Fused quartz element transfer device and automatic production line

Abstract

The invention relates to the technical field of fused quartz element manufacturing equipment, in particular to a fused quartz element transfer device and an automatic production line, the fused quartz element transfer device comprises a transfer trolley, a hoisting frame and a hanging basket assembly, and the hoisting frame comprises a first support, a second support and a connecting cross beam; the first support and the second support are arranged in a spaced mode in the first direction so that a containing space can be formed between the first support and the second support, the connecting cross beam is arranged in the containing space, and the connecting cross beam is fixedly connected with the first support and the second support so that the containing space can be divided into a part containing space and a bearing space which are sequentially arranged in the gravity direction. The transfer trolley is arranged in the bearing space, the hanging basket assembly is arranged in the part containing space, and the hoisting frame is detachably connected with the transfer trolley and the hanging basket assembly. According to the fused quartz element transfer device and the automatic production line, the structure is simplified, the stability is improved, the maintainability, the replaceability and the utilization rate of the transfer trolley are improved, and the compatibility is improved.

Description

Technical Field

[0001] The present application relates to the technical field of fused quartz component manufacturing equipment, and in particular to a fused quartz component transfer device and an automated production line. Background Art

[0002] Fused quartz (also known as synthetic quartz) is widely used in semiconductor manufacturing, optical instruments, laser systems and other fields due to its excellent optical properties, thermal stability and low thermal expansion coefficient. In order to improve production efficiency and reduce human errors, the introduction of an automated production system is essential for the transfer device of fused quartz components. As the core module of the automated transmission of special fused quartz components, the fused quartz component transfer device directly affects the transmission efficiency and safety of fused quartz components between different process equipment.

[0003] However, the current transfer device for fused quartz components is an integrated assembly of positioning blocks of various shapes, which has a complex structure, is inconvenient to assemble, has poor operability, and is not compatible with fused quartz components, making it difficult to achieve automated transmission of the production line. Moreover, the transfer device is usually targeted at one or two production line equipment and does not have positioning compatibility with a variety of process equipment, which limits the scope of application of the process equipment.

[0004] In addition, the transfer devices are mostly simple metal material welding, which is very easy to overturn during use, damaging the fused quartz components and is not suitable for automated transmission. Summary of the invention

[0005] The purpose of the present application is to provide a fused quartz component transfer device and an automated production line, so as to solve the technical problems existing in the prior art to a certain extent that the current transfer device of fused quartz components is an integrated assembly of positioning blocks of various shapes, with a complex structure, inconvenient assembly, poor operability, poor compatibility with fused quartz components, and it is difficult to achieve automated transmission of the production line; and the transfer device is usually targeted at one or two production line equipment, and does not have positioning compatibility with multiple process equipment, resulting in a small scope of application of the process equipment.

[0006] According to a first aspect of the present application, a fused quartz element transfer device is provided, comprising a transfer vehicle, a hanging frame and a hanging basket assembly, wherein the hanging frame comprises a first bracket, a second bracket and a connecting crossbeam, wherein the first bracket and the second bracket are arranged at intervals along a first direction to form a storage space between the first bracket and the second bracket, wherein the connecting crossbeam is arranged in the storage space, and the connecting crossbeam is fixedly connected to the first bracket and the second bracket to separate the storage space into a component placement space and a supporting space sequentially arranged along the gravity direction;

[0007] The transfer vehicle is arranged in the supporting space, the hanging basket assembly is arranged in the mounting space, and the hanging frame is detachably connected to the transfer vehicle and the hanging basket assembly respectively.

[0008] Preferably, the hanging basket assembly comprises a supporting rod and a bracket, the supporting rod extends along the first direction, the bracket is used to fix the fused quartz element, and the bracket is arranged on the supporting rod;

[0009] The first bracket and the second bracket are both provided with a first limiting groove at one end away from the transfer vehicle;

[0010] When the hanging basket assembly is arranged in the component placement space, the two ends of the supporting rod in the first direction are respectively arranged in the first limiting grooves of the first bracket and the second bracket.

[0011] Preferably, the bracket includes a V-shaped bracket and two hangers, the hangers extend along the gravity direction, two ends of the V-shaped bracket are respectively connected to the first ends of the two hangers, and the second ends of the two hangers are fixed to the supporting rod.

[0012] Preferably, the lifting frame also includes a docking plate, which is fixedly arranged on the connecting cross beam, and a lifting limit part is provided on the side of the transfer vehicle facing the docking plate, and one of the lifting limit part and the docking plate is provided with a docking groove, and the other of the lifting limit part and the docking plate is provided with a limit pin corresponding to the docking groove, and the lifting limit part can rise and fall along the direction of gravity to drive the limit pin to extend into and move out of the docking groove.

[0013] Preferably, the connecting crossbeam is arranged at the lower half of the hanging frame in the gravity direction;

[0014] The fused quartz element transport device further comprises a counterweight block, and the counterweight block is arranged on the connecting crossbeam.

[0015] Preferably, the bottom ends of both the first bracket and the second bracket are provided with universal wheels.

[0016] Preferably, both the first bracket and the second bracket are rectangular frames parallel to a predetermined plane, the predetermined plane is a plane determined by both the gravity direction and the second direction, and the second direction is perpendicular to the plane determined by both the gravity direction and the first direction;

[0017] The rectangular frame is also provided with a support beam extending along the second direction.

[0018] Preferably, it further comprises a first limit block, and the first limit block is provided on both sides of the hanging frame in the first direction;

[0019] A second limiting groove is provided on a side of the first limiting block facing away from the hanging frame, and the second limiting groove is used to dock with a first positioning device at a target position.

[0020] Preferably, it further comprises a second limit block, and the second limit block is provided on both sides of the hanging frame in a second direction, and the second direction is perpendicular to a plane determined by the first direction and the gravity direction;

[0021] A third limiting groove is provided on a side of the second limiting block facing away from the hanging frame, and the third limiting groove is used to dock with a second positioning device at a target position.

[0022] According to the second aspect of the present application, an automated production line is provided, comprising the fused quartz element transfer device described in any of the above technical solutions, and thus, having all the beneficial technical effects of the fused quartz element transfer device, which will not be described in detail herein.

[0023] Compared with the prior art, the beneficial effects of this application are:

[0024] The fused quartz element transfer device provided by the present application connects the first bracket and the second bracket spaced apart along the first direction at two levels of the cross beam, so that the connecting cross beam divides the accommodation space between the first bracket and the second bracket into a placement space and a support space sequentially arranged along the gravity direction, and the transfer vehicle is detachably arranged in the support space, and the hanging basket assembly is detachably arranged in the placement space. In this way, on the first hand, the transfer vehicle and the hanging basket assembly are respectively arranged in the relative placement space and the support space, which effectively simplifies the structure of the transfer device, reduces the influence of the transfer vehicle on the fused quartz element, and ensures the stability of the fused quartz element during the transfer process; on the second hand, the transfer vehicle The detachability of the basket assembly and the hoisting frame can improve the maintainability and replaceability of the transfer device (that is, once the transfer vehicle or the hoisting frame is damaged, the replacement and maintenance operations can be achieved through disassembly), and the utilization rate of the transfer vehicle is improved (that is, when the fused quartz element is in a non-transportation state (for example, a processing state, an idle state, etc.) The transfer vehicle can be unloaded from the hoisting frame and used to transport other objects to be transported); thirdly, the detachability of the hanging basket assembly and the hoisting frame can make the fused quartz element transfer device adapt to fused quartz elements or other objects to be transported of different specifications and structures, thereby effectively improving the compatibility of the fused quartz element transfer device.

[0025] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 A schematic diagram of the axonometric structure of a fused quartz element transport device provided in an embodiment of the present application;

[0028] Figure 2 for Figure 1 An enlarged structural schematic diagram of the provided fused quartz element transport device at position A;

[0029] Figure 3 A schematic diagram of the front view of the structure of the fused quartz element transport device provided in an embodiment of the present application;

[0030] Figure 4 A schematic diagram of the top view of the structure of the fused quartz element transport device provided in an embodiment of the present application;

[0031] Figure 5 Another isometric structural schematic diagram of the fused quartz element transport device provided in the application embodiment.

[0032] Reference numerals:

[0033] 10-first limiting groove; 11-first bracket; 12-second bracket; 13-connecting beam; 14-reinforcement rib; 21-bracket; 211-V-shaped bracket; 212-hanger; 213-limiting pad; 22-supporting rod; 3-transfer vehicle; 31-lifting limiting part; 311-limiting pin; 41-first limiting block; 411-second limiting groove; 42-second limiting block; 421-third limiting groove; 43-third limiting block; 5-counterweight block; 6-docking plate; 7-fused quartz element; 81-first positioning device.

[0034] F1-first direction; F2-second direction; G-gravity direction. DETAILED DESCRIPTION

[0035] The technical solution of the present application will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0036] The components of the embodiments of the present application generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed, but merely represents the selected embodiments of the present application.

[0037] Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of this application.

[0038] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0039] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] Refer to the following Figures 1 to 5 The present invention describes a fused quartz component transporting device and an automated production line according to some embodiments of the present application.

[0041] See also Figures 1 to 5 As shown, an embodiment of the first aspect of the present application provides a fused quartz element transport device, which includes a transport vehicle 3, a hanging frame and a hanging basket assembly, the hanging frame includes a first bracket 11, a second bracket 12 and a connecting beam 13, the first bracket 11 and the second bracket 12 are arranged at intervals along the first direction F1 to form a receiving space between the first bracket 11 and the second bracket 12, the connecting beam 13 is arranged in the receiving space, and the connecting beam 13 is fixedly connected to the first bracket 11 and the second bracket 12 to separate the receiving space into a placement space and a supporting space arranged in sequence along the gravity direction G. The transport vehicle 3 is arranged in the supporting space, the hanging basket assembly is arranged in the placement space, and the hanging frame is detachably connected to the transport vehicle 3 and the hanging basket assembly, respectively.

[0042] According to the fused quartz element transfer device provided by the above technical features, the first bracket 11 and the second bracket 12 arranged at intervals along the first direction F1 are connected by a connecting crossbeam 13, so that the connecting crossbeam 13 divides the accommodating space between the first bracket 11 and the second bracket 12 into a placement space and a supporting space arranged in sequence along the gravity direction G, and the transfer vehicle 3 is detachably arranged in the supporting space, and the hanging basket assembly is detachably arranged in the placement space. In this way, on the first aspect, the transfer vehicle 3 and the hanging basket assembly are respectively arranged in the relative placement space and the supporting space, which effectively simplifies the structure of the transfer device, reduces the influence of the transfer vehicle 3 on the fused quartz element 7, and ensures the stability of the fused quartz element 7 during the transfer process. ; On the second hand, the detachability of the transfer vehicle 3 and the lifting frame can improve the maintainability and replaceability of the transfer device (that is, once the transfer vehicle 3 or the lifting frame is damaged, the parts can be replaced, repaired, etc. can be achieved by disassembly), and the utilization rate of the transfer vehicle 3 is improved (that is, when the fused quartz element 7 is in a non-transportation state (for example, a processing state, an idle state, etc.) , The transfer vehicle 3 can be unloaded from the lifting frame and used to transport other objects to be transported); on the third hand, the detachability of both the hanging basket assembly and the lifting frame can make the fused quartz element transfer device adapt to fused quartz elements 7 or other objects to be transported of different specifications and structures, effectively improving the compatibility of the fused quartz element transfer device.

[0043] Preferably, if Figures 1 to 5 As shown, the above-mentioned hanging basket assembly may include a supporting rod 22 and a bracket 21, the supporting rod 22 extends along the first direction F1, the bracket 21 is used to fix the fused quartz element 7, the bracket 21 is arranged on the supporting rod 22, and the size of the supporting rod 22 in the first direction F1 is larger than the size of the bracket 21 in the first direction F1, so that the two ends of the supporting rod 22 extend respectively relative to the bracket 21.

[0044] Preferably, if Figure 4 As shown, the ends of the first bracket 11 and the second bracket 12 away from the transfer vehicle 3 are both provided with a first limiting groove 10. When the hanging basket assembly is arranged in the component placement space, the two ends of the supporting rod 22 in the first direction F1 are respectively arranged in the first limiting grooves 10 of the first bracket 11 and the second bracket 12, so as to improve the assembly accuracy and stability of both the hanging basket assembly and the hanging frame.

[0045] Preferably, if Figures 1 to 3As shown, the bracket 21 may include a V-shaped bracket 211 and two hangers 212. The hangers 212 extend along the gravity direction G. Both ends of the V-shaped bracket 211 are respectively connected to the first ends of the two hangers 212. The second ends of the two hangers 212 are fixed to the supporting rod 22. In this way, the bottom of the V-shaped bracket 211 is pointed. During the process of the bracket 21 being installed into the component space, the pointed bottom can effectively play a guiding role, which can effectively reduce the probability of collision damage to the fused quartz element 7 during the process of the bracket 21 being installed into the component space, thereby facilitating the assembly of the hanging basket assembly.

[0046] Alternatively, if Figures 1 to 3 As shown, the bracket 21 may further include a limiting pad 213 , which is fixed to the inner side of the V-shaped bracket 211 and is used to support and fix the fused quartz element 7 .

[0047] Preferably, the above-mentioned limiting pad 213 may be provided with a clamping groove, and part of the fused quartz element 7 can extend into the clamping groove to improve the limiting stability of the hanging basket assembly on the fused quartz element 7. Preferably, the above-mentioned V-shaped bracket 211 may include a plurality of limiting pads 213, and the plurality of limiting pads 213 may be arranged at intervals along the inner side of the V-shaped bracket 211 to further improve the limiting stability of the hanging basket assembly on the fused quartz element 7.

[0048] Preferably, if Figure 1 and Figure 5 As shown, both the first bracket 11 and the second bracket 12 are rectangular frames parallel to a predetermined plane, and the predetermined plane is a plane confirmed by both the gravity direction G and the second direction F2. The second direction F2 is perpendicular to the plane confirmed by both the gravity direction G and the first direction F1 to improve the stability of the lifting frame.

[0049] Furthermore, the rectangular frame is also provided with a support beam extending along the second direction F2 to further improve the stability of both the first bracket 11 and the second bracket 12 .

[0050] like Figures 1 to 5 As shown, F1 shown in the figure may be an example of the first direction F1 mentioned above, and F2 shown in the figure may be an example of the second direction F2 mentioned above.

[0051] Correspondingly, if Figure 1 and Figure 5 As shown, the above-mentioned connecting beam 13 may include a first connecting rod and a second connecting rod, the first connecting rod connecting the first ends of the first bracket 11 and the second bracket 12 in the second direction F2, and the second connecting rod connecting the second ends of the first bracket 11 and the second bracket 12 in the second direction F2 to further improve the stability of the lifting frame.

[0052] Preferably, if Figure 1 and Figure 3 As shown, the hoisting frame may include reinforcing ribs 14, and the reinforcing ribs 14 are provided between the first bracket 11 and the connecting beam 13 and between the second bracket 12 and the connecting beam 13 to further improve the stability of the hoisting frame.

[0053] Preferably, the transfer vehicle 3 may be an AGV vehicle.

[0054] In an embodiment, preferably, Figure 1 , Figure 4 and Figure 5 As shown, the above-mentioned lifting frame can also include a docking plate 6, which can be fixedly set on the connecting beam 13, and a lifting limit part 31 is provided on the side of the above-mentioned transfer vehicle 3 facing the docking plate 6, so as to realize the connection between the lifting frame and the transfer vehicle 3 through the docking between the lifting limit part 31 and the docking plate 6.

[0055] Preferably, the lifting and limiting portion 31 may include a linear drive device and a limiting plate connected to each other, so that the limiting plate can be driven to lift and lower by the linear drive device to achieve the docking between the limiting plate and the docking plate 6 .

[0056] Preferably, if Figure 3 As shown, the limit pin 311 can be provided on the above-mentioned limit plate, and correspondingly, the above-mentioned docking plate 6 can be provided with a docking groove corresponding to the limit pin 311. In this way, the linear drive device drives the limit plate to rise and fall to drive the limit pin 311 to extend into and move out of the docking groove to realize the docking of the limit plate and the docking plate 6.

[0057] Optionally, the docking groove may also be provided on the limiting plate, and the limiting pin 311 may be provided on the docking plate 6 .

[0058] However, it is not limited thereto, as long as the transfer vehicle 3 and the hoisting frame can be docked with each other, the connection relationship between the above-mentioned limit plate and the docking plate 6 can also be in other forms, such as a card slot buckle, magnetic attraction, etc.

[0059] Preferably, if Figure 1 and Figure 2 As shown, both ends of the docking plate 6 in the second direction F2 can be fixedly connected to the first connecting rod and the second connecting rod respectively, so as to utilize the space between the first connecting rod and the second connecting rod to provide space for docking the docking plate 6 and the limiting plate.

[0060] Preferably, if Figure 1 , Figure 3 and Figure 5 As shown, the connecting beam 13 can be arranged in the lower half of the lifting frame in the gravity direction G. On the one hand, it is convenient for the connecting beam 13 to adapt to the height of the transfer vehicle 3; on the other hand, it is convenient to lower the center of gravity of the lifting frame and improve the stability of the lifting frame.

[0061] Furthermore, if Figure 2 As shown, the fused quartz element transporting device may further include a counterweight block 5, which is disposed on the connecting crossbeam 13 to further lower the center of gravity of the hoisting frame and improve the stability of the hoisting frame.

[0062] Preferably, if Figure 1 and Figure 2 As shown, the counterweight block 5 may be in a strip shape, and both the first connecting rod and the second connecting rod may be provided with the counterweight block 5 respectively to ensure uniformity of the arrangement of the counterweight block 5 .

[0063] Preferably, if Figure 1 As shown, the bottom ends of the first bracket 11 and the second bracket 12 can be provided with universal wheels. On the one hand, it is convenient for the lifting frame to move with the transfer vehicle 3; on the other hand, it increases the contact points between the lifting frame and the ground, further improving the stability of the lifting frame during movement.

[0064] Optionally, the universal wheel may have a locking function to facilitate loading and unloading of the hanging basket assembly.

[0065] In an embodiment, Figure 1 As shown, the fused quartz element transport device may further include a first stopper 41, and both sides of the hanging frame in the first direction F1 may be provided with the first stopper 41. A second stopper groove 411 may be provided on the side of the first stopper 41 facing away from the hanging frame, and the second stopper groove 411 may be used to dock with the first positioning device 81 at the target position, so as to facilitate the position alignment of the fused quartz element transport device in the second direction F2 at the target position.

[0066] Alternatively, if Figure 1 As shown, the second limiting groove 411 may be a V-shaped groove, so as to guide the first positioning device 81 to extend into the second limiting groove 411 .

[0067] Preferably, if Figure 1 and Figure 5 As shown, the first limit block 41 can be fixedly arranged on the side of the support beam. On the one hand, it is convenient to fix the first limit block 41; on the other hand, it improves the setting strength of the first limit block 41 to prevent the first limit block 41 from being deformed under the action of the first positioning device 81, resulting in inaccurate positioning of the fused quartz element transfer device.

[0068] Optionally, the first positioning device 81 may include two first positioning seats that are spaced apart and arranged opposite to each other along the first direction F1 , and the two first positioning seats are arranged facing each other.

[0069] Preferably, the first positioning seat includes a first positioning pin and a first driving member connected to each other, and the first driving member can drive the first positioning pin to move along the first direction F1 to drive the first positioning pin to extend into and move out of the second limiting groove 411.

[0070] Similarly, if Figure 1 , Figure 3 and Figure 4 As shown, the fused quartz element transport device may further include a second stopper 42, and both sides of the hanging frame in the second direction F2 may be provided with the second stopper 42. A third stopper groove 421 may be provided on the side of the second stopper 42 facing away from the hanging frame, and the third stopper groove 421 may be used to dock with the second positioning device at the target position, so as to facilitate the position alignment of the fused quartz element transport device in the first direction F1 at the target position.

[0071] Alternatively, if Figure 1 As shown, the third limiting groove 421 may also be a V-shaped groove, so as to guide the second positioning device to extend into the third limiting groove 421 .

[0072] Preferably, if Figure 1 and Figure 5 As shown, the second limit block 42 can be fixedly arranged on the sides of the first connecting rod and the second connecting rod respectively. On the one hand, it is convenient to fix the second limit block 42; on the other hand, it improves the setting strength of the second limit block 42 to prevent the second limit block 42 from being deformed under the action of the second positioning device, resulting in inaccurate positioning of the fused quartz element transfer device.

[0073] Similarly, the second positioning device may include two second positioning seats that are spaced apart and arranged opposite to each other along the second direction F2, and the two second positioning seats are arranged facing each other.

[0074] Preferably, the second positioning seat includes a second positioning pin and a second driving member connected to each other, and the second driving member can drive the second positioning pin to move along the second direction F2 to drive the second positioning pin to extend into and move out of the third limiting groove 421.

[0075] Optionally, at least one of the first positioning device 81 and the second positioning device may include a lifting platform to facilitate the fused quartz element transport device to enter and move out of the target position.

[0076] Taking the lifting platform as an example, at least one of the two second positioning seats can be set on the lifting platform to drive the second positioning seat to hide in the ground and extend from the ground, so as to facilitate the fused quartz element transport device to enter and move out of the target position. Figure 5 As shown, the figure shows an example in which the second positioning device is hidden in the ground.

[0077] Preferably, if Figure 1 As shown, the above-mentioned fused quartz element transport device may also include a third limit block 43, which may be fixedly arranged on the side of the hanging frame in the first direction F1, and the third limit block 43 and the first limit block 41 are spaced apart along the gravity direction G. Similarly, the side of the third limit block 43 facing away from the hanging frame may also be provided with a fourth limit groove. Correspondingly, the above-mentioned first positioning device 81 may also be provided with a third positioning seat, and the structure of the third positioning seat is similar to that of the above-mentioned first positioning seat, which will not be described in detail here. This is to further improve the positioning accuracy of the first positioning device 81 on the fused quartz element transport device.

[0078] Preferably, if Figure 1 As shown, the first limit block 41 may be provided with two of the second limit grooves 411, and the two second limit grooves 411 may be spaced apart along the second direction F2. In this way, the two second limit grooves 411 and the fourth limit groove on the third limit block 43 provided on the same side of the lifting frame form three non-collinear positioning points, thereby effectively improving the end face positioning accuracy of the lifting frame in the first direction F1.

[0079] The embodiment of the second aspect of the present application further provides an automated production line, comprising the fused quartz element transfer device described in any of the above embodiments, and thus has all the beneficial technical effects of the fused quartz element transfer device, which will not be elaborated herein.

[0080] Preferably, if Figure 5 As shown, the automated production line may include the first positioning device 81 and the second positioning device mentioned above.

[0081] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A fused quartz element transport device, characterized in that: The invention comprises a transfer vehicle, a hanging frame and a hanging basket assembly, wherein the hanging frame comprises a first bracket, a second bracket and a connecting crossbeam, wherein the first bracket and the second bracket are arranged at intervals along a first direction to form a storage space between the first bracket and the second bracket, and the connecting crossbeam is arranged in the storage space, and the connecting crossbeam is fixedly connected to the first bracket and the second bracket to separate the storage space into a placement space and a supporting space arranged in sequence along the gravity direction; The transfer vehicle is arranged in the supporting space, the hanging basket assembly is arranged in the mounting space, and the hanging frame is detachably connected to the transfer vehicle and the hanging basket assembly respectively.

2. The fused quartz element transport device according to claim 1, characterized in that: The hanging basket assembly comprises a supporting rod and a bracket, wherein the supporting rod extends along the first direction, and the bracket is used to fix the fused quartz element, and the bracket is arranged on the supporting rod; The first bracket and the second bracket are both provided with a first limiting groove at one end away from the transfer vehicle; When the hanging basket assembly is arranged in the component placement space, the two ends of the supporting rod in the first direction are respectively arranged in the first limiting grooves of the first bracket and the second bracket.

3. The fused quartz element transport device according to claim 2, characterized in that: The bracket includes a V-shaped bracket and two hangers, the hangers extend along the gravity direction, two ends of the V-shaped bracket are respectively connected to the first ends of the two hangers, and the second ends of the two hangers are fixed to the supporting rod.

4. The fused quartz element transport device according to claim 1, characterized in that: The lifting frame also includes a docking plate, which is fixedly arranged on the connecting crossbeam, and a lifting limit part is arranged on the side of the transfer vehicle facing the docking plate, and one of the lifting limit part and the docking plate is provided with a docking groove, and the other of the lifting limit part and the docking plate is provided with a limit pin arranged corresponding to the docking groove, and the lifting limit part can rise and fall along the direction of gravity to drive the limit pin to extend into and move out of the docking groove.

5. The fused quartz element transport device according to claim 1, characterized in that: The connecting crossbeam is arranged at the lower half of the hanging frame in the gravity direction; The fused quartz element transport device further comprises a counterweight block, and the counterweight block is arranged on the connecting crossbeam.

6. The fused quartz element transport device according to claim 1, characterized in that: The bottom ends of the first bracket and the second bracket are both provided with universal wheels.

7. The fused quartz element transport device according to claim 1, characterized in that: The first bracket and the second bracket are both rectangular frames parallel to a predetermined plane, the predetermined plane is a plane determined by both the gravity direction and the second direction, and the second direction is perpendicular to the plane determined by both the gravity direction and the first direction; The rectangular frame is also provided with a support beam extending along the second direction.

8. The fused quartz element transport device according to claim 1, characterized in that: It also includes a first limit block, and the first limit blocks are arranged on both sides of the hanging frame in the first direction; A second limiting groove is provided on a side of the first limiting block facing away from the hanging frame, and the second limiting groove is used to dock with a first positioning device at a target position.

9. The fused quartz element transport device according to claim 1, characterized in that: It also includes a second limit block, and the second limit block is provided on both sides of the hanging frame in a second direction, and the second direction is perpendicular to a plane determined by the first direction and the gravity direction; A third limiting groove is provided on a side of the second limiting block facing away from the hanging frame, and the third limiting groove is used to dock with a second positioning device at a target position.

10. An automated production line, characterized in that: A fused quartz element transporting device comprising any one of claims 1 to 9.

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