Parallel type multi-shaft roots vacuum pump

Abstract

A parallel type multi-shaft roots vacuum pump comprises a motor, a pump body with N pump cavities connected in parallel, 2N fan blade rotors, 2N fan blade transmission gears, N-1 pairs of carrier gears and other parts, wherein N is an integer and is larger than or equal to 2, and the 2N fan blade rotors comprise a driving fan blade and 2N-1 driven fan blades. The parallel type multi-shaft roots vacuum pump is provided with N pump cavities connected in parallel, 2N fan blade rotors are installed in the pump cavities in parallel, a pair of fan blade rotors is arranged in each pump cavity to form N air suction and exhaust units, and the N pump cavities connected in parallel share an air suction port and an air exhaust port. The fan blade transmission gear is arranged at the other end of the motor, and the driving fan blade shaft is directly connected with the motor through a coupler. The parallel type multi-shaft roots vacuum pump is novel in structure, symmetrical and compact, smooth in air flow and large in air suction amount, and is perfectly presented in a unique and exquisite single-pump form. The technical scheme of the parallel type multi-shaft roots vacuum pump can be expanded and extended to the design of a screw vacuum pump.

Description

Technical Field

[0001] The invention relates to a Roots vacuum pump, in particular to a parallel multi-axis Roots vacuum pump. Background Art

[0002] Roots vacuum pump is a rotary variable displacement vacuum pump without internal compression. It has the characteristics of high pumping speed, high volumetric efficiency, high vacuum degree, low energy consumption, compact structure, stable and reliable operation, etc. It has been widely used in the power, semiconductor, photovoltaic, petrochemical, food processing, smelting and other industries. Most of the existing Roots vacuum pumps use double shafts, one driving shaft drives one driven shaft, with relatively low compression ratio and relatively low pumping rate.

[0003] The existing Roots vacuum pump has also been improved, and a three-axis multi-stage Roots vacuum pump has appeared. The Roots vacuum pump connects several pump chambers in series, and the pump chambers are separated by partitions. Three parallel shafts are installed on the pump chambers. There are several fan blade rotors on each shaft. Adjacent fan blade rotors are used in pairs to form a three-axis multi-stage Roots vacuum pump. The gas enters from the air inlet of the first-stage pump chamber and is discharged from the exhaust port of the last-stage pump chamber. Compared with a single Roots vacuum pump, although the Roots vacuum pump has improved the pumping rate and vacuum degree to a certain extent, due to the multi-stage series structure, many parts, complex installation, and three long shafts, the thermal expansion is large during operation, resulting in a large cumulative error, resulting in a low degree of engagement of the rotors in the multi-stage pump chamber, which is easy to cause friction and reduces the stability of the product.

[0004] Innovation is the driving force of enterprise technological progress and the eternal value pursuit of vacuum industry practitioners. With the continuous progress of science and technology, higher requirements are put forward for the integration, efficiency, high technology content and space saving of Roots vacuum pumps.

[0005] Therefore, the present invention hopes to propose a new parallel multi-axis Roots vacuum pump to solve the above-mentioned defects in the prior art. Summary of the invention

[0006] Therefore, the purpose of the present invention is to solve the above-mentioned problems in the prior art. The present invention proposes a parallel multi-axis Roots vacuum pump, which includes a motor, a pump body of N (N is an integer, N≥2) parallel pump chambers, 2N fan blade rotors (the fan blade rotors include an active fan blade, 2N-1 driven fan blades), 2N fan blade transmission gears, and N-1 pairs of bridge gears and other parts. The parallel multi-axis Roots vacuum pump has N (N is an integer, N≥2) parallel pump chambers, each pump chamber has a pair of fan blade rotors, the shaft of the active fan blade is directly driven by a motor, and then through N-1 pairs of bridge gears, the 2N fan blade rotors are rotated synchronously at the same speed. Compared with vacuum pumps such as dual-axis Roots vacuum pumps, tandem three-axis multi-stage Roots vacuum pumps, screw pumps, and vortex pumps, the parallel multi-axis Roots vacuum pump has the advantages of large air extraction capacity, high volumetric efficiency, low power, no fear of dust, no fear of corrosion, easy maintenance, and long service life. The parallel multi-axis Roots vacuum pump has a symmetrical and compact structure, balanced force, and stable operation, and is perfectly presented in the form of a unique and exquisite single pump. The technical solution of the parallel multi-axis Roots vacuum pump can be extended to the design of screw vacuum pumps.

[0007] In order to achieve the above-mentioned purpose, the present invention proposes a parallel multi-axis Roots vacuum pump, comprising: a pump body with N (N is an integer, N≥2) parallel pump chambers; a fan rotor group located in the pump body, wherein the fan rotor group includes an active fan blade and 2N-1 driven fan blades; the active fan blade includes an active fan blade transmission gear, each driven fan blade includes a left or right driven fan blade transmission gear and a bridge gear group located between the transmission gears, the active fan blade and the driven fan blade use their own gears to mesh, and the transmission purpose is achieved through the gears.

[0008] Wherein N=2, the parallel multi-axis Roots vacuum pump comprises a motor, a double-cavity pump body, an active fan blade, three driven fan blades, and a transmission gear set; wherein the fan blade rotor set comprises: an active fan blade, one end of which is connected to the motor, and the other end of which is connected to an active fan blade transmission gear; the three driven fan blades comprise: a left driven fan blade located on the left side of the active fan blade, and the left driven fan blade is connected to a left driven fan blade transmission gear, The driven fan blade transmission gear on the left side is meshed with the active fan blade transmission gear, so that the active fan blade drives the driven fan blade on the left side; two driven fan blades on the right side, each driven fan blade on the right side is connected to a corresponding driven fan blade transmission gear on the right side, and the driven fan blade transmission gear on the right side is meshed with the driven fan blade transmission gear on the right side; a double-chamber pump body is used to accommodate the fan blade rotor group; the double-chamber pump body includes two pump chambers, each pump chamber is configured in a parallel manner; each pump chamber is provided with There are paired fan blades; the double-chamber pump body includes a long flat outer frame with an elliptical cross-section, and its two ends are sealed by a rear cover plate and a front cover plate; each rear cover plate and the front cover plate have a plurality of openings to allow the shaft of the fan blade rotor group to pass through; therefore, the outer frame, the rear cover plate and the front cover plate form a closed space to accommodate the fan blade rotor group; the active fan blade transmission gear on the active fan blade is directly meshed with the left driven fan blade transmission gear on the left side of the driven fan blade; the active fan blade transmission gear meshes with one side of the bridge gear group, and the other side of the bridge gear group meshes with the right driven fan blade transmission gear, and the right driven fan blade transmission gear meshes with the right driven fan blade transmission gear, so the active fan blade transmission gear drives the two right driven fan blades through the bridge gear group; wherein the active fan blade transmission gear, the left driven fan blade transmission gear and the right driven fan blade transmission gear and the bridge gear group constitute the transmission gear group.

[0009] Furthermore, the double-chamber pump body has only one air inlet and one exhaust port, and the air inlet and the exhaust port are shared by the double-chamber pump body; the air inlet is above the outer frame of the double-chamber pump body, and the gas is diverted through two upper inclined channels on the upper part of the double-chamber pump body to enter the suction space above the double-chamber pump body; the exhaust port is below the outer frame of the double-chamber pump body, and the gas is converged and exhausted through two lower inclined channels on the lower part of the double-chamber pump body.

[0010] Furthermore, a gear lubricating oil tank is formed on one side of the rear end cover plate, which is used to accommodate the transmission gear set; the shaft of the fan rotor set is connected to the transmission gear set through the hole of the rear end cover plate.

[0011] Furthermore, the bridge gear set includes two bridge gears and is installed on a gear support frame; the gear support frame is installed on the side of the rear end cover plate close to the gear lubricating oil tank; the gear support frame is composed of a gear support plate and a detachable first support angle block and a second support angle block.

[0012] Furthermore, the gear support plate is made into one piece with the rear end cover plate; the gear support plate is Z-shaped, and has a support surface and a support surface, and there is a height difference between the two support surfaces and the support surfaces; six connecting threaded holes are drilled on the gear support plate, and the first supporting angle block and the second supporting angle block are respectively drilled with a connecting threaded hole of the same specification, and the first supporting angle block and the second supporting angle block are connected to the gear support plate with screws, and together form a complete gear support frame.

[0013] Furthermore, a notch is left on the two supporting surfaces and the sides of the supporting surfaces of the gear support plate to prevent the gear support plate from colliding with the adjacent fan blade transmission gear; the detachable first supporting angle block and the second supporting angle block are used to avoid interference and collision between the fan blade transmission gears on the left and right sides of the bridge gear set and the gear support frame in a limited space.

[0014] Furthermore, the bridge gear set includes two bridge gear shafts, which are respectively connected to two bridge gears, and each bridge gear shaft is installed in two split bearing seats. A total of four split bearing seats are connected to the gear support frame with screws.

[0015] Furthermore, eight ceramic seals are used to seal the bearings of the fan rotor assembly to block the bearing cavity and the pump cavity, so as to prevent the gear lubricating oil from returning to the pump cavity of the double-cavity pump body.

[0016] Furthermore, a plurality of multi-channel cooling water pipes are installed in the gear lubricating oil tank of the rear end cover plate to cool the gear lubricating oil tank; wherein both ends of the double-chamber pump body are respectively connected to a connecting ring, and then the double-chamber pump body is sealed by the rear end cover plate and the front end cover plate.

[0017] Furthermore, the number of teeth and the module of the active fan blade transmission gear, the driven fan blade transmission gear on the left, the driven fan blade transmission gear on the right, and the driven fan blade transmission gear are equal, and they mesh and rotate with each other accordingly; the speed ratio of the bridge gear set is 1, and the module of the bridge gear set is equal to the module of each active fan blade transmission gear, the driven fan blade transmission gear on the left, and the driven fan blade transmission gear on the right, and the driven fan blade transmission gear on the fan rotor group.

[0018] The features and advantages of the present invention may be further understood from the following description, which is to be read with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Shows the structural diagram of the present invention;

[0020] Figure 2 A structural diagram showing some components of the present invention;

[0021] Figure 3 Shows the bottom view structure diagram of the present invention;

[0022] Figure 4 Showing a front view of the present invention;

[0023] Figure 5 Showing the structure diagram of the transmission gear set of the present invention;

[0024] Figure 6 A schematic diagram showing the connection of the transmission gear set of the present invention;

[0025] Figure 7 Showing the pump structure diagram of the present invention;

[0026] Figure 8 A partial cross-sectional view showing a pump body of the present invention;

[0027] Fig. 9 The internal structure diagram of the pump body of the present invention is shown.

[0028] Description of Reference Numerals

[0029] In the figure, 1, pump body; 101, outer frame; 102, rear end cover; 103, front end cover; 104, gear lubricating oil tank; 105, air inlet; 106, exhaust port; 107, oblique channel; 108, oblique channel; 11, pump chamber; 12, ball bearing; 13, ceramic seal; 16, container vacuum seal; 17, first support angle block; 18, second support angle block; 19, gear support plate; 191, support surface; 192, support surface; 20, Transmission gear set; 2. Connecting ring; 3. Active fan blade; 30. Motor; 32. Coupling; 4. Fan blade rotor set; 401. Driven fan blade transmission gear; 402. Driven fan blade transmission gear; 403. Driven fan blade transmission gear; 41. Driven fan blade; 42. Driven fan blade; 43. Driven fan blade; 7. Multi-channel cooling water pipe; 8. Active fan blade transmission gear; 9. Bridge gear set; 91. Gear support frame; 93. Bridge gear shaft; 95. Bridge gear. DETAILED DESCRIPTION

[0030] The structural composition of the present invention, as well as the effects and advantages it can produce, are now described in detail as follows with reference to the accompanying drawings, with a preferred embodiment of the present invention.

[0031] Please refer to Figures 1 to 9 As shown, the parallel multi-axis Roots vacuum pump of the present invention includes the following elements:

[0032] The parallel multi-axis Roots vacuum pump of the present invention comprises: a pump body 1 having N (N is an integer, N≥2) parallel pump chambers 11, a fan blade rotor group 4 located in the pump body 1, wherein the fan blade rotor group 4 comprises an active fan blade 3, 2N-1 driven fan blades, the active fan blade 3 comprises an active fan blade transmission gear 8, each driven fan blade comprises a left or right driven fan blade transmission gear 401, a driven fan blade transmission gear 402, a driven fan blade transmission gear 403 and a bridge gear group 9, the active fan blade 3 and the driven fan blade use their own gear meshing, and the purpose of transmission is achieved through the gear. In the following description, N=2 is taken, at this time, the parallel multi-axis Roots vacuum pump comprises a motor 30, a double-cavity pump body 1, an active fan blade 3, three driven fan blades, and a transmission gear group 20, that is, a parallel four-axis Roots vacuum pump is taken as an example for description.

[0033] The components of the parallel four-axis Roots vacuum pump of the present invention are described as follows:

[0034] The motor 30 is used to drive the parallel four-axis Roots vacuum pump. The motor 30 can be driven by a fixed frequency or variable frequency drive.

[0035] like Figure 2 and Fig. 9 As shown, the fan blade rotor group 4 includes:

[0036] The active fan blade 3 has one end directly connected to the motor 30 via a coupling 32 , and the other end of the active fan blade 3 is connected to the active fan blade transmission gear 8 .

[0037] The three driven wind blades include:

[0038] A left-side driven fan blade 41 is located on the left side of the active fan blade 3, and the left-side driven fan blade 41 is connected to the left-side driven fan blade transmission gear 401. The left-side driven fan blade transmission gear 401 engages with the active fan blade transmission gear 8, so that the active fan blade 3 drives the left-side driven fan blade 41.

[0039] The two right-side driven fan blades 42 and 43, the right-side driven fan blade 42 is connected to a corresponding right-side driven fan blade transmission gear 402, and the driven fan blade 43 is connected to a corresponding right-side driven fan blade transmission gear 403, and the right-side driven fan blade transmission gear 402 is meshed with the right-side driven fan blade transmission gear 403.

[0040] The double-chamber pump body 1 is used to accommodate the fan blade rotor group 4. The double-chamber pump body 1 includes two pump chambers 11, such as Figure 7 and Figure 8As shown, each pump chamber 11 is arranged in parallel. Each pump chamber 11 is provided with a pair of fan blades. The double-chamber pump body 1 includes a long flat outer frame 101 with an elliptical cross-section, and its two ends are sealed by a rear end cover plate 102 and a front end cover plate 103. The rear end cover plate 102 and the front end cover plate 103 have a plurality of openings to allow the shaft of the fan blade rotor group 4 to pass through. Therefore, the outer frame 101, the rear end cover plate 102 and the front end cover plate 103 form a closed space to accommodate the fan blade rotor group 4. When in use, the double-chamber pump body 1 is arranged horizontally, that is, a parallel The pump chamber structure, the two pump chambers 11 can be cast as a whole, or they can be cast separately and then connected together with positioning pins, O-rings and bolts, leaving a certain wall thickness between the parallel double pump chambers. Figure 7 Two pump chambers 11 are shown side by side, but this is not intended to limit the present invention, and there may also be a plurality of pump chambers 11 side by side.

[0041] In the specific implementation, the two ends of the double-chamber pump body 1 are connected to a connecting ring 2, and then the double-chamber pump body 1 is sealed with the rear cover plate 102 and the front cover plate 103. Each connecting ring 2 expands the volume of the double-chamber pump body 1. Different combinations of the double-chamber pump body 1 and the connecting ring 2 can derive products with different air extraction volumes and different vacuum degrees on the same platform to meet the market demand for products of different specifications, thus realizing modular production of products. The modular production of products enables enterprises to more efficiently realize lean production and improve product quality in many aspects such as parts procurement, manufacturing and installation, and quality control.

[0042] The bridge gear set 9 includes two bridge gears 95 (such as Figure 5 As shown); through the bridge gear set 9, one motor drives the multi-axis fan blades to rotate synchronously at the same speed. The active fan blade 3 and the driven fan blade 41 on the left side form an air intake and exhaust unit 1, and the active fan blade transmission gear 8 on the active fan blade 3 is directly meshed with the driven fan blade transmission gear 401 on the left side of the driven fan blade 41. In a specific implementation, the two driven fan blades 42 and 43 on the right side form an air intake and exhaust unit 2. The active fan blade transmission gear 8, the driven fan blade transmission gear 401 on the left side, the driven fan blade transmission gear 402 on the right side, the driven fan blade transmission gear 403 and the bridge gear set 9 form the transmission gear set 20.

[0043] A gear lubricating oil tank 104 is formed on one side of the rear cover plate 102, which is used to accommodate the transmission gear set 20. The shafts of each fan blade rotor set 4 are connected to the transmission gear set 20 through the holes of the rear cover plate 102. The active fan blade transmission gear 8 meshes with one side of the bridge gear set 9, and the other side of the bridge gear set 9 meshes with the right side driven fan blade transmission gear 402, and the right side driven fan blade transmission gear 402 meshes with the right side driven fan blade transmission gear 403, so the active fan blade transmission gear 8 can drive the two right side driven fan blades 42 and driven fan blades 43 through the bridge gear set 9.

[0044] The number of teeth (Z1=79) and the module (M=3.5) of the active fan blade transmission gear 8, the driven fan blade transmission gear 401 on the left, the driven fan blade transmission gear 402 on the right, and the driven fan blade transmission gear 403 are equal, and they mesh and rotate correspondingly. The speed ratio of the bridge gear set 9 is 1, the number of teeth (Z2=28) of the bridge gear set 9, the module (M=3.5) of the bridge gear set 9 and the module (M=3.5) of each active fan blade transmission gear 8, the driven fan blade transmission gear 401 on the left, and the driven fan blade transmission gear 402 on the right, and the driven fan blade transmission gear 403 are equal. In this way, one motor drives multiple fan blades to rotate, the fan blades rotate at the same speed, and the fan blades in the same unit rotate in opposite directions, thereby achieving the effect of vacuuming.

[0045] like Figure 1 , Figure 3 and Figure 8 As shown, the double-chamber pump body 1 has only one air inlet 105 and one air outlet 106, and the air inlet 105 and the air outlet 106 are shared by the double-chamber pump body 1. The air inlet 105 is located above the center of the outer frame 101 of the double-chamber pump body 1. The gas is divided through two inclined channels 107 at the upper part of the double-chamber pump body 1 and enters the air intake space above the double-chamber pump body 1 respectively. The air outlet 106 is located below the center of the outer frame 101 of the double-chamber pump body 1, and the gas converges through two inclined channels 108 at the lower part of the double-chamber pump body 1 and is discharged from the air outlet 106 after being compressed.

[0046] The air inlet 105 is located directly above the double-chamber pump body 1 and the exhaust port 106 is located directly below the double-chamber pump body 1. The airflow direction is consistent with the gravity direction, so that the dust contained in the gas is easy to be discharged. This is superior to the tandem three-axis multi-stage Roots vacuum pump in the prior art. The airflow of the tandem three-axis multi-stage Roots vacuum pump moves horizontally, and the dust contained in the gas is not easy to be discharged from the exhaust port by gravity. The parallel double pump chamber structure, the inlet and outlet double oblique channels are symmetrically arranged, the gas flow direction is clear and unobstructed, there is no dead angle, the balance and stability of the Roots vacuum pump are improved, and vibration and noise are reduced.

[0047] like Figure 5 and Figure 6 As shown, the bridge gear set 9 is mounted on a gear support frame 91. The gear support frame 91 is mounted on a side of the rear end cover plate 102 close to the gear lubricating oil tank 104. The gear support frame 91 is composed of a gear support plate 19 and a detachable first support angle block 17 and a second support angle block 18.

[0048] In the specific implementation, the gear support plate 19 is made into one piece with the rear end cover plate 102. The gear support plate 19 is Z-shaped, and has a support surface 191 and a support surface 192. The support surface 191 and the support surface 192 have a height difference of 39mm. Six M12 connecting threaded holes are drilled on the gear support plate 19, and the first support angle block 17 and the second support angle block 18 are respectively drilled with an M12 connecting threaded hole of the same specification. The first support angle block 17 and the second support angle block 18 are connected to the gear support plate 19 with M16 screws to form a complete gear support frame 91. In order to solve the problem of not causing interference and collision, a notch is left on the side of the support surface 191 and the support surface 192 of the gear support plate 19 to prevent the gear support plate 19 from colliding with the adjacent fan blade transmission gear. The reason for using the detachable first supporting angle block 17 and the second supporting angle block 18 is to avoid the problem of interference and collision between the fan blade transmission gears on the left and right sides of the bridge gear set 9 and the gear support frame 91 in a limited space.

[0049] In a specific implementation, the bridge gear set 9 includes two bridge gear shafts 93 respectively connected to the bridge gears 95. The bridge gear shafts 93 are installed in two split bearing seats (not shown). The two bridge gear shafts 93 have a total of four split bearing seats connected to the gear support frame 91 with screws.

[0050] like Figure 2 As shown, the front end of the fan blade shaft of the fan blade rotor group 4 is fixed to the front cover plate 103 by a ball bearing 12, and the rear end of the fan blade shaft of the fan blade rotor group 4 is fixed to the rear cover plate 102 by a roller bearing that can be displaced to offset thermal stress and thermal expansion displacement. At the same time, the fan blade shaft of the parallel four-axis Roots vacuum pump is shorter than the fan blade shaft of the three-axis multi-stage Roots vacuum pump, and the thermal stress and thermal expansion are smaller. The cumulative amount of thermal expansion is smaller, and the fan blade rotor is less likely to be stuck in the pump.

[0051] like Figure 2As shown, eight 130 / 100 / 12 ceramic seals 13 are used to seal the bearing of the fan shaft of the fan rotor group 4, blocking the bearing cavity and the pump cavity 11, so as to prevent the gear lubricating oil from returning to the pump cavity 11 and polluting the vacuum environment. The ceramic seal 13 has both the wear resistance of ceramics and the flexibility of the rubber lip. The ceramic sleeve and the rubber lip are in rotational contact, with good sealing effect and low wear. At the same time, the deformation function of the rubber lip in the 130 / 100 / 12 ceramic seal 13 is utilized to ensure that when the pressure in the bearing cavity is too high than the vacuum cavity, a small amount of gas can leak into the pump cavity 11, so that the pressure in the bearing cavity is balanced with the pressure of the pump cavity 11. When balanced, it completely plays a sealing role, prolonging the service life of the 130 / 100 / 12 ceramic seal 13 and preventing the gear lubricating oil in the bearing cavity from returning to the pump cavity 11.

[0052] A 75# containerized vacuum seal 16 is used at the extended end of the blade shaft of the active blade 3 to prevent the atmosphere from entering the pump body.

[0053] A plurality of multi-channel cooling water pipes 7 are installed in the gear lubricating oil tank 104 of the rear end cover plate 102 to water cool the gear lubricating oil tank 104. A water spacer (not shown) is cast in the rear end cover plate 103, and cooling water is passed through the water spacer to perform loop water cooling. Through these two loop water coolings, the temperature of the pump is reduced, the pump body is kept in a reasonable temperature range, the service life of the parts is extended, and the overall performance, reliability and safety of the Roots vacuum pump are improved.

[0054] The present invention provides a parallel multi-axis Roots vacuum pump, which includes a motor 30, a pump body 1 of N (N is an integer, N≥2) parallel pump chambers 11, 2N fan blade rotors (the fan blade rotors include an active fan blade and 2N-1 driven fan blades), 2N fan blade transmission gears, and N-1 pairs of bridge gears and other parts. The parallel multi-axis Roots vacuum pump has N (N is an integer, N≥2) parallel pump chambers 11, each pump chamber 11 has a pair of fan blade rotors, a motor 30 directly drives the shaft of the active fan blade 3, and then through N-1 pairs of bridge gears, the 2N fan blade rotors are rotated synchronously at the same speed. Compared with vacuum pumps such as dual-axis Roots vacuum pumps, tandem three-axis multi-stage Roots vacuum pumps, screw pumps, and vortex pumps, the parallel multi-axis Roots vacuum pump has the advantages of large air extraction capacity, high volumetric efficiency, low power, no fear of dust, no fear of corrosion, easy maintenance, and long service life. The parallel multi-axis Roots vacuum pump has a symmetrical and compact structure, balanced force, and stable operation, and is perfectly presented in the form of a unique and exquisite single pump. The technical solution of the parallel multi-axis Roots vacuum pump can be extended to the design of screw vacuum pumps.

[0055] In summary, the humanized and considerate design of the present invention is quite in line with the actual needs. It specifically improves the existing deficiencies and has obvious breakthrough advantages compared with the existing technology. It does have the effect of enhancing the efficacy, and it is not easy to achieve. The present invention has not been disclosed in domestic and foreign literature and markets, and has complied with the provisions of the Patent Law.

[0056] The above detailed description is a specific description of a feasible embodiment of the present invention. The embodiment is not intended to limit the patent scope of the present invention. Any equivalent implementation or modification that does not deviate from the technical spirit of the present invention should be included in the patent scope of the present invention.

Claims

1. A parallel multi-axis Roots vacuum pump, characterized in that: include: A pump body (1) having N parallel pump chambers (11); wherein N is an integer and N≥2; and a fan blade rotor group (4) located in the pump body (1), wherein the fan blade rotor group (4) includes an active fan blade and 2N-1 driven fan blades, wherein the driven fan blades include driven fan blades (41), driven fan blades (42), and driven fan blades (43); the active fan blades include an active fan blade transmission gear (8), and each driven fan blade includes a left or right driven fan blade transmission gear (401), a driven fan blade transmission gear (402), a driven fan blade transmission gear (403), and a bridge gear group (9) located between the transmission gears. The active fan blade and the driven fan blade are meshed with their respective gears to achieve the purpose of transmission through the gears.

2. The parallel multi-axis Roots vacuum pump according to claim 1, characterized in that: N=2, the parallel multi-axis Roots vacuum pump comprises a motor (30), the pump body (1), an active fan blade (3), three driven fan blades, and a transmission gear set (20), wherein the pump body (1) is a double-chamber pump body (1); wherein The fan blade rotor assembly (4) comprises: An active fan blade (3), one end of the active fan blade (3) being connected to the motor (30), and the other end of the active fan blade (3) being connected to an active fan blade transmission gear (8); The three driven fan blades include: A left driven fan blade (41) is located on the left side of the active fan blade (3), and the left driven fan blade (41) is connected to the left driven fan blade transmission gear (401), and the left driven fan blade transmission gear (401) is meshed with the active fan blade transmission gear (8), so that the active fan blade (3) drives the left driven fan blade (41); Two right-side driven fan blades (42) and a driven fan blade (43), the right-side driven fan blade (42) is connected to a corresponding right-side driven fan blade transmission gear (402), the right-side driven fan blade (43) is connected to a corresponding right-side driven fan blade transmission gear (403), and the right-side driven fan blade transmission gear (402) meshes with the right-side driven fan blade transmission gear (403); The double-chamber pump body (1) is used to accommodate the fan blade rotor group (4); the double-chamber pump body (1) includes two pump chambers (11), each pump chamber (11) is arranged in parallel; each pump chamber (11) is provided with a pair of fan blades; the double-chamber pump body (1) includes a long flat outer frame (101) with an elliptical cross-section, and its two ends are sealed by a rear end cover plate (102) and a front end cover plate (103); the rear end cover plate (102) and the front end cover plate (103) have a plurality of openings to allow the shaft of the fan blade rotor group (4) to pass through; therefore, the outer frame (101), the rear end cover plate (102) and the front end cover plate (103) form a closed space to accommodate the fan blade rotor group (4); The active fan blade transmission gear (8) on the active fan blade (3) is directly meshed with the left driven fan blade transmission gear (401) on the left driven fan blade (41); the active fan blade transmission gear (8) meshes with one side of the bridge gear set (9); the other side of the bridge gear set (9) meshes with the right driven fan blade transmission gear (402); the right driven fan blade transmission gear (402) meshes with the right driven fan blade transmission gear (403); the active fan blade transmission gear (8) drives two right driven fan blades (42) and a driven fan blade (43) through the bridge gear set (9); wherein the active fan blade transmission gear (8), the left driven fan blade transmission gear (401), the right driven fan blade transmission gear (402), the driven fan blade transmission gear (403) and the bridge gear set (9) constitute the transmission gear set (20).

3. The parallel multi-axis Roots vacuum pump according to claim 2, characterized in that: The double-chamber pump body (1) has only one air inlet (105) and one air outlet (106), and the air inlet (105) and the air outlet (106) are shared by the double-chamber pump body (1); the air inlet (105) is located above the outer frame (101) of the double-chamber pump body (1), and the gas is diverted through two upper inclined channels (107) on the upper part of the double-chamber pump body (1) to enter the air intake space above the double-chamber pump body (1); the air outlet (106) is located below the outer frame (101) of the double-chamber pump body (1), and the gas is converged and exhausted through two lower inclined channels (108) on the lower part of the double-chamber pump body (1).

4. The parallel multi-axis Roots vacuum pump according to claim 2, characterized in that: A gear lubricating oil tank (104) is formed on one side of the rear end cover plate (102) and is used to accommodate the transmission gear set (20); the shaft of the fan blade rotor set (4) is connected to the transmission gear set (20) through a hole in the rear end cover plate (102).

5. The parallel multi-axis Roots vacuum pump according to claim 4, characterized in that: The axle gear set (9) comprises two axle gears (95) and is mounted on a gear support frame (91); the gear support frame (91) is mounted on a side of the rear end cover plate (102) close to the gear lubricating oil tank (104); the gear support frame (91) is composed of a gear support plate (19) and a detachable first support angle block (17) and a second support angle block (18).

6. The parallel multi-axis Roots vacuum pump according to claim 5, characterized in that: The gear support plate (19) is integrally formed with the rear end cover plate (102); the gear support plate (19) is in a Z shape and has a support surface (191) and a support surface (192); the two support surfaces (191) and the support surface (192) have a height difference; six connecting threaded holes are drilled on the gear support plate (19); the first supporting angle block (17) and the second supporting angle block (18) are respectively drilled with a connecting threaded hole of the same specification; the first supporting angle block (17) and the second supporting angle block (18) are connected to the gear support plate (19) by screws, and together form a complete gear support frame (91).

7. The parallel multi-axis Roots vacuum pump according to claim 6, characterized in that: A notch is left on the side edges of the support surface (191) and the support surface (192) of the gear support plate (19) to prevent the gear support plate (19) from colliding with an adjacent fan blade transmission gear; and the detachable first support angle block (17) and the second support angle block (18) are used to prevent interference and collision between the fan blade transmission gears on the left and right sides of the bridge gear set (9) and the gear support frame (91) in a limited space.

8. The parallel multi-axis Roots vacuum pump according to claim 5, characterized in that: The bridge gear set (9) comprises two bridge gear shafts (93), the two bridge gear shafts (93) are respectively connected to two bridge gears (95), each bridge gear shaft (93) is installed in two split bearing seats, and a total of four split bearing seats are connected to the gear support frame (91) by screws.

9. The parallel multi-axis Roots vacuum pump according to claim 2, characterized in that: Eight ceramic seals (13) are used to seal the bearings of the fan rotor group (4) to block the bearing cavity and the pump cavity (11) so as to prevent the gear lubricating oil from returning to the pump cavity (11) of the double-cavity pump body (1).

10. The parallel multi-axis Roots vacuum pump according to claim 4, characterized in that: A plurality of multi-channel cooling water pipes (7) are installed in the gear lubricating oil tank (104) of the rear end cover plate (102) to cool the gear lubricating oil tank (104); wherein both ends of the double-chamber pump body (1) are respectively connected to a connecting ring (2), and then the double-chamber pump body (1) is enclosed by the rear end cover plate (102) and the front end cover plate (103).

11. The parallel multi-axis Roots vacuum pump according to claim 2, characterized in that: The active fan blade transmission gear (8), the left driven fan blade transmission gear (401), the right driven fan blade transmission gear (402), and the driven fan blade transmission gear (403) have the same number of teeth and the same module, and mesh with and rotate with each other accordingly; the speed ratio of the bridge gear set (9) is 1, and the module of the bridge gear set (9) is the same as the module of each active fan blade transmission gear (8), the left driven fan blade transmission gear (401), and the right driven fan blade transmission gear (402), and the driven fan blade transmission gear (403) on the fan blade rotor set (4).

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