Temperature adjusting device

Abstract

The invention relates to the technical field of coating equipment, and discloses a temperature adjusting device which comprises a barrel body, a temperature adjusting device, a temperature adjusting device, a temperature adjusting device, a temperature adjusting device and a temperature adjusting device, and the barrel body comprises a cylindrical barrel wall, a plate-shaped first side wall and a plate-shaped second side wall; wherein at least two liquid flow channels are arranged along the cylinder wall, liquid inlets of a part of the liquid flow channels are formed in the first side wall or the cylinder wall close to the first side wall, and liquid outlets of the part of the liquid flow channels are formed in the second side wall or the cylinder wall close to the second side wall; liquid inlets of the other part of liquid flow channels are formed in the second side wall or the cylinder wall close to the second side wall, and liquid outlets of the other part of liquid flow channels are formed in the first side wall or the cylinder wall close to the first side wall; the shaft core is connected with the barrel and can drive the barrel to rotate; the shaft core is provided with a liquid inlet channel and a liquid return channel which are isolated from each other; wherein the liquid inlet channel is respectively communicated with the liquid inlets of the liquid flow channels, and the liquid return channel is respectively communicated with the liquid outlets of the liquid flow channels. Therefore, under the condition of ensuring uniform temperature adjustment, the temperature adjustment efficiency is improved, and the temperature can be controlled more accurately.

Description

Technical Field

[0001] The present application relates to the technical field of coating equipment, and in particular to a temperature regulating device. Background Art

[0002] At present, in coating technology, semiconductor devices such as conductive thin films can be prepared by magnetron sputtering or evaporation, in which the substrate needs to be kept at a certain temperature. In this way, the stability and uniformity of the reaction can be ensured, thereby improving the quality and consistency of the coating.

[0003] The heating methods of coating equipment are generally divided into radiation heating and contact heating. Among them, the heater of the radiation heating method is usually not in direct contact with the substrate, and the temperature of the substrate is controlled by the radiation heat of the heater, and its heating area is large. The heater of the contact heating method is usually in direct contact with the substrate, and the heat of the heater can be directly transferred to the substrate, and its heating efficiency is higher.

[0004] In the process of implementing the embodiments of the present disclosure, it is found that there are at least the following problems in the related art: When coating a substrate with a large area, if radiation heating is used, the temperature of the heater will differ greatly from that of the substrate, making the temperature control inaccurate and the heating efficiency low, resulting in slow heating. If contact heating is used, the heating uniformity is poor.

[0005] It should be noted that the information disclosed in the above background technology section is only used to enhance the understanding of the background of the present application, and therefore may include information that does not constitute the prior art known to ordinary technicians in the field. Summary of the invention

[0006] In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. The summary is not an extensive review, nor is it intended to identify key / critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

[0007] The embodiment of the present disclosure provides a temperature regulating device, which can improve the temperature regulating efficiency while ensuring uniform temperature regulating, and can also control the temperature more accurately.

[0008] In some embodiments, the temperature regulating device comprises a barrel and an axis core. The barrel comprises a cylindrical barrel wall and a plate-shaped first side wall and a second side wall; wherein at least two liquid flow channels are arranged along the barrel wall, and the liquid inlet of one part of the liquid flow channels is arranged on the first side wall or the barrel wall adjacent to the first side wall, and the liquid outlet thereof is arranged on the second side wall or the barrel wall adjacent to the second side wall; the liquid inlet of another part of the liquid flow channels is arranged on the second side wall or the barrel wall adjacent to the second side wall, and the liquid outlet thereof is arranged on the first side wall or the barrel wall adjacent to the first side wall; the axis core is connected to the barrel body and can drive the barrel body to rotate; the axis core is provided with a liquid inlet channel and a liquid return channel isolated from each other; wherein the liquid inlet channel is respectively connected to the liquid inlet of each liquid flow channel, and the liquid return channel is respectively connected to the liquid outlet of each liquid flow channel.

[0009] In some embodiments, each liquid flow channel is spirally arranged along the cylinder wall.

[0010] In some embodiments, the liquid flow channels are arranged in sequence along the axial direction of the cylinder.

[0011] In some embodiments, the spacing between the liquid flow channels is equal.

[0012] In some embodiments, the liquid inlets and liquid outlets of the plurality of liquid flow channels disposed on the same side are evenly staggered with each other.

[0013] In some embodiments, a set angle is formed between the liquid inlets and liquid outlets of adjacent liquid flow channels disposed on the same side, and the range of the set angle is 45° to 180°.

[0014] In some embodiments, the liquid flowing into the liquid flow channel includes oil, water or a cooling medium.

[0015] In some embodiments, three to ten liquid flow channels are provided.

[0016] In some embodiments, the shaft core further comprises an inner core barrel and an outer core barrel. The inner core barrel has a first channel configured therein; the outer core barrel is disposed inside the outer core barrel, and a set distance is provided between the outer wall of the inner core barrel and the inner wall of the outer core barrel to form a second channel; wherein one of the first channel and the second channel is a liquid inlet channel, and the other of the first channel and the second channel is a liquid return channel.

[0017] In some embodiments, the inner core and the outer core are thermally insulated from each other to prevent heat exchange between the first channel and the second channel.

[0018] In some embodiments, the temperature regulating device also includes: a rotating connector, which is rotatably sealed and connected to the shaft core, and the shaft core can rotate relative to the rotating connector; wherein the rotating connector can be connected to an external liquid storage device, and the liquid at the first temperature in the external liquid storage device can be transported to the liquid inlet channel through the rotating connector, and the liquid at the second temperature in the return channel flows back to the external liquid storage device through the rotating connector.

[0019] In some embodiments, the rotating connector includes a housing and a rotating member. The housing has a first joint and a second joint connected to an external liquid storage device; the rotating member is disposed in the housing; wherein the shaft core is inserted into the rotating member, and the first channel is connected to the first joint of the housing, and the second channel is connected to the second joint of the housing.

[0020] In some embodiments, the rotating connector further includes: an elastic sealing component disposed at the connection position between the rotating member and the shaft core.

[0021] In some embodiments, a mounting groove is constructed in the housing, the rotating member is arranged in the mounting groove, and has a set spacing with the groove bottom of the mounting groove; the elastic sealing assembly includes a first sealing member, a second sealing member, and a sealing member. The first sealing member is arranged at the groove bottom of the mounting groove, and the end of the inner core tube abuts against the first sealing member; the second sealing member is arranged between the outer wall of the rotating member and the groove wall of the mounting groove; the elastic member is sleeved on the shaft core, and the first end abuts against the rotating member, and the other end abuts against the first sealing member.

[0022] The temperature adjustment device provided by the embodiment of the present disclosure can achieve the following technical effects: The cylinder wall of the cylinder is provided with a plurality of liquid flow channels arranged along the cylinder wall, and the liquid inlet of one part of the liquid flow channels is arranged on the first side wall or the cylinder wall adjacent to the first side wall, and the liquid outlet is arranged on the second side wall or the cylinder wall adjacent to the second side wall; the liquid inlet of another part of the liquid flow channels is arranged on the second side wall or the cylinder wall adjacent to the second side wall, and the liquid outlet is arranged on the first side wall or the cylinder wall adjacent to the first side wall. In this way, the liquid inlet channel in the shaft core can allow each liquid flow channel to pass into the liquid of the corresponding temperature, and under the coordinated temperature control of different liquid flow channels, the temperature of the entire area of ​​the cylinder can be made closer, thereby ensuring the uniformity of the temperature control of the substrate. At the same time, by controlling the liquid temperature, the temperature of the cylinder can be controlled more accurately, thereby ensuring the required temperature of the substrate. On this basis, since the substrate is wrapped in the cylinder wall of the cylinder, that is, the substrate and the cylinder wall of the cylinder are in contact temperature control, its heat transfer efficiency is relatively high.

[0023] The above general description and the following description are exemplary and explanatory only and are not intended to limit the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] One or more embodiments are exemplarily described by corresponding drawings, which do not limit the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements, and the drawings do not constitute a scale limitation, and wherein: Figure 1 is a schematic structural diagram of a heating device provided by an embodiment of the present disclosure; Figure 2 is a schematic structural diagram of another heating device provided by an embodiment of the present disclosure; Figure 3 is a schematic structural diagram of another heating device provided by an embodiment of the present disclosure; Figure 4 is a schematic structural diagram of another heating device provided by an embodiment of the present disclosure; Figure 5 is a cross-sectional schematic diagram of a heating device provided by an embodiment of the present disclosure; Figure 6 yes Figure 5 The enlarged schematic diagram of point A in the middle; Figure 7 It is a liquid flow diagram in the heating device provided in an embodiment of the present disclosure.

[0025] Reference numerals: 10: cylinder body; 11: cylinder wall; 12: first side wall; 13: second side wall; 14: liquid flow channel; 141: liquid inlet; 142: liquid outlet; 20: shaft core; 21: inner core tube; 211: first channel; 212: first pipeline; 22: outer core tube; 221: second channel; 222: second pipeline; 30: rotating connector; 31: housing; 32: rotating member; 33: elastic sealing assembly; 331: first sealing member; 332: second sealing member; 333: elastic member. DETAILED DESCRIPTION

[0026] In order to be able to understand the features and technical contents of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure is described in detail below in conjunction with the accompanying drawings. The attached drawings are for reference only and are not used to limit the embodiments of the present disclosure. In the following technical description, for the convenience of explanation, a full understanding of the disclosed embodiments is provided through multiple details. However, one or more embodiments can still be implemented without these details. In other cases, to simplify the drawings, well-known structures and devices can be simplified for display.

[0027] The terms "first", "second", etc. in the specification and claims of the embodiments of the present disclosure and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchanged where appropriate, so that the embodiments of the embodiments of the present disclosure described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0028] In the embodiments of the present disclosure, the terms "upper", "lower", "inside", "middle", "outside", "front", "back" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. These terms are mainly intended to better describe the embodiments of the present disclosure and their embodiments, and are not intended to limit the indicated devices, elements or components to have a specific direction, or to be constructed and operated in a specific direction. Moreover, in addition to being used to indicate directions or positional relationships, some of the above terms may also be used to indicate other meanings. For example, the term "upper" may also be used to indicate a certain dependency or connection relationship in certain circumstances. For those of ordinary skill in the art, the specific meanings of these terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0029] In addition, the terms "disposed", "connected", and "fixed" should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0030] Unless otherwise stated, the term "plurality" means two or more.

[0031] In the embodiment of the present disclosure, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B indicates: A or B.

[0032] The term "and / or" is a description of the association relationship between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or, A and B.

[0033] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present disclosure may be combined with each other.

[0034] At present, in vacuum coating equipment, the substrate is generally heated by radiation heating or contact heating. Among them, the characteristics of radiation heating are large heating area and uniform heating. However, during the mass production coating process, it is impossible to directly set a sensor on the substrate to measure the temperature. The temperature can only be measured by setting a sensor on the heater to indirectly control the temperature of the substrate. In addition, due to the low efficiency of radiation heating, it may also cause a large difference between the temperature of the heater itself and the temperature of the substrate, and slow heating. The characteristics of contact heating are fast heating speed and high heating efficiency. Since the heater is closely attached to the substrate, the temperature sensor set on the heater is basically consistent with the temperature of the substrate. However, due to the limitations of the structure and flow channel design, its heating uniformity is poor.

[0035] Combination Figures 1 to 5 As shown, the embodiment of the present disclosure provides a temperature regulating device, including a barrel 10 and an axis core 20. The barrel 10 includes a cylindrical barrel wall 11 and a plate-shaped first side wall 12 and a second side wall 13; wherein at least two liquid flow channels 14 are arranged along the barrel wall 11, and a liquid inlet 141 of a part of the liquid flow channels 14 is arranged on the first side wall 12 or on the barrel wall 11 adjacent to the first side wall 12, and a liquid outlet 142 is arranged on the second side wall 13 or on the barrel wall 11 adjacent to the second side wall 13; and a liquid inlet 141 of another part of the liquid flow channels 14 is arranged On the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13, its liquid outlet 142 is arranged on the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12; the shaft core 20 is connected to the cylinder body 10 and can drive the cylinder body 10 to rotate; the shaft core 20 is provided with a liquid inlet channel and a liquid return channel isolated from each other; wherein, the liquid inlet channel is respectively connected to the liquid inlet 141 of each liquid flow channel 14, and the liquid return channel is respectively connected to the liquid outlet 142 of each liquid flow channel 14.

[0036] The temperature regulating device provided by the embodiment of the present disclosure is adopted. A plurality of liquid flow channels 14 are arranged along the barrel wall 11 of the barrel body 10, and the liquid inlet 141 of a part of the liquid flow channels 14 is arranged on the first side wall 12 or the barrel wall 11 adjacent to the first side wall 12, and the liquid outlet 142 is arranged on the second side wall 13 or the barrel wall 11 adjacent to the second side wall 13; the liquid inlet 141 of another part of the liquid flow channels 14 is arranged on the second side wall 13 or the barrel wall 11 adjacent to the second side wall 13, and the liquid outlet 142 is arranged on the first side wall 12 or the barrel wall 11 adjacent to the first side wall 12. In this way, the liquid inlet channel in the shaft core 20 can allow each liquid flow channel 14 to pass liquid of corresponding temperature. It can be understood that the liquid flows from the two ends of the barrel body 10 to the middle and then flows out to the other end, changing the previous liquid flow direction of entering from one end and returning from the other end. During the flow of the liquid in the flow channel, the liquid temperature will gradually decrease with heat transfer. The method of setting the liquid inlet and the liquid outlet at both ends can make the heat radiate from both ends to the center, and the area where the temperature of the liquid in a single flow channel is reduced due to heat transfer can be compensated by the reverse liquid flow channel. Under the coordinated temperature control of different liquid flow channels 14, the temperature of the entire area of ​​the cylinder 10 can be made closer, thereby ensuring the uniformity of the temperature control of the substrate. At the same time, by controlling the temperature of the liquid, the temperature of the cylinder 10 can be controlled more accurately, thereby ensuring the required temperature of the substrate. On this basis, since the substrate is wrapped in the barrel wall 11 of the barrel 10, that is, the substrate and the barrel wall 11 of the barrel 10 are in contact temperature control, the heat transfer efficiency is high.

[0037] In some embodiments, the liquid flowing into the liquid flow channel 14 includes oil, water or a refrigerant medium. In this way, the outer wall temperature of the cylinder wall 11 can be effectively improved by the above-mentioned medium. Here, the liquid flowing into the liquid flow channel 14 can be used to heat the substrate or to cool the substrate. It can be adjusted according to the actual application scenario and is not limited here. Among them, in the embodiment of the present disclosure, the liquid flowing into the liquid flow channel 14 is oil, and the substrate is heated for example.

[0038] In the disclosed embodiment, the cylinder 10 is a cylindrical structure, wherein a first side wall 12 and a second side wall 13 in the form of a plate are provided on both sides of a cylindrical cylinder wall 11. Here, the flexible substrate can be wrapped around the cylinder wall 11 of the cylinder 10, and the outer wall surface of the cylinder wall 11 is smooth and has a uniform curvature. During the rotation of the cylinder 10, the flexible substrate can be driven to rotate synchronously. In this way, the cylinder 10 and the flexible substrate rotate synchronously and are relatively stationary, thereby reducing the possibility of the cylinder 10 scratching the flexible substrate.

[0039] Here, the cylinder in the related art is generally designed with a single liquid flow channel, which makes the liquid flow channel path longer, resulting in a large difference between the liquid inlet temperature and the liquid outlet temperature of the liquid flow channel. At the same time, due to the long path of the liquid flow channel, there is also the possibility that air may be mixed into the liquid flow channel, thereby affecting the uniformity of the substrate temperature.

[0040] In the disclosed embodiment, at least two liquid flow channels 14 are arranged on the barrel wall 11. Each liquid flow channel 14 is evenly laid on the barrel wall 11. Among them, when the liquid inlet 141 of a part of the liquid flow channel 14 is arranged on the first side wall 12 or the barrel wall 11 adjacent to the first side wall 12, its liquid outlet 142 is arranged on the second side wall 13 or the barrel wall 11 adjacent to the second side wall 13; when the liquid inlet 141 of another part of the liquid flow channel 14 is arranged on the second side wall 13 or the barrel wall 11 adjacent to the second side wall 13, its liquid outlet 142 is arranged on the first side wall 12 or the barrel wall 11 adjacent to the first side wall 12. The specific arrangement method is not limited here. The liquid inlet is arranged on the side wall or the barrel wall adjacent to the side wall here so that the liquid can enter from the barrel wall area close to the side wall, that is, enter from one end or end of the barrel wall, and flow out from the barrel wall area close to the other side wall after heat exchange through the barrel wall. In other words, the liquid inlet of a part of the liquid flow channel can be set on the first side wall or the end of the barrel wall close to the first side wall, and the liquid outlet can be set on the second side wall or the end of the barrel wall close to the second side wall; the setting method of the other part of the liquid flow channel is opposite to it, which will not be repeated here.

[0041] In the disclosed embodiment, the liquid inlet 141 and the liquid outlet 142 of the liquid flow channel 14 are both arranged on the inner side of the cylinder body 10 , that is, the inner wall surface of the cylinder wall 11 .

[0042] In this way, the heating oil can flow in from the first side wall 12 and the second side wall 13, and flow out from the second side wall 13 and the first side wall 12, that is, the temperature of the heating oil in one liquid flow channel 14 gradually decreases from the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12 to the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13; the temperature of the heating oil in another liquid flow channel 14 gradually increases from the first side wall 12 or the cylinder wall 11 adjacent to the first side wall 12 to the second side wall 13 or the cylinder wall 11 adjacent to the second side wall 13. Thus, the purpose of mutual heat supplementation is achieved, and the temperature of each area is ensured to be more uniform.

[0043] Therefore, when liquid is introduced through both end sides, the heat emitted by the heating oil in the two liquid flow channels 14 can compensate for each other and heat the entire cylinder, making the temperature more uniform, thereby further improving the uniformity of heating the substrate.

[0044] In the disclosed embodiment, the cylinder wall 11 of the cylinder body 10 may have a certain thickness, so that the liquid flow channel 14 may be formed by providing a groove on the cylinder wall 11. Alternatively, the liquid flow channel 14 may be provided separately and attached to the inner wall surface of the cylinder wall 11; or, the cylinder wall 11 may be provided with an interlayer, and the liquid flow channel 14 may be provided in the interlayer. This is not limited here.

[0045] In the embodiment of the present disclosure, in order to further ensure that the heat in the liquid flow channel 14 is transferred to the flexible substrate side, a heat-insulating layer may be provided on the inner side of the cylinder wall 11 of the cylinder body 10 (toward the shaft core 20 side), and a heat-conducting layer may be provided on the outer side of the cylinder wall 11 of the cylinder body 10 (toward the flexible substrate side). The heat-conducting layer may be made of a material with good thermal conductivity and stable chemical properties, such as copper and silicon carbide.

[0046] In the disclosed embodiment, the shaft core 20 is connected to the barrel 10, and the shaft core 20 can drive the barrel 10 to rotate. Here, the shaft core 20 is connected to the first side wall 12 and the second side wall 13 of the barrel 10. If the barrel 10 and the shaft core 20 are long, a reinforcing rib may be provided, and the reinforcing rib is connected to the middle of the barrel 10 and the shaft core 20.

[0047] In the disclosed embodiment, a liquid inlet channel and a liquid return channel isolated from each other are provided in the shaft core 20. The liquid inlet channel is respectively connected to the liquid inlet 141 of each liquid flow channel 14, and the liquid return channel is respectively connected to the liquid outlet 142 of each liquid flow channel 14. In this way, heating oil is transported to the liquid flow channel 14 through the liquid inlet channel, and after the liquid flow channel 14 transfers heat to the substrate, the oil in the liquid flow channel 14 will flow from the liquid outlet 142 to the liquid return channel.

[0048] In some embodiments, in order to make each liquid flow channel 14 evenly laid on the cylinder wall 11, each liquid flow channel 14 is spirally arranged along the cylinder wall 11. In this way, not only can the heating area be effectively increased, but also the flow of heating oil is facilitated.

[0049] In addition, the position of each liquid flow channel 14 will also affect the uniformity of heating the substrate. Therefore, in some embodiments, each liquid flow channel 14 is arranged in sequence along the axial direction of the barrel 10. In this way, each liquid flow channel 14 can form a more dense heating area, thereby further increasing the heating area of ​​the barrel 10, thereby improving the uniformity of heating the substrate.

[0050] At the same time, the spacing between the liquid flow channels 14 will also affect the uniformity of heating the substrate. Therefore, in some embodiments, the spacing between the liquid flow channels 14 is equal. In this way, the liquid heating temperature is more uniform, avoiding the situation where the spacing in some areas is too small, resulting in too high a heating temperature; or the spacing in some areas is too large, resulting in too low a heating temperature. Here, the spacing can be set according to the thermal conductivity of the cylinder wall, with the heat in each liquid flow channel 14 being able to transfer to each other as a benchmark. In some embodiments, if each liquid flow channel 14 is set in a spiral setting, multiple spiral flow channels are nested with each other, and the spacing between each spiral flow channel in the axial direction of the shaft core is equal, so as to further improve the uniformity of substrate heating.

[0051] On this basis, the number of liquid flow channels 14 will also affect the uniformity and heating efficiency of the substrate. Therefore, in some embodiments, the number of liquid flow channels 14 is two, three, four, five, six, seven, eight, nine or ten. This is not limited here.

[0052] In some embodiments, the liquid inlets and liquid outlets of the plurality of liquid flow channels 14 disposed on the same side are evenly staggered with each other. In this way, when the number of liquid flow channels 14 increases, the uniformity of heating can be further improved.

[0053] In some specific applications, four liquid flow channels 14 are provided, wherein the liquid inlets 141 of two liquid flow channels 14 are provided on the cylinder wall 11 adjacent to the first side wall 12 , and the liquid inlets 141 of the other two liquid flow channels 14 are provided on the cylinder wall 11 adjacent to the second side wall 13 .

[0054] To further ensure the uniformity of heating, there is a set angle between the liquid inlet 141 and the liquid outlet 142 of the adjacent liquid flow channels 14 arranged on the same side, and the range of the set angle is 45° to 180°. In this way, the temperature difference of the heating temperature located on different curved surfaces can be reduced, so that the regional temperature of each curved surface is close, thereby further improving the uniformity of heating. In the embodiment of the present disclosure, there is a set angle between the liquid inlet 141 and the liquid outlet 142 of the adjacent liquid flow channels 14 arranged on the same side, which means: the angle between the first connecting line of the liquid inlet 141 of the adjacent liquid flow channel 14 arranged on the same side and the shaft core 20, and the second connecting line of the liquid outlet 142 of the other adjacent liquid flow channel 14 and the shaft core 20. In the case of two liquid flow channels 14, the angle between the liquid inlet of one liquid flow channel arranged on the first side wall 12 of the cylinder body 10 or the end of the cylinder wall 11 close to the first side wall 12 and the liquid outlet of the other liquid flow channel relative to the shaft core 20 is 180°. In the case of four liquid flow channels 14, the liquid inlets and liquid outlets arranged on the first side wall 12 of the cylinder body 10 or the end of the cylinder wall 11 close to the first side wall 12 are alternately arranged along the circumferential direction of the cylinder wall 11, and the angle between two adjacent liquid inlets 141 and liquid outlets 142 relative to the shaft core 20 is 90°. And so on, no more examples are given here.

[0055] Combination Figures 2 to 4 As shown, in some embodiments, the shaft core 20 further includes an inner core barrel 21 and an outer core barrel 22. The inner core barrel 21 has a first channel 211 configured therein; the outer core barrel 22 is disposed inside the outer core barrel 22, and a set distance is provided between the outer wall of the inner core barrel 21 and the inner wall of the outer core barrel 22 to form a second channel 221; wherein one of the first channel 211 and the second channel 221 is a liquid inlet channel, and the other of the first channel 211 and the second channel 221 is a liquid return channel.

[0056] In the embodiment of the present disclosure, the cylinder 10 is driven to rotate by the rotation of the shaft core 20. In order to enable the shaft core 20 to transport the heating oil, the shaft core 20 is provided with two channels, including a first channel 211 in the inner core barrel 21 and a second channel 221 formed between the outer wall of the inner core barrel 21 and the inner wall of the outer core barrel 22.

[0057] Here, when the diameter of the shaft core 20 remains unchanged, the double channels formed by the mutually sleeved outer core tube 22 and the inner core tube 21 can allow more liquid to pass through while ensuring that the volume of the shaft core remains unchanged, compared with the double channels arranged in parallel. In this way, the temperature of the barrel can be adjusted quickly.

[0058] In the embodiment of the present disclosure, when the first channel 211 is a liquid inlet channel, the second channel 221 is a liquid return channel. Specifically, the first channel 211 is connected to the liquid inlet 141 of the liquid flow channel 14 through the first pipeline 212, and the second channel 221 is connected to the liquid outlet 142 of the liquid flow channel 14 through the second pipeline 222. Here, the flow diagram of the liquid can be referred to Figure 7 .

[0059] In the disclosed embodiment, since the liquid temperatures in the liquid inlet channel and the liquid return channel are different, in order to avoid mutual temperature influence. In some embodiments, the inner core tube 21 and the outer core tube 22 are insulated from each other to avoid heat exchange between the first channel 211 and the second channel 221. Here, the tube wall between the inner core tube 21 and the outer core tube 22 can be made of a heat insulating material, such as polyurethane.

[0060] Optionally, the tube wall between the inner core tube 21 and the outer core tube 22 can also be set to a vacuum structure. Specifically, the tube wall between the inner core tube 21 and the outer core tube 22 is a double-layer structure, and the air inside is extracted by the exhaust device to make the tube wall between the inner core tube 21 and the outer core tube 22 a vacuum structure. Here, the tube wall between the inner core tube 21 and the outer core tube 22 can be made of stainless steel, which has the characteristics of being resistant to corrosion by weak corrosive media such as air, steam, and water.

[0061] In the disclosed embodiment, the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 has a certain thickness, or a corresponding supporting structure is arranged inside the cylinder wall between the inner core cylinder 21 and the outer core cylinder 22 to prevent the vacuum device from extracting the air inside and causing deformation of the cylinder wall.

[0062] Combination Figure 5 and Figure 6 As shown, in some embodiments, the temperature regulating device also includes: a rotating connector 30, which is rotatably sealed and connected to the shaft core 20, and the shaft core 20 can rotate relative to the rotating connector 30; wherein the rotating connector 30 can be connected to an external liquid storage device, and the liquid at the first temperature in the external liquid storage device can be transported to the liquid inlet channel through the rotating connector 30, and the liquid at the second temperature in the return channel flows back to the external liquid storage device through the rotating connector 30.

[0063] In the disclosed embodiment, since the barrel 10 needs to rotate, it is necessary to transport the liquid into the liquid flow channel 14 of the barrel 10 through the rotating connector 30. Here, the rotating connector 30 is connected to the shaft core 20 in a rotating sealing manner, the rotating connector 30 is in a fixed state, and the shaft core 20 can rotate with the rotating connector 30, and the rotating connector 30 can also ensure sealing to prevent liquid from flowing out.

[0064] In the disclosed embodiment, during the heating process, the liquid at the first temperature in the external liquid storage device can be delivered to the liquid inlet channel through the rotating connector 30, and the liquid at the second temperature in the liquid return channel flows back to the external liquid storage device through the rotating connector 30. Here, the first temperature is higher than the second temperature. In this way, the heat of the liquid at the first temperature can be transferred to the barrel 10.

[0065] Combination Figure 5 and Figure 6 As shown, in some embodiments, the rotating connector 30 includes a housing 31 and a rotating member 32. The housing 31 has a first joint and a second joint connected to an external liquid storage device; the rotating member 32 is disposed in the housing 31; wherein the shaft core 20 is inserted into the rotating member, and the first channel 211 is connected to the first joint of the housing 31, and the second channel 221 is connected to the second joint of the housing.

[0066] In the disclosed embodiment, the rotating connector 30 includes a housing 31 and a rotating member 32. The housing 31 is provided with a first joint and a second joint, the first joint can be connected to the liquid outlet of the external liquid storage device, and the second joint can be connected to the liquid return port of the external liquid storage device.

[0067] In the disclosed embodiment, a connection space for inserting the shaft core 20 is provided in the housing 31, and the connection space is a circular mounting groove structure. The bottom of the mounting groove can be connected to the first joint, and the groove wall of the mounting groove is connected to the second joint. Here, the rotating member 32 is provided in the mounting groove, and after the shaft core 20 is inserted into the housing 31, the shaft core 20 can be connected to the rotating member 32.

[0068] Optionally, the rotating member 32 is a bearing structure, and the shaft core 20 is connected to the inner ring of the bearing structure. The end surface of the bearing structure facing the groove bottom is a sealing structure, so as to prevent the heating oil from flowing out from the side of the bearing structure.

[0069] In the disclosed embodiment, the rotating member 32 has a set spacing with the bottom of the installation groove, and the end of the inner core barrel 21 is longer than the end of the outer core barrel 22. In this way, after the shaft core 20 is inserted into the connection space, the end of the inner core barrel 21 abuts against the bottom of the installation groove, so that the first channel 211 is connected with the first joint of the housing 31; the end of the outer core barrel 22 is flush with or exceeds the sealing end surface of the rotating member 32, so as to be connected with the second joint of the housing 31 through the space with the set spacing. Here, the connection channel between the first channel 211 and the first joint and the connection channel between the second channel 221 and the second joint are sealed and isolated from each other.

[0070] In some embodiments, the rotating connector 30 further includes an elastic sealing assembly 33, which is disposed at the connection position between the rotating member 32 and the shaft core 20. The elastic sealing assembly 33 can prevent oil leakage when the rotating connector 30 is connected to the shaft core 20, and can also prevent the shaft core 20 from being misaligned with the rotating member 32 during rotation.

[0071] In some embodiments, the elastic sealing assembly 33 includes a first seal 331, a second seal 332 and an elastic member 333. The first seal 331 is arranged at the bottom of the mounting groove, and the end of the inner core tube 21 abuts against the first seal 331; the second seal 332 is arranged between the rotating member 32 and the groove wall of the mounting groove; the elastic member 333 is sleeved on the shaft core 20, and the first end abuts against the rotating member 32, and the other end abuts against the first seal 331.

[0072] In the disclosed embodiment, the first seal 331 is disposed in the housing 31 and is located on the first joint side. In this way, when the shaft core 20 is connected to the housing 31, the end of the inner core tube 21 abuts against the first seal 331 to ensure the sealing of the first joint and the first channel 211. Here, the first seal 331 and the second seal 332 are both dynamic sealing ring structures.

[0073] In the embodiment of the present disclosure, the second sealing member 332 is disposed between the rotating member 32 and the groove wall of the installation groove; here, the second sealing member 332 is disposed at the position where the rotating member 32 and the groove wall of the installation groove rotate, and the elastic member 333 is sleeved on the inner core barrel 21 and abuts against the end surface of the rotating member 32. In this way, the sealing of the space between the rotating member 32 and the installation groove can be ensured, so that the heating oil in the second channel 221 can flow into the space with a set spacing, thereby communicating with the second joint of the housing 31.

[0074] In the disclosed embodiment, the elastic member 333 is a spring structure, which is disposed between the rotating member 32 and the first sealing member 331, so that the shaft core 20 can be prevented from being axially offset from the rotating member 32 during the rotation process. Here, the elastic member 333 adopts a spring structure, and the heating oil in the second channel 221 can flow into the second joint through the gaps between the coils of the spring.

[0075] The above description and the accompanying drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Unless explicitly required, individual components and functions are optional, and the order of operations may vary. Portions and features of some embodiments may be included in or replace portions and features of other embodiments. The embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A temperature regulating device, characterized in that: include: The cylinder body comprises a cylindrical cylinder wall and a plate-shaped first side wall and a second side wall; wherein at least two liquid flow channels are arranged along the cylinder wall, and the liquid inlet of one part of the liquid flow channels is arranged on the first side wall or the cylinder wall adjacent to the first side wall, and the liquid outlet thereof is arranged on the second side wall or the cylinder wall adjacent to the second side wall; the liquid inlet of another part of the liquid flow channels is arranged on the second side wall or the cylinder wall adjacent to the second side wall, and the liquid outlet thereof is arranged on the first side wall or the cylinder wall adjacent to the first side wall; The shaft core is connected to the cylinder body and can drive the cylinder body to rotate; the shaft core is provided with a liquid inlet channel and a liquid return channel which are isolated from each other; wherein the liquid inlet channel is respectively connected to the liquid inlet of each liquid flow channel, and the liquid return channel is respectively connected to the liquid outlet of each liquid flow channel.

2. The temperature adjustment device according to claim 1, characterized in that: Each liquid flow channel is spirally arranged along the cylinder wall.

3. The temperature adjustment device according to claim 2, characterized in that: The liquid flow channels are arranged in sequence along the axial direction of the cylinder.

4. The temperature adjustment device according to claim 3, characterized in that: The spacing between each liquid flow channel is equal.

5. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: The liquid inlets and liquid outlets of the plurality of liquid flow channels arranged on the same side are evenly staggered with each other.

6. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: There is a set angle between the liquid inlets and liquid outlets of adjacent liquid flow channels arranged on the same side, and the range of the set angle is 45° to 180°.

7. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: The liquid flowing into the liquid flow channel includes oil, water or a cooling medium.

8. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: The number of liquid flow channels is from three to ten.

9. The temperature adjustment device according to any one of claims 1 to 4, characterized in that: The shaft core also includes: An inner core tube, the interior of which is provided with a first passage; An outer core barrel, wherein the inner core barrel is disposed inside the outer core barrel, and a set distance is provided between the outer wall of the inner core barrel and the inner wall of the outer core barrel to form a second passage; One of the first channel and the second channel is a liquid inlet channel, and the other of the first channel and the second channel is a liquid return channel.

10. The temperature adjustment device according to claim 9, characterized in that: The inner core tube and the outer core tube are thermally insulated from each other to prevent heat exchange between the first channel and the second channel.

11. The temperature adjustment device according to claim 9, characterized in that: Also includes: The rotating connector is rotatably sealed and connected to the shaft core, and the shaft core can rotate relative to the rotating connector; wherein the rotating connector can be connected to an external liquid storage device, and the liquid at a first temperature in the external liquid storage device can be transported to the liquid inlet channel through the rotating connector, and the liquid at a second temperature in the return channel flows back to the external liquid storage device through the rotating connector.

12. The temperature adjustment device according to claim 11, characterized in that: The swivel connector includes: A housing having a first connector and a second connector connected to an external liquid storage device; A rotating member is disposed in the housing; The shaft core is inserted into the rotating member, and the first channel is communicated with the first joint of the shell, and the second channel is communicated with the second joint of the shell.

13. The temperature adjustment device according to claim 12, characterized in that: The swivel connector also includes: The elastic sealing component is arranged at the connection position between the rotating part and the shaft core.

14. The temperature adjustment device according to claim 13, characterized in that: The housing is provided with a mounting groove, the rotating member is arranged in the mounting groove, and has a set distance with the bottom of the mounting groove; the elastic sealing assembly includes: A first sealing member is arranged at the bottom of the installation groove, and the end of the inner core tube abuts against the first sealing member; A second sealing member is disposed between the rotating member and the groove wall of the mounting groove; The elastic member is sleeved on the shaft core, and a first end thereof abuts against the rotating member, and the other end thereof abuts against the first sealing member.

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