Spectral imaging method and device based on scanning galvanometer

Abstract

The invention relates to the technical field of spectrum acquisition, in particular to a spectral imaging method and device based on a scanning galvanometer, and the method comprises the following steps: S1, initializing a spectral imaging device; s2, uniformly irradiating the surface of the target object through a light source; s3, the light beams reflected by the surface of the target object are straightened; s4, controlling the light beam to scan along the X-axis direction and the Y-axis direction through a scanning galvanometer group arranged in the spectral imaging device; and S5, collecting and generating spectral data of the target object through a spectrograph arranged in the spectral imaging device. According to the invention, the degree of automation is high, the dependence on high-performance control equipment is reduced, spectral data acquisition in a push-scan imaging mode can be realized only by controlling the light beams to scan along the X-axis direction and the Y-axis direction through the scanning galvanometer group arranged in the spectral imaging device, and the spectral imaging device has both performance and economy, high acquisition efficiency and good detection performance.

Description

Technical Field

[0001] The present invention relates to the technical field of spectrum acquisition, and in particular to a spectrum imaging method and device based on a scanning galvanometer. Background Art

[0002] A spectrometer is an instrument that analyzes the composition and structure of a substance by measuring the absorption, reflection or emission characteristics of the substance to light of different wavelengths. In the prior art, systems based on push-broom line scanning spectrometers are widely used. This type of spectrometer collects spectral data line by line by scanning the detector in the target area, and then obtains a complete spectral image by splicing. It has high spectral resolution and accuracy and is suitable for large-scale, high-resolution spectral imaging. However, the structure of this type of spectrometer is relatively complex, requiring a precise mechanical motion system and high-quality detectors, resulting in high overall costs. At the same time, it is relatively cumbersome to use. For example, a method for assembling an imaging spectrometer disclosed in a Chinese patent is and device (Announcement No.: CN111896108B). This patented technology demonstrates an adjustment method for an imaging spectrometer, which can simplify the debugging steps of the spectrometer to a certain extent. However, there are still relatively complex operating steps, which makes it inconvenient to use. At the same time, the push-broom line scanning spectrometer still has the defect of high difficulty in optimizing surface detection, and has not fully resolved the contradiction between spatial resolution and spectral resolution, resulting in unsatisfactory effects in some dynamic or real-time applications. In the application scenarios of flexible scanning imaging, precise positioning and efficient data acquisition for specific areas, the existing push-broom scanning spectrometers still have certain limitations, with low acquisition efficiency and poor detection performance. Summary of the invention

[0003] The technical problem to be solved by the present invention is as follows: the existing spectral acquisition method has many operating steps, is inconvenient to debug, and has certain limitations in the application scenarios of flexible scanning imaging, precise positioning and efficient data acquisition of specific areas, with low acquisition efficiency and poor detection performance.

[0004] In order to solve the above technical problems, the first aspect of the present invention adopts the following technical solution: a spectral imaging method based on a scanning galvanometer, comprising the following steps: S1: Spectral imaging device initialization; S2: Place the reference plate and the target object, and evenly illuminate the surface of the target object with a light source; S3: Straighten the light beam reflected from the surface of the target object to obtain a highly directional and parallel light beam; S4: controlling the light beam to scan along the X-axis direction and the Y-axis direction through a scanning galvanometer group provided in the spectral imaging device to locate and collect the light beam reflected by the target object; S5: focusing the light beam, and collecting and generating spectral data of the target object through a spectrometer provided in the spectral imaging device.

[0005] When the present invention is working, it can realize a series of tasks such as uniform irradiation of the light source, straightening of the light beam, scanning of the light beam along the X-axis direction and the Y-axis direction, focusing of the light beam, and collection and generation of spectral data. It has a high degree of automation and reduces the dependence on high-performance control equipment. Only by controlling the light beam to scan along the X-axis direction and the Y-axis direction through the scanning galvanometer group provided in the spectral imaging device, spectral data collection in the push-scan imaging mode can be realized. It has both performance and economy, high collection efficiency and good detection performance.

[0006] Preferably, in step S1, the following steps are also included: A1: Spectral imaging device is initialized and scanning galvanometer group is reset; A2: Place the reference plate, illuminate the reference plate with a light source, and the scanning galvanometer group moves, and the spectrometer collects the reference plate signal; A3: Adjust the spectrometer control parameters and adjust the maximum value of the reference plate signal intensity to the preset reference value; A4: Turn off the light source and block the light to collect dark background signals; A5: Place the white field, illuminate the white field with light source, the scanning galvanometer group moves, and the spectrometer collects the white field signal.

[0007] Preferably, in step S5, when focusing the light beam and collecting and generating spectral data of the target object through a spectrometer provided in the spectral imaging device, the following steps are adopted: B1: focusing the light beam, and collecting and generating spectral data of the target object through a spectrometer provided in the spectral imaging device, to obtain a target object signal and a reference plate signal; B2: Perform black field correction on the collected white field signal, reference plate signal, and target object signal, and after obtaining the white field signal, reference plate signal, and target object signal after black field correction, perform white field correction on the target object signal after black field correction; B3: Correct the illumination variation over time for the target object signal and the reference plate signal after white field correction to obtain the corrected target object signal and the reference plate signal; B4: The reflectivity of the target object is obtained by calculating the ratio of the corrected target object signal to the reference plate signal after white field correction.

[0008] When the present invention is working, it can realize a series of tasks such as adaptive adjustment of reference plate signals, calibration of dark background signals and white field signals, acquisition of target object signals, and calculation of reflectivity of target objects. At the same time, the background noise is measured and compensated through black field correction, the uniformity of light signal distribution is calibrated through white field correction, and the errors caused by factors such as equipment aging and ambient temperature changes are dynamically compensated through illumination change correction over time. The accuracy of spectral data can be further improved, the data integrity and consistency in the acquisition process are guaranteed, higher flexibility and acquisition efficiency are provided, and it is suitable for various work scenarios.

[0009] Preferably, in step B1, after performing black field correction on the collected white field signal, reference plate signal, and target object signal to obtain the white field signal, reference plate signal, and target object signal after black field correction, performing white field correction on the target object signal after black field correction, the following steps are adopted: C1: Perform black field correction on the collected white field signal, reference plate signal, and target object signal to obtain the white field signal, reference plate signal, and target object signal after black field correction using the following formula: ; ; ; in: It is the white field signal after black field correction; It is the white field signal before black field correction; It is the reference board signal after black field correction; It is the reference plate signal before black field correction; It is the target object signal after black field correction; It is the target object signal before black field correction; is a dark background signal; is the wavelength dimension; is the X-axis coordinate of the target point; is the Y-axis coordinate of the target point; is the scanning cycle; C2: When performing white field correction on the target object signal after black field correction, the following formula is used: ; in: It is the target object signal after white field correction; In step B3, the target object signal and the reference plate signal after white field correction are corrected for illumination variation over time, and the following formula is used to obtain the corrected target object signal and the reference plate signal: ; ; in: is the corrected target object signal; is the corrected reference board signal; In step B4, the reflectivity of the target object is obtained by calculating the ratio of the corrected target object signal to the reference plate signal after white field correction, using the following formula: ; in: is the reflectivity of the target object.

[0010] Preferably, in step S4, when the light beam is controlled to scan along the X-axis direction and the Y-axis direction by the scanning galvanometer group provided in the spectral imaging device to locate and collect the light beam reflected by the target object, the following steps are adopted to perform a local scan, obtain a local area matrix, determine the position coordinates of the target area, calculate the angle group for controlling the light beam to scan along the X-axis direction and the Y-axis direction by the scanning galvanometer group, and control the light beam to scan reciprocally line by line along the X-axis direction and the Y-axis direction according to the calculated angle group.

[0011] When the present invention is working, global scanning and local scanning can be achieved only by controlling the scanning galvanometer group provided in the spectral imaging device, which greatly reduces the dependence on precise mechanical motion systems and high-quality detectors, can realize flexible scanning and imaging of specific areas, facilitates precise positioning, has good detection performance, and has high scanning flexibility. At the same time, it can avoid the spectral data redundancy problem caused by global scanning in specific scenes, improves the time utilization efficiency, and at the same time controls the light beam to scan back and forth line by line along the X-axis direction and the Y-axis direction according to the calculated angle group, which can optimize the scanning path, avoid repeated scanning or missing areas, and can further improve the efficiency of spectral data collection.

[0012] Preferably, in step S5, when focusing the light beam and collecting and generating the spectral data of the target object through the spectrometer provided in the spectral imaging device, the following steps are adopted to focus the light beam and collect and generate the spectral data of the target object through the spectrometer provided in the spectral imaging device to obtain the target object signal and the reference plate signal, and the target object signal is set to ,in The scanning galvanometer group controls the scanning angle of the light beam along the X-axis direction. The scanning galvanometer group controls the scanning angle of the light beam along the Y-axis direction.

[0013] In order to solve the above technical problems, the second aspect of the present invention adopts the following technical solution: a spectral imaging device based on a scanning galvanometer, using the above-mentioned spectral imaging method based on a scanning galvanometer, comprising: A light source, used to evenly illuminate the surface of the target object; The object plane is used to place the target object and the corresponding reference plate; The semi-transparent and semi-reflective beam splitter is used to reflect the light beam from the light source so that it can be vertically irradiated on the surface of the target object, while allowing the light beam reflected by the target object to pass through; A collimating lens group is used to collimate the light beam reflected by the target object to keep it parallel; A scanning galvanometer group is used to control the light beam to scan along the X-axis and Y-axis directions; A focusing lens group, used for focusing the scanned light beam to the light beam receiving end of the spectrometer; A spectrometer, used to collect the spectrum signal of the light beam and convert it into digital data; The main control module is used to deploy the synchronization control algorithm for overall control, optimize the scanning path of the scanning galvanometer group during global or local scanning, and save data; The light path of the light source, object plane, semi-transparent and semi-reflective beam splitter, collimating lens group, scanning galvanometer group, focusing lens group and spectrometer is connected. The scanning galvanometer group includes an X-direction scanning galvanometer for controlling the light beam to scan along the X-axis direction and a Y-direction scanning galvanometer for controlling the light beam to scan along the Y-axis direction. The scanning galvanometer group and the spectrometer are both data-connected to the main control module. The scanning galvanometer group and the spectrometer perform two-dimensional coverage scanning and acquisition under the synchronous control of the main control module.

[0014] When the present invention is working, it can realize a series of tasks such as uniform irradiation of the light source, straightening of the light beam, scanning of the light beam along the X-axis direction and the Y-axis direction, focusing of the light beam, and collection and generation of spectral data. It has a high degree of automation and can realize rapid scanning of the target area by optimizing and controlling the continuous deflection characteristics of the scanning galvanometer group. The scanning galvanometer group and the spectrometer are used to perform two-dimensional coverage scanning and collection under the synchronous control of the main control module, which ensures the integrity and consistency of the data in the scanning process, provides higher flexibility and efficiency for application scenarios, and has high collection efficiency and good detection performance.

[0015] Preferably, the light source is installed at the starting position of the system optical path, the semi-transparent and semi-reflective beam splitter is arranged at an angle, the center of the semi-transparent and semi-reflective beam splitter is kept flush with the center of the light source and aligned with the optical axis center of the object plane and the optical axis center of the collimating lens group, the optical axis of the collimating lens group coincides with the optical axis of the light input end of the scanning galvanometer group, and the optical axis of the focusing lens group coincides with the optical axis of the light output end of the scanning galvanometer group.

[0016] Preferably, a plurality of image points at an imaging portion in the spectrometer are arranged to correspond one-to-one with a plurality of object points arranged on the object plane.

[0017] Preferably, the X-direction scanning galvanometer and the Y-direction scanning galvanometer are optically connected and are respectively arranged at the light input end and the light output end or the light output end and the light input end of the scanning galvanometer group.

[0018] The beneficial technical effects of the present invention include: 1. The present invention can realize a series of tasks such as uniform irradiation of light source, straightening of light beam, scanning of light beam along X-axis and Y-axis directions, focusing of light beam, collection and generation of spectral data, etc., with high degree of automation and reduced dependence on high-performance control equipment. Only by controlling the light beam to scan along X-axis and Y-axis directions through the scanning galvanometer group provided in the spectral imaging device, spectral data collection in push-scan imaging mode can be realized, which has both performance and economy, high collection efficiency and good detection performance.

[0019] 2. The present invention can realize a series of tasks such as adaptive adjustment of reference board signals, calibration of dark background signals and white field signals, acquisition of target object signals, and calculation of the reflectivity of target objects. At the same time, the background noise is measured and compensated through black field correction, the uniformity of light signal distribution is calibrated through white field correction, and the errors caused by equipment aging, ambient temperature changes and other factors are dynamically compensated through illumination change correction over time. The accuracy of spectral data can be further improved, the data integrity and consistency in the acquisition process are ensured, higher flexibility and acquisition efficiency are provided, and it is suitable for various work scenarios.

[0020] 3. The present invention can realize global scanning and local scanning only by controlling the scanning galvanometer group provided in the spectral imaging device, which greatly reduces the dependence on precise mechanical motion systems and high-quality detectors, and can realize flexible scanning and imaging of specific areas, facilitate precise positioning, have good detection performance, and high scanning flexibility. At the same time, it can avoid the spectral data redundancy problem caused by global scanning in specific scenes, improve the time utilization efficiency, and at the same time, control the light beam to scan back and forth line by line along the X-axis and Y-axis directions according to the calculated angle group, which can optimize the scanning path, avoid repeated scanning or missing areas, and further improve the efficiency of spectral data collection.

[0021] 4. The present invention can realize a series of tasks such as uniform irradiation of light source, straightening of light beam, scanning of light beam along X-axis and Y-axis directions, focusing of light beam, collection and generation of spectral data, etc., with high degree of automation. By optimizing and controlling the continuous deflection characteristics of the scanning galvanometer group, rapid scanning of the target area can be realized. The scanning galvanometer group and the spectrometer are used to perform two-dimensional coverage scanning and collection under the synchronous control of the main control module, which ensures the data integrity and consistency during the scanning process, provides higher flexibility and efficiency for application scenarios, and has high collection efficiency and good detection performance.

[0022] Other features and advantages of the present invention will be disclosed in detail in the following specific embodiments and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention will be further described below in conjunction with the accompanying drawings: Figure 1 It is a workflow diagram of a spectral imaging method based on a scanning galvanometer; Figure 2 is a workflow diagram of step S1 in a spectral imaging method based on a scanning galvanometer; Figure 3 is a workflow diagram of step S5 in a spectral imaging method based on a scanning galvanometer; Figure 4 It is a structural schematic diagram of a spectral imaging device based on a scanning galvanometer. DETAILED DESCRIPTION

[0024] The technical solutions of the embodiments of the present invention are explained and described below in conjunction with the drawings of the embodiments of the present invention, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the protection scope of the present invention.

[0025] In the following description, terms such as "inside", "outside", "up", "down", "left", "right", etc. that indicate directions or positional relationships are only used to facilitate the description of the embodiments and simplify the description, and do not indicate or imply that the referred device or element must have a specific direction, be constructed and operate in a specific direction. Therefore, it should not be understood as a limitation of the present invention. Embodiment 1:

[0026] See also Figure 1 This embodiment discloses a spectral imaging method based on a scanning galvanometer, comprising the following steps: S1: Spectral imaging device initialization; S2: Place the reference plate and the target object, and evenly illuminate the surface of the target object through the light source 1. Preferably, the wavelength range and light intensity of the light source 1 can be optimized according to the spectral range of the spectrometer 8, so that it can completely cover the spectral range of the spectrometer 8 and avoid interference from other factors; S3: Straighten the light beam reflected from the surface of the target object to obtain a highly directional and parallel light beam; S4: controlling the light beam to scan along the X-axis direction and the Y-axis direction through a scanning galvanometer group provided in the spectral imaging device to locate and collect the light beam reflected by the target object; S5: focusing the light beam, and collecting and generating spectral data of the target object through the spectrometer 8 provided in the spectral imaging device.

[0027] When the present embodiment is working, it can realize a series of tasks such as uniform illumination of the light source 1, straightening of the light beam, scanning of the light beam along the X-axis direction and the Y-axis direction, focusing of the light beam, and collection and generation of spectral data. It has a high degree of automation and reduces the dependence on high-performance control equipment. Only by controlling the light beam to scan along the X-axis direction and the Y-axis direction through the scanning galvanometer group provided in the spectral imaging device, spectral data collection in the push-scan imaging mode can be realized. It has both performance and economy, high collection efficiency and good detection performance.

[0028] See also Figure 2 In this embodiment, in step S1, the following steps are also included: A1: Spectral imaging device is initialized and scanning galvanometer group is reset; A2: Place the reference plate, light source 1 illuminates the reference plate, the scanning galvanometer group moves, and the spectrometer 8 collects the reference plate signal; A3: Adjust the control parameters of the spectrometer 8, and adjust the maximum value of the reference plate signal intensity to a preset reference value. In specific implementation, the preset reference value can be set to 80% to 90% of the saturation value to maintain data validity and improve acquisition accuracy; A4: Turn off light source 1 and block the light to collect dark background signals; A5: Place a white field, light source 1 illuminates the white field, the scanning galvanometer group moves, and the spectrometer 8 collects the white field signal.

[0029] See also Figure 3 Preferably, in step S5, when focusing the light beam and collecting and generating the spectral data of the target object through the spectrometer 8 provided in the spectral imaging device, the following steps are adopted: B1: focusing the light beam, and collecting and generating spectral data of the target object through the spectrometer 8 provided in the spectral imaging device, to obtain the target object signal and the reference plate signal; B2: Perform black field correction on the collected white field signal, reference plate signal, and target object signal, and after obtaining the white field signal, reference plate signal, and target object signal after black field correction, perform white field correction on the target object signal after black field correction; B3: Correct the illumination variation over time for the target object signal and the reference plate signal after white field correction to obtain the corrected target object signal and the reference plate signal; B4: The reflectivity of the target object is obtained by calculating the ratio of the corrected target object signal to the reference plate signal after white field correction.

[0030] When this example is working, it can realize a series of tasks such as adaptive adjustment of reference board signals, calibration of dark background signals and white field signals, acquisition of target object signals, and calculation of reflectivity of target objects. At the same time, it can measure and compensate for background noise through black field correction, calibrate the uniformity of light signal distribution through white field correction, and dynamically compensate for errors caused by factors such as equipment aging and ambient temperature changes through illumination correction over time. It can further improve the accuracy of spectral data, ensure data integrity and consistency during the acquisition process, provide higher flexibility and acquisition efficiency, and is suitable for various work scenarios.

[0031] As a further improvement of this embodiment, in step B1, after performing black field correction on the collected white field signal, reference plate signal, and target object signal to obtain the white field signal, reference plate signal, and target object signal after black field correction, performing white field correction on the target object signal after black field correction, the following steps are adopted: C1: Perform black field correction on the collected white field signal, reference plate signal, and target object signal to obtain the white field signal, reference plate signal, and target object signal after black field correction using the following formula: ; ; ; in: It is the white field signal after black field correction; It is the white field signal before black field correction; It is the reference board signal after black field correction; It is the reference plate signal before black field correction; It is the target object signal after black field correction; It is the target object signal before black field correction; is a dark background signal; is the wavelength dimension; is the X-axis coordinate of the target point; is the Y-axis coordinate of the target point; is the scanning cycle; C2: When performing white field correction on the target object signal after black field correction, the following formula is used: ; in: It is the target object signal after white field correction; In step B3, the target object signal and the reference plate signal after white field correction are corrected for illumination variation over time, and the following formula is used to obtain the corrected target object signal and the reference plate signal: ; ; in: is the corrected target object signal; is the corrected reference board signal; In step B4, the reflectivity of the target object is obtained by calculating the ratio of the corrected target object signal to the reference plate signal after white field correction, using the following formula: ; in: is the reflectivity of the target object.

[0032] In the specific implementation, in step S4, the light beam is controlled to scan along the X-axis direction and the Y-axis direction by the scanning galvanometer group provided in the spectral imaging device to locate and collect the light beam reflected by the target object. The following steps are adopted to perform a global scan by a line-by-line reciprocating scanning method, and perform a serpentine scan according to the target area. This can avoid repeated scanning or missing areas, and can also effectively reduce the invalid movement of the scanning galvanometer group, reduce the system operating power consumption and mechanical wear, extend the service life of the equipment, and at the same time improve the stability of the overall scanning process and the consistency of data acquisition. Embodiment 2:

[0033] See also Figure 1 This embodiment provides a spectral imaging method based on a scanning galvanometer. The similarities with other embodiments are not repeated here, and the differences are described in detail below.

[0034] In this embodiment, in step S4, when the light beam is controlled to scan along the X-axis direction and the Y-axis direction by the scanning galvanometer group provided in the spectral imaging device to locate and collect the light beam reflected by the target object, the following steps are adopted to perform a local scan, obtain a local area matrix, determine the position coordinates of the target area, calculate the angle group for controlling the light beam to scan along the X-axis direction and the Y-axis direction by the scanning galvanometer group, and control the light beam to scan reciprocally line by line along the X-axis direction and the Y-axis direction according to the calculated angle group.

[0035] When the present embodiment is working, global scanning and local scanning can be realized only by controlling the scanning galvanometer group provided in the spectral imaging device, which greatly reduces the dependence on precise mechanical motion systems and high-quality detectors, and can realize flexible scanning and imaging of specific areas, facilitate precise positioning, have good detection performance, and have high scanning flexibility. At the same time, it can avoid the problem of spectral data redundancy caused by global scanning in specific scenes, improve time utilization efficiency, and at the same time, control the light beam to scan back and forth line by line along the X-axis direction and the Y-axis direction according to the calculated angle group, which can optimize the scanning path, avoid repeated scanning or missing areas, and further improve the efficiency of spectral data collection.

[0036] Preferably, in step S5, when focusing the light beam and collecting the spectral data of the target object through the spectrometer 8 provided in the spectral imaging device, the following steps are adopted to focus the light beam and collect the spectral data of the target object through the spectrometer 8 provided in the spectral imaging device to obtain the target object signal and the reference plate signal, and the target object signal is set to ,in The scanning galvanometer group controls the scanning angle of the light beam along the X-axis direction. The scanning galvanometer group controls the scanning angle of the light beam along the Y-axis direction. Each corresponds to a target point in the target area. , through linkage, accurate collection of any target point can be achieved.

[0037] As a further improvement of this embodiment, when performing local scanning, in step C1, when performing black field correction on the target object signal, the following formula is used: ; in: It is the target object signal after black field correction; In step C2, when performing white field correction on the target object signal after black field correction, the following formula is used: ; in, It is the target object signal after white field correction; In step B3, the target object signal and the reference plate signal after white field correction are corrected for illumination variation over time, and the following formula is used to obtain the corrected target object signal and the reference plate signal: ; in: is the corrected target object signal; In step B4, the reflectivity of the target object is obtained by calculating the ratio of the corrected target object signal to the white field corrected reference plate signal using the following formula: ; in: is the reflectivity of the target object.

[0038] Preferably, during local scanning, the local area is input as matrix data, and the matrix can be obtained by using the correspondence between physical size and pixels, or the local area matrix can be obtained by using an image combined with a deep learning algorithm, for example, setting the scanned area to 1 and the unscanned area to 0, etc.

[0039] When scanning, obtain the angle group set corresponding to the area coordinate set, sort by value, and fix For one angle, when scanning to the boundary from small to large according to another angle, after changing one angle, scan in sequence from large to small according to another angle, and complete the acquisition work by scanning in a cycle. This can optimize the scanning path, reduce the invalid movement of the scanning galvanometer group, and reduce the system operation power consumption and mechanical wear. Embodiment three:

[0040] This embodiment provides a spectral imaging method based on a scanning galvanometer. The similarities with other embodiments are not repeated here, and the differences are described in detail below.

[0041] In this embodiment, when performing scanning work, in order to be applicable to driving systems with lower precision, it is also necessary to perform real-time correction on the scanning galvanometer group when it is in motion to complete more accurate spectrum acquisition work. In the step S4, local scanning is performed to obtain the local area matrix, determine the position coordinates of the target area, and calculate the angle group of the scanning galvanometer group controlling the light beam to scan along the X-axis direction and the Y-axis direction, using the following calculation formula: ; Where: e is the galvanometer spacing in the scanning galvanometer group, d is the distance from the galvanometer axis in the scanning galvanometer group to the origin of the plane coordinate of the target area; In step S4, when the light beam is controlled to scan back and forth line by line along the X-axis direction and the Y-axis direction according to the calculated angle group, the following steps are adopted: E1: Perform local scanning, obtain the local area matrix, determine the position coordinates of the target area, calculate the distance from the position coordinates of the target area to the center of the optical axis, and determine the reciprocating scanning direction and the step scanning direction; E2: Drive the scanning galvanometer group to control the light beam to move along the reciprocating scanning direction and the stepping scanning direction to the scanning starting position of the target area; E3: After driving the scanning galvanometer group to control the light beam to scan to the edge of the target area along the stepping scanning direction, the scanning galvanometer group is driven to control the light beam to scan to the edge of the target area along the reciprocating scanning direction to obtain L-shaped spectral data; E4: driving the scanning galvanometer group to control the light beam to scan back along the reciprocating scanning direction within a unit time, obtaining error-corrected spectral data in the reciprocating scanning direction, and obtaining the repeatability error in the reciprocating scanning direction by comparing the error-corrected spectral data; E5: driving the scanning galvanometer group to control the light beam to scan back along the step scanning direction within a unit time, obtaining the error correction spectrum data in the step scanning direction, and obtaining the repeatability error in the step scanning direction by comparing the error correction spectrum data; E6: Obtain the repeatability error in the reciprocating scanning direction and the repeatability error in the step scanning direction, set the redundant acquisition area, and control the light beam to scan reciprocally line by line along the X-axis and Y-axis directions according to the calculated angle group to obtain spectral data with a comb-shaped edge shape. Embodiment 4:

[0042] See also Figure 4 This embodiment provides a spectral imaging device based on a scanning galvanometer, and applies a spectral imaging method based on a scanning galvanometer in the above embodiment, including: Light source 1, used for uniformly irradiating the surface of the target object; Object plane 2, used to place the target object and the corresponding reference plate; The semi-transparent and semi-reflective beam splitter 3 is used to reflect the light beam from the light source 1 so that it is vertically irradiated on the surface of the target object, while allowing the light beam reflected by the target object to pass through; A collimating lens group 4 is used to collimate the light beam reflected by the target object to keep it parallel; A scanning galvanometer group is used to control the light beam to scan along the X-axis and Y-axis directions; A focusing lens group 7 is used to focus the scanned light beam to a light beam receiving end of a spectrometer 8; A spectrometer 8, for collecting the spectrum signal of the light beam and converting it into digital data; The main control module 9 is used to deploy a synchronous control algorithm to perform overall control, optimize the scanning path of the scanning galvanometer group during global or local scanning, and save data; The optical paths of the light source 1, the object plane 2, the semi-transparent and semi-reflective beam splitter 3, the collimating lens group 4, the scanning galvanometer group, the focusing lens group 7 and the spectrometer 8 are connected. The scanning galvanometer group includes an X-direction scanning galvanometer 5 for controlling the light beam to scan along the X-axis direction and a Y-direction scanning galvanometer 6 for controlling the light beam to scan along the Y-axis direction. Both the scanning galvanometer group and the spectrometer 8 are data-connected to the main control module 9. The scanning galvanometer group and the spectrometer 8 perform two-dimensional coverage scanning and acquisition under the synchronous control of the main control module 9.

[0043] When this embodiment is working, it can realize a series of tasks such as uniform illumination of the light source 1, straightening of the light beam, scanning of the light beam along the X-axis direction and the Y-axis direction, focusing of the light beam, and collection and generation of spectral data. It has a high degree of automation and can realize rapid scanning of the target area by optimizing and controlling the continuous deflection characteristics of the scanning galvanometer group. The scanning galvanometer group and the spectrometer 8 are used to perform two-dimensional coverage scanning and collection under the synchronous control of the main control module 9, which ensures the integrity and consistency of the data during the scanning process, provides higher flexibility and efficiency for application scenarios, and has high collection efficiency and good detection performance.

[0044] Preferably, the light source 1 is installed at the starting position of the system optical path, the semi-transparent and semi-reflective beam splitter 3 is arranged at an angle, the center of the semi-transparent and semi-reflective beam splitter 3 is kept flush with the center of the light source 1 and is aligned with the optical axis center of the object plane 2 and the optical axis center of the collimating lens group 4, the optical axis of the collimating lens group 4 coincides with the optical axis of the light input end of the scanning galvanometer group, and the optical axis of the focusing lens group 7 coincides with the optical axis of the light output end of the scanning galvanometer group.

[0045] In a specific implementation, a plurality of image points at the imaging part of the spectrometer 8 are arranged to correspond one-to-one with a plurality of object points arranged on the object plane 2 to achieve correct spectral data collection.

[0046] Preferably, the X-direction scanning galvanometer 5 and the Y-direction scanning galvanometer 6 are optically connected and are respectively arranged at the light input end and the light output end or the light output end and the light input end of the scanning galvanometer group. In a specific implementation, the scanning galvanometer group also includes an X-direction swing device and a Y-direction swing device. The X-direction scanning galvanometer 5 is installed on the swinging part of the X-direction swing device, and the Y-direction scanning galvanometer 6 is installed on the swinging part of the Y-direction swing device. Both the X-direction swing device and the Y-direction swing device are data-connected to the main control module 9 to accurately control the angles of the X-direction scanning galvanometer 5 and the Y-direction scanning galvanometer 6.

[0047] As a further improvement of this embodiment, the spectrometer 8 is configured as a fiber spectrometer 8, and the interior of the spectrometer 8 is provided with a collimating lens, a grating spectroscopic system, a focusing lens and a linear array CCD imaging system to convert the collected spectral signals into digital data to complete the precise measurement of the spectral information at a specific point. The main control module 9 includes a main control board and at least one computing power chip.

[0048] Preferably, it also includes an installation shell, on which the light source 1, the semi-transparent and semi-reflective beam splitter 3, the object plane 2, the collimating lens group 4, the scanning galvanometer group, the focusing lens group 7, the spectrometer 8 and the main control module 9 are all installed to protect the various components and maintain the relative positions of the various components.

[0049] The beneficial technical effects of this embodiment include: the present invention can realize a series of tasks such as uniform illumination of the light source, straightening of the light beam, scanning of the light beam along the X-axis and Y-axis directions, focusing of the light beam, and collection and generation of spectral data, with a high degree of automation and reduced dependence on high-performance control equipment. The spectral data collection in the push-scan imaging mode can be realized only by controlling the light beam to scan along the X-axis and Y-axis directions through the scanning galvanometer group provided in the spectral imaging device, which combines performance and economy, with high collection efficiency and good detection performance.

[0050] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that the present invention includes but is not limited to the contents described in the drawings and the above specific embodiments. Any modification that does not deviate from the functional and structural principles of the present invention will be included in the scope of the claims.

Claims

1. A spectral imaging method based on a scanning galvanometer, characterized in that: The following steps are involved: S1: Spectral imaging device initialization; S2: Place the reference plate and the target object, and evenly illuminate the surface of the target object through the light source (1); S3: Straighten the light beam reflected from the surface of the target object to obtain a highly directional and parallel light beam; S4: controlling the light beam to scan along the X-axis direction and the Y-axis direction through a scanning galvanometer group provided in the spectral imaging device to locate and collect the light beam reflected by the target object; S5: focusing the light beam, and collecting and generating spectral data of the target object through a spectrometer (8) provided in the spectral imaging device.

2. The spectral imaging method based on scanning galvanometer according to claim 1, characterized in that: In the step S1, the following steps are also included: A1: Spectral imaging device is initialized and scanning galvanometer group is reset; A2: Place the reference plate, illuminate the reference plate with the light source (1), and the scanning galvanometer group moves, and the spectrometer (8) collects the reference plate signal; A3: Adjust the control parameters of the spectrometer (8) to adjust the maximum value of the reference plate signal intensity to the preset reference value; A4: Turn off the light source (1) and block the light to collect dark background signals; A5: Place a white field, illuminate the white field with the light source (1), and the scanning galvanometer group moves, and the spectrometer (8) collects the white field signal.

3. The spectral imaging method based on scanning galvanometer according to claim 2, characterized in that: In step S5, when focusing the light beam and collecting and generating spectral data of the target object through a spectrometer (8) provided in the spectral imaging device, the following steps are adopted: B1: focusing the light beam and collecting and generating spectral data of the target object through a spectrometer (8) provided in the spectral imaging device to obtain a target object signal and a reference plate signal; B2: Perform black field correction on the collected white field signal, reference plate signal, and target object signal, and after obtaining the white field signal, reference plate signal, and target object signal after black field correction, perform white field correction on the target object signal after black field correction; B3: Perform illumination change correction on the target object signal and the reference plate signal after white field correction to obtain the corrected target object signal and the reference plate signal; B4: The reflectivity of the target object is obtained by calculating the ratio of the corrected target object signal to the reference plate signal after white field correction.

4. The spectral imaging method based on scanning galvanometer according to claim 3, characterized in that: In the step B1, the collected white field signal, the reference plate signal, and the target object signal are subjected to black field correction to obtain the white field signal, the reference plate signal, and the target object signal after black field correction. When the target object signal after black field correction is subjected to white field correction, the following steps are adopted: C1: Perform black field correction on the collected white field signal, reference plate signal, and target object signal to obtain the white field signal, reference plate signal, and target object signal after black field correction using the following formula: ； ； ； in: It is the white field signal after black field correction; It is the white field signal before black field correction; It is the reference board signal after black field correction; It is the reference plate signal before black field correction; It is the target object signal after black field correction; It is the target object signal before black field correction; is a dark background signal; is the wavelength dimension; is the X-axis coordinate of the target point; is the Y-axis coordinate of the target point; is the scanning cycle; C2: When performing white field correction on the target object signal after black field correction, the following formula is used: ； in: It is the target object signal after white field correction; In step B3, the target object signal and the reference plate signal after white field correction are corrected for illumination variation over time, and the following formula is used to obtain the corrected target object signal and the reference plate signal: ； ； in: is the corrected target object signal; is the corrected reference board signal; In step B4, the reflectivity of the target object is obtained by calculating the ratio of the corrected target object signal to the white field corrected reference plate signal using the following formula: ； in: is the reflectivity of the target object.

5. The spectral imaging method based on scanning galvanometer according to claim 3, characterized in that: In step S4, when the light beam is controlled to scan along the X-axis direction and the Y-axis direction by the scanning galvanometer group provided in the spectral imaging device to locate and collect the light beam reflected by the target object, the following steps are adopted to perform a local scan, obtain a local area matrix, determine the position coordinates of the target area, calculate the angle group at which the scanning galvanometer group controls the light beam to scan along the X-axis direction and the Y-axis direction, and control the light beam to scan reciprocally line by line along the X-axis direction and the Y-axis direction according to the calculated angle group.

6. The spectral imaging method based on scanning galvanometer according to claim 5, characterized in that: In the step S5, when focusing the light beam and collecting the spectral data of the target object through the spectrometer (8) provided in the spectral imaging device, the following steps are adopted to focus the light beam and collect the spectral data of the target object through the spectrometer (8) provided in the spectral imaging device to obtain the target object signal and the reference plate signal, and the target object signal is set to ,in The scanning galvanometer group controls the scanning angle of the light beam along the X-axis direction. The scanning galvanometer group controls the scanning angle of the light beam along the Y-axis direction.

7. A spectral imaging device based on a scanning galvanometer, using a spectral imaging method based on a scanning galvanometer as claimed in any one of claims 1 to 6, characterized in that: include: A light source (1) is used to evenly illuminate the surface of the target object; An object plane (2) for placing the target object and the corresponding reference plate; A semi-transparent and semi-reflective beam splitter (3) is used to reflect the light beam of the light source (1) so that it is vertically irradiated onto the surface of the target object, while allowing the light beam reflected by the target object to pass through; A collimating lens group (4), used to collimate the light beam reflected by the target object so as to keep it parallel; A scanning galvanometer group is used to control the light beam to scan along the X-axis and Y-axis directions; A focusing lens group (7) is used to focus the scanned light beam onto a light beam receiving end of a spectrometer (8); A spectrometer (8) for collecting spectral signals of the light beam and converting them into digital data; A main control module (9) is used to deploy a synchronous control algorithm to perform overall control, optimize the scanning path of the scanning galvanometer group during global or local scanning, and save data; The light path of the light source (1), the object plane (2), the semi-transparent and semi-reflective beam splitter (3), the collimating lens group (4), the scanning galvanometer group, the focusing lens group (7) and the spectrometer (8) is connected; the scanning galvanometer group comprises an X-direction scanning galvanometer (5) for controlling the light beam to scan along the X-axis direction and a Y-direction scanning galvanometer (6) for controlling the light beam to scan along the Y-axis direction; the scanning galvanometer group and the spectrometer (8) are both data-connected to a main control module (9); the scanning galvanometer group and the spectrometer (8) perform two-dimensional coverage scanning and acquisition under the synchronous control of the main control module (9).

8. The spectral imaging device based on a scanning galvanometer according to claim 7, characterized in that: The light source (1) is installed at the starting position of the system optical path, the semi-transparent and semi-reflective beam splitter (3) is arranged at an angle, the center of the semi-transparent and semi-reflective beam splitter (3) is kept flush with the center of the light source (1) and is aligned with the optical axis center of the object plane (2) and the optical axis center of the collimating lens group (4), the optical axis of the collimating lens group (4) coincides with the optical axis of the light input end of the scanning galvanometer group, and the optical axis of the focusing lens group (7) coincides with the optical axis of the light output end of the scanning galvanometer group.

9. The spectral imaging device based on a scanning galvanometer according to claim 7, characterized in that: A plurality of image points at an imaging portion in the spectrometer (8) are arranged in one-to-one correspondence with a plurality of object points provided on the object plane (2).

10. The spectral imaging device based on scanning galvanometer according to claim 7, characterized in that: The X-direction scanning galvanometer (5) and the Y-direction scanning galvanometer (6) are optically connected and are respectively arranged at the light input end and the light output end or the light output end and the light input end of the scanning galvanometer group.

Images