method for automatically replacing a fixture of a substrate detection device, using the above-mentioned storage bin, comprising the following steps: Store the jigs in the storage compartments of the storage rack and record the corresponding models of the jigs; The automatic material transfer mechanism takes out the jig of the corresponding model from the material storage grid and sends the jig to the jig installation position of the detection device body; or, The automatic material transfer mechanism first removes the jig from the detection device body, puts it into the corresponding material storage grid, then takes another jig from the material storage grid, and then sends the other jig to the jig installation position of the detection device body.

[0012] On the basis of the above solution and as a preferred solution of the above solution: the automatic material transfer mechanism takes the fixture from the material storage grid or the detection device body, the steps are as follows: The near material moving rack close to one side of the jig is moved to the bottom of the jig, the plug post on the near material moving rack is inserted into the first plug hole of the jig, and the jig is pulled out; After the near material moving rack pulls the fixture out halfway, the plug post on the near material moving rack moves down and detaches from the fixture; The near material moving rack and the far material moving rack far away from the jig both move toward one side of the jig, the plug post of the near material moving rack is inserted into the second plug hole of the jig, and the plug post of the far material moving rack is inserted into the first plug hole of the jig, and then the jig is completely moved to the automatic material moving mechanism.

[0013] On the basis of the above scheme and as a preferred scheme of the above scheme: the automatic material transfer mechanism places the jig into the jig installation position of the material storage grid or the detection device body, and the steps are as follows: The near material transfer rack and the far material transfer rack send the jig to the material storage grid or the jig installation position of the detection device body; After the jig is sent back halfway, the pins on the near material transfer rack and the far material transfer rack move down and detach from the jig; The plug post of the remote material transfer rack is moved to the bottom of the second plug hole of the jig and inserted, and the jig is completely pushed into the jig installation position of the material storage grid or the detection device body.

[0014] On the basis of the above solution and as a preferred solution of the above solution: the steps of storing the jig in the storage rack are as follows: Put the jig into the material storage grid entrance. After the entrance sensor senses the jig, the entrance blocking cylinder opens and the jig is pushed into the material storage grid. After the jig is pushed in, the sensor at the exit of the material storage grid senses the jig, and the blocking cylinder at the entrance is closed, and the jig is stored in the material storage grid; When taking out the jig, select the specification of the jig, then the blocking cylinder at the outlet of the corresponding storage grid will open, and the jig will be taken out from the outlet.

[0015] Compared with the prior art, the present invention has the following beneficial effects: The jig storage bin of the present invention is arranged on one side of the substrate detection device body, and the storage rack can store multiple types of jigs, and each jig is stored separately; the jig is transferred between the storage rack and the detection device body by using an automatic material transfer mechanism that can be translated and lifted, and the steps of replacing the jig, such as taking, storing, and installing, can be automatically realized, thereby greatly improving the efficiency of jig replacement, eliminating the need for manual intervention, and saving labor costs.

[0016] The present invention utilizes two independently translatable material transfer racks to carry out segmented pick-up and placement of jigs. When taking a jig, the nearby material transfer rack is first used to pull the jig. After half of the jig is pulled out, the two moving racks cooperate to completely move the jig to the automatic material transfer mechanism. At the same time, when placing a jig, the two moving racks cooperate to push the jig to the corresponding equipment. After half of the jig is pushed in, the remaining part of the jig is completely pushed in by a single material transfer rack, so that the displacement of large-sized jigs is achieved with a minimized structure, simplifying the equipment structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 It is a structural side view of the present invention; Figure 3 It is a structural schematic diagram of the material storage rack of the present invention; Figure 4 This is a schematic diagram of the structure of a three-grid material storage rack of the present invention; Figure 5 It is a schematic diagram of the coordination between the material storage rack and the fixture of the present invention; Figure 6 It is a structural schematic diagram of the automatic material moving mechanism of the present invention; Figure 7 It is a top view of the structure of the automatic material moving mechanism of the present invention; Figure 8 It is a schematic diagram of the automatic material transfer mechanism of the present invention for picking up and placing a jig on a material storage rack; Fig. 9 It is a schematic diagram of the automatic material transfer mechanism of the present invention for picking up and placing a fixture on the detection device body.

[0018] Marked in the figure are: material storage rack 1, material storage grid 11, first beam sensor 12, first blocking cylinder 13, second beam sensor 14, second blocking cylinder 15, scanner 16, automatic material moving mechanism 2, material moving assembly 21, longitudinal moving module 22, first material moving rack 211, second material moving rack 212, first translation mechanism 213, second translation mechanism 214, first plug post 215, second plug post 216, second lifting cylinder 217, fixture 3, first socket 31, second socket 32, transverse moving module 4, detection device body 5. DETAILED DESCRIPTION

[0019] In the description of the present invention, it should be noted that directional words, such as the terms "center", "lateral (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating directions and positional relationships are based on the directions or positional relationships shown in the accompanying drawings, which are only for the convenience of narrating the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific scope of protection of the present invention.

[0020] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the definition of "first" and "second" features can explicitly or implicitly include one or more of the features. In the description of the present invention, "several" and "a number" mean two or more, unless otherwise clearly and specifically defined.

[0021] See the attached drawings. The jig automatic replacement storage bin of the substrate detection device described in this embodiment includes a sheet metal bin body (not shown in the figure), a material storage rack 1 and an automatic material transfer mechanism 2. The sheet metal bin body is composed of a sheet metal panel, which is covered on the outside of the material storage rack 1 and the automatic material transfer mechanism 2, so that the jig 3 is stored in a dust-free environment; the sheet metal bin body is provided with a material transfer port that is connected to the substrate detection device.

[0022] The material storage rack 1 is provided with a plurality of storage grids 11 distributed in rows and columns, for example, a 9-grid storage rack arranged in 3*3. Each storage grid 11 is an independent fixture storage area, and a fixture 3 can be placed separately. The side of the material storage rack 1 facing away from the automatic material moving mechanism 2 is the entrance, and the side facing the automatic material moving mechanism 2 is the exit. A first matching sensor 12 and a first blocking cylinder 13 are provided at the entrance of each material storage grid 11, and a second matching sensor 14 and a second blocking cylinder 15 are provided at the exit of each material storage grid 11. The first matching sensor 12 and the second matching sensor 14 are used to sense whether the fixture is in place, and the first blocking cylinder 13 and the second blocking cylinder 15 are used to limit the fixture 3. When the fixture 3 is placed or taken, the blocking cylinder on the corresponding side is opened.

[0023] A scanner 16 is provided at the entrance of each material storage grid 11. In the initial state, when the jigs 3 are placed manually, the scanner 16 can scan each jig 3 to identify the jig model.

[0024] The automatic material moving mechanism 2 is arranged between the material storage rack 1 and the detection device body 5, and is used to transfer the jig 3 between the material storage rack 1 and the detection device body 5. The automatic material moving mechanism 2 is installed on the lateral moving module 4, and the lateral moving module 4 can select the existing horizontal linear motion module or other translation track mechanism, so that the automatic material moving mechanism 2 can move horizontally relative to the material storage rack 1, relative to the horizontal position of each material storage grid 11.

[0025] A material moving assembly 21 and a longitudinal moving module 22 for driving the material moving assembly 21 to rise and fall are provided above the automatic material moving mechanism 2. The longitudinal moving module 22 can select an existing vertical linear motion module, or a conventional servo motor can drive the lead screw to rotate through a transmission shaft and a transmission wheel group. Active blocks that cooperate with the lead screw thread are provided at both ends of the material moving assembly. The material moving assembly 21 is driven to rise and fall by rotating the lead screw, which is relative to the height of each storage grid 11 in the longitudinal direction.

[0026] The material moving assembly 21 includes an independently driven first material moving rack 211 and a second material moving rack 212. The first material moving rack 211 is provided with an independent first translation mechanism 213, which allows the first material moving rack 211 to move horizontally. Similarly, the second material moving rack 212 is provided with an independent second translation mechanism 214, which allows the second material moving rack 212 to move horizontally. The first material moving rack 211 is placed under the second material moving rack 212, and the two can be separated or overlapped and closed.

[0027] The first material moving rack 211 is provided with a first plug post 215 at one end away from the second material moving rack 212, and a first lifting cylinder 217 for driving the first plug post 215 to extend and retract up and down, which can drive the first plug post 215 to insert upward into the socket of the jig, thereby driving the jig 3 to move; at the same time, the second material moving rack 212 is provided with a second plug post 216 at one end away from the first material moving rack 211, and a second lifting cylinder 217 for driving the second plug post 216 to extend and retract up and down, which can drive the second plug post 216 to insert upward into the socket of the jig 3, thereby driving the jig to move.

[0028] Each side of all jigs 3 is provided with a row of plug holes, and the jigs are placed in the material storage grid 11. At this time, the jig 3 has a row of first plug holes 31 on the side close to the first material moving rack 211, and a row of second plug holes 32 on the side away from the first material moving rack 211. The first plug post 215, the second plug post 216, the first plug hole 31, and the second plug hole 32 have three position states: The first state: the first plug 215 is inserted into the first plug hole 31 alone, and the jig 3 is pulled out halfway from the material storage grid 11, or the jig 3 is completely pushed into the material storage grid 11; The second state: the first plug 215 is inserted into the second plug hole 32 and the second plug 216 is inserted into the first plug hole 31, and the jig 3 is completely pulled out of the material storage grid 11, or the jig 3 is sent into the jig installation position of the detection device body 5 and is sent out halfway; The third state: the second plug 216 is inserted into the second plug hole 32 alone, and the jig 3 is completely inserted into the jig installation position of the detection device body 5, or the jig 3 is half pulled out from the jig installation position of the detection device body 5.

[0029] Specifically, the automatic fixture replacement method of the substrate detection device includes the following steps: In the initial state, the jigs 3 are manually stored in the respective storage compartments 11 of the storage rack 1 in sequence, and the corresponding models of the jigs are recorded; To store the jig in the storage rack, follow these steps: S1.1. Manually put the jig 3 into the entrance of the material storage grid 11. After the first beam sensor 12 at the entrance senses the jig 3, the first blocking cylinder 13 at the entrance opens, and the jig 3 is pushed into the material storage grid 11. At the same time, the scanner 16 at the entrance can scan the jig to identify the jig model and store the record for easy retrieval of the jig.

[0030] S1.2, after the jig 3 is pushed in, the second beam sensor 14 at the outlet of the material storage grid 11 senses the jig 3, and the first blocking cylinder 13 at the inlet is closed. At this time, the first blocking cylinder 13 and the second blocking cylinder 15 at the inlet and outlet are both in a closed state, so that the jig 3 is stored in the material storage grid 11.

[0031] When the fixture is automatically replaced or installed, there are many situations as follows: The first case: when the fixture installation position of the detection device body 5 is empty and the fixture is automatically installed: a1. Take out the corresponding model of the fixture 3 from the material storage grid 11. The specific steps are as follows: a1.1. Select the specification of the jig, move the material transfer assembly 21 to the position opposite to the corresponding material storage grid 11, and open the second blocking cylinder 15 at the outlet of the material storage grid; a1.2. At this time, the material moving rack near the side of the jig is the first material moving rack 211, so the first material moving rack 211 moves to the bottom of the jig 3, so that the first plug 215 on the first material moving rack 211 can be inserted into the first plug hole 31 of the jig 3 nearby. At this time, the first material moving rack 211 is retracted to pull the jig 3 out of the material storage grid 11. Since the jig 3 is relatively long, the first material moving rack 211 can only pull out half of the jig; a1.3. After the first material moving rack 211 pulls the fixture out halfway, the first plug post 215 on the first material moving rack 211 moves downward, so that the first plug post 215 is separated from the first plug hole 31 of the fixture; a1.4. The first material moving rack 211 and the second material moving rack 212 are both moved toward one side of the fixture. The first plug 215 of the first material moving rack 211 is moved to the bottom of the second plug hole 32 of the fixture 3 and inserted therein. The second plug 216 of the second material moving rack 212 is moved to the bottom of the first plug hole 31 of the fixture 3 and inserted therein. a1.5. The first material moving rack 211 and the second material moving rack 212 move synchronously to take out the jig 3 from the material storage grid 11 and completely move it to the material moving assembly 21 .

[0032] a2. Place the jig into the jig installation position of the detection device body 5. The specific steps are as follows: a2.1. The material transfer assembly 21 moves to a position opposite to the fixture installation position of the detection device body 5; a2.2. The first material moving rack 211 and the second material moving rack 212 are synchronously translated toward one side of the detection device body 5 to send the fixture 3 to the fixture installation position; a2.3. After the first material moving rack 211 and the second material moving rack 212 return half of the jig 3, the first material moving rack is far away from the detection device body 5 and the travel is insufficient; therefore, the first plug post 215 and the second plug post 216 on the first material moving rack 211 and the second material moving rack 212 move downward at the same time, the first plug post 215 leaves the second plug hole 32, and the second plug post 216 leaves the first plug hole 31; a2.4. The second material moving rack 212 moves away from the detection device body 5, so that the second plug 216 moves to the bottom of the second plug hole 32 and is inserted into the second plug hole 32; a2.5. The second material moving rack 212 moves toward the side of the detection device body 5, pushes the fixture 3 completely into the fixture installation position, and then detaches from the fixture, completing the automatic installation operation of the fixture.

[0033] The second situation: when there is an old jig in the jig installation position of the detection device body 5 and a new jig needs to be replaced: b1. Remove the old fixture from the fixture installation position. The specific steps are as follows: b1.1. At this time, the nearby material moving rack near the old jig is the second material moving rack 212, so the second material moving rack 212 is moved to the bottom of the jig 3, so that the second plug post 216 on the second material moving rack 212 can be inserted into the second plug hole 32 of the jig 3 nearby. At this time, the second material moving rack 212 is retracted to pull the jig 3 out of the jig installation position. Since the jig is relatively long, the second material moving rack 212 can only pull out half of the jig 3; b1.2. After the second material moving rack 212 pulls the fixture 3 out halfway, the second plug post 216 on the second material moving rack 212 moves downward, so that the second plug post 216 is separated from the second plug hole 32 of the fixture; b1.3, the first material moving rack 211 and the second material moving rack 212 are both moved toward the side of the fixture 3, the first plug 215 of the first material moving rack 212 is moved to be inserted into the second plug hole 32 of the fixture 3, and the second plug 216 of the second material moving rack 212 is moved to be inserted into the first plug hole 31 of the fixture 3; b1.4. The first material moving rack 211 and the second material moving rack 212 move synchronously, remove the fixture 3 from the fixture installation position, and completely move it to the material moving assembly 21.

[0034] b2. Put the disassembled fixture back into the corresponding storage grid 11. The specific steps are as follows: b2.1. The material transfer assembly 21 moves to the side of the material storage grid 11 corresponding to the fixture, the two are located opposite to each other, and at this time, the second blocking cylinder 15 at the outlet of the material storage grid 11 is opened; b2.2, the first material moving rack 211 and the second material moving rack 212 are synchronously translated toward one side of the material storage grid 11 to deliver the fixture 3 to the material storage grid 11; b2.3. After the first material moving rack 211 and the second material moving rack 212 return half of the jig 3, the second material moving rack 212 is far away from the material storage grid 11 and the travel is insufficient; therefore, the first plug post 215 and the second plug post 216 on the first material moving rack 211 and the second material moving rack 212 move downward at the same time, the first plug post 215 leaves the second plug hole 32, and the second plug post 216 leaves the first plug hole 31; b2.4. The first material moving rack 211 moves away from the material storage grid 11, so that the first plug post 215 moves to the bottom of the first plug hole 31 and is inserted into the first plug hole 31; b2.5. The first material moving rack 211 moves toward the side of the material storage grid 11. After the jig 3 is completely pushed into the material storage grid 11, the first plug post 215 disengages from the first plug hole 31 of the jig 3, completing the automatic storage operation of the jig 3. At this time, the jig installation position of the detection device body is restored to an empty state, and the jig is automatically installed. The above steps can be used to perform the automatic jig installation operation.

[0035] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A fixture automatic replacement storage bin for a substrate inspection device, characterized in that: include: A material storage rack, which is provided with a plurality of material storage grids, each of which is provided with a single fixture; Automatic material transfer mechanism, used to transfer the jig between the material storage rack and the detection device body; The automatic material moving mechanism comprises a first material moving rack and a second material moving rack which are driven independently. The first material moving rack and the second material moving rack are respectively provided with plug-in columns which match the plug-in holes on the fixture. The plug-in columns perform segmented material moving or feeding on the fixture.

2. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: The automatic material moving mechanism is installed on the transverse moving module, and the automatic material moving mechanism is provided with a longitudinal moving module that drives the first material moving rack and the second material moving rack to rise and fall as a whole, and can drive the first material moving rack and the second material moving rack to move to a position opposite to any material storage grid.

3. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: The first material moving rack and the second material moving rack are both provided with independent translation mechanisms, and both can be independently translated; a lifting mechanism is provided under the plug post, which can drive the plug post to be inserted into the plug hole or pulled out from the plug hole.

4. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: The first material moving rack is provided with a first plug pin, the second material moving rack is provided with a second plug pin, and the fixture is provided with two rows of front and rear sockets, and there are three position states: the first plug pin is inserted into the front socket alone, the first plug pin is inserted into the rear socket and the second plug pin is inserted into the front socket, and the second plug pin is inserted into the rear socket alone.

5. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: A blocking cylinder and a beam sensor are provided at the inlet and outlet of each material storage grid. The blocking cylinder is used to limit the position of the fixture, and the beam sensor is used to sense the fixture. A scanner is provided at the inlet of each material storage grid to obtain the fixture model.

6. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: It also includes a sheet metal warehouse body, which covers the outer side of the material storage rack and the automatic material moving mechanism, and is provided with a material moving opening for the first material moving rack and the second material moving rack to move.

7. A method for automatically replacing a fixture of a substrate inspection device, characterized in that: Using the storage bin according to any one of claims 1 to 6 comprises the following steps: Store the jigs in the storage compartments of the storage rack and record the corresponding models of the jigs; The automatic material transfer mechanism takes out the jig of the corresponding model from the material storage grid and sends the jig to the jig installation position of the detection device body; or, The automatic material transfer mechanism first removes the jig from the detection device body, puts it into the corresponding material storage grid, then takes another jig from the material storage grid, and then sends the other jig to the jig installation position of the detection device body.

8. The method for automatically replacing a jig of a substrate inspection device according to claim 7, characterized in that: The automatic material transfer mechanism takes the jig from the material storage grid or the detection device body, and the steps are as follows: The near material moving rack close to one side of the jig is moved to the bottom of the jig, the plug post on the near material moving rack is inserted into the first plug hole of the jig, and the jig is pulled out; After the near material moving rack pulls the fixture out halfway, the plug post on the near material moving rack moves down and detaches from the fixture; The near material moving rack and the far material moving rack far away from the jig both move toward one side of the jig, the plug post of the near material moving rack is inserted into the second plug hole of the jig, and the plug post of the far material moving rack is inserted into the first plug hole of the jig, and then the jig is completely moved to the automatic material moving mechanism.

9. The automatic fixture replacement method of a substrate inspection device according to claim 7, characterized in that: The automatic material transfer mechanism places the jig into the material storage grid or the jig installation position of the detection device body, and the steps are as follows: The near material transfer rack and the far material transfer rack send the jig to the material storage grid or the jig installation position of the detection device body; After the jig is sent back halfway, the pins on the near material transfer rack and the far material transfer rack move down and detach from the jig; The plug post of the remote material transfer rack is moved to the bottom of the second plug hole of the jig and inserted, and the jig is completely pushed into the jig installation position of the material storage grid or the detection device body.

10. The automatic fixture replacement method of a substrate inspection device according to claim 7, characterized in that: To store the jig in the storage rack, follow these steps: Put the jig into the material storage grid entrance. After the entrance sensor senses the jig, the entrance blocking cylinder opens and the jig is pushed into the material storage grid. After the jig is pushed in, the sensor at the exit of the material storage grid senses the jig, and the blocking cylinder at the entrance is closed, and the jig is stored in the material storage grid; When taking out the jig, select the specification of the jig, then the blocking cylinder at the outlet of the corresponding storage grid will open, and the jig will be taken out from the outlet.

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