Lead supporting structure and diffusion furnace

Abstract

The invention provides a lead wire supporting structure and a diffusion furnace, the lead wire supporting structure is used for the diffusion furnace, and the lead wire supporting structure comprises an adapter which is arranged outside a furnace body of the diffusion furnace and is connected between a lead wire and a power line, so that the power line is electrically conducted with the lead wire; and the supporting assembly is used for being connected with the peripheral wall of the furnace body, the supporting assembly is connected with the adapter, and the supporting assembly is used for supporting the adapter in the first direction so as to weaken or counteract the force applied to the lead by the adapter in the first direction. According to the lead supporting structure, the supporting assembly is connected with the adapter, and the adapter can be supported in the first direction through the supporting assembly, so that at least one part of force of components such as the adapter, the lead and the power line in the first direction is counteracted, the force applied to the furnace wire by the adapter is reduced, and the furnace wire is prevented from being deformed due to too large force borne by the furnace wire.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a lead support structure and a diffusion furnace. Background Art

[0002] As one of the important equipment in the field of semiconductor devices, high temperature diffusion furnace is widely used in industries such as integrated circuits, power electronics, and photovoltaic cell production. As the core component of photovoltaic diffusion equipment, the furnace body plays a vital role in improving product quality.

[0003] In some related technologies, the furnace wire used for heating in the diffusion furnace needs to be connected to the power line through the lead wire, and then connected to the power supply through the power line to realize power supply. However, in the related technologies, the support method of the lead wire is not set reasonably, and the gravity of the power line and the gravity of the lead wire structure itself will act on the furnace wire, causing serious deformation of the connection position between the furnace wire and the lead wire, thereby reducing the service life of the furnace body. Summary of the invention

[0004] The present invention aims to at least solve the problem in the prior art that the gravity of the power line and the gravity of the lead structure itself will act on the furnace wire, causing serious deformation at the connection position between the furnace wire and the lead wire, and proposes a lead support structure and a diffusion furnace.

[0005] In order to achieve the purpose of the present invention, a lead support structure is provided for a diffusion furnace, the lead support structure comprising: an adapter, which is arranged outside the furnace body of the diffusion furnace and connected between the lead and the power line to make the power line and the lead electrically conductive; a support assembly, which is connected to the outer peripheral wall of the furnace body, the support assembly is connected to the adapter, and the support assembly is used to support the adapter in a first direction to weaken or offset the force applied by the adapter to the lead in the first direction.

[0006] In some embodiments, the adapter is used to be arranged along a second direction perpendicular to the first direction, and the adapter has a first end and a second end in the second direction, the first end of the adapter is used to be fixed and electrically connected to the lead, and the second end of the adapter is used to be fixed and electrically connected to the power cord; in the first direction, the support assembly and the adapter are limitedly matched to support the adapter; in the second direction, the support assembly and the adapter are slidably matched.

[0007] In some embodiments, the support assembly includes: an insulating block, a limiting through hole is provided along the second direction, the adapter is passed through the limiting through hole and slidably cooperates with the inner wall of the limiting through hole; a connecting plate, which is detachably connected to the insulating block, and the connecting plate is used to connect to the outer peripheral wall of the furnace body.

[0008] In some embodiments, the adapter and the limiting through hole are clearance-matched in the length direction of the lead.

[0009] In some embodiments, the insulating block includes: two insulator blocks, each of which is provided with a limiting through groove, and the two insulator blocks are interlocked with each other so that the limiting through grooves surround the limiting through hole.

[0010] In some embodiments, the lead support structure also includes: an insulating component for fixedly connecting to the outer wall of the furnace body, the insulating component having a connection port, the connection port being used to connect the inside and outside of the furnace body, and the lead is passed through the connection port.

[0011] In some embodiments, the insulating assembly includes: an insulating plate for connecting to the furnace body, the connecting port is arranged on the insulating plate, and the size of the connecting port in a second direction perpendicular to the first direction is adjustable to accommodate the position change of the lead in the second direction due to temperature change.

[0012] In some embodiments, the insulating plate includes: a fixed sub-plate, which is used to be fixedly connected to the outer wall of the furnace body, and a connecting groove is provided on the fixed sub-plate; a movable sub-plate, which is connected to the fixed sub-plate and forms the connecting port with the connecting groove of the fixed sub-plate. In the second direction, the movable sub-plate is movable relative to the fixed sub-plate, and the movable sub-plate expands or shrinks the connecting port by moving away from or close to the fixed sub-plate.

[0013] In some embodiments, the fixed sub-plate and the movable sub-plate are elastically connected so that after the lead is reset, the enlarged connection port shrinks under the action of elastic force.

[0014] In some embodiments, the insulating plate also includes: a guide member, which is arranged on the movable sub-plate along the second direction, and the guide member is slidably matched with the fixed sub-plate under the drive of the movable sub-plate to make the movable sub-plate move away from or approach the fixed sub-plate; a limiting ring, which is connected to the guide member and limitedly matched with the fixed sub-plate to limit the position of the movable sub-plate in the second direction; an elastic member, which is connected between the limiting ring and the fixed sub-plate, and the elastic member is used to apply elastic force to the guide member when the movable sub-plate moves away from the fixed sub-plate to reset the movable sub-plate.

[0015] In some embodiments, the fixed sub-plate is provided with a guide hole and a limiting hole along the second direction, the guide hole is connected with the limiting hole, the aperture of the limiting hole is larger than the aperture of the guide hole, and a limiting step is formed at the connection between the limiting hole and the guide hole;

[0016] The guide member is sequentially inserted into the guide hole and the limiting hole, the limiting ring is fixedly connected to the guide member and slidingly cooperates with the limiting hole, the limiting ring is used for limiting cooperation with the limiting step, and the elastic member is arranged between the limiting ring and the limiting step.

[0017] In some embodiments, the insulating assembly includes: an insulating plate, which is used to be arranged on the outside of the furnace body and is movable relative to the furnace body in a second direction perpendicular to the first direction; the connecting port is arranged on the insulating plate, and the insulating plate adjusts the position of the connecting port in the second direction by moving to adapt to the position change of the lead in the second direction due to temperature change.

[0018] In some embodiments, the insulating assembly also includes: a detection device, which is arranged on the outside of the furnace body to detect the position of the lead in the second direction; a driving device, which is drivingly connected to the insulating plate and electrically connected to the detection device, and the driving device is used to drive the insulating plate to move in the second direction according to the position of the lead in the second direction detected by the detection device, so that the lead remains in a preset position in the connecting port.

[0019] In some embodiments, the insulating component also includes: a base, which is used to be connected to the outer peripheral wall of the furnace body, and a heat-insulating space is formed between the base and the outer peripheral wall of the furnace body, and a second avoidance opening is provided on the base, the detection device and the driving device are both provided on the base, and the insulating plate is slidingly connected to the base along the second direction, and the lead is simultaneously passed through the second avoidance opening and the connecting port; a heat-insulating part, which is provided in the heat-insulating space, and is used to isolate the heat dissipated by the furnace body so that the temperature around the detection device and the driving device is within a preset range.

[0020] According to a second aspect of the present invention, a diffusion furnace is also disclosed, comprising: a furnace body, a furnace wire, a lead wire and the lead wire support structure, wherein the furnace wire is arranged inside the furnace body; the lead wire is passed through the outer wall of the furnace body, and one end of the lead wire is connected to the furnace wire;

[0021] The lead wire supporting structure is disposed on the furnace body and connected to the other end of the lead wire.

[0022] In some embodiments, the furnace body axis is arranged along a second direction perpendicular to the first direction, and the furnace wire extends spirally along the second direction; a second opening is arranged on the furnace body, and the lead wire is passed through the second opening.

[0023] In some embodiments, the first direction is a vertical direction and the second direction is a horizontal direction.

[0024] The lead support structure of the present invention is connected to the adapter through a support assembly, and the adapter can be supported by the support assembly in a first direction, thereby offsetting at least a portion of the force of the adapter, lead, power cord and other components in the first direction, reducing the force applied by the adapter on the furnace wire, and preventing the furnace wire from being deformed due to excessive force. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of a diffusion furnace in the related art;

[0026] Figure 2 It is a structural schematic diagram of a lead assembly of a diffusion furnace in the related art;

[0027] Figure 3 The intention is that the furnace wire of the diffusion furnace in the related art is deformed at the connection position with the lead wire after the furnace wire is circumferentially offset;

[0028] Figure 4 The intention is that the furnace wire of the diffusion furnace in the related art is deformed at the connection position with the lead wire after the furnace wire is axially offset;

[0029] Figure 5 A schematic structural diagram of a lead support structure according to an embodiment of the present invention;

[0030] Figure 6 An assembly diagram of the leads and the adapter of the lead support structure of an embodiment of the present invention;

[0031] Figure 7 A schematic diagram of the position of the lead wire of the lead wire support structure of an embodiment of the present invention before the furnace wire expands due to heat;

[0032] Figure 8 A schematic diagram of the position of the lead wire of the lead wire support structure of an embodiment of the present invention after the furnace wire is heated and expanded;

[0033] Fig. 9 A schematic structural diagram of a lead support structure according to another embodiment of the present invention;

[0034] Fig.10 A schematic diagram of an enlarged connection port of an insulating plate of a lead support structure according to another embodiment of the present invention;

[0035] Fig.11 A schematic diagram of a connection port of an insulating plate of a lead support structure according to another embodiment of the present invention after being retracted;

[0036] Fig.12 A side cross-sectional view of an insulating plate of a lead support structure according to another embodiment of the present invention;

[0037] Fig.13A schematic structural diagram of a lead support structure according to another embodiment of the present invention;

[0038] List of reference numerals:

[0039] 10. adapter; 11. adapter plate; 12. first end plate; 13. second end plate; 20. support assembly; 21. insulation block; 211. insulator block; 22. connecting plate; 23. limiting through hole; 30. lead wire; 40. power line; 50. furnace wire; 60. matching plate; 70. insulation assembly; 71. insulation plate; 711. fixed sub-plate; 7111. guide hole; 7112. limiting hole; 7113. limiting step; 72. connecting port; 73. mounting plate; 74. detection device; 75. driving device; 76. base; 77. slide rail; 78. slider; 80. movable gap; 712. movable sub-plate;

[0040] 7121, connecting hole; 713, guide piece; 714, limiting ring; 715, elastic piece; 791, heat insulation board; 792, insulating pad. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the technical solution of the present invention, the lead support structure and the diffusion furnace provided by the present invention are described in detail below with reference to the accompanying drawings.

[0042] As one of the important equipment in the field of semiconductor devices, diffusion furnaces are widely used in industries such as integrated circuits, power electronics, and photovoltaic cell production. As the core component of photovoltaic diffusion equipment, the furnace body plays a vital role in improving product quality.

[0043] In some related technologies, such as Figure 1 As shown, the diffusion furnace includes: furnace wire 1a, insulator 2a, lead assembly 3a, furnace body 4a, and power line 5a. The furnace body 4a is arranged in the horizontal direction, and the furnace wire 1a is arranged inside the furnace body 4a and spirally wound along the axis of the furnace body 4a. The insulator 2a is located between the furnace wires 1a and arranged along the winding direction of the furnace wire 1a. The insulators are connected in parallel in a row through a through rod, and a plurality of lead assemblies 3a are connected to the outer wall of the furnace body 4a along the axial direction of the furnace body 4a.

[0044] Among them, Figure 2As shown, the lead assembly 3a includes: a lead 31a, an insulating assembly 32a, an adapter 33a, and a matching plate 34a. An opening portion (not shown in the figure) is provided on the furnace body 4a, and the lead 31a is inserted into the opening portion. The first end of the lead 31a is welded to the furnace wire 1a, and the second end of the lead 31a is located outside the furnace body 4a. The first end of the adapter 33a and the matching plate 34a are connected by bolts, and a clamping space is formed between the first end of the adapter 33a and the matching plate 34a. The second end of the lead 31a is located in the clamping space, and the adapter 33a and the matching plate 34a clamp and fix the lead 31a. The power line 5a is connected to the second end of the adapter 33a, and the current is connected from the power line 5a to the adapter 33a, and then flows to the furnace wire 1a through the adapter 33a and the lead 31a in sequence, so that the furnace wire 1a heats up.

[0045] The insulating assembly 32a is arranged around the lead wire 31a and connected to the furnace body 4a to insulate the lead wire 31a from the furnace body 4a. The insulating assembly 32a includes: a cover plate 321a and an insulating sleeve 322a. The cover plate 321a is fixed on the furnace body 4a, and the insulating sleeve 322a is installed above the cover plate 321a. The lead wire 31a passes through the insulating sleeve 322a after being welded to the furnace wire 1a, thereby achieving insulation from the furnace body 4a. The function of the insulating sleeve 322a is to isolate the lead wire 31a from the furnace body 4a, thereby preventing the furnace body 4a from leaking electricity.

[0046] like Figure 1 and Figure 2 As shown, the lead wire 31a is usually tilted on the furnace wire 1a, and the lead wire 31a and the insulating sleeve 322a are usually relatively movable to facilitate assembly. However, this results in the lead wire 31a lacking sufficient support in the vertical direction. When the lead wire 31a is connected to the adapter 33a and the matching plate 34a, the power line 5a is connected to the adapter 33a. Under the action of gravity, the lead wire 31a will apply a part of the gravity of the adapter 33a, the matching plate 34a and the power line 5a to the furnace wire 1a. When the temperature of the furnace wire 1a rises, the deformation resistance of the furnace wire 1a decreases, resulting in serious deformation of the position where the furnace wire 1a is connected to the lead wire 31a, reducing the service life of the furnace body 4a.

[0047] In addition, when the diffusion furnace is working, the temperature of the furnace wire 1a will rise, thereby realizing the high-temperature process inside. When the temperature of the furnace wire 1a rises, due to the principle of thermal expansion and contraction, the furnace wire 1a will be offset in the circumferential direction and axial direction of the furnace body 4a after it expands due to heat. However, since the lead wire 31a applies part of the gravity of the adapter 33a, the matching plate 34a and the power line 5a to the furnace wire 1a, Figure 3 As shown in FIG. 1 , the expansion of the position where the furnace wire 1a is connected to the lead wire 31a in the circumferential direction of the furnace body 4a is blocked, so that the other positions of the furnace wire 1a expand and deviate, and the position connected to the lead wire 31a is deformed. Figure 4 As shown, in the axial direction of the furnace body 4a, since the insulating sleeve 322a surrounds the lead wire 31a, the insulating sleeve 322a limits the axial movement of the lead wire 31a, which will cause the axial displacement of the connection position of the furnace wire 1a and the lead wire 31a to be blocked, so that the other positions of the furnace wire 1a expand and deviate, and the connection position with the lead wire 31a is deformed.

[0048] In order to solve the above problems, the invention discloses a lead support structure for a diffusion furnace, the lead support structure comprising: an adapter 10 and a support assembly 20. The adapter 10 is used to be arranged outside the furnace body of the diffusion furnace and connected between the lead 30 and the power line 40, so that the power line 40 and the lead 30 are electrically conductive; the support assembly 20 is used to connect the outer peripheral wall of the furnace body, the support assembly 20 is connected to the adapter 10, and the support assembly 20 is used to support the adapter 10 in a first direction to weaken or offset the force applied by the adapter 10 to the lead 30 in the first direction.

[0049] When in use, the support component 20 is connected to the adapter 10, and the adapter 10 can be supported in a first direction by the support component 20, so as to apply a supporting force to the support component. The supporting force can offset at least a part of the force of the adapter 10, the lead 30, the power cord 40 and other components in the first direction, so that the force applied by the adapter 10 on the furnace wire 50 is reduced, thereby preventing the furnace wire 50 from being deformed due to excessive force.

[0050] like Figures 5 to 9 As shown, the lead support structure of the present invention is specifically described below in combination with some embodiments. In this embodiment, the first direction is the vertical direction, that is, the x-axis direction; the second direction is the horizontal direction, that is, the y-axis direction, and the axial direction of the diffusion furnace is set along the horizontal direction.

[0051] The adapter 10 is used to be arranged along a second direction perpendicular to the first direction. The adapter 10 has a first end and a second end in the second direction. The first end of the adapter 10 is used to be fixedly connected to and electrically connected to the lead 30, and the second end of the adapter 10 is used to be fixedly connected to and electrically conductive with the power cord 40. In the first direction, the support assembly 20 and the adapter 10 are limitedly matched to support the adapter 10, and in the second direction, the support assembly 20 and the adapter 10 are slidably matched.

[0052] like Figure 6 As shown, in this embodiment, the adapter 10 includes: an adapter plate 11, a first end plate 12 and a second end plate 13. The adapter plate 11 is arranged along the second direction (horizontal direction), that is, the y-axis direction. The first end plate 12 and the second end plate 13 are respectively located at both ends of the adapter plate 11, so that the adapter 10 forms a C-shaped structure. The first end plate 12 is fixedly connected to the lead 30, and the second end plate 13 is fixedly connected to the power line 40 by bolts and is conductive.

[0053] Exemplarily, the lead support structure further includes: a matching plate 60 matching with the first end plate 12, such as Figure 6 As shown, the matching plate 60 and the first end plate 12 are respectively located on both sides of the lead 30 and are fixedly connected by bolts, and the bolts are respectively passed through the first end plate 12, the lead 30 and the matching plate 60 and the three are locked by nuts, so that the first end plate 12 and the matching plate 60 clamp and fix the lead 30. In this way, the reliability of the fixation of the lead 30 can be improved, and the reliability of the conductive connection can be ensured.

[0054] In the first direction (x-axis direction), the support assembly 20 and the adapter 10 are limited in position to support the adapter 10, and in the second direction (y-axis direction), the support assembly 20 and the adapter 10 are slidably matched. In other words, in the vertical direction, the support assembly 20 and the adapter 10 are limited in position to support the adapter 10 in the vertical direction, thereby sharing the gravity of the adapter 10, the lead 30 and the power line 40. In the y-axis direction, that is, the horizontal direction, since the axis of the furnace body is arranged in the horizontal direction, and the furnace wire 50 inside the furnace body also extends spirally along the axis of the furnace body, when the furnace wire 50 expands and contracts due to heat, it will deviate along the axis of the furnace body (y-axis direction), thereby driving the adapter 10 to move along the axis of the furnace body (y-axis direction), and since the adapter 10 and the support assembly 20 slide in the axis of the furnace body (y-axis direction), the adapter 10 can slide relative to the support assembly 20 along the axis of the furnace body (y-axis direction), thereby cooperating with the deviation of the furnace wire 50 in the axis of the furnace body (y-axis direction), thereby avoiding obstruction to the deviation of the furnace wire 50 in the axis of the furnace body (y-axis direction), and effectively preventing deformation of the furnace wire 50.

[0055] It should be noted that if there is no support assembly 20 to support the adapter 10 in the vertical direction to share the gravity of the adapter 10, the lead 30 and the power cord 40, then the gravity of the adapter 10, the lead 30 and the power cord 40 will be applied to the furnace wire 50 through the lead 30. At this time, after the furnace wire 50 is affected by the gravity of the adapter 10, the lead 30 and the power cord 40, the displacement of the furnace wire 50 in the axial direction of the furnace body (y-axis direction) will be hindered to a certain extent, and the strength of the furnace wire 50 itself is not enough to overcome the obstacle, thereby causing the furnace wire 50 itself to deform. Therefore, if the furnace wire 50 is to drive the lead wire 30 to deflect together, the lead wire 30 cannot exert too much force on the furnace wire 50 in the vertical direction. Therefore, the adapter 10 must be supported in the vertical direction by the support assembly 20 to share the gravity of the adapter 10, the lead wire 30 and the power line 40, so that the force of the lead wire 30 on the furnace wire 50 in the vertical direction is reduced to a level sufficient to be overcome by the strength of the furnace wire 50 itself, thereby achieving the furnace wire 50 driving the lead wire 30 to deflect along the furnace body axis direction (y-axis direction). In some preferred embodiments, the support assembly 20 can completely share the gravity of the adapter 10, the lead wire 30 and the power line 40, thereby preventing the furnace wire 50 from being subjected to the downward pressure of the lead wire 30 in the vertical direction.

[0056] The support assembly 20 includes: an insulating block 21 and a connecting plate 22. The insulating block 21 is provided with a limiting through hole 23 along the second direction (horizontal direction), and the adapter 10 is passed through the limiting through hole 23 and slidably cooperates with the inner wall of the limiting through hole 23; the connecting plate 22 is detachably connected to the insulating block 21, and the connecting plate 22 is used to connect to the outer peripheral wall of the furnace body.

[0057] like Figure 4 As shown, that is to say, a limiting through hole 23 is provided on the insulating block 21 in the axial direction of the furnace body (y-axis direction), and the adapter plate 11 of the adapter 10 is inserted into the limiting through hole 23, and the adapter plate 11 is slidably matched with the inner wall of the limiting through hole 23, so as to realize the relative sliding of the adapter 10 and the support assembly 20. Exemplarily, the insulating block 21 can be made of ceramic. While realizing the relative sliding of the adapter 10 and the support assembly 20 in the axial direction of the furnace body (y-axis direction), the insulation of the adapter 10 can be realized to avoid conduction between the adapter 10 and the furnace body. Exemplarily, as Figure 4 As shown, the adapter plate 11 is a sheet metal part with an L-shaped structure, and its insulating block 21 is fixedly connected to the connecting plate 22 by bolts, and is detachably connected to the furnace body by bolts through the adapter plate 11. During the installation and disassembly process, the installation and disassembly of the insulating block 21 can be achieved through the connecting plate 22, thereby avoiding damage to the insulating block 21 caused by the support assembly 20 during the loading and unloading process.

[0058] During the thermal expansion and contraction of the furnace wire 50, the furnace wire 50 not only deviates along the axial direction of the furnace body, but also deviates circumferentially of the furnace body. Since the lead wire 30 is arranged perpendicular to the axis of the furnace body, when the furnace wire 50 deviates circumferentially of the furnace body, it will drive the lead wire 30 to move in the length direction of the lead wire 30 itself. Therefore, in order to prevent the furnace wire 50 from deforming, the adapter 10 and the limiting through hole 23 are clearance-matched in the length direction of the lead wire 30.

[0059] For example, Figure 7 As shown, when the adapter 10 is inserted into the limiting through hole 23, there is a movable gap 80 between the adapter plate 11 and the inner wall of the limiting through hole 23 in the length direction of the lead 30. Figure 8 As shown, when the furnace wire 50 expands due to heat, the furnace wire 50 will drive the lead wire 30 to move along the length direction of the lead wire 30. Due to the existence of the movable gap 80, the lead wire 30 moves along its own length direction, thereby offsetting to match the expansion of the furnace wire 50, avoiding the lead wire 30 from hindering the expansion offset of the furnace wire 50, thereby effectively avoiding the lead wire 30 from deforming in the circumferential direction.

[0060] Exemplarily, the insulating block 21 includes: two insulator blocks 211, each of which is provided with a limiting groove, and the two insulator blocks 211 are buckled together so that the limiting grooves surround the limiting through hole 23. During assembly, the adapter 10 can be placed in the limiting groove of one of the insulator blocks 211, and then the two insulator blocks 211 are buckled together, thereby completing the assembly of the adapter 10. This method facilitates the installation and disassembly of the adapter 10 and improves the efficiency of assembly and disassembly.

[0061] The lead wire support structure further includes: an insulating assembly 70. The insulating assembly 70 is used to be fixedly connected to the outer peripheral wall of the furnace body, and the insulating assembly 70 has a connection port 72, and the connection port 72 is used to connect the inside and outside of the furnace body; the lead wire 30 is inserted into the connection port 72, one end of which is used to be arranged inside the furnace body and electrically connected to the furnace wire 50 of the diffusion furnace, and the other end is electrically connected to the adapter 10.

[0062] In the above embodiment, it can be understood that in order to realize that the lead wire 30 moves along with the furnace wire 50 in the direction of the furnace axis and the length direction of the lead wire 30 itself, the connection port 72 and the lead wire 30 are clearance-matched, that is, the size of the connection port 72 is larger than the size of the lead wire 30, especially in the second direction (y-axis direction), that is, the axial direction (horizontal direction) of the furnace body, the connection port 72 needs to be long enough to enable the lead wire 30 to move along the second direction (y-axis direction) driven by the furnace wire 50, so as to avoid restricting the movement of the lead wire 30. However, since the internal temperature of the furnace body is relatively high when it is working, if the size of the connection port 72 in the second direction (y-axis direction) increases, when other sizes remain unchanged, it means that the area of ​​the connection port 72 also increases accordingly, and the increase in the area of ​​the connection port 72 will cause a large amount of heat to be lost from the connection port 72, resulting in unstable temperature in the furnace body, and if the connection port 72 is too small, it will restrict the movement of the lead wire 30.

[0063] Therefore, in order to solve the above problems, the present invention also discloses another embodiment, as Figures 9 to 12 As shown, its structure is similar to Figure 5 The embodiments shown are basically the same, except that, in this embodiment, the insulating assembly 70 includes: an insulating plate 71. The insulating plate 71 is used to connect with the furnace body, and the connection port 72 is arranged on the insulating plate 71. The size (i.e., width) of the connection port 72 in the second direction perpendicular to the first direction can be adjusted to adapt to the position change of the lead wire 30 in the second direction due to temperature change. When the diffusion furnace is working, the temperature of the furnace wire 50 increases and expands. In the second direction (y-axis direction), that is, the axial direction (horizontal direction) of the furnace body, the furnace wire 50 deviates due to expansion and drives the lead wire 30 to move along the second direction. At this time, by expanding the connection port 72 in the second direction (y-axis direction), the edge of the connection port 72 is prevented from hindering the movement of the lead wire 30, so that the deformation of the furnace wire 50 can be avoided. When the temperature of the furnace wire 50 decreases, the width of the connection port 72 can be reduced to avoid the heat loss caused by the excessive temperature of the connection port 72.

[0064] In this embodiment, by setting the connection port 72 to be adjustable in size in the second direction, when the lead 30 is offset in the second direction due to thermal expansion and contraction of the furnace wire 50, the size of the connection port 72 in the second direction can be adjusted to adapt to the position change of the lead 30 in the second direction, thereby avoiding the connection port 72 from hindering the offset of the lead 30, thereby avoiding deformation of the furnace wire 50, and because the size of the connection port 72 is adjustable, the size of the connection port 72 can be reduced after the temperature is lowered, thereby reducing heat loss.

[0065] The insulating plate 71 includes: a fixed sub-plate 711 and a movable sub-plate 712. The fixed sub-plate 711 is used to be fixedly connected to the outer wall of the furnace body, and a connecting groove is provided on the fixed sub-plate 711; the movable sub-plate 712 is connected to the fixed sub-plate 711 and forms a connecting port 72 with the connecting groove of the fixed sub-plate 711. In the second direction, the movable sub-plate 712 is movable relative to the fixed sub-plate 711, and the movable sub-plate 712 moves away from or close to the fixed sub-plate 711 to expand or reduce the connecting port 72. By setting the fixed sub-plate 711 and the movable sub-plate 712, the size change of the connecting port 72 in the second direction can be achieved by controlling the movable sub-plate 712 to move close to or away from the fixed sub-plate 711 in the second direction.

[0066] Exemplarily, the furnace body is provided with an opening (not shown in the figure) for passing the lead wire 30. Fig. 9 As shown, the insulating assembly 70 further includes: a mounting plate 73, which is connected to the furnace body by bolts, and the mounting plate 73 covers the opening, and a first avoidance opening (not shown in the figure) is provided on the mounting plate 73 to allow the lead wire 30 to pass through. Fig.10 As shown, the fixed sub-plate 711 has a first end and a second end in the second direction, the first end of the fixed sub-plate 711 faces the movable sub-plate 712, the second end of the fixed sub-plate 711 faces away from the movable sub-plate 712, and the connection groove is set at the first end of the fixed sub-plate 711; the movable sub-plate 712 has a first end and a second end, the first end of the movable sub-plate 712 faces the fixed sub-plate 711, and the second end of the movable sub-plate 712 faces away from the fixed sub-plate 711. The fixed sub-plate 711 and the movable sub-plate 712 can be made of ceramic material, the fixed sub-plate 711 is connected to the mounting plate 73 by bolts, and the movable sub-plate 712 covers the first avoidance position and surrounds the connection port 72 with the fixed sub-plate 711 (see Fig.10 ) so that the connection port 72, the first avoidance port and the opening are connected, so that the lead wire 30 can pass through the connection port 72, the first avoidance port and the opening to connect with the furnace wire 50 inside the furnace body. The lead wire 30 can be isolated from the furnace body by using a ceramic material to prevent leakage of the furnace body. By setting the mounting plate 73, the insulating plate 71 can be connected to the furnace body through the mounting plate 73, and the insulating plate 71 can be disassembled by disassembling the mounting plate 73. When the insulating plate 71 is made of ceramic material, it can be avoided that the insulating plate 71 is damaged due to frequent disassembly.

[0067] In some embodiments, in order to facilitate the movement and extension of the movable sub-plate 712, the fixed sub-plate 711 and the movable sub-plate 712 are elastically connected so that after the lead 30 is reset, the enlarged connection port 72 is reduced under the action of elastic force.

[0068] Exemplarily, the insulating plate 71 further includes: a guide member 713, a limiting ring 714 and an elastic member 715. The guide member 713 is arranged on the movable sub-plate 712 along the second direction, and the guide member 713 is slidably matched with the fixed sub-plate 711 under the drive of the movable sub-plate 712, so that the movable sub-plate 712 is away from or close to the fixed sub-plate 711; the limiting ring 714 is connected to the guide member 713 and is limitedly matched with the fixed sub-plate 711 to limit the position of the movable sub-plate 712 in the second direction; the elastic member 715 is connected between the limiting ring 714 and the fixed sub-plate 711, and the elastic member 715 is used to apply elastic force to the guide member 713 when the movable sub-plate 712 is away from the fixed sub-plate 711, so as to reset the movable sub-plate 712.

[0069] Specifically, if Fig.11 and Fig.12 As shown, a guide hole 7111 and a limit hole 7112 are provided on the fixed sub-plate 711 along the second direction, the guide hole 7111 is connected with the limit hole 7112, the aperture of the limit hole 7112 is larger than the aperture of the guide hole 7111, and a limit step 7113 is formed at the connection between the limit hole 7112 and the guide hole 7111, the guide hole 7111 extends to the first end of the fixed sub-plate 711, and the limit hole 7112 extends to the second end of the fixed sub-plate 711. A through connection hole 7121 is provided on the movable sub-plate 712, the connection hole 7121 corresponds to the position of the limit hole 7112, the guide member 713 is simultaneously penetrated in the connection hole 7121, the guide hole 7111 and the limit hole 7112, the guide member 713 is connected to the movable sub-plate 712 and slidably cooperates with the fixed sub-plate 711. The limiting ring 714 is arranged in the limiting hole 7112, the inner peripheral wall of the limiting ring 714 is fixedly connected to the guide member 713, the outer peripheral wall of the limiting ring 714 is slidingly matched with the limiting hole 7112, the limiting ring 714 is used to limit the limiting step 7113, and the elastic member 715 is arranged between the limiting ring 714 and the limiting step 7113.

[0070] When the furnace wire 50 expands due to the increase in temperature and drives the lead wire 30 to move along the second direction, the lead wire 30 abuts against the movable sub-plate 712 and pushes the movable sub-plate 712 to move in the direction away from the fixed sub-plate 711, thereby expanding the connection port 72. At the same time, the movable sub-plate 712 will drive the guide member 713 to move relative to the fixed sub-plate 711 in the second direction, and the limiting ring 714 on the guide member 713 will approach the limiting step 7113, thereby compressing the elastic member 715; when the furnace wire 50 shrinks due to the decrease in temperature and drives the lead wire 30 to move in the opposite direction along the second direction, the lead wire 30 breaks away from the movable sub-plate 712, and the elastic member 715 pushes the limiting ring 714 away from the limiting step 7113, so that the movable sub-plate 712 is close to the fixed sub-plate 711 under the action of the guide member 713, thereby shrinking the connection port 72.

[0071] Exemplarily, the guide member 713 can be a guide bolt having a smooth section and a threaded section. The threaded section is located at the tail end of the bolt, and the smooth section extends to the nut position. The smooth section is used to slide with the guide hole 7111. The limiting ring 714 can be a bolt and threadedly connected to the tail end of the guide bolt. The elastic member 715 can be a spring.

[0072] like Fig.12 As shown, in order to ensure the stability of the elastic connection between the fixed sub-plate 711 and the movable sub-plate 712, there are two guide members 713, limit rings 714 and elastic members 715 and they are spaced apart in the third direction, wherein the third direction is the z-axis direction and intersects with the second direction and the first direction in pairs.

[0073] In the above embodiment, the size of the connection port 72 is adjusted to accommodate the change in the position of the lead 30, but this is not restrictive. Fig.13 In another embodiment shown, the structure is basically the same as the above embodiment, except that, in this embodiment, the insulating assembly 70 includes: an insulating plate 71. The insulating plate 71 is used to be arranged outside the furnace body, and is movable relative to the furnace body in a second direction perpendicular to the first direction. The connection port 72 is arranged on the insulating plate 71. The insulating plate 71 adjusts the position of the connection port 72 in the second direction by moving to adapt to the position change of the lead 30 in the second direction due to temperature change. Since the insulating plate 71 can move relative to the furnace body, and the connection port 72 is arranged on the insulating plate 71, the position of the connection port 72 can also be moved. Therefore, when the position of the lead 30 is offset, the position of the connection port 72 can be adjusted by moving the insulating plate 71, so that the connection port 72 moves with the movement of the lead 30, thereby avoiding the connection port 72 from hindering the offset of the lead 30. In this way, since the connection port 72 moves with the lead 30, the area of ​​the connection port 72 can be small, as long as it is slightly larger than the lead 30, thereby reducing the heat loss in the furnace body.

[0074] In some embodiments, the insulating assembly 70 further includes: a detection device 74 and a driving device 75. The detection device 74 is used to be arranged outside the furnace body to detect the position of the lead 30 in the second direction; the driving device 75 is drivingly connected to the insulating plate 71 and electrically connected to the detection device 74. The driving device 75 is used to drive the insulating plate 71 to move in the second direction according to the position of the lead 30 in the second direction detected by the detection device 74, so that the lead 30 remains in the preset position in the connection port 72. By setting the detection device 74, the position of the lead 30 in the second direction can be detected. When the lead 30 deviates in the second direction driven by the furnace wire 50, the detection device 74 can control the driving device 75 according to the deflection amount of the lead 30, so that the driving device 75 drives the insulating plate 71 to move the same deflection amount, so that the connection port 72 moves with the lead 30, thereby avoiding the connection port 72 from hindering the movement of the lead 30.

[0075] In a further embodiment, the insulating assembly 70 further includes: a base 76 and a heat insulating portion (not shown in the figure). The base 76 is used to connect with the outer peripheral wall of the furnace body, and a heat insulating space is formed between the base 76 and the outer peripheral wall of the furnace body. A second avoidance port is provided on the base 76, and the insulating plate 71, the detection device 74, and the driving device 75 are all arranged on the base 76, and the insulating plate 71 is slidably connected to the base 76 along the second direction, and the lead 30 is simultaneously passed through the second avoidance port and the connecting port 72; the heat insulating portion is arranged in the heat insulating space, and is used to isolate the heat emitted by the furnace body, so that the temperature around the detection device 74 and the driving device 75 is within a preset range.

[0076] By providing the base 76 and the heat-insulating portion, on the one hand, since a heat-insulating space is formed between the base 76 and the outer peripheral wall of the furnace body, the distance between the detection device 74, the driving device 75 and the furnace body is increased, thereby reducing the ambient temperature around the detection device 74, the driving device 75 to a certain extent; on the other hand, by providing the heat-insulating portion in the heat-insulating space, the heat-insulating portion forms a heat-insulating layer on the outside of the furnace body, which can not only reduce the heat loss of the furnace body, but also reduce the ambient temperature around the detection device 74, the driving device 75, so that the detection device 74, the driving device 75 can work at a suitable ambient temperature, thereby extending the service life of the detection device 74, the driving device 75.

[0077] For example, Fig.13As shown, the base 76 is fixedly connected to the outer peripheral wall of the furnace body, and a second avoidance opening (not shown in the figure) is provided on the base 76, and the second avoidance opening corresponds to the position of the opening on the furnace body. The insulating component 70 also includes: a slide rail 77, a slider 78 and a mounting plate 73. The slide rail 77 is fixedly connected to the base 76 along the second direction, the slider 78 is slidably connected to the slide rail 77, the mounting plate 73 is fixedly connected to the slider 78, and a first avoidance opening is provided on the mounting plate 73 so that the lead wire 30 passes through, and the insulating plate 71 is fixedly connected to the mounting plate 73 and covers the position of the first avoidance opening so that the connection port 72 is connected to the first avoidance opening. The lead wire 30 is arranged in the connection port 72, the first avoidance opening, the second avoidance opening and the opening, one end of the lead wire 30 is located outside the furnace body and connected to the adapter 10, and the other end of the lead wire 30 is located inside the furnace body and is welded and fixed to the furnace wire 50.

[0078] like Fig.13 As shown, in this embodiment, the support assembly 20 is fixedly connected to the base 76 and the support assembly 20 is located on the first side of the insulating plate 71 in the second direction, and the detection device 74 and the driving device 75 are located on the second side of the insulating plate 71 in the second direction. The driving device 75 is a motor, and its output end is connected to the screw rod, and the screw rod is threadedly matched with the mounting plate 73. The motor drives the screw rod to rotate to drive the mounting plate 73 to move along the second direction. The detection device 74 uses a laser distance sensor to detect the position offset of the lead 30 by laser.

[0079] When in use, after setting the target temperature required for the diffusion process, the diffusion furnace is turned on, the furnace wire 50 is powered on to heat up, and then the position information of the initial lead 30 is obtained through the laser ranging sensor. During the furnace heating stage, the furnace wire 50 expands due to heat and will shift along the second direction (the axial direction of the furnace body), thereby driving the lead 30 to move. At this time, the laser ranging sensor monitors the position offset of the lead 30 and sends this signal to the host computer or controller. Subsequently, the motor drives the mounting plate 73 to move through the feedback of the lead 30 position information, and then the insulating plate 71 moves along the guide rail, and finally the connecting port 72 follows the movement of the lead 30 to avoid deformation of the furnace wire 50 at the lead 30.

[0080] In some embodiments, in order to prevent the substrate from conducting heat to the detection device 74 and the driving device 75, a heat insulation board 791 is provided on the base 76, and the detection device 74 and the driving device 75 are both provided on the heat insulation board 791. In other embodiments, in order to prevent the substrate from conducting heat to the detection device 74 and the driving device 75 after the furnace body leaks electricity, an insulating pad 792 is also provided on the heat insulation board 791, and the detection device 74 and the driving device 75 are both provided on the insulating pad 792.

[0081] It should be noted that in Fig.13In the embodiment shown, the base 76 is directly fixedly connected to the furnace body, but this is not restrictive. In some other embodiments not shown in the figure, the base 76 and the furnace body can also be indirectly connected, which is not limited in the present invention. Fig.13 In the illustrated embodiment, the support assembly 20 is fixedly connected to the base 76, but this is also not restrictive. In some other embodiments not shown in the figure, the support assembly 20 may also be disposed on the furnace body, and the present invention is not limited thereto.

[0082] According to another aspect of the invention, a diffusion furnace is also disclosed, comprising: a furnace body, a furnace wire 50, a lead wire 30 and the above-mentioned lead wire support structure. The furnace body axis is arranged along a second direction perpendicular to the first direction, and a heat preservation layer is arranged inside the furnace body; the furnace wire 50 is arranged inside the furnace body, and the furnace wire 50 spirally extends along the second direction; the lead wire 30 is passed through the outer wall of the furnace body, and one end of the lead wire 30 is connected to the furnace wire 50; the lead wire support structure is arranged on the furnace body and connected to the other end of the lead wire 30. Among them, the first direction is a vertical direction, and the second direction is a horizontal direction.

[0083] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A lead support structure for a diffusion furnace, characterized in that: The lead support structure comprises: An adapter (10) is arranged outside the furnace body of the diffusion furnace and connected between the lead wire (30) and the power line (40) so that the power line (40) and the lead wire (30) are electrically connected; A support assembly (20) is used to connect the outer peripheral wall of the furnace body, the support assembly (20) is connected to the adapter (10), and the support assembly (20) is used to support the adapter (10) in a first direction to weaken or offset the force applied by the adapter (10) to the lead (30) in the first direction.

2. The lead support structure according to claim 1, characterized in that: The adapter (10) is used to be arranged along a second direction perpendicular to the first direction, and the adapter (10) has a first end and a second end in the second direction, the first end of the adapter (10) is used to be fixedly connected to and electrically connected with the lead wire (30), and the second end of the adapter (10) is used to be fixedly connected to and electrically connected with the power line (40); In the first direction, the support assembly (20) and the adapter (10) are limitedly matched to support the adapter (10); in the second direction, the support assembly (20) and the adapter (10) are slidably matched.

3. The lead support structure according to claim 2, characterized in that: The support assembly (20) comprises: The insulating block (21) is provided with a limiting through hole (23) along the second direction, and the adapter (10) is inserted into the limiting through hole (23) and slidably cooperates with the inner wall of the limiting through hole (23); A connecting plate (22) is detachably connected to the insulating block (21), and the connecting plate (22) is used to be connected to the outer peripheral wall of the furnace body.

4. The lead support structure according to claim 3, characterized in that: The adapter (10) and the limiting through hole (23) are clearance-matched in the length direction of the lead wire (30).

5. The lead support structure according to claim 3, characterized in that: The insulating block (21) comprises: two insulator blocks (211), each of the insulator blocks (211) being provided with a limiting through groove, and the two insulator blocks (211) being interlocked so that the limiting through grooves enclose the limiting through hole (23).

6. The lead support structure according to claim 1, characterized in that: The lead support structure further comprises: The insulating component (70) is used for being fixedly connected to the outer peripheral wall of the furnace body. The insulating component (70) has a connecting port (72). The connecting port (72) is used for connecting the inside and the outside of the furnace body. The lead wire (30) is inserted into the connecting port (72).

7. The lead support structure according to claim 6, characterized in that: The insulating component (70) comprises: An insulating plate (71) is used for connecting to the furnace body, the connecting port (72) is arranged on the insulating plate (71), and the size of the connecting port (72) in a second direction perpendicular to the first direction is adjustable to accommodate the position change of the lead wire (30) in the second direction due to temperature change.

8. The lead support structure according to claim 7, characterized in that: The insulating plate (71) comprises: A fixed sub-plate (711) is used for being fixedly connected to the outer wall of the furnace body, and a connecting groove is provided on the fixed sub-plate (711); A movable sub-plate (712) is connected to the fixed sub-plate (711) and forms the connection port (72) with the connection groove of the fixed sub-plate (711); in the second direction, the movable sub-plate (712) is movable relative to the fixed sub-plate (711); the movable sub-plate (712) expands or contracts the connection port (72) by moving away from or close to the fixed sub-plate (711).

9. The lead support structure according to claim 8, characterized in that: The fixed sub-plate (711) and the movable sub-plate (712) are elastically connected so that after the lead wire (30) is reset, the enlarged connection port (72) is reduced under the action of elastic force.

10. The lead support structure according to claim 9, characterized in that: The insulating plate (71) further comprises: a guide member (713) arranged on the movable sub-plate (712) along the second direction, wherein the guide member (713) is slidably matched with the fixed sub-plate (711) under the drive of the movable sub-plate (712) so as to move the movable sub-plate (712) away from or close to the fixed sub-plate (711); a limiting ring (714), connected to the guide member (713) and cooperating with the fixed sub-plate (711) to limit the position of the movable sub-plate (712) in the second direction; An elastic member (715) is connected between the limiting ring (714) and the fixed sub-plate (711), and the elastic member (715) is used to apply elastic force to the guide member (713) when the movable sub-plate (712) moves away from the fixed sub-plate (711), so as to reset the movable sub-plate (712).

11. The lead support structure according to claim 10, characterized in that: The fixed sub-plate (711) is provided with a guide hole (7111) and a limiting hole (7112) along the second direction, the guide hole (7111) is connected to the limiting hole (7112), the aperture of the limiting hole (7112) is larger than the aperture of the guide hole (7111), and a limiting step (7113) is formed at the connection between the limiting hole (7112) and the guide hole (7111); The guide member (713) is sequentially inserted into the guide hole (7111) and the limiting hole (7112); the limiting ring (714) is fixedly connected to the guide member (713) and slidably cooperates with the limiting hole (7112); the limiting ring (714) is used for limiting cooperation with the limiting step (7113); and the elastic member (715) is arranged between the limiting ring (714) and the limiting step (7113).

12. The lead support structure according to claim 6, characterized in that: The insulating component (70) comprises: An insulating plate (71) is used to be arranged outside the furnace body and is movable relative to the furnace body in a second direction perpendicular to the first direction. The connecting port (72) is arranged on the insulating plate (71). The insulating plate (71) adjusts the position of the connecting port (72) in the second direction by moving to adapt to the position change of the lead wire (30) in the second direction due to temperature change.

13. The lead support structure according to claim 12, characterized in that: The insulating assembly (70) further comprises: A detection device (74) is arranged outside the furnace body to detect the position of the lead wire (30) in the second direction; A driving device (75) is connected to the insulating plate (71) and electrically connected to the detection device (74), and the driving device (75) is used to drive the insulating plate (71) to move in the second direction according to the position of the lead wire (30) in the second direction detected by the detection device (74), so that the lead wire (30) remains located at a preset position in the connection port (72).

14. The lead support structure according to claim 13, characterized in that: The insulating assembly (70) further comprises: A base (76) is used to be connected to the outer peripheral wall of the furnace body, a heat-insulating space is formed between the base (76) and the outer peripheral wall of the furnace body, a second avoidance opening is provided on the base (76), the detection device (74) and the drive device (75) are both provided on the base (76), and the insulating plate (71) is slidably connected to the base (76) along the second direction, and the lead wire (30) is simultaneously passed through the second avoidance opening and the connection opening (72); The heat insulating portion is arranged in the heat insulating space and is used to isolate the heat emitted by the furnace body so that the temperature around the detection device (74) and the driving device (75) is within a preset range.

15. A diffusion furnace, characterized in that: include: A furnace body, a furnace wire (50), a lead wire (30) and a lead wire support structure as described in any one of claims 1 to 14, wherein the furnace wire (50) is arranged inside the furnace body; the lead wire (30) is passed through the outer wall of the furnace body, and one end of the lead wire (30) is connected to the furnace wire (50); the lead wire support structure is arranged on the furnace body and connected to the other end of the lead wire (30).

16. The diffusion furnace according to claim 15, characterized in that: The furnace body axis is arranged along a second direction perpendicular to the first direction, and the furnace wire (50) extends spirally along the second direction; a second opening is arranged on the furnace body, and the lead wire (30) is inserted into the second opening.

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